Log in

Relevant bibliographies by topics / Micro-electromechanical systems (MEMS) / Dissertations / Theses

To see the other types of publications on this topic, follow the link: Micro-electromechanical systems (MEMS).

Dissertations / Theses on the topic 'Micro-electromechanical systems (MEMS)'

Author: Grafiati

Published: 4 June 2021

Last updated: 26 July 2025

Create a spot-on reference in APA, MLA, Chicago, Harvard, and other styles

Select a source type:

Consult the top 29 dissertations / theses for your research on the topic 'Micro-electromechanical systems (MEMS).'

Next to every source in the list of references, there is an 'Add to bibliography' button. Press on it, and we will generate automatically the bibliographic reference to the chosen work in the citation style you need: APA, MLA, Harvard, Chicago, Vancouver, etc.

You can also download the full text of the academic publication as pdf and read online its abstract whenever available in the metadata.

Browse dissertations / theses on a wide variety of disciplines and organise your bibliography correctly.

1

Wong, Christine Y. 1975. "Strategic outsourcing of micro-electromechanical systems (MEMS)." Thesis, Massachusetts Institute of Technology, 2002. http://hdl.handle.net/1721.1/43726.

Full text

Abstract:

Thesis (M.B.A.)--Massachusetts Institute of Technology, Sloan School of Management; and, (S.M.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering; in conjunction with the Leaders for Manufacturing Program at MIT, 2002.<br>"June 2002."<br>Includes bibliographical references (leaves 60-61).<br>ABB Automation is starting to experiment with Micro-electrical Mechanical Systems (MEMS) as an enabling technology for their products. If ABB's implementation of MEMS is found successful, it will be able to create breakthrough products and services that will revolutionize

APA, Harvard, Vancouver, ISO, and other styles

2

Seth, Danny 1978. "A remotely automated microscope for characterizing micro electromechanical systems (MEMS)." Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/86762.

Full text

APA, Harvard, Vancouver, ISO, and other styles

3

Jafaridinani, Kian. "Parameter estimation methods based on binary observations - Application to Micro-Electromechanical Systems (MEMS)." Phd thesis, Supélec, 2012. http://tel.archives-ouvertes.fr/tel-00756675.

Full text

Abstract:

While the characteristic dimensions of electronic systems scale down to micro- or nano-world, their performance is greatly influenced. Micro-fabrication process or variations of the operating situation such as temperature, humidity or pressure are usual cause of dispersion. Therefore, it seems essential to co-integrate self-testing or self-adjustment routines for these microdevices. For this feature, most existing system parameter estimation methods are based on the implementation of high-resolution digital measurements of the system's output. Thus, long design time and large silicon areas are

APA, Harvard, Vancouver, ISO, and other styles

4

Spinello, Davide. "Instabilities in Multiphysics Problems: Micro- and Nano-electromechanical Systems, and Heat-Conducting Thermoelastoviscoplastic Solids." Diss., Virginia Tech, 2006. http://hdl.handle.net/10919/28829.

Full text

Abstract:

We investigate (i) pull-in instabilities in a microelectromechanical (MEM) beam due to the Coulomb force and in MEM membranes due to the Coulomb and the Casimir forces, and (ii) thermomechanical instability in a heat-conducting thermoelastoviscoplastic solid due to thermal softening overcoming hardening caused by strain- and strain-rate effects. Each of these nonlinear multiphysics problems is analyzed by the meshless local Petrov-Galerkin (MLPG) method. The moving least squares (MLS) approximation is used to generate basis functions for the trial solution, and the basis for test functions is

APA, Harvard, Vancouver, ISO, and other styles

5

Khosrowabadi, Allen, Richard Gurr, and Amy Fleishans. "SUBMINIATURE GPS INERTIAL TIME SPACE POSITION INFORMATION." International Foundation for Telemetering, 2000. http://hdl.handle.net/10150/608299.

