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Journal articles on the topic 'Critical Dimension Measurement'

Author: Grafiati

Published: 4 June 2021

Last updated: 4 February 2022

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1

OTAKA, Tadashi, Hiroki KAWADA, Chie SHISHIDO, and Mayuka OSAKI. "Critical Dimension Measurement Technology Using CD-SEM." Hyomen Kagaku 27, no. 11 (2006): 636–41. http://dx.doi.org/10.1380/jsssj.27.636.

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2

Mizuno, Fumio. "Evaluation of total uncertainty in the dimension measurements using critical-dimension measurement scanning electron microscopes." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 16, no. 6 (1998): 3661. http://dx.doi.org/10.1116/1.590387.

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3

Sartore, R. "Linewidth measurements of metallization coated with insulator on microelectronic circuits using Energy-Dispersive Xray Analysis (EDXA)." Proceedings, annual meeting, Electron Microscopy Society of America 50, no. 2 (1992): 1690–91. http://dx.doi.org/10.1017/s0424820100133084.

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Evaluation of quality and conformance to target production specifications for microelectronic devices frequently require measurements of the feature sizes of the critical conductive elements for the circuits. Further, failure analysis dictates critical dimension measurements to trace cause of failure for device. To date, the commercial critical dimension (CD) measurement systems are based on the secondary electron (SE) imaging techniques and analysis. In a failure analysis or quality evaluation laboaratory the microelectronic circuits received are mostly already fully fabricated, with passivation and insulator layers in place. The CD measuremment systems based on SE will not give accurate results unless the top insulating layer is removed. Layer removal is a destructive process and also difficult for devices that has several metallization levels. To address the destructive analysis and layer removal problems, a CD measurement technique has been developed that uses energy dispersive x ray analysis to measure critical feature sizes under a insulating layer.

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4

Abe, Hideaki, Motoki Kadowaki, Akira Hamaguchi, Takahiro Ikeda, and Yuichiro Yamazaki. "Systematic Measurement Uncertainty of Critical Dimension Scanning Electron Microscope." Japanese Journal of Applied Physics 49, no. 6 (2010): 06GD03. http://dx.doi.org/10.1143/jjap.49.06gd03.

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5

Lee, Wonsuk. "Measurement of critical dimension in scanning electron microscope mask images." Journal of Micro/Nanolithography, MEMS, and MOEMS 10, no. 2 (2011): 023003. http://dx.doi.org/10.1117/1.3574771.

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6

Kwon, Soonyang, Namyoon Kim, Taeyong Jo, and Heui Jae Pahk. "Critical dimension measurement of transparent film layers by multispectral imaging." Optics Express 22, no. 14 (2014): 17370. http://dx.doi.org/10.1364/oe.22.017370.

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7

Lorusso, G. F., and D. C. Joy. "Experimental resolution measurement in critical dimension scanning electron microscope metrology." Scanning 25, no. 4 (2003): 175–80. http://dx.doi.org/10.1002/sca.4950250403.

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8

Yamashita, Hiroshi. "Highly accurate critical dimension measurement for sub-0.5-μm devices". Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 12, № 6 (1994): 3591. http://dx.doi.org/10.1116/1.587477.

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9

Hitomi, Keiichiro, Yoshinori Nakayama, Hiromasa Yamanashi, Yasunari Sohda, and Hiroki Kawada. "Study of Measurement Condition Optimization in Critical Dimension-Scanning Electron Microscope." Japanese Journal of Applied Physics 47, no. 8 (2008): 6554–57. http://dx.doi.org/10.1143/jjap.47.6554.

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10

Nagase, Masao, Hideo Namatsu, Kenji Kurihara, and Takahiro Makino. "Critical Dimension Measurement in Nanometer Scale by Using Scanning Probe Microscopy." Japanese Journal of Applied Physics 35, Part 1, No. 7 (1996): 4166–74. http://dx.doi.org/10.1143/jjap.35.4166.

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11

Marák, Károly. "Characterization of the Inverse Problem in Critical Dimension Measurement of Diffraction Gratings." Periodica Polytechnica Electrical Engineering and Computer Science 61, no. 1 (2016): 1. http://dx.doi.org/10.3311/ppeecs.7.

