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Dissertations / Theses on the topic 'Cathodic arc deposition'

Author: Grafiati

Published: 4 June 2021

Last updated: 5 February 2022

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1

Elzwawi, Salim Ahmed Ali. "Cathodic Arc Zinc Oxide for Active Electronic Devices." Thesis, University of Canterbury. Electrical and Computer Engineering, 2015. http://hdl.handle.net/10092/10852.

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The filtered cathodic vacuum arc (FCVA) technique is a well established deposition method for wear resistant mechanical coatings. More recently, this method has attracted attention for growing ZnO based transparent conducting films. However, the potential of FCVA deposition to prepare ZnO layers for electronic devices is largely unexplored. This thesis addresses the use of FCVA deposition for the fabrication of active ZnO based electronic devices. The structural, electrical and optical characteristics of unintentionally doped ZnO films grown on different sapphire substrates were systematically

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2

Veerasamy, Vijayen S. "Tetrahedral amorphous carbon : deposition, characterisation and electronic properties." Thesis, University of Cambridge, 1994. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.337824.

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3

Oates, T. W. H. "Metal plasma immersion ion implantation and deposition using polymer substrates." University of Sydney. Physics, 2003. http://hdl.handle.net/2123/571.

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This thesis investigates the application of plasma immersion ion implantation (PIII) to polymers. PIII requires that a high negative potential be applied to the surface of the material while it is immersed in a plasma. This presents a problem for insulating materials such as polymers, since the implanting ions carry charge to the surface, resulting in a charge accumulation that effectively neutralises the applied potential. This causes the plasma sheath at the surface to collapse a short time after the potential is applied. Measurements of the sheath dynamics, including the collapsing shea

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4

Kandah, Munther. "Particles emission control at graphite cathode in arc ion plating deposition." Thesis, McGill University, 1997. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=35434.

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In this work, the dependence of the vacuum arc spot velocity on physical and electrical properties of different graphite cathode materials is investigated in the presence of a variable magnetic field. A pulsed arc system is used to perform preliminary experiments on the arc mobility for the different types of graphite for the selection of proper material morphology and the design of a continuous vacuum arc system. The characteristics of arc mobility, erosion rate, and carbon ion flux emitted from the continuous carbon source are then evaluated in view of particle-free diamond-like protective c

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Kandah, Munther Issa. "Particles emission control at graphite cathode in arc ion plating deposition." Thesis, National Library of Canada = Bibliothèque nationale du Canada, 1997. http://www.collectionscanada.ca/obj/s4/f2/dsk2/ftp03/NQ55420.pdf.

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Kandah, Munther. "Droplets generation mechanisms by graphite cathodes in the vacuum arc deposition technique." Thesis, McGill University, 1993. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=69702.

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The most severe problem for the vacuum arc deposition (VAD) technique is the formation of micron-size particles on the films. These particles degrade the films' properties. The present work studied the generation mechanisms and characteristics of the droplets that are produced in the carbon films deposited by vacuum arc technique. To achieve a better control of the generation mechanism of these droplets, the effect of the arc current, arc duration time, cathode spot temperature and distance between cathode and substrate on the size and population of the micro-droplets are studied.<br>The micro

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7

Hyde, Robert H. "Hollow-electrode pulsed plasma deposition of titanium and carbon thin films." [Tampa, Fla] : University of South Florida, 2006. http://purl.fcla.edu/usf/dc/et/SFE0001856.

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8

謝涵嵋. "Deposition of CoCrCuFeNi Films with Cathodic Vacuum Arc Deposition Apparatus." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/42247626937510788686.

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杜禹寬. "Deposition of Al0.5CoCrCu1.5FeNi Films with Filtered Cathodic Vacuum Arc Deposition Apparatus." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/12714418462452046671.

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10

Kuo, Jui-Kang, and 郭瑞剛. "Investigation of DLC-film wear by cathodic arc deposition." Thesis, 1999. http://ndltd.ncl.edu.tw/handle/55110576322533352403.

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碩士<br>華梵大學<br>機電工程研究所<br>87<br>ABSTRACT This paper describes the characteristics of the DLC film evaporated by graphite cathodic arc method and it’s tribological behavior in reciprocating dry sliding with 4032 Al-alloy, 52100 steel and Al2O3. In addition, the wear mechanisms of the film and counterbody are discussed. The influence of process parameter and loading on wear is also studied. The result shows that the DLC film obtained under low Ar evaporation condition has a better performance on hardness. Besides, the thickness of the DLC film increases with the increase

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11

HSU, PIN-HUA, and 徐品華. "Process of CrAl(O,N) Oxide Coatings by Cathodic Arc Deposition." Thesis, 2016. http://ndltd.ncl.edu.tw/handle/77641476087901471408.

