Academic literature on the topic 'Catalytic chemical vapor deposition'

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Journal articles on the topic "Catalytic chemical vapor deposition"

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Matsumoto, Yasuhiro, Mario A. Reyes, and Arturo Escobosa. "SiO2 deposition approaches using catalytic chemical-vapor deposition method." Journal of Applied Physics 98, no. 1 (July 2005): 014909. http://dx.doi.org/10.1063/1.1954891.

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Vargas-Garcia, J. R., and T. Goto. "Catalytic materials prepared by chemical vapor deposition." IOP Conference Series: Materials Science and Engineering 20 (March 1, 2011): 012001. http://dx.doi.org/10.1088/1757-899x/20/1/012001.

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Li, Bing Ju, Jun Li, Lei Shi, Zhou Jian Tan, and Ji Qiao Liao. "Progress in Catalytic Preparation of Carbon/Carbon Composites." Advanced Materials Research 634-638 (January 2013): 2004–8. http://dx.doi.org/10.4028/www.scientific.net/amr.634-638.2004.

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This paper reviewed published research into catalytic fabrication techniques and recent progresses of carbon/carbon (C/C) composites. It’s described the catalytic chemical vapor deposition theory and reviewed the catalytic properties of different metal catalysts. Merits and demerits of the traditional chemical vapor deposition, improved chemical vapor deposition and other new rapid densification techniques were analyzed. The new densification techniques are to shorten the preparation cycle, but most of them are limited in the laboratory with application problems. Finally, the prospect on the application and development tendency of improved catalytic chemical vapor deposition technique is put forward in the rapid low cost fabrication of C/C composites in the future.
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Yasui, Kanji, Hitoshi Miura, Masasuke Takata, and Tadashi Akahane. "SiCOI structure fabricated by catalytic chemical vapor deposition." Thin Solid Films 516, no. 5 (January 2008): 644–47. http://dx.doi.org/10.1016/j.tsf.2007.06.187.

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Su, Yi, Xiao Ping Zou, Jin Cheng, Guang Zhu, and Mao Fa Wang. "Carbon Nanofibers Synthesized by Ethanol Catalytic Chemical Vapor Deposition." Advanced Materials Research 60-61 (January 2009): 416–19. http://dx.doi.org/10.4028/www.scientific.net/amr.60-61.416.

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. Carbon nanofibers have been attracted many attentions for their potential applications in nanocomposites and electromagnetic wave-absorbing materials due to their remarkable mechanical, electrical and other properties. Ethanol as carbon source possesses low toxicity, easier storage and transportation. In this paper, we report ethanol catalytic chemical vapor deposition (ECCVD) for synthesizing carbon nanofibers. We utilized ferrocene as catalyst precursor and use ethanol as carbon source to synthesize carbon nanofibers by ethanol chemical vapor deposition. The deposits were characterized by employed scanning electron microscopy, transmission electron microscope and Raman spectroscopy.
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Weng, Mengting, Meiqi Zhang, Takashi Yanase, Fumiya Uehara, Taro Nagahama, and Toshihiro Shimada. "Catalytic chemical vapor deposition and structural analysis of MoS2nanotubes." Japanese Journal of Applied Physics 57, no. 3 (February 6, 2018): 030304. http://dx.doi.org/10.7567/jjap.57.030304.

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Ogita, Yoh-Ichiro, Shinshi Iehara, and Toshiyuki Tomita. "Al2O3 formation on Si by catalytic chemical vapor deposition." Thin Solid Films 430, no. 1-2 (April 2003): 161–64. http://dx.doi.org/10.1016/s0040-6090(03)00097-x.

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Matsumura, Hideki. "Silicon nitride produced by catalytic chemical vapor deposition method." Journal of Applied Physics 66, no. 8 (October 15, 1989): 3612–17. http://dx.doi.org/10.1063/1.344068.

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Vargas-Garcia, J. R., and T. Goto. "ChemInform Abstract: Catalytic Materials Prepared by Chemical Vapor Deposition." ChemInform 42, no. 28 (June 16, 2011): no. http://dx.doi.org/10.1002/chin.201128220.