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In this paper, the inverse problem of extracting critical dimensions of the grating is defined, using data obtained by ellipsometric spectrometry. We give an overview of theoretical models describing diffraction gratings and their interactions with incident light, with a special emphasis on the coupled-wave method. A method for mapping the output space (points on Poincaré’s sphere defined by the ellipsometric angles for each wavelength) to the input space (grating dimensions) is presented, where samples of the output space are picked equidistantly. Using this method, distribution of the measurement precision for a given type of experimental setup is established, and tested on examples from a set of permalloy gratings.

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12

Murayama, Ken, Satoshi Gonda, Hajime Koyanagi, Tsuneo Terasawa, and Sumio Hosaka. "Critical-Dimension Measurement using Multi-Angle-Scanning Method in Atomic Force Microscope." Japanese Journal of Applied Physics 45, no. 7 (2006): 5928–32. http://dx.doi.org/10.1143/jjap.45.5928.

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13

Huang, Y., B. X. Cai, Y. S. Lin, et al. "Optical Critical Dimension Measurement for AEI Structures at Sub 65 Nm Node." ECS Transactions 60, no. 1 (2014): 869–74. http://dx.doi.org/10.1149/06001.0869ecst.

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14

Zou, Y. B., M. S. S. Khan, H. M. Li, et al. "Use of model-based library in critical dimension measurement by CD-SEM." Measurement 123 (July 2018): 150–62. http://dx.doi.org/10.1016/j.measurement.2018.02.069.

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15

Zhang, Zhen Sheng, Yi Huang, Yong-Gang Feng, et al. "Critical Dimension Measurement Using OCD Spectroscopy for Gate and STI AEI Structures." ECS Transactions 44, no. 1 (2019): 1169–74. http://dx.doi.org/10.1149/1.3694445.

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16

Marák, Károly. "Characterization of the Inverse Problem in Critical Dimension Measurement of Diffraction Gratings." Periodica Polytechnica Electrical Engineering and Computer Science 60, no. 3 (2016): 187–93. http://dx.doi.org/10.3311/ppee.9310.

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17

Malkusch, Wolf, and Thomas Pioch. "A method to test the accuracy of critical dimension measurement systems (CDMS)." Microelectronic Engineering 11, no. 1-4 (1990): 675–79. http://dx.doi.org/10.1016/0167-9317(90)90194-x.

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18

Yu, Anqi, Xiaolin Zhao, Sheng Ni, Rui Dai, Jinshui Miao, and Xuguang Guo. "Plasmon-assisted optical critical dimension measurement for three-layer orthogonal metallic gratings." Photonics and Nanostructures - Fundamentals and Applications 46 (September 2021): 100949. http://dx.doi.org/10.1016/j.photonics.2021.100949.

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19

Ryabko, M., S. Koptyaev, A. Shcherbakov, and A. Lantsov. "Interferometer -based Technology for Optical Nanoscale Inspection." Measurement Science Review 14, no. 1 (2014): 25–28. http://dx.doi.org/10.2478/msr-2014-0004.

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Abstract We demonstrate the interferometer-based approach for nanoscale grating Critical Dimension (CD) measurements and prove the possibility to achieve no worse than 10 nm accuracy of measurements for 100 nm pitch gratings. The approach is based on phase shift measurement of light fields specularly reflected from periodical pattern and adjacent substrate with subsequent comparison between experimental and simulation results. RCWA algorithm is used to fit the measured results and extract the CD value. It is shown that accuracy of CD value measurement depends rather on the grating’s CD/pitch ratio than its CD value

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20

Reilly, Terrence W., and Louis G. Dawang. "A study of robust critical dimension measurement algorithm for use in differing scanning electron microscope configurations in the measurement of submicron semiconductor geometries." Proceedings, annual meeting, Electron Microscopy Society of America 49 (August 1991): 882–83. http://dx.doi.org/10.1017/s0424820100088725.

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Within semiconductor companies, there can be many different critical dimension (CD) measurement instruments. They could be optical, electrical, confocal laser, or scanning electron microscopes (SEM). Often times, they are not only different configurations, but different brands as well. There is a great need for a measurement algorithm that has the ability to deliver the same measurement between two machines. It is possible the development group within a semiconductor company would use an SEM with expanded capabilities when compared to the production group's SEM. If this is the case, the ability to use a measurement algorithm that is impervious to the influence different microscope designs have on the signal output used for measurement would enhance system matching. One would believe that two identical CD systems should produce nearly the same measurement. However, when two totally different systems are compared, only a robust algorithm would give good machine to machine matching of measurements.