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碩士<br>明道大學<br>材料與能源工程學系碩士班<br>104<br>In this study, cathodic arc deposition and Cr, Cr30Al70 dual targets were used to synthesize the CrN, CrAlN, CrAlON and CrAl coatings at low temperature. Except the CrAl coating, the other coatings possess similar surface roughness, however, many submicro droplets were sprayed on the coating surface due to the Al element with low melting temperature mixed in the target material. CrAlON coating decomposed of the Cr2O3, Al2O3 and CrN phases which present corundum structure. Vicker’s hardness test showed the highest hardness of Hv10g – 3180 for the CrAlN coati

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12

Chan, Mu-hsuan, and 詹慕萱. "Process and Characterization of Titanium Dioxide Coatings by Cathodic Arc Deposition." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/19815625463245705135.

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碩士<br>明道管理學院<br>材料暨系統工程研究所<br>94<br>Due to the energy shortage and environmental protection issues, titanium dioxide used as photocatalyst by absorbing solar energy to decompose various kinds of pollutant has been an interesting research recently. Moreover, for pure TiO2, only the ultraviolet fraction of the solar irradiation (about 5%) is active in the photoexcitation processes. Recently, many researches are working on the utilization of visible light to activate catalyst behaviors of titanium dioxide in order to expand applications in many fields. Titanium oxide (TiO2) and Copper-doped t

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13

Jiang, Luh-Feng, and 江祿峰. "The Study of Hard Films by Cathodic Arc Plasma Deposition Method." Thesis, 1995. http://ndltd.ncl.edu.tw/handle/67007795681131096079.

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碩士<br>國立臺灣科技大學<br>化學工程研究所<br>83<br>In tihis thesis, we explored the application of cathodic arc plasma technique in the deposition of (i)diamond-like film, (ii) hard films such as TiN, TiC and TiCN. Diamond-like film was deposited using high density graphite (1.92 g/cm3) as target and nitrogen as arc-sustaining gas. Film structure was influenced by parameters like arc current, background gas pressure and substrate bias voltage. Optimum condition was achieved as 35-40 ampere arc

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ZHANG, YONG-JIE, and 張詠傑. "Electric Magnetron Arc Source Design of Cathodic Arc Evaporation and Deposition of AlTiN Hard Coatings." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/6tmswb.

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碩士<br>國立虎尾科技大學<br>機械與電腦輔助工程系碩士班<br>106<br>The cathodic arc system of physical vapor deposition, because of its fast deposition rate and low cost of machine equipment, is widely used by the tool and mold industry coatings, but it has one of the biggest defects are particles and droplets deposited on the surface of the film. This defect causes the surface of the film. Decrease in luminosity and mechanical properties. Therefore, many researches have proposed improvement methods for this drawback, such as reducing cathode target current, placing a magnetic filter tube in front of the target, and a

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Yeh, Chien-hsuan, and 葉建弦. "Deposition of Yttria-Stabilized Zirconia Film Using Cathodic Arc Plasma Ion Plating." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/23832370439881588772.

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碩士<br>逢甲大學<br>材料科學所<br>92<br>Zirconia ceramic exhibits excellent fracture toughness, high ion conductivity, low electron conductivity, and low thermal conductivity properties. Therefore, YSZ films have been widely applied to be the solid electrolyte of fuel cell, oxygen sensor, wear protective coatings and the thermal barrier coatings of high temperature power-generator components. Cathodic arc plasma ion plating (CAP) process is a promising coating technology which has high deposition rate, high atomic ionization and excellent film adhesion. In this study, the CAP process with Zr84Y16 cat

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Tsou, Po-Yi, and 鄒柏毅. "Source current effect on properties of CrSiN hard coatings by cathodic arc deposition." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/16721670734108340408.

