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Journal articles on the topic 'Intellisuite'

Author: Grafiati

Published: 5 June 2025

Last updated: 1 August 2025

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1

Jian, Qi Xia, Jun Wang, Kai Yuan, Zi Qiu Peng, and Ya Dong Jiang. "Simulation of Micro-Bolometer Using Double Sacrificial Layers Structure." Applied Mechanics and Materials 120 (October 2011): 504–9. http://dx.doi.org/10.4028/www.scientific.net/amm.120.504.

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Micro-bolometer using double sacrificial layers with smaller pixel size and higher resolution has been a new trend for microbolometers. Optical design and simulation of microbolometer with double sacrificial layers were analyzed in this article. Also, the manufacture, test and optimization of doule layer structure were discussed. The micro-bolometer cell structure models were constructed and simulated with Intellisuite software. The devices with and without umbrella structure were compared in this paper. The models of different structure and manufacture conditions were simulated with Intellisu

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2

Dr., Shanmugavalli. M., G. Vignesh., R. Harish., Nesan. G. Nicolas, and Kumar. J. Parithi. "Design and Simulation of Piezoresistive Pressure Sensor using Intellisuite." International Journal of Multidisciplinary Research Transactions 5, no. 5 (2023): 27–37. https://doi.org/10.5281/zenodo.7868910.

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The Piezoresistive Pressure Sensor given in this study describes the best methods for enhancing the sensor's performance. To get findings that are roughly equivalent to theoretical values, finite element analysis is used as part of the design process. The size, shape, and position of the piezo resistors are taken into account during the simulation. The piezo resistors, which are coupled in the shape of a Wheatstone bridge, convert the applied pressure into electricity. By choosing the appropriate membrane geometry and piezo resistor placement, the sensitivity of the sensor can be increased

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3

Srikanth, S. Sri Surya, B. Rajesh Kumar, V. Suresh, V. Jyothi, I. Sreenivasa Rao, and G. Aswani Kumar. "Design of MEMS Cantilever Sensors for Identification of VOCs Using IntelliSuite." Materials Today: Proceedings 22 (2020): 3162–70. http://dx.doi.org/10.1016/j.matpr.2020.03.453.

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4

Dou, Yan Wei, Cheng Jun Qiu, Bo Zang, Jing Xuan Wang, and Xiao Dong Zhang. "Design and Simulation of Thermopile Sensor Technology Based on Porous Silicon." Applied Mechanics and Materials 741 (March 2015): 289–93. http://dx.doi.org/10.4028/www.scientific.net/amm.741.289.

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Thermopile sensor using porous silicon (PS) as thermal isolation layer was designed. Thermal stability and mechanical property of sensor were simulated by IntelliSuite CAD software. Analysis results showed stress and temperature distribution of PS layer. Ansys simulation indicated that thermocouple’s thermoelectromotive force was decided by its material composition. If thermocouple was composed of polycrystalline silicon/aluminum, its thermoelectromotive force would reach 256.8 μV/K.

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5

Sindhanaiselvi, D., R. Ananda Natarajan, and T. Shanmuganantham. "Performance Analysis of Sculptured Diaphragm for Low Pressure MEMS Sensors." Applied Mechanics and Materials 592-594 (July 2014): 2193–98. http://dx.doi.org/10.4028/www.scientific.net/amm.592-594.2193.

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Sculptured or Bossed diaphragm is a specialized geometry with rigid center or boss. This paper presents the outcome of design approaches of sculptured diaphragm structure for low pressure applications. The simulation results are obtained using Intellisuite MEMS CAD design tool. The results indicate that sculptured diaphragm are designed with minimum thickness, compensating the large (a/h) ratio with local stiffening by means of rigid center and better linearity. Further, the maximum stress regions are analyzed for fixing the position of the piezoresistor. Finally, the sensitivity is improved b

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Gomathi, K., A. Senthil Kumar, and M. Raghunath. "Design and Analysis of Micro Accelerometer for Tool Condition Monitoring." Applied Mechanics and Materials 787 (August 2015): 932–36. http://dx.doi.org/10.4028/www.scientific.net/amm.787.932.

