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Journal articles on the topic 'EFTEM'

Author: Grafiati

Published: 4 June 2021

Last updated: 9 February 2022

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1

Lozano-Perez, S., and J. M. Titchmarsh. "EFTEM assistant: A tool to understand the limitations of EFTEM." Ultramicroscopy 107, no. 4-5 (April 2007): 313–21. http://dx.doi.org/10.1016/j.ultramic.2006.08.006.

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2

Evans, N. D., and M. K. Kundmann. "Plug-in scripts for EFTEM automation." Proceedings, annual meeting, Electron Microscopy Society of America 54 (August 11, 1996): 546–47. http://dx.doi.org/10.1017/s0424820100165197.

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Post-column energy-filtered transmission electron microscopy (EFTEM) is inherently challenging as it requires the researcher to setup, align, and control both the microscope and the energy-filter. The software behind an EFTEM system is therefore critical to efficient, day-to-day application of this technique. This is particularly the case in a multiple-user environment such as at the Shared Research Equipment (SHaRE) User Facility at Oak Ridge National Laboratory. Here, visiting researchers, who may oe unfamiliar with the details of EFTEM, need to accomplish as much as possible in a relatively short period of time.We describe here our work in extending the base software of a commercially available EFTEM system in order to automate and streamline particular EFTEM tasks. The EFTEM system used is a Philips CM30 fitted with a Gatan Imaging Filter (GIF). The base software supplied with this system consists primarily of two Macintosh programs and a collection of add-ons (plug-ins) which provide instrument control, imaging, and data analysis facilities needed to perform EFTEM.

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3

Moore, K. T., and J. M. Howe. "Analysis of Diffraction Contrast as A Function of Energy Loss in Energy Filtering Transmission Electron Microscope (EFTEM) Imaging and Possible Implications on High-Resolution Compositional Mapping." Microscopy and Microanalysis 5, S2 (August 1999): 620–21. http://dx.doi.org/10.1017/s1431927600016421.

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The dependence of diffraction contrast on electron energy loss is an important relationship that needs to be understood because of its potential effect on energy-filtering transmission electron microscope (EFTEM) images. Often when either a two-window jump-ratio image or a three-window elemental map is produced diffraction contrast is not totally eliminated and contributes to the intensity of the final EFTEM image. Background removal procedures often are unable to completely account for intensity changes due to dynamical effects (i.e., elastic scattering) that occur between images acquired at different energy losses, leaving artifacts in the final EFTEM image.In this study, the relationship between diffraction contrast and electron energy loss was investigated by obtaining EFTEM images of a bend contour in aluminum in 100 eV increments from 0 to 1000 eV (Fig. 1). EFTEM images were acquired a JOEL 2010F FEG TEM with a Gatan imaging filter (GIF) at a microscope magnification of 8 kX using a 1 eV/pixel dispersion, 2X binning (512 x 512) and exposure times ranging from 0.25 s for 0 eV energy loss up to 132 sec for 1000 eV energy loss.

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4

Messaoudi, Cédric, Nicolas Aschman, Marcel Cunha, Tetsuo Oikawa, Carlos O. Sanchez Sorzano, and Sergio Marco. "Three-Dimensional Chemical Mapping by EFTEM-TomoJ Including Improvement of SNR by PCA and ART Reconstruction of Volume by Noise Suppression." Microscopy and Microanalysis 19, no. 6 (August 28, 2013): 1669–77. http://dx.doi.org/10.1017/s1431927613013317.

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AbstractElectron tomography is becoming one of the most used methods for structural analysis at nanometric scale in biological and materials sciences. Combined with chemical mapping, it provides qualitative and semiquantitative information on the distribution of chemical elements on a given sample. Due to the current difficulties in obtaining three-dimensional (3D) maps by energy-filtered transmission electron microscopy (EFTEM), the use of 3D chemical mapping has not been widely adopted by the electron microscopy community. The lack of specialized software further complicates the issue, especially in the case of data with a low signal-to-noise ratio (SNR). Moreover, data interpretation is rendered difficult by the absence of efficient segmentation tools. Thus, specialized software for the computation of 3D maps by EFTEM needs to include optimized methods for image series alignment, algorithms to improve SNR, different background subtraction models, and methods to facilitate map segmentation. Here we present a software package (EFTEM-TomoJ, which can be downloaded from http://u759.curie.fr/fr/download/softwares/EFTEM-TomoJ), specifically dedicated to computation of EFTEM 3D chemical maps including noise filtering by image reconstitution based on multivariate statistical analysis. We also present an algorithm named BgART (for background removing algebraic reconstruction technique) allowing the discrimination between background and signal and improving the reconstructed volume in an iterative way.

