Relevant bibliographies by topics / Dry etch

Contents

  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'Dry etch'

Author: Grafiati
Published: 28 September 2024
Last updated: 31 July 2025

Create a spot-on reference in APA, MLA, Chicago, Harvard, and other styles

Select a source type:

Consult the lists of relevant articles, books, theses, conference reports, and other scholarly sources on the topic 'Dry etch.'

Next to every source in the list of references, there is an 'Add to bibliography' button. Press on it, and we will generate automatically the bibliographic reference to the chosen work in the citation style you need: APA, MLA, Harvard, Chicago, Vancouver, etc.

You can also download the full text of the academic publication as pdf and read online its abstract whenever available in the metadata.

Journal articles on the topic "Dry etch"

1

Lee, Jong Seok, Geun Min Choi, Ji Nok Jung, et al. "Development of a Integrated Dry/Wet Hybrid Cleaning System." Solid State Phenomena 195 (December 2012): 21–24. http://dx.doi.org/10.4028/www.scientific.net/ssp.195.21.

Full text
Abstract:
With scaling of ULSI devices, the process temperatures are continuously lowered. The oxide films, which were deposited at low temperature, show fast etching rates during wet etching compared to high temperature films. Also, the etch rates differ largely from other film deposition conditions. In order to overcome these etch rate differences during surface preparation, dry cleaning processes had been introduced where the etch selectivity of the soft oxide films to the thermal oxide are very similar, regardless of the film deposition conditions and the deposition temperature.
APA, Harvard, Vancouver, ISO, and other styles
2

Castro, Marcelo S. B., Sebastien Barnola, and Barbara Glück. "Selective and Anisotropic Dry Etching of Ge over Si." Journal of Integrated Circuits and Systems 8, no. 2 (2013): 104–9. http://dx.doi.org/10.29292/jics.v8i2.380.

Full text
Abstract:
Inductively coupled plasma (ICP) etching of Ge with high selectivity over Si and anisotropic etched profiles using CF4, HBr, SF6, and Cl2 reactive gases has been studied. Because pressure and biased power should be the most important parameters to drive selectivity and etch profile, they were varied from 4 to 50 mTorr and from 0 to 50 W, respectively, so as to investigate their influence on process. Total gas flow (100 sccm) and source power (350 W) were initially held constant. Selectivity greater than 100:1 of Ge over Si was achieved using 100 % Cl2 etch gas at 50 mTorr and zero bias power b
APA, Harvard, Vancouver, ISO, and other styles
3

PARK, JONG CHEON, JIN KON KIM, TAE GYU KIM, et al. "DRY ETCHING OF SnO2 AND ZnO FILMS IN HALOGEN-BASED INDUCTIVELY COUPLED PLASMAS." International Journal of Modern Physics B 25, no. 31 (2011): 4237–40. http://dx.doi.org/10.1142/s0217979211066660.

Full text
Abstract:
High density plasma etching of SnO 2 and ZnO films was performed in chlorine- ( Cl 2/ Ar and BCl 3/ Ar ) and fluorine-based ( CF 4/ Ar and SF 6/ Ar ) inductively coupled plasmas. The etch process window for fabricating metal oxide nanowires with high aspect ratios including high and controllable etch rates, high etch selectivities to mask material and high anisotropy was established. Maximum etch rates of ~2050 Å/minute ( BCl 3/ Ar ) and ~1950 Å/minute ( SF 6/ Ar ) for ZnO , and ~1950 Å/minute ( Cl 2/ Ar ) and ~2000 Å/minute ( SF 6/ Ar ) for SnO 2 were obtained. Ni was found to provide very hi
APA, Harvard, Vancouver, ISO, and other styles
4

Kwon, Jiyoung, Jungwon Kim, Dongseok Choi, and Duck-Su Kim. "The Influence of Drying Time, Application Mode, and Agitation on the Dentin Bond Strength of a Novel Mesoporous Bioactive Glass-Containing Universal Dentin Adhesive." Journal of Functional Biomaterials 16, no. 7 (2025): 247. https://doi.org/10.3390/jfb16070247.

