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Artykuły w czasopismach na temat „Electron Cyclotron Resonance Plasmas”

Autor: Grafiati

Data publikacji: 5 października 2024

Data aktualizacji: 31 lipca 2025

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1

Girard, A., D. Hitz, G. Melin, and K. Serebrennikov. "Electron cyclotron resonance plasmas and electron cyclotron resonance ion sources: Physics and technology (invited)." Review of Scientific Instruments 75, no. 5 (2004): 1381–88. http://dx.doi.org/10.1063/1.1675926.

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2

Shufflebotham, P. K., and D. J. Thomson. "Stability and spatial characterization of electron cyclotron resonance processing plasmas." Canadian Journal of Physics 69, no. 3-4 (1991): 195–201. http://dx.doi.org/10.1139/p91-032.

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This paper presents preliminary measurements of the spatial variation of the plasma density, electron temperature, plasma potential, and floating voltage within a divergent magnetic field electron cyclotron resonance (ECR) plasma processing reactor. The measurements are performed using an orbital-motion-limited cylindrical Langmuir probe designed specifically for use in these plasmas. A brief discussion of the stability and uniformity of divergent field plasmas in general, and qualitative techniques for the diagnosis of these properties, is also given. It was found that these plasmas generally

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3

Girard, A., C. Pernot, G. Melin, and C. Lécot. "Modeling of electron-cyclotron-resonance-heated plasmas." Physical Review E 62, no. 1 (2000): 1182–89. http://dx.doi.org/10.1103/physreve.62.1182.

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4

Outten, C. A., J. C. Barbour, and W. R. Wampler. "Characterization of electron cyclotron resonance hydrogen plasmas." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 9, no. 3 (1991): 717–21. http://dx.doi.org/10.1116/1.577350.

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5

San Andrés, E., A. Del Prado, A. J. Blázquez, I. Mártil, and G. González-Díaz. "Procesos de oxidación de Si mediante plasma de resonancia ciclotrónica de electrones." Boletín de la Sociedad Española de Cerámica y Vidrio 43, no. 2 (2004): 379–82. http://dx.doi.org/10.3989/cyv.2004.v43.i2.546.

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6

Hansen, S. K., S. K. Nielsen, J. Stober, et al. "Parametric Decay Instabilities during Electron Cyclotron Resonance Heating of Fusion Plasmas, Problems and Possibilities." EPJ Web of Conferences 277 (2023): 01002. http://dx.doi.org/10.1051/epjconf/202327701002.

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We review parametric decay instabilities (PDIs) expected in connection with electron cyclotron resonance heating (ECRH) of magnetically confined fusion plasmas, with a specific focus on conditions relevant for the ITER tokamak. PDIs involving upper hybrid (UH) waves are likely to occur in O-mode ECRH scenarios at ITER if electron density profiles allowing trapping of UH waves near the ECRH frequency are present. Such PDIs may occur near the plasma center in ITER full-field scenarios heated by 170 GHz O-mode ECRH and on the high-field side of half-field ITER plasmas heated by 110 GHz or 104 GHz

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7

Pu, Yi-Kang, Zhi-Gang Guo, Zheng-De Kang, et al. "Comparative characterization of high-density plasma reactors using emission spectroscopy from VUV to NIR." Pure and Applied Chemistry 74, no. 3 (2002): 459–64. http://dx.doi.org/10.1351/pac200274030459.

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Emission spectroscopy is used to investigate the effect of inert gas mixing in nitrogen plasmas generated in inductively coupled plasma (ICP) and electron cyclotron resonance (ECR) plasma sources. Vacuum ultraviolet (VUV) emission of resonance lines is used to determine concentration of atomic nitrogen while electron temperature is obtained from optical emission spectra. It is found that electron temperature can be either raised or reduced effectively by mixing helium or argon in a nitrogen discharge. Electron-electron collisions and superelastic collisions involving metastable species are key

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8

Castagna, T. J., J. L. Shohet, D. D. Denton, and N. Hershkowitz. "X rays in electron‐cyclotron‐resonance processing plasmas." Applied Physics Letters 60, no. 23 (1992): 2856–58. http://dx.doi.org/10.1063/1.106846.