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Tool condition monitoring plays a huge role in the CNC machines in which it is used to avoid the breakage of the tools.In this paper area changed capacitive micro accelerometer is designed to measure the vibration exposure of the tool on various applications in the CNC machines. The design process and simulation of the Micro accelerometer are done using INTELLISUITE 8.6. The rectangular folded beamis designed to reduce the residual stress and to obtain a better sensitivity. Static and dynamic analysis shows that sensitivity of the designed capacitive accelerometer is good enough to detect the

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7

Yu, Lei, Jun Wang, Kai Yuan, and Chong Wang. "Three Dimension Thermal and Mechanical Simulation of Microbolometer to Detect Terahertz Wave." Advanced Materials Research 605-607 (December 2012): 2039–44. http://dx.doi.org/10.4028/www.scientific.net/amr.605-607.2039.

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The teraherz (THz) wave in the far-infrared wave band has been showing its value in many areas in life. The detection of THz wave with microbolometer was simulated in this paper. The thermal and mechanical simulation were carried out by Intellisuite, a professional simulation software of MEMS. The influence of micro-bridge structure on the device performance was studied and simulation results showed that the bridge leg shape and width affected mainly on the thermal and mechanical properties of device. A compromise design between the thermal and mechanical properties was obtained in order to ma

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8

Ayatollahi, Fatimah Lina, and Burhanuddin Yeop Majlis. "Materials Design and Analysis of Low-Power MEMS Microspeaker Using Magnetic Actuation Technology." Advanced Materials Research 74 (June 2009): 243–46. http://dx.doi.org/10.4028/www.scientific.net/amr.74.243.

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This paper presents material properties of a micromachined mesoscopic acoustic speaker for hearing aid applications. The microspeaker has a single turn copper coil on a polyimide membrane, and an NdFeB permanent magnet beneath the membrane. The fields due to the permanent magnet were computed using FEMM. Then, forces based on the fields and on the coil driving current were computed. Finally, IntelliSuite was employed to simulate membrane displacements and stresses. The device, with a polyimide membrane diameter of 2.5 mm and thickness of 2 µm, consumes 3.4 mW to generate a sound pressure level

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9

Biswas, Bikram, Sutanni Bhowmick, Anup Dey, Subhashis Roy, and Subir Kumar Sarkar. "Capacitive Multilayered Bio-Sensor Based on Dielectric Modulation Towards Sensing of Biomolecules." Sensor Letters 17, no. 9 (2019): 701–3. http://dx.doi.org/10.1166/sl.2019.4129.

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In this paper, we propose a multilayered capacitive biosensor and evaluate the feasibility of using capacitance as a metric for sensing target biomolecules. The structure has been modeled using the IntelliSuite software. Consideration of distinct values of dielectric constants for different biomolecules makes it a suitable parameter for capacitive biosensor applications. The structure consists of nanogap cavities that act as the sensing sites. The concept of dielectric modulation has been employed for detecting the change in capacitance due to change in the dielectric constant of the cavity. W

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10

Khan, Fahimullah, Yong Zhu, Jun Wei Lu, and Dzung Dao. "Design Optimization of MEMS Based LLC Tunable Resonant Converter for Power Supplies on Chip." Advanced Materials Research 705 (June 2013): 258–63. http://dx.doi.org/10.4028/www.scientific.net/amr.705.258.

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In this paper, a novel MEMS based LLC converter is proposed for on chip power supplies. The design is optimized based on commercially available Metal MUMPs process for fabrication. The resonant frequency is optimized at 20MHz and MEMS based variable capacitor is fabricated on the chip to tune the peak resonance frequency of circuit which varies due to the load variations. The Design is simulated in FEM based numerical software COMSOL and Intellisuite. According to analysis the magnetizing inductance of 42nH and leakage inductance of 40nH has been achieved from 16 mm2 rectangular coil transform

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11

Chen, Chao, Ya Dong Jiang, and Hong Xi Zhou. "The Thermal Conductance Estimation of Uncooled Microbolometer." Key Engineering Materials 531-532 (December 2012): 477–80. http://dx.doi.org/10.4028/www.scientific.net/kem.531-532.477.

