Relevant bibliographies by topics / CAD tools for microelectromechanical systems

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  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers

Academic literature on the topic 'CAD tools for microelectromechanical systems'

Author: Grafiati
Published: 4 June 2021
Last updated: 2 February 2022

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Journal articles on the topic "CAD tools for microelectromechanical systems"

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Tadigadapa, Srinivas A., and Nader Najafi. "Developments in Microelectromechanical Systems (MEMS): A Manufacturing Perspective." Journal of Manufacturing Science and Engineering 125, no. 4 (November 1, 2003): 816–23. http://dx.doi.org/10.1115/1.1617286.

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This paper presents a discussion of some of the major issues that need to be considered for the successful commercialization of MEMS products. The diversity of MEMS devices and historical reasons have led to scattered developments in the MEMS manufacturing infrastructure. A good manufacturing strategy must include the complete device plan including package as part of the design and process development of the device. In spite of rapid advances in the field of MEMS there are daunting challenges that lie in the areas of MEMS packaging, and reliability testing. CAD tools for MEMS are starting to get more mature but are still limited in their overall performance. MEMS manufacturing is currently at a fragile state of evolution. In spite of all the wonderful possibilities, very few MEMS devices have been commercialized. In our opinion, the magnitude of the difficulty of fabricating MEMS devices at the manufacturing level is highly underestimated by both the current and emerging MEMS communities. A synopsis of MEMS manufacturing issues is presented here.
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HOOVER, CAROL L., and PRADEEP K. KHOSLA. "ANALYTICAL PARTITION OF SOFTWARE COMPONENTS FOR EVOLVABLE AND RELIABLE MEMS DESIGN TOOLS." International Journal of Software Engineering and Knowledge Engineering 09, no. 02 (April 1999): 153–71. http://dx.doi.org/10.1142/s0218194099000103.

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Transforming software requirements into a software design involves the iterative partition of a solution into software components. The process is human-intensive and does not guarantee that design objectives such as reusability, evolvability, and reliable performance are satisfied. The costly process of designing, building, and modifying high-assurance systems motivates the need for precise methods and tools to generate designs whose corresponding implementations are reusable, evolvable, and reliable. This paper demonstrates an analytical approach for partitioning basic elements of a software solution into reusable and evolvable software components. First, we briefly overview the role of partitioning in current design methods and explain why computer-aided design (CAD) tools to automate the design of microelectromechanical systems (MEMS) are high-assurance applications. Then we present our approach and apply it to the design of CAD software to layout an optimized design of a MEMS accelerometer to be used in the navigational units of aircraft. Lastly, we discuss the implications of our approach and future research directions.
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FUJITA, Shigeru, and Etsuo SHOJI. "CAD Systems as Collaboration Tools." Journal of the Japanese Institute of Landscape Architecture 64, no. 3 (2000): 224–27. http://dx.doi.org/10.5632/jila.64.224.

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Rico, J. C., S. Mateos, E. Cuesta, and C. M. Suárez. "Design of special tools by CAD/CAM systems." Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 212, no. 5 (May 1, 1998): 357–71. http://dx.doi.org/10.1243/0954405981515969.

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This paper presents a program for the automatic design of special tools developed under a CAD/CAM (computer aided design/manufacture) system. In particular, the special tools made with standard components have been considered. Since the design of these types of tools was essentially related to the selection of their components, this paper deals with this aspect, insisting upon the selection of those components directly related to the removal of material: the toolholders or cartridges and the inserts. To select these components it is necessary to take into account not only geometrical or technological rules but also economical ones, owing to the high amount of possible components they can select. Consideration of economical aspects required the formulation of the cost equation associated with the use of these types of tools, characterized because their cutting edges coincide with different cutting velocities. Likewise, consideration of economical aspects allows the selection of the optimum cutting conditions and the cutting components to take place at the same time. Some of the geometrical and technological parameters related to the selection of cutting components are automatically identified by the system through an automatic identification of the workpiece profile.
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Freeman, Dennis M. "Measuring Motions of MEMS." MRS Bulletin 26, no. 4 (April 2001): 305–6. http://dx.doi.org/10.1557/mrs2001.66.

