Dissertations / Theses on the topic 'DMD (Digital micromirror Device)'

A novel method of beam steering that utilizes a mass-produced Digital Micromirror Device (DMD) enables a large field of view and reliable single chip Light Detection and Ranging (LIDAR). Using a short pulsed laser, the micromirrors' rotation is frozen mid-transition which forms a programmable blazed grating which efficiently redistributes the light to a single diffraction order, among several. With a nanosecond 905nm laser and Si avalanche photo diode, measurement accuracy of < 1 cm for 3340 points/sec is demonstrated over a 1 m distance range and with a 48° full field of view.

Dans ce travail, nous avons montré la faisabilité du spectromètre Raman de nouvelle génération utilisant un DMD comme modultateur de lumière couplé avec un PM comme détecteur. Le spectromètre donne des résultts très prometteurs pour des analyses qualitatives et quantitaves. Pour les analyses qualitatives il suffit d'une seconde pour identifier un constituant dun mélange. Pour les analyses quantitatives, malgré la présence éventuelle de fluorescence dans les échantillons, les tests effectués sur des mélanges binaires et terniaires de xylènes ont montré qu'on arrive à des erreurs de prédiction d'nviron 3% pour un temps d'analyse de 5 à 6 ssecondespar échantillon. Avec un coût relativement faible, un tel spectromètre, rovuste et précis pourrait être la solution pour de nombreuses nouvelles applications industrielles pour lesquelles, il n'existe pas vraiment de matériel concurent actuellement. Les résultats d'nalyse quantitative utilisan les méthodes chimiompétriques confirment l'efficacité et la précision des méthodes "Backward stepwise selection of Peaks Intensities" (BssPI) et "Sum of Characteristic Peaks of a component" (SCPC). Ce sont des méthodes simples, facilement accessibles pour des utilisateurs non experts et qui ne demandent pas de connaissance préalable des produits analysés. Ces deux méthodes se sont montrées robustes dans des conditions physico-chimiques sévères que l'on peut rencontrer dans un environnement industriel et s'avèrent ainsi les mieux adaptées à l'analyse quantitative à l'aide d'un spectromètre Raman DMD/PM
In this work, the feasibility of combining the use of a DMD aslight modulator and a photomultiplier tube as detector in a Raman spectrometer has been demonstrated. New in conception and simple in configuration, such instruments should have production costs comsiderably lower than for traditional instrumetnts since both DMD and PTM are not expensive. With our prototype, a qualitative identification takes 1 second per product for qualitative analys and an analytical precision of -3% error can be otained in 5-6 seconds for one sample analysis, even in the present of fluorescence in samle. Thus various industrial applications become possible due to the short recording time combined with the possibilities of remot in situ measurements using optical fibers. Two methods of quantitative analysis have been proposed, "Backward stepwise selection of Peaks Intensities" (BssPI) et "Sumof Characteristic Peaks of a Component". Robust when faced to industrial conditions, they appear to be most appropriate for our analysis using ourDMD/PMT Raman spectrometer with low number of measurements and acceptable error of prediction. These two methods are pressently being used on our DMD/PMT Raman spectrometer

The Coherence Controlled Holographic Microscope (CCHM) was developed at BUT Brno for a quantitative phase imaging of living cells. Nowadays it ocurres that its imaging properties are enhanced by the use of additional modules. In the present the microscope is equipped with the epifluorescence module, which allows observation of fluorescently marked living cells. This thesis is going to follow up on the development of this module and is going to extend its options by confocal imaging. The disadvantage of current multi-channel confocal microscopes is a mechanical rotation of the Nipkow discs, which causes undesired mechanical vibrations. That is why in this thesis it is replaced by Digital Micromirror Device. With its use was developed optical system of the whole confocal model, whose correct funcion was simulated in optical CAD. The experimentally verified prototype serves to test the imaging properties. On this basis is designed an application idea of the fluorescence confocal module, which will be possible to connect to the CCHM microscope.

