Дисертації з теми "MOx sensor"

O desenvolvimento de sensores em sistemas para controle ambiental tem-se mostrado uma área de elevado interesse científico e técnico. Os principais desafios nesta área estão relacionados ao desenvolvimento de sensores com capacidade de detecção de várias substâncias. Neste contexto, os capacitores MOS apresentam-se como dispositivos versáteis para a geração de imagens químicas com potencial de detecção e classificação de diferentes substâncias a partir de apenas um único sensor. No presente trabalho, foi proposto um sensor MOS com um perfil geométrico de porta em forma de cata-vento composta por Pd, Au e Pt. A resposta do sensor mostrou ter alta sensibilidade a moléculas ricas em átomos de H, como os gases H2 e NH3. As medidas de capacitância mostraram que o sensor tem uma resposta não linear para H2 e NH3 obedecendo à lei da isoterma de Langmuir. O sensor MOS mostrou-se eficiente na geração de imagens químicas através da técnica de escaneamento por luz pulsada. As imagens químicas correspondentes aos gases H2 e NH3 mostraram diferentes padrões quando o N2 foi utilizado como gás transportador. A diferença entre os padrões aconteceu principalmente devido ao perfil geométrico da porta metálica. A sensibilidade do sensor mostrou dependência com o potencial de polarização. Nas medidas de capacitância, a maior sensibilidade foi observada para potenciais próximos da tensão de banda plana. Já para as imagens químicas, a maior sensibilidade foi observada para potenciais inteiramente na região de depleção. A sensibilidade do sensor também se mostrou dependente do gás transporta- dor. O sensor mostrou ser mais sensível com N2 como gás transportador do que com ar seco. No entanto, o processo de dessorção dos íons H+ resultou ser mais eficiente em ar seco. Os resultados obtidos no presente trabalho sugerem a possibilidade de fabricação de um nariz optoeletrônico utilizando apenas um único sensor MOS.
The development of sensors and systems for environmental control has been shown to be an area of high scientific and technical interest. The main challenges in this area are related to the development of sensors capable of detecting many different substances. In this context, the MOS devices present themselves as versatile devices for chemical imaging with potential for detection and classification of different substances only using one single sensor. In the present work, was proposed a MOS sensor with a wing-vane geometric profile of its gate constituted of Pd, Au and Pt metals. The sensor\'s response showed to have high sensitivity to molecules rich on H atoms, such as H2 and NH3 gases. Capacitance measurements showed that the sensor has a nonlinear response for H2 and NH3 obeying the Langmuir isotherm law. The MOS sensor proved to be efficient in Chemical Imaging generation through the scanned light pulse technique. The chemical images of the H2 and NH3 gases showed different patterns when the N2 was used as carrier gas. The different patterns responses happened mainly due to geometric profile of the metallic gate. The sensor sensitivity showed dependence on the bias potential. In the capacitance measures, greater sensitivity was observed for potential near the flat-band voltage. In the chemical images, the greater sensitivity was observed for bias potential within depletion region. The sensor sensitivity was also dependent on the carrier gas. The sensor showed to be more sensitive with N2 as carrier gas than to dry air. However the desorption process of H+ have been more efficient in dry air. The results obtained in the present work suggest the possibility of manufacturing an optoelectronic nose using only a single MOS sensor.

Preparación de un sensor reutilizable para dopamina
La síntesis y obtención de la molécula sensor (DAP) y la estructura que la almacena (BioMOF-1) así como la inclusión de la molécula en los poros del cristal, fue exitosa y en ambos casos, siendo corroborados minuciosamente por técnicas como microscopia óptica y electrónica, difracción de rayos X de polvos y monocristal, espectroscopia infrarrroja, análisis termogravimétricos, análisis de adsorción de gases de tipo Langmuir, espectroscopia UV-vis y espectroscopia de emisión fluorescente. La disposición del complejo DAP-BioMOF-1 en películas de PVC flexibles permitió una fácil manipulación del material al ser analizado y utilizado en diversas pruebas evitando de este modo una pérdida de material tanto de BioMOF-1 como DAP al ser manipulado. Una característica fundamental que se consiguió al tener el sensor en esta configuración fue la eficiente, prolongada y controlada liberación de DAP en medios acuosos evitando el uso innecesario de grandes cantidades de 2, 3 diaminofenazina, por tanto, una reducción de material desperdiciado y de esta forma bajando los costos económicos del ensayo. La alta sensibilidad de la molécula sensor ha sido corroborada al detectar soluciones de dopamina con concentraciones nanomolares teniendo un comportamiento predecible que lo hace reproducible, es importante destacar que las concentraciones de DA son similares a las presentes en tejidos biológicos, además la inocuidad del cristal de BioMOF-1 así como su alta capacidad de modular la liberación del sensor hacen de este sistema una opción a tener en cuenta en la detección de dopamina in vivo.
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Dihydro-1,2,4,5-tetrazine-3,6-dicarboxylate was introduced into the chemically stable UiO-66 structure by a postsynthetic linker exchange reaction to create an optical sensor material for the detection of oxidative agents such as nitrous gases. The incorporated tetrazine unit can be reversibly oxidized and reduced, which is accompanied by a drastic colour change from yellow to pink and vice versa. The high stability of the framework during redox reaction was proven by powder X-ray diffraction and nitrogen physisorption measurements.

O objetivo do presente trabalho é o desenvolvimento de um dispositivo MOS como sensor de imagem química para a detecção e classificação de gases de hidrogênio e amônia através da técnica de escaneamento de luz pulsada (TELP). O dispositivo MOS foi fabricado sobre substrato de silício (100) e resistividade de 10 -cm. A porta do dispositivo foi constituída de um eletrodo bimetálico de Au-Pd com espessura nanométrica. Foi proposto um sistema automático de posicionamento X Y para o escaneamento do feixe de luz pulsada baseado no controle PID e no software Labview®. O processo de aquisição de dados foi também automatizado via instrumentação virtual definida pelo software Labview®. A partir das curvas CxV dos capacitores MOS foram extraídos os parâmetros estruturais dos dispositivos mostrando-se estes valores concordantes com os valores definidos no projeto inicial. Adicionalmente foi determinada a largura máxima da camada de depleção sendo este parâmetro importante na sensibilidade da resposta do sensor. O dispositivo MOS em ambiente inerte (N2) apresentou máxima sensibilidade de fotocorrente para polarização de 0,6 V correspondente à máxima largura de depleção. Em ambientes de H2 e NH3, o máximo de sensibilidade foi deslocado para tensões menores a 0,6 V atribuindo-se este fato à adsorção de átomos de Hidrogênio na interface metal/SiO2. As imagens químicas obtidas a partir da resposta do sensor MOS em modo de operação TELP para ambientes de H2 e NH3, respectivamente, apresentaram padrões característicos a cada tipo de gás independentemente da concentração utilizada permitindo a classificação plena destes gases. Os resultados obtidos no presente trabalho sugerem a possibilidade de implementação de um sistema de nariz eletrônico apenas utilizando um único sensor.
The aim of the present work is the development of a MOS device as a sensor of chemical image, for the detection and classification of hydrogen and ammonia gases, through the Scanning Light Pulse Technique (SLPT). The MOS device was fabricated onto silicon bulk (100) and resistivity of 10 -cm. The gate of the device was built from an Au-Pd bimetallic electrode, with nanometric thickness. It was proposed an X Y automatic position system for scanning the light pulsed beam, based on the PID control and on the Labview® software. The data acquisition process was also automated via virtual instrumentation defined by the Labview® software. From the C x V characteristic curves of the MOS capacitors, the device structural parameters were extracted, showing accordance with values defined in the initial project. Furthermore, it was determined the maximum depletion layer width. This parameter is important for the sensibility response of the sensor. The MOS device, in inert environment (N2), has shown photocurrent maximum sensibility for 0,6 V polarization, corresponding to the maximum depletion layer width. In H2 and NH3 environments, the maximum sensibility was dislocated for voltages lower than 0,6V, attributing it to the hydrogen atom adsorption at the metal/SiO2 interface. The chemical images obtained from the MOS sensor response, in SLPT operation mode for H2 and NH3 environments, respectively, showed characteristic patterns to each kind of gas, independent of the concentration used, allowing the complete classification of these gases. The results obtained in the present work suggest the possibility of implementing an electronic nose system, using only one sensor.

