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Journal articles on the topic 'High-throughput nanolithography'

Author: Grafiati

Published: 10 December 2022

Last updated: 31 July 2025

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1

Neumann, Hendrikje R., and Christine Selhuber-Unkel. "High-throughput micro-nanostructuring by microdroplet inkjet printing." Beilstein Journal of Nanotechnology 9 (September 4, 2018): 2372–80. http://dx.doi.org/10.3762/bjnano.9.222.

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The production of micrometer-sized structures comprised of nanoparticles in defined patterns and densities is highly important in many fields, ranging from nano-optics to biosensor technologies and biomaterials. A well-established method to fabricate quasi-hexagonal patterns of metal nanoparticles is block copolymer micelle nanolithography, which relies on the self-assembly of metal-loaded micelles on surfaces by a dip-coating or spin-coating process. Using this method, the spacing of the nanoparticles is controlled by the size of the micelles and by the coating conditions. Whereas block copol

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2

Berry, I. L. "Programmable aperture plate for maskless high-throughput nanolithography." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 15, no. 6 (1997): 2382. http://dx.doi.org/10.1116/1.589652.

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3

Hakala, Tommi K., Veikko Linko, Antti-Pekka Eskelinen, J. Jussi Toppari, Anton Kuzyk, and Päivi Törmä. "Field-Induced Nanolithography for High-Throughput Pattern Transfer." Small 5, no. 23 (2009): 2683–86. http://dx.doi.org/10.1002/smll.200901326.

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4

Schaper, Charles D. "Molecular transfer lithography for pseudomaskless, high-throughput, aligned nanolithography." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 21, no. 6 (2003): 2961. http://dx.doi.org/10.1116/1.1621660.

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5

Zhang, Hua, Nabil A Amro, Sandeep Disawal, Robert Elghanian, Roger Shile, and Joseph Fragala. "High-Throughput Dip-Pen-Nanolithography-Based Fabrication of Si Nanostructures." Small 3, no. 1 (2007): 81–85. http://dx.doi.org/10.1002/smll.200600393.

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6

WEI, J., and C. K. WONG. "PHYSICAL AND CHEMICAL NANOLITHOGRAPHY TECHNIQUES: CHALLENGES AND PROSPECTS." International Journal of Nanoscience 04, no. 04 (2005): 575–85. http://dx.doi.org/10.1142/s0219581x05003644.

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The fabrication of nanodevices and nanosystems having dimensions smaller than 100 nm requires the ability to produce, control, manipulate, and modify structures at the nanometer scale. Physical and chemical nanolithography techniques have been demonstrated to be promising because of the low cost and high throughput. Although the physical and chemical nanolithography techniques can pattern small features on single chips or across an entire wafer, there are considerable challenges when dealing with complex nanostructures, alignment and multilevel stacks. In this paper, the problems are reviewed

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LI, HAI, XIAO-DONG ZHANG, YI ZHANG, ZHEN-QIAN OUYANG, and JUN HU. "FABRICATION OF TRUE-COLOR MICROPATTERNS BY 2D STEPWISE CONTRACTION AND ADSORPTION NANOLITHOGRAPHY (SCAN)." Surface Review and Letters 14, no. 01 (2007): 129–34. http://dx.doi.org/10.1142/s0218625x07009141.

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Fabrication of structures on the micro- and nanometer scales is of great importance for both fundamental research and potential applications. While microlithography methods are relatively established, the production of multi-component micro- and nanostructures with high density still presents difficulties. In this paper, a novel strategy termed as two-dimensional (2D) stepwise contraction and adsorption nanolithography (SCAN) is used to fabricate true-color micropatterns through a series of size-reduction process based on the physical elasticity of elastomer. Faithful multicolor patterns with

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8

Lin, P. S. D. "High-throughput nanolithography using an oxygen-plasma resistant two-layer resist system." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 6, no. 6 (1988): 2290. http://dx.doi.org/10.1116/1.584072.

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9

Jones, Alexandra G., Claudio Balocco, Rosemary King, and Aimin M. Song. "Highly tunable, high-throughput nanolithography based on strained regioregular conducting polymer films." Applied Physics Letters 89, no. 1 (2006): 013119. http://dx.doi.org/10.1063/1.2219094.

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10

Haaheim, Jason, and Omkar A. Nafday. "Dip Pen Nanolithography: A Desktop Nanofabrication Approach Using High-Throughput Flexible Nanopatterning." Microscopy Today 17, no. 2 (2009): 30–33. http://dx.doi.org/10.1017/s1551929500054468.

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Dip Pen Nanolithography (DPN) is a scanning probe lithography technique where an atomic force microscope tip is used to transfer molecules to a surface via a solvent meniscus. This technique allows surface patterning on scales of under 100 nanometres. DPN is the nanotechnology analog of the dip pen (also called the quill pen), where the tip of an atomic force microscope cantilever acts as a “pen,” which is coated with a chemical compound or mixture acting as an “ink,” and put in contact with a substrate, the “paper.”DPN enables direct deposition of nanoscale materials onto a substrate in a fle

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11

Arango-Santander, Santiago, Sidónio C. Freitas, Alejandro Pelaez-Vargas, and Claudia García. "Silica Sol-Gel Patterned Surfaces Based on Dip-Pen Nanolithography and Microstamping: A Comparison in Resolution and Throughput." Key Engineering Materials 720 (November 2016): 264–68. http://dx.doi.org/10.4028/www.scientific.net/kem.720.264.

