Добірка наукової літератури з теми "MOM capacitors"

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Статті в журналах з теми "MOM capacitors":

1

Omran, Hesham, Hamzah Alahmadi, and Khaled N. Salama. "Matching Properties of Femtofarad and Sub-Femtofarad MOM Capacitors." IEEE Transactions on Circuits and Systems I: Regular Papers 63, no. 6 (June 2016): 763–72. http://dx.doi.org/10.1109/tcsi.2016.2537824.

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2

Park, Kwangwon, and Sanggeun Jeon. "Design of Metal-Oxide-Metal Capacitors in a 65-nm CMOS Process." Journal of Korean Institute of Electromagnetic Engineering and Science 30, no. 10 (October 2019): 846–49. http://dx.doi.org/10.5515/kjkiees.2019.30.10.846.

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3

Hernandez Herrera, H. D., M. Bregant, B. Sanchez, and W. Van Noije. "Onchip digital calibrated 2 mW 12-bit 25 MS/s SAR ADC with reduced input capacitance." Journal of Instrumentation 17, no. 04 (April 1, 2022): C04013. http://dx.doi.org/10.1088/1748-0221/17/04/c04013.

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Abstract We present a 12-bits asynchronous SAR ADC with a low complexity digital on-chip calibration and just 2 pF of total array capacitance. The ADC architecture utilizes a redundant weighting switching of 2 fF MOM capacitors consuming 14 clock-cycles to complete the conversion. Taking advantage of redundancy, the weights of the MSB capacitors are estimated using the LSB array, thus it is possible to digitally compensate for the mismatch non-linearity directly over the ADC output. The circuit consumes 2 mW at 25 MS/s on a core area of 300 μm × 500 μm in 180 nm CMOS technology. ENOB improvements of 0.85 bits were post-layout simulated after calibration. Sample characterization is ongoing.
4

Jeyaraman, Sathyasree, Venkata Narayana Rao Vanukuru, Deleep Nair, and Anjan Chakravorty. "Modeling of High-Q Conical Inductors and MOM Capacitors for Millimeter- Wave Applications." IEEE Transactions on Electron Devices 67, no. 12 (December 2020): 5646–52. http://dx.doi.org/10.1109/ted.2020.3029236.

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5

Chou, Pang-Yen, Nai-Chen Chen, Mark Po-Hung Lin, and Helmut Graeb. "Matched-Routing Common-Centroid 3-D MOM Capacitors for Low-Power Data Converters." IEEE Transactions on Very Large Scale Integration (VLSI) Systems 25, no. 8 (August 2017): 2234–47. http://dx.doi.org/10.1109/tvlsi.2017.2687980.

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6

Chen, Chixiao, Jixuan Xiang, Huabin Chen, Jun Xu, Fan Ye, Ning Li, and Junyan Ren. "A capacitive DAC with custom 3-D 1-fF MOM unit capacitors optimized for fast-settling routing in high speed SAR ADCs." Journal of Semiconductors 36, no. 5 (May 2015): 055011. http://dx.doi.org/10.1088/1674-4926/36/5/055011.

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7

Zulkifeli, M. A., S. N. Sabki, S. Taking, N. A. Azmi, and S. S. Jamuar. "The Effect of Different Dielectric Materials in Designing High-Performance Metal-Insulator-Metal (MIM) Capacitors." International Journal of Electrical and Computer Engineering (IJECE) 7, no. 3 (June 1, 2017): 1554. http://dx.doi.org/10.11591/ijece.v7i3.pp1554-1561.

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<p>A Metal-Insulator-Metal (MIM) capacitor with high capacitance, high breakdown voltage, and low leakage current is aspired so that the device can be applied in many electronic applications. The most significant factors that affect the MIM capacitor’s performance is the design and the dielectric materials used. In this study, MIM capacitors are simulated using different dielectric materials and different number of dielectric layers from two layers up to seven layers. The effect of the different dielectric constants (<em>k</em>) to the performance of the MIM capacitors is also studied, whereas this work investigates the effect of using low-<em>k</em> and high-<em>k</em> dielectric materials. The dielectric materials used in this study with high-<em>k</em> are Al<sub>2</sub>O<sub>3</sub> and HfO<sub>2</sub>, while the low-<em>k</em> dielectric materials are SiO<sub>2</sub> and Si<sub>3</sub>N<sub>4</sub>. The results demonstrate that the dielectric materials with high-<em>k</em> produce the highest capacitance. Results also show that metal-Al<sub>2</sub>O<sub>3</sub> interfaces increase the performance of the MIM capacitors. By increasing the number of dielectric layers to seven stacks, the capacitance and breakdown voltage reach its highest value at 0.39 nF and 240 V, respectively.</p>
8

Xu, Hui, Li Feng Zhang, Qiu Xiang Zhang, Shi Jin Ding, and David Wei Zhang. "Comparison of Reactively Sputtered HfO2 and HfSixOy Dielectrics for High Density Metal-Insulator-Metal Capacitor Applications." Advanced Materials Research 284-286 (July 2011): 893–99. http://dx.doi.org/10.4028/www.scientific.net/amr.284-286.893.