Full text
Abstract:
This study evaluated the influence of drying time, application mode, and agitation on the micro-tensile bond strength (μTBS) of a novel mesoporous bioactive glass-containing universal adhesive (Hi-Bond Universal). Twelve experimental groups were established according to drying time (blot-dry, 10 s dry, or 20 s dry), application mode (total-etch or self-etch), and agitation (with or without). The μTBS test and failure mode analysis were performed for each experimental group (n = 20), and an adhesive interface was observed using field-emission scanning electron microscopy. The μTBS of all experi
APA, Harvard, Vancouver, ISO, and other styles
5

Lenzi, Tathiane Larissa, Fabio Zovico Maxnuck Soares, and Rachel de Oliveira Rocha. "Does Bonding Approach Influence the Bond Strength of Universal Adhesive to Dentin of Primary Teeth?" Journal of Clinical Pediatric Dentistry 41, no. 3 (2017): 214–18. http://dx.doi.org/10.17796/1053-4628-41.3.214.

Full text
Abstract:
Objective: To evaluate the effect of bonding strategy on microtensile bond strength (μTBS) of a new universal adhesive system to primary tooth dentin. Study design: Flat dentin surfaces from 25 primary molars were assigned to 5 groups according to the adhesive and bonding approach: Adper Single Bond 2 (two-step etch-and-rinse adhesive) and Clearfil SE Bond (two-step self-etch system), as controls; Scotchbond Universal Adhesive–self-etch, dry or wet-bonding etch-and-rinse strategies. Composite buildups were constructed and the teeth were sectioned to obtain bonded sticks (0.8 mm2) to be tested
APA, Harvard, Vancouver, ISO, and other styles
6

Chiang, Chao-Ching, Xinyi Xia, Jian-Sian Li, Fan Ren та Stephen J. Pearton. "Selective Wet and Dry Etching of NiO over β-Ga2O3". ECS Transactions 111, № 2 (2023): 73–83. http://dx.doi.org/10.1149/11102.0073ecst.

Full text
Abstract:
Patterning of NiO/Ga2O3 heterojunctions requires the development of selective wet and dry etch processes. Solutions of 1:4 HNO3 :H2O exhibited measurable etch rates for NiO above 40 °C and activation energy for wet etching of 172.9 kJ.mol-1 (41.3 kCal.mol-1, 1.8 eV/atom), which is firmly in the reaction-limited regime. The selectivity over β-Ga2O3 was infinite for temperatures up to 55°C. The strong negative enthalpy for producing the etch product Ga(OH)4 suggests that HNO3-based wet etching of NiO occurs via the formation and dissolution of hydroxides. For dry etching, Cl2/Ar Inductively Coup
APA, Harvard, Vancouver, ISO, and other styles
7

Szweda, Roy. "Dry etch processes for optoelectronic devices." III-Vs Review 14, no. 1 (2001): 42–47. http://dx.doi.org/10.1016/s0961-1290(01)89007-4.

Full text
APA, Harvard, Vancouver, ISO, and other styles
8

Heidenblut, Maria, D. Sturm, Alfred Lechner, and Franz Faupel. "Characterization of Post Etch Residues Depending on Resist Removal Processes after Aluminum Etch." Solid State Phenomena 145-146 (January 2009): 349–52. http://dx.doi.org/10.4028/www.scientific.net/ssp.145-146.349.

Full text
Abstract:
The subject of this report is the characterization of plasma etch residues after a metal etch process with Cl2/BCl3 etch gases. One of the interactive factors in the removability of the residues is the photo-mask removal process (DSQ). Depending on the DSQ process the molecular structure of the residues will differ. For our findings, we used laser spectroscopy and Fourier-transformed infrared spectroscopy to obtain information about the degree of the cross-linking of the molecular structure of residues in a post-metal etch cleaning process. The post-etch cleaning is important for removing resi
APA, Harvard, Vancouver, ISO, and other styles
9

Kang, In Ho, Wook Bahng, Sung Jae Joo, Sang Cheol Kim, and Nam Kyun Kim. "Post Annealing Etch Process for Improved Reverse Characteristics of 4H-SiC Diode." Materials Science Forum 615-617 (March 2009): 663–66. http://dx.doi.org/10.4028/www.scientific.net/msf.615-617.663.

