Relevant bibliographies by topics / CMUT

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  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'CMUT'

Author: Grafiati
Published: 4 June 2021
Last updated: 21 February 2023

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Journal articles on the topic "CMUT"

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Yildiz, Fikret, Tadao Matsunaga, and Yoichi Haga. "Fabrication and Packaging of CMUT Using Low Temperature Co-Fired Ceramic." Micromachines 9, no. 11 (October 27, 2018): 553. http://dx.doi.org/10.3390/mi9110553.

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This paper presents fabrication and packaging of a capacitive micromachined ultrasonic transducer (CMUT) using anodically bondable low temperature co-fired ceramic (LTCC). Anodic bonding of LTCC with Au vias-silicon on insulator (SOI) has been used to fabricate CMUTs with different membrane radii, 24 µm, 25 µm, 36 µm, 40 µm and 60 µm. Bottom electrodes were directly patterned on remained vias after wet etching of LTCC vias. CMUT cavities and Au bumps were micromachined on the Si part of the SOI wafer. This high conductive Si was also used as top electrode. Electrical connections between the top and bottom of the CMUT were achieved by Au-Au bonding of wet etched LTCC vias and bumps during anodic bonding. Three key parameters, infrared images, complex admittance plots, and static membrane displacement, were used to evaluate bonding success. CMUTs with a membrane thickness of 2.6 µm were fabricated for experimental analyses. A novel CMUT-IC packaging process has been described following the fabrication process. This process enables indirect packaging of the CMUT and integrated circuit (IC) using a lateral side via of LTCC. Lateral side vias were obtained by micromachining of fabricated CMUTs and used to drive CMUTs elements. Connection electrodes are patterned on LTCC side via and a catheter was assembled at the backside of the CMUT. The IC was mounted on the bonding pad on the catheter by a flip-chip bonding process. Bonding performance was evaluated by measurement of bond resistance between pads on the IC and catheter. This study demonstrates that the LTCC and LTCC side vias scheme can be a potential approach for high density CMUT array fabrication and indirect integration of CMUT-IC for miniature size packaging, which eliminates problems related with direct integration.
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Zhang, Pei Yu, and Yan Li. "Fabrication of Combined Capacitive Micromachined Ultrasound Transducers with Release Method." Advanced Materials Research 740 (August 2013): 416–21. http://dx.doi.org/10.4028/www.scientific.net/amr.740.416.

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A novel combined capacitive micromachined ultrasound transducer (CMUT) with release method was proposed and fabricated with. The combined CMUT has alternating low and high-frequency elements. Several different combined patterns of CMUTs were offered. The performances of CMUTs are strongly dependent on the geometrical properties of the single cells and their arrangement within each element as well. Finite element simulations are used for analysis, design, and optimization of CMUT cells to predict device performance. Electrostatic interactions for 3-D coupled-field simulations are also performed to help investigate the electro-mechanical properties of the CMUTs. Feasibility devices are then fabricated using chromium as a sacrificial release material. The top membrane is built using a sandwich structure to ensure the formation of large size membranes with low stress.
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Zhang, Rui, Wendong Zhang, Changde He, Jinlong Song, Linfeng Mu, Juan Cui, Yongmei Zhang, and Chenyang Xue. "Design of capacitive micromachined ultrasonic transducer (CMUT) linear array for underwater imaging." Sensor Review 36, no. 1 (January 18, 2016): 77–85. http://dx.doi.org/10.1108/sr-05-2015-0076.

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Purpose – The purpose of this paper was to develop a novel capacitive micromachined ultrasonic transducer (CMUT) reception and transmission linear array for underwater imaging at 400 kHz. Compared with traditional CMUTs, the developed transducer array offers higher electromechanical coupling coefficient and higher directivity performance. Design/methodology/approach – The configuration of the newly developed CMUT reception and transmission array was determined by the authors’ previous research into new element structures with patterned top electrodes and into directivity simulation analysis. Using the Si-Silicon on insulator (Si-SOI) bonding technique and the principle of acoustic impedance matching, the CMUT array was fabricated and packaged. In addition, underwater imaging system design and testing based on the packaged CMUT 1 × 16 array were completed. Findings – The simulation results showed that the optimized CMUT array configuration was selected. Furthermore, the designed configuration of the CMUT 1 × 16 linear array was good enough to guarantee high angular resolution. The underwater experiments were conducted to demonstrate that this CMUT array can be of great benefit in imaging applications. Practical implications – Based on our research, the CMUT linear array has good directivity and good impedance matching with water and can be used for obstacle avoidance, distance measurement and imaging underwater. Originality/value – This research provides a basis for CMUT directivity theory and array design. CMUT array presented in this paper has good directivity and has been applied in the underwater imaging, resulting in a huge market potential in underwater detection systems.
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Brenner, Kevin, Arif Ergun, Kamyar Firouzi, Morten Rasmussen, Quintin Stedman, and Butrus Khuri–Yakub. "Advances in Capacitive Micromachined Ultrasonic Transducers." Micromachines 10, no. 2 (February 23, 2019): 152. http://dx.doi.org/10.3390/mi10020152.

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Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.
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Sharma, Rashmi, Rekha Agarwal, Ashwani Kumar Dubey, and Anil Arora. "Design and Analysis of Capacitive Micromachined Ultrasonic Transducer." Recent Patents on Engineering 13, no. 2 (May 27, 2019): 108–16. http://dx.doi.org/10.2174/1872212112666180214141506.