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Testing microelectromechanical systems (MEMS) includes testing a variety of electrical and mechanical signals. While powerful tools are available to test the electrical behavior of microfabricated systems, relatively few tools are available to measure micromechanical behavior.
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Berliner, E. M. "Development of CAD Systems for numerically controlled machine tools." Russian Engineering Research 30, no. 6 (June 2010): 629–32. http://dx.doi.org/10.3103/s1068798x10060225.

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Pagliarulo, Vito, Tiziana Russo, Lisa Miccio, and Pietro Ferraro. "Numerical tools for the characterization of microelectromechanical systems by digital holographic microscopy." Journal of Micro/Nanolithography, MEMS, and MOEMS 14, no. 4 (November 18, 2015): 041314. http://dx.doi.org/10.1117/1.jmm.14.4.041314.

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Coelho, C. P., L. M. Silveira, and J. White. "Efficient Tools for the Calculation of Drag Forces on Planar Microelectromechanical Systems." Journal of Microelectromechanical Systems 17, no. 3 (June 2008): 558–72. http://dx.doi.org/10.1109/jmems.2008.921715.

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Behrens, B. A. Prof, S. Koch, M. Pleßow, G. Wrobel, R. Scheffler, and D. Bauer. "Eine neue Modellierung von Tiefziehwerkzeugen*/A new modelling of deep drawing tools - From parameter-based 3D-CAD-Model to the new graphical language for deep drawing tools." wt Werkstattstechnik online 106, no. 10 (2016): 690–94. http://dx.doi.org/10.37544/1436-4980-2016-10-16.

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Der Fachbeitrag konzentriert sich auf die parametergerechte 3D-CAD-Modellierung von Tiefziehwerkzeugen und deren Beschreibung in einer neuen grafischen Sprache. Die neu zu entwickelnde Modellierungssprache für die Domäne der Tiefziehwerkzeuge soll die Kommunikation zwischen Konstrukteur und CAD-Programm vereinfachen. Die Modellierung von CAD-Modellen für Tiefziehwerkzeuge wird damit flexibler und zeiteffizienter gestaltet.   This study focuses on parameter-based 3D CAD modelling of deep drawing tools as well as their description in a new graphical modelling language. The newly developed modelling language for the domain of the deep drawing tools should simplify the communication between designer and CAD program, whereby the CAD modelling of deep drawing tools should be more flexible and more time-efficient.
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Ivanov, Andre. "Advances in 3-D Integrated Circuits, Systems, and CAD Tools." IEEE Design & Test 32, no. 4 (August 2015): 4–5. http://dx.doi.org/10.1109/mdat.2015.2442339.

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Dissertations / Theses on the topic "CAD tools for microelectromechanical systems"

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Ramaswamy, Deepak 1974. "Simulation tools for microelectromechanical systems." Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8625.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering, 2001.
Includes bibliographical references (p. 101-104).
In this thesis efficient techniques to solve complex 3-D electromechanical problems are developed. Finite element discretization of complex structures such as the micromirror lead to thousands of internal degrees of freedom. Their mostly rigid motion is exploited leading to a mixed rigid-elastic formulation. This formulation's advantage is apparent when it is incorporated in an efficient coupled domain simulation technique and examples are presented exploring geometry effects on device behavior. Then for system level simulation where full device simulation costs add up we need models with much reduced order with little degradation in accuracy. We describe a model reduction formulation for the electromechanical problem based on implicit techniques which accurately capture the original model behavior.
by Deepak Ramaswamy.
Ph.D.
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Pinto, Coelho Carlos (Carlos Freire da Silva). "Efficient tools for the design and simulation of microelectromechanical and microfluidic systems." Thesis, Massachusetts Institute of Technology, 2007. http://hdl.handle.net/1721.1/42234.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2007.
Includes bibliographical references (p. 131-136).
In air-packaged surface micromachined devices and microfluidic devices the surface to volume ratio is such that drag forces play a very important role in device behavior and performance. Especially for surface micromachined devices, the amount of drag is greatly influenced by the presence of the nearby substrate. In this thesis a precorrected FFT accelerated boundary element method specialized for calculating the drag force on structures above a substrate is presented. The method uses the Green's function for Stokes flow bounded by an infinite plane to implicitly represent the device substrate, requiring a number of modifications to the precorrected FFT algorithm. To calculate the velocity due to force distribution on a panel near a substrate an analytical panel integration algorithm was also developed. Computational results demonstrate that the use of the implicit representation of the substrate reduces computation time and memory while increasing the solution accuracy. The results also demonstrate that surprisingly, and unfortunately, even though representing the substrate implicitly has many benefits it does not completely decouple discretization fineness from distance to the substrate. To simulate the time dependent behavior of micromechanical and microfluidic systems, a stable velocity implicit time stepping scheme coupling the precorrected FFT solver with rigid body dynamics was introduced and demonstrated. The ODE library was integrated with the solver to enable the simulation of systems with collisions, contacts and friction. Several techniques for speeding up the calculation of each time step were presented and tested. The time integration algorithm was successfully used to simulate the behavior of several real-world microfluidic devices.
by Carlos Pinto Coelho.
Ph.D.
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McGregor, Gordon Charles. "CAD tools and techniques for the development of dynamically reconfigurable systems." Thesis, University of Strathclyde, 2004. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.405543.