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Fabrication of patterns on silicon and gold via Dip-Pen Nanolithography (DPN) using silica sol as ink and the combination of DPN, soft lithography, and silica sol-gel to transfer patterns from silicon and gold to stainless steel were assessed. In addition, a comparison in terms of throughput and resolution of both protocols was performed. Optical, scanning electron and atomic force microscopy were used to characterize the patterns. Silica sol showed high resolution but low throughput when used to pattern directly on gold and silicon using DPN. The combination of DPN, silica sol-gel and soft li

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12

Nafday, Omkar A., and Steven Lenhert. "High-throughput optical quality control of lipid multilayers fabricated by dip-pen nanolithography." Nanotechnology 22, no. 22 (2011): 225301. http://dx.doi.org/10.1088/0957-4484/22/22/225301.

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13

Haaheim, Jason, and Omkar A. Nafday. "Dip Pen Nanolithography®: A “Desktop Nanofab™” Approach Using High-Throughput Flexible Nanopatterning." Scanning 30, no. 2 (2008): 137–50. http://dx.doi.org/10.1002/sca.20098.

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14

Grushina, Anya. "Direct-write grayscale lithography." Advanced Optical Technologies 8, no. 3-4 (2019): 163–69. http://dx.doi.org/10.1515/aot-2019-0024.

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Abstract Grayscale lithography is used to produce three-dimensional (3D) structures on micro- and nanoscale. During the last decade, micro-optics and other applications were actively pushing the market demand for such structures. Direct-write systems that use lasers and heated scanning probes can be used for high-precision grayscale micro- and nanolithography. They provide solutions for the most demanding applications in research and industrial manufacturing. At both the micro- and nanoscale, though, some challenges remain, mainly related to throughput. Ongoing R&D efforts and emerging new

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15

Bearinger, Jane P., Gary Stone, Amy L. Hiddessen, et al. "Phototocatalytic Lithography of Poly(propylene sulfide) Block Copolymers: Toward High-Throughput Nanolithography for Biomolecular Arraying Applications." Langmuir 25, no. 2 (2009): 1238–44. http://dx.doi.org/10.1021/la802727s.

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16

Mondal, Partha Pratim. "The Expanding Horizon of Light Sheet Technology." iScience Notes 6, no. 6 (2021): 1–2. http://dx.doi.org/10.22580/iscinotej6.6.2.

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Seldom, do we come across a technology that advances multiple research disciplines across science and engineering. One such technology is light sheet that promises to take scientific investigation to the next level. The existing technology, predominantly based on point-focusing has reached a saturation limit, in terms of speed, limited field-of-view and lack of biophysical parameter estimation. Moreover, current technology is complex and needs human intervention. Light sheet techniques based on sheet-illumination expand our abilities for high throughput interrogation of a large pool of live bi

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17

Tabrizian, Maryam. "(Invited) Microfluidic Biochip Platforms for Non-Invasive Monitoring and Handling of Bioparticles." ECS Meeting Abstracts MA2025-01, no. 60 (2025): 2844. https://doi.org/10.1149/ma2025-01602844mtgabs.

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Introduction Microfluidic technology unlocks the true potential of high-throughput solutions for nanoparticle synthesis, automated cell culture and custom assay automation, and the production of reproducible, standardized and quality-controlled miniaturized 3D organ models ready for use in disease modelling, drug efficacy screening, cancer research, toxicology testing and more. Aim The aim of this presentation is to introduce several generations of microfluidic platform devices that support our upstream and downstream research in developing protocols, tools and technologies for their applicati

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18

Hill, Flynn R., Enrico Monachino, and Antoine M. van Oijen. "The more the merrier: high-throughput single-molecule techniques." Biochemical Society Transactions 45, no. 3 (2017): 759–69. http://dx.doi.org/10.1042/bst20160137.

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The single-molecule approach seeks to understand molecular mechanisms by observing biomolecular processes at the level of individual molecules. These methods have led to a developing understanding that for many processes, a diversity of behaviours will be observed, representing a multitude of pathways. This realisation necessitates that an adequate number of observations are recorded to fully characterise this diversity. The requirement for large numbers of observations to adequately sample distributions, subpopulations, and rare events presents a significant challenge for single-molecule tech

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19

Bullen, David A., Xuefeng Wang, Jun Zou, Sung-Wook Chung, Chang Liu, and Chad A. Mirkin. "Development of Parallel Dip Pen Nanolithography Probe Arrays for High Throughput Nanolithography." MRS Proceedings 758 (2002). http://dx.doi.org/10.1557/proc-758-ll4.2.