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Background:Objective:To simulate a Micromechanical systems (MEMS) based CMUT working as a transmitter with the existing design and provide comparison within the possible architectural geometries.Methods:FEM simulation software COMSOL is used to simulate the 3D model of the transducer radiating in the air. The classical thin-plate theory is employed to solve for CMUT with a circular shape which is sufficient when the ratio of the diameter to thickness of the plate is very large, an aspect common in CMUTs. The Galerkin-weighted residual technique is used to get a solution for thin plate equation with the presumption that the deflections are small in comparison to the thickness of the plate.Results:The resonant frequency of CMUT with different geometries have been calculated. The deflection of membrane with applied DC bias is shown along with collapse voltage calculation. The generated ultrasound is shown with the AC bias superimposed on the DC bias. The capacitance change with the increasing DC voltage is discussed. The deflection of membrane is maximum as the resonance frequency is proved.Conclusion:The review of Capacitive Micromachined Ultrasonic Transducer architectures with different shapes is highlighted. The working behavior of CMUT with suitable dimension is simulated in 3D providing researcher data to wisely choose the CMUT prior to the fabrication. The CMUT is prioritized on various characteristics like wafer area utilization, deflection percentage within the cavity and durability of the transducer.
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Tripathi, Sudhanshu, Rekha Agarwal, Rashmi Vashisth, and Devraj Singh. "Capacitive micromachined ultrasonic transducers: Transmission evaluation with different membrane materials and dimensions." tm - Technisches Messen 88, no. 4 (March 18, 2021): 251–59. http://dx.doi.org/10.1515/teme-2020-0073.

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Abstract Capacitive micromachined ultrasonic transducers (CMUTs) are dominant in generating and receiving acoustic signals. CMUT transmission efficiency solely depends upon the membrane material utilized. This work presents the structural examination of receiving and transmitting characteristics of CMUT with divergent membrane materials, namely Silicon (Si), Silicon Nitride ( Si 3 N 4 {\mathrm{Si}_{3}}{\text{N}_{4}} ), Indium Phosphide (InP), Zinc Oxide (ZnO), and Polysilicon (Poly-Si). The analysis includes the membrane deflection, pull-in voltage, output pressure, resonant frequency and capacitance modification with variable DC voltage. It has been found that InP gives the pull-in voltage comparable to Si in the receiving mode and have more transduction efficiency in transmitting mode. Effect of dimensions of CMUT on pull-in voltage and resonant frequency are also discussed. The major contribution lies in the analytical and estimation study of CMUT for appropriate membrane material selection meant for transmission and reception in the field of pressure sensing application.
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Liu, Xin, Yuanyu Yu, Jiujiang Wang, Sio Hang Pun, Mang I. Vai, and Peng Un Mak. "An Analytical Model for Bandwidth Enhancement of Air-Coupled Unsealed Helmholtz Structural CMUTs." Journal of Sensors 2019 (April 17, 2019): 1–16. http://dx.doi.org/10.1155/2019/3896965.

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Capacitive micromachined ultrasonic transducers (CMUTs) were reported to own high potential in air-coupled ultrasonic applications such as noncontact nondestructive examination and gas flow measurement. The unsealed CMUTs which utilized the squeeze film effect were reported to overcome the narrow output pressure bandwidth of the conventional sealed CMUTs in air operation. This kind of unsealed CMUTs can also be regarded as Helmholtz resonators. In this work, we present the air-coupled unsealed Helmholtz structural CMUTs which utilize both the squeeze film effect and the Helmholtz resonant effect to enhance the output pressure bandwidth. Based on the mechanism of vibration coupling between membrane and air pistons in membrane holes, we propose an analytical model to aid the design process of this kind of CMUTs. We also use finite element method (FEM) to investigate this kind of CMUTs for our analytical model validation. The FEM results show that the significant bandwidth enhancement can be achieved when the Helmholtz resonant frequency is designed close to the fundamental resonant frequency of the CMUT membrane. Compared with the conventional sealed CMUT cell, the 4-hole unsealed Helmholtz structural CMUT cell improves both the 3-dB fractional bandwidth and SPL-bandwidth product around 35 times. Furthermore, it is found that, with more holes under the same hole area ratio or with a smaller ratio of the cavity height to the viscous boundary layer thickness, the Helmholtz resonant effect becomes weaker and thus the output pressure bandwidth decreases.
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Oevermann, Jorge, Peter Weber, and Steffen H. Tretbar. "Encapsulation of Capacitive Micromachined Ultrasonic Transducers (CMUTs) for the Acoustic Communication between Medical Implants." Sensors 21, no. 2 (January 9, 2021): 421. http://dx.doi.org/10.3390/s21020421.

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The aim of this work was to extend conventional medical implants by the possibility of communication between them. For reasons of data security and transmitting distances, this communication should be realized using ultrasound, which is generated and detected by capacitive micromachined ultrasonic transducers (CMUTs). These offer the advantage of an inherent high bandwidth and a high integration capability. To protect the surrounding tissue, it has to be encapsulated. In contrast to previous results of other research groups dealing with the encapsulation of CMUTs, the goal here is to integrate the CMUT into the housing of a medical implant. In this work, CMUTs were designed and fabricated for a center frequency of 2 MHz in water and experimentally tested on their characteristics for operation behind layers of Polyether ether ketone (PEEK) and titanium, two typical materials for the housings of medical implants. It could be shown that with silicone as a coupling layer it is possible to operate a CMUT behind the housing of an implant. Although it changes the characteristics of the CMUT, the setup is found to be well suited for communication between two transducers over a distance of at least 8 cm.
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Oevermann, Jorge, Peter Weber, and Steffen H. Tretbar. "Encapsulation of Capacitive Micromachined Ultrasonic Transducers (CMUTs) for the Acoustic Communication between Medical Implants." Sensors 21, no. 2 (January 9, 2021): 421. http://dx.doi.org/10.3390/s21020421.

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The aim of this work was to extend conventional medical implants by the possibility of communication between them. For reasons of data security and transmitting distances, this communication should be realized using ultrasound, which is generated and detected by capacitive micromachined ultrasonic transducers (CMUTs). These offer the advantage of an inherent high bandwidth and a high integration capability. To protect the surrounding tissue, it has to be encapsulated. In contrast to previous results of other research groups dealing with the encapsulation of CMUTs, the goal here is to integrate the CMUT into the housing of a medical implant. In this work, CMUTs were designed and fabricated for a center frequency of 2 MHz in water and experimentally tested on their characteristics for operation behind layers of Polyether ether ketone (PEEK) and titanium, two typical materials for the housings of medical implants. It could be shown that with silicone as a coupling layer it is possible to operate a CMUT behind the housing of an implant. Although it changes the characteristics of the CMUT, the setup is found to be well suited for communication between two transducers over a distance of at least 8 cm.
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Pirouz, Amirabbas, and F. Degertekin. "An Analysis Method for Capacitive Micromachined Ultrasound Transducer (CMUT) Energy Conversion during Large Signal Operation." Sensors 19, no. 4 (February 20, 2019): 876. http://dx.doi.org/10.3390/s19040876.