Photos captured in the shortwave infrared (SWIR) spectrum are interesting in military applications because they are independent of what time of day the pic- ture is captured because the sun, moon, stars and night glow illuminate the earth with short-wave infrared radiation constantly. A major problem with today’s SWIR cameras is that they are very expensive to produce and hence not broadly available either within the military or to civilians. Using a relatively new tech- nology called compressive sensing (CS), enables a new type of camera with only a single pixel sensor in the sensor (a SPC). This new type of camera only needs a fraction of measurements relative to the number of pixels to be reconstructed and reduces the cost of a short-wave infrared camera with a factor of 20. The camera uses a micromirror array (DMD) to select which mirrors (pixels) to be measured in the scene, thus creating an underdetermined linear equation system that can be solved using the techniques described in CS to reconstruct the im- age. Given the new technology, it is in the Swedish Defence Research Agency (FOI) interest to evaluate the potential of a single pixel camera. With a SPC ar- chitecture developed by FOI, the goal of this thesis was to develop methods for sampling, reconstructing images and evaluating their quality. This thesis shows that structured random matrices and fast transforms have to be used to enable high resolution images and speed up the process of reconstructing images signifi- cantly. The evaluation of the images could be done with standard measurements associated with camera evaluation and showed that the camera can reproduce high resolution images with relative high image quality in daylight.

Thesis (M.Eng. and S.B.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
Includes bibliographical references.
by Jeremy R. Hui.
M.Eng.and S.B.

A novel optical surface testing method termed the grating-slit test is demonstrated to provide quantitative measurements and a large dynamic measurement range. Although it uses a grating and a slit, as in the traditional Ronchi test, the grating-slit test is different in that the grating is used as the object and the slit is located at the observation plane. This is an arrangement that appears not to have been previously discussed in the optical testing literature. The grating-slit test produces fringes in accordance with the transverse ray aberrations of an aberrated wavefront. By using a spatial light modulator as the incoherent sinusoidal intensity grating it is possible to modulate the grating and produce phase shifting to make a quantitative measurement. The method becomes feasible given the superior intensity grayscale ability and highly incoherent illumination of the spatial light modulator used. Since the grating is used as the object, there are no significant diffraction effects that usually limit the Ronchi test. A geometrical and a detailed physical analysis of the grating-slit test are presented that agree in the appropriate limit. In order to convert the measured transverse ray aberrations to the surface figure error, a surface slope sensitivity method is developed. This method uses a perturbation algorithm to reconstruct the surface figure error from the measured transverse ray aberration function by exact ray tracing. The algorithm takes into account the pupil distortion and maps the transverse ray aberration from the coordinate system of the observation plane to the coordinate system of the surface under test. A numerical simulation proves the validity of the algorithm. To demonstrate the dynamic range of the grating-slit testing method, two optical surfaces are measured. The first surface is a polished spherical mirror with 0.6 waves of aberration as measured with an interferometer. Using the concept of transverse ray aberration separation, the first surface is measured without a strict alignment requirement. The second surface is a concave ground optical surface with 275 waves of astigmatism. The measurements from the grating-slit test yield useable surface figure information that is in agreement with the results from other testing methods.

A process for micromachining of micro-mirror devices from silicon-on-insulator wafers was proposed and implemented. Test methods and force applicators for these devices were developed. Following successful fabrication of these devices, a novel process for fabrication of devices out of the plane of the silicon wafer was proposed, so that the devices could be actuated electrostatically. In particular, the process makes use of thick photoresist layers as a sacrificial mold into which an amorphous nickel-phosphorous alloy may be deposited. Ideal design of the electrostatically actuated micro-mirrors was investigated, and a final design was selected and modeled using FEA software, which found that serpentine-hinged devices require approximately 33% of the actuation force of their straight-beamed counterparts. An aqueous electroless plating solution composed of nickel acetate, sodium hypophosphite, citric acid, ammonium acetate, and Triton X-100 in was developed for use with the process, and bath operating parameters of 85°C and 4.5 pH were determined. However, this electroless solution failed to deposit in the presence of the photoresist. Several mechanisms proposed for deposition failure included leaching of organic solvents from the photoresist, oxidation of the nickel-titanium seed layer on which the deposition was intended to occur, and nonlinear diffusion of dissolved oxygen in the solution.