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9

Goeckner, M. J., J. A. Meyer, G. ‐H Kim, et al. "Role of contaminants in electron cyclotron resonance plasmas." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 11, no. 5 (1993): 2543–52. http://dx.doi.org/10.1116/1.578605.

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10

Racz, Richárd, Sándor Biri, and József Palinkas. "Visible Light Emission of Electron Cyclotron Resonance Plasmas." IEEE Transactions on Plasma Science 39, no. 11 (2011): 2462–63. http://dx.doi.org/10.1109/tps.2011.2150244.

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11

Marchetti, M. T., M. Cavenago, and F. Pegoraro. "Models of many-element electron cyclotron resonance plasmas." Review of Scientific Instruments 69, no. 2 (1998): 1123–25. http://dx.doi.org/10.1063/1.1148644.

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12

Rawwagah, F., M. Al-Ali, A. Al-Khateeb, and M. Bawa'aneh. "Collisional and resonance absorption of electromagnetic waves in a weakly collisional, inhomogeneous magnetoplasma slab." Advanced Electromagnetics 9, no. 2 (2020): 25–30. http://dx.doi.org/10.7716/aem.v9i2.1466.

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Absorbance of normally incident electromagnetic wave on a cold, weakly collisional, and inhomogeneous magnetoplasma slab is investigated. The plasma density is Budden-like sinusoidal profile, where the inhomogeniety is treated as a multilayered system of homogeneous sub-cells within the transfer matrix technique. For incident wave frequencies much above the ion cyclotron frequency, only right hand circularly polarized waves are relevant for wave propagation parallel to a static magnetic field. Calculations are performed in normalized parameters, that make the results suitable for many applicat

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13

Hansen, S. K., S. K. Nielsen, and J. Stober. "Relativistic analysis of upper hybrid wave propagation and trapping." Physics of Plasmas 30, no. 4 (2023): 042103. http://dx.doi.org/10.1063/5.0138249.

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We investigate the impact of relativistic effects on upper hybrid (UH) waves in plasmas with thermal electrons, particularly focusing on modifications of the conditions under which UH wave trapping and related low-threshold parametric decay instabilities (PDIs) may occur. A moderately relativistic (MR) dispersion relation for UH waves, valid for electron temperatures up to 25 keV and wave frequencies up to twice the electron cyclotron frequency, is obtained from previous results and shown to reduce to the warm non-relativistic result commonly used for PDI studies at low electron temperatures.

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14

Virko, V. F., V. M. Slobodyan, and Yu V. Virko. "Coupling of Helicon Antennas to Plasma near the Electron Cyclotron Resonance." Ukrainian Journal of Physics 61, no. 11 (2016): 956–59. http://dx.doi.org/10.15407/ujpe61.11.0956.

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15

Jiang, Wence, Daniel Verscharen, Seong-Yeop Jeong, et al. "Velocity-space Signatures of Resonant Energy Transfer between Whistler Waves and Electrons in the Earth’s Magnetosheath." Astrophysical Journal 960, no. 1 (2023): 30. http://dx.doi.org/10.3847/1538-4357/ad0df8.

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Abstract Wave–particle interactions play a crucial role in transferring energy between electromagnetic fields and charged particles in space and astrophysical plasmas. Despite the prevalence of different electromagnetic waves in space, there is still a lack of understanding of fundamental aspects of wave–particle interactions, particularly in terms of energy flow and velocity-space characteristics. In this study, we combine a novel quasilinear model with observations from the Magnetospheric Multiscale mission to reveal the signatures of resonant interactions between electrons and whistler wave

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16

MISRA, A. P., G. BRODIN, M. MARKLUND, and P. K. SHUKLA. "Circularly polarized modes in magnetized spin plasmas." Journal of Plasma Physics 76, no. 6 (2010): 857–64. http://dx.doi.org/10.1017/s0022377810000450.