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With Capacitive Micromachined Ultrasound Transducers (CMUTs) increasingly being used for high intensity, large signal ultrasound applications and several drive methods being proposed, the efficiency of these devices in this operation regime have not been quantitatively evaluated. Since well-known frequency and capacitance-based coupling coefficients definitions are not valid for large signal, nonlinear operation, an energy-based definition should be used. In this paper, an expression for mechanical energy in a CMUT is obtained based on the assumption that CMUT is a linear time varying capacitor in all regimes of operation. This expression is evaluated by the help of an experimentally verified nonlinear CMUT model to define an energy conversion ratio (ECR) which can be considered as a coupling coefficient valid for all regimes of operation. This parameter is validated in the small signal regime and then used to evaluate CMUT performance with various large drive signals. The quantitative modeling results show that CMUTs do not need DC bias to achieve high efficiency large signal transduction: AC only signals at half the operation frequency with amplitudes beyond the collapse voltage can provide efficiencies (ECR) above 0.9 with harmonic content below −25 dB. Based on these results, ECR variation with membrane geometry and parasitic capacitance are given as examples for device optimization. The overall modeling approach is also qualitatively validated by experiments.
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Dissertations / Theses on the topic "CMUT"

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Hochman, Michael. "Investigation of acoustic crosstalk effects in CMUT arrays." Thesis, Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/42782.

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Capacitive Micromachined Ultrasonic Transducers (CMUTs) have demonstrated significant potential to advance the state of medical ultrasound imaging beyond the capabilities of the currently employed piezoelectric technology. Because they rely on well-established micro-fabrication techniques, they can achieve complex geometries, densely populated arrays, and tight integration with electronics, all of which are required for advanced intravascular ultrasound (IVUS) applications such as high-frequency or forward-looking catheters. Moreover, they also offer higher bandwidth than their piezoelectric counterparts. Before CMUTs can be effectively used, they must be fully characterized and optimized through experimentation and modeling. Unfortunately, immersed transducer arrays are inherently difficult to simulate due to a phenomenon known as acoustic crosstalk, which refers to the fact that every membrane in an array affects the dynamic behavior of every other membrane in an array as their respective pressure fields interact with one another. In essence, it implies that modeling a single CMUT membrane is not sufficient; the entire array must be modeled for complete accuracy. Finite element models (FEMs) are the most accurate technique for simulating CMUT behavior, but they can become extremely large considering that most CMUT arrays contain hundreds of membranes. This thesis focuses on the development and application of a more efficient model for transducer arrays first introduced by Meynier et al. [1], which provides accuracy comparable to FEM, but with greatly decreased computation time. It models the stiffness of each membrane using a finite difference approximation of thin plate equations. This stiffness is incorporated into a force balance which accounts for effects from the electrostatic actuation, pressure forces from the fluid environment, mass and damping from the membrane, etc. For fluid coupling effects, a Boundary Element Matrix (BEM) is employed that is based on the Green's function for a baffled point source in a semi-infinite fluid. The BEM utilizes the nodal mesh created for the finite difference method, and relates the dynamic displacement of each node to the pressure at every node in the array. Use of the thin plate equations and the BEM implies that the entire CMUT array can be reduced to a 2D nodal mesh, allowing for a drastic improvement in computation time compared with FEM. After the model was developed, it was then validated through comparison with FEM. From these tests, it demonstrated a capability to accurately predict collapse voltage, center frequency, bandwidth, and pressure magnitudes to within 5% difference of FEM simulations. Further validation with experimental results revealed a close correlation with predicted impedance/admittance plots, radiation patterns, frequency responses, and noise current spectrums. More specifically, it accurately predicted how acoustic crosstalk would create sharp peaks and notches in the frequency responses, and enhance side lobes and nulls in the angular radiation pattern. Preliminary design studies with the model were also performed. They revealed that membranes with larger lateral dimensions effectively increased the bandwidth of isolated membranes. They also demonstrated potential for various crosstalk reduction techniques in array design such as disrupting array periodicity, optimizing inter-membrane pitch, and adjusting the number of membranes per element. It is expected that the model developed in this thesis will serve as a useful tool for future iterations of CMUT array optimizations.
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McIntosh, James Stuart. "Advances in capacitive micromachined ultrasonic transducer (CMUT) technologies." Thesis, University of Warwick, 2002. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.396401.

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Gurun, Gokce. "Integrated electronics design for high-frequency intravascular ultrasound imaging." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/45860.

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Close integration of front-end electronics and the transducer array within the catheter is critical for successful implementation of CMUT-based intravascular ultrasound (IVUS) imaging catheters to enable next generation imaging tools. Therefore, this research developed and implemented custom-designed electronic circuits and systems integrated with an IC compatible transducer technology for realization of miniature IVUS imaging catheters operating at 10-50 MHz frequency range. In one path of this research, an IC is custom designed in a 0.35-um CMOS process to monolithically integrate with a CMUT array (CMUT-on-CMOS) to realize a single-chip, highly-flexible, forward-looking (FL) IVUS imaging system. The amplifiers that are custom-designed achieved transducer thermal-mechanical noise dominated receive performance in a CMUT-on-CMOS implementation. In parallel to the FL-IVUS effort, for realization of a side-looking IVUS catheter based on an annular phased array, a dynamic receive beamformer IC is custom designed also in a 0.35-um CMOS process. Overall, the circuits and systems developed as part of this dissertation form a critical step in the translation of the research on CMUT-based IVUS catheters into real clinical applications for better management of coronary arterial diseases.
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Klemm, Markus. "Acoustic Simulation and Characterization of Capacitive Micromachined Ultrasonic Transducers (CMUT)." Doctoral thesis, Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden, 2017. http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-225933.

