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Dissertations / Theses on the topic 'Ion-Beam-Assisted Deposition'

Author: Grafiati

Published: 4 June 2021

Last updated: 9 February 2022

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1

Shedd, Gordon M. 1954. "Focused ion beam assisted deposition of gold." Thesis, Massachusetts Institute of Technology, 1986. http://hdl.handle.net/1721.1/14947.

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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Nuclear Engineering, 1986.<br>MICROFICHE COPY AVAILABLE IN ARCHIVES AND SCIENCE.<br>Bibliography: leaves 75-76.<br>by Gordon M. Shedd.<br>M.S.

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2

Funatsu, Jun. "Laser-assisted focused-ion-beam-induced deposition of copper." Thesis, Massachusetts Institute of Technology, 1994. http://hdl.handle.net/1721.1/32617.

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3

Ressler, Kevin Glenn. "Ion beam assisted deposition of biaxially aligned oxide thin films." Thesis, Massachusetts Institute of Technology, 1996. http://hdl.handle.net/1721.1/10601.

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4

McKinty, Colin N. "Characterisation of beta-FeSi2 fabricated by ion beam assisted deposition." Thesis, University of Surrey, 2001. http://epubs.surrey.ac.uk/842704/.

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beta-FeSi2 has been shown to have a minimum direct band gap of 0.87 eV, which leads to the opportunity of Si based opto-electronics. One of the many applications that beta-FeSi2 has been linked with is solar cells. Its proposed suitability for solar cell applications originates from a large absorption coefficient above the fundamental edge (105 cm-1), predicted solar cell efficiencies as high as 23% and photoelectric properties with a quantum efficiency of 32%. Ion beam assisted deposition represent a technique that is suitable for producing low cost material over large areas, thus making it s

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5

HAYASHI, Toshiyuki, Akihito MATSUMURO, Tomohiko WATANABE, Toshihiko MORI, Yutaka TAKAHASHI, and Katsumi YAMAGUCHI. "Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition." The Japan Society of Mechanical Engineers, 2001. http://hdl.handle.net/2237/9037.

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6

Longo, Angela Sue. "Preparation of biaxially aligned cubic zirconia and ceria films on glass substrates using ion-beam assisted deposition." Thesis, Massachusetts Institute of Technology, 1994. http://hdl.handle.net/1721.1/12314.

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7

Urbánek, Ivan. "Modernizace aparatury IBAD." Master's thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2008. http://www.nusl.cz/ntk/nusl-228242.

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This thesis is divided into three main parts dealing with ion beam assisted deposition. In the first part there is a brief description of the IBAD chamber at Institute of Physical Engineering of BUT. There is also a detailed description of control of the IBAD apparatus during deposition. Next part deals with measuring of deposition rates of ion sputtering in order to refine deposition of thin layers. Last part deals with planned and already finished changes that should improve quality and speed of thin layers deposition. Changes include the option of covering the substrate holder, change of th

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8

Inoue, Shinichiro. "Ion assisted methods of deposition of SiC." Thesis, University of Salford, 1996. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.308174.

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9

Santos, Thales Borrely dos. "Controle de propriedades de filmes finos de óxido de alumínio através da assistência de feixe iônico." Universidade de São Paulo, 2017. http://www.teses.usp.br/teses/disponiveis/43/43134/tde-03062017-212721/.

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Este trabalho tem por objetivo a caracterização de filmes finos de óxido de alumínio produzidos por deposição assistida por feixe de íons Ar+. Tal caracterização consiste em estabelecer a relação entre os parâmetros de produção (energia do feixe e uxo relativo de Ar), a composição e a estrutura dos lmes. Para tanto, utiliza-se técnicas de microscopia de força atômica, difração de raios-x, reetividade de raios-x e análise por feixe iônico. Resultados mostram que amostras produzidas à temperatura ambiente e à 450 oC são amorfas independentemente da energia do feixe iônico. Filmes formados com as

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10

Paredez, Angeles Pablo Jenner. "Preparação e caracterização de nanoestruturas de carbono contendo nitrogênio." [s.n.], 2007. http://repositorio.unicamp.br/jspui/handle/REPOSIP/277732.

