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Journal articles on the topic 'Differential capacitive sensing'

Author: Grafiati

Published: 4 June 2025

Last updated: 15 July 2025

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Nurul, Arfah Che Mustapha, H. M. Zahirul Alam A., Khan Sheroz, and Wong Azman Amelia. "Parasitic consideration for differential capacitive sensor." Bulletin of Electrical Engineering and Informatics 8, no. 3 (2019): 798–807. https://doi.org/10.11591/eei.v8i3.1526.

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Parasitic integration for a single supply differential capacitive sensing technique is presented in this paper. In real capacitive sensor measurement, parasitic impedance exists in its measurement. This paper objective is to study the effect of capacitive and resistive parasitic to the capacitive sensor circuit. The differential capacitive sensor circuit derivation theory is elaborated first. Then, comparison is made using simulation. Test was carried out using frequency from 40 kHz up to 400 kHz. Result is presented and have shown good linearity of 0.99984 at 300 kHz, R-squared value. This capacitive sensor is expected to be used for energy harvesting application.

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Arfah Che Mustapha, Nurul, A. H. M. Zahirul Alam, Sheroz Khan, and Amelia Wong Azman. "Frequency dependency analysis for differential capacitive sensor." Bulletin of Electrical Engineering and Informatics 8, no. 3 (2019): 789–97. http://dx.doi.org/10.11591/eei.v8i3.1524.

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A differential capacitive sensing technique is discussed in this paper. The differential capacitive sensing circuit is making use of a single power supply. The design focus for this paper is on the excitation frequency dependency analysis to the circuit. Theory of the differential capacitive sensor under test is discussed and derivation is elaborated. Simulation results are shown and discussed. Next, results improvement has also been shown in this paper for comparison. Test was carried out using frequency from 40 kHz up to 400 kHz. Results have shown output voltage of Vout=0.07927 Cx+1.25205 and good linearity of R-squared value 0.99957 at 200 kHz. Potential application for this capacitive sensor is to be used for energy harvesting for its potential power supply.

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Nurul, Arfah Che Mustapha, H. M. Zahirul Alam A., Khan Sheroz, and Wong Azman Amelia. "Frequency dependency analysis for differential capacitive sensor." Bulletin of Electrical Engineering and Informatics 8, no. 3 (2019): 789–97. https://doi.org/10.11591/eei.v8i3.1524.

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Brookhuis, R. A., T. S. J. Lammerink, and R. J. Wiegerink. "Differential capacitive sensing circuit for a multi-electrode capacitive force sensor." Sensors and Actuators A: Physical 234 (October 2015): 168–79. http://dx.doi.org/10.1016/j.sna.2015.08.020.

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Arfah Che Mustapha, Nurul, A. H. M. Zahirul Alam, Sheroz Khan, and Amelia Wong Azman. "Parasitic consideration for differential capacitive sensor." Bulletin of Electrical Engineering and Informatics 8, no. 3 (2019): 798–807. http://dx.doi.org/10.11591/eei.v8i3.1526.

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Barile, Gianluca, Giuseppe Ferri, Francesca Romana Parente, et al. "Linear Integrated Interface for Automatic Differential Capacitive Sensing." Proceedings 1, no. 4 (2017): 592. http://dx.doi.org/10.3390/proceedings1040592.

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Ferri, G., F. R. Parente, V. Stornelli, G. Barile, and L. Pantoli. "Automatic Bridge-based Interface for Differential Capacitive Full Sensing." Procedia Engineering 168 (2016): 1585–88. http://dx.doi.org/10.1016/j.proeng.2016.11.466.

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Chun-Kai Chan, Sung-Cheng Lo, Yu-Che Huang, Mingching Wu, Ming-Yung Wang, and Weileun Fang. "Poly-Si Based Two-Axis Differential Capacitive-Sensing Accelerometer." IEEE Sensors Journal 12, no. 12 (2012): 3301–8. http://dx.doi.org/10.1109/jsen.2012.2215313.

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Xie, Jin, Rahul Agarwal, Kia Hian Lau, You He Liu, and Ming Lin Julius Tsai. "Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes." Advanced Materials Research 254 (May 2011): 203–6. http://dx.doi.org/10.4028/www.scientific.net/amr.254.203.

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A three-axis capacitive accelerometer based on SOI is presented. Acceleration is detected by both in-plane and vertical comb electrodes. Separating the three-axis sensing with different groups of comb electrodes enables direct detection for each axis with full differential capacitive sensing scheme. The capacitance sensitivities of X and Y accelerometer are 160.7 fF/g and Z accelerometer 21.6 fF/g.

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Mikhailov, P. G. "Modeling the Influence of the Edge Electrostatic Effect on the Transformation Function of Thin-Film Quasi-Differential Capacitive Sensitive Elements." Journal of Physics: Conference Series 2096, no. 1 (2021): 012143. http://dx.doi.org/10.1088/1742-6596/2096/1/012143.

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Abstract Capacitive sensing elements are the main components of capacitive measuring transducers, which determine most of the metrological characteristics and operational parameters of sensors. First of all, capacitive sensing elements ensure the temporal and parametric stability of sensors, which are the main operational characteristics in such areas as rocket and space and aviation technology, the nuclear industry, in which the instability of sensors and measuring systems based on them can lead to high financial and human losses. etc. At the same time, compensation for lateral capacitive couplings and electrostatic leaks are very important issues, since small changes in capacitance when measuring physical quantities can lead to uninformative measurements in the presence of distortion of electrostatic fields in a capacitive sensing element. In this regard, it is necessary to take into account and simulate the stray fields of electrostatic fields and their influence on measurements.