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Ultrasonic transducers are used in many fields of daily life, e.g. as parking aids or medical devices. To enable their usage also for mass applications small and low- cost transducers with high performance are required. Capacitive, micro-machined ultrasonic transducers (CMUT) offer the potential, for instance, to integrate compact ultrasonic sensor systems into mobile phones or as disposable transducer for diverse medical applications. This work is aimed at providing fundamentals for the future commercialization of CMUTs. It introduces novel methods for the acoustic simulation and characterization of CMUTs, which are still critical steps in the product development process. They allow an easy CMUT cell design for given application requirements. Based on a novel electromechanical model for CMUT elements, the device properties can be determined by impedance measurement already. Finally, an end-of-line test based on the electrical impedance of CMUTs demonstrates their potential for efficient mass production.
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Ngo, Sophie. "Dispositf acoustique pour l'isolation galvanique : le CMUT, une voie innovante." Thesis, Tours, 2013. http://www.theses.fr/2013TOUR4027.

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Les dispositifs d’isolation galvanique intégrés au sein des systèmes de commande d’interrupteurs de puissance doivent répondre à une demande accrue en performance, facilité d’intégration et efficacité énergétique. Les transducteurs ultrasonores capacitifs micro-usinés (cMUT : capacitive Micromachined Ultrasonic Transducer), capables d’émettre et de recevoir des ondes ultrasonores, semblent une alternative tout à fait nouvelle à la fonction d’isolation galvanique. Ces travaux de thèse ont pour objectif de démontrer la faisabilité d’un dispositif basé sur la technologie cMUT. Le principe de fonctionnement consiste à transmettre une information grâce à une communication par onde acoustique de volume entre deux réseaux de cMUT placés de part et d’autre d’un substrat. Nous focalisons, en premier lieu, ces travaux sur le processus de fabrication par micro-usinage de surface des cMUT ainsi que les techniques de réalisation des dispositifs en structure double face sur substrat de silicium. L’étude permet d’identifier le collage de substrat comme une solution de fabrication industrialisable. Suite à la réalisation des dispositifs, la caractérisation électro-mécanique des cMUT est une étapeessentielle à la validation de leur fonctionnalité en tant que dispositifs émetteurs. L’étude débute par uneévaluation des propriétés mécaniques du matériau constituant la membrane et qui impactent directementle comportement global des cMUT. Puis, la caractérisation du comportement statique et dynamique descMUT permet d’extraire les paramètres tels que la fréquence de résonance, la tension de collapse etl’efficacité électro-mécanique qui définissent le mode de pilotage d’un tel système.Finalement, la validation du concept de transmission et de détection d’ondes ultrasonores est réaliséegrâce à des mesures de vibrométrie laser Doppler. Les résultats apportent des éléments de réponse quantau mode de propagation des ondes et permettent d’identifier les topologies de meilleure efficacité entransmission acoustique. Enfin, l’intégration du prototype dans l’application de commanded’interrupteur de puissance démontre la faisabilité du concept de transformateur acoustique basé sur latechnologie cMUT
Galvanic isolation devices integrated into switch command systems must be able to answer all of the increasing demand for performance, energetic efficiency and integration easiness. The capacitive micro machined ultrasonic transducers (cMUT), able to emit and receive ultrasounds, could be an entirely new alternative to the function of galvanic isolation. This work aims to demonstrate the feasibility of a cMUT-based device. The operating principle consists in transmitting information thanks to a bulk acoustic wave between two cMUT arrays located on both sides of a substrate. We first focus on cMUT surface micromachining fabrication process and techniques of double-side device manufacturing. Our study allows us to identify wafer bonding as a realistic industrial solution. After device fabrication, electro-mechanical of cMUT is an essential step to validate their functionality as ultrasonic emitters. The study starts with the mechanical properties evaluation of the membrane material. These properties directly impact the global behavior of cMUT. Then, the characterization of cMUT static and dynamic behavior allows extracting parameters as resonance frequency, collapsing voltage and electro-mechanical efficiency which define the actuation mode of such a system. Finally, the validation of transmission and reception of ultrasonic waves is evaluated by vibrometer laser Doppler measurements. Results bring elements concerning the waves propagation modes and allow identifying the best acoustical efficiency in regard to the topology. In conclusion, the prototype integration in the application of power switch command demonstrates the feasibility of acoustic transformer concept based on cMUT technology
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Bahette, Emilie. "Réalisation et caractérisation de CMUT basse température pour applications d'imagerie médicale." Thesis, Tours, 2014. http://www.theses.fr/2014TOUR4011.

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Les cMUT sont des microsystèmes principalement utilisés pour de l’imagerie médicale. Afin de développer de nouvelles architectures de sondes, intégrer l’électronique de commande devient impératif. Pour y parvenir, la température du procédé de réalisation ne doit pas excéder 400°C. Cela nécessite donc de revoir les procédés et matériaux utilisés. Pour répondre à cette problématique, nous avons utilisé une électrode originale en siliciure de nickel obtenu à 400°C, une couche sacrificielle en nickel et une membrane en nitrure de silicium déposée à 200°C. Des cMUT ont été fabriqués sur un substrat silicium. Ils présentent les caractéristiques souhaitées à savoir une forte fréquence de résonance (16,4MHz), une tension de collapse maitrisée (65V) et un coefficient de couplage électromécanique satisfaisant (0,6). De plus, le procédé développé peut être étendu à d’autres types de substrats
CMUTs are innovating microsystems for ultrasonic medical imaging. To develop new array architectures, monolithic integration of integrated circuits is required. In this context, microsystems must be achieved using process temperature limited to 400°C. The main objective of this PhD thesis is the development of alternative processes and materials to replace usual ones done at high temperature. We have developed a nickel silicide bottom electrode at 400°C, a metallic sacrificial layer and a silicon nitride membrane deposited at 200°C. The devices, fabricated on silicon substrates, are functional with a high resonance frequency (16.4MHz), a mastered collapse voltage (65V) and an efficient electromechanical coupling coefficient (0.6). Moreover, this low temperature process was successfully applied on other substrates such as glass
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SAUTTO, MARCO. "ANALOG FRONT-END CIRCUITS FOR HIGHLY INTEGRATED ULTRASOUND IMAGING SYSTEMS." Doctoral thesis, Università degli studi di Pavia, 2017. http://hdl.handle.net/11571/1203280.

