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Journal articles on the topic 'Filtered vacuum arc'

Author: Grafiati

Published: 28 May 2022

Last updated: 31 July 2025

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1

Benti, Hailu Gemechu, Abraham Debebe Woldeyohannes, and Belete Sirahbizu Yigezu. "Improving the Efficiency of Cutting Tools through Application of Filtered Cathodic Vacuum Arc Deposition Coating Techniques: A Review." Advances in Materials Science and Engineering 2022 (May 28, 2022): 1–17. http://dx.doi.org/10.1155/2022/1450805.

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The challenge of enhancing cutting tool life has been dealt with by many research studies. However, this challenge seems endless with growing technological advancement which brings about incremental improvement in tool life. The objective of this review paper is focused at assessing filtered cathodic vacuum arc deposition techniques applied on cutting tools and their effect on tool efficiency. The paper particularly picks filtered cathodic vacuum arc deposition (FCVAD) among other well-identified methods of coating like the Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD). F

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2

Верещака, Алексей, and Aleksey Vereshchaka. "Development process of assisted filtered cathodic-vacuum-arc deposition (AFCVAD)." Bulletin of Bryansk state technical university 2014, no. 3 (2014): 10–13. http://dx.doi.org/10.12737/23189.

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Developed a process of assisted filtered cathodic-vacuum-arc deposition (AFCVAD). We used a special emitter (implantor) to generate Cr, Mo ions with high energy. Such key parameters of coatings as composition, structure, a thickness, hardness, adhesion in relation to a substrate obtained at various energy of chrome ions have been studied. A phenomenological (physical) model of assisted filtered cathodic-vacuum-arc deposition (AFCVAD), allows to predict the properties of the coatings formed on the basis of binary compounds as a function of the relationship Ra, characterizing parameters of ion i

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3

Brzezinka, Tomasz L., Jeff Rao, Jose M. Paiva, et al. "Facilitating TiB2 for Filtered Vacuum Cathodic Arc Evaporation." Coatings 10, no. 3 (2020): 244. http://dx.doi.org/10.3390/coatings10030244.

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TiB2 is well established as a superhard coating with a high melting point and a low coefficient of friction. The brittle nature of borides means they cannot be utilised with arc evaporation, which is commonly used for the synthesis of hard coatings as it provides a high deposition rate, fully ionised plasma and good adhesion. In this work, TiB2 conical cathodes with non-standard sintering additives (carbon and TiSi2) were produced, and the properties of the base material, such as grain structure, hardness, electrical resistivity and composition, were compared to those of monolithic TiB2. The d

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4

Maksimov, Y. V., A. S. Vereschaka, A. A. Vereschaka, et al. "Development and research of multilayer composite coatings with nano-dispersed structure which are deposited on cutting tools using assistance cathode-vacuum-arc processes." Izvestiya MGTU MAMI 7, no. 1-2 (2013): 73–82. http://dx.doi.org/10.17816/2074-0530-68031.

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The authors considered the problem of synthesis of multilayer coatings with nano-dispersed structure using the process of assistance filtered cathode-vacuum-arc deposition. The effect of high-energy assisting ions, generated by a special device (implanter), which the ВИТ-3 vacuum-arc setting was equipped with, is analyzed in the paper. The mechanisms of modifying the properties of the deposited coatings and cutting properties of carbide inserts with coatings obtained in assisting cathode-vacuum-arc deposition with filtration of ion-vapor flow are analyzed as well.

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5

TAKIKAWA, Hirofumi, and Takahiro BANDO. "Vacuum Arc Deposition: Steered and Filtered Methods." Journal of The Surface Finishing Society of Japan 75, no. 7 (2024): 310–13. https://doi.org/10.4139/sfj.75.310.

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6

Aksenov, I. I., D. S. Aksyonov, V. V. Vasilyev, A. A. Luchaninov, E. N. Reshetnyak, and V. E. Strel'nitskij. "Two-Cathode Filtered Vacuum-Arc Plasma Source." IEEE Transactions on Plasma Science 37, no. 8 (2009): 1511–16. http://dx.doi.org/10.1109/tps.2009.2018820.