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Wang, Weihua. "Tools for flexible electrochemical microfabrication /." Thesis, Connect to this title online; UW restricted, 2002. http://hdl.handle.net/1773/9854.

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Chen, Kun. "Haptic system for collision-free 5-axis tool path generation /." View abstract or full-text, 2006. http://library.ust.hk/cgi/db/thesis.pl?MECH%202006%20CHENK.

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Bergsten, Susan. "Industrialised building systems : vertical extension of existing buildings by use of light gauge steel framing systems and 4D CAD tools." Licentiate thesis, Luleå, 2005. http://epubl.luth.se/1402-1757/2005/23.

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Tabani, Haroon R. "Application of NC machining of complex surfaces to streamlined extrusion dies." Ohio : Ohio University, 1989. http://www.ohiolink.edu/etd/view.cgi?ohiou1182523937.

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Li, Zhaoyi, and n/a. "Analysis and Design of Virtual Reality Visualization for a Micro Electro Mechanical Systems (MEMS) CAD Tool." Griffith University. School of Information and Communication Technology, 2005. http://www4.gu.edu.au:8080/adt-root/public/adt-QGU20060731.121340.

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Since the proliferation of CAD tools, visualizations have gained importance.. They provide invaluable visual feedback at the time of design, regardless whether it is fbi civil engineering or electronic circuit design-layout. Typically dynamic visualizations are produced in a two phase process: the calculation of positions and rendering of the image and its presentation as an animated video clip. This is a slow process that is unsuitable fbr interactive CAD visualizations, because the former two require finite element analysis Faster hardware eases the problem, but does not overcome it, because the algorithms are still too slow. Our MEMS CAD project works towards methods and techniques that are suitable for interactive design, with faster methods. The purpose of this PhD thesis is to contribute to the design of an interactive virtual prototyping of Micro Electro Mechanical Systems (MEMS) This research comprises the analysis of the visualization techniques that are appropriate for these tasks and identifying the difficulties that need to be overcome to be able to offer a MEMS design engineer a meaningful and interactive CAD design environment Such a VR-CAD system is being built in our research group with many participants in the team. Two particular problems are being addressed by presenting algorithms for truthful VR visualization methods: one is for displaying objects that are different in size on the computer screen. The other is modelling unsynchronized motion dynamics, that is different objects moving simultaneously at very high and vety low speed, by proposing stroboscopic simulation to present their dynamics on the screen They require specific size scaling and time scaling and filtering. It is these issues and challenges which make the design of a MEMS CAD tool different from other CAD tools. In the thesis I present algorithms for displaying animated virtual reality for MEMS virtual prototyping in a physically truthful way by using the simulated stroboscopic illumination to filter animated images to make it possible to show unsynchronized motion.. A scaling method was used to show or hide objects which cannot be shown simultaneously on the computer screen because of their large difference in size. The visualization of objects being designed and their animations is done with much consideration of visual perception and computer capability, which is rising attention, but not too often mentioned in the visualization domain.
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Seo, Chung-Seok. "Physical Design of Optoelectronic System-on-a-Chip/Package Using Electrical and Optical Interconnects: CAD Tools and Algorithms." Diss., Available online, Georgia Institute of Technology, 2005, 2004. http://etd.gatech.edu/theses/available/etd-11102004-150844/.