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Jindal, Sumit Kumar, Srishti Priya, and S. Kshipra Prasadh. "Design Guidelines for MEMS Optical Accelerometer based on Dependence of Sensitivities on Diaphragm Dimensions." Journal of Circuits, Systems and Computers 29, no. 07 (2019): 2050107. http://dx.doi.org/10.1142/s0218126620501078.

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This work deals in specifying the design considerations while constructing a Micro Electro Mechanical Systems (MEMS) optical accelerometer working on capacitive sensing technique. Sensitivity is one of the most demanded characteristics of any sensor. The sensor considered is a MEMS capacitive accelerometer in which both displacement and capacitance are the primary sensing characteristics. This differential capacitive accelerometer causes change in displacement due to applied acceleration and further produces change in capacitance. So, the main focus in this work is to improve or select the suitable diaphragm dimensions of the differential capacitor in order to get optimal capacitive and displacement sensitivity. This is done for an Optical MEMS (MOEMS) based sensor where slight change has a large-scale impact. The electrical signal is converted to optical by adding an Optical Interferometer. Mach–Zehnder Interferometer (MZI) is used to carry out the intensity modulation which also gives protection in inflammable surroundings. This makes the system suitable for working in high temperature regions.

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George, B., N. Madhu Mohan, and V. Jagadeesh Kumar. "A Linear Variable Differential Capacitive Transducer for Sensing Planar Angles." IEEE Transactions on Instrumentation and Measurement 57, no. 4 (2008): 736–42. http://dx.doi.org/10.1109/tim.2007.913597.

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Depari, Alessandro, Emiliano Sisinni, Alessandra Flammini, et al. "Autobalancing Analog Front End for Full-Range Differential Capacitive Sensing." IEEE Transactions on Instrumentation and Measurement 67, no. 4 (2018): 885–93. http://dx.doi.org/10.1109/tim.2017.2785160.

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Grigorev, D. M., V. V. Amelichev, S. S. Generalov, and A. V. Ilkov. "Finite Element Modeling of the Sensing Element of a Capacitive Differential Accelerometer." Nano- i Mikrosistemnaya Tehnika 26, no. 5 (2024): 216–21. https://doi.org/10.17587/nmst.26.216-221.

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In this paper presents the single-axis capacitive differential accelerometer sensing element design calculation using the ANSYS software package. The sensing element spring suspensions have been optimized to ensure a sensitivity of 2 fF/g and a resonant frequency of 9 kHz. The sensing element structure first natural frequency is 9 kHz, which corresponds to the value most in demand in the application. The second natural frequency is 23 kHz higher than the first, which indicates a high stability of the structure to accelerations that do not coincide with the main axis of sensitivity. The paper describes the calculation of the comb-finger structure capacity. The sizes and parameters of the comb-finger structure selection have been made. The calculation is performed for the practical implementation of the sensing element and model settings. The comb-finger structure electrodes pull-in voltage calculation is given. The single-axis design of the accelerometer allows to measure accelerations in only one dimension, which can be a great advantage in applications where high resistance to accelerations with an orthogonal orientation to the main axis of sensitivity is required. In addition, this sensing element can be used for both an accelerometer and an inclinometer. Potentially, this design can be used as part of an accelerometer to control linear accelerations in the range from 0.1 g to 50 g.

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Chen, Liang-Yu, Glenn M. Beheim, and Roger D. Meredith. "Packaging Technology for High Temperature Capacitive Pressure Sensors." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2010, HITEC (2010): 000367–72. http://dx.doi.org/10.4071/hitec-lchen-tha23.

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High temperature pressure sensors are critical sensing elements for the next generation of intelligent aerospace engine technology, as well as long-term exploration missions to Venus, where the surface temperature is 485°C. Various high temperature pressure sensors based on different sensing mechanisms are under development at the NASA Glenn Research Center. In order to test long-term performance and reliability of these sensors in a high temperature environment, and eventually commercialize these sensors, high temperature durable and long-term reliable packaging is essential. A prototype packaging technology for micro-sensors designated for applications in high temperature and high differential pressure environments has been developed and reported previously. Packaged high temperature silicon carbide pressure sensors have been successfully tested between room temperature and 500°C. This paper reports an improved version of this packaging technology and testing results of a packaged commercial Si capacitive pressure sensor at elevated temperatures. The parasitic parameters of the packaging are electrically characterized from room temperature to 500°C at 120Hz, 1kHz, 10kHz, and 100kHz. This packaging is primarily designed for high temperature capacitive pressure sensors, but it also applies to other high temperature sensors, especially those for high differential pressure environments.

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De Marcellis, Andrea, Càndid Reig, and María-Dolores Cubells-Beltrán. "A Capacitance-to-Time Converter-Based Electronic Interface for Differential Capacitive Sensors." Electronics 8, no. 1 (2019): 80. http://dx.doi.org/10.3390/electronics8010080.

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In this paper we present an oscillating conditioning circuit, operating a capacitance-to-time conversion, which is suitable for the readout of differential capacitive sensors. The simple architecture, based on a multiple-feedbacks structure that avoids ground noise disturbs and system calibrations, employs only three Operational Amplifiers (OAs) and a mixer implementing a square wave oscillator that provides an AC sensor excitation voltage. It performs a Period Modulation (PM) and a Pulse Width Modulation (PWM) of the output signal proportionally to the sensor differential capacitance values. The sensor variation range and the detection sensitivity can be easily set through the additional resistors. Preliminary PSpice simulation results have shown a good agreement with theoretical calculations as well as a linear response with a high detection sensitivity of differential capacitive sensors having a baseline in the range [2.2 ÷ 180 pF]. Moreover, different experimental measurements have been also performed by implementing the circuit on a laboratory breadboard using commercial discrete components so validating the idea and providing the circuit performances with different kind of differential capacitive sensors achieving detection resolutions of about 0.1 fF in an overall differential capacitive variation range that is equal to ±15.8 pF. The achieved results demonstrate that the proposed interface solution is suitable for on-chip integration with different kinds of differential capacitive sensing devices, such as Micro-Electro-Mechanical-System (MEMS), force/position, and humidity sensors in biomedical and robotics applications.

