Academic literature on the topic 'Ion lithography'
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Journal articles on the topic "Ion lithography"
Basu, Prithvi, Jyoti Verma, Vishnuram Abhinav, Ratneshwar Kumar Ratnesh, Yogesh Kumar Singla, and Vibhor Kumar. "Advancements in Lithography Techniques and Emerging Molecular Strategies for Nanostructure Fabrication." International Journal of Molecular Sciences 26, no. 7 (2025): 3027. https://doi.org/10.3390/ijms26073027.
Full textVoznyuk G. V., Grigorenko I. N., Mitrofanov M. I., Nikolaev V. V., and Evtikhiev V. P. "Subwave textured surfaces for the radiation coupling from the waveguide." Technical Physics Letters 48, no. 3 (2022): 76. http://dx.doi.org/10.21883/tpl.2022.03.52896.19103.
Full textTsarik, K. A. "Focused Ion Beam Exposure of Ultrathin Electron-Beam Resist for Nanoscale Field-Effect Transistor Contacts Formation." Proceedings of Universities. Electronics 26, no. 5 (2021): 353–62. http://dx.doi.org/10.24151/1561-5405-2021-26-5-353-362.
Full textWATT, F., A. A. BETTIOL, J. A. VAN KAN, E. J. TEO, and M. B. H. BREESE. "ION BEAM LITHOGRAPHY AND NANOFABRICATION: A REVIEW." International Journal of Nanoscience 04, no. 03 (2005): 269–86. http://dx.doi.org/10.1142/s0219581x05003139.
Full textGAMO, Kenji. "Ion beam lithography." Journal of the Japan Society for Precision Engineering 53, no. 11 (1987): 1677–81. http://dx.doi.org/10.2493/jjspe.53.1677.
Full textPuttaraksa, Nitipon, Mari Napari, Orapin Chienthavorn, et al. "Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography." Advanced Materials Research 254 (May 2011): 132–35. http://dx.doi.org/10.4028/www.scientific.net/amr.254.132.
Full textSharma, Ekta, Reena Rathi, Jaya Misharwal, et al. "Evolution in Lithography Techniques: Microlithography to Nanolithography." Nanomaterials 12, no. 16 (2022): 2754. http://dx.doi.org/10.3390/nano12162754.
Full textTejeda, R. O., E. G. Lovell, and R. L. Engelstad. "In-Plane Gravity Loading of a Circular Membrane." Journal of Applied Mechanics 67, no. 4 (2000): 837–39. http://dx.doi.org/10.1115/1.1308581.
Full textHuh, J. S. "Focused ion beam lithography." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 9, no. 1 (1991): 173. http://dx.doi.org/10.1116/1.585282.
Full textLöschner, H. "Projection ion beam lithography." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 11, no. 6 (1993): 2409. http://dx.doi.org/10.1116/1.586996.
Full textDissertations / Theses on the topic "Ion lithography"
Heard, P. J. "Applications of scanning ion beam lithography." Thesis, University of Cambridge, 1985. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.372653.
Full textAlves, Andrew David Charles, and aalves@unimelb edu au. "Characterisation of Single Ion Tracks for use in Ion Beam Lithography." RMIT University. Applied Sciences, 2008. http://adt.lib.rmit.edu.au/adt/public/adt-VIT20080414.135656.
Full textWinston, Donald Ph D. Massachusetts Institute of Technology. "Sub-10-nm lithography with light-ion beams." Thesis, Massachusetts Institute of Technology, 2012. http://hdl.handle.net/1721.1/71495.
Full textPuretz, Joseph. "A theoretical and experimental study of liquid metal ion sources and their application to focused ion beam technology /." Full text open access at:, 1988. http://content.ohsu.edu/u?/etd,182.
Full textLindeberg, Mikael. "High aspect ratio microsystem fabrication by ion track lithography." Doctoral thesis, Uppsala : Acta Universitatis Upsaliensis : Univ.-bibl. [distributör], 2003. http://publications.uu.se/theses/91-554-5515-8/.
Full textYasaka, Anto. "Feasibility study of spatial-phase-locked focused-ion-beam lithography." Thesis, Massachusetts Institute of Technology, 1995. http://hdl.handle.net/1721.1/32663.
Full textTucker, Thomas Marshall. "Three dimensional measurement data analysis in stereolithography rapid prototyping." Thesis, Georgia Institute of Technology, 1997. http://hdl.handle.net/1853/17082.
Full textSager, Benay. "A method for understanding and predicting stereolithography resolution." Thesis, Georgia Institute of Technology, 2003. http://hdl.handle.net/1853/17832.
Full textCybart, Shane A. "Planar Josephson junctions and arrays by electron beam lithography and ion damage." Diss., Connected to a 24 p. preview or request complete full text in PDF format. Access restricted to UC campuses, 2005. http://wwwlib.umi.com/cr/ucsd/fullcit?p3190007.
Full textVaseashta, Ashok K. "Photonic studies of defects and amorphization in ion beam damaged GaAs surfaces." Diss., This resource online, 1990. http://scholar.lib.vt.edu/theses/available/etd-08082007-170507/.