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碩士<br>明道大學<br>材料科學與工程學系碩士班<br>102<br>Cathodic arc deposition system has a feature of high ionization rate, fast deposition rate and good adhesion properties. CrSiN thin films has good mechanical and chemical properties, few researches used the pulse current to enhance the films properties with excellent features. In this study, CrSiN thin films were deposited by cathodic arc deposition system. The influences of source cathodic arc current on the microstructure, mechanical properties and chemical properties of CrSiN thin films were investigated. The characteristics of CrSiN coatings were carrie

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17

Shih, Yuan-Ting, and 施元丁. "The influence of oxygen on Diamondlike film deposited by cathodic arc plasma deposition technology." Thesis, 1995. http://ndltd.ncl.edu.tw/handle/86418768558415822509.

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Guillen, E., I. Heras, Llorente G. Rincon, F. Lungwitz, M. Alcon-Camas, and R. Escobar-Galindo. "Room temperature deposition of highly dense TiO2 thin films by Filtered Cathodic Vacuum Arc." 2019. https://hzdr.qucosa.de/id/qucosa%3A33929.

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A systematic study of TiO2 films deposited by dc filtered cathodic vacuum arc (FCVA) was carried out by varying the deposition parameters in a reactive oxygen atmosphere. The influence of the oxygen partial pressure on film properties is analyzed. Composition was obtained by Rutherford backscattering spectroscopy (RBS) measurements, which also allow us to obtain the density of the films. Morphology of the samples was studied by scanning electron microscopy (SEM) and their optical properties by ellipsometry. Transparent, very dense and stoichiometric TiO2 films were obtained by FCVA at room tem

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Tsai, Tsung-Ju, and 蔡宗儒. "Investigation of Processing And Properties of Diamond-Like Carbon Film Using the Cathodic Arc Deposition." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/37329151125042540095.

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Li, Chen-Yang, and 李振陽. "Electrical and Optical Properties of ZnO：Ti Thin Films Prepared by Cathodic Arc Plasma Deposition System." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/01414514063170480957.

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碩士<br>國立屏東科技大學<br>機械工程系所<br>98<br>In the transparent conductive film, ZnO film has a significant priority to grow c-axis orientation and transparency, and a low resistivity and good light penetration, which is widely used in electric and acoustic sound and light components. In addition, zinc oxide thin films with surface texture or the surface defects for application the optical device (such as: solar cells) due to enhanced light trapping (enhanced light trapping). The resistivity ZnO thin film is generally high (about 1-100 Ω-cm), and the main origin of its conductive properties are contribut

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21

Huang, hun-Chih, and 黃俊智. "Electrical and Optical Properties of ZnO Thin Films Prepared by Cathodic Arc Plasma Deposition System." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/53701837391666230427.

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碩士<br>國立屏東科技大學<br>機械工程系所<br>98<br>Zinc oxide (ZnO) thin film is a new generation of transparent conducting oxide thin film, the materials of zinc are not virulence and it is abundant in the nature, and the materials of zinc will be to replace the indium tin oxide (ITO) thin film, many methods for preparation of the TCO thin film, among these methods, the cathodic arc technique is rare, which can create ions and it has the highly energy, and the cathodic arc technique has highly deposition rate, therefore, the cahtodic arc technique is a choice for process of low-temperature or cost-down, that

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Chiang, Jui-Yu, and 姜瑞宇. "Study on the deposition of titanium containing diamond like carbon films by cathodic arc plasma." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/56872496955706773484.

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碩士<br>國立臺北科技大學<br>製造科技研究所<br>92<br>In this study, titanium containing diamond like carbon ( Ti-DLC ) films have been deposited onto two different substrates: Si wafer and SUS420 stainless steel, by cathodic arc plasma deposition ( CAPD ) technique. The effects of deposition parameters on film characteristics were investigated by field emission scanning electron microscope ( FE-SEM ), atomic force microscope ( AFM ), X-ray diffraction ( XRD ), transmission electron microscope ( TEM ), Raman spectroscope, X-ray photoelectron spectroscope ( XPS ), Auger electron spectroscope ( AES ), s

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Hwang, Ming-Yeong, and 黃明勇. "Research of Difference with Wear-Resistant of the Cathodic Arc Plasma Deposition Ti-Al-N Deposits." Thesis, 1994. http://ndltd.ncl.edu.tw/handle/25628179288622888407.