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Thesis (Ph. D.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2005.
David E. Schimmel, Committee Member ; C.P. Wong, Committee Member ; John A. Buck, Committee Member ; Abhijit Chatterjee, Committee Chair ; Madhavan Swaminathan, Committee Member. Vita. Includes bibliographical references.
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Vidal, Tabata. "Concepção de proteses mioeletricos de membros superiores baseado no estudo fisiologico." [s.n.], 2008. http://repositorio.unicamp.br/jspui/handle/REPOSIP/264737.

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Orientador: Helder Anibal Hermini
Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecanica
Made available in DSpace on 2018-08-11T07:22:27Z (GMT). No. of bitstreams: 1 Vidal_Tabata_M.pdf: 5227439 bytes, checksum: 003d20540fa55512408c2b363171f23c (MD5) Previous issue date: 2008
Resumo: O objetivo deste trabalho foi revisar na literatura os desenvolvimentos da aplicação das tecnologias envolvidas em automação dedicadas às próteses mioelétricas de membros superiores, desde os primeiros trabalhos implementados no período pós-Segunda Guerra Mundial até as soluções tecnológicas atualmente utilizadas. O conceito de prótese mioelétrica envolve a aquisição e tratamento do sinal mioelétrico de um membro residual que é usado para acionar um atuador que ativará a ferramenta terminal. Objetivando a elaboração de uma solução compatível e aplicável harmonicamente ao sistema orgânico, foram realizados estudos da anatomia, da fisiologia articular dos membros superiores, da natureza e características do sinal mioelétrico, além das tecnologias envolvidas para a concepção de protótipos mecatrônicos, tais como técnicas de CAD-CAE-CAM e a geração de circuitos eletrônicos dedicados à coleta e tratamento de sinais mioelétricos. Para validar o desenvolvimento teórico, três protótipos da ferramenta terminal foram confeccionados, sendo testados em nível de bancada
Abstract: The goal of this work was to review the specialized literature for the development of technological applications connected with automation of myoelectrical prosthesis of upper limbs throughout the years, from World War 2 post-war solutions to the technology currently applied. The concept of myoelectrical prosthesis presupposes implies the acquisition and treatment of the myoelectrical signal of a residual limb which is used to start an actuator, which in turn activates the terminal tool. Aiming at encountering a solution that could be both compatible and harmoniously applicable to the human body, the author engaged in studying anatomy, upper limbs articular physiology, the nature and characteristics of the myoelectrical signal in addition to the technologies utilized to conceive mechatronic prototypes, i.e. CAD-CAE-CAM and the creation of dedicated electronic circuits to collect and process the myoelectrical signals. To validate the theoretical foundation of this project, three prototypes of terminal tools were manufactured and bench-tested.
Mestrado
Mecanica dos Sólidos e Projeto Mecanico
Mestre em Engenharia Mecânica
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Books on the topic "CAD tools for microelectromechanical systems"

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Hoschek, Josef, ed. Freeform Tools in CAD Systems. Wiesbaden: Vieweg+Teubner Verlag, 1991. http://dx.doi.org/10.1007/978-3-322-86773-5.

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Roller, Dieter. CAD Systems Development: Tools and Methods. Berlin, Heidelberg: Springer Berlin Heidelberg, 1997.

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Fujita, Hiroyuki. Micromachines as Tools for Nanotechnology. Berlin, Heidelberg: Springer Berlin Heidelberg, 2003.

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Fichtner, Wolfgang. VLSI CAD Tools and Applications. Boston, MA: Springer US, 1987.

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Benini, Luca. Dynamic Power Management: Design Techniques and CAD Tools. Boston, MA: Springer US, 1998.

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Benini, Luca. Dynamic power management: Design techniques and CAD tools. Boston: Kluwer, 1998.

