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Journal articles on the topic 'Cross-axis sensitivity'

Author: Grafiati

Published: 4 June 2021

Last updated: 1 February 2022

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1

He, Chang De, Wen Dong Zhang, Ji Jun Xiong, Chen Yang Xue, and Gui Xiong Shi. "A Monolithic Three-Axis Accelerometer with Low Cross-Axis Sensitivity." Advanced Materials Research 403-408 (November 2011): 691–96. http://dx.doi.org/10.4028/www.scientific.net/amr.403-408.691.

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A 50,000g three-axis accelerometer using a single proof mass is presented. The sensitive structure is made of a single proof mass and eight cantilever beams. Twelve piezoresistors are placed on the cantilevers symmetrically, which can be used to detect 3-dimensional acceleration. The symmetric placement of the piezoresistors brings the reasonable sensitivity and simultaneously decreases the cross-axis sensitivity significantly. Simulation results show that the sensitivity in X-, Y- and Z-axis are 0.806uV/g, 0.806uV/g and 3.71uV/g respectively with 5V supply and the cross-axis sensitivities are all less than 2.4%, which ensures the high performance of the three-axis accelerometer.

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2

Guerinoni, Luca, Luca Giuseppe Falorni, and Gabriele Gattere. "Modelling Cross Axis Sensitivity in MEMS Coriolis Vibratory Gyroscopes." Proceedings 1, no. 4 (August 17, 2017): 281. http://dx.doi.org/10.3390/proceedings1040281.

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3

Lu, Qianbo, Chen Wang, Jian Bai, Kaiwei Wang, Shuqi Lou, Xufen Jiao, Dandan Han, Guoguang Yang, Dong Liu, and Yongying Yang. "Minimizing cross-axis sensitivity in grating-based optomechanical accelerometers." Optics Express 24, no. 8 (April 15, 2016): 9094. http://dx.doi.org/10.1364/oe.24.009094.

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4

OʼLEARY, DANIEL J., PHEI HUA YANG, and CHWEE HONG YEO. "Effect of Cross Cylinder Power on Cylinder Axis Sensitivity." Optometry and Vision Science 64, no. 5 (May 1987): 367–69. http://dx.doi.org/10.1097/00006324-198705000-00011.

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5

Din, Hussamud, Faisal Iqbal, and Byeungleul Lee. "Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope." Micromachines 12, no. 8 (July 29, 2021): 902. http://dx.doi.org/10.3390/mi12080902.

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In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis sensitivity using COMSOL Multiphysics. A design technique named the “ratio-matching method” of drive displacement amplitudes and sense frequency differences ratios was proposed to reduce the cross-axis sensitivity. Initially, the cross-axis sensitivities in the designed gyroscope for x and y-axis were calculated to be 0.482% and 0.120%, respectively, having an average CAS of 0.301%. Using the proposed ratio-matching method and design technique, the individual cross-axis sensitivities in the designed gyroscope for x and y-axis were reduced to 0.018% and 0.073%, respectively. While the average CAS was reduced to 0.045%, showing a reduction rate of 85.1%. Moreover, the proposed ratio-matching method for cross-axis sensitivity reduction was successfully validated through simulations by varying the coupling spring position and sense frequency difference variation analyses. Furthermore, the proposed methodology was verified experimentally using fabricated single-drive multi-axis gyroscope.

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6

Li, Xi Sheng, Rui Qing Kang, Yan Xia Liu, Zhi Hua Wang, and Xiong Ying Shu. "High Accuracy AMR Magnetometer and its Application to Vehicle Detection." Advanced Materials Research 443-444 (January 2012): 150–55. http://dx.doi.org/10.4028/www.scientific.net/amr.443-444.150.

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The anisotropic magnetoresistive (AMR) sensors provide an excellent means of measuring the earth’s magnetic field. Low cost, high sensitivity, small size, noise immunity, and reliability are advantages of AMR sensor over other electrical alternatives. But the sensitivity of constant voltage biased AMR sensor changes greatly with the temperature of surrounding and cross-axis field. In this paper, constant current bias is used in order to reduce the sensitivity temperature coefficient of AMR sensor. At the same time, cross-axis field compensation is taken based on iteration. The results of experiment show that the sensitivity of HMC100x without cross-axis field compensation varies greatly with the variation of cross-axis field, the sensitivity of HMC100x with cross-axis field compensation is stable. It can be seen that proposed sensitivity compensation method is effective. Developed magnetometer is used for vehicle detection. Experimental results show that developed magnetometer is capable of detecting vehicle and its output variation curve shape is different for the ferrous cart moves over sensor along different direction.

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7

Mohammed, Zakriya, Waqas A. Gill, and Mahmoud Rasras. "Double-Comb-Finger Design to Eliminate Cross-Axis Sensitivity in a Dual-Axis Accelerometer." IEEE Sensors Letters 1, no. 5 (October 2017): 1–4. http://dx.doi.org/10.1109/lsens.2017.2756108.

