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Journal articles on the topic 'Electron beam freeform fabrication'

Author: Grafiati

Published: 4 June 2021

Last updated: 8 February 2022

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1

Wanjara, Priti, Mathieu Brochu, and Mohammad Jahazi. "Electron Beam Freeform Fabrication on Stainless Steel." Materials Science Forum 539-543 (March 2007): 4938–43. http://dx.doi.org/10.4028/www.scientific.net/msf.539-543.4938.

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The use of electron beam technology for freeforming 321 SS was investigated using 347 SS solid wire and BNi-2 brazing paste as filler materials. The electron beam freeforming (EBFF) studies involved examining the effect of processing parameters on the characteristics of the line build-ups. Specifically, the effective growth rate and the dimensional features (height-to-width ratio) of the build-ups were found to be dependent on the beam energy and the filler material conditions (e.g. wire feed rate and the number of re-melting passes). The EBFF work indicated that build-ups with either filler material could be deposited on 321 SS using an optimized processing window that resulted in properties comparable to technical data available for 347 SS and BNi-2.

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2

Chang, Shuhe, Haoyu Zhang, Haiying Xu, Xinghua Sang, Li Wang, Dong Du, and Baohua Chang. "Closed-Loop Control of Droplet Transfer in Electron-Beam Freeform Fabrication." Sensors 20, no. 3 (February 10, 2020): 923. http://dx.doi.org/10.3390/s20030923.

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In the process of electron-beam freeform fabrication deposition, the surface of the deposit layer becomes rough because of the instability of the feeding wire and the changing of the thermal diffusion condition. This will make the droplet transfer distance change in the deposition process, and the droplet transfer cannot always be stable in the liquid bridge transfer state. It is easy to form a large droplet or make wire and substrate stick together, which makes the deposition quality worsen or even interrupts the deposition process. The current electron-beam freeform fabrication deposition is mostly open-loop control, so it is urgent to realize the real-time and closed-loop control of the droplet transfer and to make it stable in the liquid bridge transfer state. In this paper, a real-time monitoring method based on machine vision is proposed for the droplet transfer of electron-beam freeform fabrication. The detection accuracy is up to ± 0.08 mm. Based on this method, the measured droplet transfer distance is fed back to the platform control system in real time. This closed-loop control system can stabilize the droplet transfer distance within ± 0.14 mm. In order to improve the detection stability of the whole system, a droplet transfer detection algorithm suitable for this scenario has been written, which improves the adaptability of the droplet transfer distance detection method by means of dilatation/erosion, local minimum value suppression, and image segmentation. This algorithm can resist multiple disturbances, such as spatter, large droplet occlusion and so on.

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3

Chang, Shuhe, Haoyu Zhang, Haiying Xu, Xinghua Sang, Li Wang, Dong Du, and Baohua Chang. "Online Measurement of Deposit Surface in Electron Beam Freeform Fabrication." Sensors 19, no. 18 (September 16, 2019): 4001. http://dx.doi.org/10.3390/s19184001.

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In the process of electron beam freeform fabrication (EBF3), due to the continuous change of thermal conditions and variability in wire feeding in the deposition process, geometric deviations are generated in the deposition of each layer. In order to prevent the layer-by-layer accumulation of the deviation, it is necessary to perform online geometry measurement for each deposition layer, based on which the error compensation can be done for the previous deposition layer in the next deposition layer. However, the traditional three-dimensional reconstruction method that employs structured laser cannot meet the requirements of long-term stable operation in the manufacturing process of EBF3. Therefore, this paper proposes a method to measure the deposit surfaces based on the position information of electron beam speckle, in which an electron beam is used to bombard the surface of the deposit to generate the speckle. Based on the structured information of the electron beam in the vacuum chamber, the three-dimensional reconstruction of the surface of the deposited parts is realized without need of additional structured laser sensor. In order to improve the detection accuracy, the detection error is theoretically analyzed and compensated. The absolute error after compensation is smaller than 0.1 mm, and the precision can reach 0.1%, which satisfies the requirements of 3D reconstruction of the deposited parts. An online measurement system is built for the surface of deposited parts in the process of electron beam freeform fabrication, which realizes the online 3D reconstruction of the surface of the deposited layer. In addition, in order to improve the detection stability of the whole system, the image processing algorithm suitable for this scene is designed. The reliability and speed of the algorithm are improved by ROI extraction, threshold segmentation, and expansion corrosion. In addition, the speckle size information can also reflect the thermal conditions of the surface of the deposited parts. Hence, it can be used for online detection of defects such as infusion and voids.