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ABSTRACTDip Pen Nanolithography (DPN) is a lithographic technique that allows direct deposition of chemicals, metals, biological macromolecules, and other molecular “inks” with nanometer dimensions and precision. This paper addresses recent developments in the design and demonstration of high-density multiprobe DPN arrays. High-density arrays increase the process throughput over individual atomic force microscope (AFM) probes and are easier to use than arrays of undiced commercial probes. We have demonstrated passive arrays made of silicon (8 probes, 310 μm tip-to-tip spacing) and silicon nitr

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20

Saha, Sourabh K., and Martin L. Culpepper. "Characterization of the Dip Pen Nanolithography Process for Nanomanufacturing." Journal of Manufacturing Science and Engineering 133, no. 4 (2011). http://dx.doi.org/10.1115/1.4004406.

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Dip pen nanolithography (DPN) is a flexible nanofabrication process for creating 2-D nanoscale features on a surface using an “inked” tip. Although a variety of ink-surface combinations can be used for creating 2-D nanofeatures using DPN, the process has not yet been characterized for high throughput and high quality manufacturing. Therefore, at present it is not possible to (i) predict whether fabricating a part is feasible within the constraints of the desired rate and quality and (ii) select/design equipment appropriate for the desired manufacturing goals. Herein, we have quantified the pro

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21

Park, Changsu, Soobin Hwang, Donghyun Kim, et al. "Massively parallel direct writing of nanoapertures using multi-optical probes and super-resolution near-fields." Microsystems & Nanoengineering 8, no. 1 (2022). http://dx.doi.org/10.1038/s41378-022-00416-9.

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AbstractLaser direct-writing enables micro and nanoscale patterning, and is thus widely used for cutting-edge research and industrial applications. Various nanolithography methods, such as near-field, plasmonic, and scanning-probe lithography, are gaining increasing attention because they enable fabrication of high-resolution nanopatterns that are much smaller than the wavelength of light. However, conventional methods are limited by low throughput and scalability, and tend to use electron beams or focused-ion beams to create nanostructures. In this study, we developed a procedure for massivel

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22

Saygin, Verda, Sean Andersson, and Keith A. Brown. "Quantitative Nanopatterning of fg-Scale Liquids with Dip-Pen Nanolithography." Nanotechnology, June 7, 2023. http://dx.doi.org/10.1088/1361-6528/acdc2d.

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Abstract The ability to precisely pattern nanoscale amounts of liquids is essential for biotechnology and high-throughput chemistry, but controlling fluid flow on these scales is very challenging. Scanning probe lithography methods such as dip-pen nanolithography provide a mechanism to write fluids at the nanoscale, but this is an open loop process as methods to provide feedback while patterning sub-pg features have yet to be reported. Here, we demonstrate a novel method for programmably nanopatterning liquid features at the fg-scale through a combination of ultrafast atomic force microscopy (

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23

Minopoli, Antonio, Bartolomeo Della Ventura, Bohdan Lenyk, et al. "Ultrasensitive antibody-aptamer plasmonic biosensor for malaria biomarker detection in whole blood." Nature Communications 11, no. 1 (2020). http://dx.doi.org/10.1038/s41467-020-19755-0.

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AbstractDevelopment of plasmonic biosensors combining reliability and ease of use is still a challenge. Gold nanoparticle arrays made by block copolymer micelle nanolithography (BCMN) stand out for their scalability, cost-effectiveness and tunable plasmonic properties, making them ideal substrates for fluorescence enhancement. Here, we describe a plasmon-enhanced fluorescence immunosensor for the specific and ultrasensitive detection of Plasmodium falciparum lactate dehydrogenase (PfLDH)—a malaria marker—in whole blood. Analyte recognition is realized by oriented antibodies immobilized in a cl

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24

Wahl, Carolin B., Jordan H. Swisher, Peter T. Smith, Vinayak P. Dravid, and Chad A. Mirkin. "Traversing the Periodic Table through Phase‐Separating Nanoreactors." Advanced Materials, March 19, 2025. https://doi.org/10.1002/adma.202500088.

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AbstractPhase‐separating nanoreactors, generated through either Dip Pen Nanolithography (DPN) or Polymer Pen Lithography (PPL) and capable of single nanoparticle formation, are compatible with almost every relevant element from the periodic table. This advance overcomes one of the most daunting limitations in high throughput materials discovery, specifically enabling the synthesis of broad swaths of the materials genome. Indeed, the platform is compatible with at least 52 metal elements of interest and almost an infinite number of combinations. In particular, it is discovered that surface‐conf

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25

Fragala, Joseph S., R. Roger Shile, and Jason Haaheim. "Enabling the Desktop NanoFab with DPN® Pen and Ink Delivery Systems." MRS Proceedings 1037 (2007). http://dx.doi.org/10.1557/proc-1037-n02-04.

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AbstractDepositing a wide range of materials as nanoscale features onto diverse surfaces with nanometer registration and resolution are challenging requirements for any nanoscale processing system. Dip Pen Nanolithography® (DPN®), a high resolution, scanning probe-based direct-write technology, has emerged as a promising solution for these requirements. Many different materials can be deposited directly using DPN, including alkane thiols, metal salts and nanoparticles, metal oxides, polymers, DNA, and proteins. Indirect deposition allows the creation of many interesting nanostructures. For ins

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