Full text
Abstract:
The effects of post annealing etch process on electrical performances of a 4H-SiC Schottky diodes without any edge termination were investigated. The post etch was carried out using various dry the dry etch techniques such as Inductively Coupled Plasma (ICP) and Neutral Beam Etch (NBE) in order to eliminate suspicious surface damages occurring during a high temperature ion activation process. The leakage current of diodes treated by NBE measured at -100V was about one order lower than that of diode without post etch and a half times lower than that of diode treated by ICP without a significant
APA, Harvard, Vancouver, ISO, and other styles
10

Sung, Da In, Hyun Woo Tak, Dong Woo Kim, and Geun Young Yeom. "A comparative study of Cx(x = 4, 5, 7)F8 plasmas for dry etch processing." Materials Express 10, no. 6 (2020): 903–8. http://dx.doi.org/10.1166/mex.2020.1776.

Full text
Abstract:
In this study, the SiO2 etch characteristics of perfluorocarbon such as C4F8, C5F8, and C7F8 were investigated using inductively coupled plasmas (ICPs) to study the effect of a high C/F ratio on the etch characteristics of SiO2 for the ICP. The SiO2 rates and etch selectivities over Si3N4 and amorphous carbon layer (ACL) were measured by using the mixtures of Cx(x = 4, 5, 7)F8/Ar/O2. The higher C/F ratio of perfluorocarbon showed lower SiO2 etch rate but exhibited higher etch selectivities over Si3N4 and ACL due to the higher C2 while keeping the similar F in the plasma as observed by optical
APA, Harvard, Vancouver, ISO, and other styles
More sources

Dissertations / Theses on the topic "Dry etch"

1

Nilgianskul, Tan. "Control of a semiconductor dry etch process using variation and correlation analyses." Thesis, Massachusetts Institute of Technology, 2016. http://hdl.handle.net/1721.1/107025.

Full text
Abstract:
Thesis: M. Eng. in Manufacturing, Massachusetts Institute of Technology, Department of Mechanical Engineering, 2016.<br>This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.<br>Cataloged from student-submitted PDF version of thesis.<br>Includes bibliographical references (pages 67-69).<br>Statistical process control (SPC) is one of the traditional quality control methods that, if correctly applied, can be effective to improve and maintain quality and yield in any manufacturing facility. The purpose of
APA, Harvard, Vancouver, ISO, and other styles
2

Muthukrishnan, N. Moorthy. "Characterization and modeling of dry etch processes for titanium nitride and titanium films in Cl₂/N₂ and BCl₃ plasmas." Diss., This resource online, 1996. http://scholar.lib.vt.edu/theses/available/etd-06062008-151045/.

Full text
APA, Harvard, Vancouver, ISO, and other styles
3

Catala, Antoine. "Gravure Plasma du Nitrure de Gallium pour la réalisation de micro LEDs à hautes performances." Electronic Thesis or Diss., Université Grenoble Alpes, 2024. http://www.theses.fr/2024GRALT041.

Full text
Abstract:
Avec le développement de l’internet des objets et des réalités augmentées et virtuelles, la demande en micro-écran très résolu est apparue. Des microLED (µLED) à base de Nitrure de Gallium (GaN) semble une solution prometteuse grâce à ses propriétés électro optiques, notamment son grand gap direct. Les µLED à base de GaN subissent cependant une chute drastique de leur efficacité lorsque leur dimension diminue en raison, au moins partiellement, de dommages induits sur les flancs par l’étape de singularisation.Ces travaux de thèse se concentrent sur la compréhension et la réduction de l’endommag
APA, Harvard, Vancouver, ISO, and other styles
4

Villa, Katherine. "The use of wet-to-dry dressings for mechanical debridement." Honors in the Major Thesis, University of Central Florida, 2013. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/928.

