Dissertations / Theses on the topic 'Integrated Passive Devices IPD'

In this thesis, the whole process of design a low pass filter (LPF) for the wireless communication application has been presented. Integrated passive device technology based on GaAs substrate has been utilized to make the LPF. Schematic simulation and electromagnetic simulations are extensively used in the design process. EM simulation is used in the selection of layout design and processing parameters for design optimization of both the inductors and IPD harmonic filters. The effective use of EM simulation enables us to realize the successful development of high performance harmonic filters. To make the optimization be more flexible and also for a deeper understanding of the optimization theory, optimization using genetic algorithm is also implemented. The weight of each targets are adjustable, and a non-uniformly distributed goal for the harmonic rejection range is introduced to achieve better optimization results. The embedded LPF is built and measurement results show good agreement with the simulation data. This kind of very compact, high performance harmonic filters can be used in radio transceiver front-end modules. The realized harmonic filters have insertion loss less than 0.6 dB and harmonic rejections greater than 25 dB with a compact die size of 0.8 mm2.
M.S.E.E.
School of Electrical Engineering and Computer Science
Engineering and Computer Science
Electrical Engineering

La complexité des systèmes RF intégrés pour les applications sans fil grand public s’accroit, et exige de revisiter l’intégration des circuits passifs RF et microondes. De nouvelles solutions offrant plus de compacité et de performance doivent être recherchées, avec un coût de fabrication qui doit rester faible. Parmi celles-ci, une filière technologique 3D de type « Integrated Passive Devices » (IPD) est développée au LAAS CNRS et par la société 3DiS Technologies depuis plusieurs années. Après avoir démontré les capacités de la technologie pour l’intégration de solénoïdes extrêmement compacts et performants, le travail présenté dans ce manuscrit ajoute l’intégration des condensateurs pour faire évoluer la technologie vers la fabrication de fonctions passives RF complexes.Le manuscrit s’articule en trois chapitres. Une première partie dresse une revue des procédés technologiques existants pour la fabrication de systèmes RF et met en évidence l’importance de disposer de composants passifs compacts et performants pour pouvoir intégrer les circuits MMIC. Dans ce contexte, nous présentons les avantages apportés par une solution d’intégration 3D bas coût telle que celle proposée. Dans une deuxième partie, nous présentons le développement de condensateurs Métal Isolant Métal (MIM). Les caractérisations montrent que les condensateurs présentent des performances équivalentes à celles recensées dans la littérature avec de très bons coefficients de qualités. Nous appliquons ensuite la technologie 3D complète à la réalisation de deux transformateurs adaptés en impédance 50 ohms en utilisant des condensateurs. Le procédé technologique de fabrication des deux circuits est décrit. Dans la bande d’adaptation, les circuits fabriqués et caractérisés affichent des pertes en transmission équivalentes aux pertes théoriques minimales estimées à partir du gain disponible maximum des transformateurs. Ces résultats confirment les bonnes performances des condensateurs MIM développés qui introduisent des pertes minimes pour les circuits fabriqués. Aucun problème de fabrication n’est relevé pour les transformateurs adaptés, ce qui permet de valider le procédé technologique complet pour l’intégration de condensateurs et de solénoïdes.Sur la base de ces résultats, le dernier chapitre est consacré au développement d’une matrice de Butler 4×4 destinée à piloter un faisceau de quatre éléments rayonnants en visant la 5G comme contexte applicatif. Des pertes en transmissions inférieures à 3,5 dB et un écart sur les déphasages en sorties de 16° sont relevés pour une large bande passante de 24 GHz à 29 GHz. Ces résultats de mesure sont à l’état de l’art et surpassent les solutions existantes, en particulier au niveau de la surface occupée de seulement 0,84 mm2. Ces résultats démontrent le potentiel de la technologie 3D à réaliser un compromis innovant entre densité d’intégration et performances
The complexity of embedded RF systems in consumer wireless applications is increasing, and requires to improve the integration of RF and microwave passive circuits. New solutions that offer more compactness and performance have to be developed, while maintaining a low manufacturing cost. Among Integrated Passive Devices (IPD) technologies, a 3-D technology has been developed at the LAAS CNRS and by 3DiS Technologies for several years. Results demonstrate that the manufactured solenoids exhibit high compactness and high-performance. This PhD thesis aims to develop the integration process of capacitors in order to evolve the technology towards the fabrication of complex passive RF functions.The manuscript is divided into three chapters. The first chapter reviews the technological processes that enable the manufacture of RF systems and highlights the challenges for integrating high-performance passive components. It also presents the advantages of a low-cost 3-D integration solution such as the one proposed. In the second chapter, we present the development of Metal Insulator Metal (MIM) capacitors. The characterization result show that capacitors present performances equivalent to those identified in the literature with high quality factors. We then manufacture two transformers matched to 50 ohms using capacitors. The technological process is described. The manufactured and measured circuits show that transmission losses are close to those obtained at the maximum available gain of the transformers. These results confirm the good performance of the developed capacitors since they introduce minimal losses for the manufactured circuits. No technological problems are encountered during the manufacturing of the two transformers, which validates the complete technological process for the integration of capacitors and solenoid.Based on these results, we present in the last chapter the development of a 4×4 Butler matrix dedicated to 5G beamforming applications. In a large bandwidth ranging from 24 GHz to 29 GHz, insertion losses for the four outputs of the matrix are under 3.5 dB and the phase difference between the outputs are reached with a deviation of less than 16°. The measured results are at the state of the art and overcome those of the existing IPD solutions, in particular for the occupied aera that does not exceed 0.84 mm2. These performances allow us to conclude on the potential of 3-D IPD technology to achieve an excellent compromise between integration density and performance

Thesis (M. Phil.)--Hong Kong University of Science and Technology, 2004.
Includes bibliographical references (leaves 118-122). Also available in electronic version. Access restricted to campus users.