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碩士<br>國立成功大學<br>材料科學(工程)研究所<br>82<br>TiN 鍍層是目前耐磨耗鍍層材料中使用相當成功的一個範例，而後來新發展的TiAlN 鍍層與TiN 鍍層比較有如下之優點:(1)可抵抗高溫氧化至800 ℃,TiN只有550℃(2)較佳的耐磨耗性(尤其是難加工材料)(3)較低的熱傳導係數(TiAlN:16,TiN:19w/mK(4)較好的附著性(Scratch test ;Lc: TiAlN=80.3N,TiN=60.3N)。所以在目前工業上，TiAlN 鍍層已漸漸取代 TiN 鍍層，成為刀、模具使用的新耐磨耗鍍層，尤其是對於高速切削的應用。唯其影響耐磨耗性差異的原因錯綜複雜很難有定論，本研究擬嘗試著探討它。本研究首先是擬探討以Arc Evaporation 技術，於工具鋼上蒸鍍 Ti AlN 鍍層之最佳蒸鍍條件，再以田口式實驗設計法(L-18)，所歸納出影響TiAlN 鍍層耐磨耗性的兩個最主要實驗變數:(1)基板偏壓(2) 氮氣分壓，來進行主要變數實驗(

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Li, Yan-Way, and 李延煒. "Study on the Interlayer Properties of Multilayer (Ti,Al)N Hard Coatings with Cathodic Arc Deposition." Thesis, 1998. http://ndltd.ncl.edu.tw/handle/96276508976427209064.

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碩士<br>國立中興大學<br>材料工程學研究所<br>86<br>Multilayer is usually the feature of hard coatings. Advanced PVD coatingssuch as TiN has been succefully applied to high speed steel for metal cuttingand can prolong its span. However, if we add aluminum during the TiN depositedprocess, (Ti,Al)N demonstrated significant improvements in hardness and heat resistance. But in practical appliance, the lack of adhesive is the problemwe have to face when we try to deposit (Ti,Al)N coatings on the surface of highsp

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Chang, Yin-Yu, and 張銀佑. "Synthesis and Characterization of Metal-doped Amorphous Carbon Films Deposited by a Cathodic Arc Activated Deposition Process." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/69369145774616095311.

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博士<br>國立中興大學<br>材料工程學研究所<br>92<br>Diamond-like Carbon (DLC) films containing various metal doping were synthesized by using a cathodic-arc activated deposition (CAAD) process. Metal plasma with intensive ion energies catalyzes the decomposition of hydrocarbon gases (C2H2), and induces the formation of hydrogenated amorphous carbon films with a mixture of sp2 and sp3 carbon bonds. The composite film structure consists of a metal- doped amorphous carbon film on top of a graded metal nitride interlayer, which provides enhanced mechanical and tribological properties. In this study, the plasma cha

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Tsai, Ching-Yu, and 蔡青祐. "Mechanical properties and high temperature oxidation behaviors of TiSiCrAlN films synthesized by a cathodic arc deposition process." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/59173049648020341539.

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碩士<br>明道大學<br>材料科學與工程學系碩士班<br>101<br>The extension of the tool life is a considerable goal for cutting and forming tools. Therefore the industry is interested to improve the mechanical performance for such tools. Transition metal nitrides, such as TiSiN and CrAlN, have been used recently as protective hard coatings due to their excellent tribological properties. In this study, TiSiN, CrAlN and multicomponent TiSiCrAlN coatings with different alloy contents were synthesized by cathodic-arc evaporation with plasma enhanced duct equipment. The multicomponent TiSiCrAlN coatings have a high potenti

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Huang, Chien-Wei, and 黃健瑋. "Study of Transparent Conductive Zinc Oxide Thin Film on Plastic Substrates Deposited Cathodic Vacuum Arc Deposition System." Thesis, 2016. http://ndltd.ncl.edu.tw/handle/wuvxq5.

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博士<br>國立中山大學<br>機械與機電工程學系研究所<br>104<br>This work investigated pure, conductivity and transparency zinc oxide (ZnO) thin films on the polymer substrates at a low temperature (< 75℃) by using cathodic vacuum arc deposition (CVAD) system. We reported the material, optical, electrical and mechanical properties of ZnO thin film with various processing conditions. The pure ZnO thin films were deposited on the various polymer substrates such as PET, PVB and PI substrate and the properties of the deposited ZnO tin films were investigated. The figure of merit (FOM) based on the transparent and conducti

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Li, Jhih-Syun, and 李治勳. "The Deposition of Diffusion Barrier Layer for Plasma Sprayed Thermal Barrier Coatings by Cathodic Arc Plasma Evaporation." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/rt79mx.

