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1

Letcher, S. "Surface acoustic wave devices." IEEE Journal of Oceanic Engineering 11, no. 4 (1986): 487–88. http://dx.doi.org/10.1109/joe.1986.1145211.

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2

Morgan, David P. "A HISTORY OF SURFACE ACOUSTIC WAVE DEVICES." International Journal of High Speed Electronics and Systems 10, no. 03 (2000): 553–602. http://dx.doi.org/10.1142/s0129156400000593.

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This paper gives a historical account of the development of Rayleigh-wave, or surface-acoustic-wave (SAW), devices for applications in electronics. The subject was spurred on initially by the requirements of pulse compression radar, and became a practical reality with the planar interdigital transducer, dating from 1965. The accessibility of the propagation path gave rise to substantial versatility, and a huge variety of devices were developed. Passive SAW devices are now ubiquitous, with applications ranging from professional radar and communications systems to consumer areas such as TV, pagers and mobile phones. The paper describes the extensive work, particularly in the 1970s, to investigate SAW propagation in crystalline media, including piezoelectric coupling, diffraction and temperature effects. This led to identification of many suitable materials. Concurrently, many devices began development, including pulse compression filters, bandpass filters, resonators, oscillators, convolvers and matched filters for spread spectrum communications. In the 1970s, many of these became established in professional systems, and the SAW bandpass filter became a standard component for domestic TV. In the 1980s and 90s, SAW responded to the new call for low-loss filters, particularly for mobile phones. With losses as low as 2 dB required (and subsequently achieved) at RF frequencies around 900 MHz, a raft of new technologies was developed. Additionaly, for IF filters special techniques were evolved to reduce the physical size needed for narrow bandwidths. Such devices are now manufactured in very large quantities. In order to satisfy these needs, new types of surface wave, particularly transverse leaky waves, were investigated, and materials using such waves now have their place alongside more traditional materials.
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3

Nakahata, H., S. Fujii, K. Higaki, et al. "Diamond-based surface acoustic wave devices." Semiconductor Science and Technology 18, no. 3 (2003): S96—S104. http://dx.doi.org/10.1088/0268-1242/18/3/314.

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4

Woods, R. C. "Design of surface-acoustic wave devices." IEE Proceedings A Science, Measurement and Technology 138, no. 3 (1991): 181. http://dx.doi.org/10.1049/ip-a-3.1991.0025.

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5

Ellis, K. A., R. B. van Dover, T. J. Klemmer, and G. B. Alers. "Magnetically transduced surface acoustic wave devices." Journal of Applied Physics 87, no. 9 (2000): 6304–6. http://dx.doi.org/10.1063/1.372687.

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6

Hashimoto, Ken-ya. "Simulation of Surface Acoustic Wave Devices." Japanese Journal of Applied Physics 45, no. 5B (2006): 4423–28. http://dx.doi.org/10.1143/jjap.45.4423.

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7

Sang Dae Yu. "Simulation of surface acoustic wave devices." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 51, no. 5 (2004): 616–23. http://dx.doi.org/10.1109/tuffc.2004.1302769.

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8

Sang Dae Yu. "Simulation of Surface Acoustic Wave Devices." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 51, no. 5 (2004): 616–23. http://dx.doi.org/10.1109/tuffc.2004.1308696.

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9

Sang Dae Yu. "Simulation of surface acoustic wave devices." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 51, no. 5 (2004): 616–23. http://dx.doi.org/10.1109/tuffc.2004.1320833.

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10

Варламов, А. В., В. В. Лебедев, П. М. Агрузов, И. В. Ильичёв та А. В. Шамрай. "Влияние конфигурации и материала встречно-штыревых преобразователей на возбуждение поверхностных и псевдоповерхностных акустических волн в подложках ниобата лития". Письма в журнал технической физики 45, № 14 (2019): 40. http://dx.doi.org/10.21883/pjtf.2019.14.48023.17749.