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Thermal conductance of microbolometer has a directly impact on Noise Equivalent Temperature Difference (NETD) and thermal time constant which are the key indicators of uncooled IR detector. It is of great significance to calculate and evaluate thermal conductance. A calculate approach of thermal conductance for uncooled microbolometer detectors is introduced in this paper. Accurate three-dimensional modeling of microbolometer is found by using MEMS analysis software Intellisuite. Dynamic thermal analysis of this model is solved and then thermal time constant can be read from thermal time curve

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12

Ravindran, Ajith. "SSCS Saintgits Student Chapter Holds Workshop on Modeling and Simulation of MEMS Using Intellisuite Software [Chapters]." IEEE Solid-State Circuits Magazine 9, no. 4 (2017): 117–18. http://dx.doi.org/10.1109/mssc.2017.2746174.

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13

Iqbal, Abid, Faisal Mohd-Yasin, and Sima Dimitrijev. "Design Optimization and Finite Element Analysis of 3C-SiC Bio-Sensors Based on Dogbone Resonator." Applied Mechanics and Materials 595 (July 2014): 221–27. http://dx.doi.org/10.4028/www.scientific.net/amm.595.221.

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This paper presents the optimized design and Finite Element Analysis (FEA) of a bio sensor based on cubic silicon carbide (3C-SiC) for pathogen detection. Silicon Carbide is chosen due to its excellent material properties and chemical stability compared to silicon in varying environmental conditions. The desired resonance frequency is optimized using matlab and the finite element analysis is carried out using COMSOL and Intellisuite software’s. The effect of the residual stress on the desired mode of resonant frequency and the fabrication feasibility of the proposed resonator fabrication are s

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14

Khairul Adly, A. W., Y. Wahab, A. Y. M. Shakaff, and Mazlee Mazalan. "Consideration of Factors Towards Lowering the Natural Frequency of MEMS Based Cantilever Structure: Top Mass versus Back Etch Design." Applied Mechanics and Materials 780 (July 2015): 39–44. http://dx.doi.org/10.4028/www.scientific.net/amm.780.39.

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The ability to self-energize wireless sensor node promote the popularity of energy harvesting technique especially by using ambient vibration as the source of energy. In addition, the successful integration of the energy harvesting element on the same wafer as a wireless sensor node will promote the production in the MEMS scale and will reduce the overall cost of production. The usage of the cantilever structure as the transducer for converting mechanical energy (vibration) due to deflection of cantilever into the electrical energy is possible by depositing piezoelectric material on the cantil

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15

Kalaiarasi, A. R., and Thilagar S. Hosimin. "Performance Enhancement of Electrostatically Actuated Microgripper with Modified Fingers for Microassembly." Advanced Materials Research 622-623 (December 2012): 1810–14. http://dx.doi.org/10.4028/www.scientific.net/amr.622-623.1810.

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The application of microgrippers for handling and assembling micro parts in the field of robotics attracts more attention by the growth in micro electro mechanical systems. In this paper an electrostatic microgripper using comb drive is designed and analyzed using IntelliSuite. The use of modified fingers in the combdrive amplifies the output displacement of microgripper for given supply voltage. It also provides a linear force displacement behavior over a range of displacement. To show this amplification, finite element simulations are performed on the proposed design of microgripper models.

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16

Gomathi, Kumar, Arunachalam Balaji, and Thangaraj Mrunalini. "Design and optimization of differential capacitive micro accelerometer for vibration measurement." Journal of the Mechanical Behavior of Materials 30, no. 1 (2021): 19–27. http://dx.doi.org/10.1515/jmbm-2021-0003.

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Abstract This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type

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17

SWARRUP, J. SAKTHI, and V. VELMURUGAN. "MODELING OF MICRO-ELECTRO MECHANICAL SYSTEMS BASED CANTILEVER BEAM AS BIOSENSOR FOR C-REACTIVE PROTEIN." International Journal of Nanoscience 10, no. 04n05 (2011): 797–801. http://dx.doi.org/10.1142/s0219581x11008812.