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The reactively sputtered HfO2 and HfSixOy dielectrics have been investigated comparatively for metal-insulator-metal (MIM) capacitor applications. X-ray photoelectron spectroscopy analyses reveal the presence of Hf-O, Hf-O-Si and Si-O chemical bonds in the HfSixOy films as well as lots of oxygen vacancies. The relative concentrations of Hf-O-Si and Si-O bonds increase with an increment of the power applied to the Si target. Further, it is found that the quadratic voltage coefficient of MIM capacitor decreases with increasing the Si content in the HfSixOy dielectric in despite of a decrease in the resulting capacitance density. The HfSixOy dielectric MIM capacitors with a capacitance density of ~8.4fF/μm2 exhibit a quadratic voltage coefficient of 1840 ppm/V2 at 100kHz, which is much smaller than 2750 ppm/V2 for the HfO2 dielectric MIM capacitors with a density of ~11.8fF/μm2.
9

Feng, Wu Shiung, and Yi Jung Chen. "Evaluation of Silicon Nitride MIM Capacitors for MMIC Applications." Applied Mechanics and Materials 397-400 (September 2013): 1873–77. http://dx.doi.org/10.4028/www.scientific.net/amm.397-400.1873.

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With the rapid development and huge requirements of wireless communication systems, microwave-monolithic Integrated circuits (MMIC) with high performance and reliability have become very popular and been developed rapidly. The nitride quality and the reliability of the metal-insulator-metal (MIM) capacitor can be also researched based on time-dependent dielectric breakdown (TDDB) theory. In this paper, the various Si3N4 capacitors having different area sizes, aspect ratios and corners were designed with respect to nitride quality and lifetime evaluation. All of MIM capacitors used in this study are manufactured using a special reliability mask, and the test structures include various sizes of capacitors ranging from 10Kμm2 to 250Kμm2 as well as capacitor corner check. The ramp voltage and the constant voltage tests are destructive oftentimes to identify the cause of dielectric failure. Combining these breakdown marks with an optical microscope inspection and cross section check of the 10Kμm2 capacitors as well as corner-structure check are reported in this paper. That can make the identification and classification of dielectric breakdown mechanisms. When the capacitor size is larger than that of 65K-um2, the factor of failure acceleration raises significantly.
10

Patil, Sumit, Viral Barhate, Ashok Mahajan, Haoyu Xu, Mohammad Rasadujjaman, and Jing Zhang. "Investigation of electrical properties of peald-deposited Ti/Al2O3/Al/Si MIM capacitors." International Journal of Modern Physics B 35, no. 14n16 (June 19, 2021): 2140045. http://dx.doi.org/10.1142/s0217979221400452.

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MIM devices fabricated with 10-nm thickness of Al2O3 high-[Formula: see text] thin film deposited using plasma-enhanced atomic layer deposition (PEALD) system on Al-coated Si substrate were investigated. The structural, morphological and electrical properties of Ti/Al2O3/Al/Si MIM capacitors as-deposited and post-deposition annealed (PDA) at different temperatures were studied and compared. Al2O3 thin films were investigated using atomic force microscopy (AFM) and X-ray diffraction (XRD) and Ti/Al2O3/Al/Si MIM capacitors were characterized by current–voltage ([Formula: see text]–[Formula: see text] and capacitance–voltage ([Formula: see text]–[Formula: see text] measurements. The stable phase formation of Ti/Al2O3/Al/Si MIM capacitor provides the lowest leakage current density in the range of nA/cm2 for as-deposited and annealed films.

Дисертації з теми "MOM capacitors":

1

Orozco, montes Maileth. "Implémentation d'un générateur de nanoparticules en phase gazeuse fondé sur la pulvérisation cathodique magnétron pour la synthèse de films minces nanocomposities céramique/nanoparticules métalliques." Thesis, Limoges, 2017. http://www.theses.fr/2017LIMO0082/document.

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Ces travaux de thèse portent sur l’étude d’un générateur de nanoparticules (NPs) en phase gazeuse basé sur la pulvérisation cathodique magnétron. La mise en oeuvre d’un spectromètre d’émission optique et d’une microbalance à quartz a permis d’observer l’influence des paramètres du procédé (nature et débit des gaz, courant cathodique, configuration magnétique) sur les espèces présentes dans le plasma et la vitesse de dépôt des NPs. Ceci a conduit à une meilleure compréhension du procédé et à l’établissement d’un point de fonctionnement. Des analyses par microscopique électronique en transmission (MET) ont mis en évidence des NPs d’argent cristallisées en vol dont la taille augmente (de 2,5 ± 0,5 nm à 5,2 ± 0,5 nm de diamètre) avec la longueur d’agrégation. L’association de cette source à un réacteur de pulvérisation magnétron conventionnelle a permis la synthèse de nanocomposites constitués de nanoparticules métalliques (Cu ou Ag) dans une matrice céramique diélectrique amorphe et transparente (nitrure ou oxyde d’aluminium). Un décalage de la Résonance Plasmon de Surface (RPS) vers le rouge a été observé avec l’augmentation de la permittivité de la matrice ainsi qu’un élargissement de la RPS avec la diminution de la taille des NPs. Enfin, les propriétés électriques des nanocomposites ont été étudiés au sein de capacités de type Métal/Isolant/Métal (MIM) permettant une modulation de la permittivité avec le taux de dopage en NPs d’argent (5% et 10% vol.)
This thesis is dedicated to the study of free nanoparticles (NPs) source based on magnetron sputtering. Setting up an optical emission spectrometer and a quartz microbalance allowed to observe the influence of the process parameters (gas composition and flow rate, cathodic current, magnetic configuration) on the plasma species and the NPs deposition rate. This lead to a better understanding of the process and the establishment of a process operating windows. Transmission Electron Microscopy (TEM) analysis revealed crystallized silver NPs whose size increased (from 2.5 ± 0.5 nm to 5.2 ± 0.5 nm in diameter) when the aggregation length increased. The free NPs source coupled to a conventional magnetron sputtering chamber allowed the deposition of nanocomposites thin films consisting of metallic NPs (Cu ou Ag) embedded in dielectric transparent amorphous matrix (aluminum nitride or oxide). A red shift of the Surface Plasmon Resonance (SPR) was observed with the increase of the matrix permittivity value. A broadening of the SPR with the decrease of the NPs size was also evidenced. Finally, the electrical properties of the nanocomposites have been studied by means of a Metal/Insulator/Metal capacitor pointing out a modulation of the permittivity with the silver NPs content (5% and 10% vol.)
2

Quémerais, Thomas. "Conception et étude de la fiabilité des amplificateurs de puissance fonctionnant aux fréquences millimétriques en technologies CMOS avancées." Grenoble INPG, 2010. http://www.theses.fr/2010INPG0158.