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AbstractThe influence of the intrinsic spin of electrons on the propagation of circularly polarized waves in a magnetized plasma is considered. New eigenmodes are identified, one of which propagates below the electron cyclotron frequency, one above the spin-precession frequency, and another close to the spin-precession frequency. The latter corresponds to the spin modes in ferromagnets under certain conditions. In the non-relativistic motion of electrons, the spin effects become noticeable even when the external magnetic field B0 is below the quantum critical magnetic field strength, i.e. B0 &

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17

Robinson, P. A. "Electron cyclotron waves: dispersion and accessibility conditions in isotropic and anisotropic plasmas." Journal of Plasma Physics 35, no. 2 (1986): 187–207. http://dx.doi.org/10.1017/s0022377800011272.

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Dispersion and accessibility conditions for electron cyclotron waves are investigated for arbitrary weakly relativistic plasmas and for specific isotropic and loss-cone distributions. The transition between the cold plasma and vacuum dispersion relations is investigated as a function of temperature and density. The behaviour of mode structure (including mode coupling), cut-offs and resonances are also examined. Generalizations are obtained of earlier results which indicate that access by extraordinary waves to regions nearthe cyclotron layer from the low-field side is easier in weakly relativi

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18

Castagna, T. J., J. L. Shohet, K. A. Ashtiani, and N. Hershkowitz. "X‐ray diagnostics for electron cyclotron resonance processing plasmas." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 10, no. 4 (1992): 1325–30. http://dx.doi.org/10.1116/1.578247.

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19

Sharma, R. P., Yogesh Kumar Tripathi, and A. Kumar. "Parametric instabilities during electron cyclotron resonance heating in plasmas." Physical Review A 35, no. 8 (1987): 3567–70. http://dx.doi.org/10.1103/physreva.35.3567.

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20

Arunasalam, V., P. C. Efthimion, J. C. Hosea, H. Hsuan, and G. Taylor. "Doppler splitting of electron cyclotron absorption resonance in plasmas." Physical Review A 36, no. 8 (1987): 3909–11. http://dx.doi.org/10.1103/physreva.36.3909.

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21

Jacob, W., P. Reinke, and W. Möller. "Ion energy distributions from electron cyclotron resonance methane plasmas." Diamond and Related Materials 2, no. 2-4 (1993): 378–82. http://dx.doi.org/10.1016/0925-9635(93)90086-h.

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22

Kumar, P., G. Rodrigues, P. S. Lakshmy, D. Kanjilal, and R. Kumar. "Charge-state distributions of metallic electron cyclotron resonance plasmas." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 26, no. 1 (2008): 97–102. http://dx.doi.org/10.1116/1.2823486.

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23

Kitamura, N., M. Kitahara, M. Shoji, et al. "Direct measurements of two-way wave-particle energy transfer in a collisionless space plasma." Science 361, no. 6406 (2018): 1000–1003. http://dx.doi.org/10.1126/science.aap8730.

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Particle acceleration by plasma waves and spontaneous wave generation are fundamental energy and momentum exchange processes in collisionless plasmas. Such wave-particle interactions occur ubiquitously in space. We present ultrafast measurements in Earth’s magnetosphere by the Magnetospheric Multiscale spacecraft that enabled quantitative evaluation of energy transfer in interactions associated with electromagnetic ion cyclotron waves. The observed ion distributions are not symmetric around the magnetic field direction but are in phase with the plasma wave fields. The wave-ion phase relations

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24

Rácz, R., S. Biri, and J. Pálinkás. "Electron cyclotron resonance plasma photos." Review of Scientific Instruments 81, no. 2 (2010): 02B708. http://dx.doi.org/10.1063/1.3267289.

