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Journal articles on the topic 'Micro-electromechanical systems (MEMS)'

Author: Grafiati

Published: 4 June 2021

Last updated: 26 July 2025

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1

Kartunov, Stefan. "Micro-Electromechanical Systems In The Ecology." Environment. Technology. Resources. Proceedings of the International Scientific and Practical Conference 2 (August 5, 2015): 163. http://dx.doi.org/10.17770/etr2011vol2.981.

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In the present paper a definition, a model for building of MEMS (micro-electromechanical systems), types, their advantages and disadvantages have been given. The elements and the components, from which they are built, the development and the prediction of market about them have been considered as well more important firms, that manufacture them. A classification of MEMS is made on the basis of their designation and the region, where they operate. A special place is separated on the application of MEMS in the ecology as well as concrete examples are indicated – developments of firms and own one

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Jiang, Zhuangde. "Special issue: Micro-electromechanical systems (MEMS)." Frontiers of Mechanical Engineering 12, no. 4 (2017): 457–58. http://dx.doi.org/10.1007/s11465-017-0492-4.

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Polla, D. L., and L. F. Francis. "Ferroelectric Thin Films in Micro-electromechanical Systems Applications." MRS Bulletin 21, no. 7 (1996): 59–65. http://dx.doi.org/10.1557/s0883769400035934.

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Ferroelectric ceramic thin films fit naturally into the burgeoning field of microelectromechanical systems (MEMS). Microelectromechanical systems combine traditional Si integrated-circuit (IC) electronics with micromechanical sensing and actuating components. The term MEMS has become synonymous with many types of microfabricated devices such as accelerometers, infrared detectors, flow meters, pumps, motors, and mechanical components. These devices have lateral dimensions in the range of 10 μm–10 mm. The ultimate goal of MEMS is a self-contained system of interrelated sensing and actuating devi

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Cao, Huiliang. "Editorial for the Special Issue on Micro-Electromechanical System Inertial Devices." Micromachines 14, no. 12 (2023): 2134. http://dx.doi.org/10.3390/mi14122134.

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5

Shen, Yutong. "Current Status and Application of Micro-electromechanical Systems (MEMS)." Highlights in Science, Engineering and Technology 46 (April 25, 2023): 97–105. http://dx.doi.org/10.54097/hset.v46i.7685.

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MEMS (Micro-electromechanical systems), a technology that produces devices with tiny size and various abilities, has shown its great potential in many areas, but there are still many parts that wait to be improved. This paper would give a brief introduction of the technology with its features, superiorities and drawbacks. Based on these characteristics, several applications of the technology would be introduced with some specific examples. In this paper, current status with the advantages and disadvantages of MEMS would be discussed, and some improvements would be mentioned related to the prob

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Jiang, Cheng Yu, Yang He, and Wei Zheng Yuan. "MEMS R&D Trends." Materials Science Forum 532-533 (December 2006): 181–84. http://dx.doi.org/10.4028/www.scientific.net/msf.532-533.181.

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Micro-Electromechanical Systems (MEMS) has been regarded as one of the most promising technologies for the 21st Century. Recently, some highlight areas attract great attention including Inertial MEMS, Optic MEMS, RF MEMS, BioMEMS, Power MEMS, and NEMS. The state of arts on MEMS research in China is briefly introduced and research activities in Northwestern Polytechnical University such as MEMS CAD tool, inertial MEMS devices, flexible substrate for MEMS integration, micro mirror, micro battery and three dimension measurement are demonstrated.

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Abdelrassoul, Roshdy A. "MEMS and NEMS - micro (and nano) electromechanical systems." Advances in Computing and Engineering 2, no. 1 (2022): 58. http://dx.doi.org/10.21622/480.

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Abdelrassoul, Roshdy A. "MEMS and NEMS - micro (and nano) electromechanical systems." Advances in Computing and Engineering 2, no. 1 (2022): 60. http://dx.doi.org/10.21622/ace.2022.02.1.058.