Full textBooks on the topic "Ion lithography"
J, Resnick Douglas, and Society of Photo-optical Instrumentation Engineers., eds. Electron-beam, X-ray, and ion-beam technology: Submicrometer lithographies IX : 7-8 March 1990, San Jose, California. SPIE--the International Society for Optical Engineering, 1990.
Find full textD, Blais Phillip, and International Society for Hybrid Microelectronics., eds. Electron-beam, X-ray, & ion-beam techniques for submicrometer lithographies V: 11-12 March, 1986, Santa Clara, California. SPIE--the International Society for Optical Engineering, 1986.
Find full text1946-, Peckerar Martin Charles, and Society of Photo-optical Instrumentation Engineers., eds. Electon-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing: 6-7 March 1991, San Jose, California. SPIE, 1991.
Find full textD, Blais Phillip, and Society of Photo-optical Instrumentation Engineers., eds. Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V: 11-12 March 1986, Santa Clara, California. SPIE--the International Society for Optical Engineering, 1986.
Find full textE, Seeger David, Society of Photo-optical Instrumentation Engineers., Semiconductor Equipment and Materials International., and SEMATECH (Organization), eds. Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI: 11-13 March 1996, Santa Clara, California. SPIE, 1996.
Find full textO, Patterson David, and Society of Photo-optical Instrumentation Engineers., eds. Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing III: 1-2 March 1993, San Jose, California. The Society, 1993.
Find full textGu, Wenqi. Dian zi shu bao guang wei na jia gong ji shu. Beijing gong ye da xue chu ban she, 2004.
Find full textO, Patterson David, Society of Photo-optical Instrumentation Engineers., and Semiconductor Equipment and Materials International., eds. Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV: 28 February-1 March 1994, San Jose, California. SPIE, 1994.
Find full textInternational Symposium on Electron, Ion, and Photon Beams (2nd 1984 Tarrytown, N.Y.). Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York. Edited by Kelly J, American Vacuum Society, and American Institute of Physics. Published for the American Vacuum Society by the American Institute of Physics, 1985.
Find full textPopov, V. K. Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii. "Radio i svi͡a︡zʹ", 1985.
Find full textBook chapters on the topic "Ion lithography"
Gierak, Jacques. "Focused Ion Beam Direct-Writing." In Lithography. John Wiley & Sons, Inc., 2013. http://dx.doi.org/10.1002/9781118557662.ch4.
Full textStengl, Gerhard, Hans Loschner, Ernst Hammel, Edward D. Wolf, and Julius J. Muray. "Ion Projection Lithography." In Emerging Technologies for In Situ Processing. Springer Netherlands, 1988. http://dx.doi.org/10.1007/978-94-009-1409-4_12.
Full textvan der Drift, Emile, and Diederik J. Maas. "Helium Ion Lithography." In Nanofabrication. Springer Vienna, 2011. http://dx.doi.org/10.1007/978-3-7091-0424-8_4.
Full textStengl, G., H. Löschner, and E. Hammel. "Progress in Ion Projection Lithography." In Physics and Technology of Submicron Structures. Springer Berlin Heidelberg, 1988. http://dx.doi.org/10.1007/978-3-642-83431-8_6.
Full textValiev, Kamil A. "The Physics of Ion-Beam Lithography." In The Physics of Submicron Lithography. Springer US, 1992. http://dx.doi.org/10.1007/978-1-4615-3318-4_4.
Full textRangelow, I. W., and P. Hudek. "Lithography and Reactive Ion Etching in Microfabrication." In Photons and Local Probes. Springer Netherlands, 1995. http://dx.doi.org/10.1007/978-94-011-0423-4_30.
Full textZhang, Zhiyu, Ruoqiu Wang, and Donglin Xue. "Microfabrication by Laser Lithography Combined with Ion Etching." In Toxinology. Springer Netherlands, 2018. http://dx.doi.org/10.1007/978-981-10-6588-0_18-1.
Full textZhang, Zhiyu, Ruoqiu Wang, and Donglin Xue. "Microfabrication by Laser Lithography Combined with Ion Etching." In Toxinology. Springer Netherlands, 2018. http://dx.doi.org/10.1007/978-981-10-6588-0_18-2.
Full textZhang, Zhiyu, Ruoqiu Wang, and Donglin Xue. "Microfabrication by Laser Lithography Combined with Ion Etching." In Micro/Nano Technologies. Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-13-0098-1_18.
Full textvan Kan, J. A., and K. Ansari. "Box 12: Stamps for Nanoimprint Lithography." In Ion Beams in Nanoscience and Technology. Springer Berlin Heidelberg, 2009. http://dx.doi.org/10.1007/978-3-642-00623-4_26.
Full textConference papers on the topic "Ion lithography"
Kim, Yunsoo, Dongmin Jeong, Seungho Lee, et al. "Improving etchability of challenging materials through the ion implantation process." In International Conference on Extreme Ultraviolet Lithography 2024, edited by Joern-Holger Franke, Kurt G. Ronse, Paolo A. Gargini, Patrick P. Naulleau, and Toshiro Itani. SPIE, 2024. http://dx.doi.org/10.1117/12.3034605.