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Yu, Guang Ping, Shan Hui Wang, and Ying Gang Zhou. "Research of Displacement Measuring System Based on Capacitive Grating Sensor." Applied Mechanics and Materials 20-23 (January 2010): 1260–64. http://dx.doi.org/10.4028/www.scientific.net/amm.20-23.1260.

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Capacitive grating sensor can be used to measure the length, as its capacitance changes with the shift difference. There are several measuring systems consisting of capacitive sensor, but all their basic principles are capacitive differential sensing. The structure, principles and characteristics of capacitive sensors are introduced in this paper. Especially, we designed a high-resolution electronic length measuring system based on Capacitive Grating Sensor. And the measurement error of the system and the reason are analysed. For this system, the measuring range is from 0 to 500mm, the resolution is 1um, the indication error is 5um, the measuring speed is 1m/s. Accurate measurement on account of large displacement is achieved with the system.

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Hassan, Hossam, and Hyung-Won Kim. "CMOS Capacitive Fingerprint Sensor Based on Differential Sensing Circuit with Noise Cancellation." Sensors 18, no. 7 (2018): 2200. http://dx.doi.org/10.3390/s18072200.

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Najar, Fehmi, Mehdi Ghommem, Toky Rabenimanana, Mohamed Hemid, Vincent Walter, and Najib Kacem. "Differential capacitive mass sensing based on mode localization in coupled microbeam arrays." Mechanical Systems and Signal Processing 220 (November 2024): 111648. http://dx.doi.org/10.1016/j.ymssp.2024.111648.

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Aezinia, F., and Behraad Bahreyni. "An Interface Circuit With Wide Dynamic Range for Differential Capacitive Sensing Applications." IEEE Transactions on Circuits and Systems II: Express Briefs 60, no. 11 (2013): 766–70. http://dx.doi.org/10.1109/tcsii.2013.2281891.

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Zega, Valentina, Caterina Credi, Roberto Bernasconi, et al. "The First 3-D-Printed z-Axis Accelerometers With Differential Capacitive Sensing." IEEE Sensors Journal 18, no. 1 (2018): 53–60. http://dx.doi.org/10.1109/jsen.2017.2768299.

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Zhang, Yansheng, Ralf Bauer, Joseph Jackson, William Whitmer, James Windmill, and Deepak Uttamchandani. "A low frequency dual-band operational microphone mimicking the hearing property of Ormia ochracea." Journal of Microelectromechanical Systems 27, no. 4 (2018): 667–76. https://doi.org/10.1109/JMEMS.2018.2845680.

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This paper introduces a directional MEMS microphone designed for hearing aid applications appropriate to low frequency hearing impairment, inspired by the hearing mechanism of a fly, the female Ormia ochracea. It uses both piezoelectric and capacitive sensing schemes. In order to obtain a high sensitivity at low frequency bands, the presented microphone is designed to have two resonance frequencies below the threshold of low frequency hearing loss at approximately 2 kHz. One is around 500 Hz and the other is slightly above 2 kHz.  The novel dual sensing mechanism allows for optimization of the microphone sensitivity at both frequencies, with a maximum open-circuit (excluding pre-amplification) acoustic response captured via differential piezoelectric sensing at approximately – 46 dB (V) ref. 94 dB (SPL) at the resonance frequencies. The corresponding minimum detectable sound pressure level is just below -12 dB. The comb finger capacitive sensing was employed due to a lower electrical response generated from a ground referenced single-ended output by the piezoelectric sensing at the first resonance frequency compared to the second resonance frequency. The capacitive sensing mechanism, connected to a charge amplifier, generates a -28.4 dB (V) ref. 94 dB (SPL) acoustic response when the device is excited at either of the two resonance frequencies. Due to the asymmetric geometry and the 400 µm thick substrate, the device is predicted to perform as a bi-directional microphone below 3 kHz, which is shown by the measured directional polar patterns.

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Kim, Sangkil, Yoshihiro Kawahara, Apostolos Georgiadis, Ana Collado, and Manos M. Tentzeris. "Low-Cost Inkjet-Printed Fully Passive RFID Tags for Calibration-free Capacitive/Haptic Sensor Applications." IEEE Sensors Journal 15, no. 6 (2015): 3135–45. https://doi.org/10.5281/zenodo.46818.

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A fully passive, compact, and low-cost capacitive wireless radio frequency identification (RFID)-enabled sensing system for capacitive sensing and other Internet of Things applications is proposed. This calibration-free sensor utilizes a dual-tag topology, which consists of two closely spaced RFID tags with dipole antennas and printed capacitive sensor component connected to one of the tags. A series LC resonator is used to both reduce the antenna size and improve the isolation between the two antennas and the design/optimization steps are discussed in detail. All components except for the RFID chips are inkjet printed on an off-the-shelf photopaper using a silver nanoparticle ink. The complete sensor dimension is 84 mm × mm and the sensor is compatible with EPC Class 1 Gen 2 (UHF) standard reader technology at 915 MHz.