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25

Narita, Y., E. Marsch, C. Perschke, K. H. Glassmeier, U. Motschmann, and H. Comişel. "Wave–particle resonance condition test for ion-kinetic waves in the solar wind." Annales Geophysicae 34, no. 4 (2016): 393–98. http://dx.doi.org/10.5194/angeo-34-393-2016.

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Abstract. Conditions for the Landau and cyclotron resonances are tested for 543 waves (identified as local peaks in the energy spectra) in the magnetic field fluctuations of the solar wind measured by the Cluster spacecraft on a tetrahedral scale of 100 km. The resonance parameters are evaluated using the frequencies in the plasma rest frame, the parallel components of the wavevectors, the ion cyclotron frequency, and the ion thermal speed. The observed waves show a character of the sideband waves associated with the ion Bernstein mode, and are in a weak agreement with the fundamental electron

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26

Chen, Geng Shun, Rui Hong Tong, and An Hua Zhang. "Magnetic Confinement of Plasmas Generated by Coaxial Twinned Electron Cyclotron Resonance (ECR) Discharge." Advanced Materials Research 413 (December 2011): 18–23. http://dx.doi.org/10.4028/www.scientific.net/amr.413.18.

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Effects of the magnetic field on confinement of the coaxial twined ECR plasmas were studied using the Lanmuir probe diagnostic technique. Under the magnetic-mirror confinement, the plasma density was quite high in the vicinity of the axis of the ECR sources but it decreased rapidly with increasing radial distance; while under the cusped field confinement, the density was lower but uniform. The trend was similar for the electron temperature and the plasma potential. This property may be utilized in materials processes to meet different requirements. Key words: Electron cyclotron resonance (ECR)

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27

Mishra, Bharat, Angelo Pidatella, Alessio Galatà, et al. "Probing Electron Properties in ECR Plasmas Using X-ray Bremsstrahlung and Fluorescence Emission." Condensed Matter 6, no. 4 (2021): 41. http://dx.doi.org/10.3390/condmat6040041.

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A quantitative analysis of X-ray emission from an electron cyclotron resonance (ECR) plasma was performed to probe the spatial properties of electrons having energy for effective ionisation. A series of measurements were taken by INFN-LNS and ATOMKI, capturing spatially and spectrally resolved X-ray maps as well as volumetric emissions from argon plasma. Comparing the former with model generated maps (involving space-resolved phenomenological electron energy distribution function and geometrical efficiency calculated using ray-tracing Monte Carlo (MC) routine) furnished information on structur

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28

Zerbini, M., P. Buratti, O. Tudisco, et al. "Electron cyclotron emission diagnostic of high temperature electron cyclotron resonance heated plasmas on Frascati tokamak upgrade." Review of Scientific Instruments 70, no. 1 (1999): 1007–10. http://dx.doi.org/10.1063/1.1149519.

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29

KENNETT, M. P., D. B. MELROSE, and Q. LUO. "Cyclotron effects on wave dispersion in pulsar plasmas." Journal of Plasma Physics 64, no. 4 (2000): 333–52. http://dx.doi.org/10.1017/s0022377800008862.

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Dispersion in an intrinsically relativistic, one-dimensional, electron–positron pair plasma (a pulsar plasma) is treated exactly, generalizing earlier results that applied in the low-frequency limit and that neglected the cyclotron resonance. The general theory involves two additional relativistic plasma dispersion functions, evaluated at the normal and anomalous Doppler resonances. These two functions are associated with the non-gyrotropic and gyrotropic parts of the response respectively. The functions are evaluated for bell-type and Jüttner distributions. Wave dispersion is discussed for a

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30

Fukumasa, Osamu, and Masanori Matsumori. "Negative Ion Volume Production in Electron Cyclotron Resonance Hydrogen Plasmas." Japanese Journal of Applied Physics 38, Part 1, No. 7B (1999): 4581–85. http://dx.doi.org/10.1143/jjap.38.4581.