Abstract The thesis is concerned with the development of gravure-offset-printing and low temperature co-fired ceramic (LTCC) technologies for the miniaturisation of electronic devices and components. The development work has been verified by several applications. Several aspects of gravure-offset-printing have to be optimised in order to make it suitable for fine-line printing and these have been addressed in the study with a focus on the printing inks and plates. Gravure-offset-printing inks were developed from commercial thick-film pastes. The effects of different ink characteristics on some properties of conductor lines, such as line width and resistivity, were studied. The dependence of the conductor lines on the quality of the engravings in the printing plates was also studied. The narrowest line widths obtained were about 30 μm with an accuracy of ±5 μm. Various LTCC compositions and processing steps involved in the production of integrated electronic devices, and the properties of several fabricated devices are discussed. The devices include inductors, band-pass filters and resistors for the 1–2 GHz frequency range. Miniaturisation has been the main focus of attention. For example, the integration of high-permittivity tapes in addition to low-permittivity tapes has made the miniaturisation of filter structures possible. Compatibility between these tapes during firing was found to be good. LTCC technology was further developed by adapting a modified LTCC-on-metal (LTCC-M) approach. A traditional way of guiding heat away from a component is to place a heat-sink under the component and utilise thermal vias and solder balls. In this study high- and low-permittivity tapes were attached directly on a heat-sink. Different heat-sink options were evaluated and the best performance was achieved with an AlN heat-sink which was deposited by screen-printing a Au layer on it. High-power chips were attached directly on the heat-sink through cavities in the LTCC tapes. This approach also restricted the shrinkage of the LTCC tapes. The fabricated test structures and components proved the viability of the approach although the compatibility between the pastes and tapes was not optimal.

[EN] Optical technologies are the backbone of modern communication systems providing high-speed access to the Internet, efficient inter and intra-data center interconnects and are expending towards growing research fields and new markets such as satel- lite communications, LIDARs (Laser Imaging Detection and Ranging) applications, Neuromorphic computing, and programable photonic circuits, to name a few. Be- cause of its maturity and low-cost, silicon photonics is being leveraged to allow these new technologies to reach their full potential.As a result, there is a strong need for innovative, high-speed and energy-efficient photonic integrated building blocks on the silicon platform to increase the readiness of silicon photonic integrated circuits. The work developed and presented in this thesis is focused on the design and char- acterization of advanced passive and active devices, for photonic integrated circuits. The thesis consists of three main chapters as well as a motivation and concluding sections exposing the rationale and the accomplishments of this work. Chapter one describes the design and characterization of an electro-optical Mach-Zehnder mod- ulator embedded in highly efficient vertical pn junction exploiting the free-carrier dispersion effect in the O-band.. Chapter two is devoted to the design and charac- terization of a novel geometry of asymmetrical multimode interference device and its implementation in a Mach-Zehnder modulator. Chapter three is dedicated to the design and characterization of innovative 1-dimensional photonic crystal designs for slow- lightmodulation applications. An extensive analysis of the main trade-off arising from the use of slow light is presented.
[ES] Las tecnologías ópticas son el eje vertebrador de los sistemas de comunicación mod- ernos que proporcionan acceso de alta velocidad a la Internet, interconexiones efi- cientes entre centros de datos y dentro de ellos. Además, se están expandiendo hacia campos de investigación crecientes y nuevos mercados como son las aplicaciones de comunicaciones por satélite, los LIDAR (Laser Imaging Detection and Ranging), la computación neuromórfica y los circuitos fotónicos programables, por nombrar algunos. La fotónica de silicio está considerada y aceptada ampliamente como una de las tecnologías clave para que dichas aplicaciones puedan desarrollarse. Como resultado, hay una fuerte necesidad de estructuras fotónicas básicas integradas que sean innovadoras, que soporten altas velocidades de transmisión y que sean más eficientes en términos de consumo de potencia, a fin de aumentar la capacidad de los circuitos integrados fotónicos de silicio. El trabajo desarrollado y presentado en esta tesis se centra en el diseño y la car- acterización de dispositivos avanzados pasivos y activos, para circuitos fotónicos integrados. La tesis consta de tres capítulos principales, así como de sendas sec- ciones de motivación y conclusiones que exponen los fundamentos y los logros de este trabajo. El capítulo uno describe el diseño y la caracterización de un modulador electro-óptico Mach-Zehnder incorporado en una unión pn vertical altamente eficien- ciente que explota el efecto de dispersión de plasma en banda O. El capítulo dos está dedicado al diseño y caracterización de una nueva geometría de dispositivo de interferencia multimodo asimétrico y su aplicación en un modulador Mach-Zehnder. El capítulo tres está dedicado al diseño y caracterización de innovadores cristales fotónicos unidimensionales para aplicaciones de modulación con luz lenta. Se pre- senta un amplio análisis de los principales retos derivados del uso de la misma.
[CA] Les tecnologies òptiques són l'eix vertebrador d'aquells sistemes de comunicació moderns que proporcionen accés d'alta velocitat a la Internet, així com intercon- nexions eficients inter i entre centres de dades. A més a més, s'estan expandint cap a camps d'investigació creixents i nous mercats com són les aplicacions de co- municacions per satèl·lit, els LIDAR (Laser Imaging Detection and Ranging), la computació neuromòrfica i els circuits fotònics programables, entre d'altres. La fotònica de silici és considerada i acceptada àmpliament com una de les tecnologies clau i necessàries perquè aquestes aplicacions puguen desenvolupar-se. Per aquest motiu, es fa necessària l'existència d'estructures fotòniques bàsiques integrades que siguen innovadores, que suporten altes velocitats de transmissió i que siguen més eficients en termes de consum de potència, a fi d'augmentar la capacitat dels cir- cuits integrats fotònics de silici. El treball desenvolupat i presentat en aquesta tesi se centra en el disseny i la caracterització de dispositius avançats passius i actius, per a circuits fotònics integrats. La tesi consta de tres capítols principals, així com d'una secció de motivació i una altra de conclusions que exposen els fonaments i els assoliments d'aquest treball. El capítol u descriu el disseny i la caracterització d'un modulador electro-òptic Mach-Zehnder incorporat en una unió pn vertical d'alta efi- ciència que explota l'efecte de dispersió de plasma en la banda O. El capítol dos està dedicat al disseny i caracterització d'una nova geometria de dispositiu d'interferència multimode asimètric així com a la seua aplicació en un modulador Mach-Zehnder. El capítol tres està dedicat al disseny i caracterització d'innovadors cristalls fotònics unidimensionals per a aplicacions de modulació amb llum lenta. S'inclou també una anàlisi detallada dels principals reptes derivats de l'ús d'aquest tipus de llum.
I want to thank you the Generelitat Valenciana and the European Project L3MATRIX for the funding, without them my doctorate would not taken place.
Zanzi, A. (2020). Passive and active silicon photonics devices at TLC telecommunication wavelengths for on-chip optical interconnects [Tesis doctoral no publicada]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/149377
TESIS