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Avec l'émergence d'applications millimétriques telles que le radar automobile ou le WHDMI, la fiabilité est devenue un enjeu extrêmement important pour l'industrie. Dans un émetteur/récepteur radio, les problèmes de fiabilité concernent principalement les transistors MOS intégrés dans les amplificateurs de puissance, compte-tenu des niveaux relativement élevés des puissances. Ces composants sont susceptibles de se détériorer fortement par le phénomène de l'injection de porteurs chauds impactant lourdement les performances des amplificateurs. Ce travail de thèse concerne la conception et l'étude de la fiabilité des amplificateurs de puissance fonctionnant aux fréquences millimétriques en technologies CMOS avancées. Le mémoire est articulé autour de quatre chapitres. Les deux premiers chapitres concernent l'étude, la conception, la modélisation et la caractérisation des éléments actifs et passifs intégrés sur silicium et utilisés pour réaliser des amplificateurs de puissance aux fréquences millimétriques. Le troisième chapitre décrit les trois amplificateurs de puissance conçus et réalisés pour les tests de fiabilité. Enfin, le dernier chapitre propose une étude complète de la fiabilité de ces circuits jusqu'au calcul de leur temps de vie
With the emergence of millimeter-wave applications such as automotive radar or WHDMI, the reliability became a very important issue for the industry. In a radio transceiver, the main reliability problems concern the MOS transistors used in the power amplifiers, due to the high power level. These devices are subject to deterioration by the hot carrier phenomenon. This impacts heavily the power amplifiers performances. This thesis work concerns the design and the study of the reliability of millimeter-wave power amplifiers in advanced CMOS technologies. The manuscript is divided into four chapters. The two first one concern the study, the design, the modeling and the characterization of integrated active and passive elements on silicon and used into power amplifiers at millimeter wave frequencies. The third chapter describes the three power amplifiers designed and realized for reliability tests. The final chapter provides a comprehensive study of the reliability of these circuits to calculate their lifetime
3

Miao, Bing. "Hafnium based MIM capacitors for hostile environments." Thesis, University of Newcastle Upon Tyne, 2009. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.506721.

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4

Wakrim, Tariq. "Commutation de capacitance dans les mémoires résistives (ReRAM), application aux mémoires d’impédance (ZRAM ou mem-capacitors)." Thesis, Université Grenoble Alpes (ComUE), 2018. http://www.theses.fr/2018GREAT085/document.

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Les mémoires résistives ReRAM (ou memristors) sont destinées à remplacer les mémoires non volatiles Flash. Les ReRAM utilisent le changement de résistance d’une structure MIM (Métal-Isolant-Métal) soumise à un stress en tension. Jusqu’à présent, l’attention était focalisée sur les mécanismes qui régissent la commutation de résistance dans les dispositifs ReRAM. Moins d’attention a été accordée à la variation de capacitance, c'est-à-dire à la variation de capacité des structures MIM lorsque ces dernières sont soumises à un stress en tension. C’est sur ce dernier point que notre travail porte. Nous étudions la variation d’impédance (conductance et capacitance dans le domaine RF) dans des structures MIM à base de HfO2. Au-delà d’une tension seuil (Set) une diminution de la capacitance est observée, conjointement à une augmentation de conductance. Des cycles mémoires capacité-tension (C-V) et conductance-tension (G-V) sont obtenus de manière reproductible. Des caractérisations en fréquence (C-f et G-f), sous différentes polarisations continues, sont effectuées pour mieux comprendre les mécanismes de commutation de l’impédance. La diminution de capacitance dans l’état conducteur (ON) est attribuée au caractère inductif des filaments conducteurs formés pendant l’étape de Set. Les mécanismes de transport conduisant à l’apparition de ce caractère inductif sont discutés. Nous montrons également l’influence du procédé de dépôt (ALD) de HfO2 sur les caractéristiques C-V et G-V, ainsi que les modifications apportées par l’emploi d’une structure bicouche. Ce travail ouvre la voie à la réalisation de dispositifs à mémoire de capacitance (mem-capacitors), et plus généralement de composants à mémoire d’impédance (ZRAM). Le potentiel de ces dispositifs pour réaliser un filtre reconfigurable (programmable en tension) est démontré d’une manière pratique
Resistive random access memories (ReRAM) hold great potential for replacing Flash memories. A ReRAM memory (or MEMRISTOR) uses a resistive switching phenomenon found in Metal-Insulator-Metal (MIM) structures under a voltage stress. Most researches were focused on the mechanisms governing the resistance switching in ReRAM devices and less attention has been paid to capacitance variation of MIM structures under a voltage stress. Our work is focused on that latter phenomenon. We study impedance variation (conductance and capacitance in the RF domain) in HfO2-based MIM structures. Above a threshold voltage (Set), concurrently to conductance increase, a decrease in the capacitance value is observed. Reproducible capacitance-voltage (C-V) and conductance-voltage (G-V) memory cycles are obtained. Frequency dependent characterizations (C-f and G-f), under different DC bias voltages, are performed with the aim of understanding the mechanisms of impedance switching. The capacitance decrease observed in the conducting (ON) state is attributed to the inductance of the filament created during the Set stage. Transport phenomena responsible for the filament inductive behavior are discussed. Impact of HfO2 deposition process (ALD), as well as the use of bi-layer structures, on C-V and G-V characteristics are shown. This work paves the way for the realization of new capacitance memory devices (mem-capacitors) and most generally for impedance memories (ZRAM). Potential of these devices to design reconfigurable filters (controlled by voltage bias) is demonstrated in a practical way
5

Do, Ky Hien Carleton University Dissertation Engineering Electrical. "Fabrication and characterization of microwave thin-film mim capacitors." Ottawa, 1991.