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Purushothaman, V., P. Sundara Venkatesh, R. Navamathavan, and K. Jeganathan. "Direct comparison on the structural and optical properties of metal-catalytic and self-catalytic assisted gallium nitride (GaN) nanowires by chemical vapor deposition." RSC Adv. 4, no. 85 (2014): 45100–45108. http://dx.doi.org/10.1039/c4ra05388e.

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Dissertations / Theses on the topic "Catalytic chemical vapor deposition"

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Troville, Jonathan. "Multiscale Modeling of Carbon Nanotube Synthesis in a Catalytic Chemical Vapor Deposition Reactor." Wright State University / OhioLINK, 2017. http://rave.ohiolink.edu/etdc/view?acc_num=wright1495839218743389.

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Paramguru, Kamrakali. "Growth of carbon nanotubes on anodized titanium oxide templates by catalytic chemical vapor deposition technique." abstract and full text PDF (free order & download UNR users only), 2005. http://0-gateway.proquest.com.innopac.library.unr.edu/openurl?url_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:dissertation&res_dat=xri:pqdiss&rft_dat=xri:pqdiss:1433346.

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Cominos, Vanya. "Catalytic combustion of methane over axially non-uniform Pd catalytic monoliths prepared by chemical vapour deposition." Thesis, University College London (University of London), 2000. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.395815.

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Ayre, Gregory N. "On the mechanism of carbon nanotube formation by means of catalytic chemical vapour deposition." Thesis, University of Southampton, 2011. https://eprints.soton.ac.uk/205661/.

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Despite enormous strides in the synthesis of carbon nanotubes (CNTs), the mechanism for growth is still a highly debated issue. It is generally accepted that the model for carbon filament growth [1, 2], derived from concepts of vapour-liquid-solid theory, also applies to CNT growth. However, this model fails to account for the growth of CNTs from noble metal [3{7], ceramic [8, 9] and semiconducting nanoparticles [10{13], all of which are regarded as unable to catalyse the dissociation of hydrocarbons. In addition, in their bulk form, these materials do not have a catalytic function to produce graphite. This work examines non-traditional catalyst assisted chemical vapour deposition of CNTs with a view to determine the essential role of the catalyst in nanotube growth. CNT synthesis based upon noble metal and two approaches using germanium nanoparticles are presented. Extensive characterisation has been undertaken of each step of the growth process, and the synthesized carbon nanotubes are analysed by atomic force microscopy, electron microscopy and Raman spectroscopy. The results indicate that good densities of high quality single-walled carbon nanotubes are produced by these techniques. Additionally, the effects of different catalyst support interactions were explored by testing combinations of metal catalysts and support media. This study showed that the support has a strong effect on the chemical activity and morphology of the catalyst. The results presented show that the commonly utilised model of carbon filament growth is inadequate to describe CNT growth from non-traditional catalysts. A model for CNT growth consistent with the experimental results is proposed, in which the structural reorganisation of carbon to form CNTs is paramount
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Liu, JingJing. "Carbon nanotubes developed on ceramic constituents through chemical vapour deposition." Thesis, Loughborough University, 2012. https://dspace.lboro.ac.uk/2134/9967.

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Carbon nanotubes (CNTs) were successfully grown on the surface of carbon fibre reinforcements in carbon fibre architecture through in-situ catalytic chemical vapour deposition (CCVD). Success was also implemented on powders of oxides and non-oxides, including Y-TZP powder, ball milled alumina powder, alumina grits, silicon carbide powder. Preliminary results have been achieved to demonstrate the feasibility of making ceramic composites consisting of CNTs reinforcements.
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Fischer, Marcel Vinícius Theisen. "SÍNTESE DE NANOTUBOS DE CARBONO PELA TÉCNICA DE DEPOSIÇÃO CATALÍTICA QUÍMICA EM FASE VAPOR." Universidade Franciscana, 2010. http://tede.universidadefranciscana.edu.br:8080/handle/UFN-BDTD/248.