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5

Bentley, J. "Energy-Filtered Imaging: A Tutorial." Microscopy and Microanalysis 6, S2 (August 2000): 1186–87. http://dx.doi.org/10.1017/s1431927600038423.

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Over the several years that imaging energy filters have been available commercially, numerous and wide-ranging applications have demonstrated elemental mapping with a resolution approaching 1 nm. A few reports have even shown resolutions <0.4 nm. Elemental mapping by energy-filtered transmission electron microscopy (EFTEM) is clearly an attractive and powerful tool, but some aspects of the techniques can be complex, with many pitfalls awaiting the unwary. This tutorial aims to cover some practical aspects of elemental mapping by EFTEM. It is based largely on the author's work at the ORNL SHaRE User Facility, where EFTEM research has been performed since 1994 with a Gatan imaging filter (GIF) interfaced to a Philips CM30T operated at 300 kV with a LaBa cathode.120 Most of the applications have been to metals and ceramics, emphasizing interfacial segregation and precipitation.For quantitative composition mapping by EFTEM a number of interrelated parameters [field of view, resolution (δ),

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6

Hunt, J. A., and R. H. Harmon. "EFTEM and STEM EELS Spectrum Imaging." Microscopy and Microanalysis 4, S2 (July 1998): 152–53. http://dx.doi.org/10.1017/s1431927600020882.

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Electron energy-loss spectroscopy (EELS) in the transmission electron microscope (TEM) is a powerful technique that analyzes the inelastic scattering distribution of the fast TEM electrons after they have lost energy within the sample. The resultant energy-losses are characteristic of elemental, chemical, and dielectric properties and are typically measured in one of two ways. Parallel-detection EELS spectrometers (PEELS) acquire spectral data over a large range of energy-loss simultaneously for rapid acquisition of spectral data at a single point. In contrast, the energy filtering TEM (EFTEM) acquires only a single energy band at once, but does so for thousands or even millions of image pixels simultaneously.Spectrum-imaging concerns the acquisition of spectroscopic data of sufficient detail for rigorous analysis at each pixel in a digital image. (Fig. 1) A STEM EELS spectrum image “data cube” can be acquired by stepping a focused electron probe to each pixel and filling the spectrum image one spectrum at a time.

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7

Hofmann, Matthias, Thomas Gemming, and Klaus Wetzig. "Quantitative EFTEM by Bivariate Histogram Analysis." Microscopy and Microanalysis 9, S03 (September 2003): 76–77. http://dx.doi.org/10.1017/s1431927603013102.

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8

Jin-Phillipp, N. Y., C. T. Koch, and P. A. van Aken. "Toward quantitative core-loss EFTEM tomography." Ultramicroscopy 111, no. 8 (July 2011): 1255–61. http://dx.doi.org/10.1016/j.ultramic.2011.02.006.

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9

KRIVANEK, O. L., M. K. KUNDMANN, and K. KIMOTO. "Spatial resolution in EFTEM elemental maps." Journal of Microscopy 180, no. 3 (December 1995): 277–87. http://dx.doi.org/10.1111/j.1365-2818.1995.tb03686.x.

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10

Bauer, R., G. Benner, P. Büscher, W. Probst, V. Seybold, and E. Zellmann. "In-Column Energy Filtering Transmission Electron Microscope (EFTEM) - Integrated Analysis of Energy Loss Signals." Microscopy and Microanalysis 3, S2 (August 1997): 999–1000. http://dx.doi.org/10.1017/s1431927600011880.

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In an EFTEM the full range of signals generated by interaction of the primary electron beam with the specimen can be detected. Thus operating such a system and generating combined digital information usually is a rather complex issue. The demands of the users on the other hand are to achieve results fast, easily and reproducibly. Moreover it should be possible to tailor the integral system according to dedicated needs. In general it should be no problem to use modern digital equipment and just let an integral computer control everything. However, in order to make such digital settings really useful, there should be no D/A conversion in between the data paths of the microscope because any analogue system tends to drift and the changes of lens parameters between different modes of operation should be minimised to overcome hysteresis. Fully digitised in-column EFTEMs like the LEO EFTEMs with OMEGA filter and Koehler illumination including also multiple parallel and serial remote capabilities provide optimum preconditions to fulfil the demands.