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6

Ayöz, Suat. "High-frequency optimisation and modelling of RF MEM variable capacitors." Thesis, University of Cambridge, 2010. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.608913.

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7

Aydogdu, Birsu. "Comparison Of Sorption Capacities On Different Samples Of Mcm-41." Master's thesis, METU, 2013. http://etd.lib.metu.edu.tr/upload/12615610/index.pdf.

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ABSTRACT COMPARISON OF SORPTION CAPACITIES OF HYDROCARBONS ON DIFFERENT SAMPLES OF MCM-41 AYDOGDU, Birsu M. Sc., Department of Chemical Engineering Supervisor: Prof. Dr. Hayrettin YÜ
CEL Co-Supervisor: Prof. Dr. Gü
rkan KARAKAS January 2013, 69 pages MCM-41(Mobil Composition Matter-41) is one of the three members of M41S family and has a highly ordered hexagonal honeycomb like structure with a narrow pore size distribution in mesopore range, high surface area, high pore volume and high thermal stability. These features make MCM-41 proper to use for adsorption, catalysis, ion exchange and separation processes. . In this study sorption capacities of C8 aromatics (o-, m-, p-xylene and ethylbenzene at 30 °
C, 50 °
C and 65 °
C) on a MCM-41 sample synthesized in our laboratory were determined gravimetrically by using a commercial automated electro balance system and compared with results obtained in a previous and similar MSc thesis study with a sample of different origin and characteristics
specifically low BET surface area (492 m2/g). MCM-41 sample was synthesized by hydrothermal synthesis method with cetyltrimethylammoniumbromide (CTAMBr as surfactant) and tetraethyl ortosilicate (TEOS as silica source) in basic conditions. This MCM-41 sample was calcined at 540 oC for 8 h and characterized by XRD, nitrogen adsorption at 77 K, TGA, TEM, SEM and SEM-EDX. According to XRD data, main characteristic peak for synthesized MCM-41 was obtained at 2&theta
=2.28°
. Three small reflection peaks can be seen at 2&theta
values of 2.59, 4.27°
and 4.5°
. XRD pattern of the MCM-41, indicated that the desired structure of MCM-41 was successfully synthesized. Surface area, pore volume and average pore diameter were obtained from the nitrogen adsorption data at 77 K as 1154 m2/g, 1.306 cm3/g and 2.75 nm respectively. TGA analysis showed that the 540 oC is proper for the calcination. SEM -EDX analysis gave an oxygen atomic concentration 66.40% and silicon atomic concentration 33.60%. These results showed that the chemical composition of the synthesize material was in almost pure SiO2 form. The adsorbed amount for all isomers at the same pressure decreased as the temperature of the adsorption isotherms increases as expected for physical adsorption. Nitrogen adsorption of MCM-41 in this study showed type IV isotherm with H2 type hysteresis loop according the IUPAC classification. However, for o-,m-, and p-xylene an approximately linear increase in the adsorbed amount as a function of relative pressure was observed from the adsorption isotherms. Except for adsorption isotherms of m-xylene and p-xylene at 65 oC all isotherms of xylenes showed hysteresis loops. Hysteresis loops narrowed down with increasing temperature. p-xylene and m-xylene adsorption isotherms at 65 oC were reversible and did not show any hysteresis loop. Ethylbenzene adsorption isotherms at 30 oC, 50 °
C and 65 oC also showed a linear increase in the adsorption amount as a function of relative pressure like xylenes. At 50 °
C and 65 oC adsorption isotherms of ethylbenzene were reversible without a hysteresis loop. For all adsorbates volume of adsorbed amounts were calculated on the assumption that they exist as saturated liquids at the isotherm temperature and found to be significantly lower than pore volume obtained from nitrogen adsorption isotherm at 77K. Sorption capacities of these hydrocarbons on MCM-41 were also very low when compared to values found in a previous study which involved a MCM-41 sample of significantly lower surface area ( 492 m2/g ). This may be attributed to structure degradation which requires further investigation.
8

YESMIN, Panecatl Bernal. "Síntese e caracterização do material mesoporoso MCM-41 para o desenvolvimento de capacitores MOS." Universidade Federal de Pernambuco, 2015. https://repositorio.ufpe.br/handle/123456789/15471.

