Relevant bibliographies by topics / High pressure microfluidics

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  1. Journal articles
  2. Dissertations / Theses
  3. Book chapters
  4. Conference papers

Academic literature on the topic 'High pressure microfluidics'

Author: Grafiati
Published: 4 June 2021
Last updated: 1 February 2022

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Journal articles on the topic "High pressure microfluidics"

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Ogden, Sam, Roger Bodén, and Klas Hjort. "A Latchable Valve for High-Pressure Microfluidics." Journal of Microelectromechanical Systems 19, no. 2 (April 2010): 396–401. http://dx.doi.org/10.1109/jmems.2010.2041749.

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Chen, C. F., J. Liu, L. P. Hromada, C. W. Tsao, C. C. Chang, and D. L. DeVoe. "High-pressure needle interface for thermoplastic microfluidics." Lab Chip 9, no. 1 (2009): 50–55. http://dx.doi.org/10.1039/b812812j.

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Bodén, Roger, Klas Hjort, Jan-Åke Schweitz, and Urban Simu. "A metallic micropump for high-pressure microfluidics." Journal of Micromechanics and Microengineering 18, no. 11 (September 26, 2008): 115009. http://dx.doi.org/10.1088/0960-1317/18/11/115009.

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Andersson, Martin, Klas Hjort, and Lena Klintberg. "Fracture strength of glass chips for high-pressure microfluidics." Journal of Micromechanics and Microengineering 26, no. 9 (July 8, 2016): 095009. http://dx.doi.org/10.1088/0960-1317/26/9/095009.

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Serra, M., I. Pereiro, A. Yamada, J. L. Viovy, S. Descroix, and D. Ferraro. "A simple and low-cost chip bonding solution for high pressure, high temperature and biological applications." Lab on a Chip 17, no. 4 (2017): 629–34. http://dx.doi.org/10.1039/c6lc01319h.

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Lee, Kevin S., and Rajeev J. Ram. "Plastic–PDMS bonding for high pressure hydrolytically stable active microfluidics." Lab on a Chip 9, no. 11 (2009): 1618. http://dx.doi.org/10.1039/b820924c.

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Yao, Junyi, Fan Lin, Hyun Kim, and Jaewon Park. "The Effect of Oil Viscosity on Droplet Generation Rate and Droplet Size in a T-Junction Microfluidic Droplet Generator." Micromachines 10, no. 12 (November 23, 2019): 808. http://dx.doi.org/10.3390/mi10120808.

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There have been growing interests in droplet-based microfluidics due to its capability to outperform conventional biological assays by providing various advantages, such as precise handling of liquid/cell samples, fast reaction time, and extremely high-throughput analysis/screening. The droplet-based microfluidics utilizes the interaction between the interfacial tension and the fluidic shear force to break continuous fluids into uniform-sized segments within a microchannel. In this paper, the effect of different viscosities of carrier oil on water-in-oil emulsion, particularly how droplet size and droplet generation rate are affected, has been investigated using a commonly used T-junction microfluidic droplet generator design connected to a pressure-controlled pump. We have tested mineral oils with four different viscosities (5, 7, 10, and 15 cSt) to compare the droplet generation under five different flow pressure conditions (i.e., water flow pressure of 30–150 mbar and oil flow pressure of 40–200 mbar). The results showed that regardless of the flow pressure levels, the droplet size decreased as the oil viscosity increased. Average size of the droplets decreased by approximately 32% when the viscosity of the oil changed from 5 to 15 cSt at the flow pressure of 30 mbar for water and 40 mbar for oil. Interestingly, a similar trend was observed in the droplet generation rate. Droplet generation rate and the oil viscosity showed high linear correlation (R2 = 0.9979) at the water flow pressure 30 mbar and oil flow pressure 40 mbar.
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Gerhardt, Renata F., Andrea J. Peretzki, Sebastian K. Piendl, and Detlev Belder. "Seamless Combination of High-Pressure Chip-HPLC and Droplet Microfluidics on an Integrated Microfluidic Glass Chip." Analytical Chemistry 89, no. 23 (November 15, 2017): 13030–37. http://dx.doi.org/10.1021/acs.analchem.7b04331.

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Huang, Chien-Chih, Martin Z. Bazant, and Todd Thorsen. "Ultrafast high-pressure AC electro-osmotic pumps for portable biomedical microfluidics." Lab Chip 10, no. 1 (2010): 80–85. http://dx.doi.org/10.1039/b915979g.