Les techniques de reconstruction de formes tridimensionnelles sont très largement utilisées dans de nombreux domaines, et notamment dans le domaine industriel ou médical. Et dans ces domaines, les techniques de mesure sans contact sont particulièrement étudiées, principalement parce qu'elles permettent de ne pas détériorer l'objet mesuré. Ce travail de thèse se place donc dans ce contexte et plus particulièrement dans le cas des dispositifs endoscopiques de mesure tridimensionnelle de surface par moyen optique. Dans le domaine médical, ce type d'instrument peut être appliqué à la coloscopie 3D ou à la chirurgie mini-invasive pour la détection de forme en surface de tissus biologiques. Dans cette thèse ce sont plus particulièrement les méthodes à base de stéréovision active ou passive, qui vont être étudiées et intégrées dans un dispositif miniaturisé. Différents modes de mesure vont être intégrés simultanément dans un unique instrument miniaturisé afin de permettre d'augmenter les performances de mesure : l'instrument peut adapter son principe de mesure à la texture de l'objet ou également à l'orientation des surfaces mesurées et plus généralement au contexte de la mesure. Ce travail de thèse est donc basé sur une étude algorithmique et instrumentale d'intégration de ces différents modes de mesure dans un unique instrument endoscopique miniaturisé. L'étude des modes de mesure par stéréovision a été réalisée en trois phases. Tout d'abord, c'est l'influence de l'orientation de la surface des objets mesurés dans un cas de stéréovision active qui est analysé. Puis une technique de basculement entre les voies de projection et d'acquisition du système de stéréovision active par actionnement bistable est proposé, ce qui permet d'adapter la mesure à l'orientation des surfaces à mesurer. Enfin, l'étude est orientée vers la possibilité de basculer d'un mode de stéréovision active vers un mode de stéréovision passive, toujours par actionnement bistable, le mode de stéréovision passive étant particulièrement adapté aux objets fortement texturés. Ainsi, trois modes de mesure sont réalisés dans ce nouveau système : deux modes de stéréovision active (avec inversion des voies de capture et de projection) et un mode de stéréovision passive. Pour réaliser la reconstruction tridimensionnelle, deux méthodes actives (par décalage de phase et par transformation de Fourier) et une méthode passive sont étudiées. Différentes performances de mesure sont obtenues selon les méthodes sélectionnées : un résultat de mesure plus précis est obtenu par les méthodes à. décalage de phase, une vitesse de mesure plus élevée est obtenu par les méthodes à transformée de Fourier ou par les méthodes passives. Le développement instrumental est également décrit dans cette thèse. Après modélisation optique et conception mécanique du système de mesure, un prototype de l'instrument endoscopique est fabriqué avec divers équipements spécifiques, tels qu'un DMD (Digital Micromirror Device), des guides d'images et des actionneurs électromagnétiques bistables. La validation expérimentale de la mesure tridimensionnelle est réalisée essentiellement sur objets mécaniques (du type mesure de détails sur pièce de monnaie), les deux méthodes actives et la méthode passives sont ainsi testées et confrontées. Enfin, une mesure sur un colon artificiel est réalisée par ce système pour se placer dans un contexte applicatif médical
The techniques of three dimensional shapes reconstruction are widely used in many fields, particularly in the industrial or medical field. And in these areas, non-contact measurement techniques are particularly studied, mainly because they don't damage the measured object. This work therefore falls within this context and in particular in the case of endoscopic devices of surface coordinate measuring by optical methods. ln the medical field, this type of instrument can be applied to 3D colonoscopy or minimally invasive surgery to the surface in the form of biological tissues. In this thesis, methods based on active or passive stereo vision are the principle, which will be studied and integrated into a miniaturized device. Different measurement modes will be incorporated simultaneously into a single miniaturized instrument to help increase measurement performance: the instrument can adjust its measurement principle to the texture of the object or also to the orientation of measured surfaces more generally to the context of the measurement. This thesis is based on an algorithmic study and instrumental integration of these different measurement modes into a single miniaturized endoscopic instrument. The study of the measurement modes stereovision was conducted in three phases. First, it is the influence of the orientation of the measured objects' surface in a case of active stereovision being analyzed. And a technique of switching between the projection and acquisition in an active stereovision system by bistable actuation is proposed, which allows to adapt the measurement to the orientation of the measured surfaces. Finally, the study is oriented towards the ability to switch from one active stereovision mode to one passive stereovision mode, always by bistable actuator operation, the passive stereovision mode is particularly suitable for highly textured objects. Thus, three measurement modes are made in the new system: two modes of active stereovision (reversing capture and projection channels) and a mode of passive stereovision. To achieve three-dimensional reconstruction, two active methods (phase shift and Fourier Transform) and a passive method are studied. Different performance measurements are obtained according to methods selected: a more accurate measuring result is obtained by the phase shift methods; a high measurement speed is obtained by the Fourier transform methods or by passive methods. The instrumental development is also described in this thesis. After optical modeling and mechanical design of the measuring system, a prototype of the endoscopic instrument is manufactured with various specific devices such as a DMD (Digital Micromirror Deviee),images guides and bistable electromagnetic actuators. The experimental validation of the three-dimensional measurement is performed mainly on mechanical objects (such as details measurement on a coin), both active and passive method methods are well tested and compared. Finally, an artificial colon is measured by this system to be placed in a medical application context

Thesis (M.S.)--University of Wisconsin--Madison, 2004.
Typescript. eContent provider-neutral record in process. Description based on print version record. Includes bibliographical references (leaves 66-72).