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11

Bentley, J. "Energy-Filtered Imaging." Microscopy Today 8, no. 9 (November 2000): 22–25. http://dx.doi.org/10.1017/s1551929500059393.

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Over the several years that imaging energy filters have been available commercially, numerous and wide-ranging applications have demonstrated elemental mapping with a resolution approaching 1 nm. A few reports have even shown resolutions <0.4 nm. Elemental mapping by energy-filtered transmission electron microscopy (Eftem) is clearly an attractive and powerful tool, but some aspects of the techniques can be complex, with many pitfalls awaiting the unwary. This tutorial aims to cover some practical aspects of elemental mapping by Eftem. It is based largely on the author's work at the ORNL Share User Facility, where Eftem research has been performed since 1994 with a Gatan imaging filter (GIF) interfaced to a Philips CM30T operated at 300 kV with a LaB6cathode. Most of the applications have been to metals and ceramics, emphasizing interfacial segregation and precipitation.

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12

Leapman, R. D., and S. B. Andrews. "Comparison of Techniques for EELS Mapping in Biology." Proceedings, annual meeting, Electron Microscopy Society of America 54 (August 11, 1996): 300–301. http://dx.doi.org/10.1017/s0424820100163964.

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Elemental mapping of biological specimens by electron energy loss spectroscopy (EELS) can be carried out both in the scanning transmission electron microscope (STEM), and in the energy-filtering transmission electron microscope (EFTEM). Choosing between these two approaches is complicated by the variety of specimens that are encountered (e.g., cells or macromolecules; cryosections, plastic sections or thin films) and by the range of elemental concentrations that occur (from a few percent down to a few parts per million). Our aim here is to consider the strengths of each technique for determining elemental distributions in these different types of specimen.On one hand, it is desirable to collect a parallel EELS spectrum at each point in the specimen using the ‘spectrum-imaging’ technique in the STEM. This minimizes the electron dose and retains as much quantitative information as possible about the inelastic scattering processes in the specimen. On the other hand, collection times in the STEM are often limited by the detector read-out and by available probe current. For example, a 256 x 256 pixel image in the STEM takes at least 30 minutes to acquire with read-out time of 25 ms. The EFTEM is able to collect parallel image data using slow-scan CCD array detectors from as many as 1024 x 1024 pixels with integration times of a few seconds. Furthermore, the EFTEM has an available beam current in the µA range compared with just a few nA in the STEM. Indeed, for some applications this can result in a factor of ~100 shorter acquisition time for the EFTEM relative to the STEM. However, the EFTEM provides much less spectral information, so that the technique of choice ultimately depends on requirements for processing the spectrum at each pixel (viz., isolated edges vs. overlapping edges, uniform thickness vs. non-uniform thickness, molar vs. millimolar concentrations).

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13

Matsko, Nadejda B., Franz P. Schmidt, Ilse Letofsky-Papst, Artem Rudenko, and Vikas Mittal. "In situ Determination and Imaging of Physical Properties of Soft Organic Materials by Analytical Transmission Electron Microscopy." Microscopy and Microanalysis 20, no. 3 (February 28, 2014): 916–23. http://dx.doi.org/10.1017/s1431927614000348.

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AbstractAnalytical transmission electron microscopy (ATEM) offers great flexibility in identification of the structural—chemical organization of soft materials at the level of individual macromolecules. However, the determination of mechanical characteristics such as hardness/elasticity of the amorphous and polycrystalline organic substances by ATEM has been problematic so far. Here, we show that energy filtered TEM (EFTEM) measurements enable direct identification and study of mechanical properties in complex (bio-)polymer systems of relevance for different industrial and (bio-)medical applications. We experimentally demonstrate strong correlations between hardness/elasticity of different polymers (polycaprolactone, polylactid, polyethelene, etc.) and their volume plasmon energy. Thickness and anisotropy effects, which substantially mask the material contrast in EFTEM bulk plasmon images, can be adequately removed by normalizing the latter by carbon elemental map. EFTEM data has been validated using atomic force microscopy phase images, where phase shift related to the hardness and elastic modulus of the materials.

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14

Risner, Juliet D., Thomas P. Nolan, James Bentley, Erol Girt, Samuel D. Harkness IV, and Robert Sinclair. "Analytical TEM Examinations of CoPt-TiO2 Perpendicular Magnetic Recording Media." Microscopy and Microanalysis 13, no. 2 (March 19, 2007): 70–79. http://dx.doi.org/10.1017/s1431927607070213.