The development of high-resolution image sensors with smaller pixel sizes is facing critical issues, such as optical and electrical crosstalk, dark current and dynamic range. As part of this thesis, we addressed this issue by proposing the integration of MOS capacitor deep trench isolation (CDTI). Our studies focus on the validation of the proposal with the aim of improving performances compared to the state of the art. First, we modeled interface states Si/SiO2 and the charge in the oxide. By TCAD simulations, using our model, we were able to evaluate the main characteristics of a pixel. We have validated this approach by comparison between simulations and measurements on a 1.4μm DTI pixel. Then, we developed manufacturing processes for integrating CDTI and defined the associated key parameters. With TCAD simulations of process type, we could achieve the desired performances while keeping a short development cycle and cost. Finally, we have designed, manufactured and tested a 1.4μm CDTI pixel ; we got a very low dark current: ~ 1 aA/pixel at 60°C, which is 6 times less than the DTI pixel, and doubled saturation charge up to 12000e-. Other performances are comparable between the two types of pixels. We have demonstrated the validity of the proposed CDTI solution CDTI

Orientador: Carlos A. dos Reis Filho
Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Eletrica e de Computação
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Resumo: : Este trabalho visa a familiarização com o dispositivo MOS- Split Drain através da construção de diferentes configurações geométricas, seguindo as regras da tecnologia CMOS - 0,8 Jl1Tlda AMS (Austria Mikrosysteme International), e de suas respectivas caracterizações elétricas e magnéticas. Medidas realizadas com os diversos protótipos fabricados permitiram a constatação de diversas características divulgadas na literatura e de suas limitações. O aprendizado que resulta deste trabalho é fundamental para o projeto que os pesquisadores do LPM2 - FEEC - UNICAMP ora realizam visando o desenvolvimento de um microsistema para a medição de consumo de energia elétrica
Abstract: This work aims at the familiarization with MOS- Split Drain transistors by constructing and measuring several units of different geometrical configurations, following the AMS (Austria Mikrosysteme International) design roles for CMOS 0.8 mm technology, and by characterizing the electrical and magnetic aspects of this device. Different prototypes were fabricated and measured, which allowed verifying either the validity or discrepancy of some of its properties published in the literature. The learning from this work is fundamental for the project, which is being carried on by researchers from LPM2 -FEEC - UNICAMP that are involved with the development of a novel microsystem for the measurement of electrical energy consumption
Mestrado
Mestre em Engenharia Elétrica

The master thesis deals with the potential of Czech seniors for Czech marketers. On the basis of secondary as well as primary researches the main elderly consumers' behavioral characteristics, their attitude to commercials and the best practise of communication mix are covered in the thesis. There is also the analysis of the practical example of communication campaign targeting at generation 55+, included its evaluation.

E-handeln har visat sig vara en av de mest fortlöpande och slagkraftiga förändringskrafterna. Detta kan bero på att möjligheter inom köpande, försäljning, betalning och informationssökning finns lättillgängligt på Internet. Konsumtionen av varor och tjänster kategoriseras av låga och höga värden för konsumenten, en sinnesupplevelse för konsumenten kan således anses utgå ifrån rationella och emotionella aspekter. Sinnesmarknadsföring grundar sig i att företag skapar sensationer som genom sinnesintryck kan leda till en sinnesupplevelse hos konsumenten. Stimulans av sinnena kan vara ledande för utvecklingen av konsumentbeteende och kan i sin tur resultera i konsumentupplevelser. Konsumentupplevelse definieras via positiva och negativa integrationer mellan företag och konsument.   Denna studie avser en kvalitativ forskning där vi vill beskriva konsumentupplevelsen inom e-handelsföretag, samt analysera konsumenters upplevelse av e-handel. Undersökningen har begränsats till ett undersökningsobjekt vilket är e-handelsföretaget Boozt.com. För att undersöka syftet med studien har tre fokusgrupper med konsumenter genomförts samt en intervju med företaget. Studien kan slutligen belysa hur och med vilka sinnen e-handelsföretaget Boozt arbetar medvetet respektive omedvetet med, samt hur konsumenterna upplever detta.
E-commerce has proven to be one of the most continuous and powerful forces of change. This may be due to the fact that opportunities within purchases, sales, payments and information are easily accessible online. The consumption of products and services is categorised by low and high values for the consumer, and therefore a sensory experience may be based on rational and emotional aspects. Sensory marketing is achieved by companies creating sensations through sensory input, which can lead to a sensory experience for the consumer. Stimulation of the senses can be the leading factor in developing consumer behaviour, which may result in consumer experiences. Consumer experiences are defined by positive and negative integration between business and consumer. This study aims to present qualitative research where we want to describe the consumer experience in E-commerce, and to analyse the consumer experience within Ecommerce. The investigation was limited to one example object, this being the E-commerce company Boozt.com. To further examine the purpose of the study three focus groups with consumers have been conducted, as well as an interview with the company. The results of the study will illustrate how and which senses the E-commerce company Boozt.com are using, whether it be consciously or unconsciously, as well as describe how consumers experience them.