The objective of this research is to investigate the use of laser direct writing to micro-pattern low loss passive optical channel waveguide devices using a new hybrid organic/inorganic polymer. Review of literature shows previous methods of optical waveguide device patterning as well as application of other non-polymer materials. System setup and design of the waveguide components are discussed. Results show that laser direct writing of the hybrid polymer produce single mode interconnects with a loss of less 1dB/cm.

Dispositivos microfluidos operados por fuerzas capilares son fáciles de operar plataformas para realizar herramientas Lab-On-a-Chip (LOC). Si estas “simplistas” aplicaciones LOC tengan éxito, la operación unitaria del control de flujo hay que desarrollarse. Esto es particularmente verdad para herramientas “ASSURED” (término introducido por A. Guiseppi-Elie: Affordable, Sensitive, Specific, User-friendly, Rapid and robust, Equipment-free and Deliverable) y aplicaciones bioanalíticas en las cuales la respuesta depende de la disolución de los reactivos previamente depositados, la cinética de afinidad biológica y enzimática, y el transporte en materia de productos a un transductor en los microcanales. En esta tesis el diseño, fabricación e implementación de tres alternativas electroquímicas para el control del flujo capilar se han desarrollado basadas en electrowetting usando i) superficies superhidrófobas basándose a polímeros que responden inteligentemente a los estímulos eléctricos, ii) superficies nanoporosas superhidrófobas de electrodos de carbono, y iii) electrodos con superficies superhidrófobas acoplados a otros electrodos que facilitan la generación de gradientes que pueden propulsar el líquido. La tesis estudia el mecanismo de la respuesta en cada caso en estos sistemas y demuestra opciones para la reducción a la práctica de herramientas que pueden “democratizar” la “teranostica” (theranostics).
Capillary force-operated microfluidic devices are easy to use, low cost realization platforms for Lab-on-a-Chip (LOC) configurations. If such “simplistic” LOC applications are to have success, flow control is an important unit operation to develop. This is particularly true for ASSURED (a term introduced by A. Guiseppi-Elie: Affordable, Sensitive, Specific, User-friendly, Rapid and robust, Equipment-free and Deliverable) devices for bioanalytical applications where an analytical response depends on the dissolution of previously deposited reagents, the kinetics of biological affinity and enzymatic reactions, and mass transport of products to a transducer in the microchannels. In this thesis the design, fabrication and implementation of three different electrochemically actuated capillary flow control schemes have been developed through low voltage electrowetting/ electrochemical actuation of the flow using i) electrical stimuli responsive superhydrophobic surfaces based on intelligent polymers ii) superhydrophobic nanoporous carbonaceous surfaces, and iii) superhydrophobic electrodes coupled to other electrodes that facilitate the generation of gradients to propel the liquid. The thesis unravels the mechanism of response of such systems and demonstrates ways for reduction to practice of such devices for the “democratization” of theranostics.