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For this analytical TEM study, nonmagnetic oxygen-rich boundaries were introduced into Co-Pt-alloy perpendicular recording media by cosputtering Co and Pt with TiO2. Increasing the TiO2 content resulted in changes to the microstructure and elemental distribution within grains and boundaries in these films. EFTEM imaging was used to generate composition maps spanning many tens of grains, thereby giving an overall depiction of the changes in elemental distribution occurring with increasing TiO2 content. Comparing EFTEM with spectrum-imaging maps created by high-resolution STEM with EDXS and EELS enabled both corroboration of EFTEM results and quantification of the chemical composition within individual grain boundary areas. The difficulty of interpreting data from EDXS for these extremely thin films is discussed. Increasing the TiO2 content of the media was found to create more uniformly wide Ti- and O-rich grain boundaries as well as Ti- and O-rich regions within grains.

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15

Leapman, R. D., and J. A. Hunt. "Compositional mapping by electron energy loss spectroscopy." Proceedings, annual meeting, Electron Microscopy Society of America 49 (August 1991): 8–9. http://dx.doi.org/10.1017/s042482010008434x.

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Compositional maps of a thin specimen can be obtained using electron energy loss spectroscopy (EELS) to measure the two-dimensional distribution of inelastic scattering processes. These maps may be acquired both in the energy-filtering transmission electron microscope (EFTEM) and in the scanning transmission electron microscope (STEM). An advantage of EFTEM is that data from large numbers of pixels are collected simultaneously making the technique favorable for detection of high local elemental concentrations. However in the EFTEM images at different energy losses must be acquired sequentially, complicating the analysis of weak spectral features which require careful subtraction of the background intensity. Early attempts to utilize the STEM for EELS mapping were limited by the performance of serial detectors. The availability of parallel detectors and inexpensive PC-type computers with sufficient storage and speed has generated new interest in using the STEM for EELS elemental mapping. In particular the concept of EELS spectrum-imaging has been introduced by Jeanguillaume and Colliex.

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16

Pantel, R., G. Mascarin, and G. Auvert. "Defect Analysis and Process Development of Microelectronics Devices Using Focused Ion Beam and Energy Filtering Transmission Electron Microscopy." Microscopy and Microanalysis 5, S2 (August 1999): 900–901. http://dx.doi.org/10.1017/s1431927600017827.

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1. Introduction.With continuing reductions in semiconductor device dimensions high spatial resolution physical and chemical analysis techniques will be more and more required for defect analysis and process development in the microelectronics field. Transmission Electron Microscopy (TEM) analysis is now extensively used thanks to the fast Focused Ion Beam (FIB) specimen preparation technique which has furthered its development. Recently, we have shown the advantages of adding Electron Energy Loss Spectroscopy (EELS) to FIB-TEM analysis for semiconductor process characterization. In this paper we extend the EELS technique using FIB sample preparation to Energy Filtering TEM (EFTEM) observations. The EFTEM analysis allows high-resolution compositional mapping using spectroscopic imaging of core level ionization edges3. We show some applications of FIB-EFTEM to defect analysis and process development.2. Experimental details.The FIB system is a MICRION model 9500 EX using a gallium ion beam of 50 keV maximum energy with a 5 nm minimum spot diameter.

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17

Thomas, P. J. "Novel Approaches in Spectrum-Image Analysis." Microscopy and Microanalysis 7, S2 (August 2001): 1138–39. http://dx.doi.org/10.1017/s1431927600031767.

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It is now becoming increasingly more commonplace to acquire three-dimensional EELS data sets, whether by parallel acquisition of a linear series of spectra to form an EELS spectrum-image, or by discretely sampling energy-loss space through a series of energy-filtered images to build an EFTEM image-spectrum. These data sets can contain large amounts of both spectral and spatial information, and, as a result, the distinction between the two acquisition modes is becoming increasingly blurred. Accordingly, approaches are required that facilitate both the techniques developed for EFTEM and EELS analyses, in order to obtain optimal information from the acquired data.An example of such an approach is illustrated by means of characterisation of a Mn and Fe rich intermetallic particle in a cast aluminium alloy (Figs. a-f). A continuous EFTEM image-series was acquired from 0-800 eV loss, using a CM300 FEGTEM equipped with a 2k Gatan Imaging Filter.