Les capteurs CMOS sont développés depuis une décennie en vue d’équiper les détecteurs de vertex des expériences de physique des particules à venir, avec les avantages d’un faible budget de matière et de bas coûts de production. Les caractéristiques recherchées sont un temps de lecture court, une granularité élevée et une bonne radiorésistance. Cette thèse est principalement consacrée à l’optimisation de ce dernier point. Pour diminuer le temps de cycle vers les 10 microsecondes, la lecture des pixels en parallèle dans chaque colonne a été implémentée, associée à une logique de suppression d’information des pixels sans signal. Les pixels sont devenus plus complexes et plus sensibles aux rayonnements ionisants. L’optimisation de l’architecture des pixels, par des techniques standard de durcissement aux rayonnements, a porté la limite à 300 krad (quelques Mrad attendus) pour le procédé de fabrication à 0,35-um utilisé jusque-là. L’amélioration de la tenue aux rayonnements ionisants passe par l’utilisation de technologies de taille inférieure à 0,35-um, naturellement plus radio-résistantes. Ceci facilitant de plus l’intégration de tous les composants dans un pixel. Un autre aspect abordé dans cette thèse concerne la tolérance aux rayonnements non ionisants. Différentes technologies CMOS améliorant la collecte de charges ont été testées. L’utilisation d’une couche de détection de haute résistivité a porté la tenue à ces rayonnements à 3•1013 neq/cm2, conforme à l’objectif fixé. Ce résultat marque une étape importante pour les capteurs CMOS qui devraient rapidement satisfaire le cahier des charges d’expériences particulièrement contraignantes telles que CBM par exemple
CMOS Pixel Sensors are being developed since a few years to equip vertex detectors for future high-energy physics experiments with the crucial advantages of a low material budget and low production costs. The features simultaneously required are a short readout time, high granularity and high tolerance to radiation. This thesis mainly focuses on the radiation tolerance studies. To achieve the targeted readout time (tens of microseconds), the sensor pixel readout was organized in parallel columns restricting in addition the readout to pixels that had collected the signal charge. The pixels became then more complex, and consequently more sensitive to radiation. Different in-pixel architectures were studied and it was concluded that the tolerance to ionizing radiation was limited to 300 krad with the 0. 35-um fabrication process currently used, while the targeted value was several Mrad. Improving this situation calls for implementation of the sensors in processes with a smaller feature size which naturally improve the radiation tolerance while simultaneously accommodate all the in-pixel microcircuitry in small pixels. Another aspect addressed in this thesis was the tolerance to non ionizing radiation, with a targeted value of >1013 neq/cm2. Different CMOS technologies featuring an enhanced signal collection were therefore investigated. It was demonstrated that this tolerance could be improved to 3•1013 neq/cm2 by the means of a high-resistivity epitaxial layer. This achievement triggered a new age of the CMOS pixel sensors and showed that their development is on a good track to meet the requirements of the particularly demanding CBM experiment

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Coordenação de Aperfeiçoamento de Pessoal de Nível Superior
Os processos que regulam a alocação de carbono para os órgãos vegetais e as sementes em desenvolvimento são muito importantes no desenvolvimento das plantas. Na maioria dos vegetais, o nutriente translocado mais importante é a sacarose, e a compreensão da biologia molecular, da bioquímica e da fisiologia de seu transporte é um problema central na biologia vegetal. Recentemente, foi isolado, em um laboratório da Universidade Federal de Viçosa, Viçosa-MG, um cDNA de uma biblioteca de expressão de sementes de soja que codifica um homólogo da proteína de ligação à sacarose (SBP), denominado S-64. Para analisar a função desse homólogo de SBP, tabacos transgênicos foram obtidos, introduzindo-se genes quiméricos que continham a região codificadora do gene s-64, ligado ao promotor 35S-CaMV, na orientação senso ou anti-senso via transformação mediada por Agrobacterium sp. O acúmulo do homólogo de SBP aumentou em tabacos que superexpressaram o gene s-64, assim como a expressão anti-senso do gene s-64 levou ao decréscimo nos níveis da proteína endógena. As plantas anti-senso desenvolveram sintomas característicos de uma inibição do transporte de sacarose à longa distância e apresentaram crescimento e desenvolvimento vegetal reduzidos. Em contraste, as plantas que continham a construção senso revelaram tendência de crescimento mais rápido e aceleração do desenvolvimento floral. O desempenho no desenvolvimento das plantas transgênicas foi correlacionado com a taxa fotossintética, sob condições normais de irradiância. Enquanto a taxa de fotossíntese nas linhagens anti-senso diminuiu, nas linhagens senso ela aumentou. Além disto, tanto a repressão anti-senso quanto a superexpressão senso do homólogo de SBP alteraram o particionamento de carboidratos em folhas maduras. Na geração seguinte, as plantas transgênicas senso e anti-senso revelaram diferentes padrões de expressão do gene s-64. Enquanto nas plantas senso não foi observado aumento no acúmulo da proteína, nas plantas anti-senso uma forte inibição de S-64/SBP persistiu. Além disto, as plantas transgênicas anti-senso R1 tiveram um reduzido crescimento vegetativo e radicular, acompanhado de um florescimento tardio. Seguindo esse padrão, a taxa fotossintética das folhas jovens e maduras diminuiu, o que evidencia uma possível diminuição no carregamento e, ou, descarregamento do floema. Um reduzido peso seco total e radicular, assim como experimentos de enxertia, forneceu evidências de que o gene s-64 está diretamente envolvido no descarregamento do floema. Coletivamente, esses resultados indicam que a proteína S-64 é funcionalmente análoga à proteína de ligação à sacarose e representa um importante componente da via de translocação de sacarose em plantas.
The processes that regulate carbon allocation to various organs in the developing seed is very important in plant development. In most plants, the morg important translocated nutrient is sucrose and, thus, understanding the molecular biology, biochemistry, and physiology of sucrose transport is a central problem in plant biology. A sucrose binding protein (SBP) homologue, designated S-64, was isolated and transgenic tobacco plants were obtained by introducing chimeric genes containing the S-64 coding region linked to the 35S CaMV promoter, either in the sense or antisense orientation, via Agrobacterium tumefaciens- mediated transformation. The accumulation of the SBP homologue was increased in transgenic plants expressing the heterologous sbp gene, whereas those expressing the antisense construct had reduced levels of the protein. The antisense transgenic plants developed symptoms characteristic of an inhibition of sucrose translocation and displayed a reduction in plant growth and development. In contrast, overexpression of the protein accelerated plant growth and the onset of flowering induction. The overall developmental performance of the transgenic plants was correlated with their photosynthetic rate under normal conditions. While photosynthesis in the antisense lines was decreased, in the sense lines photosynthetic rates were increased. Furthermore, both antisense repression and overexpression of the SBP homologue in transgenic lines altered carbohydrate partitioning in mature leaves. On the following generation, both sense and antisense plants revealed different S-64 expression patterns. While the sense plants had no overexpression when compared to control plants, the antisense plants was significantly inhibited by the SBP homologue gene. According to previous results, the antisense plants have a reduced vegetative growth accompanied by a late flowering. The photosynthesis was reduced on young and mature leaves from antisense plants supporting a possible decrease on loading and/or unloading of the phloem. A reduced root growth and dry weight, associated with grafting experiments showed strong evidences that gene is directly involved on phloem unloading. Taken together, these results indicate that S-64 protein is functionally analogous to sucrose binding protein, representing an important component of the sucrose translocation pathway in plants.
Não foi localizado o cpf do autor.

The aim of this work is to evaluate possibilities to integrate wireless devices for home automation in BeeeOn system developed on the Faculty of Information Technology in Brno. This thesis describes USB modules that allow connenction to these devices. It describes the communication protocols that the modules can handle and devices using these protocols. It also deals with FHEM system, its features and possibilities of communication with the BeeeOn system. A reader can also find decription of implementation of every module created to provide support of wireless devices to the gate of BeeeOn system.

