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Journal articles on the topic 'MEMS Simulation Software'

Author: Grafiati

Published: 5 June 2025

Last updated: 15 July 2025

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Arpana, Niranjan, and Gupta Pallavi. "Modeling and Simulation Software in MEMS Design." International Journal of Engineering and Advanced Technology (IJEAT) 9, no. 3 (2020): 2501–6. https://doi.org/10.35940/ijeat.C5770.029320.

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Micro-Electro-Mechanical Systems (MEMS) is a process technology that combines mechanical and electrical components to make micro-scale range devices. A considerable cost of the device can be reduced if we simulate the design. There are many available simulation software to choose from, which in turn is one of the major challenge. The paper explores the functional and technical features of some software used in MEMS designing. It further presents the key points which we should acknowledge while selecting software. Basic features are available in all MEMS Simulation software. However, if the design involves specific physics, geometry, material or meshing, the search must be done to find the appropriate software. If the user intends to fabricate the device then software with a virtual fabrication tool needs to be selected.

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Nazrin Ismail, Muhamad, Noriah Yusoff, Nor Hayati Saad, and Amirul Abd Rashid. "Design and Simulation of MEMS Moisture Sensor Using COMSOL Multiphysics Software." International Journal of Engineering & Technology 7, no. 4.26 (2018): 141. http://dx.doi.org/10.14419/ijet.v7i4.26.22155.

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Micro-electro-mechanical system (MEMS) is a hybrid technology that combines electronic, electric and mechanical technology in a micron-size system. This allowed for higher performance and multifunction devices fabricated at much lighter weight and cost effective. One of the major application of MEMS is in sensor devices area. This paper highlight the simulation study of a typical moisture sensor fabricated from Tungsten Interdigitated (IDE) MEMS device. Using COMSOL Multiphysics software, the moisture sensor was modelled based on the current material and physical dimension and layout. The model then go through validation proses to its sensitivity performance against the experimental result. Subsequently, the optimization on sensor sensitivity was carried out by varying the model parameters including the sensor physical dimension, working temperature and humidity. The simulation result suggest that the sensor sensitivity is highly correlated to the electrode distance value. The average sensitivity of the sensor improved to ~48% better when the distance between reduced to 50% from 6 micron to 3 micron tested at temperature between 25 ̊ C to 45 ̊ C. This information is valuable as the input to the sensor designer in finalizing the MEMS physical layout in producing highly sensitive moisture sensor devices.

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Ma, Wen Rui, and Guang He. "Effect of Strain Rate on the Simulation of MEMS Safety and Arming Device." Key Engineering Materials 609-610 (April 2014): 849–55. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.849.

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Under launch impact load, LIGA nickel that manufacturing MEMS fuze safety and arming (S&A) device will have obvious strain rate effect. By using finite element analysis software ANSYS/LS-DYNA, simulation models of a small-caliber ammunition MEMS fuze setback S&A device with strain rate effect and without strain rate effect were respectively established. The results of the two simulation modules were quite different. Comparisons between experimental results and simulation results show that simulation results considering strain rate effect agree well with experimental results, which proves strain rate effect should not be ignored in the simulation of MEMS S&A device.

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Colombo, Fabio B., Paula M. Hokama, Fernando Tsuda, et al. "3D Simulation Software for Visualization of MEMS Microfabrication Processes." ECS Transactions 14, no. 1 (2019): 99–108. http://dx.doi.org/10.1149/1.2956023.

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Wu, Rui, and Ming Xin Song. "Microwave Performance Simulation of RF-MEMS Switch." Advanced Materials Research 981 (July 2014): 564–67. http://dx.doi.org/10.4028/www.scientific.net/amr.981.564.

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This paper presents the calculation model of capacitive RF-MEMS switch for the isolation and insertion loss, and then adopts CST software to simulate microwave performances. The simulation results show that return loss can reach-21.5dB and isolation can reach-0.26dB when the distance between contacting metal and dielectric layer adopts 2ڌ̏̽, 6×?103ڌ̏̽2 of contacting area and 20ڌ̏̽ of groove depth.

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Dai, Ke Ren, Xiao Feng Wang, Wu Shuang Lv, and Zheng You. "Study on a Planar Interdigitated MEMS Supercapacitor Using Modeling and Simulation Method." Key Engineering Materials 645-646 (May 2015): 513–16. http://dx.doi.org/10.4028/www.scientific.net/kem.645-646.513.

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In this paper, a modeling and simulation method for planar interdigitated ruthenium oxide MEMS supercapacitor was proposed based on the electrochemical reaction mechanism of supercapacitor. The study simulated the planar interdigitated ruthenium oxide MEMS super capacitor using Comsol software. The highly accurate charge and discharge curves of the super capacitor, electric potential distribution graph and the concentration distribution graph were got through simulation. The effects of two structure-parameters were discussed in the research.

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N, Divya, Jyothi V, and Rajesh Kumar B. "Design & Simulation of MEMS Accelerometer Using COMSOL Multiphysics Software." International Journal of Engineering Trends and Technology 20, no. 5 (2015): 244–47. http://dx.doi.org/10.14445/22315381/ijett-v20p247.

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Zhou, Yi, Xiao Pin Liao, and Jian Bin Xiao. "Simulation and Design on Structure for Experimental Verification of Dielectric Charging of Millimeter-Wave MEMS Switches." Key Engineering Materials 483 (June 2011): 158–63. http://dx.doi.org/10.4028/www.scientific.net/kem.483.158.

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Lifetimes of RF MEMS (Micro-electro-mechanical systems) capacitive switches are hindered by dielectric charging effects. A novel test structure for experimental verification of millimeter-wave MEMS switch dielectric accumulation charge is presented. The structure, which is designed using EM simulation software CST Microwave Studio and HFSS, consists of Coplanar Waveguide (CPW), a 2-way power divider and two symmetric capacitive MEMS switches. The input signal is equally divided into two output signals in the 2-way power divider due to symmetry, and the isolation between two output ports the power divider of is less than -48dB at 35GHz. The designed millimeter-wave capacitive MEMS shunt switch has 0.076dB insertion and -55dB isolation at 35GHz. The two symmetric capacitive MEMS switches in this structure can provide a strong comparability for different switch dielectric accumulation charge situations.

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Zhang, Ping, Chun Lei Sun, and Qing’en Li. "Study and Simulation of Electro-Mechanical Sensor." Advanced Materials Research 282-283 (July 2011): 440–43. http://dx.doi.org/10.4028/www.scientific.net/amr.282-283.440.