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31

Mehlman, G., C. R. Eddy, and S. R. Douglass. "Characterization of electron cyclotron resonance plasmas by vacuum ultraviolet spectroscopy." Journal of Applied Physics 78, no. 11 (1995): 6421–26. http://dx.doi.org/10.1063/1.360525.

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32

Ueda, Yoko, and Yoshinobu Kawai. "Role of extraordinary waves in uniform electron cyclotron resonance plasmas." Applied Physics Letters 71, no. 15 (1997): 2100–2102. http://dx.doi.org/10.1063/1.120416.

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33

Zhao, H. Y., H. W. Zhao, L. T. Sun, et al. "Extreme ultraviolet narrow band emission from electron cyclotron resonance plasmas." Review of Scientific Instruments 79, no. 2 (2008): 02C719. http://dx.doi.org/10.1063/1.2814258.

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34

Rossnagel, S. M., K. Schatz, S. J. Whitehair, R. C. Guarnieri, D. N. Ruzic, and J. J. Cuomo. "The effects of substrate potentials on electron cyclotron resonance plasmas." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 9, no. 3 (1991): 702–6. http://dx.doi.org/10.1116/1.577347.

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35

Ganguli, A., M. K. Akhtar, R. D. Tarey, and R. K. Jarwal. "Absorption of left-polarized microwaves in electron cyclotron resonance plasmas." Physics Letters A 250, no. 1-3 (1998): 137–43. http://dx.doi.org/10.1016/s0375-9601(98)00833-0.

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36

Pool, F. S., and Y. H. Shing. "Deposition of diamondlike films by electron cyclotron resonance microwave plasmas." Journal of Applied Physics 68, no. 1 (1990): 62–65. http://dx.doi.org/10.1063/1.347094.

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37

Lee, J. W., S. J. Pearton, C. R. Abernathy, W. S. Hobson, and F. Ren. "Damage introduction in InGaP by electron cyclotron resonance Ar plasmas." Applied Physics Letters 67, no. 21 (1995): 3129–31. http://dx.doi.org/10.1063/1.114856.

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38

Zhang, Mei, Lujun Pan, Tsutomu Miyazaki, and Yoshikazu Nakayama. "Carbon Nitride Films Produced Using Electron Cyclotron Resonance Nitrogen Plasmas." Japanese Journal of Applied Physics 36, Part 1, No. 7B (1997): 4897–900. http://dx.doi.org/10.1143/jjap.36.4897.

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39

Kovalchuk, A. V., and S. Y. Shapoval. "Electron Cyclotron Resonance Plasma Studies Using the Second Cyclotron Harmonic Resonance." Russian Microelectronics 53, no. 5 (2024): 433–38. http://dx.doi.org/10.1134/s1063739724600353.

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40

Samukawa, Seiji, Yukito Nakagawa, and Kei Ikeda. "Ion Energy Distributions at the Electron Cyclotron Resonance Position in Electron Cyclotron Resonance Plasma." Japanese Journal of Applied Physics 29, Part 2, No. 12 (1990): L2319—L2321. http://dx.doi.org/10.1143/jjap.29.l2319.

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41

Viktorov, M., I. Izotov, E. Kiseleva, A. Polyakov, S. Vybin, and V. Skalyga. "Kinetic whistler instability in a mirror-confined plasma of a continuous ECR ion source." Physics of Plasmas 30, no. 2 (2023): 022101. http://dx.doi.org/10.1063/5.0133930.