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Hossain, Akram. Computer-aided electronic circuit board design and fabrication: Using OrCAD/SDT and OrCAD/PCB software tools. Englewood Cliffs, N.J: Prentice Hall, 1996.

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Rüdiger, Dillmann, ed. Computer-Aided Design and Manufacturing: Methods and Tools. Berlin, Heidelberg: Springer Berlin Heidelberg, 1986.

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Weissenberger, Martin. Optimierung der Bewegungsdynamik von Werkzeugmaschinen im rechnergestützten Entwicklungsprozess. München: Utz, 2007.

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J, Plassche Rudy, and Sansen Willy M. C, eds. Analog Circuit Design: Low-Noise, Low-Power, Low-Voltage; Mixed-Mode Design with CAD Tools; Voltage, Current and Time References. Boston, MA: Springer US, 1996.

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Book chapters on the topic "CAD tools for microelectromechanical systems"

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García-Alonso, Alejandro M., and Luis M. Matey. "Tools for Mechanical Analysis and Simulation." In CAD Systems Development, 299–312. Berlin, Heidelberg: Springer Berlin Heidelberg, 1997. http://dx.doi.org/10.1007/978-3-642-60718-9_21.

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Wördenweber, B. "A Case for CAD." In Freeform Tools in CAD Systems, 27–36. Wiesbaden: Vieweg+Teubner Verlag, 1991. http://dx.doi.org/10.1007/978-3-322-86773-5_2.

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Herken, Rolf, Robert Hödicke, Tom-Michael Thamm-Schaar, Jeffery Yost, and Silviu Borac. "High Quality Visualization of CAD Data." In Freeform Tools in CAD Systems, 173–94. Wiesbaden: Vieweg+Teubner Verlag, 1991. http://dx.doi.org/10.1007/978-3-322-86773-5_10.

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Hoschek, Josef, and Franz-Josef Schneider. "Approximate Conversion and Merging of Spline Surface Patches." In Freeform Tools in CAD Systems, 233–45. Wiesbaden: Vieweg+Teubner Verlag, 1991. http://dx.doi.org/10.1007/978-3-322-86773-5_14.

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Bischoff, Dieter. "ICEM MESH." In Freeform Tools in CAD Systems, 63–77. Wiesbaden: Vieweg+Teubner Verlag, 1991. http://dx.doi.org/10.1007/978-3-322-86773-5_5.

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Sears, Ken, and George Allen. "Curves and Surfaces in Unigraphics and Parasolid." In Freeform Tools in CAD Systems, 129–45. Wiesbaden: Vieweg+Teubner Verlag, 1991. http://dx.doi.org/10.1007/978-3-322-86773-5_8.

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Moreau, Pierre, and Olivier Bellart. "Curve and Surface Representation in Catia System." In Freeform Tools in CAD Systems, 5–25. Wiesbaden: Vieweg+Teubner Verlag, 1991. http://dx.doi.org/10.1007/978-3-322-86773-5_1.

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Anderl, Reiner. "The Development Methodology of STEP and its Concept for Shape Representation." In Freeform Tools in CAD Systems, 195–206. Wiesbaden: Vieweg+Teubner Verlag, 1991. http://dx.doi.org/10.1007/978-3-322-86773-5_11.

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Berold, George, and M. Bercovier. "Integration of Physical “Phenomena” into CAD." In Freeform Tools in CAD Systems, 207–18. Wiesbaden: Vieweg+Teubner Verlag, 1991. http://dx.doi.org/10.1007/978-3-322-86773-5_12.

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Grabowski, Hans, and Xiaohe Li. "General matrix representation for NURBS curves and surfaces for interfaces." In Freeform Tools in CAD Systems, 219–31. Wiesbaden: Vieweg+Teubner Verlag, 1991. http://dx.doi.org/10.1007/978-3-322-86773-5_13.

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Conference papers on the topic "CAD tools for microelectromechanical systems"

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Shepherd, Ellen. "Prototyping With SUMMiT™ Technology, Sandia’s Ultra-Planar Multi-Level MEMS Technology." In ASME 2002 International Mechanical Engineering Congress and Exposition. ASMEDC, 2002. http://dx.doi.org/10.1115/imece2002-39258.