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The relevant introduction development of the micro electromechanical systems (MEMS) is carried out in this paper. The pressure sensor is an important component of micro electromechanical systems (MEMS). Many aspects of the pressure sensor are studied，simulated and analyzed by us. The principle of work of the pressure sensor is elaborated in details and the material selection is studied also. The correlative performance indexes, such as precision and the repeatability of pressure sensor, are explored. In the following part of this paper, through the finite element simulation software, the analytic study of some performance parameters of the sensor chip is carried out in detail. Through the analysis, we find that the sensor designed here has many advantages.

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Mohd Mustapha, Haslinawati, Mohd Ambri Mohamed, Azrul Azlan Hamzah, and Burhanuddin Yeop Majlis. "Dynamic Characteristics of Circular and Square Graphene Diaphragm for Capacitive Microphone." Materials Science Forum 889 (March 2017): 243–47. http://dx.doi.org/10.4028/www.scientific.net/msf.889.243.

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This research focuses on the diaphragm design of the graphene MEMS capacitive microphone. Simulation part will be first involved in order to get the optimum dimensions of each elements by COMSOL multiphysics simulation software. This study will discussed on mechanical behavior of graphene diaphragm for MEMS capacitive microphone. First stage will implicated a theoretical model of diaphragm MEMS capacitive microphone. Then, boundary element based simulation with some mathematical formula will be used to design and evaluate the model. The output value of selective parameters such as the thickness and diameter of diaphragm, air gap and others are crucial in order to further fabricate the MEMS capacitive microphone. The proposed design of graphene diaphragm are in circular shape and square shape. The mechanical sensitivity of diaphragm with the pressure changes will be the crucial parameters in early stage. The results revealed that the circular shape diaphragm shows the better deflection with the thicker diaphragm gives the lower deflection. Von mises stress for both diaphragm shape also recorded in order to avoid the failure of the proposed design.

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Tran, Tan Duc. "DEVELOPMENT OF A NEW STRUCTURE OF 3-DOF PIEZORESISTIVE ACCELEROMETER TO ENHANCE THE SENSITIVITY." Science and Technology Development Journal 13, no. 2 (2010): 57–65. http://dx.doi.org/10.32508/stdj.v13i2.2111.

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Nowadays, the Micro Electro Mechanical System (MEMS) technology’ has been achieved great developments. Accelerometer is one kind of the most popular MEMS sensors due to it's widely applications. In order to fabricate any MEMS device, the design and simulation have been considered seriously. This paper presents a new design of the three degrees of freedom piezoresistive accelerometer to improve the sensitivity, urgent demand from the reality. The ANSYS software was utilized to design, simulate and evaluate the advantages of this new structure compared to other sensors fabricated previously.

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Song, Yi Bo, and Zhi Gang Yan. "Design and Simulation of a MEMS Torsional Micromirror." Advanced Materials Research 694-697 (May 2013): 1553–57. http://dx.doi.org/10.4028/www.scientific.net/amr.694-697.1553.

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In this paper, we designed an electrostatic driving MEMS torsional micromirror. The operation principle of the torsional micromirror is analyzed. Based on the analysis, a set of optimized design parameters of the micromirror is suggested. The design optimization of the micromirror is also performed with MathCAD software. At last an ANSYS simulation is achieved in the paper, which proves that the micromirror can provide a maximum workable torsional angle rotation of ±0.55º with corresponding driving voltage of 17.5V.

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Dai, Qiang, Bin Xu, Jia Xin Yu, Gang Jiang, Dan Lu Song, and Yong Cai. "Multi-Fields Simulation Model for Micro-Machined Capacitive Accelerometer." Advanced Materials Research 503-504 (April 2012): 842–46. http://dx.doi.org/10.4028/www.scientific.net/amr.503-504.842.

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To cope with the multi-physics fields simulation in MEMS device, based on PSPICE software, a multi-fields simulation model of capacitive micro-accelerometer is proposed, in which the mechanics, thermal and electric fields are included. Through the comparison of maximum step and pulse acceleration response under large displacement condition, which are obtained by simulation model and classic formula respectively, it is indicated that the difference between them is less than 3%. Furthermore, the comparison has been done with sensitivity test results in open loop mode. The comparison results show that the difference is less than 5% for large displacement situation and 3% for little displacement situation. Hence, the model could basically accomplish multi-physics fields simulation in MEMS device and be helpful in further research.

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Deng, Zhong Liang, and Xing Jie Cao. "Design and Simulation of K Band RF MEMS Tunable Combline Filter." Advanced Materials Research 875-877 (February 2014): 2219–23. http://dx.doi.org/10.4028/www.scientific.net/amr.875-877.2219.

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Tunable bandpass filters are generally preferred and are used extensively in the mobile communication systems. In this paper, a design of the RF MEMS tunable combline bandpass filter is proposed. Firstly, the theory of the RF MEMS tunable combline bandpass filter is presented. Secondly, a combline bandpass filter which have a tunable frequency range from 18GHz to 27GHz is designed and simulated by using the EDA simulation software. Its bandwidth is about 1GHz in the tunable frequency range. From the simulation results, the designed filter is not only compact and effortless to fabricate but also relatively superior in some aspects.

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Zhao, Li Bo, En Ze Huang, Gui Ming Zhang, et al. "A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever." Key Engineering Materials 483 (June 2011): 374–77. http://dx.doi.org/10.4028/www.scientific.net/kem.483.374.

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A kind of fluid density sensor based on MEMS (Micro-Electro-Mechanical-System) technology is introduced with trapezoidal cantilever structure. The rectangular cantilever and trapezoidal cantilever, based on the same parameters, are analyzed. The simulation results show that the sensitivity of trapezoidal cantilever is higher than that of rectangular cantilever. Four different sizes of trapezoidal cantilever are analyzed by modal and harmonic simulation with ANSYS Software, the optimum solution will be obtained from simulation results.

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Chen, Yin Jun, Qing Hua Chen, Yan Mei Li, and Wen Gang Wu. "Coupled-Field Finite Element Analysis of MEMS Compound Electrostatic Actuator by Using the ANSYS Software." Applied Mechanics and Materials 214 (November 2012): 929–34. http://dx.doi.org/10.4028/www.scientific.net/amm.214.929.