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Chen, Weiqi, Bruno Pinho, and Ryan L. Hartman. "Flash crystallization kinetics of methane (sI) hydrate in a thermoelectrically-cooled microreactor." Lab on a Chip 17, no. 18 (2017): 3051–60. http://dx.doi.org/10.1039/c7lc00645d.

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Dissertations / Theses on the topic "High pressure microfluidics"

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Ogden, Sam. "High-Pressure Microfluidics." Doctoral thesis, Uppsala universitet, Mikrosystemteknik, 2013. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-208915.

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In this thesis, some fundamentals and possible applications of high-pressure microfluidics have been explored. Furthermore, handling fluids at high pressures has been addressed, specifically by creating and characterizing strong microvalves and pumps. A variety of microstructuring techniques was used to realize these microfluidic devices, e.g., etching, lithography, and bonding. To be able to handle high pressures, the valves and pumps need to be strong. This necessitates a strong actuator material. In this thesis, the material of choice is paraffin wax. A new way of latching paraffin-actuated microvalves into either closed or open position has been developed, using the low thermal conductivity of paraffin to create large thermal gradients within a microactuator. This allows for long open and closed times without power consumption. In addition, three types of paraffin-actuated pumps are presented: A peristaltic high-pressure pump with integrated temperature control, a microdispensing pump with high repeatability, and a pump system with two pumps working with an offset to reduce flow irregularities. Furthermore, the fundamental behavior of paraffin as a microactuator material has been explored by finite element modeling. One possibility that arises with high-pressure microfluidics, is the utilization of supercritical fluids for different applications. The unique combination of material properties found in supercritical fluids yields them interesting applications in, e.g., extraction and cleaning. In an attempt to understand the microfluidic behavior of supercritical carbon dioxide, the two-phase flow, with liquid water as the second phase, in a microchannel has been studied and mapped with respect to both flow regime and droplet behavior at a bi-furcating outlet.
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Wilson, Anton. "Mixing ratio determination of binary solvent mixtures in high-pressure microfluidics." Thesis, Uppsala universitet, Mikrosystemteknik, 2017. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-324869.

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The focus of this project is to find a suitable method to determine the mixing ratio inbinary fluid mixtures in continuous-flow microfluidic systems because of thedifficulties in doing so for mixtures containing compressible fluids. Refractive indexand relative static permittivity are both properties that could be suitable, but methodsmeasuring the refractive index scales badly for microsystems. A microfluidic chip for measuring capacitance was placed on a PCB together with amixing structure with strain-relieved fluid and electrical interfaces. This PCB was builtinto a rig with two piston pumps and a backpressure regulator to makemeasurements of the relative static permittivity of air, ethanol, methanol, acetonitrile,liquid and gaseous carbon dioxide, as well as of several mixtures of ethanol andcarbon dioxide using a Network Analyzer. Several other measuring techniques were tried, but the Network Analyzer wassuperior in accuracy, stability and frequency range. It produced values within 4% ofthe theoretical, and the discrepancy could be explained by the approximations in theparallel plate capacitor formula, the capacitance contributions of the external parts ofthe system and surface roughness. The Network Analyzer is a good tool to determinethe mixing ratio in binary fluid mixtures in continuous-flow microfluidic systems.
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Södergren, Simon. "Electrochemical microsensor with in-situ fabricated Ag/AgCl reference electrode for high-pressure microfluidics." Thesis, Uppsala universitet, Mikrosystemteknik, 2017. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-330913.

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Electroanalysis offers cheap and selective analysis of interesting solutions. However, one of the most common drawbacks is the accessibility for electrochemical sensing. By using high-pressure microfluidics with an integrated three-electrode system, new possibilities open for increased accessibility. Therefore, there is a need to fabricate sustainable reference surfaces into highly pressure tolerant microchannels. In this thesis, Ag/AgCl reference surfaces were in-situ fabricated in high-pressure microfluidic chips. This was performed by electroplating Ag on thin film Pt in microchannels and then chlorinating the silver into Ag/AgCl. Electroanalysis of ferrocyanide was carried out in a microfluidic chip using one of the in-situ fabricated Ag/AgCl references. The half-wave potential showed to be around +251 mV and the electrochemical water window was measured to 1400 mV with a range between -300 mV and +1100 mV. The obtained values show to be comparable to reference data of similar experiments performed elsewhere. For some applications of electrochemistry, a catalysis surface is beneficial. Nanoporous Pt black has proved to generate high catalytic performance in electrochemistry. Therefore, attempts have been carried out to fabricate Pt black onto Pt thin films, with the vision to succeed with such fabrication within microfluidic channels. To summarize, this project work has showed a possibility to in-situ fabricate Ag/AgCl reference surfaces. The project has also showed how to use such surfaces as reference electrodes for electroanalysis in high-pressure microfluidic chips. Lastly, new challenges and ideas to fabricate catalysis surfaces on thin film electrodes in flow channels have been presented. By this thesis, one more step has been taken to increase the accessibility for electroanalysis.
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Knaust, Stefan. "Microsystems for Harsh Environments." Doctoral thesis, Uppsala universitet, Mikrosystemteknik, 2015. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-253558.

