Academic literature on the topic 'Capacitive accelerometer'
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Journal articles on the topic "Capacitive accelerometer"
Tang, William C. "Digital capacitive accelerometer." Journal of the Acoustical Society of America 99, no. 6 (1996): 3280. http://dx.doi.org/10.1121/1.414897.
Full textGerlach-Meyer, U. E. "Micromachined capacitive accelerometer." Sensors and Actuators A: Physical 27, no. 1-3 (May 1991): 555–58. http://dx.doi.org/10.1016/0924-4247(91)87050-d.
Full textBontha, Anitha, Amit Kumar Sinha, Shailendra Kumar Mishra, and Gaddam Vinay. "Characterization of MEMS Three-Direction Capacitive Accelerometer." Indian Journal of Applied Research 3, no. 12 (October 1, 2011): 190–96. http://dx.doi.org/10.15373/2249555x/dec2013/57.
Full textColton, Russell F. "Low cost capacitive accelerometer." Journal of the Acoustical Society of America 77, no. 3 (March 1985): 1284. http://dx.doi.org/10.1121/1.392174.
Full textF. Hraniak, Valerii, Vasyl Kukharchuk, Volodymyr Kucheruk, Samoil Katsyv, D. Zh Karabekova, and A. K. Khassenov. "Mathematical model of capacitance micromechanical accelerometer in static and dynamic operating modes." Bulletin of the Karaganda University. "Physics" Series 98, no. 2 (June 30, 2020): 60–67. http://dx.doi.org/10.31489/2020ph2/60-67.
Full textTorayashiki, Osamu, Ayumu Takahashi, and Rinzo Tokue. "Capacitive Type 3-Axis Accelerometer." IEEJ Transactions on Sensors and Micromachines 116, no. 7 (1996): 272–75. http://dx.doi.org/10.1541/ieejsmas.116.272.
Full textBenmessaoud, Mourad, and Mekkakia Maaza Nasreddine. "Optimization of MEMS capacitive accelerometer." Microsystem Technologies 19, no. 5 (March 1, 2013): 713–20. http://dx.doi.org/10.1007/s00542-013-1741-z.
Full textvan Paemel, Mark. "Interface circuit for capacitive accelerometer." Sensors and Actuators 17, no. 3-4 (May 1989): 629–37. http://dx.doi.org/10.1016/0250-6874(89)80055-1.
Full textBullis, Robert H., and James L. Swindal. "Capacitive accelerometer with midplane proof mass." Journal of the Acoustical Society of America 91, no. 1 (January 1992): 543. http://dx.doi.org/10.1121/1.402695.
Full textKraft, Michael, Christopher Lewis, Thomas Hesketh, and Stefan Szymkowiak. "A novel micromachined accelerometer capacitive interface." Sensors and Actuators A: Physical 68, no. 1-3 (June 1998): 466–73. http://dx.doi.org/10.1016/s0924-4247(98)00064-8.
Full textDissertations / Theses on the topic "Capacitive accelerometer"
Zhao, Dongning. "A low-noise CMOS interface for capacitive microaccelerometers." Diss., Georgia Institute of Technology, 2009. http://hdl.handle.net/1853/31715.
Full textKampen, Robertus Petrus van. "Bulk-micromachined capacitive servo-accelerometer." [Delft] : Delft University Press, 1995. http://books.google.com/books?id=LHJTAAAAMAAJ.
Full textGuo, Fei. "Micromachined capacitive accelerometer with crab-shape." Thesis, Cape Peninsula University of Technology, 2005. http://hdl.handle.net/20.500.11838/1282.
