Academic literature on the topic 'Dual mass electrostatic vibratory gyroscope'

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Journal articles on the topic "Dual mass electrostatic vibratory gyroscope"

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MOJAHEDI, M., M. T. AHMADIAN, and K. FIROOZBAKHSH. "EFFECTS OF CASIMIR AND VAN DER WAALS FORCES ON THE PULL-IN INSTABILITY OF THE NONLINEAR MICRO AND NANO-BRIDGE GYROSCOPES." International Journal of Structural Stability and Dynamics 14, no. 02 (2014): 1350059. http://dx.doi.org/10.1142/s0219455413500594.

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The influence of Casimir and van der Waals forces on the instability of vibratory micro and nano-bridge gyroscopes with proof mass attached to its midpoint is studied. The gyroscope subjected to the base rotation, Casimir and van der Waals attractions is actuated and detected by electrostatic methods. The system has two coupled bending motions actuated by the electrostatic and Coriolis forces. First a system of nonlinear equations for the flexural-flexural deflection of beam gyroscopes is derived using the extended Hamilton's principle. In modeling, the nonlinearities due to mid-plane stretchi
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Pistorio, Francesca, Muhammad Mubasher Saleem, and Aurelio Somà. "A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation." Applied Sciences 11, no. 3 (2021): 1129. http://dx.doi.org/10.3390/app11031129.

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The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered to be the enabling factor for the future development of smart sensing applications, mainly due to their small size, low power consumption and relatively low cost. This paper presents a new structurally and thermally stable design of a resonant mode-matched electrostatic z-axis MEMS gyroscope considering the foundry constraints of relatively low cost and commercially available silicon-on-insulator multi-user MEMS processes (SOIMUMPs) microfabrication process. The novelty of the proposed MEMS gyroscope design li
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Xu, Lu, Hongsheng Li, Yunfang Ni, Jia Liu, and Libin Huang. "Frequency Tuning of Work Modes inZ-Axis Dual-Mass Silicon Microgyroscope." Journal of Sensors 2014 (2014): 1–13. http://dx.doi.org/10.1155/2014/891735.

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Frequency tuning of work modes in the silicon vibratory gyroscope is studied by the theoretical, numerical, and experimental methods in this paper. First, the schematic structure and simplified kinematics model of the gyroscope were presented for deducing the natural frequencies. Then, the width and length of support beams were optimized to tune work frequencies at their designed value. Besides, the frequency difference was experimentally tested and manually tuned by varying the voltage applied on the tuning capacitors. The test on a prototype showed that the difference could be localized betw
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Efimovskaya, Alexandra, Danmeng Wang, Yu-Wei Lin, and Andrei M. Shkel. "Electrostatic compensation of structural imperfections in dynamically amplified dual-mass gyroscope." Sensors and Actuators A: Physical 275 (June 2018): 99–108. http://dx.doi.org/10.1016/j.sna.2018.03.001.

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Jia, Lu, Guowei Han, Zhenyu Wei, et al. "A Novel Packaged Ultra-High Q Silicon MEMS Butterfly Vibratory Gyroscope." Micromachines 13, no. 11 (2022): 1967. http://dx.doi.org/10.3390/mi13111967.

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A novel three-dimensional (3D) wafer-level sandwich packaging technology is here applied in the dual mass MEMS butterfly vibratory gyroscope (BFVG) to achieve ultra-high Q factor. A GIS (glass in silicon) composite substrate with glass as the main body and low-resistance silicon column as the vertical lead is processed by glass reflow technology, which effectively avoids air leakage caused by thermal stress mismatch. Sputter getter material is used on the glass cap to further improve the vacuum degree. The Silicon-On-Insulator (SOI) gyroscope structure is sandwiched between the composite subst
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Chen, W. P., Yi Bo Yang, and Y. Yu. "Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness." Key Engineering Materials 503 (February 2012): 108–13. http://dx.doi.org/10.4028/www.scientific.net/kem.503.108.

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A novel silicon based dual-mass vibrating tuning fork vibratory gyroscope (TFG) with differential capacitor structure is designed in this paper. the U-shaped beam is adapted to connecting the two decoupling movement of the framework structure in order to achieve the independent of the movement of drive direction and sense direction. The TFG structure is also optimized to further reduce the mechanical coupling of the device. The drive combs are designed on the mass, while the sense combs are designed on the frame. All the combs in this gyroscope are dominated by slide-film air damping in order
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Li, Hongsheng, Huiliang Cao, and Yunfang Ni. "Electrostatic stiffness correction for quadrature error in decoupled dual-mass MEMS gyroscope." Journal of Micro/Nanolithography, MEMS, and MOEMS 13, no. 3 (2014): 033003. http://dx.doi.org/10.1117/1.jmm.13.3.033003.

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Hwang, Yong-Suk, Yong-Kweon Kim, and Chang-Hyeon Ji. "Improvement of Sense Mode Bandwidth of Vibratory Silicon-On-Glass Gyroscope Using Dual-Mass System." Transactions of The Korean Institute of Electrical Engineers 60, no. 9 (2011): 1733–40. http://dx.doi.org/10.5370/kiee.2011.60.9.1733.

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Trusov, Alexander A., A. R. Schofield, and A. M. Shkel. "Vacuum Packaged Silicon MEMS Gyroscope with Q-Factor Above 0.5 Million." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2010, DPC (2010): 001335–59. http://dx.doi.org/10.4071/2010dpc-wa22.