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The carbon nanotubes (CNT) are small cylinders with diameters in order of nanometers (10-9 m) and, of some micrometers (10-6 m) of length. Carbon nanotubes are conceptually built considering the rolling up of a strip of graphene sheet. The electronic, mechanical, and optical properties of the tube depend on how the graphene sheet is rolled up. More than one graphene sheet can be rolled up forming concentric nanotubes which are called multiple walled carbon nanotubes (MWCNT). The knowledge and parameterization of synthesis methods are of extremely importance for the development of carbon nanotubes science. This work had as objective the installation of a system for CNT production, using chemical catalytic vapor deposition (CCVD), and the evaluation of the effects of synthesis parameters in formation of carbon nanotubes. In this work, parameters such as temperature and time of synthesis using three kinds of catalysts (Fe/MgO, Fe/Al2O3 e Co/Al2O3) were investigated keeping the catalyst mass fixed in 100 mg. The temperatures varied from 750 to 850 °C and synthesis time from 10 to 15 minutes. During the process, an argon flow of 1,0 L/min was used to maintain an inert atmosphere in the tube furnace. When the programmed temperature was reached, a flow of ethylene gas (0,1 L/min-1) was inserted in the reactor. When finishing the synthesis time, gases flux were interrupted. The samples were characterized by Raman spectroscopy. The best synthesis temperature was 800°C for catalysts Fe/MgO and Fe/Al2O3, using 750 °C and Co/Al2O3 catalysts during 15 minutes. The mass medium gain of CNT produced, without purification, was of 112%. The proposed system presented satisfactory results in relation to NTC production in laboratorial scale and the choose of synthesis parameters lead to the synthesis of different CNTs.
Os nanotubos de carbono (NTC) são pequenos cilindros com diâmetro da ordem de nanômetros (10-9 m) e, de alguns micrômetros (10-6 m) de comprimento. Conceitualmente, um nanotubo é construído através do enrolamento de um pedaço de uma folha de grafeno. As propriedades eletrônicas, mecânicas, ópticas do tubo dependem de como grafeno é enrolado. Além disso, pode-se enrolar mais de uma folha de grafeno, formando assim, nanotubos concêntricos (Nanotubos de carbono de paredes múltiplas, NTCPM). Com tantas formas de síntese desses nanomateriais, o conhecimento e parametrização dos métodos de síntese são de extrema importância para o desenvolvimento da área. Com esse intuito, este trabalho teve como objetivo a instalação de um sistema para a produção de NTC, utilizando a técnica de deposição catalítica química em fase vapor (DCQFV), e avaliar os efeitos dos parâmetros de síntese na formação dos nanotubos de carbono. Neste trabalho parâmetros como temperatura e tempo de síntese usando 3 tipos de catalisadores: Fe/MgO, Fe/Al2O3 e Co/Al2O3 foram investigados, com massa de catalisador fixada em 100 mg. As temperaturas variaram de 750 a 850 °C e os tempos de síntese de 10 a 15 minutos. Durante o processo um fluxo de argônio de 1,0 L/min-1 foi utilizado para manter uma atmosfera inerte no interior do forno. Ao atingir a temperatura programada, um fluxo de gás etileno foi inserido, numa taxa de 0,1 L/min-1. Ao finalizar o tempo de síntese, os fluxos dos gases foram interrompidos. As amostras sintetizadas foram caracterizadas por espectroscopia Raman. A melhor temperatura de síntese foi de 800 °C para os catalisadores Fe/MgO e Fe/Al2O3, e de 750 °C com o catalisador Co/Al2O3, em um tempo de 15 minutos. O ganho médio de massa dos NTC produzidos, sem purificação, foi de 112%. O sistema proposto apresentou resultados satisfatórios em relação à produção de NTC em escala laboratorial e os parâmetros de síntese dependem do tipo de NTC que se quer sintetizar.
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Fischer, Marcel Vinicius Theisen. "SÍNTESE DE NANOTUBOS DE CARBONO PELA TÉCNICA DE DEPOSIÇÃO CATALÍTICA QUÍMICA EM FASE VAPOR." Centro Universitário Franciscano, 2010. http://www.tede.universidadefranciscana.edu.br:8080/handle/UFN-BDTD/483.