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Altintas, Zeynep. "Editorial for the Special Issue on Biosensors and MEMS-Based Diagnostic Applications." Micromachines 12, no. 3 (2021): 229. http://dx.doi.org/10.3390/mi12030229.

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Feng, Xian Zhang, Liang Ji Chen, and Jun Wei Cheng. "Application and Prospects of Packaging Technology of MEMS." Key Engineering Materials 460-461 (January 2011): 274–79. http://dx.doi.org/10.4028/www.scientific.net/kem.460-461.274.

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Micro-electromechanical systems is called MEMS for short, it is the product of mutual integration for the micro-electronics and micro-mechanics, which covers mechanical, electrical, physical, biological and other modern technology. MEMS packaging is a key technology that has been developed based on electronic package technology. In order to strengthen the development of packaging process of MEMS, in particular, which are low cost, materials and packaging technology and has an ideal effect. The characteristics of MEMS packaging technology based on MEMS technologies are introduced, and the futur

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Ceylan, Halil, Kasthurirangan Gopalakrishnan, Sunghwan Kim, Peter C. Taylor, Maxim Prokudin, and Ashley F. Buss. "HIGHWAY INFRASTRUCTURE HEALTH MONITORING USING MICRO-ELECTROMECHANICAL SENSORS AND SYSTEMS (MEMS)." Journal of Civil Engineering and Management 19, Supplement_1 (2014): S188—S201. http://dx.doi.org/10.3846/13923730.2013.801894.

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The development of novel “smart” structures by embedding sensing capabilities directly into the construction material during the manufacturing and deployment process has attracted significant attention in autonomous structural health monitoring (SHM). Micro-electromechanical systems (MEMS) provide vast improvements over existing sensing methods in the context of SHM of highway infrastructure systems, including improved system reliability, improved longevity and enhanced system performance, improved safety against natural hazards and vibrations, and a reduction in life cycle cost in both operat

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Welburn, Lowell, Amir Milad Moshref Javadi, Luong Nguyen, and Salil Desai. "Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review." Biomolecules 15, no. 6 (2025): 898. https://doi.org/10.3390/biom15060898.

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Designing and manufacturing devices at the micro- and nanoscales offers significant advantages, including high precision, quick response times, high energy density ratios, and low production costs. These benefits have driven extensive research in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS), resulting in various classifications of materials and manufacturing techniques, which are ultimately used to produce different classifications of MEMS devices. The current work aims to systematically organize the literature on MEMS in biomedical devices, encompassing pas

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Zhang, Ping, Chun Lei Sun, and Qing’en Li. "Study and Simulation of Electro-Mechanical Sensor." Advanced Materials Research 282-283 (July 2011): 440–43. http://dx.doi.org/10.4028/www.scientific.net/amr.282-283.440.

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The relevant introduction development of the micro electromechanical systems (MEMS) is carried out in this paper. The pressure sensor is an important component of micro electromechanical systems (MEMS). Many aspects of the pressure sensor are studied，simulated and analyzed by us. The principle of work of the pressure sensor is elaborated in details and the material selection is studied also. The correlative performance indexes, such as precision and the repeatability of pressure sensor, are explored. In the following part of this paper, through the finite element simulation software, the analy

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McClure, S. S., L. D. Edmonds, R. Mihailovich, et al. "Radiation effects in micro-electromechanical systems (MEMS): RF relays." IEEE Transactions on Nuclear Science 49, no. 6 (2002): 3197–202. http://dx.doi.org/10.1109/tns.2002.805406.

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Takinoue, Masahiro, and Ryuji Kawano. "Editorial on the Special Issue on Recent Advances of Molecular Machines and Molecular Robots." Micromachines 11, no. 12 (2020): 1031. http://dx.doi.org/10.3390/mi11121031.

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Molecular machines and molecular robots are a highly interdisciplinary research field including material science, chemistry, biotechnology, biophysics, soft matter physics, micro-electromechanical systems (MEMS), and computer science [...]