碩士
國立虎尾科技大學
光電工程系光電與材料科技碩士班
107
In this paper, a Digital Micromirror Device (DMD) based on Beaglebone black is developed to control spatial optical modulation digital phase shift interference. The input image changes the switching state of each micromirror, which can produce different grating patterns and digital phase shifts. The light source of the system uses He-Ne laser. The laser beam generates P-wave and S-wave with equal intensity through 45-degree polarizer and Wollaston prism (WP). Two beams produce two-dimensional diffracted light through DMD. Adjust the incident angle of two beams on DMD to overlap the reflected light of S-wave with the first-order diffracted light of P-wave, and control the output of four different grating images of DMD to generate four interfering images with π/2 phase difference in sequence; the image is captured by CCD camera. Finally, the program use the four-step phase-shifting algorithm to calculates the phase change and draws a chart. A digital phase-shifting interferometer, which can produce accurate phase change without moving optical elements and does not need to calibrate the phase-shifting value is realized. Compared with the digital phase-shifting interferometer using nematic liquid crystal spatial light modulation, this study does not need to change the arrangement of liquid crystal, as long as the output grating image can be changed to modulate the light field of different phases. It has the advantages of simplified experimental structure, high contrast and programmable control.

A dissertation submitted in fulfilment of the requirements for the degree of Master of Science, Faculty of Science, University of the Witwatersrand, Johannesburg, 2020
The ability to structure light into di erent pro les has many important applications such as materials processing and optical communications. Modern methods of structuring light involve the use of liquid crystal spatial light modulators (LCSLMs), owing to their versatility and robustness in optics and photonics experimentation. However, they have some limitations as they are sensitive to polarisation states of light, have slow refresh rates and are expensive. Traditionally used in digital light processing technologies, digital micromirror devices (DMDs) have been used in many research aspects pertaining to optics and photonics. They are composed of arrays of micromirrors that have binary operational states determined by the angle of tilt of each mirror about an axis. These states make DMDs amplitude-only light modulating devices, insensitive to polarisation states, have faster refresh rates and signi cantly cheaper compared to traditional liquid crystal spatial light modulators. We employ DMDs to create di erent structures of monochromatic light, from arbitrary shapes to at-top beams and spatial modes of light. We test the DMD's refresh rate and demonstrate mode switching at a rate of 3.57 Hz. We show a high quality in the generated beams, with correlation factors of more than 90%, and as such demonstrate a modern alternative to structuring light.
CK2020

碩士
國立中興大學
精密工程學系所
105
The headlamp design utilizes light sources with high collimation, and with uniform distribution of light energy to illumate the digital micromirror device (DMD). The DMD designed by Texas Inc. has high resolution of 2500 by 1600 array, 0.9-inch micromirror array diagonal and ± 12 degrees micromirror tile angle relative to flat state. In order to establish a freeform surface that can capture incident rays being reflected by the DMD, we first assume the light that hits the DMD to be as uniform and collimated as a white light laser. Since rays are parallel to each other, vectors of incident rays of the DMD are the same, and so are the reflected rays, which are also the incident rays of the freeform surface. We then mesh the DMD and the target plane to be illuminated 25 m away, according to the ECE R112 regulation, and assign positions to desired points. Every single point on the DMD has a corresponding point on the target plane, which help us determine the vector of each reflected ray of the freeform surface. We use MATLAB to calculate the propogation vector for each ray and obtain the positions of points on the freeform surface. Our optical models are of secondary optics, which means the optical design is an anti-glare design. However, the white light laser is at developing phase, so we use the light emitting diodes (LEDs) as light sources. We introduce optical components, such as collimated lens, reflective surface with high collimation and uniformity and Fresnel lens, to evenly distribut the energy of LED light onto the DMD. Moreover, in an anticipation to see a character to be projected onto the target plane, we aim to change paremeters of models so that the character will be as clear as what a white laser can produce.

碩士
國立中央大學
光電科學研究所碩士在職專班
93
Digital micro-mirror device (DMD), a spatial light modulator developed by Texas Instruments, was investigated. By using pulse width modulation to control the amount of time each mirror reflects the light, the projected image is created. The image performance of the projector is found surprisingly poor, with a signal of gray range of the color region noticeably smaller then that of a CRT monitor using standardized phosphors. It results flicker and contour discontinuous artifact defects. It use lumen meter to measure the projection system output light intensity by a variety of signal levels and specially to setup microscope of charge-coupled device (CCD) for observation direction to further analyses.