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Micro fabricated cantilever beam smart immunosensor was modeled using "Intellisuite" software to detect nanogram level antigen. The FEM simulations were carried out with immunoglobulin antibody, IgG for the detection of C -reactive protein. The effect of geometry of the cantilever beam with different number of holes and thickness of Si piezo resistive-patch on the sensor performance and signal transduction was studied. The effect of nature of Si and CNT piezo resistive-patch on the sensor performance was also investigated. Considering the response of stress and sensitivity, CNT piezo resistive

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18

Iqbal, Sohail, Afzaal Malik, and Rana I. Shakoor. "Kinematic sensitivity analysis of a novel micro-mechanism for displacement amplification." Transactions of the Canadian Society for Mechanical Engineering 42, no. 4 (2018): 436–43. http://dx.doi.org/10.1139/tcsme-2017-0149.

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This research article presents the design and analysis of a displacement amplification mechanism based on a microelectromechanical system (MEMS). The mechanism, compared to generic displacement mechanisms, is smaller and capable of amplifying input displacement by a factor of 6.8. Finite element analysis (FEA) is performed with commercial software Intellisuite using the extended finite element method (XFEM) technique to verify the analytical results from mathematical models. Kinematic response and kinematic sensitivity analysis of the amplification mechanism are computationally carried out to

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19

Kumar, Shashi, Pradeep Kumar Rathore, Brishbhan Singh Panwar, and Jamil Akhtar. "Development of a current mirror-integrated pressure sensor using CMOS-MEMS cofabrication techniques." Microelectronics International 35, no. 4 (2018): 203–10. http://dx.doi.org/10.1108/mi-05-2017-0022.

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Purpose This paper aims to describe the fabrication and characterization of current mirror-integrated microelectromechanical systems (MEMS)-based pressure sensor. Design/methodology/approach The integrated pressure-sensing structure consists of three identical 100-µm long and 500-µm wide n-channel MOSFETs connected in a resistive loaded current mirror configuration. The input transistor of the mirror acts as a constant current source MOSFET and the output transistors are the stress sensing MOSFETs embedded near the fixed edge and at the center of a square silicon diaphragm to sense tensile and

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20

Arpana, Niranjan, and Gupta Pallavi. "Modeling and Simulation Software in MEMS Design." International Journal of Engineering and Advanced Technology (IJEAT) 9, no. 3 (2020): 2501–6. https://doi.org/10.35940/ijeat.C5770.029320.

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Micro-Electro-Mechanical Systems (MEMS) is a process technology that combines mechanical and electrical components to make micro-scale range devices. A considerable cost of the device can be reduced if we simulate the design. There are many available simulation software to choose from, which in turn is one of the major challenge. The paper explores the functional and technical features of some software used in MEMS designing. It further presents the key points which we should acknowledge while selecting software. Basic features are available in all MEMS Simulation software. However, if the des

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21

Li, Yan, and Pei Yu Zhang. "Study on Mechanical Properties for Modeling and Simulation of Microneedles for Medical Applications." Applied Mechanics and Materials 454 (October 2013): 86–89. http://dx.doi.org/10.4028/www.scientific.net/amm.454.86.

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A MEMS Microneedle Array was modeled, designed and simulated. The mechanical properties of the microneedle structure were theoretically analyzed including analysis of fracture strength and distribution of von mises stress. The conditions of initial insertion and after initial insertion were considered. The detail linear and nonlinear buckling analyses on needle structure were also presented. Two modes of buckling were come to and discussed. The fabrication of microneedle array was simulated by employing Intellisuate and bi-mask technique. The microneedle array can be used in microsystem for in

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22

Sangeetha, P., and A. Vimala Juliet. "Simulation of MEMS Cantilever Biosensor and Analysis of Readout Methods for Tuberculosis Detection." Applied Mechanics and Materials 376 (August 2013): 428–33. http://dx.doi.org/10.4028/www.scientific.net/amm.376.428.