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7

Boxman, R. L., V. Zhitomirsky, B. Alterkop, et al. "Recent progress in filtered vacuum arc deposition." Surface and Coatings Technology 86-87 (December 1996): 243–53. http://dx.doi.org/10.1016/s0257-8972(96)03023-x.

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8

Shi, X., B. K. Tay, D. I. Flynn, Q. Ye, and Z. Sun. "Characterization of filtered cathodic vacuum arc system." Surface and Coatings Technology 94-95 (October 1997): 195–200. http://dx.doi.org/10.1016/s0257-8972(97)00347-2.

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9

Stepanov, Igor, Alexander Ryabchikov, and Denis Sivin. "Very Broad Metal Ion Beam Source for Ion Implantation and Coating Deposition Technologies." Advanced Materials Research 880 (January 2014): 288–91. http://dx.doi.org/10.4028/www.scientific.net/amr.880.288.

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The paper describes high broad metal ion source based on dc macroparticle filtered vacuum arc plasma generation with the dc ion-beam extraction. The possibility of formation of pseudo ribbon beam of metal ions with the parameters: ion beam length 0.6 m, ion current up to 0.2 A, accelerating voltage 40 kV, and ion energy up to 160 kV has been demonstrated. The pseudo ribbon ion beam is formed from dc driven vacuum arc plasma. The results of investigation of the vacuum arc evaporator ion-emission properties are presented. The influence of magnetic field strength near the cathode surface on the a

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10

Wang, Z. H., D. R. McKenzie, P. J. Martin, and R. P. Netterfield. "Spectroscopic studies of a solenoid filtered vacuum arc." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13, no. 4 (1995): 2261–65. http://dx.doi.org/10.1116/1.579505.

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11

Veerasamy, V. S., G. A. J. Amaratunga, and W. I. Milne. "Plasma motion in a filtered cathodic vacuum arc." IEEE Transactions on Plasma Science 21, no. 3 (1993): 322–28. http://dx.doi.org/10.1109/27.277558.

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12

Boxman, R. L., S. Goldsmith, A. Ben-Shalom, et al. "Filtered vacuum arc deposition of semiconductor thin films." IEEE Transactions on Plasma Science 23, no. 6 (1995): 939–44. http://dx.doi.org/10.1109/27.476479.

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13

Chekh, Yu, I. S. Zhirkov, and M. P. Delplancke-Ogletree. "Simple filtered repetitively pulsed vacuum arc plasma source." Review of Scientific Instruments 81, no. 2 (2010): 023506. http://dx.doi.org/10.1063/1.3310096.

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14

Chen, Y. M., H. Q. Zhang, Z. W. Li, W. Cao, B. Liao, and X. Zhang. "Deposition of ZrNxOyfilms by filtered cathodic vacuum arc." Surface Engineering 29, no. 8 (2013): 567–71. http://dx.doi.org/10.1179/1743294413y.0000000163.

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15

Vereschaka, Alexey A., Anatoly S. Vereschaka, Andre DL Batako, Boris J. Mokritskii, Anatoliy Y. Aksenenko, and Nikolay N. Sitnikov. "Improvement of structure and quality of nanoscale multilayered composite coatings, deposited by filtered cathodic vacuum arc deposition method." Nanomaterials and Nanotechnology 7 (January 17, 2016): 184798041668080. http://dx.doi.org/10.1177/1847980416680805.

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This article studies the specific features of cathode vacuum arc deposition of coatings used in the production of cutting tools. The detailed analysis of the major drawbacks of arc-Physical Vapour Deposition (PVD) methods has contributed to the development of the processes of filtered cathodic vacuum arc deposition to form nanoscale multilayered composite coatings of increased efficiency. This is achieved through the formation of nanostructure, increase in strength of adhesion of coating to substrate up to 20%, and reduction of such dangerous coating surface defects as macro- and microdroplets

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16

Bi, W. Y., L. H. Li, H. T. Liu, and G. Zhao. "The effect of biased plates on transport of vacuum arc plasma through rectangular curved magnetic filter." Modern Physics Letters B 31, no. 19-21 (2017): 1740006. http://dx.doi.org/10.1142/s0217984917400061.