Full text
Abstract:
Clinical management of complex wounds is essential to promote wound healing. Prolonged healing time may lead to longer and more costly hospitalizations and poorer patient outcomes. The removal of nonviable, necrotic tissue via debridement is vital to the healing process. One of the most common debridement techniques, in the United States, is the use of wet-to-dry dressings. There are no defined guidelines or protocols for the timing of dressing changes and subsceequent debridement. The purpose of this study was to perform a review of literature to determine the rationale for the use of wet-to-
APA, Harvard, Vancouver, ISO, and other styles
5

Hamlett, Anna. "Human trafficking : a modern day slavery." Honors in the Major Thesis, University of Central Florida, 2009. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/1270.

Full text
Abstract:
This item is only available in print in the UCF Libraries. If this is your Honors Thesis, you can help us make it available online for use by researchers around the world by following the instructions on the distribution consent form at http://library.ucf.edu/Systems/DigitalInitiatives/DigitalCollections/InternetDistributionConsentAgreementForm.pdf You may also contact the project coordinator, Kerri Bottorff, at kerri.bottorff@ucf.edu for more information.<br>Bachelors<br>Sciences<br>Political Science
APA, Harvard, Vancouver, ISO, and other styles
6

Torres, Gabriella. "An exploratory study : romanticism in modern day men and women." Honors in the Major Thesis, University of Central Florida, 2010. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/1509.

Full text
Abstract:
This item is only available in print in the UCF Libraries. If this is your Honors Thesis, you can help us make it available online for use by researchers around the world by following the instructions on the distribution consent form at http://library.ucf.edu/Systems/DigitalInitiatives/DigitalCollections/InternetDistributionConsentAgreementForm.pdf You may also contact the project coordinator, Kerri Bottorff, at kerri.bottorff@ucf.edu for more information.<br>Bachelors<br>Sciences<br>Psychology
APA, Harvard, Vancouver, ISO, and other styles
7

Miniello, Jonathan. "Missing the consequences misperceptions of the 1967 six-day israeli-arab war." Honors in the Major Thesis, University of Central Florida, 2011. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/478.

Full text
Abstract:
In recent times, the issues surrounding the "67 borders" have become part of the public debate. In recent speeches, President Obama has suggested that Israel should return to pre-1967 borders with "land-swaps" in exchange for some form of peace with the Palestinians living within current Israeli territory. The validity of Obama's suggestion has been questioned by both members of the political left and right and in the opinion of this author, with considerable merit. However, the ultimate judgment on the validity of Obama's suggestion should be based on a study encompassing the decisions, both
APA, Harvard, Vancouver, ISO, and other styles
8

Ahmed, Shameem. "Day in and day out : women's experience in the family and the reconstruction of their secondary status." Thesis, McGill University, 1991. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=59959.

Full text
Abstract:
The basic research question this thesis addresses is how the secondary status of Bangladeshi women is reinforced through household labour. It is argued that gender relations and housework shape each other. To develop this, it examines the degree of participation of women in different areas of housework and family decisions. The thesis further explores whether the autonomy of women coming from the traditional Bangladeshi family set-up has increased as a result of their immigration to Canada and their exposure to Canadian family values. This is done by a comparison of the family experiences of C
APA, Harvard, Vancouver, ISO, and other styles
9

Guijarro, de Ortiz Myriam. "Literacy Activities that Parents of Preschool Children Attending Day Care Promote at Home and Community Settings." Honors in the Major Thesis, University of Central Florida, 2005. http://digital.library.ucf.edu/cdm/ref/collection/ETH/id/760.