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MEMS (Microelectromechanical Systems) electrostatic actuators have been successfully applied in a number of areas, including accelerometers, gyroscopes, pressure sensors, and optical devices. In this paper, the actuator optimization of a silicon bulk-micro machined MEMS compound electrostatic actuator of an optical device is discussed. The actuator uses folded-beam structure to enhance the electromechanical performance. The movable block is connected to the compound electrostatic actuator through unequal-height folded-beam springs. The lower-height springs connect the block with parallel plates, and can convert the descending motion of the plates into out-of-plane tilting motion of the block efficiently Additionally, the block is capable of in-plane motion by applying the driving force of the comb-drive actuator through structural connection. ANSYS FEM simulation is used to extract the device electromechanical performance and resonant frequency of the device. By gradually varying the design parameters in ANSYS simulation, the relationship between the actuator electromechanical performance and various design parameters is derived. The curves of actuator electromechanical performance versus beam length and beam height are derived and they are in good agreement with theoretical prediction. From the analysis it is concluded that the actuator behavior strongly depends upon various actuator parameters. By adjusting design parameters, desired electromechanical performance can be obtained. Based on the simulation results, a set of optimized design parameters for the compound electrostatic actuator is decided. The above-proposed MEMS compound electrostatic actuator may be used for many applications, such as optical device and micro-operating.

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Wen, Hao, and Da Ke Hu. "ARM Based Low Cost Integrated Navigation System Technology Research." Applied Mechanics and Materials 291-294 (February 2013): 2537–42. http://dx.doi.org/10.4028/www.scientific.net/amm.291-294.2537.

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This paper mainly studies the integrated navigation system technology of GPS and microelectronic mechanical system (MEMS) concerning on embedded processor S3C2440A. The system has the advantages of low cost, fast speed and small size, etc., which give wide prospects in a personal navigation application. This paper introduces the system hardware circuit structure design, emphasize on GPS navigation, MEMS inertial device for auxiliary navigation system software algorithm, and use Matlab to do data simulation on system model. The results show that GPS/MEMS inertial component integrated navigation obviously improved relative to separate GPS navigation or Strapdown inertial navigation in the accuracy and application value.

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Sun, Yi, Wenzhong Lou, Hengzhen Feng, and Yuecen Zhao. "Study on Characteristics of Electromagnetic Coil Used in MEMS Safety and Arming Device." Micromachines 11, no. 8 (2020): 749. http://dx.doi.org/10.3390/mi11080749.

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Traditional silicon-based micro-electro-mechanical system (MEMS) safety and arming devices, such as electro-thermal and electrostatically driven MEMS safety and arming devices, experience problems of high insecurity and require high voltage drive. For the current electromagnetic drive mode, the electromagnetic drive device is too large to be integrated. In order to address this problem, we present a new micro electromagnetically driven MEMS safety and arming device, in which the electromagnetic coil is small in size, with a large electromagnetic force. We firstly designed and calculated the geometric structure of the electromagnetic coil, and analyzed the model using COMSOL multiphysics field simulation software. The resulting error between the theoretical calculation and the simulation of the mechanical and electrical properties of the electromagnetic coil was less than 2% under the same size. We then carried out a parametric simulation of the electromagnetic coil, and combined it with the actual processing capacity to obtain the optimized structure of the electromagnetic coil. Finally, the electromagnetic coil was processed by deep silicon etching and the MEMS casting process. The actual electromagnetic force of the electromagnetic coil was measured on a micro-mechanical test system, compared with the simulation, and the comparison results were analyzed.

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Liu, Fang Yi, Wen Zhong Lou, Fu Fu Wang, and Ying Wang. "Theoretical Method Research on a MEMS Safety and Arming Device." Advanced Materials Research 901 (February 2014): 93–97. http://dx.doi.org/10.4028/www.scientific.net/amr.901.93.

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With the intelligent development of small-caliber ammunition, the overall size of the fuze is compressed. In this paper, a theoretical method-energy statistical method has been proposed according to the MEMS S&A device. Taking the slider mass, micro-spring stiffness, latch mechanism size, and initial offset distance into account, the conversion relationship among each part of energy in the process is obtained. For an existing structure of MEMS S&A device, known parameters are utilized to reverse the overload value at arming condition. The ANSYS/LS-DYNA finite element analysis software is used for simulation analysis, thereby confirming the feasibility of theoretical calculations. Also, theoretical calculation error ε is obtained, which to be 0.7%. Energy statistical method and simulation analysis serve as theoretical references for the design of the MEMS S&A device.

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Song, Rong Chang, Gui Lei Wang, Jun Bo Wang, Yue Yue Shen, and Chao Lv. "Design and Simulation of High Efficient MEMS Electrothermal Actuator." Key Engineering Materials 562-565 (July 2013): 504–8. http://dx.doi.org/10.4028/www.scientific.net/kem.562-565.504.

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The paper mainly designs an efficient MEMS electrothermal actuator, with lower voltage input but large displacement output. The calculation method of the actuator considers the convection and radiation besides heat conduction mentioned in most literatures. With the multiphysics simulation by the software Comsol of electrothermal bimorph actuator, the transient effects of thermal convection and thermal radiation on the actuator displacement and the response characteristics of an actuator with a separate heating layer were studied.

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Amendoeira Esteves, Rui, Chen Wang, and Michael Kraft. "Python-Based Open-Source Electro-Mechanical Co-Optimization System for MEMS Inertial Sensors." Micromachines 13, no. 1 (2021): 1. http://dx.doi.org/10.3390/mi13010001.

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The surge in fabrication techniques for micro- and nanodevices gave room to rapid growth in these technologies and a never-ending range of possible applications emerged. These new products significantly improve human life, however, the evolution in the design, simulation and optimization process of said products did not observe a similarly rapid growth. It became thus clear that the performance of micro- and nanodevices would benefit from significant improvements in this area. This work presents a novel methodology for electro-mechanical co-optimization of micro-electromechanical systems (MEMS) inertial sensors. The developed software tool comprises geometry design, finite element method (FEM) analysis, damping calculation, electronic domain simulation, and a genetic algorithm (GA) optimization process. It allows for a facilitated system-level MEMS design flow, in which electrical and mechanical domains communicate with each other to achieve an optimized system performance. To demonstrate the efficacy of the methodology, an open-loop capacitive MEMS accelerometer and an open-loop Coriolis vibratory MEMS gyroscope were simulated and optimized—these devices saw a sensitivity improvement of 193.77% and 420.9%, respectively, in comparison to their original state.