Actuellement, les objets communicants sans fils occupent une place prépondérante. Pour faciliter leur utilisation, ces objets sont de plus en plus petits et nécessitent de très petites antennes. Cette miniaturisation d'antennes implique forcément une détérioration de leurs performances. La conception d'antennes électriquement petites (AEP) nécessite une très bonne compréhension théorique des mécanismes électromagnétiques mis en jeu notamment quelles limites précises peut-on atteindre pour une AEP étant circonscrive dans un volume donné. Un des paramètres essentiels d'une AEP est son facteur de qualité intrinsèque qui est inversement proportionnel à sa bande passante en impédance. Ainsi, maximiser la bande passante en impédance d'une antenne consiste à minimiser son facteur de qualité. Face à ce problème, de nombreux travaux ont été développés pour déterminer les limites possibles pour des AEP. C'est dans ce cadre que s'inscrit le premier axe de recherche de la thèse : étudier le facteur de qualité d'AEP, afin de déterminer s'il existe des dimensions optimales permettant de s'approcher de ces limites. Le second axe de recherche a consisté à étudier des AEP fonctionnant à 2,45 GHz pour des implants biomédicaux. Celles-ci sont imprimées sur de nouveaux types de substrat pour avoir une meilleure résolution de trace métallique favorisant une réduction de l'encombrement, et une intégration facilitant ainsi les interconnexions avec les frontaux RF. Le challenge consiste à maximiser les performances de ces antennes. Plusieurs prototypes ont été réalisés pour valider les simulations.

碩士
國立臺灣科技大學
電機工程系
100
In this thesis, novel synthesized coplanar waveguides (CPWs) are developed using the glass substrate integrated passive device technology (GIPD). The proposed high-slow-wave-factor structures are capable of realizing synthesized transmission lines with a wide range of characteristic impedances and electrical lengths. The design concepts, equivalent circuit models, and experimental results are carefully investigated and discussed. By utilizing the synthesized CPWs, a miniaturized branch-line coupler is developed with a substantial size miniaturization of 91.5%. By incorporated with a novel 180?a phase inverter, a compact wideband rat-race coupler is also designed, showing improved bandwidths of 61% and 30%, respectively, as the sum and difference ports are excited. The size reduction ratio is remarkable, as well. Miniaturized stepped impedance resonators (SIRs), composed by three sections of synthesized CPWs, are realized and integrated to develop a novel miniaturized third-order bandpass filter with extended stopband rejection. The proposed bandpass filter has a very compact size, which is only 5% the size of a parallel-coupled SIR filter design. The first spurious passband is 4.3 times away from the fundamental one. The design concept, filter synthesis, and experimental results are discussed in detail. Finally, a compact 3-dB backward-wave coupled-line directional coupler is investigated. The even/odd-mode analysis and simulated and measured results are discussed. The coupling coefficients can be controlled by adjusting the parameters of the spiral inductors and MIM capacitors in the synthesized CPWs. The proposed coupler has an extremely compact size but comparable performances as well.

The field of plasmonics has offered the promise to combine electronics and photonics at the nanometer scale for ultrafast information processing speeds and compact integration of devices. Various plasmonic waveguide schemes were proposed with the potential to achieve switching functionalities and densely integrated circuits using optical signals instead of electrons. Among these, the hybrid plasmonic waveguide stands out thanks to two sought-out properties: long propagation lengths and strong modal confinement. In this work, hybrid plasmonic waveguides and passive devices were theoretically investigated and experimentally demonstrated on an integrated silicon platform. A thin SiO2 gap between a gold conductive layer and a silicon core provides subwavelength confinement of light inside the gap. A long propagation length of 40µm was experimentally measured. A system of taper coupler connects the plasmonic waveguide to conventional photonic waveguides at a high efficiency of 80%. Passive devices were also fabricated and characterized, including S-bends and Y-splitters.
Microsystems and Nanodevices

碩士
中原大學
電子工程研究所
90
The major objective of this thesis is to fabricate and study passive devices using standard monolithic silicon processing technology. The study includes inductors, capacitors and VCO. Finally, these devices are applied in a VCO oscillator circuit. The design simulation and measurement of related devices are also presented in this thesis. High frequency passing devices are indispensable in today’s communication circuit. It is also our goal to study their potential applications in the thesis. Inductors have several characteristics in high frequency range such as skin effect, parasitic effect and resonant frequency. Although capacitors have no severe degradation in items of these effects, they still show certain degree of dielectric loss in high frequency range. During simulation, we also consider these parasitic effects to improve accuracy of simulation. All characteristic impedance measurements were performed in HP8720C network analyzer. These analyses are mainly focused on quality factor, inductance and capacitance. Finally, these devices are used to fabricate VCO oscillators. And the integration of active and passive devices into a single IC chip will be discussed.