Full text

Abstract:

International Telemetering Conference Proceedings / October 23-26, 2000 / Town & Country Hotel and Conference Center, San Diego, California<br>In the past few years, GPS has proven itself as an effective source of time space position information (TSPI) data for air vehicles. Currently, GPS truth systems are used to track aircraft ranging from low dynamic vehicles to high dynamic fighters. However, low-cost GPS TSPI instrumentation is not currently available for stores and weapons delivered by air vehicles. To date, data is collected by tracking dropped items using radar or optical means. This

APA, Harvard, Vancouver, ISO, and other styles

6

Maiorca, Felice. "Innovative Electromechanical Transduction Mechanisms for Piezoelectric Energy harvesting from Vibration: Toward Micro and Nano Electro-Mechanical Systems." Doctoral thesis, Università di Catania, 2015. http://hdl.handle.net/10761/3949.

Full text

Abstract:

Vibration energy harvesting is one the hottest topics addressed by a big part of the scientific community. A lot of transduction mechanisms have been investigated and designed, based mechanical systems and transduction principles in order to recover energy coming from environmental vibrations. In this work, innovative transduction mechanisms will be described, suitable to harvesting energy from weak random vibrations, to rectifying and multiplying voltages avoiding the use of classic solutions based on diodes. Innovative devices will be introduced, based on nonlinear mechanical systems and pie

APA, Harvard, Vancouver, ISO, and other styles

7

Voyantzis, Mitchell D. "CloudMEMS Platform for Design and Simulation of MEMS: Physics Modules & End-to-End Testing." University of Toledo / OhioLINK, 2018. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1533226484963866.

Full text

APA, Harvard, Vancouver, ISO, and other styles

8

ISLAM, MOHAMMAD SAIFUL. "Reconfigurable RF and Wireless Architectures Using Ultra-Stable Micro- and Nano-Electromechanical Oscillators: Emerging Devices, Circuits, and Systems." Case Western Reserve University School of Graduate Studies / OhioLINK, 2020. http://rave.ohiolink.edu/etdc/view?acc_num=case1582167898995604.

Full text

APA, Harvard, Vancouver, ISO, and other styles

9

Perry, Richard. "Towards environmentally friendly electrodeposition : using citrate based electrolytes to deposit nickel and nickel-iron." Thesis, University of Edinburgh, 2016. http://hdl.handle.net/1842/16184.

Full text

Abstract:

The production of magnetic materials is of great interest for use in the micro-fabrication industry. In particular, Permalloy (Ni80Fe20) is used in the production of micro-electromechanical systems (MEMS) due to its favourable magnetic properties (high relative permeability, low coercivity and high magnetic saturation). This leads to applications in devices such as inductors, transformers and micro-actuators. The electrodeposition of NiFe is also of fundamental electrochemical interest, as there is anomalous thermodynamic behaviour, with the less noble (iron) metal depositing preferentially to

APA, Harvard, Vancouver, ISO, and other styles

10

Thuau, Damien. "Fabrication and characterisation of carbon-based devices." Thesis, University of Edinburgh, 2012. http://hdl.handle.net/1842/5879.

Full text

Abstract:

Thin film material properties and measurement characterisation techniques are crucial for the development of micro-electromechanical systems (MEMS) devices. Furthermore, as the technology scales down from microtechnology towards nanotechnology, nanoscale materials such as carbon nanotubes (CNTs) are required in electronic devices to overcome the limitations encountered by conventional materials at the nanoscale. The integration of CNTs into micro-electronics and material applications is expected to provide a wide range of new applications. The work presented in this thesis has contributed to t

APA, Harvard, Vancouver, ISO, and other styles

11

Bleiker, Simon J. "Heterogeneous 3D Integration and Packaging Technologies for Nano-Electromechanical Systems." Doctoral thesis, KTH, Mikro- och nanosystemteknik, 2017. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-207185.

Full text

Abstract:

Three-dimensional (3D) integration of micro- and nano-electromechanical systems (MEMS/NEMS) with integrated circuits (ICs) is an emerging technology that offers great advantages over conventional state-of-the-art microelectronics. MEMS and NEMS are most commonly employed as sensor and actuator components that enable a vast array of functionalities typically not attainable by conventional ICs. 3D integration of NEMS and ICs also contributes to more compact device footprints, improves device performance, and lowers the power consumption. Therefore, 3D integration of NEMS and ICs has been propose

APA, Harvard, Vancouver, ISO, and other styles

12

Esu, Ozak O. "Vibration-based condition monitoring of wind turbine blades." Thesis, Loughborough University, 2016. https://dspace.lboro.ac.uk/2134/21679.