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Kinetic instabilities in a dense plasma of a continuous electron cyclotron resonance (ECR) discharge in a mirror magnetic trap at the Gasdynamic Ion Source for Multipurpose Operation (GISMO) setup are studied. We experimentally define unstable regimes and corresponding plasma parameters, where the excitation of electromagnetic emission is observed, accompanied by the precipitation of energetic electrons from the magnetic trap. A comprehensive experimental study of the precipitating electron energy distribution and plasma electromagnetic emission spectra, together with theoretical estimates of

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42

Cao, L. H., Wei Yu, M. Y. Yu, and C. Y. Yu. "Terahertz Radiation from a Plasma Cylinder with External Radial Electric and Axial Magnetic Fields." Laser and Particle Beams 2021 (January 29, 2021): 1–6. http://dx.doi.org/10.1155/2021/6666760.

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Terahertz (THz) radiation from a plasma cylinder with embedded radial electric and axial magnetic fields is investigated. The plasma density and the electric and magnetic fields are such that the electron plasma frequency is near the electron cyclotron frequency and in the THz regime. Two-dimensional particle-in-cell simulations show that the plasma electrons oscillate not only in the azimuthal direction but also in the radial direction. Spectral analysis shows that the resulting oscillating current pattern has a clearly defined characteristic frequency near the electron cyclotron frequency, s

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43

Sun, B. J., M. A. Ochando, and D. López-Bruna. "Acoustic mode driven by fast electrons in TJ-II Electron Cyclotron Resonance plasmas." EPL (Europhysics Letters) 115, no. 3 (2016): 35001. http://dx.doi.org/10.1209/0295-5075/115/35001.

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44

Mejia, S. R., T. Chau, R. D. McLeod, K. C. Kao, and H. C. Card. "Electron cyclotron resonance microwave-plasma etching." Canadian Journal of Physics 65, no. 8 (1987): 856–58. http://dx.doi.org/10.1139/p87-131.

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Electron cyclotron resonance microwave-plasma etching of Si and SiO2 using a (CF4 + O2) gas mixture is investigated in a magnetically confined plasma. High etch rates have been obtained at 0.8 Torr pressure, where the etching mechanism may be due primarily to neutral active species (1 Torr = 133 Pa). The high etch rate can be explained by a high dissociation efficiency of the ECR microwave plasma, and the directionality by carbon deposits associated with it. The magnetic confinement is likely to play a role similar to that of ion and electron screening.

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45

MIATSUO, Seitero. "Electron cyclotron resonance plasma process technology." Journal of the Japan Society for Precision Engineering 54, no. 10 (1988): 1877–80. http://dx.doi.org/10.2493/jjspe.54.1877.

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46

Whang, Ki Woong, Seok Hyun Lee, and Ho Jun Lee. "Cryogenic electron cyclotron resonance plasma etching." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 10, no. 4 (1992): 1307–12. http://dx.doi.org/10.1116/1.578244.

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47

Gaudin, C., L. Hay, J. M. Buzzi, M. Bacal, and M. Lamoureux. "Compact electron cyclotron resonance plasma source." Review of Scientific Instruments 69, no. 2 (1998): 890–92. http://dx.doi.org/10.1063/1.1148584.

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48

Nagase, M. "Silicidation using electron cyclotron resonance plasma." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 10, no. 3 (1992): 1087. http://dx.doi.org/10.1116/1.586083.

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49

Lorenz, G., P. Baumann, G. Castrischer, I. Kessler, K. H. Kretschmer, and B. Dumbacher. "An electron cyclotron resonance plasma source." Materials Science and Engineering: A 139 (July 1991): 302–6. http://dx.doi.org/10.1016/0921-5093(91)90633-x.

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50

Nishikawa, Kazuyasu, Yoshihiro Kusumi, Tatsuo Oomori, Minoru Hanazaki, and Keisuke Namba. "Platinum Etching and Plasma Characteristics in RF Magnetron and Electron Cyclotron Resonance Plasmas." Japanese Journal of Applied Physics 32, Part 1, No. 12B (1993): 6102–8. http://dx.doi.org/10.1143/jjap.32.6102.

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