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8

Hsu, Yu-Wen, Jen-Yi Chen, Hsin-Tang Chien, Sheah Chen, Shih-Ting Lin, and Lu-Po Liao. "New capacitive low-gtriaxial accelerometer with low cross-axis sensitivity." Journal of Micromechanics and Microengineering 20, no. 5 (April 23, 2010): 055019. http://dx.doi.org/10.1088/0960-1317/20/5/055019.

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9

Sim, J. H., D. K. Kim, Y. H. Bae, K. H. Nam, and J. H. Lee. "Six-beam piezoresistive accelerometer with self-cancelling cross-axis sensitivity." Electronics Letters 34, no. 5 (1998): 497. http://dx.doi.org/10.1049/el:19980354.

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10

Ravi Sankar, A., S. Das, and S. K. Lahiri. "Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer." Microsystem Technologies 15, no. 4 (November 20, 2008): 511–18. http://dx.doi.org/10.1007/s00542-008-0740-y.

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11

Wang, Jian Yan, Ting Ting Wang, and Hang Guo. "A New Design of a Piezoelectric Triaxial Micro-Accelerometer." Key Engineering Materials 645-646 (May 2015): 841–46. http://dx.doi.org/10.4028/www.scientific.net/kem.645-646.841.

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Accelerometer in MEMS always is made by capacitive or piezoresistive, whose dynamic response is not good, the operating frequency is narrow, and the cross-axis sensitivity is low. A new type of piezoelectric micro-accelerometer is designed, and its structure is “x” type. The sensing unit is piezoelectric PZT films, which is achieved by sol-gel method. The accelerometer is a triaxial accelerometer. The theoretical and simulation analysis is used to achieve the charge sensitivity and response frequency, and also get the optimal structural parameters. A new circuit connection is proposed to improve the sensitivity and avoid the cross-axis sensitivity. The design achieves the z-axis sensitivity with more than 40 pC/g, x, y-axis sensitivity with more than 8pC/g, and the response frequency is about 3000Hz.

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12

Liu, Yan, Hai Wang, Hongbo Qin, and Yongqiang Xie. "Performance enhancement for piezoresistive microaccelerometer by geometrical design: a focused review." Sensor Review 35, no. 3 (June 15, 2015): 310–18. http://dx.doi.org/10.1108/sr-01-2015-0019.

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Purpose – This paper aims to provide a focused review on the geometrical designs for performance enhancement of piezoresistive microaccelerometers. Design/methodology/approach – By analyzing working principle and conventional geometries, the improved research proposals are sorted into three groups in terms of their anticipated objectives, including sensitivity, resonant frequency and cross-axis sensitivity. Accessible methods are outlined and their merits and demerits are described. Findings – Novel geometries obviously enhance the performance of accelerometers, and the efficacy can be further elevated by newer materials and fabrication processes. Research limitations/implications – This paper mainly focused on the improved geometrical designs for sensitivity, resonant frequency and cross-axis sensitivity. Other performance parameters or design schemes are not included in this paper. Originality/value – This paper generalizes the available geometries and methods for the enhancement of sensitivity, resonant frequency and cross-axis sensitivity in piezoresistive accelerometers design.

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13

Hu, Qifang, Chengchen Gao, Yilong Hao, Yangxi Zhang, and Gang Yang. "Low cross-axis sensitivity micro-gravity microelectromechanical system sandwich capacitance accelerometer." Micro & Nano Letters 6, no. 7 (2011): 510. http://dx.doi.org/10.1049/mnl.2011.0137.

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14

Liu, Yan, Yulong Zhao, Bian Tian, Lu Sun, Zhongliang Yu, and Zhuangde Jiang. "Analysis and design for piezoresistive accelerometer geometry considering sensitivity, resonant frequency and cross-axis sensitivity." Microsystem Technologies 20, no. 3 (August 7, 2013): 463–70. http://dx.doi.org/10.1007/s00542-013-1894-9.

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15

Farahani, Hamed, James K. Mills, and William L. Cleghorn. "Design, fabrication and analysis of micromachined high sensitivity and 0% cross-axis sensitivity capacitive accelerometers." Microsystem Technologies 15, no. 12 (September 1, 2009): 1815–26. http://dx.doi.org/10.1007/s00542-009-0895-1.

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16

Wung, Tzong-Shyan, Yu-Tzong Ning, Kai-Hsiang Chang, Shin Tang, and Yu-Xuan Tsai. "Vertical-plate-type microaccelerometer with high linearity and low cross-axis sensitivity." Sensors and Actuators A: Physical 222 (February 2015): 284–92. http://dx.doi.org/10.1016/j.sna.2014.11.020.

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17

TSUCHIYA, Toshiyuki, Atsushi NAKANO, Akira UMEDA, and Osamu TABATA. "701 Analysis of Dynamic Cross Sensitivity of Capacitive Three-axis MEMS Accelerometer." Proceedings of the Dynamics & Design Conference 2012 (2012): _701–1_—_701–7_. http://dx.doi.org/10.1299/jsmedmc.2012._701-1_.