The purpose of this report is to improve the flow of trafficin intersections through the use of a dynamic algorithm.People spend on average more than six weeks commuting towork in Stockholm every year. A large part of the time thatis spent in traffic is due to the time delay in intersections.In this report, sensors that measure speed and distanceto the vehicle are used instead of detectors that only knowif a car is there or not. There are existing solutions that canoptimise the flow for autonomous cars but since the trafficmay consist of a mix of autonomous and human drivenvehicles during the upcoming 40 years those solutions arenot usable for some time.In this work, a system that can handle both autonomousand human driven vehicles is created. The limitation of thesystem is that it can only receive two cars coming from differentdirections simultaneously. The system does not workfor car queues. The system measures the speed of- and thedistance to the vehicles continuously.According to the simulations that were made the algorithmthat has been designed through this project is moretime efficient than the system that is in place today, assumingthat the assumptions that were made for the currentsystem are correct.The conclusion in this report is that it is possible tomake a system that is more time efficient than the one thatis in use today.
Syftet med den här rapporten är att förbättra flödet ikorsningar genom en dynamisk algoritm. Människor sitterdrygt 6 veckor i bilköer varje år. En stor del av av denspenderande tiden i traffiken är på grund av att fordonbehöver stanna i korsningar.I den här rapporten har sensorer som mäter hastighetoch distans använts istället för dagens detektorer som endastkänner av om ett fordon kör över detektorn eller inte.Det finns andra rapporter med lösningar för att öka flödeti korsningar för självkörande bilar men om man kollar pådet kommande 40 åren kommer det troligtsvis att vara enblandning av självkörande och mänskligt körda bilar.I det här arbetet skapas ett system som kan interageramed både mänskligt körda och autonoma bilar. Begränsningarnai det här systemet är att systemet endast kan taemot två bilar som kommer från olika ingångar i korsningensamtidigt. Systemet fungerar inte för bilköer. Systemet mäterden nuvarande hastigheten och distansen på fordonen.Systemet fungerar för alla olika kombinationer av mänskligtoch självkörande bilar.Resultatet av den här rapporten är att en algoritm harutvecklats och är mer tidseffektivt än systemet som användsi Sverige idag, med våra antaganden om systemet som harutveklats i den här rapporten och systemet som användsidag. Resultatet är baserat på korsningar där bara två bilarmöts utan köer.Slutsatsen av den här rapporten är att det är möjligtatt göra ett system som är mer tidseffektivt än systemetvi använder oss av idag, men vi kan inte säkertsätlla attsystemet i den här rapporten är mer robus och driftsäkertän det som används i Sverige idag.

La presente tesis ha sido realizada principalmente en el Centro Nacional de Microelectrónica de Barcelona (CNM-IMB) del CSIC, y en parte también en el Instituto de Nanotecnología de Lyon (Francia) del CNRS. El Dr Francesc Pérez-Murano ha codirigido la tesis en el CNM, y el Pr Georges Brémond en el INL. Este trabajo se enmarca en el proyecto europeo NaPa ('Emerging Nanopatterning Methods') cuyo objetivo es desarrollar técnicas emergentes, industrializables a medio plazo, de litografía a nivel nanométrico, y sus posibles aplicaciones. Así pues, los objetivos principales de la tesis han sido los desarrollos simultáneos (i) de sistemas nanoelectromecánicos (NEMS) integrados en CMOS, y (ii) de procesos de fabricación basados en una técnica avanzada de nanolitografía llamada 'nanostencil lithography' para poder fabricar tales sistemas monolíticos.
Como primer paso, dos tipos de resonadores nano/micromecánicos ('cantilevers' y 'quad-beams') se han modelado analíticamente para poder estudiar su respuesta frecuencial mecánica. Con el objetivo de excitarlos y detectarlos eléctricamente, se ha optado por una técnica capacitiva. Para poder prever el comportamiento eléctrico de la estructura mecánica se ha implementado un modelo mixto electromecánico. Luego se han estudiado las ventajas y la viabilidad de una integración monolítica con circuitería CMOS. En efecto, los NEMS/CMOS son sistemas que combinan extraordinarias propiedades de sensado, proporcionadas por la parte móvil mecánica, con la posibilidad de detectar la señal de salida en condiciones mucho más favorables: las capacidades parásitas son reducidas drásticamente al tratar dicha señal a través de una circuitería CMOS 'on-chip'. Por este motivo, se ha diseñado especialmente un circuito CMOS de lectura y de bajo consumo. Funciona como amplificador de transimpedancia para convertir la corriente creada por la resonancia mecánica en un voltaje de salida suficientemente alto. A partir de simulaciones, se ha analizado exhaustivamente (i) el comportamiento intrínseco de este circuito y (ii) cuando está acoplado al resonador mecánico.
Sin embargo, la fabricación de tales nanodispositivos integrados en CMOS constituía un reto ya que la integración a nivel de oblea entera de NEMS sobre CMOS mediante procesos no excesivamente costosos no había sido demostrada aún al inicio de esta tesis. Debido a esto, se puso en marcha una colaboración con el EPFL (École Polytechnique Fédérale de Lausanne, Suiza) para desarrollar la litografía 'nanostencil' con el objetivo de integrar a escala de oblea entera estructuras mesoscópicas (micro y nano) sobre circuitos CMOS pre-fabricados. Después de identificar los principales problemas iniciales, se ha podido desarrollar con éxito una tecnología de post-proceso que permite integrar NEMS en CMOS mediante una única etapa de litografía nanostencil. En paralelo, otro post-proceso basado en una etapa de litografía por haz de electrones ('e-beam lithography') se ha puesto a punto de manera que se pueden fabricar nuevos prototipos de nanodispositivos sobre CMOS en cortos plazos de tiempo.
La caracterización eléctrica de estos NEMS/CMOS se ha llevado a cabo tanto en aire como en vacío y se ha demostrado el correcto funcionamiento del dispositivo NEMS/CMOS fabricado. Han sido analizados los niveles de señal obtenidos experimentalmente y las características principales de los espectros de resonancia.
Finalmente, estos NEMS/CMOS han sido implementados como sensores de masa. Actualmente, esta aplicación de los NEMS es una de las más exploradas ya que los resonadores nano/micromecánicos ofrecen grandes ventajas en términos de sensibilidad e integración de sistemas comparados con las tradicionales microbalanzas de cuarzo. En este contexto, se han llevado a cabo cuatro experimentos diferentes: (i) en colaboración con un grupo de investigación en química física se ha estudiado mediante un resonador nano/micromecánico, utilizado como nano/microbalanza, la evaporación de gotas de volúmenes extremadamente reducidos, del orden del femtolitro (10-15), para profundizar en los conocimientos necesarios para el desarrollo de dispositivos de nano/microfluídica; (ii) una arquitectura nueva de resonador, basada en una palanca doble ('doble cantilever'), se ha diseñado y testeado. Este dispositivo novedoso permite hacer medidas de masa en condiciones ambientales con una auto-referencia proporcionando la incertidumbre de la medida; (iii) se han hecho pruebas de deposición en alto vacío de capas ultra-finas de oro (de espesor equivalente inferior a una mono-capa) sobre resonadores. De esa manera, se ha demostrado la gran sensibilidad en masa distribuida de estos dispositivos, en particular al comparar su respuesta con la de una microbalanza de cuarzo a la que superan por entre dos y tres ordenes de magnitud a nivel de sensibilidad; (iv) basándose en los resultados del experimento previo de deposición de oro, se está diseñando, y sigue en curso, un sistema 'quasi-dinámico' de litografía nanostencil junto con el EPFL. Este sistema consiste en efectuar deposiciones sucesivas de distintos materiales a través de un nanostencil desplazado entre cada deposición: de esa manera se obtienen multi-depósitos estructurados y ultra-puros. De manera muy novedosa, el sensor de masa NEMS/CMOS se utiliza aquí como sensor de alineamiento entre la membrana nanostencil y el substrato a litografiar.
This thesis has been a co-direction between Dr. F. Pérez-Murano from CNM-CSIC, Barcelona (Spain) and Pr. G. Brémond from INSA Lyon/INL-CNRS (France). This work involves two main aspects: one has to see with the modeling, the design and the operation of a nanomechanical device integrated on CMOS, and the other on nanofabrication techniques.
First, the mechanical and electrical behavior of electrostatically actuated nano/microresonators (cantilevers, bridges and quad-beams) embedded in a capacitive detection scheme have been analyzed. In such a scheme, the main issue comes from parasitic stray capacitances that can drastically degrade the performance of the transduction. Additionally, output parasitic capacitances arising from the measurement instrumentation can further reduce the available signal levels. In this sense, the advantages and the feasibility of a monolithic integration with CMOS circuitry have been studied. Indeed NEMS/CMOS are very promising systems which combine outstanding sensing attributes, thanks to the mobile mechanical part, with the possibility to electrically detect the output signal in enhanced conditions. Regarding the electrical response, such integration provides two major advantages: (i) reducing all the parasitic loads at the resonator output, and (ii) amplifying and conditioning 'on-chip' the resonance signal. Hence, a specific low-power CMOS readout circuit, whose function is to read out the capacitive current generated by a resonating nano/micromechanical device, has been designed. It is basically a transimpedance amplifier whose architecture is based on a second generation current conveyor. Its topology and the corresponding layout have been described and the circuit behavior (intrinsic and coupled to the NEMS) has been fully simulated. According to simulation results, the detection of the resonance of nano/microresonators is greatly enhanced through the CMOS integration.
Then, NEMS/CMOS devices have been fabricated combining a standard CMOS technology (CNM one) with emerging nanopatterning techniques, in particular with nanostencil lithography (nSL), of which the resolution and the conditions of applications have been optimized. Our works demonstrate the potential of nSL as a parallel, straightforward and CMOS compatible patterning technique to define at full wafer scale nanodevices on CMOS. These results represent the first time that an emerging nanolithography technique has been used to pattern multiple N-MEMS devices on a whole CMOS wafer in a parallel, potentially low-cost approach. The same strategy could be extended to other examples of nanodevices, such as single electron transistors on CMOS, for which there is at present no affordable technological process that fulfill the requirements of high resolution processing at wafer scale and CMOS compatibility.
After their fabrication, fully integrated nanomechanical resonators (cantilevers and quad-beams) have been extensively characterized electrically. Their mechanical resonance has been successfully sensed by the CMOS circuitry. Cantilevers and quad-beams have exhibited quality factors in vacuum up to 9500 and 7000 respectively. The resonance frequency could be tuned by varying the driving voltage and interesting hysteretic non-linear behaviors have been observed either in air or in vacuum
Finally, these resonators have been implemented as ultra-sensitive mass sensors in four different applications: in this way the extreme versatility and the high performance of such sensors has been demonstrated. Indeed, such ultra-sensitive nanosensors open up new possibilities of exploring new physical or chemical phenomena previously unattainable with any other tools. In the first experiment, wetting mechanisms of sessile droplets have been explored at very small scales (volumes in the femtoliter range) implementing the resonators as nano/microbalances. Such phenomena could not have been analyzed with traditional quartz microbalances whose mass resolution is more limited. In the second experiment, a new architecture of resonator based on a double nano/microcantilever has been designed and tested: this new device allows making reliable measurements under ambient conditions by providing a direct estimation of the measurement uncertainty.
The fact that NEMS-based mass sensors provide an unprecedented mass sensitivity and a very high spatial resolution inherent to their small size makes of them interesting devices for industrial applications as well. With regard to this matter, another experiment has consisted in monitoring in-situ the deposition of ultra-thin gold layers both with NEMS/CMOS and quartz-crystal microbalances. When measuring in real time the mass of these uniform deposits of thicknesses inferior to sub-monolayer, silicon nano/microresonators have exhibited a mass sensitivity better than QCM by between two and three orders of magnitude. This is very promising with regard to the possibility of replacing QCM in the semiconductor industry as a tool to monitor the deposition of thin layers. These outstanding mass sensing attributes have led us to apply such sensors as positioning sensors according to an innovative concept. In fact, CNM and EPFL are presently developing a 'quasi-dynamic' stencil lithography system. This system consists in performing successive depositions of several materials through a nanostencil shadow mask which is displaced in-between each deposition: in this way high-purity and structured multi-deposits can be obtained. In this context, NEMS/CMOS mass sensors are used as positioning sensors for the in-situ alignment between the movable nanostencil and the substrate to be patterned.