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Filtered cathode vacuum arc deposition can remove the macroparticles produced from the cathode. Positively biasing the whole filter or inserting a biased plate in the filter can increase the plasma transport efficiency. We developed a curved magnetic filter with rectangular cross-section to improve the coating efficiency. In this study, the effect of biased plates at outer-wall and inner-wall on the transport efficiency of vacuum arc plasma through rectangular curved magnetic filter was investigated. A Langmuir probe system is used to measure the distribution properties of the filtered plasma

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17

Shashurin, A., I. I. Beilis, Y. Sivan, S. Goldsmith, and R. L. Boxman. "Copper film deposition rates by a hot refractory anode vacuum arc and magnetically filtered vacuum arc." Surface and Coatings Technology 201, no. 7 (2006): 4145–51. http://dx.doi.org/10.1016/j.surfcoat.2006.08.022.

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18

Kaplan, L., V. N. Zhitomirsky, S. Goldsmith, R. L. Boxman, and I. Rusman. "Arc behaviour during filtered vacuum arc deposition of Sn-O thin films." Surface and Coatings Technology 76-77 (November 1995): 181–89. http://dx.doi.org/10.1016/0257-8972(95)02592-8.

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19

Tripathi, R. K., O. S. Panwar, A. K. Kesarwani, et al. "Investigations on phosphorous doped hydrogenated amorphous silicon carbide thin films deposited by a filtered cathodic vacuum arc technique for photo detecting applications." RSC Adv. 4, no. 97 (2014): 54388–97. http://dx.doi.org/10.1039/c4ra08343a.

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This paper reports the growth and properties of phosphorous doped hydrogenated amorphous silicon carbide thin films deposited by a filtered cathodic vacuum arc technique using P doped solid silicon target as a cathode in the presence of acetylene gas.

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20

Mo, Ji Liang, Min Hao Zhu, J. An, H. Sun, Yong Xiang Leng, and Nan Huang. "Deposition of CrN Coatings by Filtered Cathodic Vacuum Arc." Key Engineering Materials 373-374 (March 2008): 130–33. http://dx.doi.org/10.4028/www.scientific.net/kem.373-374.130.

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CrN coatings were deposited on cemented carbide substrates by filtered cathodic vacuum arc technique (FCVA). The effect of different deposition parameters: nitrogen partial pressure, substrate-bias voltage and preheating of the substrate, on the structural and mechanical properties of the coating was investigated. X-ray diffraction analysis was used to determine the structure and composition of the coatings. The tribological behaviour and wear properties of the coatings against Si3N4 ball at different normal loads were studied under reciprocating sliding condition. The results showed that a sm

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21

Zukerman, I., E. Goldenberg, V. N. Zhitomirsky, A. Raveh, and R. L. Boxman. "Thermal Stability of Filtered Vacuum Arc Deposited Er2O3 Coatings." Journal of Coating Science and Technology 2, no. 1 (2015): 13–19. http://dx.doi.org/10.6000/2369-3355.2015.02.01.3.

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22

Bilek, M. M. M., P. Evans, D. R. Mckenzie, D. G. McCulloch, H. Zreiqat, and C. R. Howlett. "Metal ion implantation using a filtered cathodic vacuum arc." Journal of Applied Physics 87, no. 9 (2000): 4198–204. http://dx.doi.org/10.1063/1.373052.

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23

Lau, S. P., Y. H. Cheng, J. R. Shi, P. Cao, B. K. Tay, and X. Shi. "Filtered cathodic vacuum arc deposition of thin film copper." Thin Solid Films 398-399 (November 2001): 539–43. http://dx.doi.org/10.1016/s0040-6090(01)01315-3.

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24

Chen, J. S., S. P. Lau, Y. B. Zhang, Z. Sun, B. K. Tay, and C. Q. Sun. "Deposition of permalloy films by filtered cathodic vacuum arc." Thin Solid Films 443, no. 1-2 (2003): 115–19. http://dx.doi.org/10.1016/s0040-6090(03)01031-9.

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25

Shi, J. R., S. P. Lau, Z. Sun, X. Shi, B. K. Tay, and H. S. Tan. "Filtered cathodic vacuum arc deposition of copper thin film." Electronics Letters 36, no. 14 (2000): 1205. http://dx.doi.org/10.1049/el:20000861.