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21

Xiang, Wuweikai, Yanling Tian, and Xianping Liu. "Dynamic analysis of tapping mode atomic force microscope (AFM) for critical dimension measurement." Precision Engineering 64 (July 2020): 269–79. http://dx.doi.org/10.1016/j.precisioneng.2020.03.023.

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22

Ciappa, Mauro, Alexander Koschik, Maurizio Dapor, and Wolfgang Fichtner. "Modeling secondary electron images for linewidth measurement by critical dimension scanning electron microscopy." Microelectronics Reliability 50, no. 9-11 (2010): 1407–12. http://dx.doi.org/10.1016/j.microrel.2010.07.120.

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23

Shivaprasad, Deepak, Jiangtao Hu, Milad Tabet, Ray Hoobler, David Mui, and Wei Liu. "Measurement of semi-isolated polysilicon gate structure with the optical critical dimension technique." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 21, no. 6 (2003): 2517. http://dx.doi.org/10.1116/1.1622946.

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24

Azuma, Tsukasa, Kenji Chiba, Hideaki Abe, Hiroshi Motoki, and Noriaki Sasaki. "Mechanism of ArF resist-pattern shrinkage in critical-dimension scanning electron microscopy measurement." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 22, no. 1 (2004): 226. http://dx.doi.org/10.1116/1.1643055.

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25

Uk Lee, Jae, Seongchul Hong, Jinho Ahn, Jonggul Doh, and SeeJun Jeong. "Actinic critical dimension measurement of contaminated extreme ultraviolet mask using coherent scattering microscopy." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 32, no. 3 (2014): 031601. http://dx.doi.org/10.1116/1.4873697.

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26

Ahn, Jae Hyung, Tai-Wook Kim, and Heui Jae Pahk. "Fast focus and astigmatism correction algorithm for critical dimension measurement using electron microscopy." International Journal of Precision Engineering and Manufacturing 16, no. 9 (2015): 1941–47. http://dx.doi.org/10.1007/s12541-015-0252-5.

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27

Tengelin, Ellinor, Christina Cliffordson, Elisabeth Dahlborg, and Ina Berndtsson. "Constructing the Norm-critical awareness scale." Equality, Diversity and Inclusion: An International Journal 38, no. 6 (2019): 652–67. http://dx.doi.org/10.1108/edi-10-2017-0222.

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PurposeHealthcare professionals’ conscious or unconscious norms, values and attitudes have been identified as partial explanations of healthcare inequity. Norm criticism is an approach that questions what is generally accepted as “normal” in society, and it enables professionals to identify norms that might cause prejudice, discrimination and marginalisation. In order to assess norm-critical awareness, a measurement scale is needed. The purpose of this paper is to develop a scale for measuring norm-critical awareness.Design/methodology/approachThe scale-development process comprised a qualitative item-generating phase and a statistical reduction phase. The item pool was generated from key literature on norm criticism and was revised according to an expert panel, pilot studies and one “think aloud” session. To investigate the dimensionality and to reduce the number of items of the scale, confirmatory factor analysis was performed.FindingsThe item-generation phase resulted in a 46-item scale comprising five theoretically derived dimensions revolving around function, consequences, identity, resistance and learning related to norms. The item-reduction phase resulted in an instrument consisting of five dimensions and 20 items. The analyses indicated that a summary score on the scale could be used to reflect the broad dimension of norm-critical awareness.Originality/valueThe Norm-critical awareness scale comprises five theoretically derived dimensions and can be used as a summary score to indicate the level of norm-critical awareness in educational contexts. This knowledge is valuable for identifying areas in greater need of attention.

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28

Rosenfield, M. G. "Linewidth measurement using the low voltage SEM." Proceedings, annual meeting, Electron Microscopy Society of America 44 (August 1986): 652–53. http://dx.doi.org/10.1017/s0424820100144681.

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Minimum feature sizes in experimental integrated circuits are approaching 0.5 μm and below. During the fabrication process it is usually necessary to be able to non-destructively measure the critical dimensions in resist and after the various process steps. This can be accomplished using the low voltage SEM. Submicron linewidth measurement is typically done by manually measuring the SEM micrographs. Since it is desirable to make as many measurements as possible in the shortest period of time, it is important that this technique be automated.Linewidth measurement using the scanning electron microscope is not well understood. The basic intent is to measure the size of a structure from the secondary electron signal generated by that structure. Thus, it is important to understand how the actual dimension of the line being measured relates to the secondary electron signal. Since different features generate different signals, the same method of relating linewidth to signal cannot be used. For example, the peak to peak method may be used to accurately measure the linewidth of an isolated resist line; but, a threshold technique may be required for an isolated space in resist.