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Orientador: Fernando Alvarez<br>Tese (doutorado) - Universidade Estadual de Campinas, Instituto de Fisica Gleb Wataghin<br>Made available in DSpace on 2018-08-09T10:47:17Z (GMT). No. of bitstreams: 1 ParedezAngeles_PabloJenner_D.pdf: 4194390 bytes, checksum: 8881d83ee8bcb5a5ad4bfb23b7ff1028 (MD5) Previous issue date: 2007<br>Resumo: Nesta tese são apresentados os efeitos nas propriedades estruturais, eletrônicas e de emissão eletrônica por efeito de campo elétrico induzidos pela incorporação de nitrogênio em nanoestruturas de carbono. As nanoestruturas de carbono contendo nitrogênio foram pr

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11

Duris, Maxime. "Conception et réalisation de filtre optique multicouche à grand nombre de couches minces dans le domaine spectral de 0,3 à 15 µm." Thesis, Rennes 1, 2020. https://ged.univ-rennes1.fr/nuxeo/site/esupversions/f003f6e9-b485-44df-92bc-46b0ed838e2f.

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Les filtres optiques à grand nombre de couches minces constituent un élément clé de la performance et de l’innovation des systèmes optiques. Les revêtements de surface dédiés à l’optique sont des vecteurs de recherche dans tous les secteurs industriels associés à l’optique. La conception et la réalisation des filtres optiques multicouches à grand nombre de couches minces opérant dans le moyen infrarouge de 2 µm à 15 µm sont la problématique de recherche de ces travaux de thèse. Dans cette thèse, l’accent a été mis sur l’étude, le déploiement, l’amélioration et l’optimisation des procédures de

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12

Lee, Kue-Ih, and 李奎毅. "The Growth of Diamondlike Films by Ion-Beam Assisted Deposition." Thesis, 1996. http://ndltd.ncl.edu.tw/handle/87774386685396444030.

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13

Lu, Meng-Jen, and 盧盟仁. "Low-loss thin film by ion-assisted E-beam deposition." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/43532218931774479844.

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碩士<br>國立中山大學<br>光電工程研究所<br>94<br>Due to the fast expansion and development in the optical communication industry, the demand for the film quality has correspondingly increased. Ion beam sputter deposition (IBSD) achieves the lowest loss, but low throughput. In our Lab., E-beam system was used for CaO, MgO and Cr2O3 evaporation on the circumference of the Cr:YAG crystal fiber. Although the substrate was heated to around 275oC, the thin film didn’t achieve low loss and high laser-induced damage threshold film. Adding ion-beam assisted deposition (IAD) system to enhance the thin film energy and p

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14

Chang, Yi-chien, and 張逸謙. "The research of pulse ion beam-assisted deposition of lanthanum fluoride." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/73753697337725916206.

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碩士<br>國立中央大學<br>光電科學研究所<br>97<br>Thermal boat evaporation was employed to prepare LaF3 single-layer coatings for UV applications. Optical properties and microstructure, including transmittance, index refraction, extinction coefficient, and surface properties, were measured by spectrophotometer, ellipsometric, SEM, and AFM. With pulse mode IAD, we can make lanthanum fluoride thin film to have higher packing density and decrease annoying absorption at wavelength rage190 to 350nm caused by constant IAD. With optimized parameters, refraction index of lanthanum fluoride thin film was raised from 1.

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15

Liu, Yiu-Chi, and 劉又齊. "Research on the photocatalytic of TiO2 films using ion-beam assisted deposition." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/17730572867434664665.

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碩士<br>國立中央大學<br>光電科學研究所<br>96<br>TiO2 has diverse functional application in solar cell, sterilization, degradation of organic pollutants and self-cleaning, however, the photocatalytic activities of titanium dioxide can effectively work only under ultraviolet (UV) light irradiation. In the hydrophilicity experiment, we get better photocatalytic activities films in using ion assisted deposition under anode voltage 40V than without using ion assisted deposition, after the UV light treatment 5 minutes, the contact angle was less than 10 degree. Besides, in the N2 ion assisted deposition experiment

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16

Lian, Cheng-Ting, and 練政廷. "The research of pulse ion beam-assisted deposition of magnesium fluoride thin film." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/73174319995690589616.