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18

Niu, Wenju, Rongyu Huang, Jianqiang Han, and Lizhen Dong. "A Dual-Axis Bulk Micromachined Resonant Accelerometer With Low Cross-Axis Sensitivity Fabricated With Masked–Maskless Etching." IEEE Sensors Journal 19, no. 1 (January 1, 2019): 78–87. http://dx.doi.org/10.1109/jsen.2018.2875036.

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19

Mohanty, Tapas Kumar. "Design and Analysis of MEMS-Based Piezoresistive Accelerometer with Low Cross-Axis Sensitivity." IOSR Journal of Engineering 03, no. 04 (April 2013): 54–59. http://dx.doi.org/10.9790/3021-03415459.

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20

Han, Jianqiang, Zhengqian Zhao, Wenju Niu, Rongyu Huang, and Lizhen Dong. "A low cross-axis sensitivity piezoresistive accelerometer fabricated by masked-maskless wet etching." Sensors and Actuators A: Physical 283 (November 2018): 17–25. http://dx.doi.org/10.1016/j.sna.2018.09.040.

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21

ECHIZEN, Haruka, Yasutaka TAGAWA, and Mineki OKAMOTO. "335 Cross-axis sensitivity analysis and control of 3-DOF electrodynamic shaking system." Proceedings of the Dynamics & Design Conference 2010 (2010): _335–1_—_335–6_. http://dx.doi.org/10.1299/jsmedmc.2010._335-1_.

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22

Biswas, Sonali, and Anup Kumar Gogoi. "A wearable piezoresistive microaccelerometer with low cross-axis sensitivity for neurological disease diagnosis." AEU - International Journal of Electronics and Communications 99 (February 2019): 177–85. http://dx.doi.org/10.1016/j.aeue.2018.11.001.

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23

Hari, K., Satish Kumar Verma, I. R. Praveen Krishna, and V. Seena. "Out-of-plane dual flexure MEMS piezoresistive accelerometer with low cross axis sensitivity." Microsystem Technologies 24, no. 5 (December 22, 2017): 2437–44. http://dx.doi.org/10.1007/s00542-017-3679-z.

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24

Gao, Shan, Zhen Zhou, Xiaowei Bi, and Lishuang Feng. "A Low Cross-Axis Sensitivity Micro-Grating Accelerometer With Double-Layer Cantilever Beams." IEEE Sensors Journal 21, no. 15 (August 1, 2021): 16503–9. http://dx.doi.org/10.1109/jsen.2021.3077303.

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25

Лысенко, И. Е., О. А. Ежова, А. В. Ткаченко, and Д. В. Науменко. "ИССЛЕДОВАНИЕ ТРЕХОСЕВОГО МИКРОМЕХАНИЧЕСКОГО АКСЕЛЕРОМЕТРА." NANOINDUSTRY Russia 96, no. 3s (June 15, 2020): 411–15. http://dx.doi.org/10.22184/1993-8578.2020.13.3s.411.415.

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Исследована конструкция сенсора линейного ускорения с тремя осями чувствительности. На основании результатов исследования определены чувствительность трехосного сенсора, перекрестная чувствительность, длительность переходных процессов. В рамках работы изготовлены опытные образцы сенсоров. The paper highlights the linear acceleration sensor design with three axis of sensitivity the basis of the research results Three-axis device sensitivity, cross-sensitivity, and duration transients have been specified on. As part of the work the experimental sensor prototypes have been fabricated.

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26

Liu, Yu, Zhi Yu Wen, Li Chen, and Hong Yun Yang. "Design and Simulation of a Capacitive Biaxial Microaccelerometer." Key Engineering Materials 503 (February 2012): 194–98. http://dx.doi.org/10.4028/www.scientific.net/kem.503.194.

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This paper presents a capacitive biaxial microaccelerometer with a single proof mass. The theoretical analysis results are conﬁrmed by ﬁnite element analysis. The experimental results indicate the biaxial accelerometer with uniform axial sensitivities, good linearity and high cross-axis sensitivity immunity to the z-axis input.

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27

Nguyen, M. N., L. Q. Nguyen, H. M. Chu, and H. N. Vu. "A two degrees of freedom comb capacitive-type accelerometer with low cross-axis sensitivity." Journal of Mechanical Engineering and Sciences 13, no. 3 (September 27, 2019): 5334–46. http://dx.doi.org/10.15282/jmes.13.3.2019.09.0435.