碩士
國立中山大學
光電工程學系研究所
98
The purpose of the thesis is to investigate and the corrosion resistance of the masking materials on quartz substrates in deep chemical etching using NH4HF2 solutions. Masking materials, including Cr/Au, PLA-900 position photoresist, and NPR-2500F negative photoresist were used for test. In the deep etching of the quartz substrates, we observed changes of adhesion of the masking materials. The process parameters obtained from deep etching were used to fabricate quartz resonators. Before etch, the etch masks using Cr/Au thin films were deposited on both sides of the quartz substrates. Cr/Au masking materials were stripped after the etching, and Cr/Au electrodes were deposited by sputtering on both sides of quartz substrates. Finally, the quartz resonators were obtained by dicing. Passive devices, including capacitors and inductors were also fabricated and measured for integrated passive devices, such as band-pass filters.

碩士
國立中央大學
電機工程研究所
100
The output power and power added efficiency of power amplifiers implemented in standard CMOS are limited due to silicon substrate loss and low quality factor of passive components. This thesis presented CMOS power amplifiers with the matching networks fabricated by glass substrate integrated passive device (GIPD) process. By using GIPD process, it is possible to obtain the improved quality factor of passive components and reduced substrate loss. First of all, a cascode device model based on TSMC CMOS 0.18 μm RF NMOS with parasitic effect was proposed and investigated with validation of dc, ac, and power characteristics. The cascode arrangement of transistors was used to increase operation voltage and thus higher output power capability. Subsequently, two CMOS power amplifiers using proposed cascode device model and GIPD process were designed and characterized. Class-E and class-AB power amplifiers were studied with single-end input and output but differential operation inside. In the class-E amplifier, the driver stage was implemented by mode-locking methodology and power stage was implemented in cascode. In the class-AB amplifier, transistors in both stages were connected in cascode for maximum output power. The measured power performance was not as good as simulated, the possible cause was from the flip-chip bumps.

碩士
國立中山大學
電機工程學系研究所
96
This thesis is mainly composed of two parts. The first part is to introduce the planar transformer-based circuits and their applications. The mixed-mode S parameters and the grounding effects for planar transformers are discussed. A physical model has been developed for modeling the planar transformers. In the second part, a new coil winding technique for planar transformers has been presented to realize a high-efficiency planar transformer with arbitrary turn ratio for power-split/combine and phase-shift applications. Especially, the power-split/combine architecture based on a planar transformer of cellular shape is first presented in this thesis, enabling various kinds of passive components to be widely realized using the integrated passive device processes. As an example, this thesis proposes a design procedure for high-efficiency balun component. Firstly, design a high Q transformer that considers the load impedance effects. Secondly, design the ground reference for un-balanced signal on the virtual ground symmetry axis for balanced signals. Thirdly, design impedance matching networks for minimizing un-balanced and balanced port return losses. Then, a high performance planar transformer-based balun design can be done.

This thesis puts focus on the technological challenges for Wavelength Division Multiplexed Passive Optical Network (WDM-PON) implementation, and presents novel semiconductor optical devices for deployment at the optical network unit (ONU). The first-ever reported L-band Reflective semiconductor optical amplifier (RSOA) is presented based on InP-base material. A theoretical model is developed to estimate the optical gain and the saturation power of this device compared to a conventional SOA. Experiments on this device design show long-range telecom wavelength operation, with polarization-independent gain of greater than 20 dB, and low saturation output power of 0 dBm suitable for PON applications. Next, the effect of the amplified spontaneous emission noise of RSOA devices on WDM-PON system is investigated. It is shown through theoretical modeling and simulations that the RSOA noise combined with receiver noise statistics increase probability of error, and induce considerable power penalties to the WDM-PON system. By improving the coupling efficiencies, and by distributing more current flow to the input of these devices, steps can be taken to improve device noise characteristics. Further, in spectrally-spliced WDM-PONs deploying RSOAs, the effect of AWG filter shape on system performance is investigated. Simulation modeling and experiments show that deployment of Flat-band AWGs is critical for reducing the probability of error caused by AWG spectral shape filtering. Flat-band athermal AWGs in comparison to Gaussin-shape counterparts satisfy the maximum acceptable error probability requirements, and reduce the power penalty associated with filtering effect. In addition, detuning between two AWG center wavelengths impose further power penalties to the WDM-PON system. In the last section of this thesis, motivated by RSOA device system limitations, a novel injection-locked Fabry-Perot (IL-FP) device is presented which consists of a gain section monolithically integrated with a phase section. The gain section provides locking of one FP mode to a seed source wavelength, while the phase modulator allows for adjusting the wavelength of the internal modes by tuning bias current to maintain mode-locking. This device counters any mode drifts caused by temperature variations, and allows for cooler-less operation over a wide range of currents. The devices and the performance metrics subsequently allow for a hybrid integration platform on a silicon substrate and integrate many functionalities like reflective modulator with thin film dielectric filter and receiver on a single chip for deployment at the user-end of future-proof low cost WDM-PONs.