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碩士<br>國立中央大學<br>光電科學研究所<br>95<br>The deposition of magnesium fluoride optical thin film by using thermal boat evaporation with pulse ion-assisted deposition (IAD) for UV application was investigated in this thesis. Due to the ion beam assistance, the optical properties and micro-structural properties of the magnesium fluorides thin films, including refractive index, surface roughness were significantly improved which are required in laser material processing and semiconductor lithography.

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17

CHANG, CHE-MING, and 張哲銘. "The Research of Niobium doped Titanium Dioxide Prepared by Electron Beam Evaporation with Ion Beam Assisted Deposition." Thesis, 2017. http://ndltd.ncl.edu.tw/handle/8mtb22.

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碩士<br>國立雲林科技大學<br>電子工程系<br>105<br>Transparent conductive oxide(TCO) with high transmittance and excellent conductivity, It has been widely used as photovoltaic components. Because of the cost of materials is lower than the commonly used indium tin oxide(ITO), niobium doped titanium dioxide(TNO) is a promising transparent conducting oxide material In this study, transparent conductive Nb-doped TiO2 (TNO) thin films were deposited onto glass substrate, using the electron beam gun evaporation method. There are two kinds of penetration way, one is slug type and the other is powder type. Nb-doped T

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18

Tseng, Hsiang-Ming, and 曾祥明. "Characteristics of ZnSe Films Grown by cw CO2 Laser with Ion Beam-assisted Deposition." Thesis, 1998. http://ndltd.ncl.edu.tw/handle/58132523556246512672.

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碩士<br>國立交通大學<br>電子物理系<br>86<br>Znse films were grown on quartzs and GaAs (100) substrates by cw CO2 laser with ion beam-assisted deposition. The films grown on quartz substrates were the zinc-blende polycrystalline structure with a strong preferred [111] orientation, even deposited on room teperature substrates.Without ion beam assistance, the film grown at a substrate temperature 150℃, a growth rate 6.4 A/sec had the best properties which the refractive index was 2, 5218, the extinction coefficient was 0.0016 at 700 nm and the peel strength was 11.44 mN. With ion beam assistance, the film gro

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19

Schumacher, Philipp. "Realization of ion mass and energy selected hyperthermal ion-beam assisted deposition of thin, epitaxial nitride films: characterization and application." 2018. https://ul.qucosa.de/id/qucosa%3A34135.

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20

CHANG, CHE-KAI, and 張哲愷. "Deposition and Characterization of GZO, Cu2O, Ga2O3 Single and Multilayered Thin Films by Ion-Beam-Assisted Deposition (IBAD)." Thesis, 2015. http://ndltd.ncl.edu.tw/handle/7gd5sp.

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碩士<br>明志科技大學<br>材料工程系碩士班<br>103<br>This study included two parts. In the first part, Ga-doped zinc oxide (GZO) and Cu2O thin films were deposited on glass substrates by Ion-Beam-Assisted Deposition (IBAD). The effects of ion beam discharge current and O2/Ar ratio on the structural, optical, and electrical properties of these films were investigated. The optical emission spectra of the applied ion beam were examined using an optical emission spectrometer (OES). The correlation of optical emission and films’ properties was studied. After the analysis of opto-electrical behaviors over the deposit

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21

Yang, Min-Chi, and 楊敏麒. "Ion beam assisted deposition of nitrogen and carbon doped titanium dioxide films as visible light photocatalyst." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/36324055114815585115.

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碩士<br>國立東華大學<br>材料科學與工程學系<br>92<br>Abstract The aim of the study focus on the preparation, nano-structure, analysis and photocatalytic behaviors of nitrogen and carbon doped TiO2 thin films. TiO2-xNx and TiO2-xCx films were prepared with ion gun assisted electron beam evaporation system using 99.9 % rutile TiO2 as a source material. The processing parameters, including nitrogen flow rate, oxygen flow rate, carbon dioxide flow rate, substrate temperature, thickness, beam current and beam voltage, are modulated to obtain the best photocatalytic properties of the films. XRD, Raman and XPS w

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22

HUANG, I.-CHUN, and 黃翊鈞. "The Fabrication of Nano-multilayer of Water Barrier Films by E-Beam Evaporation with Ion Assisted deposition." Thesis, 2019. http://ndltd.ncl.edu.tw/handle/224nmz.

