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Journal articles on the topic 'CMUT arrays'

Author: Grafiati

Published: 10 March 2023

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1

Wang, Ziyuan, Changde He, Wendong Zhang, et al. "Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding." Micromachines 13, no. 1 (2022): 99. http://dx.doi.org/10.3390/mi13010099.

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Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further development and application. In this paper, a vacuum-sealed device for medical applications is introduced, which has the advantages of simple manufacturing process, no static friction, repeatability, and high reliability. The CMUT array suitable for medical imaging frequency band was fabricated by a silicon wafer bonding technology, and the adjacent

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2

Yashvanth, Varshitha, and Sazzadur Chowdhury. "An Investigation of Silica Aerogel to Reduce Acoustic Crosstalk in CMUT Arrays." Sensors 21, no. 4 (2021): 1459. http://dx.doi.org/10.3390/s21041459.

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This paper presents a novel technique to reduce acoustic crosstalk in capacitive micromachined ultrasonic transducer (CMUT) arrays. The technique involves fabricating a thin layer of diisocyanate enhanced silica aerogel on the top surface of a CMUT array. The silica aerogel layer introduces a highly nanoporous permeable layer to reduce the intensity of the Scholte wave at the CMUT-fluid interface. 3D finite element analysis (FEA) simulation in COMSOL shows that the developed technique can provide a 31.5% improvement in crosstalk reduction for the first neighboring element in a 7.5 MHz CMUT arr

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3

Atalar, Abdullah, Hayrettin Köymen, and H. Kaan Oğuz. "Rayleigh–bloch waves in CMUT arrays." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 61, no. 12 (2014): 2139–48. http://dx.doi.org/10.1109/tuffc.2014.006610.

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4

Demirci, U., A. S. Ergun, O. Oralkan, M. Karaman, and B. T. Khuri-Yakub. "Forward-viewing CMUT arrays for medical imaging." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 51, no. 7 (2004): 887–95. http://dx.doi.org/10.1109/tuffc.2004.1320749.

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5

Oralkan, O., A. S. Ergun, Ching-Hsiang Cheng, et al. "Volumetric ultrasound imaging using 2-D CMUT arrays." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 50, no. 11 (2003): 1581–94. http://dx.doi.org/10.1109/tuffc.2003.1251142.

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6

Caronti, Alessandro, G. Caliano, R. Carotenuto, et al. "Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging." Microelectronics Journal 37, no. 8 (2006): 770–77. http://dx.doi.org/10.1016/j.mejo.2005.10.012.

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7

Pei, Yu, Guojun Zhang, Yu Zhang, and Wendong Zhang. "Breast Acoustic Parameter Reconstruction Method Based on Capacitive Micromachined Ultrasonic Transducer Array." Micromachines 12, no. 8 (2021): 963. http://dx.doi.org/10.3390/mi12080963.

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Ultrasound computed tomography (USCT) systems based on capacitive micromachined ultrasonic transducer (CMUT) arrays have a wide range of application prospects. For this paper, a high-precision image reconstruction method based on the propagation path of ultrasound in breast tissue are designed for the CMUT ring array; that is, time-reversal algorithms and FBP algorithms are respectively used to reconstruct sound speed distribution and acoustic attenuation distribution. The feasibility of this reconstruction method is verified by numerical simulation and breast model experiments. According to r

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8

Oguz, H. Kagan, A. Atalar, and H. Koymen. "Equivalent circuit-based analysis of CMUT cell dynamics in arrays." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 60, no. 5 (2013): 1016–24. http://dx.doi.org/10.1109/tuffc.2013.2660.

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9

Satir, Sarp, and F. Levent Degertekin. "A nonlinear lumped model for ultrasound systems using CMUT arrays." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 62, no. 10 (2015): 1865–79. http://dx.doi.org/10.1109/tuffc.2015.007145.

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10

Jung, Gwangrok, Coskun Tekes, Amirabbas Pirouz, F. Levent Degertekin, and Maysam Ghovanloo. "Supply-Doubled Pulse-Shaping High Voltage Pulser for CMUT Arrays." IEEE Transactions on Circuits and Systems II: Express Briefs 65, no. 3 (2018): 306–10. http://dx.doi.org/10.1109/tcsii.2017.2691676.

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11

Meynier, Cyril, Franck Teston, Edgard Jeanne, Jean Edouard Bernard, and Dominique Certon. "Combined finite difference–lumped modelling of fluid loaded Cmut arrays." Physics Procedia 3, no. 1 (2010): 1017–23. http://dx.doi.org/10.1016/j.phpro.2010.01.131.