Full textPerhaps more popular than the piezoresistive type are the capacitive type of micromachined accelerometers. The capacitive accelerometer has many fine characteristics, such as simple structure, high sensitivity, strong ability of resisting disturbance, fast dynamic response and so on. It can also work under abominable condition. So it is occupying an important status in the technology of electronical measurement and being used in many kinds of metrical systems. In this paper, the capacitive accelerometer (CA) we will introduce and design is a parallel plate CA with crab-shape. It will detect the acceleration signal by the change of distance between two electrode plates, and its design standard came from the industrial requirements ofKENTRON Company. The whole paper can be divided into four main phases-introduction, study, design and analysis. At first, we have introduced the purpose and background of this thesis, and then the study and the discussion of relative literature. The content of these articles is mainly about the basic principle, types and applications of micro-sensors and this information will be very helpful to the design and analysis ofmy own CA. The course of design is primarily structure design. The main structures of CA are parallel plate structure and cylinder structure. The parallel plate structure is chosen for our CA after we did the comparison of performance and technique of making between these two types of structures. We use the concentrative mass as the top electrode plate and four beams are connected on the two sides of the plate separately.
Lee, Chun Ming. "Design of two-axis capacitive accelerometer using MEMS." Thesis, Monterey, Calif. : Springfield, Va. : Naval Postgraduate School ; Available from National Technical Information Service, 2004. http://library.nps.navy.mil/uhtbin/hyperion/04Dec%5FLee%5Chun.pdf.
Full textBoga, Biter. "Modelling And Noise Analysis Of Closed-loop Capacitive Sigma-delta Mems Accelerometer." Master's thesis, METU, 2009. http://etd.lib.metu.edu.tr/upload/3/12610772/index.pdf.
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accelerometer system consisting of a MEMS accelerometer, closed-loop readout electronics, and signal processing units (e.g. decimation filters). By using this model, it is possible to estimate the performance of the full accelerometer system including individual noise components, operation range, open loop sensitivity, scale factor, etc. The developed model has been verified through test results using a capacitive MEMS accelerometer, full-custom designed readout electronics, and signal processing unit implemented on a FPGA. Conventional accelerometer system with force-feedback is used in this thesis. The sensor is a typical capacitive lateral accelerometer. The readout electronics form a 2nd order electromechanical &
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modulator together with the accelerometer, and provide a single-bit PDM output, which is decimated and filtered with a signal processing unit, software implemented on a FPGA. The whole system is modeled in MATLAB-SIMULINK since it has both mechanical and electrical parts. To verify the model, two accelerometer systems are implemented. Each accelerometer system is composed of a MEMS accelerometer, readout circuit, and decimation filters. These two different designs are implemented and simulation and test results are compared in terms of output noise, operational range, open loop sensitivity, and scale factor. The first design operates at 500 kHz sampling rate and has 0.48 V/g open-loop sensitivity, 58.7 µ
g/&
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Hz resolution, ±
12g operation range, and 0.97*10-6 g/(output units) scale factor, where these numbers are in close agreement with the estimated results found with simulations. Similarly, the second design operates at 500 kHz sampling rate and has 0.45 V/g open-loop sensitivity, 373.3 µ
g/&
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Hz resolution, ±
31g operation range, and 2.933*10-6 g/(output units) scale factor, where these numbers are also close to the estimated results found with simulations. Within this thesis study, an accelerometer sensing element design algorithm is also proposed which is based on the theoretical background obtained in accelerometer system SIMULINK model. This algorithm takes the requirements of the desired accelerometer as input and outputs the dimensions of the minimum noise accelerometer satisfying these requirements. The algorithm is extended to design three different accelerometer structures. An accelerometer sensing element is designed using the proposed design algorithm and tested in order to see performance matching of the algorithm. The designed accelerometer has ±
33.02g operational range and 155µ
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Hz noise where these numbers matches with the values found by the algorithm
Wang, Lin. "Mechanics of micro capacitive accelerometer with u-shape cantilever beam." Thesis, Cape Peninsula University of Technology, 2005. http://hdl.handle.net/20.500.11838/2616.