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Liu, Guochang, Wenping Cao, Guojun Zhang, et al. "Design and Simulation of Flexible Underwater Acoustic Sensor Based on 3D Buckling Structure." Micromachines 12, no. 12 (2021): 1536. http://dx.doi.org/10.3390/mi12121536.

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The exploration of marine resources has become an essential part of the development of marine strategies of various countries. MEMS vector hydrophone has great application value in the exploration of marine resources. However, existing MEMS vector hydrophones have a narrow frequency bandwidth and are based on rigid substrates, which are not easy to be bent in the array of underwater robots. This paper introduces a new type of flexible buckling crossbeam–cilium flexible MEMS vector hydrophone, arranged on a curved surface by a flexible substrate. A hydrophone model in the fluid domain was established by COMSOL Multiphysics software. A flexible hydrophone with a bandwidth of 20~4992 Hz, a sensitivity of −193.7 dB, excellent “8” character directivity, and a depth of concave point of 41.5 dB was obtained through structured data optimization. This study plays a guiding role in the manufacture and application of flexible hydrophones and sheds light on a new way of marine exploration.

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Palianysamy, M., M. Raman, S. N. Mohyar, W. M. W. Norhaimi, R. M. Hatta, and Z. Sauli. "Design, Simulation and Characterization of Moly Permalloy Based Electromagnetic Sensor." Applied Mechanics and Materials 229-231 (November 2012): 1441–44. http://dx.doi.org/10.4028/www.scientific.net/amm.229-231.1441.

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In this paper it is shown the design, simulation and characterization of Moly Permalloy based electromagnetic sensor in MEMS software. The dimension of the device is minimized to the smallest the software can simulate which is 1 micron. Total of 9 models had been simulated which differs in thickness of the material and designs. A new design was created to compare the results with the existing designs. The creation of the new design has given better results than the existing designs in terms of the current flow and the magnetic induction.

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Wu, Zhibo, Yanbing Zhang, Chuanmeng Sun, Lei Feng, Shuangfeng Liu, and Bin Jiao. "Simulation Methods for MEMS S&A Devices for 2D Fuze Overload Loading." Micromachines 14, no. 8 (2023): 1566. http://dx.doi.org/10.3390/mi14081566.

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An experimental testing system for the two-dimensional (2D) fuze overload loading process was designed to address the loading issues of recoil overload and centrifugal overload in fuze safety and arming (S&A) device. By incorporating centrifuge rotation energy storage, impact acceleration simulation, and equivalent centrifugal rotation simulation, a block equipped with a fuze S&A device accelerated instantly upon having impact from a centrifuge-driven impact hammer, simulating recoil overload loading. The impact hammer was retracted instantaneously by adopting an electromagnetic brake, which resulted in the centrifugal rotation of the block around its track, to simulate the centrifugal overload loading. The dynamic equations of the experimental testing system and the equations of impact hammer motions were established, whereby the rotation speed of the centrifuge and the braking force of the electromagnetic brake were calculated and selected. A dynamic model of the collision between the impact hammer and block was established using ANSYS/LS-DYNA software for simulation analysis. The acceleration curves of the recoil overload and centrifugal overload with variations in the centrifuge speed, cushion material, and buffer thickness were obtained, which verified the feasibility of the proposed loading simulation method. Two-dimensional overload loading simulation tests were performed using the developed experimental testing system, and the acceleration curves of the recoil overload and centrifugal overload were measured. The test results indicated that the proposed system can accomplish 2D overload loading simulations for a recoil overload of several 10,000× g and centrifugal overload of several 1000× g.

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Liu, Meng, Wei Zhang, and Yi Long Hao. "Design and Simulation for Tri-Axial Piezoresistive MEMS Accelerometer." Key Engineering Materials 503 (February 2012): 312–17. http://dx.doi.org/10.4028/www.scientific.net/kem.503.312.

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This paper presents analytical models for tri-axial accelerometer based on one seismic mass and eight beams. The model makes it possible to better understand and to predict the behavior of the accelerometer. The accelerometer discussed in this paper was designed to measure high g-forces in every single axis. We use finite element mechanics analysis and design for optimization of the device structure. FEA software ANSYS was used to simulate the behavior of the accelerometer when it was subjected to static high-g forces. The analytical results of simulation and theoretical demonstrate that the accelerometer we designed is feasible.

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Siva Kumar, M., K. Srinivas Rao, Sanath Kumar Tulas, G. R. K. Prasad, and K. Hari Kishore. "Cantillever based MEMS pressure sensor." International Journal of Engineering & Technology 7, no. 1.5 (2017): 234. http://dx.doi.org/10.14419/ijet.v7i1.5.9153.

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Objective: We are analyzing the different piezoelectric materials which are best sutable combination for the design of pressure sensors used for the production of voltage.Our main theme is to find which combination gives high voltage.Methods:We are incorporating different layers on the cantilever beam such as piezoelectric material (PZT,BaTiO3), electrode(Pt,Al), insulator(Si3N4) on siliconwafer(SiO2). We had used these materials for MEMS pressure sensor utilizing diverse [different] Piezoelectric materials The relative study by simulation can be utilized to give the rules to a configuration and streamlining of execution of the distinctive piezoelectric micro cantilever pressure sensors.Findings:.We have designed, displayed and simulated our module in COMSOL software taking into account limited component strategy [FEM]. The structure made up of silicon on piezoelectric micro cantilever with cantilever beam. In reenactment [simulation] we have concentrated on varying so as to displacement and voltage connected pressure. It is observed that the induced voltage is practically straight [linear] with the applied forceImprovement:From this design we analysed that at particular dimensions of materialswithcombinationofPZTand Al gives best voltage than remaining combinations like PZT and Pt.

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Khalid, N., N. I. M. Nor, W. M. W. Norhaimi, Zaliman Sauli, and Vithyacharan Retnasamy. "Design and Analysis on Symmetric MEMS Inductor." Applied Mechanics and Materials 815 (November 2015): 364–68. http://dx.doi.org/10.4028/www.scientific.net/amm.815.364.

