Academic literature on the topic 'High-k Oxide'
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Journal articles on the topic "High-k Oxide"
Kim, In-Goo, Eun-Ji Oh, Yong-Soo Kim, Sok-Won Kim, In-Sung Park, and Won-Kyu Lee. "Thermal Conductivity Measurement of High-k Oxide Thin Films." Journal of the Korean Vacuum Society 19, no. 2 (March 30, 2010): 141–47. http://dx.doi.org/10.5757/jkvs.2010.19.2.141.
Full textGillen, R., and J. Robertson. "Electronic structure of lanthanide oxide high K gate oxides." Microelectronic Engineering 109 (September 2013): 72–74. http://dx.doi.org/10.1016/j.mee.2013.03.011.
Full textKim, Young Mo, Chulkwon Park, Taewoo Ha, Useong Kim, Namwook Kim, Juyeon Shin, Youjung Kim, Jaejun Yu, Jae Hoon Kim, and Kookrin Char. "High-k perovskite gate oxide BaHfO3." APL Materials 5, no. 1 (January 2017): 016104. http://dx.doi.org/10.1063/1.4974864.
Full textMaple, M. Brian. "High Tc Oxide Superconductors." MRS Bulletin 14, no. 1 (January 1989): 20–24. http://dx.doi.org/10.1557/s0883769400053859.
Full textChang, Edward Yi, Hai-Dang Trinh, Yueh-Chin Lin, Hiroshi Iwai, and Yen-Ku Lin. "Development of high k/III-V (InGaAs, InAs, InSb) structures for future low power, high speed device applications." MRS Proceedings 1538 (2013): 291–302. http://dx.doi.org/10.1557/opl.2013.585.
Full textLi, Flora M., Bernhard C. Bayer, Stephan Hofmann, James D. Dutson, Steve J. Wakeham, Mike J. Thwaites, William I. Milne, and Andrew J. Flewitt. "High-k (k=30) amorphous hafnium oxide films from high rate room temperature deposition." Applied Physics Letters 98, no. 25 (June 20, 2011): 252903. http://dx.doi.org/10.1063/1.3601487.
Full textZhao, C., T. Witters, B. Brijs, H. Bender, O. Richard, M. Caymax, T. Heeg, et al. "Ternary rare-earth metal oxide high-k layers on silicon oxide." Applied Physics Letters 86, no. 13 (March 28, 2005): 132903. http://dx.doi.org/10.1063/1.1886249.
Full textOsten, H. J., E. Bugiel, and A. Fissel. "Epitaxial praseodymium oxide: a new high-K dielectric." Solid-State Electronics 47, no. 12 (December 2003): 2161–65. http://dx.doi.org/10.1016/s0038-1101(03)00190-4.
Full textXiong, K., and J. Robertson. "Point defects in HfO2 high K gate oxide." Microelectronic Engineering 80 (June 2005): 408–11. http://dx.doi.org/10.1016/j.mee.2005.04.098.
Full textButterbaugh, Jeffery W., Steven L. Nelson, and Thomas J. Wagener. "Uniform Ultrathin Oxide Growth for High-k Preclean." Solid State Phenomena 103-104 (April 2005): 15–18. http://dx.doi.org/10.4028/www.scientific.net/ssp.103-104.15.
Full textDissertations / Theses on the topic "High-k Oxide"
Liu, Dameng. "High-K gate oxides for future complementary metal-oxide-semiconductor transistors." Thesis, University of Cambridge, 2009. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.611517.
Full textTewg, Jun-Yen. "Zirconium-doped tantalum oxide high-k gate dielectric films." Diss., Texas A&M University, 2004. http://hdl.handle.net/1969.1/1346.
Full textLi, Huanglong. "First principle modelling of high-K oxide on Ge." Thesis, University of Cambridge, 2014. https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.707988.
Full textLu, Jiang. "Hafnium-doped tantalum oxide high-k gate dielectric films for future CMOS technology." Texas A&M University, 2005. http://hdl.handle.net/1969.1/4714.
Full textLi, Wenmei. "CHARACTERIZATION OF HIGH-K GATE STACKS IN METAL-OXIDE-SEMICONDUCTOR CAPACITORS." NCSU, 2001. http://www.lib.ncsu.edu/theses/available/etd-20010202-100109.