Full textDue to an increasing in industrial micromation need in recent years, the use of micro accelerometers has been highly increased. Consecutively, this has promoted research activities in this field; capacitive accelerometers also have got high concern at large. As a research project of the Kentron in South Africa, this thesis deals with a theoretical model for a one-dimensional micro capacitive accelerometer with U-shape cantilever beam. The properties of the small angle tilted-plate capacitor have been analyzed; the capacitance equation and electrostatic force equation of this kind capacitor have been derived. The sensing element of this accelerometer consists of an inertial mass connected with two cantilever beams. The vibration modes analysis to the sensing element was accomplished by using CoventorWare2004's MemMech module, the result indicates that the main vibration mode can cause the capacitance change observably and the effect of the other modes to the capacitance can be ignored, which satisfied the purpose of the design. In the process of deriving the linearizing acceleration equation, the angle of the inertial mass caused by the deformation of the U-shape cantilever beam was taken into account as well as the electrostatic force between the two electrodes, thus the more precise acceleration linear equation was obtained. The sensitivity equation was derived through the acceleration linear equation, the relationship between the main parameters of the system and the sensitivity has been analyzed. The differential structure of this micro capacitive accelerometer was also analyzed; the linearizing acceleration equation and sensitivity equation of this kind structure were derived, it has been proven that the sensitivity of this structure is twice than the normal structure approximately. The maximum detectable signal was obtained in terms of the fracture strength of the cantilever beam and the maximum displacement of the inertial mass. The minimum detectable signal was obtained in terms of the thermal noise analysis. In the process of the dynamic analysis, the forced vibration produced by the sinusoidal periodic force and sinusoidal periodic moment was analyzed and the transient capacitance equation was derived, this proved the system has good dynamic character in theory. The system was simulated and analyzed by using CoventorWare2004's Saber module. The initial capacitance analysis indicates the relationship between the voltage and the initial capacitance, the result is close to the analytic model. The resonance frequencies analysis indicates that the main dimensions of the sensing element can determine the resonance frequencies and each vibration mode's sequence, the initial dimensions of the sensing element was proved reasonable by analyzing. Sensitivity analysis and Monte Carlo analysis indicate the effect of the sensing element's normal manufacturing tolerance to the system's frequency is small. Impact of plate curvature analysis indicates the effect of the inertial mass's deformation caused by the surface stress to the capacitance is small. Transient analysis obtained the system's transient displacement curve of six directions and transient capacitance curve in normal terms; this proved the system has good dynamic character in the simulating environment.
Yazicioglu, Refet Firat. "Surface Micromachined Capacitive Accelerometers Using Mems Technology." Master's thesis, METU, 2003. http://etd.lib.metu.edu.tr/upload/1093475/index.pdf.
Full textm n-well CMOS process, including a single-ended and a fully-differential switched-capacitor readout circuits that can operate in both open-loop and close-loop. Using the same process, a buffer circuit with 2.26fF input capacitance is also implemented to be used with micromachined gyroscopes. A single-ended readout circuit is hybrid connected to a fabricated accelerometer to implement an open-loop accelerometer system, which occupies an area less than 1 cm2 and weighs less than 5 gr. The system operation is verified with various tests, which show that the system has a voltage sensitivity of 15.7 mV/g, a nonlinearity of 0.29 %, a noise floor of 487 Hz µ
g , and a bias instability of 13.9 mg, while dissipating less than 20 mW power from a 5 V supply. The system presented in this research is the first accelerometer system developed in Turkey, and this research is a part of the study to implement a national inertial measurement unit composed of low-cost micromachined accelerometers and gyroscopes.
Good, Daniel (Daniel Albert) 1979. "Design of a low power capacitive sensor for a micromachined accelerometer." Thesis, Massachusetts Institute of Technology, 2002. http://hdl.handle.net/1721.1/16840.
Full textIncludes bibliographical references (leaves 72-73).
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Anew possible commercial application for a micromachined accelerometer is for use in handheld devices such as personal digital assistants and cellular phones, as an intuitive method of data entry which does not consume space on the ever-shrinking exterior. These devices are battery powered, which imposes stringent power consumption limitations on any hardware added. To make an accelerometer a viable addition to a handheld device, a low power version was designed, with the other device parameters, such as measurement range and noise performance, tailored to be suitable for use in a handheld. The final design measures ±3 g's of acceleration with approximately 140 [mu]g/ [square root of]Hz of noise, consuming only 200 [mu]W of power.
by Daniel Good.
M.Eng.and S.B.
Guney, Metin G. "High Dynamic Range CMOS-MEMS Capacitive Accelerometer Array with Drift Compensation." Research Showcase @ CMU, 2018. http://repository.cmu.edu/dissertations/1155.