Prélevés de manière non invasive, les gaz respiratoires sont constitués de nombreux composés organiques volatils (VOCs) dont la quantité dépend de l’état de santé du sujet. L’analyse quantitative de l’air expiré présente alors un fort intérêt médical, que ce soit pour le diagnostic ou le suivi de traitement. Dans le cadre de ma thèse, nous proposons d’étudier un dispositif d’analyse des gaz respiratoires, et notamment de ces VOCs. Cette thèse multidisciplinaire aborde différents aspects, tels que le choix des capteurs, du matériel et des modes d’acquisition, l’acquisition des données à l’aide d’un banc gaz, et ensuite le traitement des signaux obtenus de manière à quantifier un mélange de gaz. Nous étudions la réponse d’un capteur à oxyde métallique (MOX) à des mélanges de deux gaz (acétone et éthanol) dilués dans de l’air synthétique (oxygène et azote). Ensuite, nous utilisons des méthodes de séparation de sources de manière à distinguer les deux gaz, et déterminer leur concentration. Pour donner des résultats satisfaisants, ces méthodes nécessitent d’utiliser plusieurs capteurs dont on connait la forme mathématique du modèle décrivant l’interaction du mélange avec le capteur, et qui présentent une diversité suffisante dans les mesures d’étalonnage pour estimer les coefficients de ce modèle. Dans cette thèse, nous montrons que les capteurs MOX peuvent être décrits par un modèle de mélange linéaire quadratique, et qu’un mode d’acquisition fonctionnant en double température permet de générer deux capteurs virtuels à partir d’un unique capteur physique. Pour quantifier précisément les composants du mélange à partir des mesures sur ces capteurs (virtuels), nous avons conçu des méthodes de séparation de sources, supervisées et non supervisées appliquées à ce modèle non-linéaire : l’analyse en composantes indépendantes, des méthodes de moindres carrés (algorithme de Levenberg-Marquardt), et une méthode bayésienne ont été étudiées. Les résultats expérimentaux montrent que ces méthodes permettent d’estimer les concentrations de VOCs contenus dans un mélange de gaz, de façon précise, en ne nécessitant que très peu de points de calibration
Non-invasively taken, exhaled breath contains many volatile organic compounds (VOCs) whose amount depends on the health of the subject. Quantitative analysis of exhaled air is of great medical interest, whether for diagnosis or for a treatment follow-up. As part of my thesis, we propose to study a device to analyze exhaled breath, including these VOCs. This multidisciplinary thesis addresses various aspects, such as the choice of sensors, materials and acquisition modes, the acquisition of data using a gas bench, and then the processing of the signals obtained to quantify a gas mixture. We study the response of a metal oxide sensor (MOX) to mixtures of two gases (acetone and ethanol) diluted in synthetic air (oxygen and nitrogen). Then, we use source separation methods in order to distinguish the two gases, and to determine their concentration. To give satisfactory results, these methods require first to use several sensors for which we know the mathematical model describing the interaction of the mixture with the sensor, and which present a sufficient diversity in the calibration measurements to estimate the model coefficients. In this thesis, we show that MOX sensors can be described by a linear-quadratic mixing model, and that a dual temperature acquisition mode can generate two virtual sensors from a single physical sensor. To quantify the components of the mixture from measurements on these (virtual) sensors, we have develop supervised and unsupervised source separation methods, applied to this nonlinear model: independent component analysis, least squares methods (Levenberg Marquardt algorithm), and a Bayesian method were studied. The experimental results show that these methods make it possible to estimate the VOC concentrations of a gas mixture, accurately, while requiring only a few calibration points