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4

Gurianov, D. A., K. N. Kalashnikov, K. S. Osipovich, and A. V. Chumaevskii. "Obtaining the bimetallic composition by the electron beam freeform fabrication." IOP Conference Series: Materials Science and Engineering 597 (August 23, 2019): 012043. http://dx.doi.org/10.1088/1757-899x/597/1/012043.

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5

Taminger, Karen M., Robert A. Hafley, and Marcia S. Domack. "Evolution and Control of 2219 Aluminium Microstructural Features through Electron Beam Freeform Fabrication." Materials Science Forum 519-521 (July 2006): 1297–302. http://dx.doi.org/10.4028/www.scientific.net/msf.519-521.1297.

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Electron beam freeform fabrication (EBF3) is a new layer-additive process that has been developed for near-net shape fabrication of complex structures. EBF3 uses an electron beam to create a molten pool on the surface of a substrate. Wire is fed into the molten pool and the part translated with respect to the beam to build up a 3-dimensional structure one layer at a time. Unlike many other freeform fabrication processes, the energy coupling of the electron beam is extremely well suited to processing of aluminum alloys. The layer-additive nature of the EBF3 process results in a tortuous thermal path producing complex microstructures including: small homogeneous equiaxed grains; dendritic growth contained within larger grains; and/or pervasive dendritic formation in the interpass regions of the deposits. Several process control variables contribute to the formation of these different microstructures, including translation speed, wire feed rate, beam current and accelerating voltage. In electron beam processing, higher accelerating voltages embed the energy deeper below the surface of the substrate. Two EBF3 systems have been established at NASA Langley, one with a low-voltage (10-30kV) and the other a high-voltage (30-60 kV) electron beam gun. Aluminum alloy 2219 was processed over a range of different variables to explore the design space and correlate the resultant microstructures with the processing parameters. This report is specifically exploring the impact of accelerating voltage. Of particular interest is correlating energy to the resultant material characteristics to determine the potential of achieving microstructural control through precise management of the heat flux and cooling rates during deposition.

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6

Kalashnikov, K. N., K. S. Khoroshko, T. A. Kalashnikova, A. V. Chumaevskii, and A. V. Filippov. "Structural evolution of 321 stainless steel in electron beam freeform fabrication." Journal of Physics: Conference Series 1115 (November 2018): 042049. http://dx.doi.org/10.1088/1742-6596/1115/4/042049.

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7

Matz, J. E., and T. W. Eagar. "Carbide formation in alloy 718 during electron-beam solid freeform fabrication." Metallurgical and Materials Transactions A 33, no. 8 (August 2002): 2559–67. http://dx.doi.org/10.1007/s11661-002-0376-y.

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8

Nikolov, Daniel K., Aaron Bauer, Fei Cheng, Hitoshi Kato, A. Nick Vamivakas, and Jannick P. Rolland. "Metaform optics: Bridging nanophotonics and freeform optics." Science Advances 7, no. 18 (April 2021): eabe5112. http://dx.doi.org/10.1126/sciadv.abe5112.

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The demand for high-resolution optical systems with a compact form factor, such as augmented reality displays, sensors, and mobile cameras, requires creating new optical component architectures. Advances in the design and fabrication of freeform optics and metasurfaces make them potential solutions to address the previous needs. Here, we introduce the concept of a metaform—an optical surface that integrates the combined benefits of a freeform optic and a metasurface into a single optical component. We experimentally realized a miniature imager using a metaform mirror. The mirror is fabricated via an enhanced electron beam lithography process on a freeform substrate. The design degrees of freedom enabled by a metaform will support a new generation of optical systems.