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12

Bhuyan, Anshuman, Jung Woo Choe, Byung Chul Lee, et al. "Integrated Circuits for Volumetric Ultrasound Imaging With 2-D CMUT Arrays." IEEE Transactions on Biomedical Circuits and Systems 7, no. 6 (2013): 796–804. http://dx.doi.org/10.1109/tbcas.2014.2298197.

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13

Ge, Chang, and Edmond Cretu. "Design and fabrication of SU-8 CMUT arrays through grayscale lithography." Sensors and Actuators A: Physical 280 (September 2018): 368–75. http://dx.doi.org/10.1016/j.sna.2018.08.006.

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14

Klemm, Markus, Anartz Unamuno, Linus Elsaber, and Werner Jeroch. "Performance Assessment of CMUT Arrays Based on Electrical Impedance Test Results." Journal of Microelectromechanical Systems 24, no. 6 (2015): 1848–55. http://dx.doi.org/10.1109/jmems.2015.2445937.

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15

Hery, Maxime, Nicolas Senegond, and Dominique Certon. "A Boundary Element Model for CMUT-Arrays Loaded by a Viscoelastic Medium." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 67, no. 4 (2020): 779–88. http://dx.doi.org/10.1109/tuffc.2019.2954579.

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16

Maadi, Mohammad, and Roger J. Zemp. "Self and Mutual Radiation Impedances for Modeling of Multi-Frequency CMUT Arrays." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 63, no. 9 (2016): 1441–54. http://dx.doi.org/10.1109/tuffc.2016.2587868.

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17

Koymen, Hayrettin, Abdullah Atalar, and A. Sinan Tasdelen. "Bilateral CMUT Cells and Arrays: Equivalent Circuits, Diffraction Constants, and Substrate Impedance." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 64, no. 2 (2017): 414–23. http://dx.doi.org/10.1109/tuffc.2016.2628882.

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18

Ilkhechi, Afshin Kashani, Christopher Ceroici, Zhenhao Li, and Roger Zemp. "Transparent capacitive micromachined ultrasonic transducer (CMUT) arrays for real-time photoacoustic applications." Optics Express 28, no. 9 (2020): 13750. http://dx.doi.org/10.1364/oe.390612.

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19

Degertekin, F. L., R. O. Guldiken, and M. Karaman. "Annular-ring CMUT arrays for forward-looking IVUS: transducer characterization and imaging." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 53, no. 2 (2006): 474–82. http://dx.doi.org/10.1109/tuffc.2006.1593387.

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20

Bavaro, V., G. Caliano, and M. Pappalardo. "Element shape design of 2-D CMUT arrays for reducing grating lobes." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 55, no. 2 (2008): 308–18. http://dx.doi.org/10.1109/tuffc.2008.650.

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21

Engholm, Mathias, Hamed Bouzari, Thomas Lehrmann Christiansen, et al. "Probe development of CMUT and PZT row–column-addressed 2-D arrays." Sensors and Actuators A: Physical 273 (April 2018): 121–33. http://dx.doi.org/10.1016/j.sna.2018.02.031.

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22

Greenlay, Benjamin A., and Roger J. Zemp. "Fabrication of Linear Array and Top-Orthogonal-to-Bottom Electrode CMUT Arrays With a Sacrificial Release Process." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 64, no. 1 (2017): 93–107. http://dx.doi.org/10.1109/tuffc.2016.2620425.

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23

Sampaleanu, Alex, Peiyu Zhang, Abhijeet Kshirsagar, Walied Moussa, and Roger J. Zemp. "Top-orthogonal-to-bottom-electrode (TOBE) CMUT arrays for 3-D ultrasound imaging." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 61, no. 2 (2014): 266–76. http://dx.doi.org/10.1109/tuffc.2014.6722612.

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24

Bayram, Baris, Mario Kupnik, Goksen Yaralioglu, et al. "Finite element modeling and experimental characterization of crosstalk in 1-D CMUT arrays." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 54, no. 2 (2007): 418–30. http://dx.doi.org/10.1109/tuffc.2007.256.

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25

Wygant, I. O., Xuefeng Zhuang, D. T. Yeh, et al. "Integration of 2D CMUT arrays with front-end electronics for volumetric ultrasound imaging." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 55, no. 2 (2008): 327–42. http://dx.doi.org/10.1109/tuffc.2008.652.