Full textThe purpose of this research has been to use off-line characterization techniques to establish material-specific properties of gate-stack constituents (i.e., high-k dielectric stacks and electrodes) and complete gate-stack structures. Hence, the characterization methodologies were established to evaluate high-k dielectrics at various processing levels, which, in part, determine the final characteristics of an advanced gate-stack device. Material systems that were investigated include: Al-O, Hf-Si-O, Zr-Si-O, Ti-O, Ta-O and Sr-Ti-O. Various physical and electrical characterization techniques were used to establish fundamental understandings of the materials selected, thin-film growth/deposition processes, and gate-stack structures. General conclusions for stable and unstable gate-dielectric materials have been establishedregarding the presence of a problematic interfacial layer at the Si/dielectric interface, graded dielectric layers, and the stability of gate electrodes on high-k dielectrics.The nanometer-scale chemistry of a gate-stack capacitor whose expected structure is Si/SiOxNy/Ta2O5/TiN/Al was studied by high-resolution electron-energy-loss spectroscopy in a scanning transmission electron microscope. Elemental profiles with near-atomic-level resolution for Si, Ti, N, Al, and O demonstrate that the device structure deviates drastically from the expectation and is chemically complex.It is concluded that the graded distribution of certain elements across the gate-stack capacitor completely precludes a band-structure model that assumes abrupt interfaces and chemically discrete layers. This study impacted on subsequent interpretations of flatband voltage extractions and electrical degradation following backside metallization/postmetallization annealing for capacitors whose dielectric-stack was based on Ta-O.Detailed and extensive electrical characterizations of Pt/SiOx/Sr-Ti-O/Si MOS capacitors were carried out to investigate reliability issues in a bi-layer gate dielectric. Based on these studies, models are proposed to describe the carrier transport and dielectric degradation for a Sr-Ti-O capacitor. It is concluded that conduction is dominated by Frenkel-Poole emission from mid-gap trap levels. The trap barrier height is estimated to be 1.51eV. A model based on the atomic and electronic structure of oxygen vacancies can account for the reported leakage-current characteristics. In addition, it is tentatively proposed that anode-hole injection and hole trapping control the dielectric degradation under gate injection.
Gomeniuk, Yu Y., A. N. Nazarov, S. Monaghan, K. Cherkaoui, E. O’Connor, I. Povey, V. Djara, and P. K. Hurley. "Electrical Properties of High-k Oxide in Pd/Al2O3/InGaAs Stack." Thesis, Sumy State University, 2012. http://essuir.sumdu.edu.ua/handle/123456789/35048.
Full textMarshall, Paul Andrew. "Liquid injection MOCVD of hafnium oxide, silicate and aluminate high-k dielectrics." Thesis, University of Liverpool, 2005. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.422113.
Full textGao, Yong. "Deposition, stabilization and characterization of zirconium oxide and hafnium oxide thin films for high k gate dielectrics." Diss., The University of Arizona, 2004. http://hdl.handle.net/10150/290136.
Full textTse, Koon-Yiu. "High-K gate oxides and metal gate materials for future complementary metal-oxide-semiconductor field-effect transistors." Thesis, University of Cambridge, 2008. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.611979.
Full textJeon, Yongjoo. "High-k gate dielectric for 100 nm MOSFET application /." Full text (PDF) from UMI/Dissertation Abstracts International, 2000. http://wwwlib.umi.com/cr/utexas/fullcit?p3004296.
Full textBooks on the topic "High-k Oxide"
He, Gang, and Zhaoqi Sun. High-K Gate Dielectrics for CMOS Technology. Wiley & Sons, Incorporated, John, 2012.
Find full textHe, Gang, and Zhaoqi Sun. High-K Gate Dielectrics for CMOS Technology. Wiley & Sons, Incorporated, John, 2012.
Find full textHe, Gang, and Zhaoqi Sun. High-K Gate Dielectrics for CMOS Technology. Wiley & Sons, Incorporated, John, 2012.
Find full textHoussa, Michael. High k Gate Dielectrics (Materials Science and Engineering). Taylor & Francis, 2003.
Find full textMaity, Niladri Pratap, Reshmi Maity, and Srimanta Baishya. High-K Gate Dielectric Materials: Applications with Advanced Metal Oxide Semiconductor Field Effect Transistors. Apple Academic Press, Incorporated, 2020.
Find full textMaity, Niladri Pratap, Reshmi Maity, and Srimanta Baishya. High-K Gate Dielectric Materials: Applications with Advanced Metal Oxide Semiconductor Field Effect Transistors. Apple Academic Press, Incorporated, 2020.
Find full textMaity, Niladri Pratap, Reshmi Maity, and Srimanta Baishya. High-K Gate Dielectric Materials: Applications with Advanced Metal Oxide Semiconductor Field Effect Transistors. Apple Academic Press, Incorporated, 2020.