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Sandia National Laboratories, a world leader in the development and application of surface micromachining technology, offers its ultra-planar, multi-level SUMMiT™ technology for prototyping devices for microelectromechanical systems (MEMS). By incorporating advanced fabrication processes, such as chemical mechanical polishing and five levels of polysilicon (four mechanical and one ground), in a well-characterized, base-lined technology, the SUMMiT™ (Sandia’s Ultra-planar, Multi-level, MEMS Technology) process offers a virtually limitless range of microelectromechanical systems that can be fabricated for both commercial and military applications [1]. Sandia’s SUMMiT™ process, licensed to industry for volume production, is available from Sandia for agile prototyping through the SAMPLES™ Program. The SAMPLES™ (Sandia’s Agile MEMS Prototyping, Layout tools, Education, and Services) Program, offers participants the opportunity to access state-of-the-art MEMS technology to prototype an idea and produce hardware that can be used to sell a concept. The four components of the SAMPLES™ Program provide: • Education and training on Sandia’s SUMMiT™ designand visualization tools, fabrication process, and reliability issues; • Layout tools for design including visualization and checking of design rules; • Fabrication in the 5-level SUMMiT™ technology; • Post-fabrication services such as release, packaging, reliability characterization, and failure analysis. This paper discusses the SUMMiT™ technology, its capabilities, and the infrastructure for prototyping within the technology through the SAMPLES™ Program.
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Wilson, Christopher G., Robert Dean, George T. Flowers, and John Y. Hung. "A Technique for Embedding SPICE in a Simulink Environment for MEMS Simulations." In ASME 2010 International Mechanical Engineering Congress and Exposition. ASMEDC, 2010. http://dx.doi.org/10.1115/imece2010-38394.

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Computer simulations are powerful tools in the designer’s toolbox, giving an estimate of what the device will actually do once realized. Two such tools, Simulink and SPICE are commonly used to design, simulate, and verify models in the mechanical and electronic domains, respectively. Challenges can arise, however, when attempting to simulate behaviors of hybrid systems that possies both electronic and mechancial subsystems. For example, in microelectromechanical systems (MEMS) designs, variable capacitors are frequent methods for sensing and actuating. While straightforward to model in Simulink, MEMS are not intuitive to model in SPICE, where the control electronics are simulated. On the other hand, SIMULINK is a less mature tool than SPICE for simulating electronic behaviors — SPICE already posseses large libraries of electronic device models. Thus, current MEMS designers lack a straightforward method to simulate and verify variable capacitors in a transient electronic circuit in SPICE, since the entire mechanical system must be converted from Simulink and verified. This paper presents a technique for embedding NGSPICE, an open-source SPICE implementation, inside a Simulink model via a S-function block, enabling a full system model for transient responses to be realized. A Level 2 M-file S-function block implements the calling and parsing of the associated electronic subsystem circuit file. The required modifications for the circuit file to the Simulink model are described. Validation testing using a low-pass filter type circuits with constant and variable capacitance are presented. Some examples are presented and discussed.
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Joshi, Nikhil, Ajay P. Malshe, April Bryan, Jaime A. Camelio, and S. Jack Hu. "Geometric Error Assessment of a Nanomechanical Drill." In ASME 2003 International Mechanical Engineering Congress and Exposition. ASMEDC, 2003. http://dx.doi.org/10.1115/imece2003-42116.

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Manufacturability of micro and nano systems has gained importance with the advent of microelectromechanical systems (MEMS). Whereas the manufacturability of macro systems has been a widely researched subject, the behavior of MEMS devices in large scale manufacturing operations is virtually an unexplored field. Therefore, in order to predict resulting product characteristics, theories developed for macro-scale manufacturing are currently being extended to micro-systems. This research employs computer aided engineering (CAE) tools in the determination of the final dimensional quality of a drilled hole created by a nano-drill. In order to obtain a valid prediction of the drilled-hole dimensions, an adequate knowledge of the processes occurring during nano drilling and the factors affecting these processes are necessary. A complete analysis requires consideration of the kinematic, static and dynamic factors that contribute to the error in the drill tip. In this paper, only the kinematic errors that affect the hole geometric quality are considered. The causes of these kinematic errors and their effect on the variation of the drilled hole are also investigated. The resulting hole size will be considered to be the result of the “stack-up” of the errors in the tool.
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Pryputniewicz, Ryszard J., and Emily J. Pryputniewicz. "Quantitative Characterization of Microsystem Dynamics." In ASME 2007 InterPACK Conference collocated with the ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference. ASMEDC, 2007. http://dx.doi.org/10.1115/ipack2007-33503.