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Ultrasound imaging is a well-established medical diagnostic technique. Compared with other imaging modalities, such as for example X-ray, ultrasound is harmless to the patient and less expensive while providing real-time imaging capability with adequate resolution for most applications. Piezoelectric materials have dominated the ultrasound transducers technology for a long time but, thanks to the intense research activity in recent years, capacitive micromachined ultrasonic transducers (CMUT) are emerging as a competitive alternative for next generation imaging systems. The objective of the thesis is to analyze the ultrasound system, when a CMUT is used instead of a piezoelectric transducer, to identify and design the best integrated solution to optimize the front-end performance. After giving an overview of the ultrasound system and the Capacitive Micromachined Ultrasonic Transducer (CMUT) in Chapter 1, Chapter 2 presents a thorough comparison between RX amplifier alternatives. The impact on the pulse-echo frequency response and SNR is assessed. The study demonstrates that a capacitive-feedback stage provides a remarkable improvement in the noise-power performance compared to the very popular resistive-feedback amplifier, at the expense of a low-frequency shift of the pulse-echo response, making it suitable for integration of dense CMUT arrays for low and mid-frequency ultrasound imaging applications. Then, Chapter 3 proposes the design of a CMUT front-end circuits comprising a TX driver, T/R switch and RX amplifier. Realized in BCD8-SOI technology from STMicroelectronics, the TX delivers up to 100V pulses, while the RX shows 70dB dynamic range with very low noise at 1mW only power dissipation. Measurement results and imaging experiments are presented and discussed. In Chapter 4, the non-linear behavior of the CMUT is discussed and possible solution proposed. Experimental results demonstrate a significant reduction of the second-harmonic distortion, estimated to be lower than -30 dB, resulting in good linearization for typical nonlinear imaging operation. In addition, Chapter 5 shows a novel amplifier architecture exploiting the regeneration feature of the cross-coupled pair. It will be used as Programmable Gain Amplifier (PGA) in the ultrasound chain. A test-chip in 0.18 μm CMOS provides 15dB to 66dB gain over 50MHz bandwidth. With state-of-the-art noise and linearity performance, a record GBW up to 100GHz is demonstrated with only 420 μW power dissipation.
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Xu, Toby Ge. "Material and array design for CMUT based volumetric intravascular and intracardiac ultrasound imaging." Diss., Georgia Institute of Technology, 2015. http://hdl.handle.net/1853/54861.

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Recent advances in medical imaging have greatly improved the success of cardiovascular and intracardiac interventions. This research aims to improve capacitive micromachined ultrasonic transducers (CMUT) based imaging catheters for intravascular ultrasound (IVUS) and intra-cardiac echocardiography (ICE) for 3-D volumetric imaging through integration of high-k thin film material into the CMUT fabrication and array design. CMUT-on-CMOS integration has been recently achieved and initial imaging of ex-vivo samples with adequate dynamic range for IVUS at 20MHz has been demonstrated; however, for imaging in the heart, higher sensitivities are needed for imaging up to 4-5 cm depth at 20MHz and deeper at 10MHz. Consequently, one research goal is to design 10-20MHz CMUT arrays using integrated circuit (IC) compatible micro fabrication techniques and optimizing transducer performance through high-k dielectrics such as hafnium oxide (HfO2). This thin film material is electrically characterized for its dielectric properties and thermal mechanical stress is measured. Experiments on test CMUTs show a +6dB improvement in receive (Rx) sensitivity, and +6dB improvement in transmit sensitivity in (Pa/V) as compared to a CMUT using silicon nitride isolation (SixNy) layer. CMUT-on-CMOS with HfO2 insulation is successfully integrated and images of a pig-artery was successfully obtained with a 40dB dynamic range for 1x1cm2 planes. Experimental demonstration of side looking capability of single chip CMUT on CMOS system based FL dual ring arrays supported by large signal and FEA simulations was presented. The experimental results which are in agreement with simulations show promising results for the viability of using FL-IVUS CMUT-on-CMOS device with dual mode side-forward looking imaging. Three dimensional images were obtained by the CMUT-on-CMOS array for both a front facing wire and 4 wires that are placed perpendicular to the array surface and ~4 mm away laterally. For a novel array design, a dual gap, dual frequency 2D array was designed, fabricated and verified against the large signal model for CMUTs. Three different CMUT element geometries (2 receive, 1 transmit) were designed to achieve ~20MHz and ~40MHz bands respectively in pulse-echo mode. A system level framework for designing CMUT arrays was described that include effects from imaging design requirements, acoustical cross-talk, bandwidths, signal-to-noise (SNR) optimization and considerations from IC limitations for pulse voltage. Electrical impedance measurements and hydrophone measurements comparisons between design and experiment show differences due to inaccuracies in using SixNy homogenous material in simulation compared to fabricated thin-film stacks (HfO2-AlSi-SixNy). It is concluded that for “thin” membranes the effect of stiffness and mass of HfO2 and AlSi (top electrode) cannot be ignored in the simulation. Also, it is understood that aspect ratio (width to height) <10 will have up to 15% error for center frequency predicted in air when the thin-plate approximation is used for modelling the bending stiffness of the CMUT membrane.
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Lani, Shane W. "Ultrasonic subwavelength acoustic focusing and imaging using a 2D membrane metamaterial." Diss., Georgia Institute of Technology, 2015. http://hdl.handle.net/1853/54867.