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26

WU, X. L., X. J. LI, X. ZHANG, W. B. XUE, G. A. CHENG, and A. D. LIU. "TRIBOLOGICAL BEHAVIORS OF DUPLEX DLC/Al2O3 COATINGS FABRICATED USING MICRO-ARC OXIDATION AND FILTERED CATHODIC VACUUM ARC SYSTEM." Surface Review and Letters 14, no. 02 (2007): 193–97. http://dx.doi.org/10.1142/s0218625x07009256.

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Micro-arc oxidation technique (MAO) treatment produces a layer of alumina film on the surface of the aluminum alloy. A hard and uniform tetrahedral amorphous carbon film (diamond-like carbon, DLC) was deposited on the top of the alumina layer of the 2024 aluminum alloy by a pulsed filtered catholic vacuum arc (FCVA) deposition system with a metal vapor vacuum arc (MEVVA) source. The morphology and tribological properties of the duplex DLC/ Al 2 O 3 coating were investigated by a scanning electron microscope (SEM) and a ball-on-disk sliding tester. These results suggested that the duplex DLC/ A

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27

Dorraki, Naghme, Ralf Methling, and Sergey Gortschakow. "Optical Diagnostics of Anode Surface Temperature in Vacuum Interrupters with Different CuCr Compositions." PLASMA PHYSICS AND TECHNOLOGY 10, no. 1 (2023): 28–31. http://dx.doi.org/10.14311/ppt.2023.1.28.

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The requirements for contact material in vacuum interrupters are demanding because the arc medium is formed by electrode evaporation during the operation. Copper chromium alloy (CuCr) is widely used as contact material. Different compositions could result in a different rate of successful interruption. This work compares vacuum arc properties for two CuCr compositions - 75/25 and 50/50 weight percent. The contact surface temperature is measured during and after the vacuum arc with an AC current flow at 2kA magnitude. Quantitative characterization of the contact surface temperature was obtained

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28

BUJAK, Jan, and Zbigniew SŁOMKA. "CHARACTERIZATION OF MULTICOMPONENT, TRIBOLOGICAL AlCrTiN COATINGS, PRODUCED BY THE FILTERED CATHODIC VACUUM ARC METHOD." Tribologia 276, no. 6 (2017): 5–11. http://dx.doi.org/10.5604/01.3001.0010.8052.

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In this paper, the AlCrTiN coatings deposited by the cathodic arc method using a plasma filtration system have been studied to determine the effect of the use of this technology on the structural, mechanical, and tribological properties of these coatings. The results of the studies have revealed that using a plasma filtering system in the cathodic arc evaporation process has a significant influence on smoothness, hardness, Young's modulus, and plasticity of the coatings. Compared to the AlTiCrN coatings that have been deposited by the standard arc cathodic process, the coatings produced by fil

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29

Shi, X., B. K. Tay, and S. P. Lau. "THE DOUBLE BEND FILTERED CATHODIC ARC TECHNOLOGY AND ITS APPLICATIONS." International Journal of Modern Physics B 14, no. 02n03 (2000): 136–53. http://dx.doi.org/10.1142/s0217979200000145.

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A new Filtered Cathodic Vacuum Arc coating system with a magnetic macroparticle filter design consisting of an off-plane double-bend (OPDB) filter is described. The transport of the vacuum arc plasma through this OPDB filter is investigated using Langmuir and deposition probes. Films of amorphous hard carbon have been deposited a 90° single bend and the OPDB filter and the macroparticle contents of the films are compared. The experimental results were found to be in good agreement with the simulations results based on an improved drift approximation model. The results demonstrate the OPDB filt

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30

Tay, B. K., X. Shi, H. S. Yang, E. J, L. K. Cheah, and H. S. Tan. "Study of tin films by filtered cathodic vacuum arc techniques." Surface Engineering 15, no. 1 (1999): 33–37. http://dx.doi.org/10.1179/026708499322911610.

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31

Panwar, Omvir Singh, Ajay Kumar Kesarwani, Sanjay Rangnath Dhakate, et al. "Few layer graphene synthesized by filtered cathodic vacuum arc technique." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 31, no. 4 (2013): 040602. http://dx.doi.org/10.1116/1.4813762.

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32

Martin, P. "Review of the filtered vacuum arc process and materials deposition." Thin Solid Films 394, no. 1-2 (2001): 1–14. http://dx.doi.org/10.1016/s0040-6090(01)01169-5.