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Development of microelectromechanical system (MEMS) sensors for various applications requires the use of analytical and computational modeling/simulation coupled with rigorous physical measurements. This requirement has led to advancement of an approach that combines computer aided design (CAD) and multiphysics modeling/simulation tools with the state-of-the-art (SOTA) measurement methodology to facilitate reduction of high prototyping costs, long product development cycles, and time-to-market pressures while devising MEMS for a variety of applications. In this approach, a unique, fully integrated software environment for multiscale, multiphysics, high fidelity modeling of MEMS is combined with the optoelectronic laser interferometric microscope methodology for quantitative measurements. The optoelectronic methodology allows remote, noninvasive full-field-of view (FFV) measurements of deformations/motions (under operating conditions) with high spatial resolution, nanometer accuracy, and in near real-time. In this paper, both, the modeling environment (including an analytical process used to quantitatively show the influence that various parameters defining a sensor have on its dynamics — using this process dynamic characteristics of a sensor can be optimized by constraining its nominal dimensions and finding the optimum set of uncertainties in these dimensions that best satisfy design requirements/specifications) and the optoelectronic methodology are described and their applications are illustrated with representative examples demonstrating viability of the approach, combining modeling and measurements, for quantitative characterization of microsystem dynamics. These representative examples demonstrate capability of the approach described herein to quantitatively determine effects of dynamic loads on performance of selected MEMS.
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Sushchenko, O. A., Y. M. Bezkorovainyi, and V. O. Golytsin. "Modelling of Microelectromechanical Inertial Sensors." In 2019 IEEE 15th International Conference on the Experience of Designing and Application of CAD Systems (CADSM). IEEE, 2019. http://dx.doi.org/10.1109/cadsm.2019.8779286.

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Siozios, K., A. Papanikolaou, and D. Soudris. "CAD tools for designing 3D integrated systems." In 2011 IEEE International Symposium on Circuits and Systems. IEEE, 2011. http://dx.doi.org/10.1109/iscas.2011.5938044.

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Whitlock, Brent K., and Jean-Marc Verdiell. "Advanced CAD tools for optoelectronics and lightwave systems." In Voice, Video, and Data Communications, edited by Ray T. Chen and Louis S. Lome. SPIE, 1998. http://dx.doi.org/10.1117/12.300941.

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van Kuijk, J. "CAD tools for lab-on-a-chip systems." In IEE Seminar Microengineering, Modelling and Design. IEE, 1999. http://dx.doi.org/10.1049/ic:19990273.

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Retter, Yoram. "Integrating Non-CAD Data With Reverse Engineering Tools." In ASME 2008 9th Biennial Conference on Engineering Systems Design and Analysis. ASMEDC, 2008. http://dx.doi.org/10.1115/esda2008-59538.

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Aircraft design may require use of geometry that is not readable by the CAD system being used. Most notably, since aircrafts always stay in service longer than the CAD system that helped build them, such geometry will be pre-CAD real aircraft parts and the tools for manufacturing them. Other cases are data from deformed parts (real and virtual), output from analysis programs and flexible parts in a given position. Geometry from these sources can be read by the CAD system using Reverse Engineering tools and then be further processed in computer applications as required, either by itself or combined with CAD data from other sources. While this is not an every day requirement, the cases that do require such data usually have no other practical solution. This paper describes the practices used at IAI for such procedures and the lessons learned.
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Chavez-Hurtado, Jose Luis, Esteban Martinez-Guerrero, and Jose Ernesto Rayas-Sanchez. "Design of reusable CMOS OTAs using CAD tools." In 2009 52nd IEEE International Midwest Symposium on Circuits and Systems (MWSCAS). IEEE, 2009. http://dx.doi.org/10.1109/mwscas.2009.5236110.

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