Full text
Abstract:
This item is only available in print in the UCF Libraries. If this is your Honors Thesis, you can help us make it available online for use by researchers around the world by following the instructions on the distribution consent form at http://library.ucf<br>Bachelors<br>Education<br>Exceptional Education
APA, Harvard, Vancouver, ISO, and other styles
10

Alabed, Hadhom Mohamed. "The effects of fasting for a single day, and during Ramadan, upon performance." Thesis, Liverpool John Moores University, 2010. http://researchonline.ljmu.ac.uk/5958/.

Full text
Abstract:
Ramadan requires individuals to abstain from food and fluid intake between sunrise and sunset; physiological considerations predict that poorer mood, physical performance and mental performance will result. In addition, any difficulties will be worsened because preparations for fasting and recovery from it often mean that nocturnal sleep is decreased in length, and this independently affects mood and performance. Previous field studies have indicated that some of these predictions are borne out in practice; in the first study of the present thesis, a field study performed in Libya, these predi
APA, Harvard, Vancouver, ISO, and other styles
More sources

Books on the topic "Dry etch"

1

Deepak, Ranadive, and Society of Photo-optical Instrumentation Engineers., eds. Dry etch technology: 9-10-September 1991, San Jose, California. SPIE, 1992.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
2

Andrews, Mark. Dry suit diver manual. PSA International, 2005.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
3

Rowney, Eddie. The guide to dry stone walling. E. Rowney, 2000.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
4

Ross, Kathy. Every day is Earth Day. Millbrook Press, 1994.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
5

Henry, Mitchell. Any day. Indiana University Press, 1997.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
6

Ross, Kathy. Every day is Earth Day: A craft book. Millbrook Press, 1994.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
7

Ross, Kathy. Every day is Earth Day: A craft book. Millbrook Press, 1995.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
8

Edward, Miller. Recycling day. Holiday House, 2015.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
9

Parker, Marjorie. Jasper's day. Kids Can Press, 2002.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
10

Parker, Marjorie. Jasper's day. Kids Can Press, 2002.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
More sources

Book chapters on the topic "Dry etch"

1

van Roosmalen, A. J., J. A. G. Baggerman, and S. J. H. Brader. "Etch Processes." In Dry Etching for VLSI. Springer US, 1991. http://dx.doi.org/10.1007/978-1-4899-2566-4_6.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Pearton, S. J., and R. J. Shul. "Dry Etch Damage in Widegap Semiconductor Materials." In Defects in Optoelectronic Materials. CRC Press, 2022. http://dx.doi.org/10.1201/9780367811297-5.

Full text
APA, Harvard, Vancouver, ISO, and other styles
3

Mansfield, William M. "Enhancement of Dry-Etch Resistance of Poly(butene-1 sulfone)." In Polymers for High Technology. American Chemical Society, 1987. http://dx.doi.org/10.1021/bk-1987-0346.ch027.

Full text
APA, Harvard, Vancouver, ISO, and other styles
4

Claes, Martine, Quoc Toan Le, J. Keldermans, et al. "Photoresist Characterization and Wet Strip after Low-k Dry Etch." In Solid State Phenomena. Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/3-908451-46-9.325.

Full text
APA, Harvard, Vancouver, ISO, and other styles
5

Schaedeli, U., M. Hofmann, E. Tinguely, and N. Münzel. "A Top-Surface Imaging Approach Based on the Light-Induced Formation of Dry-Etch Barriers." In ACS Symposium Series. American Chemical Society, 1995. http://dx.doi.org/10.1021/bk-1995-0614.ch020.

Full text
APA, Harvard, Vancouver, ISO, and other styles
6

Ito, Hiroshi, Mitsuru Ueda, and Mayumi Ebina. "Copolymer Approach to Design of Sensitive Deep-UV Resist Systems with High Thermal Stability and Dry Etch Resistance." In ACS Symposium Series. American Chemical Society, 1989. http://dx.doi.org/10.1021/bk-1989-0412.ch004.