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When operating microsystems in harsh environments, many conventionally used techniques are limiting. Further, depending on if the demands arise from the environment or the conditions inside the system, different approaches have to be used. This thesis deals with the challenges encountered when microsystems are used at high pressures and high temperatures. For microsystems operating at harsh conditions, many parameters will vary extensively with both temperature and pressure, and to maintain control, these variations needs to be well understood. Covered within this thesis is the to-date strongest membrane micropump, demonstrated to pump against back-pressures up to 13 MPa, and a gas-tight high pressure valve that manages pressures beyond 20 MPa. With the ability to manipulate fluids at high pressures in microsystems at elevated temperatures, opportunities are created to use green solvents like supercritical fluids like CO2. To allow for a reliable and predictable operation in systems using more than one fluid, the behavior of the multiphase flow needs to be controlled. Therefore, the effect of varying temperature and pressure, as well as flow conditions were investigated for multiphase flows of CO2 and H2O around and above the critical point of CO2. Also, the influence of channel surface and geometry was investigated. Although supercritical CO2 only requires moderate temperatures, other supercritical fluids or reactions require much higher temperatures. The study how increasing temperature affects a system, a high-temperature testbed inside an electron microscope was created. One of the challenges for high-temperature systems is the interface towards room temperature components. To circumvent the need of wires, high temperature wireless systems were studied together with a wireless pressure sensing system operating at temperatures up to 1,000 °C for pressures up to 0.3 MPa. To further extend the capabilities of microsystems and combine high temperatures and high pressures, it is necessary to consider that the requirements differs fundamentally. Therefore, combining high pressures and high temperatures in microsystems results in great challenges, which requires trade-offs and compromises. Here, steel and HTCC based microsystems may prove interesting alternatives for future high performance microsystems.
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Stocklassa, Jesper. "Design, manufacturing and evaluationof high pressure microfluidic chips with integrated corona discharge electrodes." Thesis, Uppsala universitet, Mikrosystemteknik, 2016. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-303305.

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In this thesis possibilities of generating corona discharges in supercritical carbon dioxide inside a micro fabricated glass chip are investigated. Managing to do so would enable high throughput research of new chemical reaction fields and analytical spectrometry in the supercritical phase with low equipment costs compared to available technology used today. The aims of the thesis were to design, manufacture and test a chip of this kind that can withstand pressures of 125 bar and be used to study corona discharges by investigating how pressure, electrode geometry and interelectrode distance can affect operating voltages and if light emission from corona discharges could be captured from outside the chip. Chips were successfully manufactured using standard cleanroom techniques like lithography, wet etching, sputter deposition and fusion bonding. Testing showed that one electrode design was superior to the others in terms of operation stability, corona current and light emission and that interelectrode distance of 2 um and 3 um seem preferable compared to larger distances. Electrode erosion during operation proved to be a big problem for electrode lifetime and measurement repeatability and must therefore be improved for further development.
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Macedo, Portela da Silva Nayane. "Développement d’un système micro/millifluidique sous pression pour l’étude et la mesure de propriétés d’écoulement diphasique : application au binaire CO2 supercritique - BMimPF6." Thesis, Ecole nationale des Mines d'Albi-Carmaux, 2014. http://www.theses.fr/2014EMAC0003/document.

