Готові списки джерел за темами / Micro-electro-mechanical sensors

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Добірка наукової літератури з теми "Micro-electro-mechanical sensors"

Автор: Grafiati
Опубліковано: 30 травня 2022
Оновлено: 31 липня 2025

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Статті в журналах з теми "Micro-electro-mechanical sensors"

1

Gilewski, Marian. "Micro-Electro-Mechanical Systems in Light Stabilization." Sensors 23, no. 6 (2023): 2916. http://dx.doi.org/10.3390/s23062916.

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This article discusses application considerations in the micro-electro-mechanical system’s optical sensor. Furthermore, the provided analysis is limited to application issues occurring in research or industrial applications. In particular, a case was discussed where the sensor was used as a feedback signal source. Its output signal is used to stabilize the flux of an LED lamp. Thus, the function of the sensor was the periodic measurement of the spectral flux distribution. The application problem of such a sensor is the output analogue signal conditioning. This is necessary to perform analogue-
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2

Wang, Jingjing, Baozheng Xu, Libo Shi, Longyang Zhu, and Xi Wei. "Prospects and Challenges of AI and Neural Network Algorithms in MEMS Microcantilever Biosensors." Processes 10, no. 8 (2022): 1658. http://dx.doi.org/10.3390/pr10081658.

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This paper focuses on the use of AI in various MEMS (Micro-Electro-Mechanical System) biosensor types. Al increases the potential of Micro-Electro-Mechanical System biosensors and opens up new opportunities for automation, consumer electronics, industrial manufacturing, defense, medical equipment, etc. Micro-Electro-Mechanical System microcantilever biosensors are currently making their way into our daily lives and playing a significant role in the advancement of social technology. Micro-Electro-Mechanical System biosensors with microcantilever structures have a number of benefits over convent
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3

Jena, Sudarsana, and Ankur Gupta. "Review on pressure sensors: a perspective from mechanical to micro-electro-mechanical systems." Sensor Review 41, no. 3 (2021): 320–29. http://dx.doi.org/10.1108/sr-03-2021-0106.

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Purpose Considering its vast utility in industries, this paper aims to present a detailed review on fundamentals, classification and progresses in pressure sensors, along with its wide area of applications, its design aspects and challenges, to provide state-of-the-art gist to the researchers of the similar domain at one place. Design/methodology/approach Swiftly emerging research prospects in the micro-electro-mechanical system (MEMS) enable to build complex and sophisticated micro-structures on a substrate containing moving masses, cantilevers, flexures, levers, linkages, dampers, gears, det
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4

Huang, Jingli, Guorong Zhao, and Xiangyu Zhang. "MEMS gyroscope/TAM-integrated attitude estimation based on moving horizon estimation." Proceedings of the Institution of Mechanical Engineers, Part G: Journal of Aerospace Engineering 231, no. 8 (2016): 1451–59. http://dx.doi.org/10.1177/0954410016652920.

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To improve the accuracy of the attitude sensor micro electro mechanical system gyroscope in low cost satellite, a nonlinear moving horizon estimation algorithm based on micro-electro mechanical system gyroscope/three-axis magnetometer is proposed in this paper. First, a quaternion micro-electro mechanical system gyroscope/three-axis magnetometer-integrated attitude estimation model is established so as to improve the accuracy of micro-electro mechanical system gyroscope. Thanks to the concealment and autonomy, these two low cost sensors have great potential in the military area. Second, taking
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5

Lee, Chi-Yuan, Xin-Wen Wang, and Chen-Kai Liu. "A Micro Air Velocity Sensor for Measuring the Internal Environment of the Cold Air Ducts of Heating, Ventilation, and Air Conditioning Systems." Micromachines 13, no. 12 (2022): 2198. http://dx.doi.org/10.3390/mi13122198.

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A wireless flexible air velocity microsensor was developed by using micro-electro-mechanical systems (MEMS) technology. Polyimide (PI) material was selected for the waterproof and oilproof requirements of the cold air duct environment of heating, ventilation, and air conditioning (HVAC) systems, and then a wireless flexible micro air velocity sensor was completed. To obtain real-time wireless measurements of the air velocity inside the cold air ducts of an HVAC system, and to create a measurements database, the deployment locations and quantity of micro air velocity sensors for the internal en
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6

Pruessner, Marcel W., Todd H. Stievater, Mike S. Ferraro, William S. Rabinovich, Jennifer L. Stepnowski, and R. Andrew McGill. "Waveguide micro-opto-electro-mechanical resonant chemical sensors." Lab on a Chip 10, no. 6 (2010): 762. http://dx.doi.org/10.1039/b920463f.