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26

Gurun, G., P. Hasler, and F. L. Degertekin. "Front-end receiver electronics for high-frequency monolithic CMUT-on-CMOS imaging arrays." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 58, no. 8 (2011): 1658–68. http://dx.doi.org/10.1109/tuffc.2011.1993.

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27

Arkan, Evren Fatih, and F. Levent Degertekin. "Analysis and Design of High-Frequency 1-D CMUT Imaging Arrays in Noncollapsed Mode." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 66, no. 2 (2019): 382–93. http://dx.doi.org/10.1109/tuffc.2018.2887043.

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28

Chee, Ryan K. W., Alexander Sampaleanu, Deepak Rishi, and Roger J. Zemp. "Top orthogonal to bottom electrode (TOBE) 2-D CMUT arrays for 3-D photoacoustic imaging." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 61, no. 8 (2014): 1393–95. http://dx.doi.org/10.1109/tuffc.2014.3048.

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29

Cicek, I., A. Bozkurt, and M. Karaman. "Design of a front-end integrated circuit for 3D acoustic imaging using 2D CMUT arrays." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 52, no. 12 (2005): 2235–41. http://dx.doi.org/10.1109/tuffc.2005.1563266.

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30

Lascaud, J., T. Defforge, L. Colin, et al. "Integrating porous silicon layer backing to capacitive micromachined ultrasonic transducers (CMUT)-based linear arrays for acoustic Lamb wave attenuation." Journal of Applied Physics 131, no. 10 (2022): 105107. http://dx.doi.org/10.1063/5.0083052.

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Lamb waves propagating in the substrate of linear arrays integrated on a silicon (Si) chip may degrade the elementary performances of the imaging device. In fact, these waves are radiated in the imaging medium. Their superimposition with the relevant ultrasonic signals alters the image performances (i.e., lateral and axial resolutions). In this article, we investigate the interest of using a thin layer of porous silicon (PS) as an absorbing material, aiming to reduce the total device dimensions compared to more traditional backing materials and facilitate device integration with on-chip electr

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31

Oguz, H., Abdullah Atalar, and Hayrettin Koymen. "Erratum to "Equivalent circuit-based analysis of CMUT cell dynamics in arrays" [May 13 1016-1024]." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 60, no. 6 (2013): 1277. http://dx.doi.org/10.1109/tuffc.2013.2693.

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32

Satir, Sarp, Jaime Zahorian, and F. Levent Degertekin. "A large-signal model for CMUT arrays with arbitrary membrane geometry operating in non-collapsed mode." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 60, no. 11 (2013): 2426–39. http://dx.doi.org/10.1109/tuffc.2013.6644745.

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33

Xuefeng Zhuang, I. Wygant, Der-Song Lin, M. Kupnik, O. Oralkan, and B. Khuri-Yakub. "Wafer-bonded 2-D CMUT arrays incorporating through-wafer trench-isolated interconnects with a supporting frame." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 56, no. 1 (2009): 182–92. http://dx.doi.org/10.1109/tuffc.2009.1018.

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34

Due-Hansen, J., K. Midtbø, E. Poppe, et al. "Fabrication process for CMUT arrays with polysilicon electrodes, nanometre precision cavity gaps and through-silicon vias." Journal of Micromechanics and Microengineering 22, no. 7 (2012): 074009. http://dx.doi.org/10.1088/0960-1317/22/7/074009.

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35

Caronti, Alessandro, Giosue' Caliano, Philipp Gatta, Cristina Longo, Alessandro Savoia, and Massimo Pappalardo. "A finite element tool for the analysis and the design of capacitive micromachined ultrasonic transducer (cMUT) arrays for medical imaging." Journal of the Acoustical Society of America 123, no. 5 (2008): 3375. http://dx.doi.org/10.1121/1.2934002.

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36

Adelegan, Oluwafemi J., Zachary A. Coutant, Xiao Zhang, Feysel Yalcin Yamaner, and Omer Oralkan. "Fabrication of 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on Insulating Substrates With Through-Wafer Interconnects Using Sacrificial Release Process." Journal of Microelectromechanical Systems 29, no. 4 (2020): 553–61. http://dx.doi.org/10.1109/jmems.2020.2990069.

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37

Zhang, Rui, Wendong Zhang, Changde He, et al. "Design of capacitive micromachined ultrasonic transducer (CMUT) linear array for underwater imaging." Sensor Review 36, no. 1 (2016): 77–85. http://dx.doi.org/10.1108/sr-05-2015-0076.