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The carbon nanotubes (CNT) are small cylinders with diameters in order of nanometers (10-9 m) and, of some micrometers (10-6 m) of length. Carbon nanotubes are conceptually built considering the rolling up of a strip of graphene sheet. The electronic, mechanical, and optical properties of the tube depend on how the graphene sheet is rolled up. More than one graphene sheet can be rolled up forming concentric nanotubes which are called multiple walled carbon nanotubes (MWCNT). The knowledge and parameterization of synthesis methods are of extremely importance for the development of carbon nanotubes science. This work had as objective the installation of a system for CNT production, using chemical catalytic vapor deposition (CCVD), and the evaluation of the effects of synthesis parameters in formation of carbon nanotubes. In this work, parameters such as temperature and time of synthesis using three kinds of catalysts (Fe/MgO, Fe/Al2O3 e Co/Al2O3) were investigated keeping the catalyst mass fixed in 100 mg. The temperatures varied from 750 to 850 °C and synthesis time from 10 to 15 minutes. During the process, an argon flow of 1,0 L/min was used to maintain an inert atmosphere in the tube furnace. When the programmed temperature was reached, a flow of ethylene gas (0,1 L/min-1) was inserted in the reactor. When finishing the synthesis time, gases flux were interrupted. The samples were characterized by Raman spectroscopy. The best synthesis temperature was 800°C for catalysts Fe/MgO and Fe/Al2O3, using 750 °C and Co/Al2O3 catalysts during 15 minutes. The mass medium gain of CNT produced, without purification, was of 112%. The proposed system presented satisfactory results in relation to NTC production in laboratorial scale and the choose of synthesis parameters lead to the synthesis of different CNTs.
Os nanotubos de carbono (NTC) são pequenos cilindros com diâmetro da ordem de nanômetros (10-9 m) e, de alguns micrômetros (10-6 m) de comprimento. Conceitualmente, um nanotubo é construído através do enrolamento de um pedaço de uma folha de grafeno. As propriedades eletrônicas, mecânicas, ópticas do tubo dependem de como grafeno é enrolado. Além disso, pode-se enrolar mais de uma folha de grafeno, formando assim, nanotubos concêntricos (Nanotubos de carbono de paredes múltiplas, NTCPM). Com tantas formas de síntese desses nanomateriais, o conhecimento e parametrização dos métodos de síntese são de extrema importância para o desenvolvimento da área. Com esse intuito, este trabalho teve como objetivo a instalação de um sistema para a produção de NTC, utilizando a técnica de deposição catalítica química em fase vapor (DCQFV), e avaliar os efeitos dos parâmetros de síntese na formação dos nanotubos de carbono. Neste trabalho parâmetros como temperatura e tempo de síntese usando 3 tipos de catalisadores: Fe/MgO, Fe/Al2O3 e Co/Al2O3 foram investigados, com massa de catalisador fixada em 100 mg. As temperaturas variaram de 750 a 850 °C e os tempos de síntese de 10 a 15 minutos. Durante o processo um fluxo de argônio de 1,0 L/min-1 foi utilizado para manter uma atmosfera inerte no interior do forno. Ao atingir a temperatura programada, um fluxo de gás etileno foi inserido, numa taxa de 0,1 L/min-1. Ao finalizar o tempo de síntese, os fluxos dos gases foram interrompidos. As amostras sintetizadas foram caracterizadas por espectroscopia Raman. A melhor temperatura de síntese foi de 800 °C para os catalisadores Fe/MgO e Fe/Al2O3, e de 750 °C com o catalisador Co/Al2O3, em um tempo de 15 minutos. O ganho médio de massa dos NTC produzidos, sem purificação, foi de 112%. O sistema proposto apresentou resultados satisfatórios em relação à produção de NTC em escala laboratorial e os parâmetros de síntese dependem do tipo de NTC que se quer sintetizar.
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Gulas, Michal. "Growth of carbon nanotubes by plasma enhanced hot filament catalytic chemical vapour deposition : Correlation between gas phase and substrate surface." Université Louis Pasteur (Strasbourg) (1971-2008), 2008. http://www.theses.fr/2008STR13144.

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Tian, Fang. "Studies of LPCVD and anodised TiO←2 thin films and their photoelectrocatalytic photochemical properties for destruction of organic effluents." Thesis, University of Strathclyde, 2001. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.366874.

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Schäffel, Franziska. "Synthesis, characterization and modification of carbon nanomaterials." Doctoral thesis, Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden, 2010. http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-25944.