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A metasurface or 2D metamaterial composed of a membrane array can support an interesting acoustic wave field. These waves are evanescent in the direction normal to the array and can propagate in the immersion fluid immediately above the metasurface. These waves are a result of the resonant membranes coupling to the fluid medium and propagate with a group and phase speed lower than that of the bulk waves in the surrounding fluid. This work examines and utilizes these evanescent surface waves using Capacitively Micromachined Ultrasonic Transducers (CMUT) as a specific example. CMUT arrays can generate and detect membrane displacement capacitively, and are shown to support the surface waves capable of subwavelength focusing and imaging. A model is developed that can solve for the modes of the membrane array in addition to transiently modeling the behavior of the array. It is found that the dispersive nature of the waves is dependent on the behavior of the modes of the membrane array. Two-dimensional dispersion analysis of the metasurface shows evidence of four distinct frequency bands of surface wave propagation: isotropic, anisotropic, directional band gap, and complete band gap around the first resonant frequency of the membrane. Some of the frequencies in the partial band gap show concave equifrequency contours capable of negative refraction. The dispersion and modal properties are also examined as to how they are affected by basic array parameters. Potential applications of this wave field are examined in the context of subwavelength focusing and imaging. Several methods of acoustic focusing are used on an array consisting of dense grid of membranes and several membranes spatially removed from the structure. Subwavelength acoustic focusing to a resolution of λ/5 is shown in simulations and verified with experiments. An imaging test is also performed in which a subwavelength defect is localized. This fundamental work in characterizing the waves above the membrane metasurfaces is expected to have impact and implications for transducer design, resonant sensors, 2D acoustic lenses, and subwavelength focusing and imaging.
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Gross, Dominique. "Conception et évaluation d'une sonde CMUT mixte dédiée à la thérapie ciblée à guidage ultrasonore." Thesis, Tours, 2015. http://www.theses.fr/2015TOUR3313/document.

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Présentés pour la première fois en 1994, les transducteurs ultrasonores capacitifs micro- usinés, ou CMUTs (Capacitive Micromachined Ultrasonic Transducers), représentent une technologie alternative aux matériaux piézoélectriques pour la transduction électroacoustique. En particulier, leur souplesse de conception et leur haut degré de miniaturisation en font des candidats privilégiés pour le développement de sondes mixtes complexes alliant thérapie et imagerie par ultrasons. C’est dans ce contexte que s’est inscrit ce travail de thèse, dédié au développement d’une première sonde CMUT mixte. Le document débute par une présentation générale de la technologie et du contexte du projet. Puis, le développement est présenté, en commençant par les étapes préliminaires de modélisation numérique jusqu’aux caractérisations les plus avancées du prototype fabriqué. Les résultats démontrent l’intérêt de la technologie pour les applications visées
Presented for the first time in 1994, capacitive micromachined ultrasonic transducers (CMUT) are a promising alternative to the piezoelectric technology for electroacoustic transduction. Particularly, their intrinsic design flexibility and miniaturization capability are strong advantages for the manufacturing of high-end Ultrasound-guided Focused Ultrasound (USgFUS) probes. The work presented in this Ph.D. dissertation is devoted to the f irst development of a USgFUS CMUT probe. After a general introduction of the CMUT technology and the context of this research project, the development is reported starting from the preliminary numerical studies to the most advanced characterizations of the fabricated device. The first results demonstrate the benefits of this technology for the targeted applications
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Books on the topic "CMUT"

1

Hresko, Wayne P. CMAT: Comprehensive Mathematical Abilities Test. Austin, Tex: Pro-ed, 2003.

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McGrath, Morag. The all Wales CMHT survey. Bangor: Centre for Social Policy Research & Development, Department of Social Theory & Institutions, University College of North Wales, 1988.

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Fuller, Heather A. Athletic leaders of CMU. Mt. Pleasant, MI (206 W. Michigan St., Mt. Pleasant 48858-2510): PGI Book Pub., 1999.

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M, Sims Lea, and American Association for Medical Transcription., eds. The CMT review guide. Philadelphia: Lippincott Williams & Wilkins, 2006.

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Castelluccio, Antonia. CMT-automorphisms of F[inferior n]. Birmingham: University of Birmingham, 2000.

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McPhee, Stephen J., Maxine Papadakis, Gene Quinn, and Nathaniel Gleason. CMDT 2015 Val Pak: CMDT 2015, Study Guide. McGraw-Hill Education, 2014.

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Grieb, William E. Jr. SMALL BUS CMPT TDY. Baen, 1985.

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Avro Lancaster -Cmbt Leg. The Crowood Press, 2005.

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Rue. Ri Cmpt Win Supervision. McGraw-Hill Education, 2001.

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Slawter. Cmst 101 Public Speaking. Hayden-McNeil Publishing, Incorporated, 2012.

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Book chapters on the topic "CMUT"

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Jayapandian, J., K. Prabakar, C. S. Sundar, and Baldev Raj. "On the Design, Fabrication, and Characterization of cMUT Devices." In Materials and Failures in MEMS and NEMS, 201–18. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2015. http://dx.doi.org/10.1002/9781119083887.ch6.

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Liu, Jiajun, Kaixin Li, Benxian Peng, and Fengqi Yu. "Design and Simulation of an Anti-collapse CMUT Structure." In Lecture Notes in Electrical Engineering, 506–15. Singapore: Springer Singapore, 2022. http://dx.doi.org/10.1007/978-981-19-0390-8_62.

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Caliano, Giosuè, and Alessandro S. Savoia. "Advancements on Silicon Ultrasound Probes (CMUT) for Medical Imaging Applications." In Lecture Notes in Electrical Engineering, 51–57. Cham: Springer International Publishing, 2015. http://dx.doi.org/10.1007/978-3-319-20227-3_7.

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Savoia, Alessandro S., and Giosuè Caliano. "MEMS-Based Transducers (CMUT) and Integrated Electronics for Medical Ultrasound Imaging." In Lecture Notes in Electrical Engineering, 421–29. Cham: Springer International Publishing, 2017. http://dx.doi.org/10.1007/978-3-319-55077-0_53.