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9

Yan, Wuzhu, Zhufeng Yue, and Jianwen Feng. "Study on the role of deposition path in electron beam freeform fabrication process." Rapid Prototyping Journal 23, no. 6 (October 17, 2017): 1057–68. http://dx.doi.org/10.1108/rpj-03-2016-0043.

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Purpose The present work aims to reveal the effect of deposition paths on transient temperature, transient stress, residual stress and residual warping in the electron beam freeform fabrication (EBF) process. Design/methodology/approach Six typical deposition paths were involved in the finite element (FE) simulations of EBF process by implementing a specially written program. Findings The results showed that the deposition path had a remarkable influence on heat transfer and transient temperature distribution in the scanning process, resulting in different residual stress and residual warping after cooling to room temperature. The largest and smallest temperature gradients were obtained from the zigzag and alternate-line paths, respectively. Meanwhile, the temperature gradient decreased with the increase of deposited layers. The optimum deposition path, namely, the alternate-line pattern, was determined with respect to the residual stress and residual warping. Originality/value Although some researcher revealed the importance of deposition path through FE analysis and experimental observation, their studies were usually confined within one type of deposition pattern. A complete investigation of typical deposition paths and comparison among them are still lacking in literature. To address the aforementioned gap, the present work started by extensive FE simulations of EBF process involving six representative deposition paths, namely, the alternate-line, zigzag, raster, inside-out spiral, outside-in spiral and Hilbert. For each deposition path, the transient temperature field, residual stress and residual deformation were obtained to optimize the deposition path.

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10

Shu, Xi, Guoqing Chen, Junpeng Liu, Binggang Zhang, and Jicai Feng. "Microstructure evolution of copper/steel gradient deposition prepared using electron beam freeform fabrication." Materials Letters 213 (February 2018): 374–77. http://dx.doi.org/10.1016/j.matlet.2017.11.016.

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11

Zhang, Haoyu, Zhiyue Liang, Shuhe Chang, and Dong Du. "Feedforward control of droplet transition in electron beam freeform fabrication based on dual beam spot method." Journal of Physics: Conference Series 1983, no. 1 (July 1, 2021): 012110. http://dx.doi.org/10.1088/1742-6596/1983/1/012110.

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12

Domack, Marcia S., Karen M. Taminger, and Matthew Begley. "Metallurgical Mechanisms Controlling Mechanical Properties of Aluminium Alloy 2219 Produced by Electron Beam Freeform Fabrication." Materials Science Forum 519-521 (July 2006): 1291–96. http://dx.doi.org/10.4028/www.scientific.net/msf.519-521.1291.

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The electron beam freeform fabrication (EBF3) layer-additive manufacturing process has been developed to directly fabricate complex geometry components. EBF3 introduces metal wire into a molten pool created on the surface of a substrate by a focused electron beam. Part geometry is achieved by translating the substrate with respect to the beam to build the part one layer at a time. Tensile properties have been demonstrated for electron beam deposited aluminum and titanium alloys that are comparable to wrought products, although the microstructures of the deposits exhibit features more typical of cast material. Understanding the metallurgical mechanisms controlling mechanical properties is essential to maximizing application of the EBF3 process. In the current study, mechanical properties and resulting microstructures were examined for aluminum alloy 2219 fabricated over a range of EBF3 process variables. Material performance was evaluated based on tensile properties and results were compared with properties of Al 2219 wrought products. Unique microstructures were observed within the deposited layers and at interlayer boundaries, which varied within the deposit height due to microstructural evolution associated with the complex thermal history experienced during subsequent layer deposition. Microstructures exhibited irregularly shaped grains, typically with interior dendritic structures, which were described based on overall grain size, morphology, distribution, and dendrite spacing, and were correlated with deposition parameters. Fracture features were compared with microstructural elements to define fracture paths and aid in definition of basic processingmicrostructure- property correlations.