Full textSonmez, Ugur. "Capacitive Cmos Readouts For High Performance Mems Accelerometers." Master's thesis, METU, 2011. http://etd.lib.metu.edu.tr/upload/12613068/index.pdf.
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accelerometer systems to navigation grade performance levels. This goal will be achieved by reducing accelerometer noise level through significant changes in the system architecture and implementation of a new electronic interface readout ASIC. A flexible fourth order &Sigma
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modulator was chosen as the implementation of the electro-mechanical closed loop system, and the burden of noise shaping in the modulator was shifted from the mechanical sensor to the programmable electronic readout. A novel operational transconductance amplifier (OTA) was also designed for circuit implementation of the electronic interface readout. Design and fabrication of the readout was done in a standard 0.35 µ
m CMOS technology. With the newly designed and fabricated readout, single-axis accelerometers were implemented and tested for performance levels in 1g range. The implemented system achieves 5.95 µ
g/sqrt Hz, 6.4 µ
g bias drift, 131.7 dB dynamic range and up to 37.2 g full scale range with previously fabricated dissolved epitaxial wafer process (DEWP) accelerometers in METU MEMS facilities. Compared to a previous implementation with the same accelerometer element reporting 153 µ
g/sqrtHz, 50 µ
g bias drift, 106.8 dB dynamic range and 33.5 g full scale range
this research reports a 25 fold improvement in noise, 24 dB improvement in dynamic range and removal of the deadzone region.
Book chapters on the topic "Capacitive accelerometer"
Gerlach-Meyer, U. E. "Capacitive Accelerometer Made by Silicon Micromechanics." In Micro System Technologies 90, 623–28. Berlin, Heidelberg: Springer Berlin Heidelberg, 1990. http://dx.doi.org/10.1007/978-3-642-45678-7_89.
Full textGarapati, Yugandhar, G. Venkateswara Rao, and K. Srinivasa Rao. "Design and Simulation of Capacitive MEMS Accelerometer." In Advances in Intelligent Systems and Computing, 139–48. Singapore: Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-13-1580-0_13.
Full textVeena, S., Newton Rai, Amogh Manjunath Rao Morey, H. L. Suresh, and Habibuddin Shaik. "Design and Simulation of MEMS Based Capacitive Accelerometer." In IoT and Analytics for Sensor Networks, 207–23. Singapore: Springer Singapore, 2021. http://dx.doi.org/10.1007/978-981-16-2919-8_19.
Full textParmar, Yashoda, Shaveta, Shankar Dutta, Ramjay Pal, and Kapil Kumar Jain. "Temperature Compensation of MEMS Capacitive Accelerometer for Navigational Application." In Springer Proceedings in Physics, 839–44. Cham: Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-319-97604-4_125.
Full textGrosse-Puppendahl, Tobias, Eugen Berlin, and Marko Borazio. "Enhancing Accelerometer-Based Activity Recognition with Capacitive Proximity Sensing." In Lecture Notes in Computer Science, 17–32. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-34898-3_2.
Full textSingh, Prashant, Pooja Srivastava, Ram Mohan Verma, and Saurabh Jaiswal. "Modeling of High Frequency Out-of-Plane Single Axis MEMS Capacitive Accelerometer." In Communications in Computer and Information Science, 249–56. Berlin, Heidelberg: Springer Berlin Heidelberg, 2013. http://dx.doi.org/10.1007/978-3-642-42024-5_30.
Full textRajial, Shaveta, Nidhi Gupta, Ramjay Pa, and Kapil Kumar Jain. "Design and Simulation of Push–Pull Capacitive Accelerometer Structure for Navigation Applications." In Springer Proceedings in Physics, 913–17. Cham: Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-319-97604-4_137.
Full textGupta, Nidhi, Shaveta, Shankar Dutta, Ramjay Pal, and Kapil Kumar Jain. "Effect of Residual Stress on Cantilever Type Push–Pull Capacitive Accelerometer Structure." In Springer Proceedings in Physics, 951–54. Cham: Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-319-97604-4_144.