碩士
國立中興大學
精密工程研究所
91
In this research a novel digital micro-mirror device (DMD) with the T-shape hinge is developed. The simulation tool -Intellisuite, is employed to design the device, and also to study the effect of structure size and physics characteristic on the micro-mirror. A selective tungsten CVD technique is employed to fabricate the support post. The nano-indenter is used to analyze the mechanic reliability of testing hinge for the device with different structures. The requirement of material properties for hinge is low tensile stress and low resistivity. The character of the hinge is critical to the reliability and lifetime of DMD. The CoSixNy via reactive sputtering is the potential hinge material with enough toughness. It observed that the CoSixNy film stress will increase as process pressure increases. Because tungsten post was etched in the HF etchant, there is failure in process flow of release step. The mainframe of devices can been produced routinely by modification of devices fabrication process. In the hinge reliability testing, it had loaded force in ten thousand times of device driving force on the hinge. The testing was done about thirty hours. The result of hinge reliability testing doesn’t have any creak or hinge memory. The hinge is too strong for thickness of hinge. However, the corresponding hinge thickness lends to high driving voltage. There can’t change condition that environment in the test .We had try to analysis and solve some problems on the experiment.

碩士
國立中興大學
機械工程學系所
98
In this study, we present a collinear holographic storage system, which uses the digital micromirror device (DMD) and the holographic optical element (HOE), in order to realize an integrated collinear holographic storage system. We combine the system of the small-form-factor optical pickup head (SFFOPH) with the collinear holographic storage system which has been proposed by the Optware Corporation. The storage system consists of an HOE, a DMD, a green light laser with the wavelength of 532nm, and an objective lens. The functions of the HOE include diffraction, aberration-correcting, and servo-signal generation. The DMD is driven by the computer and outputs a 2-D page data in the system. There are three parts in the thesis. First, we designed the storage system by the optical simulation software, simplified the optical system, and reduced the number of optical components by adding the HOE. Secondly, we approximated the phase polynomial coefficients of the HOE by binary optics, and obtained its diffraction pattern by the etching processes after the photolithography. Subsequently, we measured the optical efficiencies of the HOE and then used the atomic force microscope (AFM) to verify if the requirements of the design were met. Finally, we set up the optical system to examine the effect of an integrated collinear holographic storage system. The experimental results show that the CCD receives the image pattern of the stored data from the HOE in the negative-one diffraction order and the photo detector receives the focusing error signal (FES) from the same HOE in the positive-one diffraction order.

碩士
國立臺灣大學
資訊工程學研究所
106
As LED and communication technology advances, visible light communication (VLC) is improved by past research for decade. However, receiver is one of the main problems of VLC system to deploy in reality. Photodiode is the most commonly used receiving component of a VLC system. Due to characteristic of photodiode, photodiode-based receiver is vulnerable to many types of interferences. Furthermore, photodiode-based solution does not have the ability to separate and decode signals from multiple sources within the FOV, which is unacceptable for communication. In this thesis, we design and implement a dynamic-FOV VLC receiver which can support high-speed communications and have ability to separate signals from multiple transmitters broadcasting simultaneously. Our design further enables multi-transmitter communications without the need of a complex multiplexing technique. To mitigate interference, we leverage compressive sensing for fast detection of the transmitters, followed by dynamically adjustment of the size and the location of the receiver’s FOV. Moreover, we propose a method that exploits a control signal to accurately detect all transmitters under multi-transmitter scenarios. Finally, we adopt software solutions to synchronize received samples, instead of using hardware I/O, resulting in fast and accurate synchronization. Results of real-world experiments have shown that our system can reduce up to 10% decoding error rate under interference from sunlight, and also eliminate interference from other transmitter broadcasting at the same time. Our evaluation result also shows that the proposed system can still reliably detect the location of the transmitter even if the transmitters have movements up to 2 pixels during detection.

碩士
國立臺灣科技大學
機械工程系
95
The aim of this thesis is to use the DMD (Digital Micromirror Device) Maskless Photolithography System to fabricate simple TFT. In the system, we can use the eyepiece of microscope and observe the pattern that form DLP（Digital Light Processing）project on the photoresist. For this reason, we can search the focus of image and control photolithography quality. This research invite the method of gray scale alignment, it can solve shortcomings of optics alignment. Besides, by utilize gray scale adjustment to improve the resolution and imaging definition quality. By fabricating the simple TFT, the result of gray scale alignment and gray scale adjustment can be proved that, gray scale alignment can reduce the light destroy photoresist. In addition, gray scale adjustment can be defined pattern previously so it can be more useful in fabricate semiconductor devices. This research follow the simple TFT principle to make modeling of surrounding gate TFT and make researching discussion about the measuring results. In addition, by using the benefits of convenience of this mask-produced system, it can control the etching time for making thin film with different thickness. Also hope that, it can fabricate more 3D semiconductor devices in the future.