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18

Leapman, R. D., C. M. Brooks, N. W. Rizzo, and T. L. Talbot. "Quantitative Analysis Of Bological Specimens by Spectrum-Imaging in the Energy Filtering Transmission Electron Microscope." Microscopy and Microanalysis 6, S2 (August 2000): 160–61. http://dx.doi.org/10.1017/s1431927600033298.

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Electron energy loss spectrum-imaging (EELSI) in the energy filtering transmission electron microscope (EFTEM) can provide more accurate analysis of elemental distributions than that obtainable by the standard two-window or three-window background subtraction techniques. Spectra containing many channels can be extracted from regions of interest and analyzed using established methods for quantitation. For example, the pre-edge background can be fitted by an inverse power law and subtracted from the post-edge spectrum. EELSI in the EFTEM is often superior to spectrum-imaging in the scanning transmission electron microscope for mapping specimen regions of size greater than 1 μm. This is due the much larger total beam current that is available at the specimen in a fixed-beam microscope relative to a scanned-beam microscope. Our aim here is demonstrate the advantages of such EELSI measurements for analysis of biological specimens. However, we also indicate some potential pitfalls in acquiring elemental maps in the EFTEM, which can be attributed to specimen instabilities during the acquisition.

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19

Maleckl, Marek. "Energy filtering TEM of transfected DNA." Proceedings, annual meeting, Electron Microscopy Society of America 54 (August 11, 1996): 924–25. http://dx.doi.org/10.1017/s0424820100167081.

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Energy filtering transmission electron microscopy (EFTEM) relies upon spatial separation of imaging electrons based upon their energy within an energy loss spectrum (Ottensmeyer 1986). In particular, EFTEM allows contrast enhancement in the zero loss mode and element mapping with electron spectroscopic imaging.These capabilities find a new application in studies of transgenesis in which constructs, probes, and antibodies are marked with organometallic clusters. Since the basic routes of intracellular trafficking of the transfected DNA have become recognized along with the crucial role played by nuclear pores as the selection gates (Malecki et al., 1995, Malecki and Skowron 1995),the current research is pursued by means of ultramicroscopy.Two strategies were developed for ultrastructural imaging of the transfected plasmid DNA with EFTEM. In both strategies, the transfected cells were cryo-immobilized, embedded in Lowlcryl K4M, and sectioned;plasmid constructs, transfection complexes containing nuclear localization signals, and transfection procedures were described previously (Malecki 1995).In the first strategy, the plasmid DNA was covalently conjugated to Nanogold (Nanoprobes) prior to transfections.

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20

Lam, T. F., R. Sharma, J. Liddle, J. P. Winterstein, and P. Kabro. "EFTEM Study of a Carbon Nanostructure Composite." Microscopy and Microanalysis 18, S2 (July 2012): 1530–31. http://dx.doi.org/10.1017/s1431927612009506.

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21

Hofer, Ferdinand, Werner Grogger, Gerald Kothleitner, and Peter Warbichler. "Quantitative analysis of EFTEM elemental distribution images." Ultramicroscopy 67, no. 1-4 (June 1997): 83–103. http://dx.doi.org/10.1016/s0304-3991(96)00106-4.

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22

Schaffer, Bernhard, Gerald Kothleitner, and Werner Grogger. "EFTEM spectrum imaging at high-energy resolution." Ultramicroscopy 106, no. 11-12 (October 2006): 1129–38. http://dx.doi.org/10.1016/j.ultramic.2006.04.028.

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23

Bell, D. "Advanced Monochromated Low-Voltage EELS and EFTEM." Microscopy and Microanalysis 17, S2 (July 2011): 824–25. http://dx.doi.org/10.1017/s1431927611004995.

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24

Myers, Alline, and Suzette Pangrle. "EFTEM Mapping of Copper - Porous SiLK Structures." Microscopy and Microanalysis 8, S02 (August 2002): 1194–95. http://dx.doi.org/10.1017/s1431927602107847.

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25

Margolin, A., R. Rosentsveig, Y. Feldman, R. Popovitz-Biro, and R. Tenne. "TEM and EFTEM characterization of WS2 Nanotubes." Microscopy and Microanalysis 9, S03 (September 2003): 226–27. http://dx.doi.org/10.1017/s1431927603022207.