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This paper presents the design and analysis of new proposed topology micro-electro-mechanical system (MEMS) inductor. This new symmetric MEMS inductor is designed to reduce the total length of the conductor strip and hence reduce the resistance of the metal tracks. This results significant increases in the quality (Q) factor of the inductor. In this paper, the MEMS inductor is designed using CoventorWare®, which is powerful software for MEMS computer aided design (CAD), modeling and simulation. Results indicate that new symmetric inductor topology has thehighest Q-factor and it hasbeenimproved bytwo times compared to circular inductor. The analysis revealed that area of the symmetric inductor has reduced by37.5% compared to the circular inductor. Result has proved that the reduction of length of the conductor strip has reduced the resistance of the metal tracks and results in a high Q-factor inductor.

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Tao, Kai, Gui Fu Ding, Pei Hong Wang, Qi Fa Liu, and Zhuo Qing Yang. "Design and Simulation of Fully Integrated Micro Electromagnetic Vibration Energy Harvester." Applied Mechanics and Materials 152-154 (January 2012): 1087–90. http://dx.doi.org/10.4028/www.scientific.net/amm.152-154.1087.

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A fully integrated micro electromagnetic vibration energy harvester based on MEMS technology is designed and its mechanical and electromagnetic characteristics are analyzed by using Finite Element method (FEM). Structure static, modal and harmonic analysis of spring-magnet system was carried out by ANSYS software. Ansoft Maxwell software was used to simulate the electromagnetic characteristics of the energy conversion system, especially the relationship between the output performances of the structure and parameters of the coil. The optimized model is designed and the optimization principles could provide a reference for the future electromagnetic vibration based harvester design.

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Zhang, Peng, Xiangzheng Kong, Nuo Cheng, Guojun Zhang, Wendong Zhang, and Renxin Wang. "Design and Simulation of MEMS Turbulence Sensor for UUV." Journal of Physics: Conference Series 2832, no. 1 (2024): 012014. http://dx.doi.org/10.1088/1742-6596/2832/1/012014.

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Abstract Based on the piezoresistive effect, MEMS piezoresistive sensors can generate resistance changes with stress variations, making them highly attractive for turbulence detection. Inspired by the lateral line of fish, this paper introduces a bio-inspired beam-cilia vector turbulence sensor. A transient model of the detector under pulsatile flow signals is established using the multi-physics coupling simulation software COMSOL Multiphysics. The cross-sensitivity of the detector’s X and Y channels is 0.16%, demonstrating excellent vector properties. The sensitivity of the detector reaches up to 8.3×10−3 Vms2/kg, significantly higher than traditional PNS shear flow sensor probes. This provides a solution for UUV in deep-sea turbulence detection and opens up new exploration methods for UUV in the deep sea.

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Tang, Zi Rong, M. Rizwan Malik, Tie Lin Shi, J. Gong, L. Nie, and Guang Lan Liao. "Modelling and Fabrication of 3-D Carbon-MEMS for Dielectrophoretic Manipulation of Micro/Nanoparticles in Fluids." Materials Science Forum 628-629 (August 2009): 435–40. http://dx.doi.org/10.4028/www.scientific.net/msf.628-629.435.

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Carbon-MEMS (C-MEMS) have emerged as a new category of devices for micro/nano technology with many potential applications. Dielectrophoretic manipulation of micro/nanoparticles with C-MEMS is studied in this paper. Through electric field distribution modeling in carbon electrode array, we analyze the strongest simulation effect results of electric field in three dimensional (3-D) surface plots depicting the magnitude of electric field in various cross sections at different heights above the channel floor for 2, 10, 30 and 50 μm high carbon electrodes. It is represented here that maximum intensity of electric field generates with the equality between the height above the channel floor and the height of the electrodes. Simulation parameters involved are for dielectrophoretic manipulation of micro/nano particles based on 3-D C-MEMS. The advantages of using 3-D C-MEMS electrodes over other techniques of creating high-throughput systems for dielectrophoretic manipulation environment surrounded by micro/nano horizons are: (i) complex microscale 3-D electrodes with high-aspect ratios can easily be shaped and patterned using conventional lithography (ii) carbon has a high window of stability thus allowing application of higher voltages (iii) there is no need for bulk micromachining or patterning electrodes on multiple planes (iv) the distance between electrodes can precisely be controlled through the lithography process. FEMLAB 3.4 Multiphysics Modeling software (COMSOL, Stockholm, Sweden) is used for the modeling of electric fields and one-layer C-MEMS microelectrode array was fabricated with SU-8 photoresist.

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Wu, Li Feng, Z. Peng, Qing Wen Yan, Wei Zhang, and Fu Xue Zhang. "Design and Implement of Attitude Sensor for High-Speed-Spin Vehicle." Applied Mechanics and Materials 20-23 (January 2010): 1–6. http://dx.doi.org/10.4028/www.scientific.net/amm.20-23.1.

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In order to detect the rolling、pitch and yaw angle of high-speed-spin vehicle, a novel attitude sensor system is designed by using a digital signal processor TMS320F2812. The configuration of the sensor consists of two MEMS sensing elements and signal processing circuit and micro-processor. A new silicon MEMS gyroscope based on the Coriolis effect can sense three angular rate of spin vehicle, which can provide a synthesis signal, including roll, yaw and pitch angular rate. And a MEMS accelerometer reacts on demodulating the three angular rates. The design of the hardware circuit, the algorithm and implement of software are presented. The demodulation algorithm is validated by simulation experiment on the ground and the experimental results are presented.

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Kulha, Pavel, Igor Laposa, Alexandr Laposa, and Miroslav Husák. "FEM Simulation of Quartz Thickness Shear Mode Resonator for Gas Sensing Applications." Key Engineering Materials 605 (April 2014): 569–72. http://dx.doi.org/10.4028/www.scientific.net/kem.605.569.

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The objective of this paper is to present simulation results of the Thickness Shear Mode (TSM) resonator based on quartz using finite element simulation method. 3D model of quartz resonator and simulations were completed using finite element method in CoventorWare software suite for design and simulation of MEMS devices. Different techniques for simulation of adsorption effect on selective layer were studied: influence of change in mass of the sensitive layer and influence of change in density of the sensitive layer. Analyses of resonant modes were performed for both cases and displacement profiles in selected modes were determined for the resonator under study. Impedance and phase characteristics were calculated and measured for clean sample and sample with selective layer coated. The adsorption model calculates the frequency shift in basic resonant frequency with adsorbed amount of sensed gas. The simulation results were used in design of gas sensors for dangerous substances detection.