Full text
APA, Harvard, Vancouver, ISO, and other styles
7

Claes, M., Vasile Paraschiv, S. Beckx, et al. "Selective Wet Removal of Hf-Based Layers and Post-Dry Etch Residues in High-k and Metal Gate Stacks." In Solid State Phenomena. Trans Tech Publications Ltd., 2005. http://dx.doi.org/10.4028/3-908451-06-x.93.

Full text
APA, Harvard, Vancouver, ISO, and other styles
8

Breuker, Remco E. "North Korean Slavery and Forced Labor in Present-Day Europe." In The Palgrave Handbook of Global Slavery throughout History. Springer International Publishing, 2023. http://dx.doi.org/10.1007/978-3-031-13260-5_36.

Full text
Abstract:
AbstractThis chapter deals with the practice of exploiting North Korean workers in the European Union through human trafficking, forced labor, and the suspension of most personal liberties. As a form of state-driven contemporary slavery, it starts from legal premises: the workers arrive with valid visas, residence permits, and work permits. They then find themselves in a miniaturized reproduction of North Korean society: with their minder came the entire socio-ideological structure of constraint—daily compulsory meetings, confession and criticism sessions, ideology instruction lectures, etc.—,
APA, Harvard, Vancouver, ISO, and other styles
9

Mohammed, S. G., M. Halliru, J. M. Jibrin, I. Kapran, and H. A. Ajeigbe. "Impact Assessment of Developing Sustainable and Impact-Oriented Groundnut Seed System Under the Tropical Legumes (III) Project in Northern Nigeria." In Enhancing Smallholder Farmers' Access to Seed of Improved Legume Varieties Through Multi-stakeholder Platforms. Springer Singapore, 2021. http://dx.doi.org/10.1007/978-981-15-8014-7_6.

Full text
Abstract:
AbstractTropical Legumes III project as a development intervention focused on enhancing smallholder farmers’ access to seeds of improved groundnut varieties using multi-stakeholder platforms. Open Data Kit was used to collect information from the platform members using structured questionnaires and focus group discussions (FGDs). Descriptive statistics and adoption score were used to analyze the data. Selection of appropriate project location, reliable beneficiaries, timely supply of seeds, and training on good agronomic practices (GAPs) and effective supervision on production were the major t
APA, Harvard, Vancouver, ISO, and other styles
10

Leape, Lucian L. "A Community of Concern: The Massachusetts Coalition for the Prevention of Medical Errors." In Making Healthcare Safe. Springer International Publishing, 2021. http://dx.doi.org/10.1007/978-3-030-71123-8_8.

Full text
Abstract:
AbstractOne day in January 1997, John Noble, an internist from Boston City Hospital who I knew from somewhere—perhaps residency days—walked into my office and said, “We should form a state coalition for the prevention of medical errors.” His idea was to bring to the table the key players in health who tended not to talk much with one another—regulators and the regulated, academics and practitioners, etc.
APA, Harvard, Vancouver, ISO, and other styles

Conference papers on the topic "Dry etch"

1

Avram, Andrei, Henk-Willem Veltkamp, Marek Eliáš, et al. "A Method for Comparing Dry Etch Equipment." In 2024 International Symposium on Electronics and Telecommunications (ISETC). IEEE, 2024. https://doi.org/10.1109/isetc63109.2024.10797425.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Wise, Rich S. "HVM readiness of dry resist patterning solutions." In Advanced Etch Technology and Process Integration for Nanopatterning XIV, edited by Efrain Altamirano-Sánchez and Nihar Mohanty. SPIE, 2025. https://doi.org/10.1117/12.3055139.

Full text
APA, Harvard, Vancouver, ISO, and other styles
3

Kim, Heeju, Min Cheol Kim, and Geun Young Yeom. "Dry development characteristics and surface analysis of spin-coated tin oxo cluster using Cl2 radical plasma." In Advanced Etch Technology and Process Integration for Nanopatterning XIV, edited by Efrain Altamirano-Sánchez and Nihar Mohanty. SPIE, 2025. https://doi.org/10.1117/12.3051628.