碩士
國立臺灣科技大學
機械工程系
97
The aim of this study is to improve the DMD (Digital Micromirror Device) Maskless Photolithography System, by using Ultra-Violet Light Source. In the system, the eyepiece of microscope was employed to observe the pattern from DLP（Digital Light Processing）project on the photoresist. Therefore, the focus of image and control of photolithography quality can be analysed. This sdudy uses Ultra-Violet Light source to replace the original visible light source in DLP. Since the wavelength of UV light is shorter, the system resolution can be improved. Because UV light or visible light source does not uniform, a step mask photolithography to control the uniformity of exposure. This experiment manufactures the smallest line width pattern and electrode pattern, and confirms this resolution of system by the experiment result. It will be proved that system resolution promotes from 3.4μm (visible light source) to 2.4μm (ultraviolet light photo source),using step mask photolithography to be possible to manufacture complex or the slightly big area electrode design.

碩士
國立臺灣大學
醫學工程學研究所
105
Surface functionalization of Surface Plasmon Resonance Biosensor (SPR biosensor) is characterized by thiol-gold based self-assembled monolayer. In addition, there is not so many research and application of polymer layer, dextran for example, as a modified method of the substrate. In this study, we propose a method of surface functionalization using parylene as a linker layer, due to its advantages in the detection of applications. We use a probe molecule with thiol group to immobilize the sensing surface by a UV-triggered click reaction and import a digital light processing (DLP) system to control the exposure pattern of ultraviolet light. The modification method can be ‘‘Spatially Selective’’ on the sensing surface. In the fabrication section, we use a special chemical vapor deposition system to coat parylene and calculate the film thickness through the angle shift of SPR. According to the simulation results, the optimized thickness of the film is 25 nm. For UV exposure, we built a UV exposure system with DLP4500 0.45 WXGA DMD. The exposure area is 10×15 mm2, the UV power per unit area is 1×10-4 W/ mm2, and the minimum frame period is 235 μs. For real-time measurement, we use a SPR device of our laboratory. To verify, we selected a 25-mer probe DNA as a modified model. The results show that we can modify the probe DNA, and create 0.00902 RIU shift in 1000 seconds. The volume ratio of 1 μM probe DNA and 5 mM DMPA methanol solution is 1:1. Our reaction rate is about 8.9 times faster than sulfur-gold reaction and produces 1° angular offset in UV-exposure. In the last chapter of the thesis, we discuss the potential issues of future technology and development, such as in the same concentration of probe DNA conditions, our chips have high performance than the traditional chips.

碩士
國立成功大學
機械工程學系
105
A maskless lithography system is developed which can generate any arbitrary patterns. The system consists of an illumination system, a digital micro mirrors devices (DMD), and a projection system including an achromatic lens pair and a double-sided micro lens and spatial filter array (D-MSFA). The DMD plays as a virtual mask, which can generate any arbitrary patterns by individually turning on or off each micro mirror. The achromatic lens pair projects image of each DMD’s mirror onto the first lens of D-MSFA. The D-MSFA consists of 2 micro lens arrays and a pinholes array which is located at the focal plane of the first micro lens array. The first micro lens array(MLA1) focus the light from DMD to its corresponding pinhole, the second micro lens array( MLA2) then projects image of pinholes array onto substrate to form a points array of light. The substrate is carried by a XY stage, software is developed to synchronize the XY stage moving with DMD. The profile of microlens is design and optimized by a software namely Zemax optics studio to a chieve smallest focused spot size. A technique has been developed to fabricate a large area D-MSFA, which ensures the high accuracy profile and alignment between micro lens arrays and pinhole array. After fabrication, D-MSFA achieves 10μm UV spot sizes at FHMW level. Finally, this study successfully generate arbitrary patterns with the minimum line width is 5 μm.