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13

Cormier, Denis, Ola Harrysson, Tushar Mahale, and Harvey West. "Freeform Fabrication of Titanium Aluminide via Electron Beam Melting Using Prealloyed and Blended Powders." Research Letters in Materials Science 2007 (2007): 1–4. http://dx.doi.org/10.1155/2007/34737.

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Titanium aluminide (TiAl) is an intermetallic compound possessing excellent high-temperature performance while having significantly lower density than nickel-based superalloys. This paper presents preliminary results of experiments aimed at processing TiAl via the electron beam melting (EBM) process. Two processing routes are explored. The first uses prealloyed powder, whereas the second explores controlled reaction synthesis. Issues such as processing parameters, vaporization of alloying elements, microstructure, and properties are discussed.

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14

Xu, Junqiang, Jun Zhu, Jikang Fan, Qi Zhou, Yong Peng, and Shun Guo. "Microstructure and mechanical properties of Ti–6Al–4V alloy fabricated using electron beam freeform fabrication." Vacuum 167 (September 2019): 364–73. http://dx.doi.org/10.1016/j.vacuum.2019.06.030.

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15

Yin, Yajun, Wei Duan, Kai Wu, Yangdong Li, Jianxin Zhou, Xu Shen, and Min Wang. "Temperature distribution simulations during electron beam freeform fabrication process based on the fully threaded tree." Rapid Prototyping Journal 25, no. 6 (July 8, 2019): 989–97. http://dx.doi.org/10.1108/rpj-12-2016-0211.

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Purpose The purpose of this study is to simulate the temperature distribution during an electron beam freeform fabrication (EBF3) process based on a fully threaded tree (FTT) technique in various scales and to analyze the temperature variation with time in different regions of the part. Design/methodology/approach This study presented a revised model for the temperature simulation in the EBF3 process. The FTT technique was then adopted as an adaptive grid strategy in the simulation. Based on the simulation results, an analysis regarding the temperature distribution of a circular deposit and substrate was performed. Findings The FTT technique was successfully adopted in the simulation of the temperature field during the EBF3 process. The temperature bands and oscillating temperature curves appeared in the deposit and substrate. Originality/value The FTT technique was introduced into the numerical simulation of an additive manufacturing process. The efficiency of the process was improved, and the FTT technique was convenient for the 3D simulations and multi-pass deposits.

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16

Chen, Tao, Shengyong Pang, Qun Tang, Hongbo Suo, and Shuili Gong. "Evaporation Ripped Metallurgical Pore in Electron Beam Freeform Fabrication of Ti-6-Al-4-V." Materials and Manufacturing Processes 31, no. 15 (December 17, 2015): 1995–2000. http://dx.doi.org/10.1080/10426914.2015.1127948.

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17

Chen, Guoqing, Xi Shu, Junpeng Liu, Binggang Zhang, and Jicai Feng. "A new coating method with potential for additive manufacturing: Premelting electron beam-assisted freeform fabrication." Additive Manufacturing 33 (May 2020): 101118. http://dx.doi.org/10.1016/j.addma.2020.101118.

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18

Yan, Wuzhu, Zhufeng Yue, and Jiazhen Zhang. "Study on the residual stress and warping of stiffened panel produced by electron beam freeform fabrication." Materials & Design 89 (January 2016): 1205–12. http://dx.doi.org/10.1016/j.matdes.2015.10.094.

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19

Chen, Guoqing, Xi Shu, Junpeng Liu, Binggang Zhang, and Jicai Feng. "Crystallographic texture and mechanical properties by electron beam freeform fabrication of copper/steel gradient composite materials." Vacuum 171 (January 2020): 109009. http://dx.doi.org/10.1016/j.vacuum.2019.109009.

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20

Pixner, Florian, Fernando Warchomicka, Patrick Peter, Axel Steuwer, Magnus Hörnqvist Colliander, Robert Pederson, and Norbert Enzinger. "Wire-Based Additive Manufacturing of Ti-6Al-4V Using Electron Beam Technique." Materials 13, no. 15 (July 24, 2020): 3310. http://dx.doi.org/10.3390/ma13153310.