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In this paper, we report on a SOI-based comb capacitive-type accelerometer that senses acceleration in two lateral directions. The structure of the accelerometer was designed using a proof mass connected by four folded-beam springs, which are compliant to inertial displacement causing by attached acceleration in the two lateral directions. At the same time, the folded-beam springs enabled to suppress cross-talk causing by mechanical coupling from parasitic vibration modes. The differential capacitor sense structure was employed to eliminate common mode effects. The design of gap between comb fingers was also analyzed to find an optimally sensing comb electrode structure. The design of the accelerometer was carried out using the finite element analysis. The fabrication of the device was based on SOI-micromachining. The characteristics of the accelerometer have been investigated by a fully differential capacitive bridge interface using a sub-fF switched-capacitor integrator circuit. The sensitivities of the accelerometer in the two lateral directions were determined to be 6 and 5.5 fF/g, respectively. The cross-axis sensitivities of the accelerometer were less than 5%, which shows that the accelerometer can be used for measuring precisely acceleration in the two lateral directions. The accelerometer operates linearly in the range of investigated acceleration from 0 to 4g. The proposed accelerometer is expected for low-g applications.

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28

Hang, Bui Thu, Tran Duc Tan, and Chu Duc Trinh. "Three-axis piezoresistive accelerometer with adjustable axial resolutions." Vietnam Journal of Mechanics 34, no. 1 (March 1, 2012): 45–54. http://dx.doi.org/10.15625/0866-7136/34/1/427.

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A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.

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29

Bruschi, P., A. Nannini, D. Paci, and F. Pieri. "A method for cross-sensitivity and pull-in voltage measurement of MEMS two-axis accelerometers." Sensors and Actuators A: Physical 123-124 (September 2005): 185–93. http://dx.doi.org/10.1016/j.sna.2005.04.028.

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30

Zhao, Minghui, Xueyong Wei, Hongwu Bai, and Hairong Wang. "Design and simulation of a MEMS Fabry–Perot accelerometer with ultra-low cross-axis sensitivity." Smart Materials and Structures 29, no. 8 (July 8, 2020): 085029. http://dx.doi.org/10.1088/1361-665x/ab99d8.

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31

Todorovska, Maria I. "Cross-axis sensitivity of accelerographs with pendulum like transducers—mathematical model and the inverse problem." Earthquake Engineering & Structural Dynamics 27, no. 10 (October 1998): 1031–51. http://dx.doi.org/10.1002/(sici)1096-9845(199810)27:10<1031::aid-eqe766>3.0.co;2-1.

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32

Mohammed, Zakriya, Ibrahim Elfadel, and Mahmoud Rasras. "Monolithic Multi Degree of Freedom (MDoF) Capacitive MEMS Accelerometers." Micromachines 9, no. 11 (November 16, 2018): 602. http://dx.doi.org/10.3390/mi9110602.

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With the continuous advancements in microelectromechanical systems (MEMS) fabrication technology, inertial sensors like accelerometers and gyroscopes can be designed and manufactured with smaller footprint and lower power consumption. In the literature, there are several reported accelerometer designs based on MEMS technology and utilizing various transductions like capacitive, piezoelectric, optical, thermal, among several others. In particular, capacitive accelerometers are the most popular and highly researched due to several advantages like high sensitivity, low noise, low temperature sensitivity, linearity, and small footprint. Accelerometers can be designed to sense acceleration in all the three directions (X, Y, and Z-axis). Single-axis accelerometers are the most common and are often integrated orthogonally and combined as multiple-degree-of-freedom (MDoF) packages for sensing acceleration in the three directions. This type of MDoF increases the overall device footprint and cost. It also causes calibration errors and may require expensive compensations. Another type of MDoF accelerometers is based on monolithic integration and is proving to be effective in solving the footprint and calibration problems. There are mainly two classes of such monolithic MDoF accelerometers, depending on the number of proof masses used. The first class uses multiple proof masses with the main advantage being zero calibration issues. The second class uses a single proof mass, which results in compact device with a reduced noise floor. The latter class, however, suffers from high cross-axis sensitivity. It also requires very innovative layout designs, owing to the complicated mechanical structures and electrical contact placement. The performance complications due to nonlinearity, post fabrication process, and readout electronics affects both classes of accelerometers. In order to effectively compare them, we have used metrics such as sensitivity per unit area and noise-area product. This paper is devoted to an in-depth review of monolithic multi-axis capacitive MEMS accelerometers, including a detailed analysis of recent advancements aimed at solving their problems such as size, noise floor, cross-axis sensitivity, and process aware modeling.

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33

Szymczak, Czesław, and Marcin Kujawa. "Sensitivity analysis of free torsional vibration frequencies of thin-walled laminated beams under axial load." Continuum Mechanics and Thermodynamics 32, no. 5 (November 15, 2019): 1347–56. http://dx.doi.org/10.1007/s00161-019-00847-2.

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AbstractThe paper addresses sensitivity analysis of free torsional vibration frequencies of thin-walled beams of bisymmetric open cross section made of unidirectional fibre-reinforced laminate. The warping effect and the axial end load are taken into account. The consideration is based upon the classical theory of thin-walled beams of non-deformable cross section. The first-order sensitivity variation of the frequencies is derived with respect to the design variable variations. The beam cross-sectional dimensions and the material properties are assumed the design variables undergoing variations. The paper includes a numerical example related to simply supported I-beams and the distributions of sensitivity functions of frequencies along the beam axis. Accuracy is discussed of the first-order sensitivity analysis in the assessment of frequency changes due to the fibre volume fraction variable variations, and the effect of axial loads is discussed too.