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29

Zao, Jin You, Bong Yin Yen, Lim Beng Kuan, John Thornell, Darcy Hart, and David Marx. "Automated Metrology Improves Productivity and Yields for Wafer Level Packaging in High Volume Manufacturing." International Symposium on Microelectronics 2014, no. 1 (2014): 000155–60. http://dx.doi.org/10.4071/isom-ta61.

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Wafer Bumping In-line Process control of Wafer-Level Chip Scale Package (WLCSP) requires accurate measurement of bump features during processing. These bump features include critical dimension of Redistribution Layer (RDL), Under Bump Metal (UBM) and transparent polyimide thickness. For a 4-Mask Layer Cu plated WLCSP, accurate feature thickness measurement is required for both the Redistribution Layer (RDL) and Under Bump Metal (UBM) to ensure consistent delivery of good electrical performance and package reliability. This is especially important as WLCSP is moving towards finer feature size and pitch to meet increasing demand for smaller form factor. This paper reports the development of an automated Critical Dimension (CD) measurement solution capable of measuring features at pre-defined locations on different topology both under sampling and full inspection mode on wafer. The solution is fully scalable to meet the requirement of high product-mix HVM environment, by highly adaptive to different features on different products for which measurement needs to be automated for effective process control.

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30

Battaglia, Alessandro, Elke Rustemeier, Ali Tokay, Ulrich Blahak, and Clemens Simmer. "PARSIVEL Snow Observations: A Critical Assessment." Journal of Atmospheric and Oceanic Technology 27, no. 2 (2010): 333–44. http://dx.doi.org/10.1175/2009jtecha1332.1.

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Abstract The performance of the laser-optical Particle Size Velocity (PARSIVEL) disdrometer is evaluated to determine the characteristics of falling snow. PARSIVEL’s measuring principle is reexamined to detect its limitations and pitfalls when applied to solid precipitation. This study uses snow observations taken during the Canadian Cloudsat/Cloud-Aerosol Lidar and Infrared Pathfinder Satellite Observation (CALIPSO) Validation Project (C3VP) campaign, when two PARSIVEL instruments were collocated with a single two-dimensional disdrometer (2-DVD), which allows more detailed observation of snowflakes. When characterizing the snowflake size, PARSIVEL instruments inherently retrieve only one size parameter, which is approximately equal to the widest horizontal dimension (more accurately with large snowflakes) and that has no microphysical meaning. Unlike for raindrops, the equivolume PARSIVEL diameter—the PARSIVEL output variable—has no physical counterpart for snowflakes. PARSIVEL’s fall velocity measurement may not be accurate for a single snowflake particle. This is due to the internally assumed relationship between horizontal and vertical snow particle dimensions. The uncertainty originates from the shape-related factor, which tends to depart more and more from unity with increasing snowflake sizes and can produce large errors. When averaging over a large number of snowflakes, the correction factor is size dependent with a systematic tendency to an underestimation of the fall speed (but never exceeding 20%). Compared to a collocated 2-DVD for long-lasting events, PARSIVEL seems to overestimate the number of small snowflakes and large particles. The disagreement between PARSIVEL and 2-DVD snow measurements can only be partly ascribed to PARSIVEL intrinsic limitations (border effects and sizing problems), but it has to deal with the difficulties and drawbacks of both instruments in fully characterizing snow properties.

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31

André, Kummerow, Nicolai Steffen, and Bretschneider Peter. "Outlier Detection Methods for Uncovering of Critical Events in Historical Phasor Measurement Records." E3S Web of Conferences 64 (2018): 08006. http://dx.doi.org/10.1051/e3sconf/20186408006.

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The scope of this survey is the uncovering of potential critical events from mixed PMU data sets. An unsupervised procedure is introduced with the use of different outlier detection methods. For that, different techniques for signal analysis are used to generate features in time and frequency domain as well as linear and non-linear dimension reduction techniques. That approach enables the exploration of critical grid dynamics in power systems without prior knowledge about existing failure patterns. Furthermore new failure patterns can be extracted for the creation of training data sets used for online detection algorithms.