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The main objective of the present thesis is to deepen the understanding of the mechanisms involved in catalytic growth of carbon nanotubes (CNT) and related processes, such as the catalytic hydrogenation, and to use this knowledge to optimize the experimental approaches in order to gain better control in the synthesis and modification of carbon nanomaterials. Controlled growth of the CNT is achieved using gas-phase prepared catalyst particles (Fe, Co) which serve as individual catalytic nucleation sites in a chemical vapor deposition (CVD) process. These studies highlight that the controlled preparation of catalyst particles is a crucial step in order to control the CNT morphology. The resultant CNT diameter and the CNT density are found to increase with increasing nanoparticle diameter and density, respectively. The number of walls of the CNT also increases with increasing primary catalyst size. The experimentally derived correlations between the particle diameter on one hand and the CNT diameter and the CNT number of walls on the other hand are attributed to an increase of the catalyst's volume-to-surface area ratio with increasing particle size. While the availability of carbon dissolved within the catalyst at the point of nucleation is determined by the catalyst volume, the amount of carbon required to form a cap depends on the surface area of the catalyst particle. Electron microscopy studies of the catalyst/substrate/carbon interfaces of CNT grown from Fe nanoparticles reveal that the CNT walls are anchored to the oxide substrate which contests the general argument that the CNT walls stem from atomic steps at the catalyst. It is argued that after nucleation, the substrate itself provides a catalytic functionality towards the stimulation of ongoing CNT growth, whereas the catalytic activity of the metal particle is more restricted to the nucleation process. Selective hard-magnetic functionalization of CNT tips has been achieved in a plasma-enhanced CVD process. Hard-magnetically terminated CNT, i.e. CNT with a FePt nanoparticle at each tip, are directly grown using FePt catalysts. Fe/Pt thin films with a strongly over-stoichiometric Fe content in the starting catalyst composition yield CNT with a significant number of particles in the hard-magnetic phase. Anisotropic etching of graphite through Co catalyst particles in hydrogen atmosphere at elevated temperatures (i.e. catalytic hydrogenation) is reported. Catalytic hydrogenation is a potential key engineering route for the fabrication of graphene nanoribbons with atomic precision. While in previous studies the etching of zigzag channels was preferred, the present investigations reveal preferential etching of armchair channels, which provides a means to tailor graphene nanostructures with specific edge termination. Further, detailed morphological and structural characterization of the Co particles provide insight into the hydrogenation mechanism which is still a matter of controversy.
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Books on the topic "Catalytic chemical vapor deposition"

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Sivaram, Srinivasan. Chemical Vapor Deposition. Boston, MA: Springer US, 1995. http://dx.doi.org/10.1007/978-1-4757-4751-5.

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Fortin, Jeffrey B., and Toh-Ming Lu. Chemical Vapor Deposition Polymerization. Boston, MA: Springer US, 2004. http://dx.doi.org/10.1007/978-1-4757-3901-5.

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O, Pierson Hugh, ed. Handbook of chemical vapor deposition. 2nd ed. Norwich, NY: Noyes Publications, 1999.

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Dobkin, Daniel M. Principles of Chemical Vapor Deposition. Dordrecht: Springer Netherlands, 2003.

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Dobkin, Daniel M., and Michael K. Zuraw. Principles of Chemical Vapor Deposition. Dordrecht: Springer Netherlands, 2003. http://dx.doi.org/10.1007/978-94-017-0369-7.

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Gesheva, K. A. Chemical vapor deposition (CVD) technology. Hauppauge, N.Y: Nova Science Publishers, 2008.

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Magneto luminous chemical vapor deposition. Boca Raton, FL: Taylor & Francis, 2011.

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K, Zuraw Michael, ed. Principles of chemical vapor deposition. Dordrecht: Kluwer Academic Publishers, 2003.

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Luminous chemical vapor deposition and interface engineering. New York: Marcel Dekker, 2005.

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Miyoshi, Kazuhisa. Chemical-vapor-deposited diamond film. [Cleveland, Ohio]: National Aeronautics and Space Administration, Lewis Research Center, 1999.

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Book chapters on the topic "Catalytic chemical vapor deposition"

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Peroulis, Dimitrios, Prashant R. Waghmare, Sushanta K. Mitra, Supone Manakasettharn, J. Ashley Taylor, Tom N. Krupenkin, Wenguang Zhu, et al. "Catalytic Chemical Vapor Deposition (CCVD)." In Encyclopedia of Nanotechnology, 403. Dordrecht: Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_100111.