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Gong, Yan Jue, Fu Zhao, Hui Yu Xiang, and Li Zhang. "Optimization Design of MEMS Thermal Actuator for Food Industry." Key Engineering Materials 467-469 (February 2011): 373–76. http://dx.doi.org/10.4028/www.scientific.net/kem.467-469.373.

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Micro-actuator is the key device for the MEMS to perform physical functions. According to a kind of bimorph thermal actuator, this article presents an optimum design method to improve the sensitivity of MEMS actuator. Based on thermal analysis of software ANSYS, the thermal displacement and distribution of temperature field can be obtained clearly. Then a series of reasonable parameters are determined by optimum calculation. The simulation comparison analyses including thermal displacement, stress distribution and fatigue life are carried out to demonstrate that the sensitivity of the optimized structure has been improved effectively by the presented optimization method.

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Ranjan, Pinku, and Ravi Kumar Gangwar. "Probe Feed Multi-Element Multi-Segment Triangular Dielectric Resonator Antenna with RCS Analysis." Journal of Circuits, Systems and Computers 28, no. 12 (2019): 1950208. http://dx.doi.org/10.1142/s0218126619502086.

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The aim of the paper is to propose a design and analysis of multi-element multi-segment triangular dielectric resonator antenna (MEMS TDRA) with Radar Cross-Section (RCS). The proposed antenna has been excited through coaxial probe feed. The coaxial probe feed excites TM[Formula: see text] dominant mode fields within the TDR elements. A general guideline for wide bandwidth and high gain has been prepared for designing of MEMS TDRA. The model of the proposed MEMS TDRA has been studied through simulation (Ansoft HFSS software) and fabricated for measurement. The simulated antenna performance has good agreement with the measured one. The proposed MEMS TDRA performance has been compared with some similar type of previously published structure and found wider bandwidth and higher gain. The proposed MEMS TDRA provides monopole-like radiation pattern with nearly 39% bandwidth ([Formula: see text] dB). The average gain of 6.0 dBi has been found over the entire bandwidth. The RCS analysis has been performed for monostatic and bistatic modes at different frequencies and angles. The proposed antenna is appropriate for WLAN and WiMAX applications.

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Liu, Yifang, Daner Chen, Yao Zhang, and Tingting Dai. "Simulation and test of the thermal behavior of pressure switch." Modern Physics Letters B 32, no. 11 (2018): 1850138. http://dx.doi.org/10.1142/s0217984918501385.

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Little, lightweight, low-power microelectromechanical system (MEMS) pressure switches offer a good development prospect for small, ultra-long, simple atmosphere environments. In order to realize MEMS pressure switch, it is necessary to solve one of the key technologies such as thermal robust optimization. The finite element simulation software is used to analyze the thermal behavior of the pressure switch and the deformation law of the pressure switch film under different temperature. The thermal stress releasing schemes are studied by changing the structure of fixed form and changing the thickness of the substrate, respectively. Finally, the design of the glass substrate thickness of 2.5 mm is used to ensure that the maximum equivalent stress is reduced to a quarter of the original value, only 154 MPa when the structure is in extreme temperature (80[Formula: see text]C). The test results show that after the pressure switch is thermally optimized, the upper and lower electrodes can be reliably contacted to accommodate different operating temperature environments.

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Zhou, Yong, Yong Dong, and Shi Li. "Analysis of a Curved Beam MEMS Piezoelectric Vibration Energy Harvester." Advanced Materials Research 139-141 (October 2010): 1578–81. http://dx.doi.org/10.4028/www.scientific.net/amr.139-141.1578.

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An analytical model is derived for obtaining the dynamic performance of a thin curved composite piezoelectric beam with variable curvatures for the MEMS piezoelectric vibration energy harvester. The plane curved beam theory with rectangular section is employed to explore the bending and twisting coupling vibration characteristics. In order to satisfy the most available environmental frequencies, which are on the order of 1000Hz, the parameters of the spiraled composite beam bonded with piezoelectric on the surfaces are investigated to provide a method of how to design low resonance beams while keeping the compacting structural assembly. The results indicate the adoption of ANSYS® software to carry out the MEMS piezoelectric vibration energy harvester’s numerical simulation can improve the accuracy of the harvester designing and manufacturing consumedly. And the simulation data also provide a theory analysis foundation for the engineering, design and application of harvester.

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Lou, Wen Zhong, Peng Liu, Kang Li, and Xu Ran Ding. "The Reliability of Micro-Spring under Dynamic Circumstances." Key Engineering Materials 562-565 (July 2013): 1242–45. http://dx.doi.org/10.4028/www.scientific.net/kem.562-565.1242.

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This article mainly focuses on the reliability of micro-spring, which as a typical component of MEMS device, applies electrodeposited nickel material and is fabricated by LIGA process, being used under the circumstances like transporting and restoring which may induce shock and crash. Griffith theory of brittle fracture and Abaqus FEA simulation software are applied for analyzing the probable failure modes of the micro-spring as overloaded. And the principle of elastic deformation, energy-time and displacement-time variation curves are given by three groups of simulation experiments. It proves to be one novel method to evaluate the reliability and accelerate exposing the failure mode of these MEMS components under dynamic circumstances in short period. After comparison, this method is proved reliable for analyzing and providing evidence for enhancing the reliability of the micro-spring, also improving the performance in micron size.

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Zhang, Chang Fu, D. J. Lu, and Zhuang De Jiang. "Study on a MEMS CAD System Based on SolidWorks." Applied Mechanics and Materials 10-12 (December 2007): 772–76. http://dx.doi.org/10.4028/www.scientific.net/amm.10-12.772.

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To enable designers to construct geometric models of MEMS devices in a straightforward environment and get mask and process flow automatically, a 3D MEMS CAD system for surface micromachined devices is proposed based on traditional design software—SolidWorks. With Application Programming Interfaces (APIs) of SolidWorks, component modules and databases of the system are developed with Visual Basic, such as geometric model design module, mask and process flow generation module, process simulation module, 3D feature database and material database. Their development method is discussed in this paper. A practical example shows that surface micromachined devices can be designed efficiently in the system without tedious fabrication process.

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Baghdadi, Hajar, Mohamed Lamhamdi, and Karim Rhofir. "Features measurement analysis of pull-in voltage for embedded MEMS." International Journal of Reconfigurable and Embedded Systems (IJRES) 11, no. 2 (2022): 146. http://dx.doi.org/10.11591/ijres.v11.i2.pp146-156.