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32

Patrick, Heather J. "Optical critical dimension measurement of silicon grating targets using back focal plane scatterfield microscopy." Journal of Micro/Nanolithography, MEMS, and MOEMS 7, no. 1 (2008): 013012. http://dx.doi.org/10.1117/1.2885275.

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33

Chouaib, Houssam, and Qiang Zhao. "Nanoscale optical critical dimension measurement of a contact hole using deep ultraviolet spectroscopic ellipsometry." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 31, no. 1 (2013): 011803. http://dx.doi.org/10.1116/1.4771969.

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34

Kwak, Gyea Young, Hye Jung Chang, Min Young Na, et al. "Calibration of high magnification in the measurement of critical dimension by AFM and SEM." Applied Surface Science 565 (November 2021): 150481. http://dx.doi.org/10.1016/j.apsusc.2021.150481.

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35

Santamaria, Tricia, and Dan Nathan-Roberts. "Personality Measurement and Design in Human-Robot Interaction: A Systematic and Critical Review." Proceedings of the Human Factors and Ergonomics Society Annual Meeting 61, no. 1 (2017): 853–57. http://dx.doi.org/10.1177/1541931213601686.

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This work aims to summarize research methods for measuring personality in human-robot interaction. A systematic review was performed, resulting in 35 studies that were categorized by whether they assessed human personality, robot personality, or both. It was found that the five-factor model (Big Five) of personality (extraversion, agreeableness, conscientiousness, openness, and neuroticism) was a common theme as it was used to assess personality in 31% of studies, and the extraversion dimension alone was used to assess personality in an additional 26% of studies. The strengths, limitations, and the human factors influences of user expectations of the Big Five as well as the recommendation for its use are discussed.

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36

Cantero-López, Nuria, Víctor M. González-Chordá, María Jesús Valero-Chillerón, et al. "Attitudes of Undergraduate Nursing Students towards Patient Safety: A Quasi-Experimental Study." International Journal of Environmental Research and Public Health 18, no. 4 (2021): 1429. http://dx.doi.org/10.3390/ijerph18041429.

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Improving nursing students’ attitudes towards patient safety is a current and relevant topic. This study aims to evaluate the effectiveness of an educational intervention based on critical incident and root cause analysis (RCA) techniques regarding attitudes towards patient safety in nursing students. A quasi-experimental before and after study was developed between January 2018 and December 2019 in a sample of 100 nursing students at Universitat Jaume I (Spain). The intervention was developed in two phases. Phase I was at university, where students applied the RCA technique in a real case. Phase II took place during clinical practice. Students used critical incidents to identify a risk situation for the patients and applied RCA to detect its root causes. The measurement of attitudes was performed with the Attitudes to Patient Safety Questionnaire (APSQ-III). The global score of the questionnaire in the baseline measurement was 3.911 (±0.335), in the intermediate measurement it was 4.031 (±0.337) and in the final measurement it was 4.052 (±0.335), with significant differences (p = 0.03). However, intra-group differences were observed in the final measurement (p = 0.021). The teamwork dimension had the highest mean score on all three measures and the notification dimension had the lowest mean scores. An educational intervention combining critical incident and RCA techniques can improves nursing students’ attitudes toward patient safety.

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37

Qerimi, Qerim. "The impact of EU conditionality policy on human rights and rule of law in the western Balkans: An attempt at a methodology." SEER 24, no. 1 (2021): 93–102. http://dx.doi.org/10.5771/1435-2869-2021-1-93.

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This article seeks to explore the underlying methodological dimension of measuring the impact or effects of the EU’s policy of conditionality in western Balkans states in the arena of human rights protection and respect for the rule of law. These are critical issues in which aid conditionality has global dimensions, while the EU itself remains a valid international actor. The article also focuses on the adequacy of the measurement instruments used to measure the impact of this policy, based on the existing trends as well as past experience with enlargement to central and eastern Europe. The author identifies the major research questions that need to be confronted and suggests an appropriate methodological approach to resolve these, including an important gender dimension. In the process, he identifies the deficiencies concerning the measurement of conditionality which have come to haunt the application of the policy. The central aim kept in mind throughout is to seek improvements in the application of the policy itself and with a view to the wider lessons regarding the role that conditionality has come to play.

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38

Yasutake, Masatoshi, Kazutoshi Watanabe, Sigeru Wakiyama, and Takehiro Yamaoka. "Critical Dimension Measurement Using New Scanning Mode and Aligned Carbon Nanotube Scanning Probe Microscope Tip." Japanese Journal of Applied Physics 45, no. 3B (2006): 1970–73. http://dx.doi.org/10.1143/jjap.45.1970.