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Matsumura, Hideki, Akira Izumi, and Atsushi Masuda. "Catalytic Chemical Vapor Deposition of a-Si:H TFT." In Thin Film Transistors, 377–94. Boston, MA: Springer US, 2004. http://dx.doi.org/10.1007/978-1-4615-0397-2_9.

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Mishra, Shivangi, Prateek Khare, and Shiv Singh. "Catalytic Chemical Vapor Deposition Grown Carbon Nanofiber for Bio-electro-chemical and Energy Applications." In Energy, Environment, and Sustainability, 497–526. Singapore: Springer Singapore, 2019. http://dx.doi.org/10.1007/978-981-15-0536-2_21.

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Boyd, David C., Richard T. Haasch, Kwok-Lun Ho, Jen-Wei Hwang, Roland K. Schulze, John F. Evans, Wayne L. Gladfelter, and Klavs F. Jensen. "Organometallic Chemical Vapor Deposition of Aluminum Nitride and Aluminum Metal." In Metal-Metal Bonds and Clusters in Chemistry and Catalysis, 215–30. Boston, MA: Springer US, 1990. http://dx.doi.org/10.1007/978-1-4899-2492-6_16.

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Cowley, Alan H. "Organometallic Chemical Vapor Deposition of GaAs and Related Semiconductors Using Novel Organometallic Precursors." In Metal-Metal Bonds and Clusters in Chemistry and Catalysis, 195–204. Boston, MA: Springer US, 1990. http://dx.doi.org/10.1007/978-1-4899-2492-6_14.

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Lau, Kenneth K. S. "Chemical Vapor Deposition." In Medical Coatings and Deposition Technologies, 403–55. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2016. http://dx.doi.org/10.1002/9781119308713.ch11.

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Jensen, Klavs F. "Chemical Vapor Deposition." In Advances in Chemistry, 199–263. Washington, DC: American Chemical Society, 1989. http://dx.doi.org/10.1021/ba-1989-0221.ch005.

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Aardahl, C. L., and J. W. Rogers. "Chemical Vapor Deposition." In Inorganic Reactions and Methods, 83–84. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2007. http://dx.doi.org/10.1002/9780470145333.ch46.

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Nagasawa, Hiroki, and Toshinori Tsuru. "Chemical Vapor Deposition." In Encyclopedia of Membranes, 395–97. Berlin, Heidelberg: Springer Berlin Heidelberg, 2016. http://dx.doi.org/10.1007/978-3-662-44324-8_1425.

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Nagasawa, Hiroki, and Toshinori Tsuru. "Chemical Vapor Deposition." In Encyclopedia of Membranes, 1–3. Berlin, Heidelberg: Springer Berlin Heidelberg, 2015. http://dx.doi.org/10.1007/978-3-642-40872-4_1425-1.

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Conference papers on the topic "Catalytic chemical vapor deposition"

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Ohara, Kenji, Yoichiro Neo, Hidenori Mimura, Yoku Inoue, and Akihiro Ishida. "The control of carbon nanotubes density by gas-phase catalytic chemical vapor deposition." In 2009 22nd International Vacuum Nanoelectronics Conference (IVNC). IEEE, 2009. http://dx.doi.org/10.1109/ivnc.2009.5271644.

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Yamamoto, Soma, Keita Tani, Yasumori Onaka, Yasuyuki Takata, Shinzo Suzuki, Yasushi Shibuta, Shigeo Maruyama, and Masamichi Kohno. "Synthesis of Single Walled Carbon Nanotubes by Laser Vaporized Catalytic Chemical Vapor Deposition Technique." In ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference collocated with the ASME 2007 InterPACK Conference. ASMEDC, 2007. http://dx.doi.org/10.1115/ht2007-32776.

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SWNTs were synthesized by laser vaporized CCVD (Catalytic Chemical Vapor Deposition). The diameter distribution and the purity of SWNTs synthesized at different temperatures, laser intensities and catalysts were investigated by Raman spectroscopy. Both of them tended to shift towards a larger area as reacting temperature or laser intensity was increased. Ni, Co and Fe played a catalytic role, though Ag and Cu were less effective at our experimental conditions. In addition, the conventional laser oven technique and laser vaporized CCVD technique were also compared. The diameter distribution of SWNTs which were synthesized by the conventional laser oven technique was narrower than that of SWNTs synthesized by the laser vaporized CCVD technique.
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3

MATSUMURA, Hideki. "Low Temperature Formation of Polysilicon Films by Catalytic Chemical Vapor Deposition (Cat-CVD) Method." In 1991 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 1991. http://dx.doi.org/10.7567/ssdm.1991.pc5-4.