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<p>The embedded micro electro mechanical systems (MEMS) is a technology that is creating a new era in all fields and especially in the internet of things (IoT) field. MEMS are necessary components for the realization of tiny micro/nano circuits. For this reason, designers are facing many challenges in designing embedded MEMS for achieving efficient products. The pull-in voltage is one of the most important parameters of MEMS design. In this work, we are interested in the analysis of some geometrical and mechanical parameters for the pull-in. The objective is to study of the concept of pull-in voltage in order to reduce it. First, we made a simulation to choose the appropriate material achieving a lower pull-in voltage. Then, we analysed the impact of geometrical parameters on the pull-in voltage. In this work, Finite element method using COMSOL Multiphysics® software is employed to compute the Pull-in voltage and study the behaviour of the MEMS Switch in order to optimize it. Pull-in voltage can be reduced by careful selection of the cantilever material and it can be further reduced by changing the beam parameters.</p>

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Hajar, Baghdadi, Lamhamdi Mohamed, and Rhofir Karim. "Features measurement analysis of pull-in voltage for embedded MEMS." International Journal of Reconfigurable and Embedded Systems (IJRES) 11, no. 2 (2022): 146–56. https://doi.org/10.11591/ijres.v11.i2.pp146-156.

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The embedded micro electro mechanical systems (MEMS) is a technology that is creating a new era in all fields and especially in the internet of things (IoT) field. MEMS are necessary components for the realization of tiny micro/nano circuits. For this reason, designers are facing many challenges in designing embedded MEMS for achieving efficient products. The pull-in voltage is one of the most important parameters of MEMS design. In this work, we are interested in the analysis of some geometrical and mechanical parameters for the pull-in. The objective is to study of the concept of pull-in voltage in order to reduce it. First, we made a simulation to choose the appropriate material achieving a lower pull-in voltage. Then, we analysed the impact of geometrical parameters on the pull-in voltage. In this work, Finite element method using COMSOL Multiphysics® software is employed to compute the Pull-in voltage and study the behaviour of the MEMS Switch in order to optimize it. Pull-in voltage can be reduced by careful selection of the cantilever material and it can be further reduced by changing the beam parameters.

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Das, Indrajit Chandra, Md Arafat Rahman, and Sanjoy Dam. "Design, Simulation & Optimization of a MEMS Based Piezoelectric Energy Harvester." International Journal of Scientific & Engineering Research 12, no. 07 (2021): 318–29. http://dx.doi.org/10.14299/ijser.2021.07.03.

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Energy harvesting is defined as a process of acquiring energy surrounding a system and converting it into electrical energy for usage. Piezoelectric energy harvesting is a very important concept in energy harvesting in microelectronics. In this report, an analysis of the cantilever type piezoelectric energy harvester is conducted using the finite element method (FEM) based software COMSOL Multiphysics. A unimorph type cantilever beam of the silicon substrate, structural steel as proof mass and support, and PZT-5A material as piezoelectric constitute the physical system.

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Feng, Hongbo, Jiabin Zhao, Chengsi Zhou, and Mingxin Song. "Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars." Sensors 22, no. 22 (2022): 8864. http://dx.doi.org/10.3390/s22228864.

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Conventional parallel capacitive RF MEMS switches have a large impact during the suction phase. In general, RF MEMS switches have to be switched on and off in a considerably fast manner. Increasing the driving voltage enables fast switching but also increases the impact force, which causes the beam membrane to be prone to failure. In the present study, the addition of two support pillars was proposed for slowing down the fall of the beam membrane based on the conventional RF MEMS parallel switch, so as to reduce the impact velocity. As such, a novel RF MEMS switch was designed. Further, simulation software was used to scan and analyze the positioning and height of the support pillars with respect to electromechanical and electromagnetic performance. The simulation results show that the optimal balance of impact velocity and pull-in time was achieved at a height of 0.8 um, a distance of 10 um from the signal line, and an applied voltage of 50 V. The impact velocity was reduced from 1.8 m/s to 1.1 m/s, decreasing by nearly 40%. The turn off time increased from 3.9 us to 4.2 us, representing an increase of only 0.05%. The insertion loss was less than 0.5 dB at 32 GHz, and the isolation was greater than 50 dB at 40 GHz.

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Bai, Bing, Cun Li, and Yulong Zhao. "Development of V-Shaped Beam on the Shock Resistance and Driving Frequency of Micro Quartz Tuning Forks Resonant Gyroscope." Micromachines 11, no. 11 (2020): 1012. http://dx.doi.org/10.3390/mi11111012.

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The application of gyroscopes in harsh environments has always been a hot topic. As a high-quality material for manufacturing gyroscopes, quartz crystals need to be designed and optimized to meet the normal operation of gyroscopes in harsh environments. The Micro Electronics Mechanical System(MEMS) quartz tuning forks resonant gyroscope is one of the quartz gyroscopes. The elastic structure (V-shaped beam) between the anchor support point and tuning forks plays a vital role in the MEMS quartz tuning forks resonant gyroscope. This structure determines the natural frequency of the gyroscope, and more importantly, determines the shock resistance of the gyroscope structure. In this article, the MEMS quartz tuning forks gyroscope with different V-shaped beam thicknesses are simulated and analyzed by finite element analysis simulation software. After the modal analysis and shock simulation (the half-cycle sine shock pulse with amplitude of 1500 g (g is the acceleration of gravity) and duration of 2 ms in the six shock directions), the results show that when the beam thickness is 80 μm, the maximum stress is 94.721 MPa, which is less than the failure stress of quartz crystal. The gyroscope’s shock resistance is verified through shock testing.

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Dr., K. Durga Aparna, L. V. Nagasree K., and Lalitha Devi G. "Design and Fabrication of Mems U-Shaped Cantilever." International Journal of Recent Technology and Engineering (IJRTE) 11, no. 6 (2023): 80–83. https://doi.org/10.35940/ijrte.F7496.0311623.

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<strong>Abstract: </strong>MEMS are used in acceleration, flow, pressure and force sensing applications on the micro and macro levels. The fundamental part of every sensor is the transducer which converts the measurend of intrest into and interpretable output signal. The most prominent transducer is the piezoresistive cantilever which translates any signal into an electrical signal.This paper presents the deisgn and fabrication of U shaped cantilever with enhanced sensitivity and stiffness which gives better results than other cantilevers. The simulation results of the cantilevers are designed using COMSOL software. MEMS technology becomes more affordable better and easier to fabricate in increasing quantities. Each layer of fabrication process is quite complex and final fabricated product will tested and used for high end applications.