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Chalmers, Peggy. "Relay Races." Mechanical Engineering 123, no. 01 (2001): 66–68. http://dx.doi.org/10.1115/1.2001-jan-6.

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This article illustrates that micro-electro-mechanical systems (MEMS) promises relief to designers seeking a smaller electromechanical option. A MEMS relay could offer the true ON/OFF characteristics of its conventional electromechanical equivalent in a device small enough to be integrated on the same die with semiconductor circuits. Raytheon Co.’s radio and terminal business in Fort Wayne, Ind., a unit of the Command, Control and Communication Systems division, believes MEMS will help produce highly efficient, software-controlled, digital radios for the military. The MEMS devices would replac

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Han, Ke, Xubing Guo, Stewart Smith, Zhongliang Deng, and Wuyu Li. "Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis and Performance Verification." Micromachines 9, no. 8 (2018): 390. http://dx.doi.org/10.3390/mi9080390.

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This paper proposes a novel high-capacitance-ratio radio frequency micro-electromechanical systems (RF MEMS) switch. The proposed RF MEMS mainly consists of serpentine flexure MEMS metallic beam, comprised of coplanar waveguide (CPW) transmission line, dielectric and metal-insulator-metal (MIM) floating metallic membrane. Comparing the proposed high-capacitance-ratio MEMS switch with the ones in available literature, an acceptable insertion loss insulation, acceptable response time and high capacitance ratio (383.8) are achieved.

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Willet, Ruth, and Karl Reichard. "Micro-electromechanical systems sensor characterization for acoustic prognostic health management." Journal of the Acoustical Society of America 155, no. 3_Supplement (2024): A204. http://dx.doi.org/10.1121/10.0027312.

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Prognostic Health Management (PHM) is the process used to optimize machinery use by detecting faults and predicting failures and a machine’s remaining useful life. PHM is especially important to electro-mechanical systems in order to maximize a system’s availability and effective operation. The use of Micro-Electromechanical Systems (MEMS) accelerometers and microphones for PHM analysis is beneficial because it enables non-destructive acoustic testing with reduced cost, reduced size, and more efficient vehicle integration with other electronics than current methods. This research quantitativel

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Chen, Z. "Geometric nonlinearity and mechanical anisotropy in strained helical nanoribbons." Nanoscale 6, no. 16 (2014): 9443–47. http://dx.doi.org/10.1039/c4nr00336e.

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Fabrication and synthesis of helical nanoribbons have received increasing attention because of the broad applications of helical nanostructures in nano-elecromechanical/micro-electromechanical systems (NEMS/MEMS), sensors, active materials, drug delivery,etc.

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Gyimesi, M., I. Avdeev, and D. Ostergaard. "Finite-Element Simulation of Micro-Electromechanical Systems (MEMS) by Strongly Coupled Electromechanical Transducers." IEEE Transactions on Magnetics 40, no. 2 (2004): 557–60. http://dx.doi.org/10.1109/tmag.2004.824592.

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Dorey, R. A. "Challenges in Integration of Piezoelectric Ceramics in Micro Electromechanical Systems." Materials Science Forum 606 (October 2008): 43–50. http://dx.doi.org/10.4028/www.scientific.net/msf.606.43.

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Lead zirconate titanate (PZT) thick films, a few tens of micrometres thick, are of technological interest for integration with microsystems to create micro electromechanical systems (MEMS) with high sensitivity and power output. This paper examines the challenges faced in integrating thick film PZT with other materials to create functional micro devices. Thermal, chemical and mechanical challenges associated with integration will be examined and potential solutions explored.

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22

Chen, Shanshan, Yongyue Zhang, Xiaorong Hong, and Jiafang Li. "Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review." Journal of Semiconductors 43, no. 8 (2022): 081301. http://dx.doi.org/10.1088/1674-4926/43/8/081301.