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4

Okamoto, A. "Diameter Control of Single-Wall Carbon Nanotubes by the Catalytic Chemical Vapor Deposition Method." In STRUCTURAL AND ELECTRONIC PROPERTIES OF MOLECULAR NANOSTRUCTURES: XVI International Winterschool on Electronic Properties of Novel Materials. AIP, 2002. http://dx.doi.org/10.1063/1.1514104.

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5

Lysaght, Andrew C., and Wilson K. S. Chiu. "Impact of Thermophoresis on Carbon Nanotube Growth by Chemical Vapor Deposition." In ASME 2008 Heat Transfer Summer Conference collocated with the Fluids Engineering, Energy Sustainability, and 3rd Energy Nanotechnology Conferences. ASMEDC, 2008. http://dx.doi.org/10.1115/ht2008-56242.

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Thermophoretic effect on the growth of carbon nanotubes (CNTs) by chemical vapor deposition (CVD) has been investigated using a fully coupled gas-phase and surface chemistry model. This reactor-scale model employs conservation of mass, momentum, species, and energy equations to describe the evolution of hydrogen and hydrocarbon feed streams as they undergo thermal transport and chemical reactions within the CVD reactor. The resulting CNT growth rates on individual catalytic iron nanoparticles located on the reactor wall is predicted by the model as well as steady state velocity, temperature, and concentration fields within the reactor volume and concentrations of species adsorbed onto the nanoparticle surfaces. The effect of thermophoresis on volumetric concentration fields and surface species adsorption for deposition occurring in differing reactor boundary and flow conditions has been investigated to understand the impacts on CNT growth. This investigation is useful in order to optimize reactor design and boundary conditions to promote optimal CNT deposition rates.
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Endo, Morinobu. "Large-scale Synthesis of Carbon Nanotubes by Catalytic Chemical Vapor Deposition Method and Their Applications." In ELECTRONIC PROPERTIES OF NOVEL NANOSTRUCTURES: XIX International Winterschool/Euroconference on Electronic Properties of Novel Materials. AIP, 2005. http://dx.doi.org/10.1063/1.2103826.

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7

Kwok, Kinghong, and Wilson K. S. Chiu. "Synthesis of Carbon Nanotubes on a Moving Substrate by Laser-Induced Chemical Vapor Deposition." In ASME 2005 International Mechanical Engineering Congress and Exposition. ASMEDC, 2005. http://dx.doi.org/10.1115/imece2005-80222.

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An open-air laser-induced chemical vapor deposition technique has been successfully used to rapidly deposit pillars of carbon nanotube forest on a moving glass substrate. A CO2 laser is used to heat a traversing fused quartz rod covered with metal particles inside a hydrocarbon environment. Pyrolysis of hydrocarbon precursor gas occurs and subsequently gives rise to the growth of multi-wall carbon nanotubes on the substrate surface. The experimental results indicate that nanotube growth kinetics and microstructure are strongly dependent on the experimental parameters such as laser power. The typical deposition rate of carbon nanotubes achieved in this study is over 50 μm/s, which is relatively high compared to existing synthesis techniques. At high power laser irradiation, carbon fibers and carbon film are formed as a result of excessive formation of amorphous carbon on the substrate. High-resolution transmission and scanning electron microscopy, and x-ray energy-dispersive spectrometry are used to investigate the deposition rate, microstructure and chemical composition of the catalytic surface and the deposited carbon nanotubes.
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8

Sahdan, M. Z., M. H. Mamat, S. Amizam, H. A. Rafaie, Z. Khusaimi, U. M. Noor, M. Rusop, Mohamad Rusop, and Tetsuo Soga. "New Approach of ZnO Nanowires Grown on ZnO Microball using Gas Blocker in Catalytic Thermal Chemical Vapor Deposition." In NANOSCIENCE AND NANOTECHNOLOGY: International Conference on Nanoscience and Nanotechnology—2008. AIP, 2009. http://dx.doi.org/10.1063/1.3160153.