Full textMelngailis, John, Hans Loschner, Gerhard Stengl, Ivan L. Berry, Alfred A. Mondelli, and Gerhard Gross. "Ion projection lithography." In Photomask Japan '98 Symposium on Photomask and X-Ray Mask Technology V, edited by Naoaki Aizaki. SPIE, 1998. http://dx.doi.org/10.1117/12.328849.
Full textAlves, Andrew, Sean M. Hearne, P. Reichart, Reiner Siegele, David N. Jamieson, and Peter N. Johnston. "Ion beam lithography with single ions." In Smart Materials, Nano-, and Micro-Smart Systems, edited by Jung-Chih Chiao, David N. Jamieson, Lorenzo Faraone, and Andrew S. Dzurak. SPIE, 2005. http://dx.doi.org/10.1117/12.582191.
Full textLee, Y., K. N. Leung, M. D. Williams, et al. "Multicusp ion source for ion projection lithography." In Proceedings of the 1999 Particle Accelerator Conference (Cat. No.99CH36366). IEEE, 1999. http://dx.doi.org/10.1109/pac.1999.792782.
Full textCardinal, Thomas, Daniel Andruczyk, He Yu, Vibhu Jindal, Patrick Kearney, and David N. Ruzic. "Modeling the ion beam target interaction to reduce defects generated by ion beam deposition." In SPIE Advanced Lithography, edited by Patrick P. Naulleau and Obert R. Wood II. SPIE, 2012. http://dx.doi.org/10.1117/12.916878.
Full textJoy, David C., Brendan J. Griffin, John Notte, et al. "Device metrology with high-performance scanning ion beams." In Advanced Lithography, edited by Chas N. Archie. SPIE, 2007. http://dx.doi.org/10.1117/12.710926.
Full textKim, Sang Wan, Peng Zheng, Kimihiko Kato, Leonard Rubin, and Tsu-Jae King Liu. "Enhanced patterning by tilted ion implantation." In SPIE Advanced Lithography, edited by Christopher Bencher and Joy Y. Cheng. SPIE, 2016. http://dx.doi.org/10.1117/12.2218793.
Full textMaas, Diederik, Emile van Veldhoven, Ping Chen, et al. "Nanofabrication with a helium ion microscope." In SPIE Advanced Lithography, edited by Christopher J. Raymond. SPIE, 2010. http://dx.doi.org/10.1117/12.862438.
Full textMiller, Paul A. "Image-Projection Ion-Beam Lithography." In 1989 Microlithography Conferences, edited by Arnold W. Yanof. SPIE, 1989. http://dx.doi.org/10.1117/12.968511.
Full textMartin, Patrick M., Ludovic Godet, Andrew Cheung, et al. "Ion Implant Enabled 2x Lithography." In ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010. AIP, 2011. http://dx.doi.org/10.1063/1.3548339.
Full textReports on the topic "Ion lithography"
Ji, Qing. Maskless, resistless ion beam lithography. Office of Scientific and Technical Information (OSTI), 2003. http://dx.doi.org/10.2172/809301.
Full textNelson, C. B., and H. Makowitz. A theoretical study of 30 to 50 angstrom noble gas heavy ion lithography. Office of Scientific and Technical Information (OSTI), 1994. http://dx.doi.org/10.2172/10167534.
Full textJiang, Ximan. Resolution Improvement and Pattern Generator Development for theMaskless Micro-Ion-Beam Reduction Lithography System. Office of Scientific and Technical Information (OSTI), 2006. http://dx.doi.org/10.2172/886610.
Full textSimmons, Blake Alexander, and William P. King. Fundamentals of embossing nanoimprint lithography in polymer substrates. Office of Scientific and Technical Information (OSTI), 2011. http://dx.doi.org/10.2172/1011211.
Full textLiu, Weidong. Electron Specimen Interaction in Low Voltage Electron Beam Lithography,. Defense Technical Information Center, 1995. http://dx.doi.org/10.21236/ada327202.
Full textBedrossian, P. J., and J. C. Farmer. Demonstration of lithographic patterning in measurements of general and localized corrosion on alloy 22. Office of Scientific and Technical Information (OSTI), 1999. http://dx.doi.org/10.2172/14590.
Full textThree Moments in the Arts of Jamaica. Inter-American Development Bank, 1997. http://dx.doi.org/10.18235/0006433.
Full textL'Estampe en France: Thirty-Four Young Printmakers. Inter-American Development Bank, 1999. http://dx.doi.org/10.18235/0006415.
Full textGraphics from Latin America and the Caribbean: October 1 - 29, 2000. Inter-American Development Bank, 2000. http://dx.doi.org/10.18235/0005917.
Full textGraphics from Latin America and the Caribbean: January 18th - March 9th, 2002. Inter-American Development Bank, 2002. http://dx.doi.org/10.18235/0005918.
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