L'essor de l'industrie micro-électronique au cours des dernières années n'aurait pas été possible sans les innovations en termes de procédés de fabrication de la technologie CMOS (Complementary Metal Oxide Semiconductor) induisant une amélioration continue des performances des composants. Ces innovations doivent relever les défis technologiques inhérents à la fois à la miniaturisation ainsi qu'à la diversification croissante des composants. En réponse à ces défis, des approches de modélisation de type TCAD (Technology Computer Aided Design), permettent de réduire nettement le temps et le coût de développement de ces nouvelles technologies. Dans ce cadre, cette thèse s'intéresse à l'élaboration de modèles TCAD permettant la prise en compte des différents mécanismes physiques ayant lieu lors de l'utilisation des procédés de fabrication avancés. Dans une première partie, les mécanismes de diffusion et d'activation pour des fortes doses d'implantation ont pu être étudiés notamment dans le cas de l'implantation plasma, technique très prometteuse pour des applications de dopage conforme dans les capteurs d'image ou transistors TriGates. La mise en évidence et la modélisation d'agrégats de bore-interstitiel de grande taille ont ainsi pu être menées pour des conditions de fort dopage. Dans une deuxième partie, la diffusion et le transfert d'espèces chimiques entre différents matériaux ont été évalués. Ainsi, la perte de dose de bore dans le silicium dans les empilements " espaceurs " ainsi que la diffusion de bore correspondante dans l'oxyde ont été étudiés. De même, l'évaluation de la diffusion du lanthane pendant un recuit thermique dans les empilements de grille avec oxyde à forte permittivité diélectrique (high-k) a pu être menée. En dernière partie, l'impact de ces différents mécanismes sur le comportement électrique des composants CMOS a ainsi pu être évalué, et une amélioration de la prédictibilité des modèles TCAD a été obtenue sur les dispositifs transistors MOS ainsi que les capteurs d'image CMOS FSI (Front Side Illumination) et BSI (Back Side Illumination).

In this thesis, the effect of buffer strategy on video quality has been investigated. For this purpose, a software system was developed to implement buffer strategy at sender and receiver sides. Four experiments were performed under this system and five scenarios were designed under each experiment. A subjective test of MOS was conducted for all the scenarios to collect people’s perception about three different videos. People from different background and of different age group were invited to take part in all the experiments. Three different videos were shown to each participant in order to investigate user perceived quality of video. MATLAB and MS Excel were used for data collection and plotting graphs. We conclude that people have convergence of opinions when communication break time increases than the size of buffers at both ends. Finally, the MOS ratings of this subjective test prove that by the use of same size buffers at both ends improves the user’s perceived quality of video at acceptable level. Because of empirical study, the main focus was on implementation strategy of buffers at both ends. The implementation strategy was the design of a number of scenarios in which the statistics of the behavior of sender and receiver buffers have been collected.
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This explanatory study investigated the possible causal relationship between congruent background music and consumer behavior. We studied empirically whether sales of tex-mex products was affected when congruent music was played in conjunction to the tex-mex section of a Swedish grocery store. A field experiment was conducted where stereotypical Mexican music was played in conjunction to the tex-mex section. Previous experiments have tested, and confirmed, the notion that music stereotypically related to a country can prime related knowledge and the selection of certain products if the products fit with that knowledge. Earlier research has also been able to support the notion that consumers tend to spend more money and time in store when congruent music is played. Mexican, Pop, and no music was played during three weekends and sales data on tex-mex products was gathered and analyzed. The results indicate that fewer consumers purchased tex-mex products when Mexican music was played, but those who did spent more money and/or purchased a slightly larger number of tex-mex products. However, the small differences between the music conditions were not statistically significant. The potential reasons for this is discussed in the analysis and lastly, implications for future research as well as managerial implications are discussed.

I dagsläget finns det ingen standardiserad metod för att mäta en enhets tillstånd medhjälp av dofter. Vid tillståndsövervakning av rullningslager är vibrationsmätning denmest dominanta metoden. I samband med vibrationsmätning används i vissa falltemperaturövervakning för att få en bättre insikt på rullningslagrets tillstånd. I det härarbetet undersöks de om en elektronisk näsa kan avgöra ett rullningslagers tillstånd.Innan några mätningar påbörjas monterades en elektronisk näsa ihop i ett hölje sombestår av ett kretskort, metalloxid-sensorer och en fläkt för att styra dofter med ettkonstant flöde mot sensorerna. Den elektroniska näsan styrs av en Arduino Nanomikrokontroller. Utöver e-näsan sättes en enhet ihop tillhörande två temperaturgivareoch en luftfuktighetsgivare som styrs av en Arduino UNO. Enhetens syfte är att kunnakontrollera de rådande förhållandena vid mätningar och för att leta någon form avkorrelation mot e-näsan vid eventuella utslag. Förstörande prover av kullager utfördesför att se om e-näsan reagerar innan ett lagerhaveri. Testerna gjordes i en öppen samtsluten miljö och tre stycken olika oljor används för att smörja lagret. Detta för att seom e-näsan reagerar olika beroende på vilken olja som används. En undersökningutförs ifall den elektroniska näsan kan separera på de tre oljorna som används ilagertesterna. För att utvärdera mätresultaten används Excel och Minitab, därprincipalkomponentanalyser genomförs på all mätdata. Efter att alla lagerprover harverkställts utfördes en uppföljning av rullningslagrena för att studera deras tillstånd,detta genom ett optiskt mikroskop.Det framgår i rapporten att med hjälp av analysmetoden PCA syns det att denelektroniska näsan kunde skilja på hydraulolja, motorolja och växellådsolja. Utslag iPCA för de olika mätserierna blev inte identiska men det blev tydligaklusterindelningar hos samtliga mätserier. Genomförd studie visade att med delagerhaveri samt temperaturer går det inte att avgöra ett kullagers tillstånd med hjälpav en elektronisk näsa. Eftersom att de specifika gas-sensorerna som användes till enäsaninte gav någon form av utslag vid mätningarna. Den elektroniska näsanreagerade däremot vid totalhaveri av kullager, vilket är för sent i ett förebyggandeunderhållsperspektiv. Detta medförde att den elektroniska näsan inte kan användas förtillståndsövervakning av det specifika kullagret som användes vid denna studie.
At present, there is no standardized method of measuring a device's condition with thehelp of odors. In condition monitoring of rolling bearings, vibration measurement isthe most dominant method. In case of vibration measurement, temperature monitoringis used in some cases to get a better insight into the condition of the bearing. In thiswork, it is investigated whether an electronic nose can determine the condition of arolling bearing.Before any measurements began, an electronic nose is assembled in a housingconsisting of a circuit board, metal oxide sensors and a fan for stearing odors with aconstant flow towards the sensors. The electronic nose is controlled by an ArduinoNano which is a microcontroller. In addition to the e-nose, a unit is connected to twotemperature sensors and a humidity sensor controlled by an Arduino UNO. The unit'spurpose is to monitor the status and to look for any kind of correlation with the e-nosein case of any possible findings. Destructive specimens of ball bearings are performedto see if the e-nose responds prior to a bearing failure. Tests are conducted in an openand closed environment and three different oils are used to lubricate the bearings.This to see if the e-nose acts differently depending on the oil that is used. Aninvestigation is conducted if the electronic nose can separate the three different typesof oils that is used in the destructive bearing tests. To evaluate the measurementresults, Excel and Minitab are used, where principal component analysis is performedon all measurement data. After all bearing tests have been performed, a follow-up ofthe rolling bearings condition is performed, this through an optical microscope.The report shows that using the PCA analysis method, it appears that the electronicnose could distinguish between hydraulic oil, engine oil and gear oil. In the PCA forthe different measurement series the results did not become identical, but clusterdivisions became clear in all measurement series. Completed study showed that withthese bearing failures and temperatures, it is not possible to determine the condition ofthis ball bearer using an electronic nose. Because the specific gas sensors used for thee-nose did not give any kind of impact during the measurements. On the other hand,the electronic nose responded to a total failure of a ball bearing, which is too late in apreventative maintenance perspective. Therefore, the electronic nose cannot be usedfor condition monitoring of the specific ball bearing used in this study.