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Ahmad, Farooq, John Ojur Dennis, Mohd Haris Md Khir, and Nor Hisham Hamid. "A CMOS MEMS Resonant Magnetic Field Sensor with Differential Electrostatic Actuation and Capacitive Sensing." Advanced Materials Research 403-408 (November 2011): 4205–9. http://dx.doi.org/10.4028/www.scientific.net/amr.403-408.4205.

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This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is robust against the interference from other sources during transmission. At damping ratio of 0.0001, resonant frequency of the comb resonator is 4.35 kHz with quality factor 5000 and amplitude 18.45 μm. Sensitivity of the device towards external magnetic field is 9.455 mHz/nT which is 10,000 times improved than recently published data.

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Zega, Valentina, Marta Invernizzi, Roberto Bernasconi, et al. "The First 3D-Printed and Wet-Metallized Three-Axis Accelerometer With Differential Capacitive Sensing." IEEE Sensors Journal 19, no. 20 (2019): 9131–38. http://dx.doi.org/10.1109/jsen.2019.2924473.

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Raisa, Noshin, Yuki Gao, Mahindra Ganesh, Maryam Ravan, and Reza K. Amineh. "Fast and Robust Capacitive Imaging of Cylindrical Non-Metallic Media." Magnetism 1, no. 1 (2021): 60–69. http://dx.doi.org/10.3390/magnetism1010006.

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In this paper, a unique approach to the imaging of non-metallic media using capacitive sensing is presented. By using customized sensor plates in single-ended and differential configurations, responses to hidden objects can be captured over a cylindrical aperture surrounding the inspected medium. Then, by processing the acquired data using a novel imaging technique based on the convolution theory, Fourier and inverse Fourier transforms, and exact low resolution electromagnetic tomography (eLORETA), images are reconstructed over multiple radial depths using the acquired sensor data. Imaging hidden objects over multiple depths has wide range of applications, from biomedical imaging to nondestructive testing of the materials. Performance of the proposed imaging technique is demonstrated via experimental results.

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Yan, Hao, Hsien-Chi Yeh, and Qiuli Mao. "High precision six-degree-of-freedom interferometer for test mass readout." Classical and Quantum Gravity 39, no. 7 (2022): 075024. http://dx.doi.org/10.1088/1361-6382/ac5923.

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Abstract High precision six-degree-of-freedom sensing plays an important role in future gravitational space missions. In gravitational or geodesy missions, measurements of all six degrees of freedom of freely floating test mass are required for reducing the cross-coupling noise, which is frequently an important limiting factor in the performance. Interferometry and capacitive sensing have been successfully combined in LISA pathfinder to achieve six degrees of freedom measurements. In this paper, we report a six-degree-of-freedom interferometer system based on multiplex differential wavefront sensing and longitudinal pathlength sensing. Compared to conventional capacitive sensing or optical levers, it has a higher measurement accuracy. The results of our table-top experiment show motion in all six degrees of freedom of a cubic test mass are simultaneously measured with a translational and tilt sensitivity of 100 pm/Hz1/2 and 10 nrad Hz−1/2 above 1 Hz, respectively. The translational dynamic range is greater than ±10 mm with nonlinear residuals less than 6 μm, and the tilt dynamic range is approximately ±500 μrad with nonlinear residuals less than 60 μrad. The coupling errors between multiple degrees of freedom are dominated by tilt-to-translation and tilt-to-tilt coupling, which are roughly 2–4 μm and 15–25 μrad, respectively, within a range of [−500 μrad, +500 μrad].

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Chen, Wei Ping, Hong Chen, Tian Han, Xiao Wei Liu, and Hong Yu Wang. "Design of a Novel Micromachined Gyroscope with Compensatory Capacitance." Key Engineering Materials 353-358 (September 2007): 2778–81. http://dx.doi.org/10.4028/www.scientific.net/kem.353-358.2778.

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This paper presents a novel bulk micromachined gyroscope with the compensatory capacitance. Independent driving and sensing beams and a dual-frame structure are adopted to decouple mechanically for stable operation. The method of electrostatic push-pull drive and capacitive sense combs based on the slide film damping are applied to obtain a large driving force and high quality factors. The compensatory capacitance is designed to compensate the deviations of sensing differential capacitance from fabrications. The designed gyroscope has matched resonant frequencies of 2187Hz and 2206Hz for the drive and sense modes, respectively. Considering the noise of interface circuits, the gyroscope system sensitivity can reach 14.2mv/o/s, theoretically.

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Bai, Yang, Yunfeng Lu, Pengcheng Hu, et al. "Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window." Sensors 16, no. 5 (2016): 680. http://dx.doi.org/10.3390/s16050680.

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Yang, Ik-seok, and Oh-kyong Kwon. "A touch controller using differential sensing method for on-cell capacitive touch screen panel systems." IEEE Transactions on Consumer Electronics 57, no. 3 (2011): 1027–32. http://dx.doi.org/10.1109/tce.2011.6018851.

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Zhou, Wu, Hongfang Lan, Huijun Yu, Liushan Lai, Bei Peng, and Xiaoping He. "Consideration of the fringe effects of capacitors in micro accelerometer design." Transactions of the Institute of Measurement and Control 40, no. 9 (2017): 2881–86. http://dx.doi.org/10.1177/0142331217711245.