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Electron beam freeform fabrication is a wire feed direct energy deposition additive manufacturing process, where the vacuum condition ensures excellent shielding against the atmosphere and enables processing of highly reactive materials. In this work, this technique is applied for the α + β-titanium alloy Ti-6Al-4V to determine suitable process parameter for robust building. The correlation between dimensions and the dilution of single beads based on selected process parameters, leads to an overlapping distance in the range of 70–75% of the bead width, resulting in a multi-bead layer with a uniform height and with a linear build-up rate. Moreover, the stacking of layers with different numbers of tracks using an alternating symmetric welding sequence allows the manufacturing of simple structures like walls and blocks. Microscopy investigations reveal that the primary structure consists of epitaxial grown columnar prior β-grains, with some randomly scattered macro and micropores. The developed microstructure consists of a mixture of martensitic and finer α-lamellar structure with a moderate and uniform hardness of 334 HV, an ultimate tensile strength of 953 MPa and rather low fracture elongation of 4.5%. A subsequent stress relief heat treatment leads to a uniform hardness distribution and an extended fracture elongation of 9.5%, with a decrease of the ultimate strength to 881 MPa due to the fine α-lamellar structure produced during the heat treatment. Residual stresses measured by energy dispersive X-ray diffraction shows after deposition 200–450 MPa in tension in the longitudinal direction, while the stresses reach almost zero when the stress relief treatment is carried out.

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21

Filippov, A. V., S. V. Fortuna, D. A. Gurianov, and K. N. Kalashnikov. "On the problem of formation of articles with specified properties by the method of electron beam freeform fabrication." Journal of Physics: Conference Series 1115 (November 2018): 042044. http://dx.doi.org/10.1088/1742-6596/1115/4/042044.

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22

Xu, Junqiang, Yong Peng, Qi Zhou, Jikang Fan, Jian Kong, Kehong Wang, Shun Guo, and Jun Zhu. "Microstructure and mechanical properties of Ti-52 at% Al alloy synthesized in-situ via dual-wires electron beam freeform fabrication." Materials Science and Engineering: A 798 (November 2020): 140232. http://dx.doi.org/10.1016/j.msea.2020.140232.

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23

Boudreau, Douglas B., Liza-Anastasia DiCecco, Olufisayo A. Gali, and Afsaneh Edrisy. "Fatigue Behaviour of Additive Manufactured Ti-TiB." MRS Advances 3, no. 62 (2018): 3641–53. http://dx.doi.org/10.1557/adv.2018.618.

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ABSTRACTFatigue behaviour of titanium reinforced with TiB particles fabricated by ‘plasma transferred arc solid freeform fabrication’ (PTA-SFFF) technique was investigated. Rotation bending fatigue tests were conducted following the MPIF 56 standard using the staircase method approach. Experimental data is used to calculate the fatigue strength and construct S-N curves, where the results were compared to a powder metallurgy FC0205 as a benchmark material. The titanium samples were found to exhibit superior fatigue behaviour in comparison to the reference FC0205 material, performing well above 1/3 of its ultimate tensile strength with a 90% survival fatigue strength of 244 +/- 98.3 MPa versus 141 +/- 17.4 MPa. Fatigue failure mechanisms of samples were identified by examination of the fracture surfaces through scanning electron microscopy (SEM) as well as using transmission-electron microscopy (TEM) and focused ion beam (FIB) analysis techniques. Fatigue crack propagation was either arrested or deflected when propagation occurred within the vicinity of the TiB intermetallics. Fracture surfaces of the titanium matrix displayed evidence of striations while the TiB intermetallic experience cleavage fracture.

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24

Xu, Junqiang, Qi Zhou, Jian Kong, Yong Peng, Shun Guo, Jun Zhu, and Jikang Fan. "Solidification behavior and microstructure of Ti-(37−52) at% Al alloys synthesized in situ via dual-wire electron beam freeform fabrication." Additive Manufacturing 46 (October 2021): 102113. http://dx.doi.org/10.1016/j.addma.2021.102113.