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Leapman, R. D., and M. A. Aronova. "EELS and EFTEM Analysis of Biological Materials." Microscopy and Microanalysis 20, S3 (August 2014): 582–83. http://dx.doi.org/10.1017/s1431927614004632.

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27

Lozano-Perez, S. "Improving EFTEM data using multivariate statistical analysis." Journal of Physics: Conference Series 126 (August 1, 2008): 012040. http://dx.doi.org/10.1088/1742-6596/126/1/012040.

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28

Bihr, J., G. Benner, D. Krahl, A. Rilk, and E. Weimer. "Design of an analytical TEM with integrated imaging ω spectrometer." Proceedings, annual meeting, Electron Microscopy Society of America 49 (August 1991): 354–55. http://dx.doi.org/10.1017/s0424820100086076.

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Conventional transmission electron microscopy (CTEM) can be used for high resolution imaging of specimens and for the analysis of minute specimen areas. The capabilities of such an instrument are strongly improved by the integration of an imaging electron energy loss spectrometer. All imaging and diffraction techmques are provided in such an energy filtered transmission electron microscope (EFTEM).In addition to the well-known objective lens for Koehler illumination, the new Zeiss EFTEM features a projective lens system which integrates a new imaging ω-spectrometer comprising four individual magnets and one hexapole corrector Fig.l and Fig. 3 show the design of this microscope.

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Loedolff, Matthys J., Bee-Min Goh, George A. Koutsantonis, and Rebecca O. Fuller. "Supported heterogeneous catalysts: what controls cobalt nanoparticle dispersion on alumina?" New Journal of Chemistry 42, no. 18 (2018): 14894–900. http://dx.doi.org/10.1039/c8nj03076f.

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Bürger, Julius, Vinay S. Kunnathully, Daniel Kool, Jörg K. N. Lindner, and Katharina Brassat. "Characterisation of the PS-PMMA Interfaces in Microphase Separated Block Copolymer Thin Films by Analytical (S)TEM." Nanomaterials 10, no. 1 (January 13, 2020): 141. http://dx.doi.org/10.3390/nano10010141.

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Block copolymer (BCP) self-assembly is a promising tool for next generation lithography as microphase separated polymer domains in thin films can act as templates for surface nanopatterning with sub-20 nm features. The replicated patterns can, however, only be as precise as their templates. Thus, the investigation of the morphology of polymer domains is of great importance. Commonly used analytical techniques (neutron scattering, scanning force microscopy) either lack spatial information or nanoscale resolution. Using advanced analytical (scanning) transmission electron microscopy ((S)TEM), we provide real space information on polymer domain morphology and interfaces between polystyrene (PS) and polymethylmethacrylate (PMMA) in cylinder- and lamellae-forming BCPs at highest resolution. This allows us to correlate the internal structure of polymer domains with line edge roughnesses, interface widths and domain sizes. STEM is employed for high-resolution imaging, electron energy loss spectroscopy and energy filtered TEM (EFTEM) spectroscopic imaging for material identification and EFTEM thickness mapping for visualisation of material densities at defects. The volume fraction of non-phase separated polymer species can be analysed by EFTEM. These methods give new insights into the morphology of polymer domains the exact knowledge of which will allow to improve pattern quality for nanolithography.

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Bentley, J., J. E. Wittig, and T. P. Nolan. "Quantitative Composition Maps of Magnetic Recording Media by EFTEM." Microscopy and Microanalysis 5, S2 (August 1999): 634–35. http://dx.doi.org/10.1017/s1431927600016494.

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Elemental mapping of Co-Cr-X based magnetic recording media at resolutions approaching 1 nm by energy-filtered transmission electron microscopy (EFTEM) can provide quantitative measurements of intergranular Cr segregation for correlation with magnetic properties and materials processing. The thin-film media present many challenges for EFTEM methods, such as diffraction contrast and closelyspaced edges. The goal of this work was to provide robust methods for mapping quantitative compositions in such materials. Results presented here are for a model material of 60 nm of Co84Cr12Ta4 on a 75 nm Cr underlayer; both films were d.c. magnetron sputtered onto a NiP-plated Al substrate pre-heated to 250°C. Other compositions and thinner layers (∼30 nm) have also been studied. EFTEM was performed on back-thinned, plan-view specimens with a Gatan Imaging Filter (GIF) interfaced to a 300 kV LaB6 Philips CM30. Optimized acquisition conditions have been detailed elsewhere. Besides core-loss image series, zero-loss I0 (slit width Δ=10eV), low-loss Ik (Δ=30eV), and unfiltered IT images were recorded, and maps of t/λ. = ln(IT / I0), where t is specimen thickness and λ. is the total inelastic mean free path, were produced.