Full text
APA, Harvard, Vancouver, ISO, and other styles
4

Sarkar, Tanushree, Anne Vandooren, Karen Stiers, et al. "Dry etch challenges for patterning middle-of-line (MOL) dual damascene contact trench and via in monolithic CFET (complementary FET)." In Advanced Etch Technology and Process Integration for Nanopatterning XIV, edited by Efrain Altamirano-Sánchez and Nihar Mohanty. SPIE, 2025. https://doi.org/10.1117/12.3052052.

Full text
APA, Harvard, Vancouver, ISO, and other styles
5

Cho, Kyoung Y., and Dong W. Im. "ECR plasma and etch characterization of photoresist dry etch processes." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56918.

Full text
APA, Harvard, Vancouver, ISO, and other styles
6

Turner, Terry R. "Correlation of real-time-monitored process module parameters and wafer results." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56921.

Full text
APA, Harvard, Vancouver, ISO, and other styles
7

Nulty, James E., and Joseph A. Maher. "Application-specific integrated processing for ULSI." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56920.

Full text
APA, Harvard, Vancouver, ISO, and other styles
8

Yoneda, Masahiro, K. Kawai, Hiroshi Miyatake, Nobuo Fujiwara, K. Nishioka, and Haruhiko Abe. "Evaluation of silicon surface damage induced by plasma radiation." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56910.

Full text
APA, Harvard, Vancouver, ISO, and other styles
9

Namura, Takashi, Hirofumi Uchida, Hiroyuki Okada, et al. "Wafer charging in different types of plasma etchers." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56911.

Full text
APA, Harvard, Vancouver, ISO, and other styles
10

Hasan, Zia, Joseph A. Maher, James E. Nulty, and Larry Krynski. "In-situ auto ash: a key to reducing process-generated particles." In Dry Etch Technology, edited by Deepak Ranadive. SPIE, 1992. http://dx.doi.org/10.1117/12.56912.

Full text
APA, Harvard, Vancouver, ISO, and other styles

Reports on the topic "Dry etch"

1

Ohta, Taisuke. LaB6 nanostructures - wet vs dry etch. Office of Scientific and Technical Information (OSTI), 2019. http://dx.doi.org/10.2172/1491599.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Zhang, Linlin, Xiaoming Xi, Xihua Liu, et al. Should aerobic and resistance training interventions for Multiple sclerosis be performed on the same day: A protocol for systematic review and network meta-analysis. INPLASY - International Platform of Registered Systematic Review and Meta-analysis Protocols, 2021. http://dx.doi.org/10.37766/inplasy2021.12.0126.

Full text
Abstract:
Review question / Objective: P (Population) : patients diagnosed with multiple sclerosis; I (Intervention) : aerobic training and resistance training; C (Comparison) : the efficacy and safety were compared on the same day and different days; O (Outcome) : Evaluates dysfunction, quality of life, fatigue, aerobic capacity or muscle function, mood, cognition, and safety. S (Study Design) : Systematic review and Network meta-analysis. Eligibility criteria: Measures in the intervention group: aerobic training (taijiquan, Baduanjin, qigong, yoga, swimming, cycling, jogging, brisk walking, etc.) and
APA, Harvard, Vancouver, ISO, and other styles
3

Marlow, Thomas. PR-000-18COMP-R03 Damage Prevention Compendium. Pipeline Research Council International, Inc. (PRCI), 2019. http://dx.doi.org/10.55274/r0011548.

Full text
Abstract:
The PRCI Technical Committees have carried many research projects related to the subject of Damage Prevention. This report; therefore, presents a summary of past PRCI-funded studies in the area of Damage Prevention. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in address
APA, Harvard, Vancouver, ISO, and other styles
4

Greaney, Carrie. PR-000-18COMP-R04 Geohazards Compendium. Pipeline Research Council International, Inc. (PRCI), 2019. http://dx.doi.org/10.55274/r0011549.