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7

Jin, Ren Cheng, Wu Jin Zhang, Zhe Nan Tang, Jia Qi Wang, and Ming Liang Shao. "Analysis of Coupled Electro-Thermal-Mechanical of Micro Gas Pressure Sensor Based on Micro-Hotplate Technology." Advanced Materials Research 60-61 (January 2009): 119–24. http://dx.doi.org/10.4028/www.scientific.net/amr.60-61.119.

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The effect of micro-hotplate (MHP) thermal deformation on the signal output of the MHP-based micro gas pressure sensor is investigated. Combining electro-thermal theoretical analysis and thermal-mechanical finite element modeling, different electro-thermal-mechanical analysis models of the sensors are built and solved at constant current condition and constant temperature condition respectively. The calculated results show that the MHP thermal deformation has little effect on the sensor signal output over the entire pressure range at constant current condition, I=0.7mA. While at constant tempe
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8

En, De, Ning Bo Zhang, Jie Yu Feng, Xiao Bin Wang, and Ning Ning Wang. "Research of Micro-Accelerometer Based on MOEMS." Applied Mechanics and Materials 143-144 (December 2011): 553–57. http://dx.doi.org/10.4028/www.scientific.net/amm.143-144.553.

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Micro-Opto-Electro-Mechanical System (MOEMS) has the advantages of small size, light weight, little energy consumption, high reliability, high-volume production and so on. Micro-sensor is a new generation of sensor being developed, improved and expanded, and it will have a huge effect on the measurement area of still adopted traditional sensors. The characteristics and MOEMS manufacturing technologies are introduced. The concept and advantages of micro-sensors are described. The working principle of micro-accelerometer is analyzed.Micro-accelerometer will play an increasingly key role in the n
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9

Zhai, Yanxin, Haiwang Li, Zhi Tao, et al. "Simulation Analysis and Fabrication of a Silicon Carbide-Based Piezoresistive Accelerometer." Journal of Physics: Conference Series 2246, no. 1 (2022): 012007. http://dx.doi.org/10.1088/1742-6596/2246/1/012007.

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Abstract This paper proposes a Micro Electro Mechanical Systems piezoresistive accelerometer based on a whole SiC substrate. Compared with Si-based sensors, SiC-based sensors have stronger mechanical advantages and unique advantages for applications in ultra-high temperature environments. The characteristics of the accelerometer are designed and numerically simulated, and the accelerometer is evaluated in terms of stress load and working frequency band. An innovative design is carried out to eliminate the stress concentration phenomenon in the corner area of the sensor, which guarantees the wo
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10

Du, Binhan, Jinlong Song, and Zhiyong Shi. "An Anomaly Diagnosis Method for Redundant Inertial Measurement Unit and Its Application with Micro-Electro-Mechanical System Sensors." Applied Sciences 9, no. 8 (2019): 1606. http://dx.doi.org/10.3390/app9081606.

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The application of the micro-electro-mechanical system inertial measurement unit has become a new research hotspot in the field of inertial navigation. In order to solve the problems of the poor accuracy and stability of micro-electro-mechanical system sensors, redundant design is an effective method under the restriction of current technology. Redundant data processing is the most important part in the micro-electro-mechanical system redundant inertial navigation system, which includes the processing of anomaly data and the fusion estimation of redundant data. To further improve the reliabili
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Дисертації з теми "Micro-electro-mechanical sensors"

1

Dinh, Toan Khac. "Thermoresistive Effect for Advanced Thermal-Based Sensors." Thesis, Griffith University, 2017. http://hdl.handle.net/10072/365574.

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Анотація:
Thermoresistive effects in semiconductors (e.g. silicon) and metals (e.g. platinum) have been widely utilized to develop MEMS (Micro Electro-Mechanical Systems) thermal-based sensors. Thanks to their simplicity in design and implementation using conventional MEMS technologies, these sensors have been found in a wide range of applications, including temperature sensing, flow monitoring and acceleration measurement. However, their material cost, inflexibility, inadequate sensitivity and, especially, their lack of ability to work in harsh environments impede these devices in many applications, pa
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2

Saha, Tanmoy. "Design, fabrication, and complementary metal-oxide- semiconductor (CMOS) integration of micro-electro- mechanical systems (MEMS) humidity sensors." Thesis, McGill University, 2013. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=114228.