Full text

Abstract:

Significant advances in wind turbine technology have increased the need for maintenance through condition monitoring. Indeed condition monitoring techniques exist and are deployed on wind turbines across Europe and America but are limited in scope. The sensors and monitoring devices used can be very expensive to deploy, further increasing costs within the wind industry. The work outlined in this thesis primarily investigates potential low-cost alternatives in the laboratory environment using vibration-based and modal testing techniques that could be used to monitor the condition of wind turbin

APA, Harvard, Vancouver, ISO, and other styles

13

Tanguy, Quentin. "Design and fabrication of a MEMS scanner for OCT imaging endo-microscopic probe." Thesis, Bourgogne Franche-Comté, 2018. http://indexation.univ-fcomte.fr/nuxeo/site/esupversions/8d6ab7ed-eac5-4e11-997b-f9e9af4e8808.

Full text

Abstract:

Les travaux présentés dans cette thèse reposent d'une part sur le design et la modélisation electro-thermo-mécanique d'un micro scanner optique et d'autre part sur sa fabrication, et sa caractérisation ainsi qu'un début d'intégration à un micro interféromètre de Mirau pour le développement d'une sonde endoscopique conçue pour la détection des cancers gastrointestinaux dans leur phase initiale par une technique d'imagerie appelée Tomography de Cohérence Optique (OCT). Le coeur de la contribution de cette thèse porte sur le développement et la fabrication de micro actionneurs commandés thermique

APA, Harvard, Vancouver, ISO, and other styles

14

Yin, Shi. "Integration of epitaxial piezoelectric thin films on silicon." Thesis, Ecully, Ecole centrale de Lyon, 2013. http://www.theses.fr/2013ECDL0039/document.

Full text

Abstract:

Les matériaux piézoélectriques, comme le titanate-zirconate de plomb Pb(ZrxTi1-x)O3 (PZT), l’oxyde de zinc ZnO, ainsi que la solution solide de Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT), sont actuellement l’objet d’études de plus en plus nombreuses à cause de leurs applications innovantes dans les systèmes micro-électromécaniques (MEMS). Afin de les intégrer sur substrat de silicium, certaines précautions doivent être prises en compte concernant par exemple des couches tampon, les électrodes inférieures. Dans cette thèse, des films piézoélectriques (PZT et PMN-PT) ont été épitaxiés avec succès sous for

APA, Harvard, Vancouver, ISO, and other styles

15

Wongtimnoi, Komkrisd. "Polyuréthanes électrostrictifs et nanocomposites : caractérisation et analyse des mécanismes de couplages électromécaniques." Phd thesis, INSA de Lyon, 2011. http://tel.archives-ouvertes.fr/tel-00708574.

Full text

Abstract:

Depuis quelques années on s'intéresse aux actionneurs base polymères, souvent appelés polymères électroactifs électroniques (EAPS) pour intégrer dans des microsystèmes électromécaniques (MEMS). Trois mécanismes sont à l'origine du couplage électromécanique : (i) la piézoélectricité qui apparait dans certaines phases cristallines, (ii) la force "de Maxwell" lorsqu'un champ électrique aux bornes du condensateur constitué d'un polymère souples placé entre deux électrodes, et (iii) l'électrostriction, phénomène intrinsèque aux matériaux polaires, mal connu. Les deux derniers se traduisent par une

APA, Harvard, Vancouver, ISO, and other styles

16

Peng, Shuiran. "Analyse mathématique et numérique de plusieurs problèmes non linéaires." Thesis, Poitiers, 2018. http://www.theses.fr/2018POIT2306/document.