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The excitation, distribution, and interaction of surface acoustic waves (SAW) and pseudo surface acoustic waves (PSAW) in a X-cut lithium niobate substrates were investigated. The resonant excitation frequencies, the wave distribution velocities and the dispersion characteristics were determined for each of the wave types. The influence of the interdigital transducer (IDT) material on the excitation efficiency and the interaction between investigated wave types was found out. The interdigital transducer material and configuration requirements for integrated acousto-optic devices were determined.
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11

Xu, Hongsheng, Hao Jin, Shurong Dong, et al. "Mode Analysis of Pt/LGS Surface Acoustic Wave Devices." Sensors 20, no. 24 (2020): 7111. http://dx.doi.org/10.3390/s20247111.

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Platinum (Pt) gratings on langasite (LGS) substrates are a widely used structures in high temperature surface acoustic wave (SAW) devices. Multiple modes can be excited in Pt/LGS SAW devices owing to the heavy weight of the Pt electrode and leaky waves in the LGS substrate. In this work, we report on a detailed mode analysis of Pt/LGS SAW devices, where three commonly used LGS cuts are considered. A three-dimensional (3D) finite element method (FEM) numerical model was developed, and the simulation and experiment results were compared. The experiment and simulation results showed that there are two modes excited in the Pt/LGS SAW devices with Euler angle (0°, 138.5°, 27°) and (0°, 138.5°, 117°), which are Rayleigh-type SAW and SH-type leaky wave, respectively. Only the Rayleigh-type mode was observed in the Pt/LGS SAW devices with Euler angle (0°, 138.5°, 72°). It was found that the acoustic velocities are dependent on the wavelength, which is attributed to the change of wave penetration depth in interdigital transducers (IDTs) and the velocity dispersion can be modulated by the thickness of the Pt electrode. We also demonstrated that addition of an Al2O3 passivation layer has no effect on the wave modes, but can increase the resonant frequencies. This paper provides a better understanding of the acoustic modes of Pt/LGS SAW devices, as well as useful guidance for device design. It is believed that the Rayleigh-type SAW and SH-type leaky waves are potentially useful for dual-mode sensing applications in harsh environments, to achieve multi-parameter monitoring or temperature-compensation on a single chip.
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12

Ali, Hagar A., Moataz M. Elsherbini, and Mohamed I. Ibrahem. "Wavelet Transform Processor Based Surface Acoustic Wave Devices." Energies 15, no. 23 (2022): 8986. http://dx.doi.org/10.3390/en15238986.

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Due to their numerous advantages, Wavelet transform processor-based acoustic wave devices constitute an interesting approach for various engineering disciplines, such as signal analysis, speech synthesis, image recognition and atmospheric and ocean wave analysis. The major aim of this paper is to review the most recent methods for implementing wavelet transform processor-based surface acoustic wave devices. Accordingly, the goal of this paper is to compare different models, and it will provide a generalized model with small insertion loss values and side lobe attenuation, making it suitable for designing multiplexer filter banks and also to ease the way for the continued evolution of device design. In this paper, a generalized framework on surface acoustic wave devices is presented in terms of mathematical equations, types of materials, crystals types, and interdigital transducer design in addition to addressing some relevant problems.
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13

Kolesnik, Kirill, Vijay Rajagopal, and David J. Collins. "Computational optimization of acoustofluidic devices for advanced particle micromanipulation." Journal of the Acoustical Society of America 154, no. 4_supplement (2023): A320. http://dx.doi.org/10.1121/10.0023666.

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Acoustofluidic devices, which combine principles of acoustics and microfluidics, have emerged as a promising platform for biological micro-object micromanipulation due to their non-invasive, accurate, rapid, and label-free qualities. Acoustofluidic devices have found utility in various biomedical applications including single-cell studies, point-of-care testing, lab-on-a-chip studies, and tissue engineering. In this work, we present novel device configurations which enable complex and high-resolution control of suspended micro-objects. The studies presented here utilize computational analysis to optimize (1) traveling surface acoustic wave device dimensions, (2) the configuration of a planar acoustic resonator that integrates a structured surface, (3) the thickness of the coupling layer and superstrate materials for bulk-wave transmission, and (4) the shape of acoustically actuated 3-D microstructures. These devices were verified experimentally to generate highly localized acoustic fields and acoustic streaming effects enabling rapid and spatially controllable particle capture, transport, and patterning. In doing so, this work demonstrates that computational analysis is an integral part of the development of acoustofluidic devices for advanced micromanipulation, which have extensive potential in biomedical applications.
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14

Yang, Yang, Corinne Dejous, and Hamida Hallil. "Trends and Applications of Surface and Bulk Acoustic Wave Devices: A Review." Micromachines 14, no. 1 (2022): 43. http://dx.doi.org/10.3390/mi14010043.