碩士
國立臺灣海洋大學
機械與機電工程學系
99
Purpose of this study using the phosphor coated with Pt-porphyrin in the 40 nm polymer particles, later called as Pt phosphorescent particles, as the oxygen sensing material. In the study, we designed with small, automated and micro-droplet array based biochips. Through the projector's Digital Micromirror Device (DMD), controlled UV-LED light source to project graphics, and calculated oxygen consumption of the Stimulation droplet by the Labview program, in order to the automatic measurement, we immediately excited and calculated oxygen concentration by the Phosphorescence Phase Method. Using different materials detection the performance of the oxygen concentration in the air and the liquid. This optical detection method has high sensitivity, high specificity, fast response, easy miniaturization, long-term monitoring in harsh environments and many other advantages. This study first understand the characteristics of Pt phosphor particles. We proof the biological compatibility of particles in the study. And we explore the impact of phosphorescence lifetime of Pt phosphorescence particles in different temperatures and different sintering temperature. In order to ensuring the proposed system is accurate, we corrected the stability of the measure phase to the best treatment, and different projection screen will not result different measurement results. By controllable DMD oxygen phosphorescence system measured effects, the Labview program record phase change at different phosphorescent array, to reach the purpose of automatically measuring system. In this study, we measured oxygen consumption will know the concentration of glucose in the response. And the measurement of cell oxygen consumption observed cell metabolism in 96 plate, understand the oxygen consumption rate (OCR) in the 96 plate. The next phase is expected to use DMD phosphorescent sensor system to toxic effect and drug development, cells will be cultured in isolate and small environment and provide a fast and convenient biomedical detection.

In this thesis, studies on the applications of digital micro-mirror devices (DMD) to enhancement of digital optical microscope images are presented. This involves adaptation of the fast switching capability and high optical efficiency of DMD to control the spatial illumination of the specimen. The first study focuses on a method of using DMD to enhance the dynamic range of a digital optical microscope. Our adaptive feedback illumination control method generates a high dynamic range image through an algorithm that combines the DMD-to-camera pixel geometrical mapping and a feedback operation. The feedback process automatically generates an illumination pattern in an iterative fashion that spatially modulates the DMD array elements on a pixel-by-pixel level. Via experiment, we demonstrate a transmitted-light microscope system that uses precise DMD control of a DMD-based projector to enhance the dynamic range ideally by a factor of 573. Results are presented showing approximately 5 times the camera dynamic range, enabling visualization over a wide range of specimen characteristics. The second study presents a technique for programming the source of the spherical reference illumination in a digital in-line holographic microscope using DMD. The programmable point source is achieved by individually addressing the elements of a DMD to spatially control the illumination of the object located at some distance from the source of the spherical reference field. Translation of the ON-state DMD mirror element changes the spatial location of the point source and consequently generates a sequence of translated holograms of the object. The experimental results obtained through numerical reconstruction of translated holograms of Latex microspheres shows the possibility of expanding the field of view by about 263% and also extracting depth information between features in an object volume. The common challenges associated with the use of DMD in coherent and broadband illumination control in both studies are discussed.