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Ce travail est dédié à l'étude d'écoulement diphasique sous pression en micro et milli-capillaires pour permettre la mesure efficace de propriétés de mélanges sous pression. Dans un premier temps, un montage expérimental comprenant un micro-dispositif pour des applications allant jusqu'à des pressions de 25 MPa a été développé. Ce micro-dispositif à faible coût et transparent, permet la visualisation de l'écoulement grâce à une caméra rapide. Dans un second temps, l'étude du système diphasique du système CO2 supercritique / liquide ionique (1-Butyl-3-Methyl-Imidazolium hexafluorophosphate, [BMIm][PF6]) sous pression est présentée. L'écoulement est réalisé dans des tubes cylindriques de silice de diamètre intérieur de 536 micromètres. Parmi les différents régimes d'écoulements diphasiques, nous nous sommes intéressés aux écoulements périodiques intermittents ou « Taylor flow ». La zone de conditions opératoires couvertes est la suivante : [308 K - 318 K] x [9 MPa - 18 MPa]. Les films de la caméra rapide sont traités par analyse d'image. Le logiciel« μcap2phase » développé pour traiter les films permet d'accéder aux caractéristiques géométriques de l'écoulement (volume et aire de chaque phase, longueur du motif, longueur de la phase dispersée et vitesse de la phase dispersée). Un comportement atypique est observé avec ce binaire. En effet le transfert unidirectionel du CO2SC dans le [BMIm][PF6] induit des changements importants des propriétés physico-chimiques de la phase continue : abaissement de la viscosité (divisée par 10) et augmentation de la masse volumique (multiplié par 1,5). Ces changements impliquent une modification de la forme et de la taille des bulles au cours de l'écoulement. Une importante vitesse de glissement a été identifiée. Elle est générée par la présence d'un film épais de viscosité plus élevée au niveau des parois du capillaire. Un modèle de transfert de matière prenant en compte certaines des observations expérimentales (variations de la taille du film, de la taille des bulles, et des propriétés de la phase continue tout au long du capillaire) a été développé. Ce modèle intégrera dans le futur la tension interfaciale bulle/phase continue et le facteur de forme de la bulle
The present work deals with the study of two-phase flow in micro-capillaries under high-pressure to enhance properties measurements. As a first step, an experimental setup consisting of a micro-device has been developed for microfluidics high-pressure applications (P < 25 MPa). The set-up combines good optical access, high-pressure resistance, homogeneous operating conditions, fast process control and detection, and the ability to generate a stable two-phase flow. In the following step, we focused our work on the hydrodynamics features of two-phase flow between supercritical carbon dioxide(SC-CO2) and ionic liquid (1-butyl-3-methyl-imidazolium hexafuorophosphate) ([BMIm][PF6]) .The two-phase flow system is observed with a high-speed camera. The flow is conducted in silica capillary tubing with inner diameter of 536 micrometers. Among the two-phase flow patterns, ours relates to Taylor flow. The range of operating conditions are : [308 K - 318 K] x [9 MPa - 18 MPa]. An image analysis home-made soft, « μcap2phase », has been developed in order to access to the geometric properties and to the velocities of the dispersed phase from images. The two-phase flow presents an unexpected behaviour. In fact, the unidirectional transfer of SC-CO2 in [BMIm][PF6] induces significant changes in physico-chemical properties of continous phase : viscosity decreases(divided by ten) and density increases (1.5 fold). Due to the wide variations of the continuous phase properties along the capillary, size and shape of the dispersed phase bubbles are simultaneously modified. A significant slip velocity has been indentified located between a thick liquid film (at the wall of capillary) and a Taylor flow region (at the center). A mass transfer taking into account some experimental observations (changes in film thickness, in bubble size, and in properties of the continuous phase throughout the capillary) is developed. Further, this model will integrate the interfacial tension between bubbles and continous phase
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Book chapters on the topic "High pressure microfluidics"

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P. Fuentes, Olga, Mabel J. Noguera, Paula A. Peñaranda, Sergio L. Flores, Juan C. Cruz, and Johann F. Osma. "Micromixers for Wastewater Treatment and Their Life Cycle Assessment (LCA)." In Advances in Microfluidics and Nanofluids. IntechOpen, 2021. http://dx.doi.org/10.5772/intechopen.96822.