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The past few decades have witnessed the ultra-fast development of wireless telecommunication systems, such as mobile communication, global positioning, and data transmission systems. In these applications, radio frequency (RF) acoustic devices, such as bulk acoustic waves (BAW) and surface acoustic waves (SAW) devices, play an important role. As the integration technology of BAW and SAW devices is becoming more mature day by day, their application in the physical and biochemical sensing and actuating fields has also gradually expanded. This has led to a profusion of associated literature, and this article particularly aims to help young professionals and students obtain a comprehensive overview of such acoustic technologies. In this perspective, we report and discuss the key basic principles of SAW and BAW devices and their typical geometries and electrical characterization methodology. Regarding BAW devices, we give particular attention to film bulk acoustic resonators (FBARs), due to their advantages in terms of high frequency operation and integrability. Examples illustrating their application as RF filters, physical sensors and actuators, and biochemical sensors are presented. We then discuss recent promising studies that pave the way for the exploitation of these elastic wave devices for new applications that fit into current challenges, especially in quantum acoustics (single-electron probe/control and coherent coupling between magnons and phonons) or in other fields.
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15

Chen, Chao, Tao Lin, Jianteng Niu, et al. "Surface acoustic wave controlled skyrmion-based synapse devices." Nanotechnology 33, no. 11 (2021): 115205. http://dx.doi.org/10.1088/1361-6528/ac3f14.

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Abstract Magnetic skyrmions, which are particle-like spin structures, are promising information carriers for neuromorphic computing devices due to their topological stability and nanoscale size. In this work, we propose controlling magnetic skyrmions by electric-field-excited surface acoustic waves in neuromorphic computing device structures. Our micromagnetic simulations show that the number of created skyrmions, which emulates the synaptic weight parameter, increases monotonically with increases in the amplitude of the surface acoustic waves. Additionally, the efficiency of skyrmion creation is investigated systemically with a wide range of magnetic parameters, and the optimal values are presented accordingly. Finally, the functionalities of short-term plasticity and long-term potentiation are demonstrated via skyrmion excitation by a sequence of surface acoustic waves with different intervals. The application of surface acoustic waves in skyrmionic neuromorphic computing devices paves a novel approach to low-power computing systems.
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16

Yu, Tai-Ho. "Reflection and Transmission Analysis of Surface Acoustic Wave Devices." Micromachines 14, no. 10 (2023): 1898. http://dx.doi.org/10.3390/mi14101898.

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This paper presents a study of the propagation of surface acoustic waves in a single and periodic array of metal strip overlays on the surface of layered substrates. Responses of reflected and transmitted surface acoustic waves due to various geometric design parameters of the grating arrays are investigated. An eight-dimensional matrix formulation based on Stroh formalism is adopted to analyze wave propagation in piezoelectric layered media. The dispersion curves for aluminum–zinc oxide films on glass substrates are determined using the surface impedance tensor method. A transfer matrix in terms of the state vectors in cooperation with continuity conditions on the edges of the grating array is used to determine the reflectivity and transmittance of the horizontally propagating surface acoustic waves. The analysis and simulation results show that when the surface acoustic wave is obliquely incident on an array of gratings and the strip width is equal to the gap between strips, the constructive interference of the reflected wave occurs at odd multiples of the strip width to a wavelength ratio of 0.25. When the strip width is unequal to the gap, the constructive interference of the reflected wave is an odd multiple of the strip width to a wavelength ratio of 0.5. An increase in the number of strips concentrates the reflectivity’s extreme frequencies, and an increase in the strip height increases the bandwidth of the extreme frequencies. Both of these increases strengthen the reflected wave’s constructive interferences.
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17

Zhou, Jian, Xingli He, Wenbo Wang, et al. "Flexible surface acoustic wave devices and its applications in microfluidics." MRS Proceedings 1659 (2014): 27–33. http://dx.doi.org/10.1557/opl.2014.33.