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Purpose – The purpose of this paper was to develop a novel capacitive micromachined ultrasonic transducer (CMUT) reception and transmission linear array for underwater imaging at 400 kHz. Compared with traditional CMUTs, the developed transducer array offers higher electromechanical coupling coefficient and higher directivity performance. Design/methodology/approach – The configuration of the newly developed CMUT reception and transmission array was determined by the authors’ previous research into new element structures with patterned top electrodes and into directivity simulation analysis. U

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38

Yildiz, Fikret, Tadao Matsunaga, and Yoichi Haga. "Fabrication and Packaging of CMUT Using Low Temperature Co-Fired Ceramic." Micromachines 9, no. 11 (2018): 553. http://dx.doi.org/10.3390/mi9110553.

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This paper presents fabrication and packaging of a capacitive micromachined ultrasonic transducer (CMUT) using anodically bondable low temperature co-fired ceramic (LTCC). Anodic bonding of LTCC with Au vias-silicon on insulator (SOI) has been used to fabricate CMUTs with different membrane radii, 24 µm, 25 µm, 36 µm, 40 µm and 60 µm. Bottom electrodes were directly patterned on remained vias after wet etching of LTCC vias. CMUT cavities and Au bumps were micromachined on the Si part of the SOI wafer. This high conductive Si was also used as top electrode. Electrical connections between the to

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39

Ahn, Bong Young, Ki Bok Kim, Hae Won Park, Young Joo Kim, and Yong Seok Kwak. "Design and Characterization of Capacitive Micromachined Ultrasonic Transducer." Key Engineering Materials 321-323 (October 2006): 132–35. http://dx.doi.org/10.4028/www.scientific.net/kem.321-323.132.

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As cMUTs (capacitive Micromachined Ultrasonic Transducer) offer numerous advantages over traditional transducers in terms of efficiency, bandwidth, and cost, they are expected to replace piezoelectric transducers in many applications. In particular, 2D-array cMUTs have aroused great interest in the medical engineering society because of their ability to materialize a true volumetric ultrasonic image. In this study, single element cMUTs with 32 x 32 and 64 x 64 cells were successfully fabricated. The diameter and thickness of the membrane are 35 and 1000 nm, respectively, with a sacrificial lay

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40

Zhang, Wen, Hui Zhang, Shijiu Jin, and Zhoumo Zeng. "A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization." Journal of Sensors 2016 (2016): 1–8. http://dx.doi.org/10.1155/2016/5298197.

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Capacitive micromachined ultrasonic transducers (CMUTs) are one of the promising MEMS devices. This paper proposed an integrated vibration membrane structure to design a two-dimensional CMUT linear array for underwater applications. The operation frequencies for different medium have been calculated and simulated, which are 2.5 MHz in air and 0.7 MHz in water. The directivity analyses for the CMUT cell, subarray, and linear array have been provided. According to the product theorems, the directivity function of the complex array is obtained using a combination of the directivity functions of c

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41

Kim, Bae-Hyung, Seungheun Lee, and Kang-Sik Kim. "Orthogonal Chirp Coded Excitation in a Capacitive Micro-machined Ultrasonic Transducer Array for Ultrasound Imaging: A Feasibility Study." Sensors 19, no. 4 (2019): 883. http://dx.doi.org/10.3390/s19040883.

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It has been reported that the frequency bandwidth of capacitive micro-machined ultrasonic transducers (CMUTs) is relatively broader than that of other ceramic-based conventional ultrasonic transducers. In this paper, a feasibility study for orthogonal chirp coded excitation to efficiently make use of the wide bandwidth characteristic of CMUT array is presented. The experimental result shows that the two orthogonal chirps mixed and simultaneously fired in CMUT array can be perfectly separated in decoding process of the received echo signal without sacrificing the frequency bandwidth each chirp.

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42

Ye, Lei, Jian Li, Hui Zhang, Dongmei Liang, and Zhuochen Wang. "An Integrated Front-end Circuit Board for Air-Coupled CMUT Burst-Echo Imaging." Sensors 20, no. 21 (2020): 6128. http://dx.doi.org/10.3390/s20216128.