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34

SUDARSHAN, VIDYA K., E. Y. K. NG, U. RAJENDRA ACHARYA, RU SAN TAN, SIAW MENG CHOU, and DHANJOO N. GHISTA. "INFARCTED LEFT VENTRICLE CLASSIFICATION FROM CROSS-SECTIONAL ECHOCARDIOGRAMS USING RELATIVE WAVELET ENERGY AND ENTROPY FEATURES." Journal of Mechanics in Medicine and Biology 16, no. 01 (February 2016): 1640009. http://dx.doi.org/10.1142/s0219519416400091.

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Parasternal and apical echocardiography images captured from different cross-sectional planes (short-axis and four chambers) convey significant information about the structure and function of infarcted Left Ventricular (LV) myocardium. Thus, features from these cross-sectional views of echocardiograms extracted using computer-aided techniques may aid in characterizing Myocardial Infarction (MI). Therefore, this paper proposes a new algorithm for automated MI characterization using features extracted from parasternal short axis and apical four chambers cross-sectional views of 160 subjects (80 with MI and 80 normal) echocardiograms. The Stationary Wavelet Transform (SWT) method is used to extract the Relative Wavelet Energy and Entropy (RWE and RWEnt) features from the two cross-sectional views of echocardiography images separately. These features are ranked and subjected to classification in two different steps: (i) the features from each view are separately ranked using entropy, t-test and Wilcoxon ranking tests and fed to the classifier, and (ii) later, the features from both the views are combined and ranked. Finally, these ranked features are subjected to the Support Vector Machine (SVM) classifier for characterization of normal and MI using a minimum number of features. The proposed method is able to identify MI with 95.0% of accuracy, 93.7% of sensitivity and 96.2% of specificity using 32 features extracted from parasternal short-axis view; an accuracy of 96.2%, sensitivity of 97.5% and specificity of 95.0% with 18 apical four chamber view features. The results show that by combining the features from both views enables the confirmation of MI LVs with an accuracy of 96.8%, sensitivity of 93.7% and specificity of 100% using 16 features extracted from only two frames. Software development is in progress which can be incorporated into the echocardiography ultrasound machine for automated detection of MI patients.

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35

Wang, Grace I., and Bertrand Delgutte. "Sensitivity of cochlear nucleus neurons to spatio-temporal changes in auditory nerve activity." Journal of Neurophysiology 108, no. 12 (December 15, 2012): 3172–95. http://dx.doi.org/10.1152/jn.00160.2012.

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The spatio-temporal pattern of auditory nerve (AN) activity, representing the relative timing of spikes across the tonotopic axis, contains cues to perceptual features of sounds such as pitch, loudness, timbre, and spatial location. These spatio-temporal cues may be extracted by neurons in the cochlear nucleus (CN) that are sensitive to relative timing of inputs from AN fibers innervating different cochlear regions. One possible mechanism for this extraction is “cross-frequency” coincidence detection (CD), in which a central neuron converts the degree of coincidence across the tonotopic axis into a rate code by preferentially firing when its AN inputs discharge in synchrony. We used Huffman stimuli (Carney LH. J Neurophysiol 64: 437–456, 1990), which have a flat power spectrum but differ in their phase spectra, to systematically manipulate relative timing of spikes across tonotopically neighboring AN fibers without changing overall firing rates. We compared responses of CN units to Huffman stimuli with responses of model CD cells operating on spatio-temporal patterns of AN activity derived from measured responses of AN fibers with the principle of cochlear scaling invariance. We used the maximum likelihood method to determine the CD model cell parameters most likely to produce the measured CN unit responses, and thereby could distinguish units behaving like cross-frequency CD cells from those consistent with same-frequency CD (in which all inputs would originate from the same tonotopic location). We find that certain CN unit types, especially those associated with globular bushy cells, have responses consistent with cross-frequency CD cells. A possible functional role of a cross-frequency CD mechanism in these CN units is to increase the dynamic range of binaural neurons that process cues for sound localization.

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36

Merdassi, Adel, Mohamed Nizar Kezzo, George Xereas, and Vamsy P. Chodavarapu. "Wafer level vacuum encapsulated tri-axial accelerometer with low cross-axis sensitivity in a commercial MEMS Process." Sensors and Actuators A: Physical 236 (December 2015): 25–37. http://dx.doi.org/10.1016/j.sna.2015.10.014.

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37

Li, Wei, Lu Feng Che, Xiao Lin Li, Jian Wu, and Yue Lin Wang. "A Novel Z-Axis Capacitance Accelerometer with Highly Symmetrical 16-Beam Structure." Key Engineering Materials 562-565 (July 2013): 412–16. http://dx.doi.org/10.4028/www.scientific.net/kem.562-565.412.