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Abstract:Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.
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18

Hazan, Zadik, Jona Zumeris, Harold Jacob, et al. "Effective Prevention of Microbial Biofilm Formation on Medical Devices by Low-Energy Surface Acoustic Waves." Antimicrobial Agents and Chemotherapy 50, no. 12 (2006): 4144–52. http://dx.doi.org/10.1128/aac.00418-06.

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ABSTRACT Low-energy surface acoustic waves generated from electrically activated piezo elements are shown to effectively prevent microbial biofilm formation on indwelling medical devices. The development of biofilms by four different bacteria and Candida species is prevented when such elastic waves with amplitudes in the nanometer range are applied. Acoustic-wave-activated Foley catheters have all their surfaces vibrating with longitudinal and transversal dispersion vectors homogeneously surrounding the catheter surfaces. The acoustic waves at the surface are repulsive to bacteria and interfere with the docking and attachment of planktonic microorganisms to solid surfaces that constitute the initial phases of microbial biofilm development. FimH-mediated adhesion of uropathogenic Escherichia coli to guinea pig erythrocytes was prevented at power densities below thresholds that activate bacterial force sensor mechanisms. Elevated power densities dramatically enhanced red blood cell aggregation. We inserted Foley urinary catheters attached with elastic-wave-generating actuators into the urinary tracts of male rabbits. The treatment with the elastic acoustic waves maintained urine sterility for up to 9 days compared to 2 days in control catheterized animals. Scanning electron microscopy and bioburden analyses revealed diminished biofilm development on these catheters. The ability to prevent biofilm formation on indwelling devices and catheters can benefit the implanted medical device industry.
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19

Xiao, Xuefeng, Jiashun Si, Shuaijie Liang, et al. "Preparation, Properties, and Applications of Near Stoichiometric Lithium Tantalate Crystals." Crystals 13, no. 7 (2023): 1031. http://dx.doi.org/10.3390/cryst13071031.

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Lithium tantalate crystal is widely used in optical devices, infrared detectors and surface acoustic wave devices because of its excellent piezoelectric, acousto-optic and nonlinear optical properties. The Li content of near stoichiometric lithium tantalate (NSLT) crystal is higher than that of congruent lithium tantalate (CLT) crystal. Therefore, the performance of NSLT crystal is better than that of CLT crystal in some aspects. This article reviews the physical properties, preparation methods and current research status in acoustics and optics of NSLT crystals. It also looks forward to the improvement of NSLT crystal preparation methods and their applications in surface acoustic wave (SAW) filters and optics. With the increase of Li content, the acoustic performance of NSLT crystals is expected to be comprehensively improved, achieving the application of SAW filters in 5G communication.
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20

Dierkes, M., and U. Hilleringmann. "Telemetric surface acoustic wave sensor for humidity." Advances in Radio Science 1 (May 5, 2003): 131–33. http://dx.doi.org/10.5194/ars-1-131-2003.

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Abstract. Surface acoustic wave sensors consist of a piezoelectric substrate with metal interdigital transducers (IDT) on top. The acoustic waves are generated on the surface of the substrate by a radio wave, as it is well known in band pass filters. The devices can be used as wireless telemetric sensors for temperature and humidity, transmitting the sensed signal as a shift of the sensor’s resonance frequency.
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21

Wu, Sean, Zhi Xun Lin, and Maw Shung Lee. "Surface Acoustic Wave Device on (AlN/LGS) Substrate." Solid State Phenomena 124-126 (June 2007): 53–56. http://dx.doi.org/10.4028/www.scientific.net/ssp.124-126.53.