Find full textMaity, Niladri Pratap, Reshmi Maity, and Srimanta Baishya. High-K Gate Dielectric Materials: Applications with Advanced Metal Oxide Semiconductor Field Effect Transistors. Apple Academic Press, Incorporated, 2020.
Find full textBianconi, Antonio, Annette Bussmann-Holder, and Hugo Keller. High-Tc Copper Oxide Superconductors and Related Novel Materials: Dedicated to Prof. K. A. Müller on the Occasion of his 90th Birthday. Springer, 2018.
Find full textBook chapters on the topic "High-k Oxide"
Bersuker, Gennadi, Keith McKenna, and Alexander Shluger. "Silica and High-k Dielectric Thin Films in Microelectronics." In Oxide Ultrathin Films, 101–18. Weinheim, Germany: Wiley-VCH Verlag GmbH & Co. KGaA, 2012. http://dx.doi.org/10.1002/9783527640171.ch5.
Full textButterbaugh, Jeffery W., Steven L. Nelson, and Thomas J. Wagener. "Uniform Ultrathin Oxide Growth for High-k Preclean." In Solid State Phenomena, 15–18. Stafa: Trans Tech Publications Ltd., 2005. http://dx.doi.org/10.4028/3-908451-06-x.15.
Full textZhao, Yi. "Hygroscopic Tolerance and Permittivity Enhancement of Lanthanum Oxide (La2O3) for High-k Gate Insulators." In High-k Gate Dielectrics for CMOS Technology, 185–223. Weinheim, Germany: Wiley-VCH Verlag GmbH & Co. KGaA, 2012. http://dx.doi.org/10.1002/9783527646340.ch6.
Full textHENDERSON, T. M., J. C. GREER, G. BERSUKER, A. KORKIN, and R. J. BARTLETT. "EFFECT OF CHEMICAL ENVIRONMENT AND STRAIN ON OXYGEN VACANCY FORMATION ENERGIES AT SILICONSILICON OXIDE INTERFACES." In Defects in High-k Gate Dielectric Stacks, 373–83. Dordrecht: Springer Netherlands, 2006. http://dx.doi.org/10.1007/1-4020-4367-8_30.
Full textYang, Seung Dong, Kwang Seok Jeong, Ho Jin Yun, Yu Mi Kim, Sang Youl Lee, Sung Kyu Kwon, Jae sub Oh, Hi Deok Lee, and Ga Won Lee. "RTS Noise Analysis in Fin-type Silicon-Oxide-High-k-Oxide-Silicon Flash Memory." In Supplemental Proceedings, 81–86. Hoboken, NJ, USA: John Wiley & Sons, Inc., 2012. http://dx.doi.org/10.1002/9781118357002.ch11.
Full textVerma, Shekhar, and Suman Lata Tripathi. "Impact of temperature on 14 nm FINFET with high-K different oxide material." In Intelligent Circuits and Systems, 181–86. London: CRC Press, 2021. http://dx.doi.org/10.1201/9781003129103-30.
Full textYe, Peide D., Yi Xuan, Yanqing Wu, and Min Xu. "Atomic-Layer Deposited High-k/III-V Metal-Oxide-Semiconductor Devices and Correlated Empirical Model." In Fundamentals of III-V Semiconductor MOSFETs, 173–94. Boston, MA: Springer US, 2010. http://dx.doi.org/10.1007/978-1-4419-1547-4_7.
Full textFissel, Andreas, M. Czernohorsky, R. Dagris, and H. J. Osten. "Growth and Properties of Gadolinium Oxide Dielectric Layers on Silicon Carbide for High-K Application." In Materials Science Forum, 655–58. Stafa: Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/0-87849-442-1.655.
Full textMech, Bhubon Chandra, and Jitendra Kumar. "Study of Effect of High-k Dielectric Gate Oxide on the Performance of SB-GNRFETs." In Lecture Notes in Electrical Engineering, 415–20. Singapore: Springer Singapore, 2017. http://dx.doi.org/10.1007/978-981-10-4765-7_44.
Full textSano, Kenichi, Akira Izumi, Atsuro Eitoku, James Snow, L. Nyns, S. Kubicek, R. Singanamalla, et al. "Single-Wafer Wet Chemical Oxide Formation for Pre-ALD High-k Deposition on 300 mm Wafer." In Solid State Phenomena, 53–56. Stafa: Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/3-908451-46-9.53.