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23

Stout, Brian M. "Synthesis and characterization of diamond-like carbon coatings deposited by plasma source ion implantation and conventional ion beam assisted deposition processes." 1999. http://catalog.hathitrust.org/api/volumes/oclc/42013316.html.

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Thesis (M.S.)--University of Wisconsin--Madison, 1999.<br>Typescript. eContent provider-neutral record in process. Description based on print version record. Includes bibliographical references (leaves 42-44).

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24

Lee, JengYu, and 李政諭. "Photocatalytic Properties Of Carbon/Nitrogen-Doped Titanium Oxide Films Prepared by Ion-Beam Assisted RF Magnetron Sputtering Deposition." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/33157966912876511463.

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碩士<br>輔仁大學<br>物理學系<br>99<br>Carbon/nitrogen-doped titanium oxide films were prepared by ion-beam assisted RF magnetron sputtering deposition. We want to extend the absorption edge of titanium oxide from UV region to visible light region , enhance the function of C/N-doped TiO2 films. 　　The anatase of carbon/nitrogen-doped titanium oxide were prepared at substrate temperature 500℃ in plasmas of CO2 and N2 mixture .The prepared samples were characterized by a series of analytical methods including UV-Vis spectrophotometer , atomic force microscope，X-ray diffraction , X-ray photoelectron spectro

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25

Brewer, Rhett Ty. "Quantitative Biaxial Texture Analysis with Reflection High-Energy Electron Diffraction for Ion Beam-Assisted Deposition of MgO and Heteroepitaxy of Perovskite Ferroelectrics." Thesis, 2004. https://thesis.library.caltech.edu/3160/1/ThesisFinalDefended.pdf.

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<p>To facilitate ferroelectric-based actuator integration with silicon electronics fabrication technology, we have developed a route to produce biaxially textured ferroelectrics on amorphous layers by using biaxially textured MgO templates.</p> <p>Using a kinematical electron scattering model, we show that the RHEED pattern from a biaxially textured polycrystalline film can be calculated from an analytic solution to the electron scattering probability. We found that diffraction spot shapes are sensitive to out-of-plane orientation distributions and in-plane RHEED rocking curves are sensiti

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26

Prakoso, Suhendro Purbo, and 草摩紅葉. "The preparation of p-type tin monoxide (SnO) thin films by ion-beam assisted deposition and its performance in p-n diode device." Thesis, 2016. http://ndltd.ncl.edu.tw/handle/p74279.

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27

Jesenská, Eva. "Studium fyzikálních vlastností metalických nanostruktur s indukovanou magnetickou anizotropií." Master's thesis, 2013. http://www.nusl.cz/ntk/nusl-320998.

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The aim of this thesis is a systematic study of physical properties of magnetic multilayered nanostructures. Namely it include multilayered spin valves NiFe/Cu/Co with magnetic anisotropy iduced by magnetic field applied during the deposition. Induced magnetic anisotropy influences exchange interactions between magnetic layers and so it gives the possibility to control magnetic properties of nanolayers. This is important for applications in MRAM, magnetoresistive read heads and spin-transfer-torque devices. Magnetooptic spectroscopy and Kerr effect hysteresis loop measurement were used as effe

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28

Kautschor, Lars-Oliver. "Mikrostruktur und Wachstum bei der ionenstrahlunterstützten Deposition von Yttrium-stabilisierten Zirkonoxid-Filmen." Doctoral thesis, 2002. http://hdl.handle.net/11858/00-1735-0000-0006-B56A-E.

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29

Thiele, Karola. "Ionenstrahlunterstütztes Wachstum von Zinn-dotierten Indiumoxid-Filmen." Doctoral thesis, 2004. http://hdl.handle.net/11858/00-1735-0000-0006-B553-F.

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