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Langasite (La3Ga5SiO14 or abbreviated as LGS) single crystal is an attractive substrate for surface acoustic wave (SAW) devices requiring good temperature stability and higher electromechanical coupling constant than quartz. AlN thin films are attractive materials that have some excellent characteristics, such as high SAW velocity, piezoelectricity, high-temperature stability, and stable chemical properties. In this study, AlN thin films were deposited on LGS to be a new composite SAW substrate (AlN/LGS) by reactive RF magnetron sputtering method. SAW delay-line device was manufactured on this substrate. The performance of the device was measured by network analyzer (Agilent 8753E).The results exhibited the composite substrate (AlN/LGS) increased the Rayleigh wave velocity, decreased the insertion loss of SAW devices, and suppressed the harmonic response.
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22

Fogel, Ronen, Janice Limson, and Ashwin A. Seshia. "Acoustic biosensors." Essays in Biochemistry 60, no. 1 (2016): 101–10. http://dx.doi.org/10.1042/ebc20150011.

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Resonant and acoustic wave devices have been researched for several decades for application in the gravimetric sensing of a variety of biological and chemical analytes. These devices operate by coupling the measurand (e.g. analyte adsorption) as a modulation in the physical properties of the acoustic wave (e.g. resonant frequency, acoustic velocity, dissipation) that can then be correlated with the amount of adsorbed analyte. These devices can also be miniaturized with advantages in terms of cost, size and scalability, as well as potential additional features including integration with microfluidics and electronics, scaled sensitivities associated with smaller dimensions and higher operational frequencies, the ability to multiplex detection across arrays of hundreds of devices embedded in a single chip, increased throughput and the ability to interrogate a wider range of modes including within the same device. Additionally, device fabrication is often compatible with semiconductor volume batch manufacturing techniques enabling cost scalability and a high degree of precision and reproducibility in the manufacturing process. Integration with microfluidics handling also enables suitable sample pre-processing/separation/purification/amplification steps that could improve selectivity and the overall signal-to-noise ratio. Three device types are reviewed here: (i) bulk acoustic wave sensors, (ii) surface acoustic wave sensors, and (iii) micro/nano-electromechanical system (MEMS/NEMS) sensors.
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23

Narayan, Advaith, Mingyang Cui, and J. Mark Meacham. "Using motile cells to characterize surface acoustic wave-based acoustofluidic devices." Journal of the Acoustical Society of America 152, no. 4 (2022): A35. http://dx.doi.org/10.1121/10.0015453.

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Acoustic microfluidics is a robust and powerful method to manipulate cells and cell-like particles on chip, having good biocompatibility and ease of incorporation into multioperation microfluidic devices compared to optical manipulation. However, the use of acoustic microfluidics is largely confined to research settings. The primary barrier to translation of this technology toward clinical and industrial uses is the inability to experimentally determine the pressure field (shape and amplitude) and associated acoustophoretic forces in real time as device conditions vary. Despite the multitude of previous characterization methods, none provide the flexibility of motile cells (e.g., the unicellular alga Chlamydomonas reinhardtii) as probes to map evolving pressure fields on chip. We have previously developed this approach for use with bulk acoustic wave (BAW)-based devices. Here, we extend the method to qualitatively assess device resonances and relative field strengths for surface acoustic wave (SAW)-based devices with straight channels and circular chambers driven at 6 MHz and 20 MHz. The fabrication and electrical characterization of hybrid BAW/SAW devices with glass channels are also discussed. Upon testing, the optimal device operating parameters are identified using impedance measurements, as well as visual identification of resonant frequencies using the swimming algae cells.
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24

Liu, Bo, Xiao Chen, Hualin Cai, et al. "Surface acoustic wave devices for sensor applications." Journal of Semiconductors 37, no. 2 (2016): 021001. http://dx.doi.org/10.1088/1674-4926/37/2/021001.

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25

Frye, Gregory C., and Stephen J. Martin. "Materials Characterization Using Surface Acoustic Wave Devices." Applied Spectroscopy Reviews 26, no. 1-2 (1991): 73–149. http://dx.doi.org/10.1080/05704929108053461.

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26

Ballantine, David S., and Hank Wohltjen. "Surface acoustic wave devices for chemical analysis." Analytical Chemistry 61, no. 11 (1989): 704A—715A. http://dx.doi.org/10.1021/ac00186a001.

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27

Locke, S., and B. K. Sinha. "Acceleration Stress Compensated Surface Acoustic Wave Devices." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 34, no. 4 (1987): 478–84. http://dx.doi.org/10.1109/t-uffc.1987.26970.