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碩士<br>國立虎尾科技大學<br>材料科學與綠色能源工程研究所<br>102<br>In this study, Nickel-based superalloy and silicon wafer were chosen as substrate. Firstly, superalloy specimens were cleaned and blast with zirconia sand to increase its surface roughness in order to enhance the bond strength between bond coat and substrate. After that, all samples were deposited a diffusion barrier layer by cathodic arc plasma evaporation. During the deposition oxygen, nitrogen partial pressure (oxygen / nitrogen ratio) is set at 1:3, and the target used were TiAl(67at % Al), CrAl(50at % Al) and Ni-22Cr-10Al-1Y. Silicon wafer sample

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Chen, Jun-Hao, and 陳君濠. "Deposition and characterization of Ti-Si-N, Ti-Si-C-N films by cathodic arc plasma evaporation." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/zrzu7r.

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碩士<br>國立虎尾科技大學<br>材料科學與綠色能源工程研究所<br>97<br>There are two phases in this study. In phase one, nanocomposite Ti-Si-N films were deposited by a filtered cathodic arc plasma deposition system. The influences of bias voltages on the microstructure, mechanical and corrosion properties of the films were investigated. In phase two, Ti-Si-N and Ti-Si-C-N films were deposited by a dual cathodic arc plasma deposition system. The influences of C2H2/N2 flow rate ratio on the microstructure, mechanical properties, corrosion resistance and oxidation behavior of the films were investigated. Field emission scan

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Sun, Hao-Yun, and 孫浩筠. "Study on Characteristics of AISI 316L Stainless Steel Coated CrCuN Ceramic Hard Films by Cathodic Arc Deposition." Thesis, 2019. http://ndltd.ncl.edu.tw/handle/hgjdz9.

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碩士<br>大同大學<br>材料工程學系(所)<br>107<br>In this study, CrCuN ceramic hard film was coated on the surface of AISI 316L Austenitic stainless steel by Cathodic arc deposition (CAD). Filtering Cu elements using a stainless steel filter with different open free area. Exploring the chemical composition, structure, surface roughness, and adhesion, etc. of CrCuN ceramic hard film with different Cu content. In addition, according to the practical needs, the abrasion test, the corrosion wear test, the polarization test and the antibacterial test are carried out. The comparison of the CrCuN ceramic dura mats w

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Lu, Cheng-Liang, and 盧政良. "Study on high temperature oxidation behaviors of Diamond-like carbon films by Cathodic Arc Activated Deposition process." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/89833865396663003153.

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碩士<br>明道大學<br>材料科學與工程學系碩士班<br>98<br>Cr-doped diamond-like carbon (DLC) films were synthesized by using the cathodic arc activated deposition (CAAD) process. The unique process takes advantage of the energetic metal plasma to trigger the chemical decomposition of hydrocarbon gasses and propelled the formation of the Cr-doped and hydrogenated DLC films. However, to cope with the demand for metal cutting/forming at higher speeds and loads, the enhancement of oxidation resistance of DLC films is needed. The oxidation behavior of the metal-doped DLC films was investigated by using thermo-gravimet

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Shen, Chia-Huang, and 沈家煌. "Mechanical and Corrosion Properties of Cr(N,O)/CrN Four-layered Coatings Synthesized by Cathodic Arc Deposition." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/49698460278033594044.

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碩士<br>明道大學<br>材料暨系統工程研究所<br>95<br>In recent years, chromium nitride (CrN) hard coating has been identified as one of the promising protective coatings for industrial applications. Critical features of CrN include wear resistance, corrosion resistance, oxidation resistance, and most importantly, ease of mold release. However, the shortcoming of the CrN is the lower hardness among all of the industrial hard coatings. It is still the major task to modify the CrN hard coating in the field of further increase in hardness and wear resistance. Previous study in our team revealed that Cr(N,O) /CrN do

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Chen, Shih-Hsiung, and 陳世雄. "Characterization of Ti-O-C Composite Films Prepared by Cathodic Arc Deposition Using CO2 as Reactive Gas." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/64367338048309948901.

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碩士<br>大同大學<br>材料工程學系(所)<br>97<br>In this study, the Ti-O-C composite coatings were synthesizes on AISI 304 stainless steel substrate by a cathodic arc deposition(CAD) system using CO2 reactive gas and Titanium (99%) target. Coating parameter were designed via the variation in the flow rate CO2 reactive gas to control the working pressure at three conditions of 3, 5, and 7 mtorr. Then the coating morphologies and properties such as roughness, chemical composition, structure, and adhesion were all analyzed. Moreover, polarization tests (in 3.5wt% NaCl), immersion tests (in 20 Vol%H2SO4), were t

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Chen, Yu-Dung, and 陳宇東. "Study on erosion wear and corrosion behaviors of Cr-N-O duplex coatings by cathodic arc deposition system." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/02753017661714352328.