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Submitted by Haroudo Xavier Filho (haroudo.xavierfo@ufpe.br) on 2016-02-26T16:11:44Z No. of bitstreams: 2 license_rdf: 1232 bytes, checksum: 66e71c371cc565284e70f40736c94386 (MD5) 5.-Tesis doutorado Yesmin 2015 UFPE Bibliot.pdf: 2813580 bytes, checksum: c994d000e414c2f79bd7b8711d5f2714 (MD5)
Made available in DSpace on 2016-02-26T16:11:44Z (GMT). No. of bitstreams: 2 license_rdf: 1232 bytes, checksum: 66e71c371cc565284e70f40736c94386 (MD5) 5.-Tesis doutorado Yesmin 2015 UFPE Bibliot.pdf: 2813580 bytes, checksum: c994d000e414c2f79bd7b8711d5f2714 (MD5) Previous issue date: 2015-06-05
CAPES
CNPq
FACEPE
Neste trabalho, apresentamos a síntese e caracterização do material mesoporoso MCM-41 para o desenvolvimento de capacitores MOS. A motivação deste trabalho deve-se às propriedades interessantes que MCM-41 apresenta, tais como: área superficial e volume de poro grande e estrutura ordenada de poros. Inicialmente apresentamos a síntese do material mesoporoso MCM-41 pelo método Sol-Gel, e sua caracterização estrutural (DRX e IV), morfológica (MEV e TEM) e texturais (Análise de Adsorção e Dessorção de Nitrogênio), e fazemos uma comparação de resultados com o mesmo material produzido pela Sigma-Aldrich. Também foram obtidos filmes pelo método químico, que foram caracterizados por MEV e DRX e em seguida foram fabricados capacitores MOS. As medidas elétricas do capacitor MOS com dielétrico de MCM-41 foram comparadas com capacitores com dielétrico de SiO2 térmico. Os resultados mostraram uma clara diferença nas curvas de Corrente-Tensão. Conclui-se que a água confinada dentro do filme dielétrico é associada com os valores elevada de capacitância por unidade de área, estes valores permanecem altos depois do aquecimento, indicando que a resposta dielétrica é devida á água ligada ao material dielétrico, formando camadas paralelas á superfície do substrato. Capacitores de MCM-41 foram expostos a vários solventes polares e apolares, assim como á radiação gama e apresentaram distorção na resposta da capacitância e deslocamento nas curvas de corrente – tensão. Finalmente, capacitores de MCM-41 foram hidrolisados com o objetivo de aumentar a concentração dos grupos silanol na superfície do MCM-41 e como consequência alterar a capacitância do dispositivo.
In this work, we report the synthesis and characterization of MCM-41 mesoporous material for the development of devices types MOS capacitors. The motivation of this work is due to the MCM-41 interesting properties such as: surface area and pore volume large and pore ordered structure. Initially, we present a synthesis of MCM-41 mesoporous material by sol-gel method and their structural characterization (XRD and IR), morphological (SEM and TEM) and texture (Nitrogen Desorption and Adsorption Analysis) and make a comparison with the same material produced by Sigma. Also, films were obtained by chemical method, which were characterized by SEM and XRD, and then MOS capacitors were fabricated. The electrical characteristics MCM-4 MOS capacitors were compared with thermal SiO2, the results showing a clear difference in the voltage-current curves. It concludes that water confined within the dielectric film is associated with high values of capacitance per unit area these values remain high even after heating, indicating a dielectric response due to water strongly bonded to the dielectric material forming layers parallel to the substrate surface. The MCM-41 capacitors were exposed to various polar and nonpolar solvents and gamma radiation and showed good results were due to variations in the response to capacitance and the voltage-current curves showed displacement and distortion. Finally, the MCM-41 capacitors were hydrolyzed in order to be able to increase the concentration of silanol groups on the surface of MCM-41; as a consequence the material is more sensitive to moisture and therefore, the capacitance of the device response.
9

Guiller, Olivier. "Intégration de capacités verticales débouchantes au sein d'un interposeur silicium." Thesis, Université Grenoble Alpes (ComUE), 2015. http://www.theses.fr/2015GREAT021/document.