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28

Arai, Yuko, and Takashi Honda. "Corrosion Monitoring with Surface Acoustic Wave Devices." CORROSION ENGINEERING 39, no. 9 (1990): 479–83. http://dx.doi.org/10.3323/jcorr1974.39.9_479.

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29

NAKAGAWA, Yasuhiko. "Research trends of surface acoustic wave devices." Hyomen Kagaku 8, no. 6 (1987): 535–41. http://dx.doi.org/10.1380/jsssj.8.535.

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30

Scholl, G., F. Schmidt, and U. Wolff. "Surface Acoustic Wave Devices for Sensor Applications." physica status solidi (a) 185, no. 1 (2001): 47–58. http://dx.doi.org/10.1002/1521-396x(200105)185:1<47::aid-pssa47>3.0.co;2-q.

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31

Gao, Junning, Zhibiao Hao, Lang Niu, et al. "Surface acoustic wave devices fabricated on epitaxial AlN film." Functional Materials Letters 09, no. 02 (2016): 1650034. http://dx.doi.org/10.1142/s179360471650034x.

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This paper reports surface acoustic wave (SAW) devices fabricated on AlN epitaxial film grown on sapphire, aiming to avoid the detrimental polarization axis inconsistency and refrained crystalline quality of the normally used polycrystalline AlN films. Devices with center frequency of 357 MHz and 714 MHz have been fabricated. The stop band rejection ratio of the as-obtained device reaches 24.5 dB and the pass band ripple is profoundly smaller compared to most of the reported AlN SAW devices with the similar configuration. Judging from the rather high edge dislocation level of the film used in this study, the properties of the SAW devices have great potential to be improved by further improving the crystalline quality of the film. It is then concluded that the AlN epitaxial film is favorable for high quality SAW devices to meet the high frequency and low power consumption challenges facing the signal processing components.
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32

Nakano, Masahiro. "Surface acoustic wave element, surface acoustic wave device, surface acoustic wave duplexer, and method of manufacturing surface acoustic wave element." Journal of the Acoustical Society of America 121, no. 4 (2007): 1826. http://dx.doi.org/10.1121/1.2723967.

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33

Hesjedal, T., E. Chilla, and H. J. Fröhlich. "High resolution visualization of acoustic wave fields within surface acoustic wave devices." Applied Physics Letters 70, no. 11 (1997): 1372–74. http://dx.doi.org/10.1063/1.119323.

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34

Zhou, Jian, Shurong Dong, Hao Jin, Bing Feng, and Demiao Wang. "Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate." Journal of Control Science and Engineering 2012 (2012): 1–5. http://dx.doi.org/10.1155/2012/610160.

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Surface acoustic wave device withc-axis-oriented aluminum nitride (AlN) piezoelectric thin films on polymer substrates can be potentially used for development of flexible sensors, flexible microfluidic applications, microsystems, and lab-on-chip systems. In this work, the AlN films have been successfully deposited on polymer substrates using the DC reactive magnetron-sputtering method at room temperature, and the XRD, SEM, and AFM methods reveal that low deposition pressure is beneficial to the highlyc-axis-oriented AlN film on polymer substrates. Studies toward the development of AlN thin film-based flexible surface acoustic wave devices on the polymer substrates are initiated and the experimental and simulated results demonstrate the devices showing the acoustic wave velocity of 9000–10000 m/s, which indicate the AlN lamb wave.
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35

Koigerov, A. S. "Achievement of Critical and Limiting Parameters in Surface Acoustic Wave Microdevices." Nano- i Mikrosistemnaya Tehnika 24, no. 4 (2022): 199–207. http://dx.doi.org/10.17587/nmst.24.199-207.