Full textDwivedi, Apoorva, Prateek Asthana, and Gargi Khanna. "Effect of Micro Lever Width on the Mechanical Sensitivity of a MEMS Capacitive Accelerometer." In Lecture Notes in Electrical Engineering, 525–32. Singapore: Springer Singapore, 2019. http://dx.doi.org/10.1007/978-981-32-9775-3_47.
Full textPanchal, Abha, Shankar Dutta, Ramjay Pal, Kapil Kumar Jain, and D. K. Bhattacharya. "Process Design for Fabrication of Multi-stack MEMS Capacitive Push-Pull Accelerometer Based on SOI Technology." In Springer Proceedings in Physics, 725–30. Cham: Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-319-97604-4_111.
Full textConference papers on the topic "Capacitive accelerometer"
Je, Chang Han, Sungsik Lee, Myung Lae Lee, Sunghae Jung, Ahra Lee, Gunn Hwang, Byoung Gon Yu, and Chang Auck Choi. "Sensitivity tunable capacitive type micro accelerometer." In 2008 IEEE Sensors. IEEE, 2008. http://dx.doi.org/10.1109/icsens.2008.4716616.
Full textEdalatfar, Fatemeh, Sadegh Hajhashemi, Bahareh Yaghootkar, and Behraad Bahreyni. "Dual mode resonant capacitive MEMS accelerometer." In 2016 IEEE International Symposium on Inertial Sensors and Systems. IEEE, 2016. http://dx.doi.org/10.1109/isiss.2016.7435554.
Full textKachhawa, Pharyanshu, and Rama Komaragiri. "Performance Optimization of MEMS Capacitive Accelerometer." In 2014 International Conference on Devices, Circuits and Communications (ICDCCom). IEEE, 2014. http://dx.doi.org/10.1109/icdccom.2014.7024738.
Full textSethuramalingam, T. K., and A. Vimalajuliet. "Design of MEMS based capacitive accelerometer." In 2010 2nd International Conference on Mechanical and Electrical Technology (ICMET). IEEE, 2010. http://dx.doi.org/10.1109/icmet.2010.5598424.
Full textJingqing, Huang, Zhang Mingming, Chen Zhongjian, Hao Yilong, Li Haojiong, Meng Xiangyun, Lu Wengao, Zhang Yacong, Su Weiguo, and Li Song. "Programmable readout circuit for capacitive accelerometer." In 2011 International Conference of Electron Devices and Solid-State Circuits (EDSSC). IEEE, 2011. http://dx.doi.org/10.1109/edssc.2011.6117621.
Full textWang, Ling, Yongtian Wang, and Hanyu Zhao. "High-sensitivity capacitive silicon micro-accelerometer." In Instruments (ICEMI). IEEE, 2009. http://dx.doi.org/10.1109/icemi.2009.5274406.
Full textLi, Yan, Ling Wang, and Jun Liu. "Capacitive Silicon Micro-accelerometer Detecting Technology Research." In 2009 International Conference on Measuring Technology and Mechatronics Automation. IEEE, 2009. http://dx.doi.org/10.1109/icmtma.2009.349.
Full textQin, Mingjie, Yufeng Jin, Min Miao, Xiaoping Tang, Huixiang Lu, and Yingzhan Yan. "Folding differential capacitive accelerometer made of LTCC." In 2016 17th International Conference on Electronic Packaging Technology (ICEPT). IEEE, 2016. http://dx.doi.org/10.1109/icept.2016.7583219.
Full textKan, Long, and Luo Chao. "Capacitive Micro-accelerometer PSPICE Simulation Model Research." In 2010 International Symposium on Information Science and Engineering (ISISE). IEEE, 2010. http://dx.doi.org/10.1109/isise.2010.146.
Full textMansoorzare, Hakhamanesh, Ankesh Todi, Sina Moradian, and Reza Abdolvand. "A Piezo-Capacitive High-Frequency Resonant Accelerometer." In 2020 IEEE International Ultrasonics Symposium (IUS). IEEE, 2020. http://dx.doi.org/10.1109/ius46767.2020.9251353.
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