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This paper deals with designing a MEMS cantilever which can function as biosensor for tuberculosis detection. In this study we investigate the MEMS based biosensor to detect Tuberculosis based on capacitive sensing, peizoresistive and resonant frequency methods. We also examine which method has enhanced performance. Early detection and treatment of diseases can facilitated only if we are able to detect pathogenic and physiologically relevant molecules in the body with high sensitivity and specificity.Early detection of diseases reduce the risk of patients being pushed to advanced stages of man

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23

Vidhya, Sree, Gideon Praveen Kumar, and Lazar Mathew. "Microcantilever Based Microdiagnostic Kit for Biomedical Applications: A Cost-Benefit Outlook." Journal of Nanotechnology in Engineering and Medicine 1, no. 3 (2010). http://dx.doi.org/10.1115/1.4001790.

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Piezoresistive actuation of a microcantilever induced by biomolecular binding such as DNA hybridization and antibody-antigen binding is an important principle useful in biosensing applications. As the magnitude of the forces exerted is small, increasing the sensitivity of the microcantilever becomes critical. In this paper, we are considering to achieve this by geometric variation of the cantilever. The sensitivity of the cantilever was improved so that the device can sense the presence of the antigen even if the magnitude of surface stresses over the microcantilever was very small. We conside

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24

Vidhya, Sree, Gideon Praveen Kumar, and Lazar Mathew. "Design and TEM Simulation of a MEMS Based Microcantilever Cardiac Marker Sensor." Journal of Nanotechnology in Engineering and Medicine 1, no. 1 (2009). http://dx.doi.org/10.1115/1.3212821.

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Piezoresistive actuation of a microcantilever induced by biomolecular binding such as DNA hybridization and antibody-antigen binding is an important principle useful in biosensing applications. As the magnitude of the forces exerted is small, increasing the sensitivity of the microcantilever becomes critical. In this paper, we are considering to achieve this by geometric variation in the cantilever. The sensitivity of the cantilever was improved so that the device can sense the presence of antigen even if the magnitude of surface-stresses over the microcantilever was very small. We consider a

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25

Yusof, Norliana, Norhayati Soin, and Abdullah C. W. Noorakma. "SIMULATION STUDY OF CONVEX CORNER UNDERCUTTING IN KOH AND TMAH FOR A MEMS PIEZORESISTIVE ACCELEROMETER." Jurnal Teknologi 78, no. 6 (2016). http://dx.doi.org/10.11113/jt.v78.4914.

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Undercutting is a common problem in wet anisotropic etching. This problem in turn, influences the performance and sensitivity of MEMS devices. This paper investigates the use of corner compensation to prevent convex corner undercutting in a MEMS piezoresistive accelerometer. The Intellisuite CAD simulation software was used for designing the mask with corner compensation and for analysing wet anisotropic etching profiles in potassium hydroxide (KOH) and tetra-methyl-ammonium-hydroxide (TMAH) solutions at different concentrations and temperatures. Perfect 90 degrees corners on the proof mass wa

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26

Manoharan, P. A., and D. Nedumaran. "Modeling-Simulation and Analysis of MEMS Capacitive Millibar Pressure Sensor." Journal of Nanotechnology in Engineering and Medicine 1, no. 4 (2010). http://dx.doi.org/10.1115/1.4002320.

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Design and simulation of MEMS based capacitive sensor with doubly supported serpentine meander structure for millibar pressure applications proposed in this work is analyzed using INTELLISUITE™ and NISA™ softwares. In this model, microsensing membrane (MSM) is simulated using gold, silicon, and platinum materials of 1 μm and 2 μm thickness. This model has the incorporation to study the sensitivity and spring constant of the support structures for different boundary conditions. The model is validated in terms of virtual force method and finite element method. The design performance of the model

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27

Gomathi, K., S. Sathiyavathi, A. Tony Thomas, and V. Arunkumar. "An experimentation of hand–arm tremor control using low-g area-changed capacitive micro-accelerometer." Transactions of the Institute of Measurement and Control, July 25, 2024. http://dx.doi.org/10.1177/01423312241257812.