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9

McCulloch, D. G., R. Glaisher, P. J. Pigram, E. Yeo, A. N. Rider, N. Brack, and B. W. Halstead. "Scaled-up production of multi-walled carbon nanotubes using catalytic chemical vapour deposition." In 2006 International Conference on Nanoscience and Nanotechnology. IEEE, 2006. http://dx.doi.org/10.1109/iconn.2006.340572.

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10

Lee, Jaegeun, Moataz Abdulhafez, and Mostafa Bedewy. "Multizone Rapid Thermal Processing to Overcome Challenges in Carbon Nanotube Manufacturing by Chemical Vapor Deposition." In ASME 2019 14th International Manufacturing Science and Engineering Conference. American Society of Mechanical Engineers, 2019. http://dx.doi.org/10.1115/msec2019-2847.

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Abstract For the scalable production of commercial products based on vertically aligned carbon nanotubes (VACNTs), referred to as CNT forests, key manufacturing challenges must be overcome. In this work, we describe some of the main challenges currently facing CNT forest manufacturing, along with how we address these challenges with our custom-built rapid thermal processing chemical vapor deposition (CVD) reactor. First, the complexity of multistep processes and reaction pathways involved in CNT growth by CVD limits the control on CNT population growth dynamics. Importantly, gas-phase decomposition of hydrocarbons, formation of catalyst particles, and catalytic growth of CNTs are typically coupled. Here, we demonstrated a decoupled recipe with independent control of each step. Second, significant run-to-run variations plague CNT growth by CVD. To improve growth consistency, we designed various measures to remove oxygen-containing molecules from the reactor, including air baking between runs, dynamic pumping down cycles, and low-pressure baking before growth. Third, real-time measurements during growth are needed for process monitoring. We implement in situ height kinetics via videography. The combination of approaches presented here has the potential to transform lab-scale CNT synthesis to robust manufacturing processes.
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Reports on the topic "Catalytic chemical vapor deposition"

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Baron, B. N., R. E. Rocheleau, and S. S. Hegedus. Chemical vapor deposition and photochemical vapor deposition of amorphous silicon photovoltaic devices. Office of Scientific and Technical Information (OSTI), November 1989. http://dx.doi.org/10.2172/5042415.

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2

Mayer, T. M., D. P. Adams, B. S. Swartzentruber, and E. Chason. Dynamics of nucleation in chemical vapor deposition. Office of Scientific and Technical Information (OSTI), November 1995. http://dx.doi.org/10.2172/170570.

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HO, PAULINE. Chemical reactions in TEOS/ozone chemical vapor deposition[TetraEthylOrtho Silicate]. Office of Scientific and Technical Information (OSTI), February 2000. http://dx.doi.org/10.2172/751369.

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Kaplan, Daniel, Kendall Mills, and Venkataraman Swaminathan. Chemical Vapor Deposition of Atomically-Thin Molybdenum Disulfide (MoS2). Fort Belvoir, VA: Defense Technical Information Center, March 2015. http://dx.doi.org/10.21236/ada613852.

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5

Stevenson, D. A. Fundamental studies of the chemical vapor deposition of diamond. Office of Scientific and Technical Information (OSTI), January 1991. http://dx.doi.org/10.2172/5639356.

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Banks, H. T. Modeling Validation and Control of Advanced Chemical Vapor Deposition Processes. Fort Belvoir, VA: Defense Technical Information Center, November 2000. http://dx.doi.org/10.21236/ada384359.

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Lampert, Lester. High-Quality Chemical Vapor Deposition Graphene-Based Spin Transport Channels. Portland State University Library, January 2000. http://dx.doi.org/10.15760/etd.3308.

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8

Muenchausen, R. Chemical-vapor deposition of complex oxides: materials and process development. Office of Scientific and Technical Information (OSTI), November 1996. http://dx.doi.org/10.2172/405750.

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Kagan, Harris, Richard Kass, and K. K. Gan. Development of Single Crystal Chemical Vapor Deposition Diamonds for Detector Applications. Office of Scientific and Technical Information (OSTI), January 2014. http://dx.doi.org/10.2172/1115741.

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Ekerdt, John G. Silicon and Germanium Thin Film Chemical Vapor Deposition, Modeling and Control. Fort Belvoir, VA: Defense Technical Information Center, April 2002. http://dx.doi.org/10.21236/ada417307.

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