博士
國立中山大學
電機工程學系研究所
102
Future wireless communication systems will be more focused on having high data rates or low-power consumption. This dissertation aims to investigate and implement wideband receiver radio-frequency (RF) front-end integrated circuits (ICs) and high energy-efficient RF receivers. Based on this aim, the dissertation includes three major topics. First of all, two novel wideband CMOS common-gate low-noise amplifiers (LNAs) are proposed. They use dual-feedback schemes to simultaneously achieve input and noise impedance matching. Moreover, using an on-chip transformer in these LNAs significantly enhances the bandwidth of the associated gain factors. Next, a flip-chip RF front-end module package which stacks a CMOS RF front-end IC above a glass integrated passive device substrate is studied. This package has not only high linearity and low noise figure over a specific wide frequency range, but also a miniature size. Finally, two frequency shift-keying (FSK) receivers with low complexity are presented. These receivers utilize an injection-locking technique to remove the widely used phase-locked loop in a local oscillator. Furthermore, combined with a self-oscillating mixer or a divide-by-2 frequency divider plus a subharmonic mixer, the presented FSK receivers achieve superior sensitivity with very low power consumption.

碩士
國立清華大學
材料科學工程學系
92
High operation frequency, miniaturization, functionality, and reliability are the trends of future wireless and portable communication productions. Circuit integration becomes essential for the development. The shrinking and integration capability of active devices greatly exceeds that of passive ones. If both the active and the passive devices are to be integrated together, the thin film process technology for passive devices will play a crucial role in future development. In this study photolithography and wet etching techniques are utilized to fabricate thin film inductors. By using Vector Network Analyzer and Cascade coplanar probes, scattering parameters of the thin inductor were measured. With the help of ADS and SONNET simulation analysis, effect of geometry and ground shield pattern on the high frequency characteristics of the inductors, e.g. quality factor, inductance and self-resonance frequency were discussed. According to our experimental results, the inductance of rectangular inductor was found to be higher than that of square inductor by one order of magnitude. Nevertheless, the rectangular inductors have a lower self-resonance frequency due to the larger surface area, and hence larger parasitic impedance. Using a patterned ground shield beneath the inductor was planned to enhance quality factor of the inductors. Although we are not able to achieve the goal, but electromagnetic simulation results indicated that only the inductors having appropriate optimization of geometry and process conditions can gain the advantage from pattern ground shield. The optimum performance of the thin film inductor fabricated was found to be QMax = 2.65 and fsr = 14.82 Ghz.

碩士
國立清華大學
電子工程研究所
102
In recent years, integrated circuits technology has been improved according to Moore’s Law, but the speed of this trend becomes slower. In addition to the process issue of transistors miniaturization, the yield of the 3C products decreases because of the heating problem generated during circuit operation. Therefore, a new technology is needed to overcome the difficulties. The silicon substrate is the most commonly used material for modern integrated circuits technology because the cost and high integration level. However, the heating problem in silicon IC is still a concern. In this thesis, we focus on the AlN substrate which has better thermal conductivity and the cost is even lower than the Si substrate. This thesis focuses on design and analysis of the Integrated Passive Device (IPD) in AlN substrate. The device performance is expected to be improved for microwave applications. First, we use transmission line structure to analyze and optimize the process. Second, we design three IPDs in AlN substrate. The first device is Wilkinson power divider. The measurement result is with an insertion loss of -5.8dB and an input return loss of -9.6dB at 24GHz. The second type of devices are half-wave antenna and quarter-wave antenna. The measurement result shows an input return loss of -13.067dB at 23.3GHz for half-wave antenna and a input return loss of -14.465dB at 23.2GHz for the quarter-wave antenna. The third device is a IPD transformer to be integrated with CMOS PA by flip-chip. The measurement result of sample 1 shows an input return loss of -14.5dB at 20.6GHz and a output return loss of -2.39dB at 24GHz. The measurement result of sample 2 is with an input return loss of -0.28dB at 24GHz and a output return loss of -15.5dB at 20.9GHz. However, the PA did not show the expected amplification characteristics due to the contact problem in flip-chip process. By using HFSS and Sonnet, we analyze the impact of process and geometry on electrical characteristics of IPD in the AlN substrate for microwave applications. In the future, we can design more IPDs in AlN substrate according to this analysis result and improve heating problem for different applications.

博士
國立中山大學
電機工程學系研究所
100
This dissertation aims to design and implement wireless passive components using domestic integrated passive device (IPD) technology. The research focuses on exploiting novel 3-D structures for various kinds of IPD-based wireless passive components including high-quality and high-efficiency planar transformers, baluns, filters, and combiners to achieve miniature size and high performance. A physical model has been developed for modeling the planar transformers. In this dissertation, a scalable transformer model in integrated passive device technology is further used to correlate with the coupled-line sections of a conventional Marchand balun. This improves the efficiency of the design of planar transformers with equivalent coupled-line parameters such as the coupling factor, and even- and odd-mode characteristic impedances and quality factors. Additionally, the proposed model-based design approach provides effective optimization techniques that incorporate geometrical and material parameters. In addition, a compact transformer-based coupled balun bandpass filter design is proposed based on integrated circuit technology and the equivalent circuit is established. Using a planar transformer with high-density fully symmetrical wiring not only greatly reduces the component size but also provides a superior stopband rejection and selectivity. Finally, by using the spiral-shaped resonators, the dual-band third-order bandpass filter has been implemented on organic substrates. The proposed BPF design is verified to overcome the elements’ parasitic effects, and thus can be miniaturized and optimized with high degree of freedom. The simulation and measurement results have good agreement for the proposed design in this dissertation.