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25

Tao, Xuewei, Zhengjun Yao, Shasha Zhang, Mengxin Yao, Shihao Sun, and Moliar Oleksandr. "Effect of beam power on the distribution statues of aligned TiBw and tensile behavior of trace boron-modified Ti6Al4V alloy produced by electron beam freeform fabrication." Vacuum 172 (February 2020): 109070. http://dx.doi.org/10.1016/j.vacuum.2019.109070.

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26

Chen, Tao, Shengyong Pang, Qun Tang, Hongbo Suo, and Shuili Gong. "Induction of Ball-Filled Pores in Electron Beam Freeform Fabrication of Ti-6-Al-4-V Alloy by Dissolved Gas and Metallic Vapor." Metallurgical and Materials Transactions A 46, no. 12 (September 15, 2015): 5499–503. http://dx.doi.org/10.1007/s11661-015-3146-3.

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27

Leong, K. F., K. K. S. Phua, C. K. Chua, Z. H. Du, and K. O. M. Teo. "Fabrication of porous polymeric matrix drug delivery devices using the selective laser sintering technique." Proceedings of the Institution of Mechanical Engineers, Part H: Journal of Engineering in Medicine 215, no. 2 (February 1, 2001): 191–92. http://dx.doi.org/10.1243/0954411011533751.

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New techniques in solid freeform fabrication (SFF) have prompted research into methods of manufacturing and controlling porosity. The strategy of this research is to integrate computer aided design (CAD) and the SFF technique of selective laser sintering (SLS) to fabricate porous polymeric matrix drug delivery devices (DDDs). This study focuses on the control of the porosity of a matrix by manipulating the SLS process parameters of laser beam power and scan speed. Methylene blue dye is used as a drug model to infiltrate the matrices via a degassing method; visual inspection of dye penetration into the matrices is carried out. Most notably, the laser power matrices show a two-stage penetration process. The matrices are sectioned along the XZ planes and viewed under scanning electron microscope (SEM). The morphologies of the samples reveal a general increase in channel widths as laser power decreases and scan speed increases. The fractional release profiles of the matrices are determined by allowing the dye to diffuse out in vitro within a controlled environment. The results show that laser power and scan speed matrices deliver the dye for 8-9 days and have an evenly distributed profile. Mercury porosimetry is used to analyse the porosity of the matrices. Laser power matrices show a linear relationship between porosity and variation in parameter values. However, the same relationship for scan speed matrices turns out to be rather inconsistent. Relationships between the SLS parameters and the experimental results are developed using the fractional release rate equation for the infinite slab porous matrix DDD as a basis for correlation.

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28

Yamamoto, Y., and Soshu Kirihara. "Development of WC-Co/SUS304 Functionally Graded Materials by Using Three Dimensional Micro Welding." Materials Science Forum 631-632 (October 2009): 265–70. http://dx.doi.org/10.4028/www.scientific.net/msf.631-632.265.

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Three dimensional micro welding (3DMW) of a novel freeform fabrication process for metal or alloy components has been developed in our investigation group. A tungsten inert gas (TIG) welding machine is controlled by utilizing CAD/CAM processes. Various types of metal or alloy wires are fed automatically under a micro-arc torch to form tiny metallic beads. These micrometer order beads are joined continuously to build three dimensional structures. Near-net-shape components of metal or alloy compounds with high melting points can be fabricated automatically with minimized energy and resources. In this study, tungsten carbide-cobalt (WC-Co) and stainless steel (SUS304) micro beads of 1.0 mm in diameter were stacked alternately to fabricate cutting tools with graded structures by using the 3DMW. The microstructure and hardness were observed by scanning electron microscope (SEM), energy dispersive spectra (EDS) and Vickers hardness tester. The maximum hardness of micro bead was approximately 1300 HV and no crack or pore existed in the formed objects.