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La densité des circuits intégrés n’a pas cessé d’augmenter depuis la découverte du transistor en 1947, à travers la réduction de la taille de leurs composants. Cependant, cette miniaturisation se heurte aujourd’hui à certaines barrières et la réduction de la longueur de grille des transistors ne permet plus à elle seule l’augmentation des performances globales des circuits intégrés. L’industrie de la microélectronique s’est donc tournée vers de nouvelles solutions d’intégrations hétérogènes visant à développer la diversification des fonctionnalités proposées par les circuits. Parmi ces solutions, l’intégration 3D consistant à empiler plusieurs puces de silicium les unes sur les autres à l’aide de « Through Silicon Vias » (TSV) apparait très prometteuse. Toutefois, de telles structures mettront du temps à atteindre leur maturité puisqu’elles requièrent l’évolution de tout l’écosystème industriel. Une solution intermédiaire en termes de maturité technologique réside dans l’utilisation de l’interposeur : un substrat aminci placé entre les puces haute densité et le « Ball Grid Array » faisant office de plateforme d’intégration permettant le placement côte à côte de puces hétérogènes ainsi que la réalisation d’une forte densité d’interconnexions. Cependant, l’ajout de l’interposeur dans le système a pour effet l’augmentation de l’impédance du réseau de distribution de puissance. L’intégration d’une capacité de découplage au sein de l’interposeur répond à cette problématique en assurant l’intégrité de l’alimentation dans des structures tridimensionnelles.L’objectif de cette thèse de doctorat consiste en l’étude de l’intégration d’un nouveau type de capacité intégrée au sein de l’interposeur silicium. Cette capacité basée sur un empilement Métal-Isolant-Métal (MIM) tridimensionnelle a pour particularité de traverser l’intégralité de l’épaisseur de l’interposeur et d’être co-intégrée avec les TSV.La première étape de l’étude de ce nouveau composant intégré a été la définition d’une architecture performante, réalisée à travers une étude de modélisation permettant l’évaluation de l’influence des nombreux paramètres géométriques et matériaux entrant en jeu. Cette étude a permis de mettre en avant les faibles valeurs d’ESR et d’ESL atteignable par la structure (de l’ordre du m et fH respectivement). Ensuite, la réalisation de la capacité a nécessité le développement de procédés de fabrication innovants permettant le dépôt d’un empilement MIM dans des matrices de vias profonds ainsi que sa co-intégration avec les TSV. Enfin, les performances du composant ont été évaluées à travers la réalisation et la caractérisation d’un démonstrateur de test ainsi qu’une campagne de simulations électromagnétiques par éléments finis. Une densité de capacité de 20 nF.mm-2 a été atteinte sur ce démonstrateur, offrant un gain d’un facteur supérieur à 6 par rapport à une structure planaire
Integrated circuits density never stopped rising since the discovery of the transistor in 1947, through components size shrinking. However, this miniaturization now encounters barriers and reduction of transistor’s gate size alone no longer allows integrated circuits overall performances increase. Therefore, microelectronic industry turned to new heterogeneous integration solutions aiming to develop the diversification of functionalities offered by the circuits. Among these solutions, 3D integration involving stacking several silicon dies on top of each other with the help of Through Silicon Vias (TSV) appears to be promising. Nevertheless, such structures will take times to reach maturity since they require the evolution of the whole industrial ecosystem. A transitional solution in term of technological maturity lies in the use of the interposer: a thinned substrate placed between the high density silicon dies and the Ball Grid Array acting as an integration platform allowing side by side placement of heterogeneous dies as well as high density interconnections. However, the addition of the interposer in the system leads to the increase of the Power Delivery Network impedance. The integration of a decoupling capacitor on the interposer resolves this issue by ensuring power integrity within 3D structures.The objective of this PhD thesis consists in the study of different aspects of a new kind of integrated capacitor within the silicon interposer. This 3D Metal-Insulator-Metal (MIM) capacitor has the particularity to cross over the whole silicon interposer’s thickness and to be co-integrated with TSV.The first step of this new integrated component study has been the definition of an efficient architecture, achieved through a modeling study allowing the influence evaluation of the numerous geometrical and material parameters coming into play. This modeling study pointed out the low ESR and ESL values achievable by the structure (in the m and fH range respectively). Then, the fabrication of the capacitor required the development of innovative process steps allowing the deposition of a MIM stack in deep vias matrices as well as co-integration with TSV. Finally, component performances have been evaluated through the fabrication of a test demonstrator as well as a finites elements electromagnetic simulation campaign. A capacitance density of 20 nF.mm-2 has been reached on this demonstrator, showing an increase up to a factor 6 compared to a planar structure
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Ferrand, Julien. "Stabilisation en phase quadratique de zircone déposée par PEALD : application aux capacités MIM." Thesis, Université Grenoble Alpes (ComUE), 2015. http://www.theses.fr/2015GREAI065/document.

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Depuis plus de dix ans les capacités MIM (Métal Isolant Métal) sont des composants passifs largement intégrés au niveau des interconnections des puces de microélectronique. A cause de la miniaturisation et de la réduction de la surface des puces, la densité de capacité des capacités MIM doit être constamment augmentée. Une solution est l'utilisation d'un isolant avec une constante diélectrique élevée dit « high-k ». Pour les prochaines générations de condensateurs, des densités de capacité supérieur à 30 fF/µm² sont visées. L'oxyde de zirconium (ou zircone) a été sélectionné pour remplacer de l'oxyde de tantale actuellement utilisé. Il possède une constante diélectrique qui dépend de sa structure cristalline. Elle est respectivement de 17, 47 et 37 dans les phases monoclinique, quadratique et cubique. Il est donc nécessaire de déposer la zircone dans la phase quadratique. Cependant, les couches minces de zircone ne sont pas entièrement cristallisées dans la phase quadratique. De plus, elles ne répondent pas aux critères de fiabilité requis par la microélectronique. L'objectif de cette thèse est la stabilisation de la zircone dans la phase quadratique par le dopage. Le tantale et le germanium sont les deux dopants choisis grâce à une étude de sélection de matériaux. Des couches minces d'environ 8 nm de zircone dopée à différentes concentrations ont été réalisées par PEALD (Plasma Enhanced Atomic Layer Deposition). Après les dépôts, des recuits à 400°C pendant 30 min ont été effectués afin de reproduire les traitements thermiques subis par les couches lorsqu'elles sont intégrées dans des puces de microélectronique. Plusieurs types de caractérisations ont été effectuées afin d'étudier l'influence des dopants sur la structure cristalline de la zircone mais aussi sur ses propriétés physico-chimiques. Des tests électriques sur des capacités MIM intégrées ont permis de mesurer les propriétés électriques des couches et la fiabilité de la zircone dopée a été évaluée. Ce travail a pour but la fabrication d'une capacité MIM planaire à base d'oxyde de zirconium dopée dont la densité de capacité sera supérieure à 30 fF/µm² pour des applications de découplage
For more than ten years Metal-Insulator-Metal capacitors (MIM) have been integrated at the level of copper interconnections. All new technology nodes have led to a decrease of the surface of chips; capacitance density must be thus enhanced. The best solution is to use a material with a high dielectric constant commonly named “high-k”. For the next MIM capacitor generation, capacitance density has to be higher than 30 fF/µm². Tantalum oxide, currently used, has reached its limits and it must be replaced. Zirconium dioxide has a high dielectric constant of 47 in the tetragonal phase with a sufficient band gap for MIM applications. When deposited in thin films, zirconia is not fully crystalized in the tetragonal phase. Moreover, this pure zirconium oxide does not fulfill the reliability criteria. The aim of this work is to stabilize zirconia in its tetragonal phase by alloying it with other elements. Tantalum and Germanium are the two dopants selected thanks to a bibliographic study. Thin layers of zirconia of 8 nm alloyed with Tantalum and Germanium have been deposited by Plasma Enhanced Atomic Layer Deposition (PEALD). Samples were annealed at 400°C during 30 minutes after deposition to reproduce the thermal conditions that microelectronic chips are submitted to. Different characterization technics have been used to study the effect of dopants on zirconia's crystalline structure and its physic-chemical properties. Tests have been made on integrated MIM capacitors with Titanium Nitride electrodes to determine the electrical properties of the layers. Reliability of zirconia doped layers was also evaluated. The purpose of this work is the production of zirconia based planar MIM capacitor with a capacitance density of 30 fF/µm²

Книги з теми "MOM capacitors":

1

Samuels, Richard. Massive Modularity. Edited by Eric Margolis, Richard Samuels, and Stephen P. Stich. Oxford University Press, 2012. http://dx.doi.org/10.1093/oxfordhb/9780195309799.013.0004.