Full text

Abstract:

Cette thèse est consacrée à l’étude théorique et numérique de plusieurs équations aux dérivées partielles non linéaires qui apparaissent dans la modélisation de la séparation de phase et des micro-systèmes électro-mécaniques (MSEM). Dans la première partie, nous étudions des modèles d’ordre élevé en séparation de phase pour lesquels nous obtenons le caractère bien posé et la dissipativité, ainsi que l’existence de l’attracteur global et, dans certains cas, des simulations numériques. De manière plus précise, nous considérons dans cette première partie des modèles de type Allen-Cahn et Cahn-Hil

APA, Harvard, Vancouver, ISO, and other styles

17

Dechev, Nikolai. "Microassembly of 3D microstructures and micro-electromechanical systems (MEMS)." 2004. http://link.library.utoronto.ca/eir/EIRdetail.cfm?Resources__ID=94734&T=F.

Full text

APA, Harvard, Vancouver, ISO, and other styles

18

"Thin Film Transistor Control Circuitry for MEMS Acoustic Transducers." Master's thesis, 2012. http://hdl.handle.net/2286/R.I.15984.

Full text

Abstract:

abstract: ABSTRACT This work seeks to develop a practical solution for short range ultrasonic communications and produce an integrated array of acoustic transmitters on a flexible substrate. This is done using flexible thin film transistor (TFT) and micro electromechanical systems (MEMS). The goal is to develop a flexible system capable of communicating in the ultrasonic frequency range at a distance of 10 - 100 meters. This requires a great deal of innovation on the part of the FDC team developing the TFT driving circuitry and the MEMS team adapting the technology for fabrication on a flexibl

APA, Harvard, Vancouver, ISO, and other styles

19

Pattnaik, Prasant Kumar. "Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors." Thesis, 2005. https://etd.iisc.ac.in/handle/2005/1414.

Full text

APA, Harvard, Vancouver, ISO, and other styles

20

Pattnaik, Prasant Kumar. "Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors." Thesis, 2005. http://etd.iisc.ernet.in/handle/2005/1414.

Full text

APA, Harvard, Vancouver, ISO, and other styles

21

Doreswamy, Santhosh. "A Study of Mode Dependent Energy Dissipation in 2D MEMS Resonators." Thesis, 2014. http://etd.iisc.ac.in/handle/2005/3178.

Full text

Abstract:

With the advent of micro and nano electromechanical systems (MEMS/NEMS), there has been rapid development in the design and fabrication of sensitive resonant sensors. Sensitivity of such devices depends on the resonant frequency and the quality factor (Q). The Q of these devices are dependent on process induced prestress in the structural geometry, interaction with the external environment, and the encapsulation method. For high frequency sensors operating in air and under encapsulation condition, the Q is dominated by structural and fluid-structure interaction losses. In this thesis, we set o

APA, Harvard, Vancouver, ISO, and other styles

22

Doreswamy, Santhosh. "A Study of Mode Dependent Energy Dissipation in 2D MEMS Resonators." Thesis, 2014. http://hdl.handle.net/2005/3178.

Full text

Abstract:

With the advent of micro and nano electromechanical systems (MEMS/NEMS), there has been rapid development in the design and fabrication of sensitive resonant sensors. Sensitivity of such devices depends on the resonant frequency and the quality factor (Q). The Q of these devices are dependent on process induced prestress in the structural geometry, interaction with the external environment, and the encapsulation method. For high frequency sensors operating in air and under encapsulation condition, the Q is dominated by structural and fluid-structure interaction losses. In this thesis, we set o

APA, Harvard, Vancouver, ISO, and other styles

23

Thejas, *. "Exploration of Displacement Detection Mechanisms in MEMS Sensors." Thesis, 2015. http://etd.iisc.ac.in/handle/2005/2760.

Full text

Abstract:

MEMS Sensors are widely used for sensing inertial displacements. The displacements arising out of acceleration /Coriolis effect are typically in the range of 1 nm-1 m. This work investigates the realization of high resolution MEMS inertial sensors using novel displacement sensing mechanisms. Capacitance sensing ASIC is developed as part of conventional electronics interface with MEMS sensor under the conventional CMOS-MEMS integration strategy. The capacitance sense ASIC based on Continuous Time Voltage scheme with coherent and non-coherent demodulation is prototyped on AMS 0.35 m technology.

APA, Harvard, Vancouver, ISO, and other styles

24

Thejas, *. "Exploration of Displacement Detection Mechanisms in MEMS Sensors." Thesis, 2015. http://etd.iisc.ernet.in/handle/2005/2760.