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29

Wang, Han, Zhengjun Yao, Xuewei Tao, Shasha Zhang, Dongheng Xu, and Moliar Oleksandr. "Role of trace boron in the microstructure modification and the anisotropy of mechanical and wear properties of the Ti6Al4V alloy produced by electron beam freeform fabrication." Vacuum 172 (February 2020): 109053. http://dx.doi.org/10.1016/j.vacuum.2019.109053.

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30

Tang, Qun, Shengyong Pang, Binbin Chen, Hongbo Suo, and Jianxin Zhou. "A three dimensional transient model for heat transfer and fluid flow of weld pool during electron beam freeform fabrication of Ti-6-Al-4-V alloy." International Journal of Heat and Mass Transfer 78 (November 2014): 203–15. http://dx.doi.org/10.1016/j.ijheatmasstransfer.2014.06.048.

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31

Sun, Ji Ning, Xi Chun Luo, Wen Long Chang, and James M. Ritchie. "Fabrication of Freeform Micro Optics by Focused Ion Beam." Key Engineering Materials 516 (June 2012): 414–19. http://dx.doi.org/10.4028/www.scientific.net/kem.516.414.

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In this work, two kinds of freeform micro optics were successfully fabricated by using focused ion beam machining. A divergence compensation method was applied to optimize the machining process. Both dynamic variation of the sputter yield and the extra ion flux contributed by the beam tail were taken into consideration. Measurement results on the surface topography indicated that 3-fold improvement of the relative divergence was achieved for both optics when compared with conventional focused ion beam milling without any corrections. Furthermore, investigations on the influences of scanning strategies, including raster scan, serpentine scan and contour scan, were carried out. The serpentine scan is recommended for the fabrication of freeform optics by focused ion beam technology owing to the minimal beam travelling distance over the pattern area.

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32

Li, Likai, and Allen Y. Yi. "Design and fabrication of a freeform microlens array for uniform beam shaping." Microsystem Technologies 17, no. 12 (October 12, 2011): 1713–20. http://dx.doi.org/10.1007/s00542-011-1359-y.

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33

Huang, Zhuangxiong, Francesco Pedaci, Maarten van Oene, Matthew J. Wiggin, and Nynke H. Dekker. "Electron Beam Fabrication of Birefringent Microcylinders." ACS Nano 5, no. 2 (January 31, 2011): 1418–27. http://dx.doi.org/10.1021/nn1034108.

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34

Despont, M., U. Staufer, C. Stebler, H. Gross, and P. Vettiger. "Electron-beam microcolumn fabrication and testing." Microelectronic Engineering 30, no. 1-4 (January 1996): 69–72. http://dx.doi.org/10.1016/0167-9317(95)00197-2.

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35

Jiang, N. "Electron-Beam Fabrication of Nanostructures in Glasses." Microscopy and Microanalysis 16, S2 (July 2010): 1660–61. http://dx.doi.org/10.1017/s1431927610056540.

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36

Di Fabrizio, Enzo. "Nanometer biodevice fabrication by electron beam lithography." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 15, no. 6 (November 1997): 2892. http://dx.doi.org/10.1116/1.589751.

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37

Zhang, Jian, Babak Shokouhi, and Bo Cui. "Tilted nanostructure fabrication by electron beam lithography." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 30, no. 6 (November 2012): 06F302. http://dx.doi.org/10.1116/1.4754809.

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38

Lin, Tsan-Chu, Rui-Zhi Su, Yu-cheng Lai, Dau-Chung Wang, and Cen-Shawn Wu. "Transmission Electron Beam Drilling for Nanoscale Fabrication." Japanese Journal of Applied Physics 49, no. 6 (June 21, 2010): 06GH16. http://dx.doi.org/10.1143/jjap.49.06gh16.

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39

Lei, Shuang, Xianfeng Li, Yaqi Deng, Yakai Xiao, Yanchi Chen, and Haowei Wang. "Microstructure and mechanical properties of electron beam freeform fabricated TiB2/Al-Cu composite." Materials Letters 277 (October 2020): 128273. http://dx.doi.org/10.1016/j.matlet.2020.128273.