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The design, microfabrication, and CMOS integration of micro-electro-mechanical systems (MEMS) capacitive humidity sensors are presented in this work. Theoretical analysis and simulations were done to understand how sensor performance can be optimized. While CoventorWare was used for steady-state simulations, a MATLAB simulation model, based on the mathematics of moisture adsorption and diffusion, was developed for dynamic simulations. The sensors were fabricated using a process flow that has a low thermal budget (≤ 300 ○C), as well as material and chemical compatibility with IC fabrication, al
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3

Kedia, Sunny. "Optical Communication Using Hybrid Micro Electro Mechanical Structures (MEMS) and Commercial Corner Cube Retroreflector (CCR)." Scholar Commons, 2015. http://scholarcommons.usf.edu/etd/5969.

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This dissertation presents a free-space, long-range, passive optical communication system that uses electrostatically modulated microelectromechanical systems (MEMS) structures coupled with a glass total internal reflection (TIR)-type corner cube retroreflector (CCR) as a non-emitting data transmitter. A CCR consists of three mirrors orthogonal to each other, so that the incident beam is reflected back to the incident beam, source. The operational concept is to have a MEMS modulator fusion with TIR CCR, such that the modulators are working periodically to disrupt the evanescent waves at the ai
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4

Sadi, Fazle. "Jump parameter estimation with low cost micro-electro-mechanical system sensors and global positioning system for action sports goggles." Thesis, University of British Columbia, 2011. http://hdl.handle.net/2429/41971.

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Algorithms to detect athletic jumps and to determine in real-time performance parameters such as jump air time (AT), horizontal distance, height and drop, are developed in this work. These algorithms are customized to be implemented onboard action sports goggles developed by Recon Instruments Ltd. These goggles are equipped with low cost micro-electro-mechanical inertial sensors and a single point GPS receiver which feed raw data to the algorithms. The micro-LCD display system in the goggles displays jump statistics to the user wearing the goggles. Two novel methods, namely WMCM (Windowed Mean
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5

Lazarevskiy, Alexander, and Олександр Андрійович Лазаревський. "Navigation dead reckoning system based on a mobile phone." Thesis, National Aviation University, 2021. https://er.nau.edu.ua/handle/NAU/50760.

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1. S. Beauregard and H. Haas, “Pedestrian dead reckoning: A basis for personal positioning,” in Proceedings of the 3rd Workshop on Positioning, Navigation and Communication, March 2006, pp. 27–35. 2. A. R. Jimenez, F. Seco, C. Prieto, and J. Guevara, “A comparison of pedestrian dead-reckoning algorithms using a low-cost MEMS IMU,” in 2009 IEEE International Symposium on Intelligent Signal Processing, August 2009, pp. 37–42. 3. P. Kasebzadeh, C. Fritsche, G. Hendeby, F. Gunnarsson, and F. Gustafsson, “Improved pedestrian dead reckoning positioning with gait parameter learning” in 2016 19th
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6

Mylonas, Christos, and Samir Đulić. "Smarttelefon-sensorernas möjligheter - En studie om barometer-, GPS- och accelerometersensorer. The smartphone sensor possibilities - A case study featuring the barometer, GPS and accelerometer sensors." Thesis, Malmö högskola, Fakulteten för kultur och samhälle (KS), 2014. http://urn.kb.se/resolve?urn=urn:nbn:se:mau:diva-20469.

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Denna rapport sammanfattar resultat av ett examensarbete på en högskoleingenjörsutbildningsom utfördes av två studenter på Malmö högskola.Arbetets syfte var att genomföra en mängd olika experiment med accelerometer, barometeroch GPS i en modern smarttelefon. Ett antal scenarier för en tänkbar sensoranvändning i applikationerformulerades för att vägleda olika experiment. Experimentdata dokumenterades noggrantoch analyserades med avsikten att skapa en databank med information för framtida studier.Analys av data inkluderar höjdbestämning i naturen och i byggnader med hjälp av barometersensor,geog
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7

Zhao, Li. "Micro-electro-mechanical Tilt Sensor Design and Fabrications." Thesis, Imperial College London, 2009. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.506035.

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8

Nguyen, Van-Nghi. "Principes alternatifs pour la détection de masse ultime via la dynamique non linéaire de capteurs résonants M/NEMS." Thesis, Lyon, INSA, 2013. http://www.theses.fr/2013ISAL0160/document.