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The use of micromixers and catalytically active nanocomposites can be an attractive alternative for the treatment of wastewaters from the textile industry, due to their high activity, low consumption of such nanocomposites, short reaction times and the possibility to work under continuous operation. In this study, 6 different designs of micromixers were modeled and evaluated for the treatment of wastewaters. Velocity profiles, pressure drops, and flows were analyzed and compared for the different devices under the same mixing conditions. In addition, Life cycle assessment (LCA) methodology was applied to determine their performance in terms of environmental impact. Considering the high environmental impact of water sources contaminated by dyes from the textile industry, it becomes critically important to determine when the proposed micromixers are a suitable alternative for their remediation. The LCA and operational efficiency studies results shown here provide a route for the design of novel wastewater treatment systems by coupling low-cost and high-performance micromixers.
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Conference papers on the topic "High pressure microfluidics"

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Hjort, K. "High-pressure microfluidics." In SPIE BiOS, edited by Bonnie L. Gray and Holger Becker. SPIE, 2015. http://dx.doi.org/10.1117/12.2085123.

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Nelson, W. C., M. Yen, P. Y. Keng, R. M. van Dam, and C. J. Kim. "High pressure EWOD digital microfluidics." In TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, 2011. http://dx.doi.org/10.1109/transducers.2011.5969430.

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Chen, Chien-Fu, Jikun Liu, Chien-Cheng Chang, and Don L. DeVoe. "High Pressure On-Chip Valves for Thermoplastic Microfluidics." In ASME 2009 International Mechanical Engineering Congress and Exposition. ASMEDC, 2009. http://dx.doi.org/10.1115/imece2009-11760.

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A high-pressure microvalve technology based on the integration of discrete elastomeric elements into rigid thermoplastic chips is described. The low-dead-volume valves employ deformable polydimethylsiloxane (PDMS) plugs actuated using a threaded stainless steel needle, allowing exceptionally high pressure resistance to be achieved. The simple fabrication process is made possible through the use of poly(ethylene glycol) (PEG) as a removable blocking material to avoid contamination of PDMS within the flow channel while yielding a smooth contact surface with the PDMS valve surface. Burst pressure tests reveal that the valves can withstand over 24MPa without leakage.
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Sparks, D., D. Goetzinger, D. Riley, and N. Najafi. "A By-Pass Sensor Package Design Enabling the Use of Microfluidics in High Flow Rate Applications." In ASME 2006 International Mechanical Engineering Congress and Exposition. ASMEDC, 2006. http://dx.doi.org/10.1115/imece2006-13104.

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The package design for microfluidic sensors is discussed. The MicroElectroMechanical Systems (MEMS) device covered in this paper requires a fluidic and electrical interface as well as vacuum packaging of the sensing element. By using a by-pass package design the limitations of low flow rate and high pressure drop often encountered with microfluidic products can be avoided. The MEMS device utilizes a resonating silicon microtube that is electrostatically driven and capacitively sensed. A platinum RTD is also integrated into the MEMS chip. To improve the Q of the resonator a thin-film getter has been integrated to lower the microcavity pressure. The microfluidic packaging technology lends itself to producing densitometers, chemical concentration meters and Coriolis mass flow sensors. The device has been applied to fuel cell concentration sensors for embedded Direct Methanol Fuel Cell (DMFC) systems. The DMFC systems require a methanol sensor to minimize crossover and hence optimize the water/methanol concentration over temperature and the life of the product. Other high flow rate applications include ethanol/gasoline concentration sensors for E85 vehicles and dialysis fluid monitoring. A microfluidic Coriolis mass flow sensor has been developed and applied to drug delivery to monitor the drug dose, total volume infused, drug type and concentration. Chemical and temperature compatibility of the MEMS chip and packaging materials must be considered when dealing with this wide range of applications and will be discussed in the paper.
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Kielpinski, Mark, Danie´ll Malsch, Nils Gleichmann, Gu¨nter Mayer, and Thomas Henkel. "Application of Self-Control in Droplet-Based Microfluidics." In ASME 2008 6th International Conference on Nanochannels, Microchannels, and Minichannels. ASMEDC, 2008. http://dx.doi.org/10.1115/icnmm2008-62325.