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Abstract Micro-optical electromechanical systems (MOEMS) combine the merits of micro-electromechanical systems (MEMS) and micro-optics to enable unique optical functions for a wide range of advanced applications. Using simple external electromechanical control methods, such as electrostatic, magnetic or thermal effects, Si-based MOEMS can achieve precise dynamic optical modulation. In this paper, we will briefly review the technologies and applications of Si-based MOEMS. Their basic working principles, advantages, general materials and micromachining fabrication technologies are introduced con

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23

Na, Xineng. "Analysis of MEMS sensor application and prospects." Applied and Computational Engineering 6, no. 1 (2023): 422–29. http://dx.doi.org/10.54254/2755-2721/6/20230825.

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The development trends in modern science and technology are miniaturization, integration, and intelligence. Microsensors have developed rapidly with the development of micro-electromechanical systems (MEMS) and micromachining technology. In this paper, the concepts and types of MEMS sensors are summarized by literature and case analyses, and their research statuses and application fields are briefly introduced. The development trends of MEMS sensors are discussed. This paper finds that combining sensors with intelligent products can achieve another application climax of MEMS sensors.

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Ashraf, Muhammad Waseem, Shahzadi Tayyaba, and Nitin Afzulpurkar. "Micro Electromechanical Systems (MEMS) Based Microfluidic Devices for Biomedical Applications." International Journal of Molecular Sciences 12, no. 6 (2011): 3648–704. http://dx.doi.org/10.3390/ijms12063648.

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Cho, Joon Hyong, David Cayll, Dipankar Behera, and Michael Cullinan. "Towards Repeatable, Scalable Graphene Integrated Micro-Nano Electromechanical Systems (MEMS/NEMS)." Micromachines 13, no. 1 (2021): 27. http://dx.doi.org/10.3390/mi13010027.

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The demand for graphene-based devices is rapidly growing but there are significant challenges for developing scalable and repeatable processes for the manufacturing of graphene devices. Basic research on understanding and controlling growth mechanisms have recently enabled various mass production approaches over the past decade. However, the integration of graphene with Micro-Nano Electromechanical Systems (MEMS/NEMS) has been especially challenging due to performance sensitivities of these systems to the production process. Therefore, ability to produce graphene-based devices on a large scale

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Zhang, Kai, Ting Li, Haisong Li, Jie He, and Weidong Xu. "Low-Power and High-Precision Readout Circuit Design for Micro-Electromechanical Systems (MEMS) Acceleration Sensors." Journal of Nanoelectronics and Optoelectronics 18, no. 2 (2023): 130–37. http://dx.doi.org/10.1166/jno.2023.3390.

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MEMS acceleration sensors are widely used in Internet of Things, electronic machinery, aerospace and other fields with outstanding advantages such as small size, high reliability, intelligence and high integration. Traditional MEMS acceleration sensors limit their applications due to high-power consumption and low-precision; the standby time and service life are being increased in order to study the low-power and high-precision MEMS acceleration sensor readout, this paper adopts the Fully Differential Switched Capacitor-Variable Gain Amplifier (FDSC-VGA) instead of the traditional high-power C

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Ruszaj, Adam. "Additive methods in micro and nano manufacturing technologies." Mechanik 92, no. 5-6 (2019): 386–90. http://dx.doi.org/10.17814/mechanik.2019.5-6.43.

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In 1959 R.P. Feynman has presented the concept and strategy of micro- and nanotechnology development. Their introduction to the practice took place after working out the scanning tunneling microscopy (1981) and atomic force microscopy (1985). In the further development of micro- and nanotechnology the micro and nano electromechanical systems (MEMS, NEMS) have been worked. MEMS and NEMS are widely applied in majority of modern equipment and the production of the equipment increases about 17÷20% per year since 1990s. MEMS and NEMS manufacture usually is a difficult technological problem because

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Liu, Bendong, Xinrui Li, Jiahui Yang, and Guohua Gao. "Recent Advances in MEMS-Based Microthrusters." Micromachines 10, no. 12 (2019): 818. http://dx.doi.org/10.3390/mi10120818.