碩士
國立中央大學
電機工程研究所
99
The first part of this thesis is to study the high frequency performance of thin-film capacitor in different geometry with the same layout area and to investigate which capacitor can achieve the best self-resonant frequency for the monolithic microwave integrated circuit (MMIC) circuit design. The thin-film capacitors were fabricated on GaAs substrate by using semiconductor process. There are different layout styles, 11 types in total, were designed into an unit area of 100 × 100μm2. In order to obtain the precisely characteristics of self-resonant frequency and quality factor, the thin-film capacitors including RF pads were extracted by using de-embedding method. Four de-embedding method are introduced in the thesis. Based on the results from measurement and simulation, the de-embedding methods, 2-step/open/thru and the pad/open/thru, are suitable for the thin-film capacitance extraction. The second part presents a differential-type Class-E power amplifier for 1.8 GHz wireless application in which the amplifier was integrated by a chip having a driving and a power cascode MOSFETs designed by TSMC 0.18μm CMOS technology and the passive components based on Glasses Integrated Passive Device(GIPD) process. This circuit architecture not only avoids the parasitic inductors from bonding wire but also reduces the loss of the passive components on silicon substrate. Because of the improvement using GIPD technique, the saturation power and the power added efficiency therefore can be enhanced in power amplifier design.

[ES] La cantidad de servicios de telecomunicación se ha incrementado signiticativamente en las últimas décadas. El uso de teléfonos inteligentes, así como el Internet de las Cosas, está generando una saturación del espectro electromágnetico. Por tanto, los requisitos de los sistemas de microondas han cambiado para adaptarse a estos nuevos avances. Para satisfacer estas necesidades, se busca el desarrollo de dispositivos de bajo coste, volumen, peso y consumo. Además, interesa que sean espectralmente eficientes y fácilmente integrables con otros dispositivos. Entre todos los dispostivos de microondas, los filtros son elementos clave dentro de los sistemas de comunicaciones móviles e inalámbricas. Es por ello que el diseño de filtros que cumplan con los requisitos mencionados se ha convertido en un tema de gran interés. Para dar respuesta a este problema ha surgido la tecnología de Guía de Onda Integrada en Sustrato (Substrate Integrated Waveguide (SIW)), que permite la implementación de filtros con un reducido tamaño y fácilmente integrables con otros dispositivos en tecnología planar. Dicha tecnología presenta unas prestaciones en cuanto a manejo de potencia y pérdidas mejores que la tecnología de circuito impreso (Printed Circuit Board (PCB)), aunque no llegan a ser iguales que las de la guía de onda clásica. Por otro lado, la saturación espectral también lleva al estudio de filtros con respuestas variables en frecuencia, es decir, que puedan cambiar su frecuencia central y ancho de banda con el fin de adaptarse a las necesidades del sistema. Por ello, el objetivo general de esta Tesis es el análisis y diseño de nuevos filtros reconfigurables en tecnología integrada. El trabajo empieza con el estudio de los fundamentos de los filtros de microondas hasta llegar al diseño de resonadores reconfigurables en tecnología SIW usando el cristal líquido como material de reconfiguración. En primer lugar, se ha estudiado la influencia que los cambios en el valor de la permitividad dieléctrica en el interior de las estructuras filtrantes pueden tener en la respuesta de las mismos. En particular, se desarrollan filtros alternando secciones de línea con y sin dieléctrico dentro de una SIW vacía, Empty Substrate Integrated Waveguide (ESIW). Una vez hecho esto, se procede al estudio de materiales que tengan un valor de permitividad dieléctrica variable de alguna forma. En concreto, se ha realizado la caracterización de diferentes mezclas de cristal líquido a la frecuencia de microondas. Dicho material cambia su valor de permitividad cuando se le aplica un campo eléctrico o magnético. Dado que para la reconfiguración de la respuesta de los filtros se requiere de una estructura desacoplada en baja frecuencia, es decir, con más de un conductor, se ha desarrollado una estrategia para el desacoplo de la estructuras ESIW, la tecnología Decoupled Empty Substrate Integrated Waveguide (DESIW). Por último, se han diseñado resonadores en dicha tecnología DESIW, que se han llenado de cristal líquido y aplicado unos campos de polarización, consiguiendo variar su respuesta en frecuencia. Dichos resonadores constituyen el elemento básico para el desarrollo de filtros de microondas. Es por ello que el conocimiento obtenido en la Tesis es una buena base para futuros trabajos esta tecnología que permitan conseguir filtros de altas prestaciones.