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33

Elzwawi, Salim, Hyung Suk Kim, Robert Heinhold, et al. "Device quality ZnO grown using a Filtered Cathodic Vacuum Arc." Physica B: Condensed Matter 407, no. 15 (2012): 2903–6. http://dx.doi.org/10.1016/j.physb.2011.08.074.

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34

Zhang, Xu, Xiangying Wu, Zhongzhen Yi, Tonghe Zhang, and Huixing Zhang. "The TiN/AlN multilayers deposited by filtered vacuum arc deposition." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 206 (May 2003): 382–85. http://dx.doi.org/10.1016/s0168-583x(03)00767-5.

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35

Zhitomirsky, V. N., L. Kaplan, R. L. Boxman, and S. Goldsmith. "Ion current distribution in a filtered vacuum arc deposition system." Surface and Coatings Technology 76-77 (November 1995): 190–96. http://dx.doi.org/10.1016/0257-8972(95)02593-6.

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36

Bilek, M. M. M., and W. I. Milne. "Filtered cathodic vacuum arc (FCVA) deposition of thin film silicon." Thin Solid Films 290-291 (December 1996): 299–304. http://dx.doi.org/10.1016/s0040-6090(96)09180-8.

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37

Warr, George B., Richard N. Tarrant, Marcela M. M. Bilek, et al. "Tomographic interferometry of a filtered high-current vacuum arc plasma." Journal of Applied Physics 101, no. 7 (2007): 073302. http://dx.doi.org/10.1063/1.2714677.

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38

Ben-Shalom, A., L. Kaplan, R. L. Boxman, S. Goldsmith, and M. Nathan. "SnO2 transparent conductor films produced by filtered vacuum arc deposition." Thin Solid Films 236, no. 1-2 (1993): 20–26. http://dx.doi.org/10.1016/0040-6090(93)90635-3.

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39

Tse, K. Y., H. H. Hng, S. P. Lau, Y. G. Wang, and S. F. Yu. "ZnO thin films produced by filtered cathodic vacuum arc technique." Ceramics International 30, no. 7 (2004): 1669–74. http://dx.doi.org/10.1016/j.ceramint.2003.12.156.

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40

Mucsi, C. S., Rubens Nunes de Faria Jr., E. Galego, and J. L. Rossi. "Consolidation of Compacted Zircaloy Chips via Vacuum Arc Melting - Analysis of the Electric Arc." Materials Science Forum 498-499 (November 2005): 258–63. http://dx.doi.org/10.4028/www.scientific.net/msf.498-499.258.

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The main objective of this work is to present the preliminary results on the analysis of the signals arising from the electrical arc, during the vacuum arc remelting of Zircaloy electrodes, aiming the automation of the fusion process. Zircaloy electrodes were made from compacted chips resultant of the machining of Zircaloy rods. The melts were performed in a prototype (vacuum arc remelting) VAR furnace under low pressure of argon and the arc was fed by a constant DC power source. Both filtered and unfiltered signals were recorded by means of a data acquisition system. The fast Fourier transfor

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41

Vereschaka, A. A., A. S. Vereschaka, S. N. Grigoriev, and D. V. Sladkov. "Nano-Scale Multi-Layered Coatings for Cutting Tools Generated Using Assisted Filtered Cathodic-Vacuum-Arc Deposition (AFCVAD)." Applied Mechanics and Materials 325-326 (June 2013): 1454–59. http://dx.doi.org/10.4028/www.scientific.net/amm.325-326.1454.

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The subject of this study were nano-nanoscale multilayer coatings formed using the process of filtered cathodic vacuum arc deposition in assisting high-energy ions of chromium. We used a special emitter (implantor) to generate chromium ions with high energy. Such key parameters of coatings as composition, structure, a thickness, hardness, adhesion in relation to a substrate obtained at various energy of chrome ions have been studied. It is establish the positive change of key properties of coating deposited on carbide inserts WC/CrC/Co, WC / (Co-Re), TiC/TaC/Co at assisted impact of ions Cr at

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42

Zhao, Z. W., B. K. Tay, G. Q. Yu, and S. P. Lau. "Nanocrystalline Zirconium Oxide Thin Films Prepared by Filtered Cathodic Vacuum Arc." Journal of Metastable and Nanocrystalline Materials 23 (January 2005): 63–66. http://dx.doi.org/10.4028/www.scientific.net/jmnm.23.63.