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This paper aims to measure the human hand tremor caused by handheld device using a low-g micro-accelerometer. A novel low-g area-changed differential capacitive micro-accelerometer is designed and analyzed using microproduct design software INTELLISUITE 8.6. Thermo-electro-mechanical analysis is conducted for applied acceleration within the low-g range spans between 0 and 10 g. Existing design performances such as displacement and sensitivity are compared with new proposed design. The sensitivity of micro-accelerometer is improved by using U-shaped spring. The designed micro-accelerometer is u

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28

B., G. Sheeparamatti, and S. Kadadevarmath J. "Electrical Equivalent Analysis of Micro Cantilever Beams for Sensing Applications." November 1, 2015. https://doi.org/10.5281/zenodo.1110479.

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Microcantilevers are the basic MEMS devices, which can be used as sensors, actuators and electronics can be easily built into them. The detection principle of microcantilever sensors is based on the measurement of change in cantilever deflection or change in its resonance frequency. The objective of this work is to explore the analogies between mechanical and electrical equivalent of microcantilever beams. Normally scientists and engineers working in MEMS use expensive software like CoventorWare, IntelliSuite, ANSYS/Multiphysics etc. This paper indicates the need of developing electrical equiv

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29

Tokranova, Natalya, Xiaojun Feng, Steve Olson, Tang Tang, Bai Xu, and James Castracane. "Fabrication of MEMS Devices with Macroporous Silicon Membrane Embedded with Modulated 3D Structures for Optimal Cell Sorting." MRS Proceedings 752 (2002). http://dx.doi.org/10.1557/proc-752-aa14.6.

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Macroporous silicon is a type of porous silicon that has ordered arrays of channels with high aspect ratio. Macroporous silicon with ordered 3-D structures have a variety of applications such as filters for a particle separation, photonic crystals and optical shortpass filters because of their spatially periodic structures [1–3]. These structures can be prepared by the electrochemical etching (ECE) of silicon wafers in hydrofluoric acid (HF). We report here a way to fabricate macroporous silicon membranes with ordered 3D structures that have controlled periodicity and dimensions appropriate fo

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30

Taherian, Sina, and Ehsan Gholinataj-Jelodar. "Structural Design and Analytical Study of a New PoliSilicon Tunable Micro Actuator for Measurement of Different Resonance Frequencies." Engineering Research Express, June 22, 2023. http://dx.doi.org/10.1088/2631-8695/ace0f7.

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Abstract This paper presents a novel MEMS tunable resonator based on a comb drive resonator design inspired by the folded beam structure. The standard folded-beam suspension is often used in electrostatic comb-drive resonators to achieve a system with a linear response and reduce the stiffness of the structure. The proposed design has eight zigzag shaped meander springs supporting the set of comb fingers structure, with two anchors in the middle of the device. The initiative of this design is to add zigzag shaped nested-folded beam suspensions to the comb parts, which reduces the applied tunin

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31

Yuan, Ye, Sina Taherian, and Ehsan Gholinataj-Jelodar. "Design and simulation of a tunable comb-drive actuator with a wide frequency tuning range and low pull-in voltage." Physica Scripta, January 26, 2024. http://dx.doi.org/10.1088/1402-4896/ad2322.

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Abstract The presented paper describes the design, simulation, and analysis of a novel tunable comb-drive actuator that aims to increase the range of tuning resonance frequency while reducing the pull-in voltage. The conventional comb resonator has a limited resonant frequency tuning range, and hence, modifying the spring stiffness of the structure is crucial to obtain a tunable comb resonator. The proposed design includes eight flexible beams on each side that support a set of comb finger parts. The actuator achieves the goal of shifting the resonance frequency both downwards and upwards by u

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32

Vidhya, S., and L. Mathew. "Effects of Design Parameters on the Sensitivity of a Micro-Cantilever Based Biosensor." Journal of Medical Devices 3, no. 2 (2009). http://dx.doi.org/10.1115/1.3136843.

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Piezo-resistive actuation of a microcantilever induced by biomolecular binding such as DNA hybridization and antibody-antigen binding is an important principle useful in biosensing applications. As the magnitude of the forces exerted is small, increasing the sensitivity of the microcantilever becomes critical. In this paper, we are considering to achieve this by geometric variation of the cantilever. The sensitivity of the cantilever was improved so that the device can sense the presence of antigen even if the magnitude of surface-stresses over the microcantilever was very small. We consider a

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