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碩士<br>大同大學<br>材料工程學系(所)<br>94<br>Cathodic arc deposition (CAD) process is one of physical vapor deposition. Due to the advantages of high ion rate, more ions and high ion energy, the coatings own better adhesion, high density, high homogeneity, broader coating condition, lower substrate temperature and keeping homogeneity with target, the hard ceramic films coated on steel by CAD can improve its lifetime effectively. CrN is easy to change to dense Cr2O3, so CrN have these properties, included high hardness, oxidation resistance at high temperature, low friction, corrosion and wear resistance.

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Yang, Tung-han, and 楊東翰. "Mechanical properties and high temperature oxidation behaviors of TiSiN/CrAlN films synthesized by a cathodic arc deposition process." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/ykz64z.

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碩士<br>明道大學<br>材料科學與工程學系碩士班<br>99<br>Multilayerd TiSiN/CrAlN were synthesized by using a cathodic arc deposition system, and the structural, mechanical properties and high temperature oxidation behaviors were studied. For the high temperature oxidation test, the film were annealed 800℃ in air for 2 hours. In this study, Ti80Si20 and Cr50Al50 alloy targets are used for the deposition multilayered TiSiN/CrAlN thin films.The deposition of CrN under the TiSiN/CrAlN is used as the interlayer to enhance better adhesion. Different cathode current ratios (Ti80Si20/Al70Cr30) of 90/50、70/70、50/90 and dif

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Yang, Shun-Jan, and 楊順然. "Structural and mechanical properties of Cr-N-C-O thin films synthesized by a cathodic arc deposition process." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/64163931201648267866.

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碩士<br>明道大學<br>材料暨系統工程研究所<br>95<br>Chromium carbide and chromium oxide coatings deposited by physical vapor deposition methods have been successfully applied in molding industries for their excellent tribological performances. In addition, nanocomposite coatings have recently attracted much interest because of their high hardness, wear resistance, and good thermal and chemical stability. In this study, Cr-N-C-O nanocomposite coatings were synthesized by cathodic-arc evaporation with plasma enhanced duct equipment. A carbon-oxide reactive gas was introduced to react with chromium to form Cr-N-C-

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Yang, Chung-Hsien, and 楊淙顯. "Effects of Reactive Oxygen Flow on Process and Properties of AlTiN/CrN Nano-scale Multilayers by Cathodic Arc Deposition." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/2yay32.

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碩士<br>明道大學<br>材料科學與工程學系碩士班<br>97<br>To further apply AlTiN/CrN multilayered coatings for aluminium pressure diecasting applications, the addition of oxygen into the AlTiN/CrN multilayered coatings by cathodic arc deposition was investigated. The studied coatings were obtained with dual Al0.75Ti0.25 and Cr targets at the O2 and N2 mixtured gas flows in this study. The structure of the coating was explored with B1 NaCl type structure in which AlTiN and CrN formed multilayer in the coating. The structural of the various coatings were analyzed using SEM, XRD,XPS and TGA. The mechanical properties

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Hung, Chun-tai, and 洪鈞泰. "Study on Surface Properties of AISI 4340 Low-Alloy Steel Coated Cr-Cu-N Films by Cathodic Arc Deposition." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/64f5ax.

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碩士<br>大同大學<br>材料工程學系(所)<br>102<br>In this study, the Cr-Cu-N layered coatings were deposited on AISI 4340 alloyed steel with different current of copper target by cathodic arc deposition (CAD) system. The coating morphologies and properties such as roughness, chemical composition, and structure were all analyzed. Moreover, wear tests, erosion tests, polarization tests, weathering tests, and electrical tests were also performed for exploring the effect of current of copper target on the wear and corrosion behavior of the coated AISI 4340 steel. The experiment results showed that the Cr-Cu-N fil

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Huang, Wei-che, and 黃偉哲. "Study on corrosion resistance and wear resistance of CrAlSiN hard coatings improved by using cathodic arc deposition with pulse-current." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/q6842p.