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Zirconium oxide thin films were deposited at room temperature by using off-plane filtered cathodic vacuum arc (FCVA). Deposition rate, film structure, compositional analysis and optical properties are studied as a function of working pressure. Deposition rate as high as 53 nm/min could be achieved. As increasing working pressure, the film structure changes from Zr-O solid solution, to monoclinic structure with preferred orientation and finally to randomly oriented nanocrystalline structure. The averaged crystal size increases with working pressure and is less than 15 nm. The ratio of O/Zr incr

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43

Vasylyev, V. V., Strel'nitskij V.E., and V. B. Makarov. "DLC Coatings on Spherical Elements of HIP Endoprostheses." European Journal of Engineering and Formal Sciences 2, no. 3 (2018): 42. http://dx.doi.org/10.26417/ejef.v2i3.p42-47.

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Hard coatings are increasingly being used in medicine to protect metal endoprostheses The experimental process for the high-productive synthesis of high-quality diamond-like carbon (DLC) coatings with high hardness and a sufficiently high level of adhesion to the spherical shaped parts of the hip joint made from the stainless steel or cobalt-chrome alloy have been developed. DLC coating deposition was performed by vacuum-arc method from a high-productive source of the filtered vacuum-arc carbon plasma of rectilinear type with a "magnetic island". The high degree of thickness uniformity in the

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44

Vasylyev, V. V., V. E. Strel’nitskij, V. B. Makarov, M. A. Skoryk, and G. O. Lazarenko. "DLC Coatings on Spherical Elements of HIP Endoprostheses." European Journal of Engineering and Formal Sciences 2, no. 3 (2018): 41–47. http://dx.doi.org/10.2478/ejef-2018-0015.

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Abstract Hard coatings are increasingly being used in medicine to protect metal endoprostheses The experimental process for the high-productive synthesis of high-quality diamond-like carbon (DLC) coatings with high hardness and a sufficiently high level of adhesion to the spherical shaped parts of the hip joint made from the stainless steel or cobalt-chrome alloy have been developed. DLC coating deposition was performed by vacuum-arc method from a high-productive source of the filtered vacuum-arc carbon plasma of rectilinear type with a "magnetic island". The high degree of thickness uniformit

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45

Zhang, Xu, Xiang Ying Wu, Hui Xing Zhang, and Tong He Zhang. "Tetrahedral Amorphous Carbon Films Prepared by Filtered Catholic Vacuum Arc Deposition." Materials Science Forum 423-425 (May 2003): 585–90. http://dx.doi.org/10.4028/www.scientific.net/msf.423-425.585.

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46

Anders, Simone, André Anders, Ian G. Brown, Robert A. MacGill, and Michael R. Dickinson. "Vacuum arc ion source with filtered plasma for macroparticle‐free implantation." Review of Scientific Instruments 65, no. 4 (1994): 1319–21. http://dx.doi.org/10.1063/1.1144997.

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47

Çetinörgü, E., S. Goldsmith, V. N. Zhitomirsky, R. L. Boxman, and C. L. Bungay. "Optical characterization of filtered vacuum arc deposited zinc oxide thin films." Semiconductor Science and Technology 21, no. 9 (2006): 1303–10. http://dx.doi.org/10.1088/0268-1242/21/9/015.

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48

Zhang, H. S., and K. Komvopoulos. "Surface modification of magnetic recording media by filtered cathodic vacuum arc." Journal of Applied Physics 106, no. 9 (2009): 093504. http://dx.doi.org/10.1063/1.3245399.

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49

赵, 雅娟. "Biocompatibility of Nanocrystal Iron Film Prepared by Filtered Cathodic Vacuum Arc." Material Sciences 08, no. 05 (2018): 490–96. http://dx.doi.org/10.12677/ms.2018.85055.

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50

Cheng, Y. H., B. K. Tay, S. P. Lau, X. Shi, and H. C. Chua. "Deposition of (Ti, Al)N films by filtered cathodic vacuum arc." Thin Solid Films 379, no. 1-2 (2000): 76–82. http://dx.doi.org/10.1016/s0040-6090(00)01397-3.

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