Full text

Abstract:

MEMS Sensors are widely used for sensing inertial displacements. The displacements arising out of acceleration /Coriolis effect are typically in the range of 1 nm-1 m. This work investigates the realization of high resolution MEMS inertial sensors using novel displacement sensing mechanisms. Capacitance sensing ASIC is developed as part of conventional electronics interface with MEMS sensor under the conventional CMOS-MEMS integration strategy. The capacitance sense ASIC based on Continuous Time Voltage scheme with coherent and non-coherent demodulation is prototyped on AMS 0.35 m technology.

APA, Harvard, Vancouver, ISO, and other styles

25

Meng-TaLin and 林孟達. "Application of Micro electromechanical system (MEMS) Processing Modeling Simulation." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/38651311642455278279.

Full text

APA, Harvard, Vancouver, ISO, and other styles

26

Kau, Ming-Lang, and 高銘倫. "Development of microbubble generators using micro electromechanical system (MEMS) technologies." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/x87tt3.

Full text

Abstract:

碩士<br>國立臺北科技大學<br>機電整合研究所<br>96<br>This paper describes device design and manufacturing process to generate single microbubbles for biomedical applications. With MEMS technology several cross-shaped microchannels are designed and fabricated by using the SU-8 photoresist mould and Polydimethylsiloxance (PDMS) material. The microbubble generator controls gas and liquid inlets to segment continuous fluids, referred to as two-phase flow, in the microchannels. The void segments filled with gas thus form initial microbubbles. These microbubbles are then transferred to the next-stage microchannels fo

APA, Harvard, Vancouver, ISO, and other styles

27

Pandey, Ashok Kumar. "Analysis Of Squeeze Film Damping In Microdevices." Thesis, 2003. https://etd.iisc.ac.in/handle/2005/1867.

Full text

Abstract:

There are various energy dissipation mechanisms that affect the dynamic response of microstructures used in MEMS devices. A cumulative effect of such losses is captured by an important characteristic of the structure called Quality factor or Q-factor. Estimating Q-factor at the design stage is crucial in all applications that use dynamics as their principle mode of operation. A high Q-factor indicates sharp resonance that, in turn, can indicate a broad flat response region of the structure. In addition, a high Q-factor typically indicates a high sensitivity. Microstructures used in MEMS are ge

APA, Harvard, Vancouver, ISO, and other styles

28

Pandey, Ashok Kumar. "Analysis Of Squeeze Film Damping In Microdevices." Thesis, 2003. http://etd.iisc.ernet.in/handle/2005/1867.

Full text

Abstract:

There are various energy dissipation mechanisms that affect the dynamic response of microstructures used in MEMS devices. A cumulative effect of such losses is captured by an important characteristic of the structure called Quality factor or Q-factor. Estimating Q-factor at the design stage is crucial in all applications that use dynamics as their principle mode of operation. A high Q-factor indicates sharp resonance that, in turn, can indicate a broad flat response region of the structure. In addition, a high Q-factor typically indicates a high sensitivity. Microstructures used in MEMS are ge

APA, Harvard, Vancouver, ISO, and other styles

29

Lübbe, Jannis Ralph Ulrich. "Cantilever properties and noise figures in high-resolution non-contact atomic force microscopy." Doctoral thesis, 2013. https://repositorium.ub.uni-osnabrueck.de/handle/urn:nbn:de:gbv:700-2013040310741.

Full text

Abstract:

Different methods for the determination of cantilever properties in non-contact atomic force microscopy (NC-AFM) are under investigation. A key aspect is the determination of the cantilever stiffness being essential for a quantitative NC-AFM data analysis including the extraction of the tip-surface interaction force and potential. Furthermore, a systematic analysis of the displacement noise in the cantilever oscillation detection is performed with a special focus on the thermally excited cantilever oscillation. The propagation from displacement noise to frequency shift noise is studied under c

APA, Harvard, Vancouver, ISO, and other styles

We offer discounts on all premium plans for authors whose works are included in thematic literature selections. Contact us to get a unique promo code!