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Capacitive micro accelerometer, as one of promising micro devices, utilizes the parallel-plate capacitor arrays to covert input acceleration into differential capacitance, so its characteristics highly depend on an accurate capacitance evaluation. The traditional capacitance formula used in macro-scale systems design could not meet the requirement of micro-scale field because the fringe effects of capacitors have great contribution to the total measured capacitance under a few millimeters of separation distance. In this paper, the theoretical equation of capacitance with fringe effects is utilized to design the sensitivity and nonlinearity of a capacitive micro accelerometer. The proposed analytical method provides a quantitative evaluation of sensing capacitance of micro accelerometers. Experimental results indicate that the theoretical design with fringe effects has a better agreement with experiments than ideal parallel-plate capacitor principle.

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Yu, Zhicheng, Kai Peng, Xiaokang Liu, Hongji Pu, and Ziran Chen. "A new capacitive long-range displacement nanometer sensor with differential sensing structure based on time-grating." Measurement Science and Technology 29, no. 5 (2018): 054009. http://dx.doi.org/10.1088/1361-6501/aaaf05.

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Xie, Yafei, Ji Fan, Chun Zhao, Shitao Yan, Chenyuan Hu, and Liangcheng Tu. "Modeling and Analysis of the Noise Performance of the Capacitive Sensing Circuit with a Differential Transformer." Micromachines 10, no. 5 (2019): 325. http://dx.doi.org/10.3390/mi10050325.

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Capacitive sensing is a key technique to measure the test mass movement with a high resolution for space-borne gravitational wave detectors, such as Laser Interferometer Space Antenna (LISA) and TianQin. The capacitance resolution requirement of TianQin is higher than that of LISA, as the arm length of TianQin is about 15 times shorter. In this paper, the transfer function and capacitance measurement noise of the circuit are modeled and analyzed. Figure-of-merits, including the product of the inductance L and the quality factor Q of the transformer, are proposed to optimize the transformer and the capacitance measurement resolution of the circuit. The LQ product improvement and the resonant frequency augmentation are the key factors to enhance the capacitance measurement resolution. We fabricated a transformer with a high LQ product over a wide frequency band. The evaluation showed that the transformer can generate a capacitance resolution of 0.11 aF/Hz1/2 at a resonant frequency of 200 kHz, and the amplitude of the injection wave would be 0.6 V. This result supports the potential application of the proposed transformer in space-borne gravitational wave detection and demonstrates that it could relieve the stringent requirements for other parameters in the TianQin mission.

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Alhoshany, Abdulaziz, Hesham Omran, and Khaled N. Salama. "A 45.8 fJ/Step, energy-efficient, differential SAR capacitance-to-digital converter for capacitive pressure sensing." Sensors and Actuators A: Physical 245 (July 2016): 10–18. http://dx.doi.org/10.1016/j.sna.2016.04.038.

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Laoudias, Costas, George Souliotis, and Fotis Plessas. "A High ENOB 14-Bit ADC without Calibration." Electronics 13, no. 3 (2024): 570. http://dx.doi.org/10.3390/electronics13030570.

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This paper presents an implementation of a 14-bit 2.5 MS/s differential Successive-Approximation-Register (SAR) analog-to-digital converter (ADC) to be used for sensing multiple analog input signals. A differential binary-weighted with split capacitance charge-redistribution capacitive digital-to-analog converter (CDAC) utilizing the conventional switching technique is designed, without using any calibration mechanism for fast power-on operation. The CDAC capacitor unit has been optimized for improved linearity without calibration technique. The SAR ADC has a differential input range 3.6 Vpp, with a SNDR of 80.45 dB, ENOB of 13.07, SFDR of 87.16 dB and dissipates an average power of 0.8 mW, while operating at 2.5 V/1 V for analog/digital power supply. The INL and DNL is +0.22/−0.34 LSB and +0.42/−0.3 LSB, respectively. A prototype ADC has been fabricated in a conventional CMOS 65 nm technology process.

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Dounkal, Manoj Kumar, R. K. Bhan, and Navin Kumar. "A new improved vertical comb type differential capacitive sensing micro accelerometer using silicon-on-insulator wafer technology." Journal of Micromechanics and Microengineering 30, no. 10 (2020): 105008. http://dx.doi.org/10.1088/1361-6439/ab9b13.

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Yu, Yu-Hsiang, and Tsung-Ying Sun. "A Pseudo-Differential Measuring Approach for Implementing Microcontroller-Based Capacitive Touch Sensing in Low-Power Quality Situation." IEEE Sensors Journal 16, no. 2 (2016): 390–99. http://dx.doi.org/10.1109/jsen.2015.2479599.

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Fan, Suyan, Man-Kay Law, Mingzhong Li, et al. "Wide Input Range Supply Voltage Tolerant Capacitive Sensor Readout Using On-Chip Solar Cell." Journal of Circuits, Systems and Computers 25, no. 01 (2015): 1640006. http://dx.doi.org/10.1142/s0218126616400065.

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In this paper, a wide input range supply voltage tolerant capacitive sensor readout circuit using on-chip solar cell is presented. Based on capacitance controlled oscillators (CCOs) for ultra-low voltage/power consumption, the sensor readout circuit is directly powered by the on-chip solar cell to improve the overall system energy efficiency. An extended sensing range with high sensing accuracy is achieved using a two-step successive approximation register (SAR) and delta-sigma ([Formula: see text]) analog-to-digital (A/D) conversion (ADC) scheme. Digital controls are generated on-chip using a customized sub-threshold digital standard cell library. Systematic error analysis and optimization including the finite switch on-resistance, buffer input-dependent delay, and SAR quantization nonlinearity are also outlined. High power supply rejection ratio (PSRR) is ensured by using a pseudo-differential topology with ratiometric readout. The complete sensing system is implemented using a standard 0.18[Formula: see text][Formula: see text]m complementary metal-oxide-semiconductor (CMOS) process. Simulation results show that the readout circuit achieves a wide input range from 1.5[Formula: see text]pF to 6.5[Formula: see text]pF with a worst case PSRR of 0.5% from 0.3[Formula: see text]V to 0.42[Formula: see text]V (0.67% from 0.3[Formula: see text]V to 0.6[Formula: see text]V). With a 3.5[Formula: see text]pF input capacitance and a 0.3[Formula: see text]V supply, the [Formula: see text] stage achieves a resolution of 7.1-bit (corresponding to a capacitance of 2.2[Formula: see text]fF/LSB) with a conversion frequency of 371[Formula: see text]Hz. With an average power consumption of 40[Formula: see text]nW and a sampling frequency of 47.5[Formula: see text]kHz, a figure-of-merit (FoM) of 0.78[Formula: see text]pJ/conv-step is achieved.