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With the development of micro/nano satellites and formation flying, more advanced spatial propulsion technology is required. In this paper, a review of microthrusters developments that based on micro electromechanical systems (MEMS) technology adopted in microthrusters is summarized. The microthrusters in previous research are classified and summarized according to the types of propellants and the working principles they utilized. The structure and the performance including the thrust, the impulse and the specific impulse of various microthrusters are compared. In addition, the advantages and

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Mahmoud, M. A., Mosab A. Alrahmani, and Hameed A. Alawadi. "Resonance patterns in cantilevered plates with micro electromechanical systems (MEMS) applications." Microsystem Technologies 25, no. 3 (2018): 997–1016. http://dx.doi.org/10.1007/s00542-018-4052-6.

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Auciello, Orlando, and Dean M. Aslam. "Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies." Journal of Materials Science 56, no. 12 (2021): 7171–230. http://dx.doi.org/10.1007/s10853-020-05699-9.

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AbstractA comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, a

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Chen, Yin Jun, Qing Hua Chen, Yan Mei Li, and Wen Gang Wu. "Coupled-Field Finite Element Analysis of MEMS Compound Electrostatic Actuator by Using the ANSYS Software." Applied Mechanics and Materials 214 (November 2012): 929–34. http://dx.doi.org/10.4028/www.scientific.net/amm.214.929.

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MEMS (Microelectromechanical Systems) electrostatic actuators have been successfully applied in a number of areas, including accelerometers, gyroscopes, pressure sensors, and optical devices. In this paper, the actuator optimization of a silicon bulk-micro machined MEMS compound electrostatic actuator of an optical device is discussed. The actuator uses folded-beam structure to enhance the electromechanical performance. The movable block is connected to the compound electrostatic actuator through unequal-height folded-beam springs. The lower-height springs connect the block with parallel plate

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Bradley, Peter, Elizabeth Sorenson, Damian Lauria, and Li-Anne Liew. "Characterizing MEMS Switch Reliability for Cryogenic Applications such as Quantum Computing." IOP Conference Series: Materials Science and Engineering 1302, no. 1 (2024): 012027. http://dx.doi.org/10.1088/1757-899x/1302/1/012027.

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Abstract Micro Electromechanical Systems (MEMS) switches offer many advantages over conventional larger switches. One potential application we are exploring is the use of commercial radio frequency (RF) MEMS switches for quantum computing applications. However, it is well-documented that cryogenic temperatures can cause mechanical reliability issues for MEMS. Furthermore, commercial RF MEMS switches are designed for room temperature operation, thus their reliability at cryogenic temperatures is unknown. Commercial MEMS switches are also packaged inside sealed housings, which prevent the use of

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Korman, Philip. "Infinitely many solutions for three classes of self-similar equations with p-Laplace operator: Gelfand, Joseph–Lundgren and MEMS problems." Proceedings of the Royal Society of Edinburgh: Section A Mathematics 148, no. 2 (2017): 341–56. http://dx.doi.org/10.1017/s0308210517000038.

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We study global solution curves and prove the existence of infinitely many positive solutions for three classes of self-similar equations with p-Laplace operator. In the p = 2 case these are well-known problems involving the Gelfand equation, the equation modelling electrostatic micro-electromechanical systems (MEMS), and a polynomial nonlinearity. We extend the classical results of Joseph and Lundgren to the case in which p ≠ 2, and we generalize the main result of Guo and Wei on the equation modelling MEMS.

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Liang, Haitong, Hailing Fu, and Guangbo Hao. "A miniaturized statically balanced compliant mechanism for on-chip ultralow wide-bandwidth vibrational energy harvesting." Mechanical Sciences 15, no. 1 (2024): 159–68. http://dx.doi.org/10.5194/ms-15-159-2024.