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博士<br>大同大學<br>材料工程學系(所)<br>107<br>In order to improve the existing CAE deposition technology and use pulse current technology to develop CrAlSiN film, the paper presents an experimental report on the excellent performance of CrAlSiN coating. The cathode Arc deposition system is applied to CrAlSiN film on tungsten carbide and 304 stainless steel substrates. The CAE coating machine is equipped with a cathode arc evaporation source which can be fitted with a metal target with a diameter of 6 inches. The cathode arc evaporation source has the installation magnet, which has the function of stabiliz

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Liu, Shin-Hung, and 劉信宏. "Study on Surface Characteristics of SUS403 Stainless Steel Coated by Multilayered (Ti,Al,Cr)N Films via Cathodic Arc Deposition." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/79458194674951633378.

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碩士<br>大同大學<br>材料工程學系(所)<br>96<br>Abstract This research is focused on the effects of TiAlN/CrN Multilayered coatings synthesized by cathodic arc ion plating technology. The coatings were deposited using one Ti50Al50 alloy target and one Cr99.99 target with a fixed target power in all the processes, while the layer thickness was varied by various rotation speeds of the substrate holder in order to produce different nanoscale multi-layered period thickness. In the bargain, discuss the effects of different deposition direction. The texture structure, and nanoscale multi-layer period thick

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Chang, Chi-Pang, and 張啟邦. "Structure, mechanical properties and high temperature oxidation behaviors of AlTiN/CrN and CrAlSiN thin films synthesized by a cathodic arc deposition process." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/60388426626612858844.

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碩士<br>明道大學<br>材料暨系統工程研究所<br>96<br>Multilayered AlTiN/CrN and nanocomposite Cr50Al44Si6N thin films were deposited on silicon wafer substrates by using a cathodic arc deposition system, and the structural, mechanical properties and high temperature oxidation behaviors was studied. For the high temperature oxidation test, the films were annealed between 700oC to 1000oC in air for 2 hours. In this study, field emission scanning electron microscope, high resolution transmission electron microscope and glancing angle X-ray diffraction were used to characterize the microstructure and phase identific

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Rincón-Llorente, G., I. Heras, Rodríguez E. Guillén, E. Schumann, M. Krause, and R. Escobar-Galindo. "On the Effect of Thin Film Growth Mechanisms on the Specular Reflectance of Aluminium Thin Films Deposited via Filtered Cathodic Vacuum Arc." 2019. https://hzdr.qucosa.de/id/qucosa%3A33921.

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The optimisation of the specular reflectance of solar collectors is a key parameter to increase the global yield of concentrated solar power (CSP) plants. In this work, the influence of filtered cathodic vacuum arc deposition parameters, particularly working pressure and deposition time, on the specular and diffuse reflectance of aluminium thin films, was studied. Changes in specular reflectance, measured by ultraviolet–visible and near-infrared spectroscopy (UV-vis-NIR) spectrophotometry, were directly correlated with thin film elemental concentration depth profiles, obtained by Rutherford ba

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Steinhorst, Maximilian, Maurizio Giorgio, Slavcho Topalski, and Teja Roch. "Investigation of carbon-based coatings on austenitic stainless steel for bipolar plates in proton exchange membrane fuel cells, produced by cathodic arc deposition." 2019. https://monarch.qucosa.de/id/qucosa%3A36197.

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Stainless steel bipolar plates are a possible replacement for graphite and composite bipolar plates in fuel cells. However, due to a native oxide layer they exhibit a high interfacial contact resistance (ICR) which lowers the performance. Conductive coatings like gold are a possible solution because they can reduce the contact resistance of metallic bipolar plates. We investigate the pulsed cathodic arc technique for deposition of carbon-based thin films on austenitic stainless steel 316L as cost-efficient alternative. Different types of coatings were prepared by varying the layer structure an

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Amrutwar, Siddhant Laxman, and 安登特. "Effect of Plasma Nitriding Pretreatment on the Mechanical Properties & Fatigue Impact Resistance of AlCrSiN Coated High Speed Steels Synthesized by a Cathodic Arc Deposition Process." Thesis, 2019. http://ndltd.ncl.edu.tw/handle/4ukebz.

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碩士<br>國立虎尾科技大學<br>機械與電腦輔助工程系碩士班<br>107<br>In the era of metal industries and mass production sectors there are continuously increasing the demand and huge need for a highly efficient mechanical transmission components that requires high load sustaining and bearing capacity on the particular contact surfaces between two or more parts. High speed steel is highly alloyed tool steel capable of maintaining hardness even at elevated temperature. The word high speed tool steels are so named primarily because of their ability to machine materials at high cutting speeds. Widely used AISI H13 tool steel

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Heras, I., E. Guillén, M. Krause, A. Pardo, J. L. Endrino, and R. Escobar. "Solar selective coatings based on carbon:transition metal nanocomposites." 2019. https://hzdr.qucosa.de/id/qucosa%3A33927.