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Nguyen, M. N., L. Q. Nguyen, H. M. Chu, and H. N. Vu. "A two degrees of freedom comb capacitive-type accelerometer with low cross-axis sensitivity." Journal of Mechanical Engineering and Sciences 13, no. 3 (2019): 5334–46. http://dx.doi.org/10.15282/jmes.13.3.2019.09.0435.

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In this paper, we report on a SOI-based comb capacitive-type accelerometer that senses acceleration in two lateral directions. The structure of the accelerometer was designed using a proof mass connected by four folded-beam springs, which are compliant to inertial displacement causing by attached acceleration in the two lateral directions. At the same time, the folded-beam springs enabled to suppress cross-talk causing by mechanical coupling from parasitic vibration modes. The differential capacitor sense structure was employed to eliminate common mode effects. The design of gap between comb fingers was also analyzed to find an optimally sensing comb electrode structure. The design of the accelerometer was carried out using the finite element analysis. The fabrication of the device was based on SOI-micromachining. The characteristics of the accelerometer have been investigated by a fully differential capacitive bridge interface using a sub-fF switched-capacitor integrator circuit. The sensitivities of the accelerometer in the two lateral directions were determined to be 6 and 5.5 fF/g, respectively. The cross-axis sensitivities of the accelerometer were less than 5%, which shows that the accelerometer can be used for measuring precisely acceleration in the two lateral directions. The accelerometer operates linearly in the range of investigated acceleration from 0 to 4g. The proposed accelerometer is expected for low-g applications.

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Li, Xiang, Bo Hou, Chunge Ju, Qi Wei, Bin Zhou, and Rong Zhang. "A Complementary Recycling Operational Transconductance Amplifier with Data-Driven Enhancement of Transconductance." Electronics 8, no. 12 (2019): 1457. http://dx.doi.org/10.3390/electronics8121457.

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An improved operational transconductance amplifier (OTA) is presented in this work. The fully differential OTA adopts the current recycling technique and complementary NMOS and PMOS input branches to enhance the total transconductance. Moreover, in order to achieve higher current efficiency, a data-driven biasing circuit was developed to dynamically adjust the power consumption of the amplifier. Two comparators were added to detect the voltage difference at the input nodes, and when the differential input is large enough to activate either comparator, extra biasing current is activated and poured into the amplifier to enhance its slew rate and gain-bandwidth product (GBW). The threshold voltage of the complementary recycling folded cascode (CRFC)-based comparator is configured to suppress overshoot. Complementary common-mode feedback (CMFB) topology with local CMFB structure is built to acquire high common-mode gain. The OTA was fabricated in SMIC 0.18- μ m CMOS technology. The experimental result based on a capacitive feedback loop shows that the data-driven operation improves the average slew rate of the amplifier from 10.2 V/ μ s to 55.5 V/ μ s while the power only increases by 150%. The OTA has good potential to satisfy the fast settling demands for capacitive sensing circuits.

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Alam, Noor, and S. S. Islam. "Development of Y-Shaped Porous Anodic Alumina Humidity Sensor to Enhance Lower Detection Limit and Sensitivity." ECS Transactions 107, no. 1 (2022): 11991–2000. http://dx.doi.org/10.1149/10701.11991ecst.

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The amount of water vapours in the air can affect the productivity and safety of many manufacturing processes, such as agriculture, pharmaceuticals, and semiconductor industries, as well as human comfort. The humidity sensors based on porous materials, such as Porous Anodic Alumina (PAA), have persuaded much attention because of their high porosity and tuneable structure. In this work, we have developed a PAA capacitive sensor using phosphoric acid electrolyte by the Differential Pulse Voltammetry method of anodization. The PAA-based humidity sensor shows ultra-high sensitivity, fast response, and a wide detection range of relative humidity (RH). Response and recovery time of the sensor are ~ 16 s and ~ 4 s, respectively at 64 RH%, and the sensor is capable of sensing 1-100 RH%. These results advocate that PAA is a propitious applicant for various humidity sensing applications, especially where low humidity detection is required i.e., paper, lithium-ion battery, tea industries, etc.

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Hou, Bo, Bin Zhou, Xinxi Zhang, et al. "A Full 360° Measurement Range Liquid Capacitive Inclinometer With a Triple- Eccentric-Ring Sensing Element and Differential Detection Scheme." IEEE Transactions on Industrial Electronics 67, no. 5 (2020): 4216–25. http://dx.doi.org/10.1109/tie.2019.2921265.

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Zarnik, Marina, and Darko Belavic. "The Effect of Humidity on the Stability of LTCC Pressure Sensors." Metrology and Measurement Systems 19, no. 1 (2012): 133–40. http://dx.doi.org/10.2478/v10178-012-0012-0.