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Currently, acoustoelectronics devices (filters, delay lines, resonators, etc.) are used in various radio engineering systems. In addition, they are used in microsystem technology as the basis for microminiature sensors for various purposes — sensors ofphysical quantities (temperature, micro-displacement, acceleration, etc.). In the range from tens of megahertz to 2.5 GHz, surface acoustic wave micro-devices have become widespread. The field of technical applications of SAW micro-devices is rapidly developing. In order to withstand competition from other technologies, it is clear that it requires not only the improvement of common topological solutions, but also the development and research of new designs of SAW micro-devices capable of reaching limiting and critical parameters. It is also necessary to use modern methods and approaches to device modeling. Purpose: to review and analyze the problems of the current state of SAW devices from the point of view of achieving limit parameters. Results: It is shown that the stages of structural and parametric synthesis of topology are key aspects in the design of devices with limiting parameters. Some results of research and development of surface acoustic waves devices based obtained in the field of creating ultra-narrowband filters, ultra-wideband delay lines and unique radio tags based on a multi-band coupler are presented. A filter with minimal unevenness of the group delay time for a class of transversal filters is presented. It is shown that obtaining devices with limiting and critical parameters is possible only on the basis of interfacing the development of structural and technological, materials science, physical and circuit design principles. Modern approaches to analyzing the output characteristics of surface acoustic wave devices and wave processes in piezoelectric substrates are described.
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36

Noto, Kenichi. "Surface acoustic wave filter, surface acoustic wave device and communication device." Journal of the Acoustical Society of America 122, no. 6 (2007): 3143. http://dx.doi.org/10.1121/1.2822925.

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37

He, Juxing, Yahui Tian, Honglang Li, Zixiao Lu, Guiting Yang, and Jianyu Lan. "Extracting Lamb wave vibrating modes with convolutional neural network." Journal of the Acoustical Society of America 151, no. 4 (2022): 2290–96. http://dx.doi.org/10.1121/10.0010045.

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In recent years, micro-acoustic devices, such as surface acoustic wave (SAW) devices, and bulk acoustic wave (BAW) devices have been widely used in the areas of Internet of Things and mobile communication. With the increasing demand of information transmission speed, working frequencies of micro-acoustic devices are becoming much higher. To meet the emerging demand, Lamb wave devices with characteristics that are fit for high working frequency come into being. However, Lamb wave devices have more complicated vibrating modes than SAW and BAW devices. Methods used for SAW and BAW devices are no longer suitable for the mode extraction of Lamb wave devices. To solve this difficulty, this paper proposed a method based on machine learning with convolutional neural network to achieve automatic identification. The great ability to handle large amount of images makes it a good option for vibrating mode recognition and extraction. With a pre-trained model, we are able to identify and extract the first two anti-symmetric and symmetric modes of Lamb waves in varisized plate structures. After the successful use of this method in Lamb wave modes automatic extraction, it can be extended to all micro-acoustic devices and all other wave types. The proposed method will further promote the application of the Lamb wave devices.
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38

Campbell, C. K. "Applications of surface acoustic and shallow bulk acoustic wave devices." Proceedings of the IEEE 77, no. 10 (1989): 1453–84. http://dx.doi.org/10.1109/5.40664.

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39

Nair, Minu Prabhachandran, Adrian J. T. Teo, and King Ho Holden Li. "Acoustic Biosensors and Microfluidic Devices in the Decennium: Principles and Applications." Micromachines 13, no. 1 (2021): 24. http://dx.doi.org/10.3390/mi13010024.

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Lab-on-a-chip (LOC) technology has gained primary attention in the past decade, where label-free biosensors and microfluidic actuation platforms are integrated to realize such LOC devices. Among the multitude of technologies that enables the successful integration of these two features, the piezoelectric acoustic wave method is best suited for handling biological samples due to biocompatibility, label-free and non-invasive properties. In this review paper, we present a study on the use of acoustic waves generated by piezoelectric materials in the area of label-free biosensors and microfluidic actuation towards the realization of LOC and POC devices. The categorization of acoustic wave technology into the bulk acoustic wave and surface acoustic wave has been considered with the inclusion of biological sample sensing and manipulation applications. This paper presents an approach with a comprehensive study on the fundamental operating principles of acoustic waves in biosensing and microfluidic actuation, acoustic wave modes suitable for sensing and actuation, piezoelectric materials used for acoustic wave generation, fabrication methods, and challenges in the use of acoustic wave modes in biosensing. Recent developments in the past decade, in various sensing potentialities of acoustic waves in a myriad of applications, including sensing of proteins, disease biomarkers, DNA, pathogenic microorganisms, acoustofluidic manipulation, and the sorting of biological samples such as cells, have been given primary focus. An insight into the future perspectives of real-time, label-free, and portable LOC devices utilizing acoustic waves is also presented. The developments in the field of thin-film piezoelectric materials, with the possibility of integrating sensing and actuation on a single platform utilizing the reversible property of smart piezoelectric materials, provide a step forward in the realization of monolithic integrated LOC and POC devices. Finally, the present paper highlights the key benefits and challenges in terms of commercialization, in the field of acoustic wave-based biosensors and actuation platforms.
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40

