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1

Kääriäinen, Tommi, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman. Atomic Layer Deposition. John Wiley & Sons, Inc., 2013. http://dx.doi.org/10.1002/9781118747407.

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2

Symposium, on Atomic Layer Deposition Applications (3rd 2007 Washington D. C. ). Atomic layer deposition applications 3. Electrochemical Society, 2007.

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3

Symposium, on Atomic Layer Deposition Applications (2nd 2006 Cancun Mexico). Atomic layer deposition applications 2. Electrochemical Society, 2007.

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4

Hwang, Choel Seong, ed. Atomic Layer Deposition for Semiconductors. Springer US, 2014. http://dx.doi.org/10.1007/978-1-4614-8054-9.

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5

Symposium on Atomic Layer Deposition Applications (2nd 2006 Cancun, Mexico). Atomic layer deposition applications 2. Edited by Londergan A, Electrochemical Society Meeting, and Electrochemical Society. Dielectric Science and Technology Division. Electrochemical Society, 2007.

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6

Symposium on Atomic Layer Deposition Applications (3rd 2007 Washington, D.C.). Atomic layer deposition applications 3. Edited by Londergan A, Electrochemical Society Meeting, and Electrochemical Society. Dielectric Science and Technology Division. Electrochemical Society, 2007.

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7

Symposium on Atomic Layer Deposition Applications (2nd 2006 Cancun, Mexico). Atomic layer deposition applications 2. Edited by Electrochemical Society Meeting and Electrochemical Society. Dielectric Science and Technology Division. Electrochemical Society, 2007.

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8

Symposium on Atomic Layer Deposition Applications (3rd 2007 Washington, D.C.). Atomic layer deposition applications 3. Edited by Londergan A, Electrochemical Society Meeting, and Electrochemical Society. Dielectric Science and Technology Division. Electrochemical Society, 2007.

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9

Symposium on Atomic Layer Deposition Applications (2nd 2006 Cancun, Mexico). Atomic layer deposition applications 2. Edited by Londergan A, Electrochemical Society Meeting, and Electrochemical Society. Dielectric Science and Technology Division. Electrochemical Society, 2007.

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10

Symposium on Atomic Layer Deposition Applications (3rd 2007 Washington, D.C.). Atomic layer deposition applications 3. Edited by Londergan A, Electrochemical Society Meeting, and Electrochemical Society. Dielectric Science and Technology Division. Electrochemical Society, 2007.

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11

Pinna, Nicola, and Mato Knez, eds. Atomic Layer Deposition of Nanostructured Materials. Wiley-VCH Verlag GmbH & Co. KGaA, 2011. http://dx.doi.org/10.1002/9783527639915.

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12

Bachmann, Julien, ed. Atomic Layer Deposition in Energy Conversion Applications. Wiley-VCH Verlag GmbH & Co. KGaA, 2017. http://dx.doi.org/10.1002/9783527694822.

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13

Oviroh, Peter Ozaveshe, Sunday Temitope Oyinbo, Sina Karimzadeh, Patrick Ehi Imoisili, and Tien-Chien Jen. Emerging Atomic Layer Deposition for Hydrogen Energy. Springer Nature Switzerland, 2025. https://doi.org/10.1007/978-3-031-67774-8.

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14

Kääriäinen, Tommi. Atomic layer deposition: Principles, characteristics, and nanotechnology applications. 2nd ed. Scrivener Publishing, 2013.

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15

Sherman, Arthur. Atomic layer deposition for nanotechnology: An enabling process for nanotechnology fabrication. Ivoryton Press, 2008.

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16

National Renewable Energy Laboratory (U.S.) and IEEE Photovoltaic Specialists Conference (2011 : Austin, Taxas), eds. Optical properties of Zn(O,S) thin films deposited by RF sputtering atomic layer deposition, and chemcial bath deposition: Preprint. National Renewable Energy Laboratory, 2012.

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17

Atomic Layer Deposition. MDPI, 2020. http://dx.doi.org/10.3390/books978-3-03936-653-8.

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18

Hwang, Cheol Seong. Atomic Layer Deposition for Semiconductors. Springer London, Limited, 2013.

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19

Barry, Seán Thomas. Chemistry of Atomic Layer Deposition. De Gruyter, 2021. http://dx.doi.org/10.1515/9783110712537.

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20

Atomic Layer Deposition For Semiconductors. Springer-Verlag New York Inc., 2013.

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21

Hwang, Cheol Seong. Atomic Layer Deposition for Semiconductors. Springer, 2016.