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39

Ryu, Doo Hyeon, Jongwon Kim, and Byungki Kim. "Development of Simple Optical Triangulation Device and Its Signal Processing Software for Critical Dimension Measurement." JOURNAL OF THE KOREAN SOCIETY FOR NONDESTRUCTIVE TESTING 37, no. 5 (2017): 335–41. http://dx.doi.org/10.7779/jksnt.2017.37.5.335.

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40

Li, Dehua, Rui Guo, Soo-Young Lee, et al. "Noise filtering for accurate measurement of line edge roughness and critical dimension from SEM images." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 34, no. 6 (2016): 06K604. http://dx.doi.org/10.1116/1.4968184.

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41

Sulistiyani, Endang, and Rizqi Putri Nourma Budiarti. "Analysis of Online Learning Readiness Level at Universitas Nahdlatul Ulama Surabaya (UNUSA)." International Journal of Innovation in Enterprise System 5, no. 01 (2021): 23–34. http://dx.doi.org/10.25124/ijies.v5i01.102.

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Since a few years ago, blended learning has been implemented by UNUSA. However, until now, the implementation is still not optimal. Various obstacles, such as network access, availability of devices, and unclear rules in implementing online learning, still occur. Readiness analysis is one of the critical success in online learning implementation. The main objective of this research is to conduct online learning readiness studies at UNUSA. This research was carried out in three main stages: the preparation of measurement instruments, data collection, and analysis of readiness level. The method used is descriptive research method with quantitative and qualitative approaches. The Seakow & Samson e-learning readiness model with five dimensions of readiness, namely policy, technology, financial, human resource, and infrastructure, is used in this study. The result of this study shows that that UNUSA's level of readiness in implementing online learning is in the Ready category, requiring improvement to implement it with a readiness score of 3.68. The dimension with the highest score is technology, which is 3.84. Meanwhile, infrastructure and policy scored 3.77 and 3.72, respectively. The human resources dimension has a readiness score of 3.6. In contrast, the dimension with the lowest score is the financial dimension.

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42

Zheng, Chuanjun, Jingfeng Yuan, Lingzhi Li, and Mirosław J. Skibniewski. "Process-Based Identification of Critical Factors for Residual Value Risk in China's Highway PPP Projects." Advances in Civil Engineering 2019 (May 9, 2019): 1–21. http://dx.doi.org/10.1155/2019/5958904.

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Although the Chinese government at all levels has increasingly embraced Public-Private Partnership (PPP) as their preferred approach to deliver large-scale infrastructure since 2014, residual value risk (RVR) has been ignored in PPP practice. To systematically explore the critical risk factors (CRFs) responsible for measuring RVR in highway PPP projects, this paper proposes and refines a conceptual model composed of two risk dimensions (four risk categories) and 29 indicators through process-based viewpoint. Through literature review and expert interview, a structured questionnaire was developed to collect responses with rich working experience in construction industry or highway PPP projects. The refined measurement model with 21 CRFs was validated through mean value analysis (MVA) and confirmatory factor analysis (CFA) performed by SPSS 23.0 and AMOS 23.0, respectively. The findings indicate that 21 CRFs are significant in influencing RVR of highway PPP projects. Moreover, RVR from system dimension is mainly concentrating on institutional environment, macroeconomy, and relationship aspects, whereas financing in preconstruction, quality in construction, and market demand in operation are the most significant CRFs in nonsystem dimension. Furthermore, there is an accumulative exposure of RVR during the project process, especially in preconstruction and operation. This paper sheds light on the significance of lifecycle management on RVR and provides a practical approach for measuring RVR and implementing sustainable practice in highway or other transportation PPP projects.

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43

Abdullah, A. B., S. M. Sapuan, Z. Samad, H. M. T. Khaleed, and N. A. Aziz. "Geometrical Error Analysis of Cold Forged AUV Propeller Blade Using Optical Measurement Method." Advanced Materials Research 383-390 (November 2011): 7117–21. http://dx.doi.org/10.4028/www.scientific.net/amr.383-390.7117.

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Accuracy is the key issue in the precision forging. Geometric and dimension errors are the two significant defects found in most of near net or net shape manufacturing process. It becomes more critical for complex part such as an AUV propeller blade. In this study, geometric error was quantified by comparing the blade profile obtained from nominal geometry of the blade and the profile constructed by commercial optical method namely Alicona system.