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Zang, Junbin, Zheng Fan, Penglu Li, et al. "Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film." Micromachines 13, no. 8 (2022): 1317. http://dx.doi.org/10.3390/mi13081317.

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A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with low power supply, such as fingerprint recognition, nondestructive testing, and medical diagnosis. Here, a PMUT based on an aluminum nitride thin-film material is designed and fabricated. First, the eigenfrequencies of the PMUT are studied with multiphysics coupling simulation software, and the relationship between eigenfrequencies and vibration layer parameters is determined. The transmission performance of the PMUT is obtained via simulation. The PMUT device is fabricated in accordance with the designed simple MEMS processing process. The topography of the PMUT vibration layer is determined via scanning electron microscopy, and the resonant frequency of the PMUT device is 7.43 MHz. The electromechanical coupling coefficient is 2.21% via an LCR tester.

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Yu, Lei, Jun Wang, Kai Yuan, and Chong Wang. "Three Dimension Thermal and Mechanical Simulation of Microbolometer to Detect Terahertz Wave." Advanced Materials Research 605-607 (December 2012): 2039–44. http://dx.doi.org/10.4028/www.scientific.net/amr.605-607.2039.

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The teraherz (THz) wave in the far-infrared wave band has been showing its value in many areas in life. The detection of THz wave with microbolometer was simulated in this paper. The thermal and mechanical simulation were carried out by Intellisuite, a professional simulation software of MEMS. The influence of micro-bridge structure on the device performance was studied and simulation results showed that the bridge leg shape and width affected mainly on the thermal and mechanical properties of device. A compromise design between the thermal and mechanical properties was obtained in order to maintain the best performance of the device.

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Xue, Jingyun, Hanshan Li, Tao Zeng, Xuebin Liu, and Yinhuan Zhang. "Study on Driving Characteristics of MEMS Electromagnetic Coil Using in the UAV." Journal of Physics: Conference Series 2501, no. 1 (2023): 012037. http://dx.doi.org/10.1088/1742-6596/2501/1/012037.

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Abstract The miniaturization and swarm design of unmanned aerial vehicle (UAV) is a research hotspot. For the current electromagnetic drive mode, the electromagnetic drive device is too large to be integrated in the current technology. This paper presents a new micro electromagnetically driven MEMS driving device, in which the electromagnetic coil is small in size, with a large electromagnetic force. We firstly designed and calculated the geometric structure of the electromagnetic coil, and analysed the model using COMSOL multiphysics field simulation software. We then carried out a parametric simulation of the electromagnetic coil. The simulation result shown that the error between theoretical calculation and the simulation of the mechanical and electrical properties of the electromagnetic coil was less than 2% under the same size. It provides an idea for UAV miniaturization design.

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Aparna, Dr K. Durga, K. L. V. Nagasree, and G. Lalitha Devi. "Design and Fabrication of Mems U-Shaped Cantilever." International Journal of Recent Technology and Engineering (IJRTE) 11, no. 6 (2023): 80–83. http://dx.doi.org/10.35940/ijrte.f7496.0311623.

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MEMS are used in acceleration, flow, pressure and force sensing applications on the micro and macro levels. The fundamental part of every sensor is the transducer which converts the measurend of intrest into and interpretable output signal. The most prominent transducer is the piezoresistive cantilever which translates any signal into an electrical signal.This paper presents the deisgn and fabrication of U shaped cantilever with enhanced sensitivity and stiffness which gives better results than other cantilevers. The simulation results of the cantilevers are designed using COMSOL software. MEMS technology becomes more affordable better and easier to fabricate in increasing quantities. Each layer of fabrication process is quite complex and final fabricated product will tested and used for high end applications.

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Khairul Adly, A. W., Y. Wahab, A. Y. M. Shakaff, and Mazlee Mazalan. "Consideration of Factors Towards Lowering the Natural Frequency of MEMS Based Cantilever Structure: Top Mass versus Back Etch Design." Applied Mechanics and Materials 780 (July 2015): 39–44. http://dx.doi.org/10.4028/www.scientific.net/amm.780.39.

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The ability to self-energize wireless sensor node promote the popularity of energy harvesting technique especially by using ambient vibration as the source of energy. In addition, the successful integration of the energy harvesting element on the same wafer as a wireless sensor node will promote the production in the MEMS scale and will reduce the overall cost of production. The usage of the cantilever structure as the transducer for converting mechanical energy (vibration) due to deflection of cantilever into the electrical energy is possible by depositing piezoelectric material on the cantilever. The usage of cantilever provide the simplest way for fabrication in the MEMS scale and also provide the ability to achieve low natural frequency. This paper present the work done on the simulation of the cantilever structure with the top end and back etch proof mass towards achieving low natural frequency in the MEMS scale by using IntelliSuite software.

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Mirza, Asif, Nor Hisham Hamid, Mohd Haris Md Khir, Khalid Ashraf, M. T. Jan, and Kashif Riaz. "Design, Modeling and Simulation of CMOS-MEMS Piezoresistive Cantilever Based Carbon Dioxide Gas Sensor for Capnometry." Advanced Materials Research 403-408 (November 2011): 3769–74. http://dx.doi.org/10.4028/www.scientific.net/amr.403-408.3769.

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This paper reports design, modeling and simulation of MEMS based sensor working in dynamic mode with fully differential piezoresistive sensing for monitoring the concentration of exhaled carbon dioxide (CO2) gas in human breath called capnometer. CO2 being a very important biomarker, it is desirable to extend the scope of its monitoring beyond clinical use to home and ambulatory services. Currently the scope of capnometers and its adaption is limited by high cost, large size and high power consumption of conventional capnometers . In recent years, MEMS based micro resonant sensors have received considerable attention due to their potential as a platform for the development of many novel physical, chemical, and biological sensors with small size, low cost and low power requirements. The sensor is designed using 0.35 micron CMOS technology. CoventorWare and MATLAB have been used as simulation software. According to the developed model and simulation results the resonator has resonant frequency 57393 Hz and mass sensitivity of 3.2 Hz/ng. The results show that the longitudinal relative change of resistance is 0.24%/µm while the transverse relative change of resistance is -0.03%/µm.

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