Bakgrund: Undernäring förekommer hos uppemot 30 % av äldre personer på särskilda boenden (SÄBO). Det är ett av distriktssköterskans ansvarsområden att upprätthålla en god nutritionsvård. Syfte: Syftet var att undersöka förekomst av undernäring bland äldre personer (65 år och äldre) på särskilt boende samt relationer mellan undernäring och fallrisk, risk för trycksår respektive nedsatt munhälsa. Vidare var syftet att undersöka vilka preventiva åtgärder distriktssköterskan erbjöd för att förbygga alternativt behandla undernäring hos äldre personer. Metod: Studien hade en kvantitativ ansats. Antalet studiedeltagare var 436 personer som bodde på SÄBO. Gruppjämförelser gjordes mellan tre oberoende grupper (ej risk för undernäring, risk för undernäring och undernärd) avseende fallrisk, risk för trycksår samt nedsatt munhälsa. Vidare gjordes logistisk regressionsanalys för att undersöka relationen mellan risk för undernäring/undernärd och fallrisk, risk för trycksår samt nedsatt munhälsa. Deskriptiv statistik användes för att beskriva preventiva och behandlande åtgärder. Resultat: Undernäring relaterar starkt till risk för trycksår. Relation kunde inte påvisas mellan undernäring och fallrisk samt munhälsa. Preventiva åtgärder användes i låg utsträckning. Slutsats: Nutritionsomvårdnad är ett komplext område vilket kräver att distriktssköterskan arbetar i ett multidisciplinärt team med riskbedömningar, utredningar, åtgärder och uppföljningar. Nutritionsåtgärder bör erbjudas i högre utsträckning till personer med risk för undernäring eller som är undernärda.
Background: Undernutrition occurs in up to 30 % of older people in special accommodation (SA). It is one of the district nurse's responsibility areas to maintain good nutritional care. Purpose: The purpose was to investigate the prevalence of undernutrition among older people (65 years and older) in special accommodation and relationships between undernutrition and fall risk, risk of pressure ulcers and impaired oral health. A further aim was to investigate the preventive measures district nurse’s offered to prevent alternatively treat undernutrition in older people. Method: The study had a quantitative approach. The number of study participants was 436 people who lived in SA. Group comparisons were made between three independent groups (not at risk of undernutrition, risk of undernutrition and undernourished) regarding fall risk, risk of pressure ulcers and impaired oral health. Furthermore, logistic regression analysis was conducted to examine the relationship between risk of undernutrition/undernourished and fall risk, risk of pressure ulcers and impaired oral health. Descriptive statistics were used to describe the preventive and treatment measures. Results: Undernutrition relate strongly to the risk of pressure ulcers. No relationship was detected between undernutrition and risk of falling and impaired oral health. Preventive measures was used to a low extent. Conclusion: Nutritional care is a complex area that requires that the district nurse work in a multidisciplinary team with risk assessments, investigations, actions and follow up. Nutritional measures should be offered to a greater extent to persons at risk of undernutrition or with manifest undernutrition.

La structuration multi-échelle (à l’échelle micro- et nanométrique) de matériaux fonctionnels est un thème de recherche particulièrement actif en raison du grand potentiel des dispositifs miniatures utilisables en microélectronique, en optique (contrôle solaire, photonique) en microfluidique (lab-on-a-chip) ou pour de la détection de molécules cibles. Plusieurs techniques de micronanofabrication sont utilisées pour réaliser ces dispositifs miniaturisés. D’une part, des techniques dites « Top-Down » qui sont utilisées pour créer des formes complexes à l’échelle micro- et nanométriques à partir de matériaux massifs. Cette approche repose sur des techniques de lithographie qui offrent une grande liberté sur l’architecture finale du dispositif. Cependant, ce large choix de formes et de structures se fait au prix d’un faible rendement de fabrication qui diminue considérablement le transfert vers la production à grande échelle. A l’inverse, la fabrication de matériaux multi-échelle peut être faite par l’assemblage d’éléments moléculaires (« building blocks »). Cette seconde approche, dite « Bottom-Up » a le mérite de pouvoir être employée sur de grande surfaces mais permet seulement d’obtenir des architectures simples. La combinaison de ces deux approches ouvre un large champ d’exploration et permettrait d’obtenir des structures complexes inédites inaccessibles autrement. Le but de cette thèse est de combiner les approches « Top-Down » et « Bottom-Up » pour obtenir des matériaux à architecture hiérarchique et qui possèdent à la fois des propriétés chimiques et optiques originales. Concrètement, le cœur de ce travail de doctorat a été le dépôt par voie liquide (« Chemical Liquid Deposition ») de couches minces nanoporeuses grâce à une technique de trempage-retrait (« Dip-Coating »). Ce dépôt est suivi d’une structuration induite par évaporation ou bien par lithographie. La nanoporosité de ces couches minces, qui peuvent êtres inorganique ou organique-inorganique (hybride), est induite par un phénomène d’auto-assemblage se déroulant pendant la phase de séchage du film. La structure multi-échelle résultante possède une organisation périodique à l’échelle micro- voire submicrométrique (structure photonique) mais également une nanoporosité (<100 nm) structurée; le dispositif photonique est utilisé pour détecter des vapeurs de Composés Organiques Volatiles (COV). Un accent sera mis sur la compatibilité de ces capteurs optiques avec les caméras de smartphone. Le but final est en effet de fabriquer des capteurs à bas coût, dont la réponse optique est directement lisible par un smartphone
Multi-scale structuration of functional materials at nano- and micro- levels is an active scientific field driven by the tremendous potential of miniaturized devices in microelectronics, optics (light harvesting, photonics), sensing (selective sensors) or microfluidics (lab-on-a-chip). Diverse micro-nanofabrication techniques are exploited for device fabrication. On one hand, Top-Down techniques are developed to fabricate complex micro- and nano- structures from bulk materials; this approach relies on lithography which offers a wide flexibility on the final object architecture but suffers from low-throughput that hinders its use for large-scale production. On the other hand, Bottom-Up techniques based on the assembly of molecular building blocks are suited for the large-scale fabrication of nanostructured materials but are limited to simple architectures. The fruitful combination of both approaches is thus a vast field of investigation with promising technological outcomes.The scope of this thesis is to combine Bottom-Up and Top-Down approaches to obtain hierarchical architectures with original chemical characteristics and optical properties. In practical terms, the deposition by Chemical Liquid Deposition (dip-coating) of nanoporous inorganic or organic-inorganic (hybrid) films structured by self-assembly and the subsequent patterning by either lithographic or evaporation-driven patterning will be presented. The resulting multi-scale structures possess periodic micro- or submicro- organization and engineered nanopores (<100 nm) and are used as optical sensing devices for the detection of Volatile Organic Compounds (VOC). In the pursuit of simplicity, the compatibility of these sensors with Smartphone technology is emphasized; the final goal is to fabricate low-cost sensors with pronounced chemical selectivity that produce an optical signal directly readable by Smartphone cameras