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A novel highly symmetrical 16-beam sandwich structure Z-axis differential capacitance accelerometer is presented. In this design, the proof mass is suspended symmetrically by double-side of 16 straight beams with highly uniform dimension which can reduce the cross-axis sensitivity and rotational influences dramatically. Parameters of the beam-mass structure were analyzed and optimized by finite element analysis (FEA) software. The micro accelerometer is based on bulk-micromachining by DRIE and KOH anisotropic wet etching technologies. The beam-mass structure was released by anisotropic wet etching on both device layer sides simultaneously. The fabricated accelerometer was measured over the maximum range of 30g gravity field, results of measurement show that the close-loop sensitivity is 80mV/g, the nonlinearity is 0.27%, and the bias stability is 0.63mg for an hour.

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38

Yuan, Fei, Li Guo Chen, Tao Chen, and Li Ning Sun. "Micromachined Tri-Axis Capacitive Accelerometer Based on the Single Mass." Key Engineering Materials 645-646 (May 2015): 630–35. http://dx.doi.org/10.4028/www.scientific.net/kem.645-646.630.

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A novel micromachined tri-axis capacitive accelerometer based on the single mass is proposed in this paper. The presented accelerometer contains a single proof mass acting as the sensitive element which is suspended by two flexible beams above the substrate, and an array of movable and fixed electrodes is utilized. To match the sensitivity design requirement, the differential capacitive detection is utilized, and the cross-sensitivity problem of three orthogonal axes is avoided ideally. The accelerometer structure is based on the EPI-poly process to realize the 18 microns thickness. Thus the detection capacitance, sensitivity and reliability are improved, the mechanical noise is decreased. To reduce the thermomechanical stress’ effect on the offset, a special anchor-middle structure is designed. Simulation results show that the offset is insensitive to the thermomechanical stresses and the sensor has a good consistency in three axes which has been validated by the testing results.

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39

Liu, Li Ping, Li Shen, Mao Jiang Song, Fei Yang, Feng Han, and Peng Fei Hu. "Adjusting Methods of the Off-Axis Parabolic Mirror in Terahertz Time Domain System." Applied Mechanics and Materials 713-715 (January 2015): 2119–22. http://dx.doi.org/10.4028/www.scientific.net/amm.713-715.2119.

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According to the geometric optics, off-axis parabolic mirrors are used in terahertz time domain system for focusing the terahertz pulse. Theoretically, the focus of the parabolic reflector to eliminate the effects of spherical aberration, but a very high sensitivity to its optical axis misalignment, subtle misalignment will reduce the focal spot quality and therefore the need for precision optical axis adjustment is important. This article discusses terahertz time-domain spectroscopy system adjustment method in four off-axis parabolic mirror, after many experiments have proved feasible. In this work, two optical path adjustment methods were analyzed. The first approach is based on adjustment of spot shape from collimation and focus. In the second method, depend on the principle that the incident light path is different from reflected light path in parabolic cross section. Through testing this two methods have been proved feasible.

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Cui, Q., D. Liu, B. Xiang, Q. Sun, L. Fan, M. He, Y. Wang, X. Zhu, and H. Ye. "Morning Serum Cortisol as a Predictor for the HPA Axis Recovery in Cushing’s Disease." International Journal of Endocrinology 2021 (September 3, 2021): 1–6. http://dx.doi.org/10.1155/2021/4586229.

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Background. The suppressed hypothalamic-pituitary-adrenal (HPA) axis after successful surgery for Cushing’s disease (CD) will recover in almost all patients. We aimed to identify the predictive factors for HPA axis recovery in CD patients with postoperative remission. Design and Methods. This observational retrospective cross-sectional study enrolled 69 CD patients with postoperative remission in Huashan Hospital from 2015 to 2019. All subjects had a detailed clinical evaluation. The low-dose ACTH stimulation test (LDT) was conducted as the gold standard for assessing the HPA axis function. Results. Peak cortisol in LDT was found only to be positively correlative with morning serum cortisol (MSC) ( ρ = 0.451 , p < 0.001 ). The MSC was higher ( p < 0.001 ), and the median postoperative course was significantly longer ( p = 0.025 ) in the patients with the recovered HPA axis function compared with unrecovered patients. The AUC value of MSC for predicting the recovery of the HPA axis was 0.701, and the optimal cutoff was 6.25 μg/dl (sensitivity 85.19% and specificity 47.62%). Other useful cutoff values were 10.74 μg/dl (specificity 100%) and 4.18 μg/dl (sensitivity 100%). Besides, combined with the postoperative course, the AUC values were higher than MSC alone (0.935 vs. 0.701, p < 0.001 ). Conclusions. MSC is a viable first-step diagnostic predictor for HPA axis recovery in CD patients with postoperative remission. For the patients with cortisol levels between 4.18 and 10.74 μg/dl, a confirmatory test should be conducted. When the MSC level was 10.74 μg/dl or greater, the replacement therapy could be discontinued.