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The Effect of Humidity on the Stability of LTCC Pressure SensorsLTCC-based pressure sensors are promising candidates for wet-wet applications in which the effect of the surrounding media on the sensor's characteristics is of key importance. The effect of humidity on the sensor's stability can be a problem, particularly in the case of capacitive sensors. A differential mode of operation can be a good solution, but manufacturing the appropriate sensing capacitors remains a major challenge. In the case of piezoresistive sensors the influence of humidity is less critical, but it still should be considered as an important parameter when designing sensors for low-pressure ranges. In this paper we discuss the stability of the sensors' offset characteristics, which was inspected closely using experimental and numerical analyses.

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Jiang, Xinyu, Brian Sang, Haoran Wen, Gregory Junek, Jin-Woo Park, and Farrokh Ayazi. "Strain Plethysmography Using a Hermetically Sealed MEMS Strain Sensor." Biosensors 15, no. 5 (2025): 325. https://doi.org/10.3390/bios15050325.

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We present a hermetically sealed capacitive microelectromechanical system (MEMS) strain sensor designed for arterial pulse waveform extraction using the strain plethysmography (SPG) modality. The MEMS strain sensor features a small form factor of 3.3 mm × 3.3 mm × 1 mm, leverages a nano-gap fabrication process to improve the sensitivity, and uses a differential sensing mechanism to improve the linearity and remove the common mode drift. The MEMS strain sensor is interfaced with an application-specific integrated circuit (ASIC) to form a compact strain sensing system. This system exhibits a high strain sensitivity of 316 aF/µε, a gauge factor (GF) of 35, and a strain sensing resolution of 1.26 µε, while maintaining a linear range exceeding 700 µε. SPG signals have been reliably captured at both the fingertip and wrist using the MEMS strain sensor with high signal quality, preserving various photoplethysmography (PPG) features. Experimental results demonstrate that heart rate (HR) and heart rate variability (HRV) can be estimated from the SPG signal collected at the fingertip and wrist using the sensor with an accuracy of over 99%. Pulse arrival time (PAT) and pulse transit time (PTT) have been successfully extracted using the sensor together with a MEMS seismometer, showcasing its potential for ambulatory BP monitoring (ABPM) application.

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Maiti, Niladri, Riddhi Chawla, and Swarnava Biswas. "Biasing Voltage Optimization in MEMS Wireless Sensors for Enhanced Multiple Sclerosis Tremor Detection." WSEAS TRANSACTIONS ON COMPUTER RESEARCH 13 (March 18, 2025): 225–35. https://doi.org/10.37394/232018.2025.13.21.

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The objective of this work is to present the complete design and simulation of a microelectromechanical system (MEMS) based differential capacitive accelerometer developed to detect tremor signals in patients with Multiple Sclerosis (MS). The primary challenge is to address the difficulties of sensing at low frequencies (below 10 Hz) associated with tremors in multiple sclerosis (MS). The design mainly focuses on the 3.5 to 7.5 Hz band of frequencies. The methods used in the design of the accelerometer consider these multiple attributes to provide optimization with regard to resonance frequency, mechanical stability, and sensitivity. The design is validated by performing finite element analysis (FEA) in COMSOL Multiphysics software. The mechanical properties of the accelerometer are characterized by the development of analytical models to compute resonance frequency and effective spring constant. The FEA results show that the system has a resonance frequency of 5.5 Hz, and the maximum displacement is around 1.77 μm under an acceleration of 0.04 g taking into account bias voltage at operation 10 V in air as external condition for this study; hence mechanical sensitivity was found to be about 44.25 μm. The accelerometer exhibits a considerable dynamic range: from static forces up to near resonant frequencies with very high level sensitivities; linearity also outperforms previous research studies. The feasibility of using a MEMS differential capacitive accelerometer in the effective and accurate evaluation/quantification of tremor signals from MS patients is demonstrated as an emerging technology. Specific documentation and analyzed tremors could have a dramatic impact on many areas of disease identification/management especially in the area of multiple sclerosis.

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Liu, Xiaokang, Hui Zhang, Kai Peng, Qifu Tang, and Ziran Chen. "A High Precision Capacitive Linear Displacement Sensor with Time-Grating that Provides Absolute Positioning Capability Based on a Vernier-Type Structure." Applied Sciences 8, no. 12 (2018): 2419. http://dx.doi.org/10.3390/app8122419.

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Nanometer-scale measurement devices with high accuracy and absolute long-range positioning capability are increasingly demanded in the field of computer numerical control machining. To meet this demand, the present report proposes a capacitive absolute linear displacement sensor with time-grating that employs a vernier-type structure based on a previously proposed single-row capacitive sensing structure. The novel proposed vernier-type absolute time-grating (VATG) sensor employs two capacitor rows, each with an equivalent measurement range. The first capacitor row is designed with n periods to realize fine measurement, while the second capacitor row is designed with n − 1 periods, and the phase difference between the second row and the first row is employed to obtain absolute positioning information. A prototype VATG sensor with a total measurement range of 600 mm and n = 150 is fabricated using printed circuit board manufacturing technology, and its measurement performance is evaluated experimentally. Harmonic analysis demonstrates that the measurement error mainly consists of first-harmonic error, which is mostly caused by signal crosstalk. Accordingly, an optimized prototype VATG sensor is fabricated by adding a shielding layer between the two capacitor rows and designing a differential induction structure. Experimental results demonstrate that the measurement error of the optimized prototype sensor is ±1.25 μm over the full 600 mm range and ±0.25 μm over a single 4 mm period.