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This paper reports a new dual mass vibratory MEMS z-axis rate gyroscope architecture that prioritizes the sense-mode quality factor and provides improved ordering of the mechanical vibrational modes. The proposed linearly coupled, dynamically balanced anti-phase sense-mode design minimizes substrate energy dissipation to maximize the quality factor. The levered drive-mode mechanism structurally forces the anti-phase drive-mode motion of the symmetrically decoupled tines eliminating the lower frequency spurious mode and providing true mechanical rejection of external shocks and accelerations. S
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Liu, Xuewen, Zhengcheng Qin, and Hongsheng Li. "Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes." Micromachines 13, no. 5 (2022): 647. http://dx.doi.org/10.3390/mi13050647.

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In this paper, an online compensation method of phase delay error based on a Phase-Frequency (P-F) characteristic has been proposed for MEMS Coriolis Vibratory Gyroscopes (CVGs). At first, the influences of phase delay were investigated in the drive and sense mode. The frequency response was acquired in the digital control system by collecting the demodulation value of drive displacement, which verified the existence and influence of the phase delay. In addition, based on the P-F characteristic, that is, when the phase shift of the nonresonant drive force through the resonator is almost 0° or
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Dissertations / Theses on the topic "Dual mass electrostatic vibratory gyroscope"

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Reddy, Jayaprakash. "Towards Design and Development of Indigenous Rate-Grade MEMS Gyroscopes." Thesis, 2018. https://etd.iisc.ac.in/handle/2005/4107.

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Gyroscopes sense angular speed of the body on which they are mounted. Traditional mechanical gyroscopes are big, bulky, expensive, and hence limited to a few applications. With the advent of Micro-Electro-Mechanical Systems (MEMS), the size and cost of gyroscopes have reduced by orders of magnitude, which has led to their deployment on systems that traditionally did not employ inertial units. Today, Internet of Moving Things (IoMT), automobiles, and consumer electronics gadgets such as cell phones, pads, laptops, gaming consoles, etc., use MEMS accelerometers and gyroscopes. Despite their comm
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Book chapters on the topic "Dual mass electrostatic vibratory gyroscope"

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Cao, Huiliang, and Jianhua Li. "Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation." In MEMS Sensors - Design and Application. InTech, 2018. http://dx.doi.org/10.5772/intechopen.74364.

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Conference papers on the topic "Dual mass electrostatic vibratory gyroscope"

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Dwivedi, Vaibhav Dhar, Amrit Kumar Mishra, Nikul Jani, P. Krishna Menon, and Ashok Kumar Pandey. "Closed Loop Sense Feedback Control for a Dual Proof Mass MEMS Vibratory Gyroscope." In 2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP). IEEE, 2024. http://dx.doi.org/10.1109/dtip62575.2024.10613252.

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Dyck, Christopher W., James J. Allen, Robert J. Huber, and Jeffry J. Sniegowski. "High Amplitude Secondary Mass Drive." In ASME 2000 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2000. http://dx.doi.org/10.1115/imece2000-1092.

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Abstract In this paper we describe a high amplitude electrostatic drive for surface micromachined mechanical oscillators that may be suitable for vibratory gyroscopes. It is an advanced design of a previously reported dual mass oscillator (Dyck, et. al., 1999). The structure is a 2 degree-of-freedom, parallel-plate driven motion amplifier, termed the secondary mass drive oscillator (SMD oscillator). During each cycle the device contacts the drive plates, generating large electrostatic forces. Peak-to-peak amplitudes of 54 μm have been obtained by operating the structure in air with an applied
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Cunchao Wang, Shourong Wang, and Yong Yin. "A dual-mass MEMS vibratory gyroscope with adaptive control scheme." In 2007 7th IEEE Conference on Nanotechnology (IEEE-NANO). IEEE, 2007. http://dx.doi.org/10.1109/nano.2007.4601133.

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Jia, Fangxiu, Anping Qiu, Qin Shi, and Yan Su. "Implementation and experiment of dual-mass vibratory gyroscope with high quality factor." In 2012 IEEE Sensors. IEEE, 2012. http://dx.doi.org/10.1109/icsens.2012.6411233.

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Efimovskaya, Alexandra, Yu-Wei Lin, Danmeng Wang, and Andrei M. Shkel. "Electrostatic compensation of structural imperfections in dynamically amplified dual-mass gyroscope." In 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL). IEEE, 2017. http://dx.doi.org/10.1109/isiss.2017.7935690.

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Mojahedi, Mahdi, Mohammad Taghi Ahmadian, Keikhosrow Firoozbakhsh, and Ahmad Barari. "Oscillatory Behavior of the Nonlinear Clamped-Free Beam Microgyroscopes Under Electrostatic Actuation and Detection." In ASME 2013 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2013. http://dx.doi.org/10.1115/imece2013-62214.

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Vibratory Micromachined gyroscopes use suspending mechanical parts to measure rotation. They have no gyratory component that require bearings, and for this reason they can be easily miniaturized and batch production using micromachining methods. They operate based on the energy interchange between two modes of structural vibration. The objective of this paper is to study the oscillatory behavior of an electrostatically actuated vibrating microcantilever gyroscope with proof mass at its end. In the modelling, the effects of different nonlinearities, fringing field and base rotation are consider
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