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Rio, Purwati Pole, Hariadi Hariawan, Dyah Wulan Anggrahini, Anggoro Budi Hartopo, and Lucia Kris Dinarti. "The Accuracy of Combined Electrocardiogram Criteria to Diagnose Right Atrial Enlargement in Adults With Uncorrected Secundum Atrial Septal Defect." Clinical Medicine Insights: Cardiology 13 (January 2019): 117954681986994. http://dx.doi.org/10.1177/1179546819869948.

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Background: Right atrium (RA) enlargement in uncorrected atrial septal defect (ASD) is due to chronic volume overload. Several electrocardiogram (ECG) criteria had been proposed for screening RA enlargement. This study aimed to compare the accuracy of ECG criteria in detecting RA enlargement in adults with uncorrected ASD. Methods: This was a cross-sectional study involving 120 adults with uncorrected secundum ASD. The subjects underwent ECG examination, transthoracic echocardiography, and right heart catheterization. An RA enlargement was determined with RA volume index by transthoracic echocardiography. Various ECG and combined ECG criteria were evaluated. Statistical analysis was performed to analyze the sensitivity, specificity, accuracy, positive predictive value (PPV), and negative predictive value (NPV). Results: An RA enlargement was detected in 64.2% subjects. The P wave height > 2.5 mm in lead II criterion had the best specificity (100%) and PPV (100%), but low sensitivity (19%) and accuracy (48%). The combined 2 ECG criteria (QRS axis > 90°, R/S ratio > 1 in V1) had 82% sensitivity, 56% specificity, 73% accuracy, 77% PPV, and 63% NPV. The combined 3 ECG criteria (QRS axis > 90°, R/S ratio > 1 in V1, and P wave height > 1.5 mm in V2) had 35% sensitivity, 86% specificity, 53% accuracy, 82% PPV, and 43% NPV. Conclusions: The combined 2 ECG criteria (QRS axis > 90° and R/S ratio > 1 in V1) had increased sensitivity, better accuracy, and more balance of PPV and NPV as compared with P wave > 2.5 mm in II criterion and combined 3 ECG criteria to diagnose RA enlargement in adults with uncorrected ASD.

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Zhao, Wang, and Wen. "Fabrication and Characteristics of a SOI Three-Axis Acceleration Sensor Based on MEMS Technology." Micromachines 10, no. 4 (April 9, 2019): 238. http://dx.doi.org/10.3390/mi10040238.

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A silicon-on-insulator (SOI) piezoresistive three-axis acceleration sensor, consisting of four L-shaped beams, two intermediate double beams, two masses, and twelve piezoresistors, was presented in this work. To detect the acceleration vector (ax, ay, and az) along three directions, twelve piezoresistors were designed on four L-shaped beams and two intermediate beams to form three detecting Wheatstone bridges. A sensitive element simulation model was built using ANSYS finite element simulation software to investigate the cross-interference of sensitivity for the proposed sensor. Based on that, the sensor chip was fabricated on a SOI wafer by using microelectromechanical system (MEMS) technology and packaged on a printed circuit board (PCB). At room temperature and VDD = 5.0 V, the sensitivities of the sensor along x-axis, y-axis, and z-axis were 0.255 mV/g, 0.131 mV/g, and 0.404 mV/g, respectively. The experimental results show that the proposed sensor can realize the detection of acceleration along three directions.

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Alfaifi, Ahmad, Karim Allidina, Frederic Nabki, and Mourad N. El-Gamal. "A low cross-sensitivity dual-axis silicon-on-insulator accelerometer integrated as a system in package with digital output." Analog Integrated Circuits and Signal Processing 77, no. 3 (October 9, 2013): 345–54. http://dx.doi.org/10.1007/s10470-013-0186-8.

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Ravi Sankar, A., and S. Das. "A very-low cross-axis sensitivity piezoresistive accelerometer with an electroplated gold layer atop a thickness reduced proof mass." Sensors and Actuators A: Physical 189 (January 2013): 125–33. http://dx.doi.org/10.1016/j.sna.2012.09.025.

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Chi, Shihong, and Xiaoming Tang. "Stoneley-wave speed modeling in general anisotropic formations." GEOPHYSICS 71, no. 4 (July 2006): F67—F77. http://dx.doi.org/10.1190/1.2216928.

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For determining anisotropy using acoustic logging data, Stoneley waves are the only wave modes that are sensitive to formation properties transverse to the borehole axis. We derive Stoneley-wave speeds in deviated and horizontal wells penetrating anisotropic formations. We first apply the elastic theory of an anisotropic body to find the radial displacement of a borehole cross section under uniform pressure. We then derive the effective formation modulus based on quasistatic analysis. Finally, we derive a two-dimensional analytical solution for low-frequency Stoneley-wave speed in a horizontal well penetrating a transversely isotropic formation with a vertical symmetry axis. For deviated wells, we derive a 3D analytical solution that is also valid for general anisotropic formations. Our analytic solutions agree with the finite-difference modeling results and are particularly suited for strongly anisotropic formations. With increasing well deviation the sensitivity of Stoneley-wave speed to horizontal shear-wave velocity decreases and the sensitivity to vertical shear-wave velocity increases.