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Abstract. This research demonstrates a miniaturized statically balanced compliant mechanism (SBCM) at the micro-electromechanical systems (MEMS) scale. The primary objective is to integrate the MEMS-scale SBCM on chip as the fundamental structure of vibrational energy harvesters for powering low-energy-cost sensors and circuits. The static and dynamic characteristics of the micro-scale SBCM are investigated based on a 2D finite element analysis (FEA) model in COMSOL Multiphysics®. Static balancing is achieved by finely tuning the geometric parameters of the FEA SBCM model. The analytical, nume

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Hierold, Christofer, Thomas Helbling, Cosmin Roman, Lukas Durrer, Alain Jungen, and Christoph Stampfer. "CNT Based Sensors." Advances in Science and Technology 54 (September 2008): 343–49. http://dx.doi.org/10.4028/www.scientific.net/ast.54.343.

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Carbon Nanotubes (CNT) are intensively studied as a new functional material for sensors, nanosystems and electronic systems. Single-walled carbon nanotubes (SWNTs) for example show unique mechanical and electromechanical properties and they change electronic properties by interacting with the environment (e.g. for chemical and biochemical sensing). Therefore CNTs are very promising candidates for active elements in future nanoscaled transducers. Concepts for carbon nanotube sensors for mechanical and chemical quantities are presented. We focus on single-walled carbon nanotubes as "simple" macr

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Deng, Zhongliang, Yucheng Wang, Kun Deng, Chengqi Lai, and Jiali Zhou. "Novel High Isolation and High Capacitance Ratio RF MEMS Switch: Design, Analysis and Performance Verification." Micromachines 13, no. 5 (2022): 646. http://dx.doi.org/10.3390/mi13050646.

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In this paper, a novel high isolation and high-capacitance-ratio radio-frequency micro-electromechanical systems (RF MEMS) switch working at Ka-band is designed, fabricated, measured and analyzed. The proposed RF MEMS switch mainly consists of a MEMS metallic beam, coplanar waveguide (CPW) transmission line, dielectric layer and metal–insulator–metal (MIM) fixed capacitors. The measured results indicate that the insertion loss is better than 0.5 dB at 32 GHz, and the isolation is more than 35 dB at the resonant frequency. From the fitted results, the capacitance ratio is 246.3. Compared with t

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Fan, Xi Qiu. "Fabrication of Bionic Silicon Surfaces with Lotus Effect and their Micro Tribological Performance." Advanced Materials Research 97-101 (March 2010): 1393–98. http://dx.doi.org/10.4028/www.scientific.net/amr.97-101.1393.

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With the miniature of micro-electromechanical systems (MEMS), surface effect is substantially increased, and the resulting friction, abrasion and stiction are becoming bottlenecks of the development of MEMS industry. In this paper, firstly, the feature size and topography on lotus leaf surfaces is investigated, as well as the mechanism of lotus effect applied in MEMS to reduce friction and prevent stiction is analyzed; secondly, two approaches of fabricating bionic silicon surfaces with lotus effect are proposed; finally, test results on the micro tribological performance of the mimicked silic

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He, Ming Xuan, Xin Lu, Xin Chen, et al. "Micro-Machined Variable RF Capacitor Based on Glass Substrate." Advanced Materials Research 418-420 (December 2011): 1729–33. http://dx.doi.org/10.4028/www.scientific.net/amr.418-420.1729.

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The RF applications like voltage controlled oscillators, tunable filters, resonators etc., requires variable capacitors in their design. This paper presents a novel micro variable capacitor consisting of fixed plate and moveable plate which is suspended by ‘S’ type springs. Micro variable capacitor can be electrostatically actuated via applied voltage to change the capacitance between the plates. The capacitance changes from15 pF to 22.5pF while applied voltage ranges from 0 to pull-in voltage. And micro variable capacitor based on glass Substrate was fabricated by simple micro electromechanic

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Ushaa, Eswaran, S. Lakshmi, K. Nirmala, P. Mahasri, Sree Pratibha P. Deep, and V. Abimanan. "Advancements in MEMS gyroscopes: Piezoelectric plate-based devices for enhanced precision and stability in microelectromechanical systems." i-manager’s Journal on Electronics Engineering 15, no. 2 (2025): 45. https://doi.org/10.26634/jele.15.2.21464.