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Droplet-based microfluidics provide a powerful platform for high-throughput operations applied in micro analytics, micro reaction technology and live sciences. Todays research interests focus on the development of highly integrated fluidic networks for sample processing according to a microchemical or microanalytical protocol. Normally, fluidic networks with integrated fluidic loops and bypasses are very complicated systems that require a huge effort for external control and integration of actor components. In contrast, in droplet-based microfluidics interface generated forces can be used to temporarily seal bypasses or to generate well defined pressure gradients at strictures. This potential can be used to implement self-control and self-synchronization at functional nodes in order to minimize the effort for external control and actors integration. Here we report on progress in development of functional nodes for self-synchronized 1:1 coalescence of two independently generated droplet sequences at a Y-shaped junction and on approaches for droplet aliquotation at a Y-shaped bifurcation. The droplet connector automatically balances the time delay between two droplets arriving at the junction. On this account, strictures are integrated into the Y-junction and an additional bypass connects the arriving channels. The first arriving droplet stops at the stricture until its fusion partner arrives. The droplet splitter performs an 1:1 aliqoutation of all elements of a droplet sequence. The main challenges are the balancing of pressure differences at the outlets and the correct aliquotation of droplets independent of their volume at a wide range of flow rates. The splitter design is based on the rule that forces required for splitting are always lower than the forces required for complete droplet inflow into only one of the outlet channels without splitting.
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Taher, Ahmed, Ben Jones, Peter Peumans, and Liesbet Lagae. "A Simplified Model for Species Transport in Very Large Scale Microfluidic Networks." In ASME 2018 16th International Conference on Nanochannels, Microchannels, and Minichannels. American Society of Mechanical Engineers, 2018. http://dx.doi.org/10.1115/icnmm2018-7663.

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A novel modeling technique for fluid flow and species transport in very large scale microfluidic networks is developed with applications to massively parallelized microreactors. Very large scale integration (VLSI) of microfluidic circuits presents an attractive solution for many biological testing applications such as gene expression, DNA sequencing and drug screening, which require massive parallelization of reactions to increase throughput and decrease time-to-result. However, the design and modeling of VLSI microfluidics remains challenging with conventional 2D or 3D computational fluid dynamic (CFD) techniques due to the large computational resources required. Using simplified models is crucial to reduce simulation time on existing computational resources. Many microfluidic networks can be solved using resistance based networks similar to electrical circuits; however, simplified models for species transport (diffusion plus advection) in microfluidic networks has received much less attention. Here, we introduce a simplified model based on resistance network based modeling for flow dynamics and couple it with a one-dimensional discretization of the advection-diffusion transport equation. The developed model was validated against CFD simulations using ANSYS Fluent for a flow network consisting of a 4 by 4 array of microreactors. It showed good agreement with 2D CFD simulations with less than 6% error in total pressure drop across the network for channels with a length to width ratio of 10. The error was only 3% for a channel length to width ratio of 20. The developed model was then used to optimize the design of a 100-microreactors network used for high purity cyclical loading of reagents. The reactor configuration with a minimum cycle time for reagent loading and unloading and minimum operating pressure were evaluated with the code. In theory, the simulation can be scaled to much larger reactor arrays after further optimizations of the code and utilizing parallel processing.
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Baloch, Shadi Khan, Alper Kiraz, Alexandr Jonáš, B. Erdem Alaca, and Can Erkey. "Measurement of composition of mixtures at high pressures with high sensitivity using frequency response of microcantilevers (Conference Presentation)." In Microfluidics, BioMEMS, and Medical Microsystems XVI, edited by Bonnie L. Gray and Holger Becker. SPIE, 2018. http://dx.doi.org/10.1117/12.2287850.

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Foster, John S., and Monteith G. Heaton. "The Customer-Foundry Relationship in MEMS Manufacturing." In ASME 2002 International Mechanical Engineering Congress and Exposition. ASMEDC, 2002. http://dx.doi.org/10.1115/imece2002-32747.

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MEMS industry has seen mixed success over the last decade or so. Today, there are only a limited number of MEMS products available on the market, notably airbag accelerometers, desktop inkjet print heads and pressure sensors for automotive and biomedical applications. Despite major infusion of funds in other applications, such as optical telecommunications, RF, and biomedical/microfluidics, these efforts have failed to produce working MEMS in high volumes. The net result is that MEMS have not yet lived up to their anticipated promise.
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Ogden, S., R. Boden, and K. Hjort. "A latchable paraffin actuated high-pressure microfluidic valve." In TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, 2009. http://dx.doi.org/10.1109/sensor.2009.5285573.

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Boden, R., U. Simu, J. Margell, M. Lehto, K. Hjort, G. Thornell, and J. A. Schweitz. "Metallic High-Pressure Microfluidic Pump with Active Valves." In TRANSDUCERS '07 & Eurosensors XXI. 2007 14th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, 2007. http://dx.doi.org/10.1109/sensor.2007.4300661.

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