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Malayappan, Balasubramanian, Narayan Krishnaswamy, and Prasant Kumar Pattnaik. "Novel High-Resolution Lateral Dual-Axis Quad-Beam Optical MEMS Accelerometer Using Waveguide Bragg Gratings." Photonics 7, no. 3 (July 18, 2020): 49. http://dx.doi.org/10.3390/photonics7030049.

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A novel lateral dual-axis a-Si/SiO2 waveguide Bragg grating based quad-beam accelerometer with high-resolution and large linear range has been presented in this paper. The sensor consists of silicon bulk micromachined proof mass suspended by silica beams. Three ridge gratings are positioned on the suspending beam and proof mass to maximize sensitivity and reduce noise. Impact of external acceleration in the sensing direction on the Bragg wavelength of gratings and MEMS structure has been modelled including the effects of strain, stress and temperature variation. Acceleration induces stress in the beam thus modifying the grating period and introducing chirp. The differential wavelength shift with respect to reference grating on the proof mass is the measure of acceleration. To compensate for the effect of the weight of the proof mass and increase the sensitivity of the sensor, electrostatic force of repulsion is applied to the proof mass. For the chosen parameters, the designed sensor has a linear response over a large range and a sensitivity of 30 pm/g. The temperature of surroundings, which acts as noise in sensor performance is compensated by taking differential wavelength shift with respect to reference grating. By design and choice of material, low cross-axis sensitivity is achieved. The proposed design enables a high-resolution well below 1 μ g/ Hz and is suitable for inertial navigation and seismometry applications.

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Westerhof, Berend E., Janneke Gisolf, John M. Karemaker, Karel H. Wesseling, Niels H. Secher, and Johannes J. van Lieshout. "Time course analysis of baroreflex sensitivity during postural stress." American Journal of Physiology-Heart and Circulatory Physiology 291, no. 6 (December 2006): H2864—H2874. http://dx.doi.org/10.1152/ajpheart.01024.2005.

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Postural stress requires immediate autonomic nervous action to maintain blood pressure. We determined time-domain cardiac baroreflex sensitivity (BRS) and time delay (τ) between systolic blood pressure and interbeat interval variations during stepwise changes in the angle of vertical body axis (α). The assumption was that with increasing postural stress, BRS becomes attenuated, accompanied by a shift in τ toward higher values. In 10 healthy young volunteers, α included 20 degrees head-down tilt (−20°), supine (0°), 30 and 70 degrees head-up tilt (30°, 70°), and free standing (90°). Noninvasive blood pressures were analyzed over 6-min periods before and after each change in α. The BRS was determined by frequency-domain analysis and with xBRS, a cross-correlation time-domain method. On average, between 28 (−20°) to 45 (90°) xBRS estimates per minute became available. Following a change in α, xBRS reached a different mean level in the first minute in 78% of the cases and in 93% after 6 min. With increasing α, BRS decreased: BRS = −10.1·sin(α) + 18.7 ( r2 = 0.99) with tight correlation between xBRS and cross-spectral gain ( r2 ∼ 0.97). Delay τ shifted toward higher values. In conclusion, in healthy subjects the sensitivity of the cardiac baroreflex obtained from time domain decreases linearly with sin(α), and the start of baroreflex adaptation to a physiological perturbation like postural stress occurs rapidly. The decreases of BRS and reduction of short τ may be the result of reduced vagal activity with increasing α.

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Gomathi, Kumar, Arunachalam Balaji, and Thangaraj Mrunalini. "Design and optimization of differential capacitive micro accelerometer for vibration measurement." Journal of the Mechanical Behavior of Materials 30, no. 1 (January 1, 2021): 19–27. http://dx.doi.org/10.1515/jmbm-2021-0003.

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Abstract This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%.

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Shi, Xiaojun, and Bingcheng Wang. "Caught in the “Akt”: Cross-talk between EphA2 and EGFR through the Akt-PIKfyve axis maintains cellular sensitivity to EGF." Science Signaling 11, no. 541 (July 31, 2018): eaau1207. http://dx.doi.org/10.1126/scisignal.aau1207.

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Quinn, Kevin J., Janet O. Helminski, Allan J. Didier, James F. Baker, and Barry W. Peterson. "Changes in sensitivity of vestibular nucleus neurons induced by cross-axis adaptation of the vestibulo-ocular reflex in the cat." Brain Research 718, no. 1-2 (April 1996): 176–80. http://dx.doi.org/10.1016/0006-8993(96)00013-3.

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