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Micro-Electromechanical Systems (MEMS) gyroscopes have gained significant attention due to their compact size, low cost, and versatility in various applications, ranging from consumer electronics to aerospace and automotive systems. Among the different MEMS gyroscope designs, piezoelectric plate-based gyroscopes have emerged as a promising solution for achieving high sensitivity and precision in angular rate measurements. This paper explores the latest advancements in MEMS gyroscope technology, with a particular focus on the design, working principles, and potential applications of piezoelectr

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Shilpa, B. M., and Sathisha K. Shet. "Optimized register level transfer mechanism for ASIC-based memscomputing." Modern Electronic Materials 10, no. 1 (2024): 19–28. http://dx.doi.org/10.3897/j.moem.10.1.113631.

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Micro-electromechanical system-based semiconductor sensor systems typically need a reliable on-chip analog readout circuit to identify and process changes in physical properties. To improve the mobility, robustness, reliability and performance (in terms of power consumption and speed) of the sensor system, the remaining parts of the post-processing logic, such as the digital data processor (or part of it), can also integrated into the chip. Cost and integration are always important considerations in both analog and digital designs, but they become even more important; the subsystem of data pro

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Shilpa, B. M., and Sathisha K. Shet. "Optimized register level transfer mechanism for ASIC-based memscomputing." Modern Electronic Materials 10, no. (1) (2024): 19–28. https://doi.org/10.3897/j.moem.10.1.113631.

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Micro-electromechanical system-based semiconductor sensor systems typically need a reliable on-chip analog readout circuit to identify and process changes in physical properties. To improve the mobility, robustness, reliability and performance (in terms of power consumption and speed) of the sensor system, the remaining parts of the post-processing logic, such as the digital data processor (or part of it), can also integrated into the chip. Cost and integration are always important considerations in both analog and digital designs, but they become even more important; the subsystem of data pro

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Chernyavsky, D. I., and D. D. Chernyavsky. "Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS)." Omsk Scientific Bulletin, no. 175 (2021): 5–11. http://dx.doi.org/10.25206/1813-8225-2021-175-5-11.

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Currently, the development and application of micro machines is an important direction in the development of microelectromechanical systems (MEMS) technologies. In these devices, electromechanical energy conversion occurs, as a result of which forces arise that carry out mechanical work within the dimensions of the microcircuit case. The paper considers the kinematic calculation of the design of a micromirror with a reflective layer of high optical quality of the surface for deflecting the reflected laser beam. By changing the angle of inclination of the micromirror, the laser beam enters the

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Dorey, R. A., S. Rocks, F. Dauchy, and A. Navarro. "New Advances in Forming Functional Ceramics for Micro Devices." Advances in Science and Technology 45 (October 2006): 2440–47. http://dx.doi.org/10.4028/www.scientific.net/ast.45.2440.

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Micro electromechanical systems (MEMS) are finding uses in an increasing number of diverse applications. Currently the fabrication techniques used to produce such MEMS devices are primarily based on 2-D processing of thin films. The challenges faced by producing more complex structures (e.g. high aspect ratio, spans, and multi-material structures) require the development of new processing techniques. Potential solutions to these challenges based on low temperature processing of functional ceramics, selective chemical patterning, and micro-moulding are presented to show that it is possible to c

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Cho, Chong Du, and Byung Ha Lee. "Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems." Key Engineering Materials 306-308 (March 2006): 1247–52. http://dx.doi.org/10.4028/www.scientific.net/kem.306-308.1247.

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In this paper, a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography data with an arbitrary structure. In the methodology, the mask layout and process recipe of a device are first generated and the model then discretized by an auto-mesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification.