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To conduct burst-echo imaging with air-coupled capacitive micromachined ultrasonic transducers (CMUTs) using the same elements in transmission and reception, this work proposes a dedicated and integrated front-end circuit board design to build an imaging system. To the best of the authors’ knowledge, this is the first air-coupled CMUT burst-echo imaging using the same elements in transmission and reception. The reported front-end circuit board, controlled by field programmable gate array (FPGA), consisted of four parts: an on-board pulser, a bias-tee, a T/R switch and an amplifier. Working wit

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43

Eren, Ezgi Can, Ram Dixit, and Natarajan Gautam. "A Three-Dimensional Computer Simulation Model Reveals the Mechanisms for Self-Organization of Plant Cortical Microtubules into Oblique Arrays." Molecular Biology of the Cell 21, no. 15 (2010): 2674–84. http://dx.doi.org/10.1091/mbc.e10-02-0136.

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The noncentrosomal cortical microtubules (CMTs) of plant cells self-organize into a parallel three-dimensional (3D) array that is oriented transverse to the cell elongation axis in wild-type plants and is oblique in some of the mutants that show twisted growth. To study the mechanisms of CMT array organization, we developed a 3D computer simulation model based on experimentally observed properties of CMTs. Our computer model accurately mimics transverse array organization and other fundamental properties of CMTs observed in rapidly elongating wild-type cells as well as the defective CMT phenot

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44

Zhang, Tian, Wendong Zhang, Xingling Shao, et al. "A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array." Micromachines 12, no. 6 (2021): 684. http://dx.doi.org/10.3390/mi12060684.

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Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). CMUT elements are easily made into a high-density array, which will increase the hardware complexity. In order to reduce the number of active channels, this paper studies the grating lobes generated by CMUT periodic sparse array (PSA) pairs. Through the design of active element positions in the transmitting and receiving processes, the simulation results of effective aperture and beam patterns show that the common grating lobes (CGLs) generated by the transmit an

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45

Zhang, Tian, Wendong Zhang, XingLing Shao, and Yang Wu. "Research on optimization sparse method for capacitive micromachined ultrasonic transducer array: heuristic algorithm." Sensor Review 41, no. 3 (2021): 260–70. http://dx.doi.org/10.1108/sr-03-2021-0082.

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Purpose Because of the small size and high integration of capacitive micromachined ultrasonic transducer (CMUT) component, it can be made into large-scale array, but this lead to high hardware complexity, so the purpose of this paper is to use less elements to achieve better imaging results. In this research, an optimized sparse array is studied, which can suppress the side lobe and reduce the imaging artifacts compared with the equispaced sparse array with the same number of elements. Design/methodology/approach Genetic algorithm is used to sparse the CMUT linear array, and Kaiser window apod

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46

Daft, Christopher M. W. "PIEZOELECTRIC AND CMUT LAYERED ULTRASOUND TRANSDUCER ARRAY." Journal of the Acoustical Society of America 133, no. 4 (2013): 2520. http://dx.doi.org/10.1121/1.4800170.

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47

M. W. Daft, Christopher. "MULTI-DIMENSIONAL CMUT ARRAY WITH INTEGRATED BEAMFORMATION." Journal of the Acoustical Society of America 135, no. 1 (2014): 574. http://dx.doi.org/10.1121/1.4861516.

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48

Wang, Hongliang, Jiao Qu, Xiangjun Wang, Changde He, and Chenyang Xue. "Investigation and Analysis of Ultrasound Imaging Based on Linear CMUT Array." International Journal of Pattern Recognition and Artificial Intelligence 33, no. 08 (2019): 1957004. http://dx.doi.org/10.1142/s0218001419570040.

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In the next generation of ultrasound imaging systems, Capacitive micromachined ultasonic transducer (CMUT) based on microelectromechanical systems (MEMS) is a promising research direction of transducers, which has wide application prospects. In this paper, based on the study of three imaging methods, including classical phased array (CPA) imaging, classical synthetic aperture (CSA) imaging and phased subarray (PSA) imaging, several different imaging schemes are designed for linear CMUT array, after that the performances of these imaging schemes are compared and analyzed. The effects of the thr

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49

Ronnekleiv, A. "CMUT array modeling through free acoustic CMUT modes and analysis of the fluid CMUT interface through Fourier transform methods." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 52, no. 12 (2005): 2173–84. http://dx.doi.org/10.1109/tuffc.2005.1563261.

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50

Wang, Mengli, and Jingkuang Chen. "Volumetric Flow Measurement Using an Implantable CMUT Array." IEEE Transactions on Biomedical Circuits and Systems 5, no. 3 (2011): 214–22. http://dx.doi.org/10.1109/tbcas.2010.2095848.

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