Zhang, Naiqing, Yue Wen, and James Friend. "MHz-Order Surface Acoustic Wave Thruster for Underwater Silent Propulsion." Micromachines 11, no. 4 (2020): 419. http://dx.doi.org/10.3390/mi11040419.

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High frequency (MHz-order) surface acoustic waves (SAW) are able to generate intense fluid flow from the attenuation of acoustic radiation in viscous fluids as acoustic streaming. Though such flows are known to produce a force upon the fluid and an equivalent and opposing force upon the object producing the acoustic radiation, there is no convenient method for measuring this force. We describe a new method to accomplish this aim, noting the potential of these devices in providing essentially silent underwater propulsion by virtue of their use of the sound itself to generate fluid momentum flux. Our example employs a 40 MHz SAW device as a pendulum bob while immersed in a fluid, measuring a 1.5 mN propulsion force from an input power of 5 W power to the SAW device. Supporting details regarding the acoustic streaming profile via particle image velocimetry and an associated theoretical model are provided to aid in the determination of the propulsion force knowing the applied power and fluid characteristics. Finally, a simple model is provided to aid the selection of the acoustic device size to maximize the propulsion force per unit device area, a key figure of merit in underwater propulsion devices. Using this model, a maximum force of approximately 10 mN/cm 2 was obtained from 1 W input power using 40 MHz SAW in water and producing a power efficiency of approximately 50%. Given the advantages of this technology in silent propulsion with such large efficiency and propulsion force per unit volume, it seems likely this method will be beneficial in propelling small autonomous submersibles.
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41

Nakahata, Hideaki. "Surface acoustic wave device." Journal of the Acoustical Society of America 101, no. 5 (1997): 2423. http://dx.doi.org/10.1121/1.418455.

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42

Kando, Hajime. "Surface acoustic wave device." Journal of the Acoustical Society of America 122, no. 2 (2007): 696. http://dx.doi.org/10.1121/1.2771304.

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43

Ozaki, Kyosuke. "Surface acoustic wave device." Journal of the Acoustical Society of America 122, no. 2 (2007): 697. http://dx.doi.org/10.1121/1.2771305.

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44

Kando, Hajime. "Surface acoustic wave device." Journal of the Acoustical Society of America 124, no. 3 (2008): 1389. http://dx.doi.org/10.1121/1.2986167.

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45

Kam, Chan Hin. "Surface acoustic wave device." Journal of the Acoustical Society of America 124, no. 6 (2008): 3365. http://dx.doi.org/10.1121/1.3047395.

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46

Kadota, Michio. "Surface acoustic wave device." Journal of the Acoustical Society of America 125, no. 2 (2009): 1259. http://dx.doi.org/10.1121/1.3081327.

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47

Kihara, Yoshikazu. "Surface acoustic wave device." Journal of the Acoustical Society of America 126, no. 2 (2009): 927. http://dx.doi.org/10.1121/1.3204322.

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48

Chen, Ga-Lane. "Surface acoustic wave device." Journal of the Acoustical Society of America 126, no. 5 (2009): 2831. http://dx.doi.org/10.1121/1.3262542.

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49

Wachi, Hirotada. "Surface acoustic wave device." Journal of the Acoustical Society of America 126, no. 6 (2009): 3380. http://dx.doi.org/10.1121/1.3274272.

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50

Miura, Michio. "Surface acoustic wave device." Journal of the Acoustical Society of America 113, no. 4 (2003): 1782. http://dx.doi.org/10.1121/1.1572315.

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