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TORKAMAN, MADJID, AZIZAN AZIZ, MOHAMAD ABU BAKAR, and SULAIMAN AB GHANI. "ELECTROCHEMICAL SYNTHESIS AND CHARACTERIZATION OF DIFFERENT MORPHOLOGIES NANORAMSDELLITE-MnO2." Nano 07, no. 04 (August 2012): 1250030. http://dx.doi.org/10.1142/s1793292012500300.

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In this work manganese dioxide (Ramsdellite- MnO2 ) was synthesized at room temperature using a facile electrochemical method. X-ray diffraction (XRD) was used to identify the type and the size of the crystal particle, while field emission scanning electron microscopy (FESEM) and energy filtered transmission electron microscopy (EFTEM) were used to show and identify the morphology of the particles and changes of their morphologies with the increase of reaction times. Fourier transform infrared (FTIR) spectroscopy confirmed the Mn–O bond. Results from XRD showed that optimum time for synthesis Ramsdellite- MnO2 was 9 h. The results of EFTEM showed a mixture of nanospheres and nanorods after 9 h reaction time while a homogenous morphology of nanospheres was detected at 12 h reaction time. Results confirmed on the existence of a correlation between the reaction time and the resulting nanostructures. Moreover, the EFTEM result showed that average particle size for 12 h was (25 ± 7 nm). The variation of calculated specific capacitance (F/g) versus the different scan rate has indicated that the efficiency of synthesized Ramsdellite- MnO2 nanostructures in 12 h reaction time was superior to 9 h.

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33

Grogger, Werner, Ferdinand Hofer, Peter Warbichler, and Gerald Kothleitner. "Quantitative Energy-filtering Transmission Electron Microscopy in Materials Science." Microscopy and Microanalysis 6, no. 2 (March 2000): 161–72. http://dx.doi.org/10.1007/s100059910014.

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Energy-filtered transmission electron microscopy (EFTEM) can be used to acquire elemental distribution images at high lateral resolution within short acquisition times. In this article, we present an overview of typical problems from materials science which can be preferentially solved by means of EFTEM. In the first example, we show how secondary phases in a steel specimen can be easily detected by recording jump ratio images of the matrix element under rocking beam illumination. Secondly, we describe how elemental maps can be converted into concentration maps. A Ba-Nd-titanate ceramics serves as a typical materials science example exhibiting three different compounds with varying composition.

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34

Leapman, R. D., A. A. Sousa, J. T. Morgan, A. Adams, G. Zhang, M. A. Aronova, L. Bryant, and J. A. Frank. "Characterization of hybrid nanoparticles by EFTEM and STEM." Microscopy and Microanalysis 18, S2 (July 2012): 1596–97. http://dx.doi.org/10.1017/s143192761200983x.

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35

Kurata, Hiroki. "Advantages of elemental mapping by high-voltage EFTEM." Ultramicroscopy 78, no. 1-4 (June 1999): 233–40. http://dx.doi.org/10.1016/s0304-3991(99)00023-6.

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36

Gnauck, P., U. Zeile, G. Benner, A. Orchowski, and W.-D. Rau. "Focused Ion Beam Preparation Techniques for EFTEM Analysis." Microscopy and Microanalysis 9, S02 (July 24, 2003): 872–73. http://dx.doi.org/10.1017/s143192760344436x.

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37

Schwarz, Stephen M., and Lucille A. Giannuzzi. "FIB Specimen Preparation for STEM and EFTEM Tomography." Microscopy and Microanalysis 10, S02 (August 2004): 142–43. http://dx.doi.org/10.1017/s143192760488752x.

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38

Schaffer, Bernhard, Werner Grogger, and Gerald Kothleitner. "Automated spatial drift correction for EFTEM image series." Ultramicroscopy 102, no. 1 (December 2004): 27–36. http://dx.doi.org/10.1016/j.ultramic.2004.08.003.

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39

Aronova, M. A., Y. C. Kim, G. Zhang, and R. D. Leapman. "Quantification and thickness correction of EFTEM phosphorus maps." Ultramicroscopy 107, no. 2-3 (February 2007): 232–44. http://dx.doi.org/10.1016/j.ultramic.2006.07.009.