Since their emergence, Wireless Sensor Networks (WSN) have been growing continually becoming a key player in many applications such as military tracking, remote monitoring, bio-sensing and home automation. These networks are based on IEEE 802.15.4 standard which is dedicated to low rate wireless personal area networks (LR-WPANs) in the unlicensed radio band (868MHz/915MHz/2.4GHz). Low power consumption, low cost of implementation and high level of integration are the main challenges of these systems. As radio frequency transceiver is one of the most power hungry block in wireless sensor node, power consumption of radio frequency front-end (RFFE) must be reduced. To deal with, several approaches are possible, either at circuit level by investigating operating modes of transistors and merging functionalities or at system level by searching novel demodulation architecture. This thesis explores the specific requirements and challenges for the design of ultra-low power radio frequency integrated circuits (RFICs), leading to the design of a compact demodulator implemented in 65 nm CMOS technology and compatible with all modulation schemes.

Syftet med denna studie är att studera fenomenet snowbird, undersöka Filippinernas förutsättningar för turism för att till sist beskriva Filippinernas förutsättningar för svensk snowbirdturism. Uppsatsen utgår från ett kvalitativt angreppssätt genom både kvalitativa intervjuer och en kvalitativ innehållsanalys. Studien bygger på tio semistrukturerade intervjuer som tillsammans med en innehållsanalys av internetbaserade källor leder fram till studiens resultat. Studien har visat att Filippinerna har förutsättningar för en utveckling av svensk snowbirdturism. Genom studien har det även kunnat konstaterats att en problematik råder vad det gäller avståndet mellan Sverige och Filippinerna.

Pour la détermination des contraintes thermomécaniques au niveau du silicium, les capteurs piézorésistifs (en rosette) composés de 4nMOS et 4pMOS ont été développés et embarqués dans des produits de la microélectronique.Les relations caractéristiques liant les grandeurs piézorésistives, électriques et mécaniques ont été établies.La détermination des grandeurs piézorésistives nécessite un test de calibration effectué ici à l’aide d’une machine de flexion quatre-points. Cette machine a été conçue et fabriquée dans le cadre de cette thèse et permet d’appliquer une contrainte uniforme uni-axiale dans l’échantillon de silicium et de déterminer ainsi les trois coefficients piézorésistifs.Les capteurs intégrés sur différentes technologies telles que CMOS65, BiCMOS55, CMOS40, BSI140 et PIC25 ont été calibrés avec cette machine.Ces capteurs MOS ont été utilisés dans les cas d’études des contraintes induites par le TSV (technologie CMOS65), par la mise en boitier avec un empilement 3D (technologie CMOS65) et un empilement 2D (technologie BiCMOS55).Les résultats donnent des composantes de contraintes (σyy, σzz) qui ne sont pas en bonne corrélation avec les résultats de simulations. Les réponses électriques des MOS orientés à 90° (direction [010]) par rapport à l’axe des x (direction [100]) sont mises en question, car le coefficient (π12) obtenu à partir de ce MOS agit directement sur les deux composantes de contraintes.D’autre part, les variations de contraintes dans la zone des capteurs, les variabilités inter-puces et inter-plaques perturbent les résultats.Intégrées dans la même structure de test de la technologie CMOS40, différents composants ont été étudiés, notamment les transistors MOS rosette, la structure bandgap et les résistances poly-Si qui ont aussi été calibrés.Une étude de la contrainte thermomécanique induite par la mise en boitier de cette technologie a révélé un fort impact sur les réponses de sortie (mobilité des MOS, tension bandgap).Par une étude de minimisation paramétrique, cet impact a été réduit en agissant sur les dimensions géométriques des constituants et les propriétés matériaux de la résine de moulage.Ces résultats montrent que les MOS en rosette peuvent être utilisés comme capteurs de contraintes mais avec une efficacité limitée. L’utilisation des résistances actives comme capteurs de contraintes est donc envisageable. Par contre, ces MOS peuvent être utilisés pour déterminer l’impact des contraintes sur le fonctionnement de la puce
For the thermomechanical stress assessment in silicon, piezoresistive sensors (in rosette) composed of 4nMOS and 4pMOS were developed and embedded into microelectronic products.The characteristic relations between piezoresistive, electrical and mechanical quantities were established.Piezoresistive quantities were identified thanks to a four-points bending calibration machine. This machine was designed and fabricated in the frame of this PhD and enables applying a known uniform uniaxial stress into silicon sample and then calculating the three piezoresistive coefficients.The sensors embedded into different technologies such as CMOS65, BiCMOS55, CMOS40, BSI140 and PIC25 were calibrated with this machine.These MOS sensors were used for studying stresses induced by TSV (CMOS65 technology), by packaging with 3D stacking (CMOS65 technology) and 2D stacking (BiCMOS55 technology).The results give stress components (σyy, σzz) which are not in a good agreement with simulation results. Electrical responses of the MOS oriented at 90° ([010] direction with respect to the x axis ([100] direction)) are questioned because the coefficients (π12) obtained from this MOS acts directly on the two components.In addition, stress variations in sensors area, as well as inter-chips and inter-wafers variabilities disturb the results.Integrated into the same test chip of the CMOS40 technology, different structures were studied, namely the MOS transistors, the bandgap structure and the poly-Si resistances which were also calibrated.For this technology, a study of thermomechanical stress induced by packaging revealed a significant impact on the output responses (MOS mobility, bandgap voltage). Through a minimization parametric study, this impact was reduced by controlling the geometrical dimensions of components and the material properties of the moulding compound.These results show that, MOS rosettes can be used as stress sensors but with a limited efficiency. The use of active resistances as stress sensors is therefore envisaged. However, these MOS can be used to study the impact of stresses on the chip operation