Full text
Abstract:
The PRCI Technical Committees have carried many research projects related to the subject of Geohazards. This report; therefore, presents a summary of past PRCI-funded studies in the area of Geohazards. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in addressing their curr
APA, Harvard, Vancouver, ISO, and other styles
5

Marlow, Thomas, Laurie Perry (Archived), and Carrie Greaney. PR-000-18COMP-R05 Horizontal Directional Drilling Compendium. Pipeline Research Council International, Inc. (PRCI), 2019. http://dx.doi.org/10.55274/r0011550.

Full text
Abstract:
The PRCI Technical Committees have carried many research projects related to the subject of horizontal directional drilling (HDD). This report; therefore, presents a summary of past PRCI-funded studies in the area of HDD. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in a
APA, Harvard, Vancouver, ISO, and other styles
6

Marlow, Thomas. PR-000-18COMP-R06 Pipeline Repair Compendium. Pipeline Research Council International, Inc. (PRCI), 2019. http://dx.doi.org/10.55274/r0011551.

Full text
Abstract:
The PRCI Technical Committees have carried many research projects related to the subject of Pipeline Repairs. This report; therefore, presents a summary of past PRCI-funded studies in the area of Pipeline Repairs. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in addressin
APA, Harvard, Vancouver, ISO, and other styles
7

Marlow, Thomas. PR-000-18COMP-R02 Composite Repairs Compendium. Pipeline Research Council International, Inc. (PRCI), 2019. http://dx.doi.org/10.55274/r0011547.

Full text
Abstract:
The PRCI Technical Committees have carried many research projects related to the subject of Composite Repairs. This report; therefore, presents a summary of past PRCI-funded studies in the area of Composite Repairs. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that might be of use in address
APA, Harvard, Vancouver, ISO, and other styles
8

Choquette, Gary. PR-000-18COMP-R01 Gas Engine Emissions Compendium. Pipeline Research Council International, Inc. (PRCI), 2019. http://dx.doi.org/10.55274/r0011546.

Full text
Abstract:
The PRCI Technical Committees have carried out many research projects related to the subject of natural gas fueled engine emissions. This report, therefore, presents a summary of past PRCI funded studies in the area of Gas Engine Emissions. Since studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project reports that m
APA, Harvard, Vancouver, ISO, and other styles
9

Choquette, Gary. PR-000-21COMP-R04 Valve Spacing and Automation Compendium. Pipeline Research Council International, Inc. (PRCI), 2021. http://dx.doi.org/10.55274/r0012149.

Full text
Abstract:
The PRCI Technical Committees have carried multiple research projects related to the subject of valve spacing and automation. This report, therefore, presents a summary of past PRCI funded studies in the area of valve spacing and automation. Since not all studies sponsored by other industry groups (e.g., INGAA, EPRG, APIA, CEPA, etc.) or by individual pipeline companies are not included, this report does not represent a review of the topic in the broader industry-wide sense. Instead, it is designed to provide a guide to past work so that current TC members can identify and locate project repor
APA, Harvard, Vancouver, ISO, and other styles
10

Ripey, Mariya. NUMBERS IN THE NEWS TEXT (BASED ON MATERIAL OF ONE ISSUE OF NATIONWIDE NEWSPAPER “DAY”). Ivan Franko National University of Lviv, 2021. http://dx.doi.org/10.30970/vjo.2021.50.11106.

Full text
Abstract:
The article is devoted to the analysis of the digital content of publications of one issue of the daily All-Ukrainian newspaper “Den” (March 13-14, 2020). The author aims to identify the main thematic groups of digital designations, as well as to consider cases of justified and unsuccessful use of digital designations. Applying the content analysis method, the author identifies publications that contain numerical notations, determines the number of such notations and their affiliation with the main subject groups. Finds that the thematic group of digital designations “time” (58.6% of all digit
APA, Harvard, Vancouver, ISO, and other styles
You might also be interested in the extended bibliographies on the topic 'Dry etch' for particular source types:
Journal articles Dissertations / Theses Books
We offer discounts on all premium plans for authors whose works are included in thematic literature selections. Contact us to get a unique promo code!

To the bibliography