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40

Kothleitner, G. "EELS & EFTEM Imaging: Instrumentation, Applications and Artifacts." Microscopy and Microanalysis 16, S2 (July 2010): 1946–47. http://dx.doi.org/10.1017/s1431927610056503.

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41

Leapman, RD, AA Sousa, and M. Aronova. "Quantitative EFTEM and STEM Tomography of Soft Materials." Microscopy and Microanalysis 16, S2 (July 2010): 1840–41. http://dx.doi.org/10.1017/s1431927610058782.

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42

Grogger, Werner, Kannan M. Krishnan, and Ferdinand Hofer. "EFTEM at High Magnification: Principles and Practical Applications." Microscopy and Microanalysis 8, S02 (August 2002): 72–73. http://dx.doi.org/10.1017/s1431927602101851.

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43

Plitzko, Jürgen M., and Wolfgang Baumeister. "EFTEM and its Application in Cryo Electron Microscopy." Microscopy and Microanalysis 8, S02 (August 2002): 1610–11. http://dx.doi.org/10.1017/s1431927602104636.

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44

Aronova, M. A., and R. D. Leapman. "Compositional Imaging of Cells and Bionanoparticles by EFTEM." Microscopy and Microanalysis 20, S3 (August 2014): 1298–99. http://dx.doi.org/10.1017/s1431927614008228.

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45

Anderson, IM, and A. Herzing. "Statistical and Systematic Errors in EFTEM Spectral Imaging." Microscopy and Microanalysis 14, S2 (August 2008): 774–75. http://dx.doi.org/10.1017/s1431927608088934.

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46

Pantel, R., E. Sondergard, D. Delille, and L. F. Tz Kwakman. "Combined Focused Ion Beam, Energy Filtered TEM and STEM Techniques for Semiconductor Device Defects Observation." Microscopy and Microanalysis 7, S2 (August 2001): 944–45. http://dx.doi.org/10.1017/s1431927600030798.

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Abstract:

In this communication we present a method using Focused Ion Beam (FIB), Energy Filtered TEM (EFTEM) and STEM for semiconductor defects interception and high resolution observation. This method takes benefit of the specific imaging properties of respectively EFTEM and STEM techniques. A demonstration is presented for the observation of dislocations in a silicon integrated circuit.Silicon defects such as dislocations are one of the major issues in Integrated Circuit fabrication. Due to their low distribution density these silicon defects are not easily observed using TEM cross section. in this paper we present a more appropriate technique using: FIB, EFTEM and STEM for such defects observation. First, in order to improve the probability of defects being present in the specimen, a very thick lamella is prepared using FIB. Then, using an energy filter for eliminating the inelastic electrons needed to allow thick specimen TEM imaging, direct defect localization and observation at medium resolution is carried out. After that, taking advantage of the beam broadening in the STEM, the defect position inside the specimen is more accurately evaluated. For that purpose two STEM observations are carried out from the two opposite specimen surfaces. The comparison of image contrast is used for further FIB specimen thinning. The process can be continued down to a thickness compatible with an acceptable spatial resolution TEM imaging.

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Teguri, Daisuke, Kenji Matsuda, Tomoyuki Sakal, and Susumu Ikeno. "EFTEM Observation for Nano-scaled Precipitates in Aluminum Alloys." Materials Science Forum 396-402 (July 2002): 911–16. http://dx.doi.org/10.4028/www.scientific.net/msf.396-402.911.

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Rhinow, D., W. Kühlbrandt, M. Büenfeld, N. Weber, A. Beyer, A. Gölzhäuser, and A. Turchanin. "Improving cryoEM and EFTEM of biological specimens with graphene." Microscopy and Microanalysis 18, S2 (July 2012): 548–49. http://dx.doi.org/10.1017/s143192761200459x.

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Unocic, R. R., L. Baggetto, K. A. Unocic, G. M. Veith, N. J. Dudney, and K. L. More. "Coupling EELS/EFTEM Imaging with Environmental Fluid Cell Microscopy." Microscopy and Microanalysis 18, S2 (July 2012): 1104–5. http://dx.doi.org/10.1017/s1431927612007374.

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Lindner, J. K. N., M. Häberlen, F. Schwarz, G. Thorwarth, B. Stritzker, C. Hammerl, and W. Assmann. "Quantification of EFTEM elemental maps using ion beam techniques." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 249, no. 1-2 (August 2006): 833–37. http://dx.doi.org/10.1016/j.nimb.2006.03.149.

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