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40

Utke, Ivo, Patrik Hoffmann, and John Melngailis. "Gas-assisted focused electron beam and ion beam processing and fabrication." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 26, no. 4 (2008): 1197. http://dx.doi.org/10.1116/1.2955728.

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41

Maryam, Alsadat Rad, and Kamarulazizi Ibrahim. "Fabrication of Nanopit Array Using Electron Beam Lithography." Advanced Materials Research 364 (October 2011): 169–73. http://dx.doi.org/10.4028/www.scientific.net/amr.364.169.

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Abstract:

This work reported the fabrication of nanopits array pattern using electron beam lithography (EBL). The effects of electron dosage on pattern shape were evaluated through EBL with a positive resist, Poly Methyl Meth Acrylate (PMMA), under acceleration voltages of 20 and 30 kV. Pattern of nanopits with 200 nm diameter have been created on PMMA to investigate the effect of various electron beam doses. The SEM images have shown effect of the voltage and dosage variation on them. In addition, Monte Carlo simulation has been done to show the scattering of electrons and proximity effect at different voltages in PMMA in order to explain the experimental results.

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42

Leech, Patrick W., Brett A. Sexton, Russell J. Marnock, and Fiona Smith. "Fabrication of hologram coins using electron beam lithography." Microelectronic Engineering 71, no. 2 (February 2004): 171–76. http://dx.doi.org/10.1016/j.mee.2003.09.007.

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43

Egerton, RF. "Mechanisms of Radiation Damage and Electron-Beam Fabrication." Microscopy and Microanalysis 16, S2 (July 2010): 1658–59. http://dx.doi.org/10.1017/s1431927610055182.

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44

Takamatsu, Jun, Tetsuro Nakasugi, Yoshimitsu Kato, Naoharu Shimomura, Hitoshi Sunaoshi, Kiyoshi Hattori, Kazuaki Nakajima, Kazuyoshi Sugihara, and Tadahiro Takigawa. "Fabrication of Micro-Marks for Electron-Beam Lithography." Japanese Journal of Applied Physics 36, Part 1, No. 12B (December 30, 1997): 7523–28. http://dx.doi.org/10.1143/jjap.36.7523.

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Kislov, N. A., I. I. Khodos, E. D. Ivanov, and J. Barthel. "Electron-beam-induced fabrication of metal-containing nanostructures." Scanning 18, no. 2 (December 6, 2006): 114–18. http://dx.doi.org/10.1002/sca.1996.4950180205.

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46

Furuya, K., M. Takeguchi, M. Song, K. Mitsuishi, and M. Tanaka. "Electron beam induced fabrication and characterization of nanostructures." Journal of Physics: Conference Series 126 (August 1, 2008): 012024. http://dx.doi.org/10.1088/1742-6596/126/1/012024.

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Lercel, Michael, Chris Magg, Monica Barrett, Kevin Collins, Michael Trybendis, Neal Caldwell, Ray Jeffer, and Lucien Bouchard. "Fabrication of masks for electron-beam projection lithography." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 18, no. 6 (2000): 3210. http://dx.doi.org/10.1116/1.1314370.

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Tseng, A. A., Kuan Chen, C. D. Chen, and K. J. Ma. "Electron beam lithography in nanoscale fabrication: recent development." IEEE Transactions on Electronics Packaging Manufacturing 26, no. 2 (April 2003): 141–49. http://dx.doi.org/10.1109/tepm.2003.817714.

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Stoliar, P., A. Calo, F. Valle, and F. Biscarini. "Fabrication of Fractal Surfaces by Electron Beam Lithography." IEEE Transactions on Nanotechnology 9, no. 2 (March 2010): 229–36. http://dx.doi.org/10.1109/tnano.2009.2027232.

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Gritz, Michael A., Meredith Metzler, Joel Moser, David Spencer, and Glenn D. Boreman. "Fabrication of air bridges using electron beam lithography." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 21, no. 1 (2003): 332. http://dx.doi.org/10.1116/1.1539062.

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