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Les capteurs résonants de type M/NEMS sont largement utilisés dans l’environnement biologique pour la mesure de masse de biomolécules en raison de leur grande précision combinée à une taille réduite. Classiquement, la détection et la quantification se basent sur le décalage fréquentiel induit par la masse ajoutée. Toutefois, ce décalage devient très faible et difficile à distinguer du bruit de mesure lorsque les masses considérées sont très petites. Il est théoriquement possible de gagner encore un ou plusieurs ordres de grandeur en résolution avec ces méthodes fréquentielles en diminuant enco
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9

Pekárek, Jan. "Výzkum a vývoj moderních emisních senzorů typu MEMS." Doctoral thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2014. http://www.nusl.cz/ntk/nusl-233623.

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The dissertation thesis is focused on research and development of modern emission MEMS sensors. The emission sensor based on the field emission from nanostructured materials represents innovative approach to pressure sensing. The nanostructures serve as electron emitter in an electric field between the cathode and anode in the pressure sensor. This electric field is constant and the change in ambient pressure causes the change of distance between electrodes, thereby the electric field is increasing. This intensity is proportional to the emission from the cathode made of nanostructured material
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Pekárek, Jan. "Katodové nanostruktury v MEMS aplikacích." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2008. http://www.nusl.cz/ntk/nusl-217244.

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The main goal of this work is to introduce new carbon structures - carbon nanotubes. The main objective of this work is to take advantage of the unique characteristic of carbon nanotubes to emit electrons at very low supply voltage.
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Книги з теми "Micro-electro-mechanical sensors"

1

IEEE Robotics and Automation Council. IEEE Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and robots, Salt Lake City, Utah, February 20-22, 1989 ; proceedings. Institute of Electrical Electronics Engineers, 1989.

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2

IEEE Workshop on Micro Electro Mechanical Systems (6th 1993 Fort Lauderdale, Fla.). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, Fort Lauderdale, Florida, February 7-10, 1993. IEEE, 1993.

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3

IEEE Workshop on Micro Electro Mechanical Systems (7th 1994 Oiso, Japan). Proceedings: IEEE Micro Electro Mechanical Systems, an investigations of micro structures, sensors, actuators, machines and robotic systems, Oiso, Japan, January 25-28, 1994. IEEE Service Center, 1994.

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4

IEEE Robotics and Automation Society., Denki Gakkai (1888), American Society of Mechanical Engineers. Dynamic Systems and Control Division., and IEEE Workshop on Micro Electro Mechanical Systems (4th : 1991 : Nara-shi, Japan), eds. IEEE micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and robots : proceedings, Nara, Japan, 30 January-2 February 1991. Institute of Electrical and Electronics Engineers, 1991.

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5

IEEE Workshop on Micro Electro Mechanical Systems (5th 1992 Travemünde, Germany). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Travemünde, Germany, 4 February - 7 February 1992. IEEE, 1992.

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6

IEEE Workshop on Micro Electro Mechanical Systems (4th 1991 Nara, Japan.). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Nara, Japan, 30 January-2 February 1991. Institute of Electrical and Electronics Engineers, 1991.

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7

IEEE Workshop on Micro Electro Mechanical Systems (3rd 1990 Napa Valley, Calif.). Proceedings: IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : Napa Valley, California, 11-14 February 1990. Institute of Electrical and Electronics Engineers, 1990.

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8

IEEE Robotics and Automation Society., American Society of Mechanical Engineers. Dynamic Systems and Control Division., Micromachine Center (Japan), and IEEE Workshop on Micro Electro Mechanical Systems (1994 : Ōiso-machi, Japan), eds. IEEE micro electro mechanical systems: An investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994. Institute of Electrical and Electronics Engineers], 1994.

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9

IEEE Workshop on Micro Electro Mechanical Systems (11th 1998 Heidelberg, Germany). The Eleventh Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany. Institute of Electrical and Electronics Engineers, 1998.

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10

IEEE Workshop on Micro Electro Mechanical Systems (10th 1997 Nagoya, Japan). The Tenth Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and robots : proceedings, Nagoya, Japan, January 26-30, 1997. Institute of Electrical and Electronics Engineers, 1997.

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Частини книг з теми "Micro-electro-mechanical sensors"

1

Singh, Kamaljeet, and Ayan Karmakar. "Micromachined Sensors Overview." In Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications. Springer Nature Singapore, 2025. https://doi.org/10.1007/978-981-96-6162-6_3.