[CAT] La quantitat de serveis de telecomunicació s'ha incrementat significativament en les últimes dècades. L'ús de telèfons intel$\cdot$ligents, així com la internet de les coses, està generant una saturació de l'espectre electromagnètic. Per tant, els requisits dels sistemes de microones han canviat per a adaptar-se a aquests nous avanços. Per a satisfer aquestes necessitats, se cerca el desenvolupament de dispositius de baix cost, volum, pes i consum. A més, interessa que siguen espectralment eficients i fàcilment integrables amb altres dispositius. Entre tots els dispositius de microones, els filtres són elements clau dins dels sistemes de comunicacions mòbils i sense fil. És per això que el disseny de filtres que complisquen els requisits esmentats s'ha convertit en un tema de gran interès. Per a donar resposta a aquest problema ha sorgit la tecnologia de Guia d'Ona Integrada en Substrat (Substrate Integrated Waveguide (SIW)), que permet la implementació de filtres amb una reduïda grandària i fàcilment integrables amb altres dispositius en tecnologia planar. Aquesta tecnologia presenta unes prestacions quant a maneig de potència i pèrdues millors que la tecnologia de circuit imprès (Printed Circuit Board (PCB)), encara que no arriben a ser iguals que les de la guia d'ona clàssica. D'altra banda, la saturació espectral també porta a l'estudi de filtres amb respostes variables en freqüència, és a dir, que puguen canviar la seua freqüència central i l'amplada de banda amb la finalitat d'adaptar-se a les necessitats del sistema. Per això, l'objectiu general d'aquesta tesi és l'anàlisi i el disseny de nous filtres reconfigurables en tecnologia integrada. El treball comença amb l'estudi dels fonaments dels filtres de microones, fins a arribar al disseny de ressonadors reconfigurables en tecnologia SIW usant el cristall líquid com a material de reconfiguració. En primer lloc, s'ha estudiat la influència que els canvis en el valor de la permitivitat dielèctrica a l'interior de les estructures filtrants poden tenir en la resposta d'aquestes. En particular, es desenvolupen filtres que alternen seccions de línia amb dielèctric i sense dins d'una SIW buida, Empty Substrate Integrated Waveguide (ESIW). Una vegada fet això, es procedeix a l'estudi de materials que tinguen un valor de permitivitat dielèctrica variable d'alguna forma. En concret, s'ha realitzat la caracterització de diferents mescles de cristall líquid a la freqüència de microones. Aquest material canvia el seu valor de permitivitat quan se li aplica un camp elèctric o magnètic. Atès que per a la reconfiguració de la resposta dels filtres es requereix una estructura desacoblada en baixa freqüència, és a dir, amb més d'un conductor, s'ha desenvolupat una estratègia per al desacoblament d'estructures ESIW, la tecnologia Decoupled Empty Substrate Integrated Waveguide (DESIW). Finalment, s'han dissenyat ressonadors en aquesta tecnologia DESIW, que s'han omplit de cristall líquid i aplicat uns camps de polarització, i s'ha aconseguit variar la seua resposta en freqüència. Aquests ressonadors constitueixen l'element bàsic per al desenvolupament de filtres de microones. És per això que el coneixement obtingut en la tesi és una bona base per a futurs treballs d'aquesta tecnologia que permeten aconseguir filtres d'altes prestacions.
[EN] The number of telecommunication services has increased significantly in recent decades. The use of smartphones, as well as the Internet of Things, is generating a saturation of the electromagnetic spectrum. Therefore, the requirements of microwave systems have changed to adapt to these new developments and related challenges. For achieving these needs, the development of devices with low cost, volume, weight and power consumption is sought. In addition, it interests to be spectrally efficient, to offer high performance, and to be easily integrated with other devices. Among all microwave devices, filters are key elements within mobile and wireless communication systems. In this context, the design of filters that meet the aforementioned requirements has become a topic of great interest. For solving this problem, Substrate Integrated Waveguide (SIW) technology has emerged, which allows the implementation of filters with a small size and to be easily integrated with other devices in planar technology. This technology has better power handling and loss performance than Printed Circuit Board (PCB) technology, although they do not have the performance of the classic waveguide counterpart. On the other hand, the spectral saturation also leads to the study of filters with tunable frequency response, that is, they can change their central frequency and bandwidth, in order to fulfil the changing system requirements. Therefore, the general objective of this PhD Thesis work is the analysis and design of new reconfigurable filters in integrated technology. The work begins with the study of the basics of microwave filters until the design of reconfigurable resonators in SIW technology, using Liquid Crystal (LC) as reconfiguration material. Firstly, the influence that the change of the dielectric permittivity value inside the filtering structures have on the frequency response has been studied. Particularly, filters have been obtained by alternating line sections with and without dielectric material inside an empty SIW (Empty Substrate Integrated Waveguide (ESIW)). Once this is done, it is proceed to the study of materials that have a variable dielectric permittivity value. Specifically, the characterization of different LC mixtures at microwave frequencies has been carried out. This material changes its permittivity value when an electric or magnetic bias field is applied. A low-frequency decoupled structure is required for the reconfiguration of filters, that is, structures with more than one conductor. For that, a strategy for decoupling ESIW structures has been developed, i.e, the Decoupled Empty Substrate Integrated Waveguide (DESIW) technology. Finally, some resonators have been designed in DESIW technology, which have been filled with LC. The use of LC allows to tune their frequency response. These resonators are basic elements for the development of microwave filters. So that, the knowledge obtained in this Thesis work is a good basis for future works in this technology that allow for achieving high performance filters.
Sánchez Marín, JR. (2019). Reconfigurable Devices using Liquid Crystal at Microwave Frequencies in Substrate Integrated Waveguide [Tesis doctoral no publicada]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/132183
TESIS