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22

Barry, Seán Thomas. Chemistry of Atomic Layer Deposition. de Gruyter GmbH, Walter, 2021.

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23

Barry, Seán Thomas. Chemistry of Atomic Layer Deposition. de Gruyter GmbH, Walter, 2021.

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24

Barry, Seán Thomas. Chemistry of Atomic Layer Deposition. de Gruyter GmbH, Walter, 2021.

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25

Atomic Layer Deposition Of Nanostructured Materials. Wiley-VCH Verlag GmbH, 2012.

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26

Knez, Mato, and Nicola Pinna. Atomic Layer Deposition of Nanostructured Materials. Wiley & Sons, Limited, John, 2012.

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27

Knez, Mato, and Nicola Pinna. Atomic Layer Deposition of Nanostructured Materials. Wiley & Sons, Incorporated, John, 2012.

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28

Knez, Mato, and Nicola Pinna. Atomic Layer Deposition of Nanostructured Materials. Wiley & Sons, Incorporated, John, 2012.

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29

Knez, Mato, and Nicola Pinna. Atomic Layer Deposition of Nanostructured Materials. Wiley & Sons, Incorporated, John, 2012.

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30

Bachmann, Julien. Atomic Layer Deposition in Energy Conversion Applications. Wiley & Sons, Incorporated, John, 2017.

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31

Bachmann, Julien. Atomic Layer Deposition in Energy Conversion Applications. Wiley & Sons, Limited, John, 2017.

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32

Bachmann, Julien. Atomic Layer Deposition in Energy Conversion Applications. Wiley-VCH Verlag GmbH, 2017.

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33

Bachmann, Julien. Atomic Layer Deposition in Energy Conversion Applications. Wiley & Sons, Incorporated, John, 2017.

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34

Bachmann, Julien. Atomic Layer Deposition in Energy Conversion Applications. Wiley & Sons, Incorporated, John, 2017.

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35

Atomic layer deposition of oxides for microelectronics. 2009.

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36

Sherman, Arthur, David Cameron, Tommi Kääriäinen, and Marja-Leena Kääriäinen. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. Wiley & Sons, Limited, John, 2013.

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37

Sherman, Arthur, David Cameron, Tommi Kääriäinen, and Marja-Leena Kääriäinen. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. Wiley & Sons, Incorporated, John, 2013.

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38

Valdez, Jeannie. Atomic Layer Deposition: Fundamentals, Characteristics and Industrial Applications. Nova Science Publishers, Incorporated, 2015.

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39

Rodriguez, Leonard Neil Jacques. Atomic layer deposition of some main group metals. 2008.

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40

Sherman, Arthur, and David Cameron. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applicatons. Wiley & Sons, Incorporated, John, 2013.

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41

Sherman, Arthur, David Cameron, Tommi Kääriäinen, and Marja-Leena Kääriäinen. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. Wiley & Sons, Incorporated, John, 2013.

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42

Sherman, Arthur, David Cameron, Tommi Kääriäinen, and Marja-Leena Kääriäinen. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. Wiley & Sons, Incorporated, John, 2013.

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43

Farmer, Damon Brooks. Applications of atomic layer deposition in nanoelectronic systems. 2007.

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44

Adeleke, Oluwatobi, and Sina Karimzadeh. Machine Learning-Based Modelling in Atomic Layer Deposition Processes. Taylor & Francis Group, 2023.

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45

Atomic Layer Deposition of Zinc Based Transparent Conductive Oxides. Fraunhofer IRB Verlag, 2017.

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46

Adeleke, Oluwatobi, and Sina Karimzadeh. Machine Learning-Based Modelling in Atomic Layer Deposition Processes. Taylor & Francis Group, 2023.

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47

Evaluation of Novel Metalorganic Precursors for Atomic Layer Deposition of Nickel-Based Thin Films. GRIN Verlag GmbH, 2016.

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48

Li, Zhefeng. Atomic Layer Deposition and Direct-Liquid-Injection Chemical Vapor Deposition of Nickel Nitride Films and Their Conversion to Nickel Silicide Films. 2011.

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49

Ukoba, Kingsley. Thin Films, Atomic Layer Deposition, and 3D Printing: Demystifying the Concepts and Their Relevance in Industry 4. 0. Taylor & Francis Group, 2023.

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50

Ukoba, Kingsley. Thin Films, Atomic Layer Deposition, and 3D Printing: Demystifying the Concepts and Their Relevance in Industry 4. 0. Taylor & Francis Group, 2023.

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