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2

Puigcorbé, J., A. Vilà, I. Gràcia, C. Cané, and J. R. Morante. "Dielectric micro-hotplate for integrated sensors: An electro-thermo-mechanical analysis." In Transducers ’01 Eurosensors XV. Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_74.

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3

Fukuhara, Makoto, Lin Wang, Shangning Tao, et al. "A Risk Evaluation Method of Unstable Slopes Using Multipoint Tilting Sensors." In Progress in Landslide Research and Technology, Volume 2 Issue 1, 2023. Springer Nature Switzerland, 2023. http://dx.doi.org/10.1007/978-3-031-39012-8_11.

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AbstractSlope monitoring and early warning systems (EWS) are a promising approach toward mitigating landslide-induced disasters. Many large-scale sediment disasters result in the destruction of infrastructure and loss of human life. The mitigation of vulnerability to slope and landslide hazards will benefit significantly from early warning alerts. The authors have been developing monitoring technology that uses a Micro Electro Mechanical Systems (MEMS) tilt sensor array that detects the precursory movement of vulnerable slopes and informs the issuance of emergency caution and warning alerts. I
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Yu, Zhengyu, Zenon Chaczko, and Jiajia Shi. "Low Cost Wireless Micro-Electro-Mechanical-Systems Accelerometers Linear Sensor Model." In Smart Innovations in Engineering and Technology. Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-030-32861-0_11.

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Otmani, Radouane, and Nasreddine Benmoussa. "Micro Electro Mechanical Systems Modeling by VHDL-AMS: Application to a Piezoresistive Pressure Sensor." In Lecture Notes in Mechanical Engineering. Springer International Publishing, 2020. http://dx.doi.org/10.1007/978-3-030-46729-6_4.

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Patkar, Rajul S., Manoj Kandpal, Neena Gilda, Prasenjit Ray, and V. Ramgopal Rao. "Polymer-Based Micro/Nano Cantilever Electro-Mechanical Sensor Systems for Bio/Chemical Sensing Applications." In Springer Tracts in Mechanical Engineering. Springer India, 2014. http://dx.doi.org/10.1007/978-81-322-1913-2_24.

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"MEMS Sensors and Actuators." In Micro Electro Mechanical System Design. CRC Press, 2005. http://dx.doi.org/10.1201/9781420027754.ch8.

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Iwasaki Yoshinori. "General Report TS-3A: Instrumentation in Geotechnical Engineering." In Proceedings of the 17th International Conference on Soil Mechanics and Geotechnical Engineering. IOS Press, 2009. https://doi.org/10.3233/978-1-60750-031-5-3288.

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Sensors for geotechnical engineering are developing in the last decades. General report consists of two parts. The first part is to review recently developing technologies like MEMS (Micro Electro Mechanical Systems), GPS (Global Positioning Systems), BOTDR (Brillouin Optical Fiber Reflectometry), as well as wireless system. The second part contains the overview of the 11 papers that were submitted to the 17th ICSMGE.
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Kuusik Alar, Sarna Külli, and Reilent Enar. "Home Rehabilitation System Supported by the Safety Model." In Studies in Health Technology and Informatics. IOS Press, 2013. https://doi.org/10.3233/978-1-61499-268-4-145.

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The paper describes a tele-rehabilitation system for simultaneous motor rehabilitation (post-stroke and post-arthroscopy) and continuous patient's condition assessment with the focus on patient safety observations. Micro-electro-mechanical accelerometer and gyroscope sensors attached to the patient gather information about the performed therapeutic exercises. The measurement data processing of the vital sign sensors and accelerometers is done in the health hub device in real time with the patient feedback. Model verification is used for providing that the specified requirements have been actua
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Soga Kenichi, Chaiyasarn Krisada, Viola Fabio, Yan Jize, Seshia Ashwin, and Cipolla Roberto. "Innovation in Monitoring Technologies for Underground Structures." In Information Technology in Geo-Engineering. IOS Press, 2010. https://doi.org/10.3233/978-1-60750-617-1-3.

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One of the greatest challenges facing civil engineers in the 21st century is the stewardship of ageing civil engineering infrastructure. Nowhere is this more apparent than in underground structures in the major cities around the world. Much of them were constructed more than half a century ago and there is widespread evidence of deterioration. Advances in the development of computer vision and miniature micro-electro-mechanical sensors (MEMS) offer intriguing possibilities that can radically alter the paradigms underlying existing methods of condition assessment and monitoring of such infrastr
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Тези доповідей конференцій з теми "Micro-electro-mechanical sensors"

1

Liu, Yan-Cheng, and Michael S. C. Lu. "CMOS Micromachined Capacitive Sensors for Uncooled Infrared Detection." In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2025. https://doi.org/10.1109/mems61431.2025.10917428.