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Cao, Xue Wen, Bo Jin, Yuan Yu Yu, Jiu Jiang Wang, Sio Hang Pun, Mang I. Vai, and Peng Un Mak. "Initial Design of the Capacitive Micromachined Ultrasonic Transducers (CMUT) with Helmholtz Resonance Aperture." In IFMBE Proceedings, 192–95. Cham: Springer International Publishing, 2015. http://dx.doi.org/10.1007/978-3-319-12262-5_53.

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Peters, Nils, Martin Dichgans, Sankar Surendran, Josep M. Argilés, Francisco J. López-Soriano, Sílvia Busquets, Klaus Dittmann, et al. "CMT." In Encyclopedia of Molecular Mechanisms of Disease, 372. Berlin, Heidelberg: Springer Berlin Heidelberg, 2009. http://dx.doi.org/10.1007/978-3-540-29676-8_5049.

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Emery, Rosemary, Tucker Balch, Rande Shern, Kevin Sikorski, and Ashley Stroupe. "CMU Hammerheads Team Description." In RoboCup 2000: Robot Soccer World Cup IV, 575–78. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/3-540-45324-5_90.

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Glazov, Vasilii M., Lidya M. Pavlova, and Sergei V. Stankus. "Liquation Phenomena in Molten CMT and Volumetric Properties of HgTe and CMT." In Centrifugal Materials Processing, 147–53. Boston, MA: Springer US, 1997. http://dx.doi.org/10.1007/978-1-4615-5941-2_13.

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Stancliff, Steve, Ravi Balasubramanian, Tucker Balch, Rosemary Emery, Kevin Sikorski, and Ashley Stroupe. "CMU Hammerheads 2001 Team Description." In RoboCup 2001: Robot Soccer World Cup V, 631–34. Berlin, Heidelberg: Springer Berlin Heidelberg, 2002. http://dx.doi.org/10.1007/3-540-45603-1_100.

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Barras, Christina, Rory Conn, and Laurine Hanna. "COMMUNITY MENTAL HEALTH TEAM (CMHT): Outpatient clinics." In Psychiatry: Breaking the ICE, 121–26. Chichester, UK: John Wiley & Sons, Ltd, 2015. http://dx.doi.org/10.1002/9781118557211.ch18.

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Conference papers on the topic "CMUT"

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Koymen, H., Abdullah Atalar, and H. Kagan Oguz. "Designing circular CMUT cells using CMUT biasing chart." In 2012 IEEE International Ultrasonics Symposium. IEEE, 2012. http://dx.doi.org/10.1109/ultsym.2012.0244.

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Wodnicki, Robert, Charles G. Woychik, Albert T. Byun, Rayette Fisher, Kai Thomenius, Der-Song Lin, Xuefeng Zhuang, Omer Oralkan, Srikant Vaithilingam, and Butrus T. Khuri-Yakub. "Multi-row linear cMUT array using cMUTs and multiplexing electronics." In 2009 IEEE International Ultrasonics Symposium. IEEE, 2009. http://dx.doi.org/10.1109/ultsym.2009.5442074.

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Guldiken, Rasim O., Jaime Zahorian, Mustafa Karaman, and F. Levent Degertekin. "Dual Electrode Capacitive Micromachined Ultrasonic Transducer Array for 1-D Intracardiac Echocardiography (ICE)." In ASME 2007 International Mechanical Engineering Congress and Exposition. ASMEDC, 2007. http://dx.doi.org/10.1115/imece2007-42480.

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We designed and fabricated a 64 element 1-D linear dual electrode Capacitive Micromachined Ultrasonic Transducer (CMUT) array operating at 9.5 MHz for Intracardiac Echocardiography (ICE). The dual electrode CMUT structure increases the overall sensitivity by 12.6dB (6.2dB in receive sensitivity; 6.4dB in output pressure) when compared to optimized single electrode CMUT. We report peak output pressure of 2.3MPa on the CMUT surface when 170V AC and 180V DC is applied. This significant performance increase makes the CMUT more competitive with their piezoelectric counterparts.
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Khuri-Yakub, Butrus T., Ching-Hsiang Cheng, Fahrettin-Levent Degertekin, Sanli Ergun, Sean Hansen, Xue-Cheng Jin, and Omer Oralkan. "Silicon Micromachined Ultrasonic Transducers." In ASME 2000 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2000. http://dx.doi.org/10.1115/imece2000-1602.

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Abstract This paper reviews capacitor micromachined ultrasonic transducers (cMUTs). Transducers for air-borne and immersion applications are made from parallel-plate capacitors whose dimensions are controlled through traditional integrated circuit manufacturing methods. Transducers for airborne ultrasound applications have been operated in the frequency range of 0.1–11 MHz, while immersion transducers have been operated in the frequency range of 1–20 MHz. The Mason model is used to represent the cMUT and highlight the important parameters in the design of both airborne and immersion transducers. Theory is used to compare the dynamic range and the bandwidth of the cMUTs to piezoelectric transducers. It is seen that cMUTs perform at least as well if not better than piezoelectric transducers. Examples of single-element transducers, linear-array transducers, and two-dimensional arrays of transducers will be presented.
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Guldiken, Rasim O., Jaime Zahorian, Mujdat Balantekin, and F. Levent Degertekin. "Dual-electrode CMUT optimization for CMUTs with uniform and non-uniform membranes." In 2008 IEEE Ultrasonics Symposium (IUS). IEEE, 2008. http://dx.doi.org/10.1109/ultsym.2008.0518.

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Barauskas, Dovydas, Gailius Vanagas, Darius Virzonis, Almira Ramanaviciene, Asta Makaraviciute, and Arunas Ramanavicius. "Application of CMUT as immunosensor." In 2013 IEEE International Ultrasonics Symposium (IUS). IEEE, 2013. http://dx.doi.org/10.1109/ultsym.2013.0435.