Full textConference papers on the topic "High-k Oxide"
Koide, Yasuo. "High-k Oxides on Hydrogenated-Diamond for Metal-Oxide-Semiconductor Field-Effect Transistors [Invited]." In 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS). IEEE, 2019. http://dx.doi.org/10.1109/icmts.2019.8730974.
Full textRaeissi, B., J. Piscator, O. Engstrom, S. Hall, O. Buiu, M. C. Lemme, H. D. B. Gottlob, P. K. Hurley, K. Cherkaoui, and H. J. Osten. "High-k-oxide/silicon interfaces characterized by capacitance frequency spectroscopy." In ESSDERC 2007 - 37th European Solid State Device Research Conference. IEEE, 2007. http://dx.doi.org/10.1109/essderc.2007.4430933.
Full textFreire, Jose A. d. K., Teldo A. S. Pereira, Jusciane Costa e Silva, Gil A. Farias, Valder N. Freire, and Eronides F. da Silva, Jr. "Si- and SiGe- high-k oxide nanostructures for optoelectronic devices." In Integrated Optoelectronic Devices 2005, edited by Manijeh Razeghi and Gail J. Brown. SPIE, 2005. http://dx.doi.org/10.1117/12.582773.
Full textSchmidt, M., C. P. Lu, H. D. B. Gottlob, and H. Kurz. "Metal gate electrodes for rare earth oxide high-k dielectrics." In 2009 3rd International Conference on Signals, Circuits and Systems (SCS 2009). IEEE, 2009. http://dx.doi.org/10.1109/icscs.2009.5412230.
Full textRao, Ashutosh, and Gautam Mukhopadhyay. "Gate leakage in hafnium oxide high-k metal gate nMOSFETs." In 2013 International Conference on Advances in Electrical Engineering (ICAEE). IEEE, 2013. http://dx.doi.org/10.1109/icaee.2013.6750369.
Full textGottlob, H. D. B., T. Echtermeyer, T. Mollenhauer, M. Schmidt, J. Efavi, T. Wahlbrink, M. C. Lemme, et al. "Approaches to CMOS integration of epitaxial gadolinium oxide high-K dielectrics." In 2006 European Solid-State Device Research Conference. IEEE, 2006. http://dx.doi.org/10.1109/essder.2006.307660.
Full textMinhaj, Emdadul Huq, Muhammad Abdur Razzak, Md Majharul Islam, and Md Mohsinur Rahman Adnan. "Performance Enhancement of Multigate FinFETs by Using High-k Stack Oxide." In 2019 1st International Conference on Advances in Science, Engineering and Robotics Technology (ICASERT). IEEE, 2019. http://dx.doi.org/10.1109/icasert.2019.8934656.
Full textChism, William W. "Optical Metrology for Ultra-thin Oxide and High-K Gate Dielectrics." In CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology. AIP, 2003. http://dx.doi.org/10.1063/1.1622458.
Full textMorris, Stephen J. "Multi-Technology Measurements of Nitrided Oxide and High-K Gate Stacks." In CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005. AIP, 2005. http://dx.doi.org/10.1063/1.2062949.
Full textAbermann, S., C. Henkel, O. Bethge, and E. Bertagnolli. "Electrical characteristics of atomic layer deposited aluminium oxide and lanthanum-zirconium oxide high-k Dielectric stacks." In 2009 10th International Conference on Ultimate Integration on Silicon (ULIS. IEEE, 2009. http://dx.doi.org/10.1109/ulis.2009.4897573.
Full textReports on the topic "High-k Oxide"
Edgar, James H. High K Oxide Insulated Gate Group III Nitride-Based FETs. Fort Belvoir, VA: Defense Technical Information Center, March 2014. http://dx.doi.org/10.21236/ada622706.
Full textMiranda, Andre. Understanding the Structure of High-K Gate Oxides - Oral Presentation. Office of Scientific and Technical Information (OSTI), August 2015. http://dx.doi.org/10.2172/1213181.
Full textJackson, G. D. Bedrock geology, northwest part of Nuluujaak Mountain, Baffin Island, Nunavut, part of NTS 37-G/5. Natural Resources Canada/CMSS/Information Management, 2021. http://dx.doi.org/10.4095/314670.
Full textLitaor, Iggy, James Ippolito, Iris Zohar, and Michael Massey. Phosphorus capture recycling and utilization for sustainable agriculture using Al/organic composite water treatment residuals. United States Department of Agriculture, January 2015. http://dx.doi.org/10.32747/2015.7600037.bard.
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