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The objective of the article is to discuss the evolution, hypothesis, and some the more prominent arguments for massive modularity (MM). MM is the hypothesis that the human mind is largely or entirely composed from a great many modules. Modules are functionally characterizable cognitive mechanisms that tend to possess several features, which include domain-specificity, informationally encapsulation, innateness, inaccessibility, shallow outputs, and mandatory operation. The final thesis that comprises MM mentions that modules are found not merely at the periphery of the mind but also in the central regions responsible for such higher cognitive capacities as reasoning and decision-making. The central cognition depends on a great many functional modules that are not themselves composable into larger more inclusive systems. One of the families of arguments for MM focuses on a range of problems that are familiar from the history of cognitive science such as problems that concern the computational tractability of cognitive processes. The arguments may vary considerably in detail but they share a common format. First, they proceed from the assumption that cognitive processes are classical computational ones. Second, given the assumption that cognitive processes are computational ones, intractability arguments seek to undermine non-modular accounts of cognition by establishing the intractability thesis.

Частини книг з теми "MOM capacitors":

1

Padmanabhan, Revathy, Navakanta Bhat, and S. Mohan. "Room Temperature-Processed TiO2 MIM Capacitors for DRAM Applications." In Physics of Semiconductor Devices, 37–39. Cham: Springer International Publishing, 2014. http://dx.doi.org/10.1007/978-3-319-03002-9_10.

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2

Mukherjee, K., S. Upreti, A. Bag, S. Mallik, M. Palit, S. Chattopadhyay, and C. K. Maiti. "Resistive Switching in MIM Capacitors Using Porous Anodic Alumina." In Physics of Semiconductor Devices, 29–32. Cham: Springer International Publishing, 2014. http://dx.doi.org/10.1007/978-3-319-03002-9_8.

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3

Koul, Shiban Kishen, and Sukomal Dey. "DMTL Phase Shifter Design Using MAM Capacitors and a MEMS Bridge." In Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters, 117–30. Boca Raton, FL : CRC Press, Taylor & Francis Group, [2019]: CRC Press, 2019. http://dx.doi.org/10.1201/9781351021340-7.

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4

Richard, Claire Therese, D. Benoit, S. Cremer, L. Dubost, B. Iteprat, M. Vincent, E. De Bock, et al. "Wet Process Developments for Electrical Properties Improvement Of 3D MIM Capacitors." In Solid State Phenomena, 379–82. Stafa: Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/3-908451-46-9.379.

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5

Smetana, W. "Buried Thick Film Capacitors Built Up with High-K Dielectrics for MCM-Applications." In MCM C/Mixed Technologies and Thick Film Sensors, 227–37. Dordrecht: Springer Netherlands, 1995. http://dx.doi.org/10.1007/978-94-011-0079-3_24.

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6

Unbehauen, Rolf, and Andrzej Cichocki. "Basic Properties and Systematic Analysis of Switched-Capacitor Networks." In MOS Switched-Capacitor and Continuous-Time Integrated Circuits and Systems, 172–254. Berlin, Heidelberg: Springer Berlin Heidelberg, 1989. http://dx.doi.org/10.1007/978-3-642-83677-0_3.

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7

Unbehauen, Rolf, and Andrzej Cichocki. "Fundamentals of Sampled-Data Systems." In MOS Switched-Capacitor and Continuous-Time Integrated Circuits and Systems, 1–82. Berlin, Heidelberg: Springer Berlin Heidelberg, 1989. http://dx.doi.org/10.1007/978-3-642-83677-0_1.

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8

Unbehauen, Rolf, and Andrzej Cichocki. "MOS Devices for Linear Analog Integrated Circuits." In MOS Switched-Capacitor and Continuous-Time Integrated Circuits and Systems, 83–171. Berlin, Heidelberg: Springer Berlin Heidelberg, 1989. http://dx.doi.org/10.1007/978-3-642-83677-0_2.

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Unbehauen, Rolf, and Andrzej Cichocki. "Basic Building Blocks of Linear SC Networks." In MOS Switched-Capacitor and Continuous-Time Integrated Circuits and Systems, 255–325. Berlin, Heidelberg: Springer Berlin Heidelberg, 1989. http://dx.doi.org/10.1007/978-3-642-83677-0_4.

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10

Unbehauen, Rolf, and Andrzej Cichocki. "Synthesis and Design of SC Filters." In MOS Switched-Capacitor and Continuous-Time Integrated Circuits and Systems, 326–444. Berlin, Heidelberg: Springer Berlin Heidelberg, 1989. http://dx.doi.org/10.1007/978-3-642-83677-0_5.

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Тези доповідей конференцій з теми "MOM capacitors":

1

Wang, Lynn T. "Process variation in metal-oxide-metal (MOM) capacitors." In SPIE Advanced Lithography, edited by Vivek K. Singh and Michael L. Rieger. SPIE, 2008. http://dx.doi.org/10.1117/12.773197.