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44

Fannon, David, Michelle Laboy, and Peter Wiederspahn. "Dimensions of Use." Enquiry A Journal for Architectural Research 15, no. 1 (2018): 25–45. http://dx.doi.org/10.17831/enq:arcc.v15i1.447.

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Dimension—the measure of extent—is the technical means and manifestation of human use embedded in architecture. Beginning in the enlightenment historic, proportional relationships between humans and architectural dimension evolved into precise measurements, becoming by the modern era indicators of efficiency, performance, and standardization. Today, the architectural dimension has become deterministic; driven by stringent codes, standards, and benchmarks tied to building program. Divorced from their originating logics and consequences on human occupation, the dimensional standards and requirements abstract people into loads or clearances: separating buildings from human experience and use. Examining dimension’s entanglement with practice and technology to provide shelter for human use illuminates the ways architecture has been thought about and the ways it is used over time. By tracing the changing concepts, metrics, standards, and technologies of architectural measurement, this article reveals the sometimes overlooked or disconnected values and considerations of use in the theory of architectural technology. This research points towards critical approaches to design based on human use, reframing building performance towards an architectural dimension of inhabitation; one that avoids standardization and reasserts human users as the measure of building.

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Harada, Tetsuo, Masato Nakasuji, Masaki Tada, Yutaka Nagata, Takeo Watanabe, and Hiroo Kinoshita. "Critical Dimension Measurement of an Extreme-Ultraviolet Mask Utilizing Coherent Extreme-Ultraviolet Scatterometry Microscope at NewSUBARU." Japanese Journal of Applied Physics 50, no. 6S (2011): 06GB03. http://dx.doi.org/10.7567/jjap.50.06gb03.

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Orji, Ndubuisi G. "Progress on implementation of a reference measurement system based on a critical-dimension atomic force microscope." Journal of Micro/Nanolithography, MEMS, and MOEMS 6, no. 2 (2007): 023002. http://dx.doi.org/10.1117/1.2728742.

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Settens, Charles, Aaron Cordes, Benjamin Bunday, et al. "Assessment of critical dimension small-angle x-ray scattering measurement approaches for FinFET fabrication process monitoring." Journal of Micro/Nanolithography, MEMS, and MOEMS 13, no. 4 (2014): 041408. http://dx.doi.org/10.1117/1.jmm.13.4.041408.

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Fukuda, Hiroshi, Yoshinori Momonoi, and Kei Sakai. "Estimating extremely low probability of stochastic defect in extreme ultraviolet lithography from critical dimension distribution measurement." Journal of Micro/Nanolithography, MEMS, and MOEMS 18, no. 02 (2019): 1. http://dx.doi.org/10.1117/1.jmm.18.2.024002.

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Harada, Tetsuo, Masato Nakasuji, Masaki Tada, Yutaka Nagata, Takeo Watanabe, and Hiroo Kinoshita. "Critical Dimension Measurement of an Extreme-Ultraviolet Mask Utilizing Coherent Extreme-Ultraviolet Scatterometry Microscope at NewSUBARU." Japanese Journal of Applied Physics 50, no. 6 (2011): 06GB03. http://dx.doi.org/10.1143/jjap.50.06gb03.

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Lu, Junfei, Chu-Ling Lo, Na Mi Bang, and Devon Romero. "A Critical Review of Spiritual Well-Being Scales: Implications for Research, Practice, and Education in Rehabilitation Counseling." Rehabilitation Counseling Bulletin 62, no. 3 (2018): 144–56. http://dx.doi.org/10.1177/0034355218776764.

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The primary goal of rehabilitation counseling services is to holistically enhance quality of life (QOL) of persons with disabilities. However, the spiritual dimension of QOL may be the area least attended to by both rehabilitation counselors and counselor educators. It is imperative to raise attention to and understanding of this dimension and specifically its main indicator—spiritual well-being (SWB). In response, the authors of this study reviewed and examined 15 SWB scales regarding scale domains, item generation, selected sample, scaling approaches, as well as psychometric properties (i.e., reliability and validity). The results raised various issues that should be considered by professionals in rehabilitation counseling when studying SWB and its measurement. Implications were provided with regard to research, practice, and teaching on the topic of SWB in rehabilitation counseling.

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