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Khuri-Yakub, B. Pierre T. "CMUT based chem/bio sensors." In 2013 IEEE Sensors. IEEE, 2013. http://dx.doi.org/10.1109/icsens.2013.6688296.

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Najar, Hadi, Babak Assadsangabi, Masoud Dahmardeh, and Edmond Cretu. "Combined FEA-Matlab Optimization of Capacitive Micromachined Ultrasound Transducer Cell." In ASME 2010 International Mechanical Engineering Congress and Exposition. ASMEDC, 2010. http://dx.doi.org/10.1115/imece2010-39394.

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A novel approach to the design of a Capacitive Micromachined Ultrasound Transducer (CMUT) cells is presented, using a Genetic Algorithm (GA) based optimization that couples finite element simulations with parameter changes tuned through Matlab scripts. The optimization goal is a maximization of the CMUT efficiency in coupling the electrical, mechanical and acoustic energy domains. Global constraints are related to the pull-in actuation voltage, resonant frequency (set to 5–6MHz, suitable for biomedical applications) and limits on the achievable geometric dimensions. A CMUT is a relatively new MEMS device used to generate and sense ultrasound waves through electrical actuation. Our CMUT design aims to generate ultrasound waves in the 5–6 MHz range, suitable for breast tumor detection. The electro-mechano-acoustical nonlinear coupling makes the design and optimization process difficult, requiring several cycles of finite element analysis. Therefore, a genetic constrained optimization algorithm implemented in Matlab is coupled with finite element simulations of a parameterized structure modeled in COMSOL Multiphysics, in order to maximize the efficiency of the CMUT cell. The main goal is to achieve maximum transducer efficiency, reflected in a better operating device with lower power consumption. The Matlab-FEA optimization loop is driven by the transducer electro-mechanical efficiency, used as a main performance measure to vary the CMUT geometry parameters from one generation to another.
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Maadi, Mohammad, Christopher Ceroici, and Roger J. Zemp. "Electrical impedace matching of CMUT cells." In 2015 IEEE International Ultrasonics Symposium (IUS). IEEE, 2015. http://dx.doi.org/10.1109/ultsym.2015.0465.

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Tasdelen, Akif Sinan, Abdullah Atalar, Kerem Enhos, and Hayrettin Koymen. "Acoustical tuning of CMUT receiver arrays." In 2016 IEEE International Ultrasonics Symposium (IUS). IEEE, 2016. http://dx.doi.org/10.1109/ultsym.2016.7728556.

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Reports on the topic "CMUT"

1

MacLachlan, Robert A. CMU Common Lisp User's Manual. Fort Belvoir, VA: Defense Technical Information Center, July 1992. http://dx.doi.org/10.21236/ada256431.

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Walker, H., F. Aluzzi, K. Foster, B. Pobanz, and B. Sher. GIS Symbology for FRMAC/CMHT Radiological/Nuclear Products. Office of Scientific and Technical Information (OSTI), October 2008. http://dx.doi.org/10.2172/945537.

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M.A. Ebadian, Ph D. VALIDATION AND VERIFICATION OF CMST-CP REMOTE SURVEILLANCE SENSORS. Office of Scientific and Technical Information (OSTI), January 1999. http://dx.doi.org/10.2172/772513.

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Warrier, U. S., and L. Besaw. Common Management Information Services and Protocol over TCP/IP (CMOT). RFC Editor, April 1989. http://dx.doi.org/10.17487/rfc1095.

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Gunzburger, Max D. Fast Algorithms for the CMU Attached Processor System. Fort Belvoir, VA: Defense Technical Information Center, January 1986. http://dx.doi.org/10.21236/ada182976.

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Jensen, Richard Pearson. Dynamic load test of Arquin-designed CMU wall. Office of Scientific and Technical Information (OSTI), February 2010. http://dx.doi.org/10.2172/978431.

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Jensen, Richard Pearson, and Jeffery L. Cherry. Static load test of Arquin-designed CMU wall. Office of Scientific and Technical Information (OSTI), December 2008. http://dx.doi.org/10.2172/946573.

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Garlan, David, Alan Brown, Daniel Jackson, Jim Tomayko, and Jeannette Wing. The CMU Masters in Software Engineering Core Curriculum. Fort Belvoir, VA: Defense Technical Information Center, August 1993. http://dx.doi.org/10.21236/ada268983.

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Warrier, U. S., L. Besaw, L. LaBarre, and B. D. Handspicker. Common Management Information Services and Protocols for the Internet (CMOT and CMIP). RFC Editor, October 1990. http://dx.doi.org/10.17487/rfc1189.

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Kin, Eunjin, Jungyoon Choi, and Sang Yeon Min. Efficacy and safety of herbal medicines external application with Tuina in congenital muscular torticollis : A systematic review and meta-analysis protocol. INPLASY - International Platform of Registered Systematic Review and Meta-analysis Protocols, January 2022. http://dx.doi.org/10.37766/inplasy2022.1.0017.

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Review question / Objective: By 3 to 4 months of age, infants can keep their necks upright and look into both eyes horizontally. But infants with CMT have a wry neck also known as a twisted neck. Complementary therapies have been commonly used to treat CMT, such as tuina, acupuncture, herbal medicine. Among them, external application of herbal medicine is non-surgical and non-invasive inventions so it can be used widely in East Asia. This review aims to evaluate any form of external application of herbal medicines in CMT, such as cream, oil, extract, form of patch, etc. Information sources: We will electronically search the following database 4 English databases(MEDLINE, PubMed, EMBASE, the Cochrane Central Register of Controlled Trials), 3 Chinese databases(China National Knowledge Infrastructure(CNKI), Chinese Scientific Journal Database(VIP), Wan Fang Database), 4 Korean medical databases(Oriental Medicine Advanced Searching Integrated System(OASIS), Korean Studies Information Service System(KISS), National Digital Science Links(NDSL), Research Information Sharing Service(RISS)) from their founding date to June 2022, without any language restrictions.
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