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Tian, Yuxin, Hongji Pu, Hewen Wang, Xingchen Fan, and Qihang Dai. "planar two-degree-of-freedom L-shaped capacitive displacement sensor based on time grating." Journal of Physics: Conference Series 3019, no. 1 (2025): 012038. https://doi.org/10.1088/1742-6596/3019/1/012038.

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Abstract Aiming to solve the problems of complex measuring systems, difficult synchronization, and complex decoupling algorithms when using two sets of high-precision one-dimensional sensing devices to measure two-dimensional displacement, A two-dimensional capacitive time grating displacement sensor is developed in this research. The sensor’s overall configuration comprises a fixed ruler and a moving ruler, both of which are installed in parallel and have a certain gap. Square excitation electrodes with dislocation coding in Y and X directions are arranged on the fixed ruler. The moving ruler is composed of three-square induction electrodes which are arranged in the form of a differential structure along Y or X direction. When the sensor works, four sinusoidal AC signals exhibiting a phase difference of π/2 are employed are successively applied to the adjacent four groups of excitation electrodes. Three traveling wave signals The induction electrodes yield displacement information for both the X and Y axes. The output signal can be decoupled at the same time by combining the decoupling formula. The displacement signal is converted into a square wave and the phase is compared with the reference signal, displacement in X and Y direction is finally obtained. Testing outcomes confirm that the peak-to-peak measurement error of the proposed sensor along the X and Y axes is 17.4μm and 18.2μm in the 300mm×300mm measurement range respectively, which provides a new technical way for plane two-dimensional displacement measurement with a large range and high precision.

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Boccard, J. M., P. Katus, R. Renevier, L. M. Reindl, and J. M. Friedt. "Near-field interrogation of SAW resonators on rotating machinery." Journal of Sensors and Sensor Systems 2, no. 2 (2013): 147–56. http://dx.doi.org/10.5194/jsss-2-147-2013.

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Abstract. Surface acoustic wave (SAW) resonators electrically behave like LCR circuits, their frequency can be influenced by temperature, pressure and torque. When they are used for passive wireless sensing on rotating machinery, they can also be influenced by the angular variations of the coupling between the coupler elements and the receiving coupler element impedance. This parasitic frequency shift is known as the "pulling effect". In this paper, we present a capacitive coupler based on open coplanar strip lines for physical measurements on a small diameter rotating shaft. This approach allows a single 434 MHz resonator angular frequency pulling lower than 200 Hz (0.46 ppm) and 100 Hz (0.23 ppm) in a differential configuration. This is more than 10 times lower compared to frequency pulling obtained using couplers based on circular and electrically shorted transmission lines. RADAR-based interrogation, finite element method (FEM) simulation, coupler parameters and frequency pulling measurements results are presented to demonstrate the performances of the complete system.

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Utz, Alexander, Christian Walk, Norbert Haas, et al. "An ultra-low noise capacitance to voltage converter for sensor applications in 0.35 µm CMOS." Journal of Sensors and Sensor Systems 6, no. 2 (2017): 285–301. http://dx.doi.org/10.5194/jsss-6-285-2017.

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Abstract. In this paper we present a readout circuit for capacitive micro-electro-mechanical system (MEMS) sensors such as accelerometers, gyroscopes or pressure sensors. A flexible interface allows connection of a wide range of types of sensing elements. The ASIC (application-specific integrated circuit) was designed with a focus on ultra-low noise operation and high analog measurement performance. Theoretical considerations on system noise are presented which lead to design requirements affecting the reachable overall measurement performance. Special emphasis is put on the design of the fully differential operational amplifiers, as these have the dominant influence on the achievable overall performance. The measured input referred noise is below 50 zF/Hz within a bandwidth of 10 Hz to 10 kHz. Four adjustable gain settings allow the adaption to measurement ranges from ±750 fF to ±3 pF. This ensures compatibility with a wide range of sensor applications. The full input signal bandwidth ranges from 0 Hz to more than 50 kHz. A high-precision accelerometer system was built from the described ASIC and a high-sensitivity, low-noise sensor MEMS. The design of the MEMS is outlined and the overall system performance, which yields a combined noise floor of 200 ng/Hz, is demonstrated. Finally, we show an application using the ASIC together with a CMOS integrated capacitive pressure sensor, which yields a measurement signal-to-noise ratio (SNR) of more than 100 dB.

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Łuczak, Sergiusz, Magdalena Ekwińska, and Daniel Tomaszewski. "A Method of Precise Auto-Calibration in a Micro-Electro-Mechanical System Accelerometer." Sensors 24, no. 12 (2024): 4018. http://dx.doi.org/10.3390/s24124018.

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A novel design of a MEMS (Micro-Electromechanical System) capacitive accelerometer fabricated by surface micromachining, with a structure enabling precise auto-calibration during operation, is presented. Precise auto-calibration was introduced to ensure more accurate acceleration measurements compared to standard designs. The standard mechanical structure of the accelerometer (seismic mass integrated with elastic suspension and movable plates coupled with fixed plates forming a system of differential sensing capacitors) was equipped with three movable detection electrodes coupled with three fixed electrodes, thus creating three atypical tunneling displacement transducers detecting three specific positions of seismic mass with high precision, enabling the auto-calibration of the accelerometer while it was being operated. Auto-calibration is carried out by recording the accelerometer indication while the seismic mass occupies a specific position, which corresponds to a known value of acting acceleration determined in a pre-calibration process. The diagram and the design of the mechanical structure of the accelerometer, the block diagram of the electronic circuits, and the mathematical relationships used for auto-calibration are presented. The results of the simulation studies related to mechanical and electric phenomena are discussed.

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