Trabalho de Projeto do Mestrado Integrado em Engenharia Biomédica apresentado à Faculdade de Ciências e Tecnologia
A amostragem é um processo cada vez mais fundamental nos tempos modernos, permitindo a passagem do domínio analógico para o digital. Até então, esta técnica tem-se regido pelo teorema de Shannon-Nyquist o que, muitas vezes, leva à necessidade de armazenamento de grandes quantidades de dados. Recentemente, emergiu uma técnica de amostragem de sinais promissora designada Compressed Sensing (CS). Tal como o próprio nome indica, este método permite efetuar o processo de compressão aquando da aquisição, e, portanto, a reconstrução do sinal é possível a partir de um pequeno número de medições. O aparecimento desta técnica possibilitou, em 2006, o desenvolvimento de uma câmera de pixel único (SPC) por um grupo de investigação da Universidade de Rice, EUA. Trata-se de um novo paradigma que combina uma arquitetura simples com os princípios matemáticos e os algoritmos associados ao CS.O trabalho descrito na presente dissertação foca-se na implementação tanto do hardware como do software associados à câmera de pixel único. Para tal, numa primeira fase, foram desenvolvidas ferramentas de simulação para estudar o comportamento do sistema e o desempenho dos algoritmos utilizados (TVAL3 e NESTA). Nomeadamente, avaliou-se a influência do rácio de compressão, do ruído nas medições e da ordem das matrizes de sensoriamento utilizadas. Relativamente a esta etapa, verificou-se que a ordem sequencial é aquela que deve ser empregue para obter tanto uma melhor qualidade de imagem como tempos de reconstrução inferiores. Para além disso, esta ordem permite reduzir os rácios de compressão até 30%. Comparando os dois algoritmos de reconstrução empregues, o TVAL3 é aquele que apresenta um melhor desempenho quando estamos perante situações de compressão do número de amostras utilizadas. Outro aspeto a considerar é que os algoritmos de reconstrução usados empregam transformadas rápidas que permitem acelerar significativamente os processos de reconstrução da imagem.Tendo em conta os conhecimentos adquiridos aquando da simulação, procedeu-se à implementação do protótipo da SPC. Os seus principais componentes são o dispositivo de microespelhos digital (DMD), o sistema de aquisição digital e o detetor de luz (que neste caso, um fotodíodo). O primeiro permite a codificação do sinal através da projeção de iluminação estruturada (matrizes de sensoriamento). Os resultados obtidos corroboram as conclusões retiradas durante a fase de simulação.Por fim, concluiu-se que esta câmera de arquitetura simples tem potencial para a obtenção de imagens com boa resolução.
Sampling has increasingly become more important in modern times, allowing the transition from analog to digital domain. Until then, this technique has been defined by the Shannon-Nyquist theorem, which often leads to the need of large amount of data's storage. Recently, a promising signal sampling technique called Compressive Sensing (CS) has emerged. As the name implies, this method allows the compression process to be carried out at the time of acquisition, and therefore, making possible the signal's reconstruction from a small number os measurements.In 2006, due to this technique's proposal, a research group from Rice University, USA, developed a single-pixel camera (SPC). This new paradigm combines a simple architecture with the mathematical principles and algorithms of the CS.The work described in this dissertation focuses on the implementation of both the hardware and software, associated with the single-pixel camera. In order to do so, in a first stage, simulation tools were developed to study the system's behavior as well as the performance of the algorithms used (TVAL3 and NESTA). We evaluated specifically, the influence of the compression ratio, the noise on the measurements and sensing matrices order. Regarding this step, it has been found that the sequential order is the best method to be employed in order to obtain both better image quality and lower reconstruction times. In addition, this order reduces compression ratios by up to 30%. Comparing the two reconstruction algorithms used, TVAL3 is the one presenting a better performance when we are leading with compression cases. Furthermore, the reconstruction algorithms employ rapid transformations, allowing to significantly accelerate the image's reconstruction.Taking into account the knowledge acquired during the simulation, the SPC prototype was implemented. Its main components are the digital micromirror device (DMD), the digital acquisition system, and the light detector (in this case, a photodiode). The first allows the signal's encoding through the projection of structured illumination (sensing matrices). The results obtained corroborate the conclusions drawn during the simulation phase.Finally, we concluded that this simple architecture camera has the potential to obtain images with good resolution.

Imaging mass spectrometry (MS) analysis allows scientists the ability to obtain spatial and chemical information of analytes on a wide variety of surfaces. The ability to image biological analytes is an important tool in many areas of life science research, including: the ability to map pharmaceutical drugs in targeted tissue, to spatially determine the expression profile of specific proteins in healthy vs. diseased tissue states, and to rapidly interrogate biomolecular microarrays. However, there are several avenues for improving the imaging MS experiment for biological samples. Three significant directions this work addresses include: (1) reducing chemical noise and increasing analyte identification by developing sample preparation methodologies, (2) improving the analytical figures of merit (i.e., spatial resolution, analysis time) by implementing a spatially dynamic optical system, and (3) increasing both mass spectral resolution and ion detection sensitivity by modifying a commercial time-of-flight (TOF) MS. Firstly, sample methodology schemes presented in these studies consist of obtaining both ?top-down? and ?bottom-up? information. In that, both intact mass and peptide mass fingerprinting data can be obtained to increase protein identification. This sample methodology was optimized on protein microarrays in preparation for bio tissue analysis. Other work consists of optimizing novel sample preparation strategies for hydrated solid-supported lipid bilayer studies. Sample methods incorporating nanomaterials for laser desorption/ionization illustrate the ability to perform selective ionization of specific analytes. Specifically, our results suggest that silver nanoparticles facilitate the selective ionization of olefin containing species (e.g., steroids, vitamins). Secondly, an advanced optical design incorporating a spatially dynamic optical scheme allows for laser beam expansion, homogenization, collimation, shaping, and imaging. This spatially dynamic optical system allows user defined beam shapes, decreases analysis times associated with mechanical movement of the sample stage, and is capable of increasing the MS limits of detection by simultaneously irradiating multiple spots. Lastly, new data acquisition strategies (multiple anode detection schemes) were incorporated into a commercial time-of-flight mass spectrometer to increase both sensitivity and resolution in a matrix assisted laser desorption/ionization mass spectrometer. The utility of this technique can be applied to many different samples, where high mass spectral resolution allows for increased mass measurement accuracy.