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Jayne, Rachael K., Thomas J. Stark, Jeremy B. Reeves, David J. Bishop, and Alice E. White. "Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro-Electromechanical Systems (MEMS)." Advanced Materials Technologies 3, no. 3 (2018): 1700293. http://dx.doi.org/10.1002/admt.201700293.

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Asadnia, Mohsen, Ajay Giri Prakash Kottapalli, Jianmin Miao, Majid Ebrahimi Warkiani, and Michael S. Triantafyllou. "Artificial fish skin of self-powered micro-electromechanical systems hair cells for sensing hydrodynamic flow phenomena." Journal of The Royal Society Interface 12, no. 111 (2015): 20150322. http://dx.doi.org/10.1098/rsif.2015.0322.

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Using biological sensors, aquatic animals like fishes are capable of performing impressive behaviours such as super-manoeuvrability, hydrodynamic flow ‘vision’ and object localization with a success unmatched by human-engineered technologies. Inspired by the multiple functionalities of the ubiquitous lateral-line sensors of fishes, we developed flexible and surface-mountable arrays of micro-electromechanical systems (MEMS) artificial hair cell flow sensors. This paper reports the development of the MEMS artificial versions of superficial and canal neuromasts and experimental characterization o

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Amendoeira Esteves, Rui, Chen Wang, and Michael Kraft. "Python-Based Open-Source Electro-Mechanical Co-Optimization System for MEMS Inertial Sensors." Micromachines 13, no. 1 (2021): 1. http://dx.doi.org/10.3390/mi13010001.

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The surge in fabrication techniques for micro- and nanodevices gave room to rapid growth in these technologies and a never-ending range of possible applications emerged. These new products significantly improve human life, however, the evolution in the design, simulation and optimization process of said products did not observe a similarly rapid growth. It became thus clear that the performance of micro- and nanodevices would benefit from significant improvements in this area. This work presents a novel methodology for electro-mechanical co-optimization of micro-electromechanical systems (MEMS

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Samotaev, Nikolay, Konstantin Oblov, Pavel Dzhumaev, et al. "Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors." Micromachines 12, no. 12 (2021): 1440. http://dx.doi.org/10.3390/mi12121440.

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The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic produ

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Fathy, Alaa, Yasser M. Sabry, Martine Gnambodoe-Capochichi, Frederic Marty, Diaa Khalil, and Tarik Bourouina. "Silicon Multi-Pass Gas Cell for Chip-Scale Gas Analysis by Absorption Spectroscopy." Micromachines 11, no. 5 (2020): 463. http://dx.doi.org/10.3390/mi11050463.

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Semiconductor and micro-electromechanical system (MEMS) technologies have been already proved as strong solutions for producing miniaturized optical spectrometers, light sources and photodetectors. However, the implementation of optical absorption spectroscopy for in-situ gas analysis requires further integration of a gas cell using the same technologies towards full integration of a complete gas analysis system-on-chip. Here, we propose design guidelines and experimental validation of a gas cell fabricated using MEMS technology. The architecture is based on a circular multi-pass gas cell in a

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Asadi, Keivan, Jun Yu, and Hanna Cho. "Nonlinear couplings and energy transfers in micro- and nano-mechanical resonators: intermodal coupling, internal resonance and synchronization." Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences 376, no. 2127 (2018): 20170141. http://dx.doi.org/10.1098/rsta.2017.0141.

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Extensive development of micro/nano-electromechanical systems (MEMS/NEMS) has resulted in technologies that exhibit excellent performance over a wide range of applications in both applied (e.g. sensing, imaging, timing and signal processing) and fundamental sciences (e.g. quantum-level problems). Many of these outstanding applications benefit from resonance phenomena by employing micro/nanoscale mechanical resonators often fabricated into a beam-, membrane- or plate-type structure. During the early development stage, one of the vibrational modes (typically the fundamental mode) of a resonator

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