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Shi, Jinglin, A. Sidelnicov, Kok Wai J. Chew, Mei See Chin, C. Schippel, J. M. M. dos Santos, F. Schlaphof, L. Meinshausen, John R. Long, and D. L. Harame. "Evolution and Optimization of BEOL MOM Capacitors Across Advanced CMOS Nodes." In 48th European Solid-State Device Research Conference (ESSDERC 2018). IEEE, 2018. http://dx.doi.org/10.1109/essderc.2018.8486905.

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3

Vanukuru, Venkata Narayana Rao. "Millimeter-wave bandpass filter using high-Q conical inductors and MOM capacitors." In 2016 IEEE Radio Frequency Integrated Circuits Symposium (RFIC). IEEE, 2016. http://dx.doi.org/10.1109/rfic.2016.7508245.

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4

Steele, J., T. Remmel, S. Wilson, M. Nair, P. Sanders, S. Kiefer, M. Sutton, et al. "MIM Capacitor Reliability Fault Identification Using IR Microthermography and Automated De-processing: A Case Study." In ISTFA 2003. ASM International, 2003. http://dx.doi.org/10.31399/asm.cp.istfa2003p0437.

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Abstract Advanced RF IC’s incorporate numerous components along with the CMOS circuitry. One component is a metal-insulator-metal (MIM) capacitor. Test capacitors have been stressed using accelerated voltage and temperature conditions to assess the long-term reliability. This paper describes a methodology for evaluating the MIM capacitors that have failed during reliability testing. IR microthermography was developed to detect leakage locations in areas that are not visible to optical inspection or standard emission microscopes. These areas were deprocessed to correlate the IR emission and physical defect locations. This information is utilized to understand the failures and improve the reliability.
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Lee, Kuang Shien, and Lai Khei Kuan. "FA Approach on MIM (Metal-Insulator-Metal) Capacitor Failures." In ISTFA 2021. ASM International, 2021. http://dx.doi.org/10.31399/asm.cp.istfa2021p0324.

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Abstract Defects associated with metal-insulator-metal (MIM) capacitor failures can be difficult to locate using conventional fault isolation techniques because the capacitors are usually buried within a stack of back-end metal layers. In this paper, the authors explain, step by step, how they determined the cause of MIM capacitor failures, in one case, in an overvoltage protection device, and in another, a high-speed digital isolator circuit. The process begins with a preliminary fault isolation study based on OBIRCH or PEM imaging followed by more detailed analyses involving focused ion beam (FIB) cross-sectioning and delayering, micro- or nano-probing, resistive or voltage contrast imaging, and other such techniques.
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Chen, Xianfeng, Ming Li, Qiang Guo, Kary Chien, and YanBo Gao. "Failure Analysis for Gate Oxide Breakdown." In ISTFA 2008. ASM International, 2008. http://dx.doi.org/10.31399/asm.cp.istfa2008p0088.

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Abstract Damage-free gate oxide is one of the important factors to ensure device performance and reliability. Special wafer accepts test structures such as a large size MOS capacitor must be laid on test line to monitor the oxide process issue and process window. However, it brings about many challenges to failure analysis engineer. To overcome the EFA and PFA limitations, fresh samples were taken from the passed wafer and the failed ones to identify the root cause of VBD failure. A novel lapping down method was used to access the capacitor structure. Two VBD failure cases were studied. In this study, poor wet clean process was defined as the cause of the silicon substrate surface damage and crystalline defect. It induced poor oxide deposition, which reduced breakdown voltage. Additionally, 12hrs BOE dip was shown to be an effective method for removing poly and oxide layers from large MOS capacitors.
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Maeng, Jimin, Sangsub Song, Chan-Sei Yoo, Heeseok Lee, and Kwangseok Seo. "Integration of MIM Capacitors on BCB with Thin-Film MCM-D Technology." In 2007 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 2007. http://dx.doi.org/10.7567/ssdm.2007.p-2-4.

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8

Yong, Yu, Waisum Wong, Zou Xiaowei, Yu Qianmin, Sun Lijie, Zhao Zicai, Li Zan, and Cheng Changhong. "MoM Capacitor Variation Models for FinFET Era." In 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT). IEEE, 2018. http://dx.doi.org/10.1109/icsict.2018.8564813.

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9

Birmpiliotis, D., M. Koutsoureli, L. Buhagier, G. Papaioannou, and A. Ziaei. "Mitigation of Dielectric Charging in MEMS Capacitive Switches with Stacked TiO2/Y2O3 Insulator Film." In ISTFA 2018. ASM International, 2018. http://dx.doi.org/10.31399/asm.cp.istfa2018p0324.

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Abstract Metal-insulator-metal (MIM) capacitors with single TiO2 and a TiO2/Y2O3 stack are used as insulator films in MIM and MEMS, respectively, are explored. It is found that, under electron injection from bottom electrode, the TiO2 MIM capacitors demonstrate resistive switching with a magnitude of leakage currents not usable for MEMS application. The deposition of a stacked TiO2/Y2O3 dielectric film improves the MEMS performance without compromising the low dielectric charging of TiO2 single layer.
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Ping, Chu Tsui, Yang Peng, and Tee Pei Ling. "Influences Study on MIM capacitors' reliability." In 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE). IEEE, 2012. http://dx.doi.org/10.1109/smelec.2012.6417212.

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Звіти організацій з теми "MOM capacitors":

1

Welty, Amy K., Troy G. Garn, and Mitchell Greenhalgh. Initial Evaluation of CaSDB MOF Xe and Kr Capacities. Office of Scientific and Technical Information (OSTI), March 2018. http://dx.doi.org/10.2172/1467472.

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