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The design of efficient and stable solar selective coatings for Concentrating Solar Power (CSP) central receivers requires a comprehensive knowledge about the incorporated materials. In this work solar selective coatings were grown by filtered cathodic vacuum arc (FCVA) deposition. The complete stacks consist of an infrared reflection layer, an absorber layer of C:ZrC nanocomposites and an antireflection layer. The Carbon-transition metal nanocomposites were studied as absorber materials because they show appropriate optical properties, i.e. high absorption in the solar region and low thermal

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Chang, Yen-Shuo, and 張晏碩. "Cathodic arc evaporated CrAlSiN coatings with multi-cycle depositions." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/01302734791497431759.

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碩士<br>明道大學<br>材料科學與工程學系碩士班<br>102<br>The study used by cathode arc deposition to process nano-multi cycle of deposition CrAlSiN thin film which substrate used SUS304 and Tungsten steel. The system selected by PLATIT 80+ that is used on the industry widely. The experiment processed four different muti-cycle deposition CrAlSiN coating.The experiment was divided into two steps. First, it showed that Characteristic will change on microstructures and mechanical of muti-cycle deposition of CrAlSiN coating. The result show that the microstructures that used by Field Emission Scanning Electronic Micro

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Chen, June Horn, and 陳俊宏. "Titanium Nitride Thin Films by Catholdic Arc Plasma Deposition." Thesis, 1996. http://ndltd.ncl.edu.tw/handle/94285665726719218107.

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碩士<br>輔仁大學<br>物理學系<br>84<br>This paper is about the CAPD (catholdic arc plasma deposition) process with emphasis on the role of the plasma environment for hard coating. In the last fifteen years, there has been an increasing body of experimental[26] and theoretical[27 ] evidence that energetic PVD (physical vapour deposition) can enable the production of coatings having improved physical and chemical properties (e.g., improved density, enhanced adhesion and a more

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Chien, Wei-Te, and 簡維德. "Study on TiAlON Decorative Coating by Cathodi Arc Plasma Deposition." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/63052074780935662780.

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碩士<br>明道大學<br>材料暨系統工程研究所<br>96<br>This study used cathode arc evaporation plasma deposition TiAlON thin film. It fixed N2 flow and tune up O2 flow to observe the colours of TiAlON. On any equipment that is used, L*a*b* control can display colours in number format to accurately compare the difference. To pigment properly, nearly hundred layers of coating are usually needed during the process to achieve the desired colours. Therefore, it is significant for the L*a*b control to attain precise colour each time during coating in order to achieve the efficiency. With its high stability, corrosion re

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Chen, Hong Ruei, and 陳弘叡. "Properties of Titanium Dioxide Films Produced by Cathode Arc Plasma Deposition at Low Temperature." Thesis, 1993. http://ndltd.ncl.edu.tw/handle/03141828196092543686.

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碩士<br>大同工學院<br>材料科學(工程)研究所<br>81<br>The cathode arc plasma deposition (CAPD) process is utilized to synthesize titanium dioxide films on glass substrates at low temperature. The effects of operating parameters, such as oxygen flow rate (22∼34 SCCM), arc current (60∼80 A) and RF- bias on substrate (0∼150 W), on the mechanical，optical and electrical properties of coatings were investigated. We also employed the high speed camera to catch themovement of cathode spots during deposition.

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Chen, Siao-Fan, and 陳曉帆. "The study of nanostructured CrN/ZrN multilayer thin films prepared by Cathode Arc Deposition System." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/2ea3dn.

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碩士<br>國立臺灣科技大學<br>機械工程系<br>99<br>Five nanostructured CrN/ZrN multilayer coatings were deposited periodically by the Cathode Arc Deposition System (CAD6-1). We used to change the rotational speed to control the thinkness of the bipolar periodically of the CrN/ZrN thin film. The crystalline structure of multilayer coatings was determined by a glancing angle X-ray diffractometer. Microstructures of thin films were examined by an atomic force microscopy (AFM), scanning electron microscopy (SEM), respectively. A nanoindenter , a micro Vickers hardness tester and pin-on-disk wear tests were used to

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