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Huo, Chaoyang, Jingxin Wu, Minjie Zhu, Yuanlin Xia, and Zhuqing Wang. "Reliability Enhancement Experimental Study for Mems Gas Sensors." In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2025. https://doi.org/10.1109/mems61431.2025.10917834.

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Zhou, Nannan, Huimin Xie, Yangxi Zhang та Hongrui Ao. "Optical 3d Μ-Printed Pvdf Piezoelectric Trapezoidal-Shaped Microgrid Force Sensors". У 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2025. https://doi.org/10.1109/mems61431.2025.10917829.

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Xie, Yonghao, Minmin You, Yanjie Li, Yongpeng Ran, Jingquan Liu, and Zude Lin. "Highly Sensitive Cryogenic Temperature Sensors Utlizing Custom-Fabricated Ruthenium Oxide Slurry." In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2025. https://doi.org/10.1109/mems61431.2025.10917957.

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Choudhary, Chandrashekhar, and Tao Li. "A High Efficiency Miniature Multi-Tip Corona Charger for Nanoparticle Sensors." In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2025. https://doi.org/10.1109/mems61431.2025.10917625.

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Mueller, Markus, Hiroshi Toshiyoshi, and Hiroyuki Fujita. "Acoustic wavelet analysis using micro-electro-mechanical sensors." In Micromachining and Microfabrication, edited by Patrick J. French and Kevin H. Chau. SPIE, 1998. http://dx.doi.org/10.1117/12.323905.

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Esashi, M., N. Ura, and Y. Matsumoto. "Anodic bonding for integrated capacitive sensors." In [1992] Proceedings IEEE Micro Electro Mechanical Systems. IEEE, 1992. http://dx.doi.org/10.1109/memsys.1992.187688.

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Shapero, Aubrey, and Yu-Chong Tai. "Parylene-oil-encapsulated low-drift implantable pressure sensors." In 2018 IEEE Micro Electro Mechanical Systems (MEMS). IEEE, 2018. http://dx.doi.org/10.1109/memsys.2018.8346478.

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Chen, Tsung-Huan, Chun-Wen Cheng, and Michael S. C. Lu. "Piezoelectrically-driven capacitively-sensed squeeze-film pressure sensors." In 2018 IEEE Micro Electro Mechanical Systems (MEMS). IEEE, 2018. http://dx.doi.org/10.1109/memsys.2018.8346683.

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Langfelder, G., A. Longoni, F. Zaraga, A. Corigliano, A. Ghisi, and A. Merassi. "A polysilicon test structure for fatigue and fracture testing in micro electro mechanical devices." In 2008 IEEE Sensors. IEEE, 2008. http://dx.doi.org/10.1109/icsens.2008.4716391.

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Звіти організацій з теми "Micro-electro-mechanical sensors"

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Morse, J. D., J. C. Koo, R. T. Graff, A. F. Jankowski, and J. P. Hayes. Field-emission cathode micro-electro-mechanical system technology for sensors, diagnostics, and microelectronics. Office of Scientific and Technical Information (OSTI), 1998. http://dx.doi.org/10.2172/305303.

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Smith, Gabriel, Sarah Bedair, Brian Schuster, and William Nothwang. Haltere Mechanics and Mechanical Logic for Micro-Electro-Mechanical Systems (MEMS) Scale Bio-inspired Navigation Sensors. Defense Technical Information Center, 2012. http://dx.doi.org/10.21236/ada582586.

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Hall and Brown. PR-343-14607-R01 Miniaturized Gas Chromatography and Gas Quality Sensor. Pipeline Research Council International, Inc. (PRCI), 2015. http://dx.doi.org/10.55274/r0010558.

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Анотація:
In natural gas transmission and distribution, many metering stations utilize gas chromatography to ensure the gas complies with the pipeline�s gas quality tariff provisions and to determine the chemical energy content of the gas for billing purposes. It is also used as a check on the operation of gas ultrasonic flowmeters through a calculation of the speed of sound in the gas. Because of limitations on existing gas chromatographs (GC�s), including high installed cost, analysis time, carrier gas consumption and others, there is a desire to consider alternate technologies for natural gas analysi
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