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1

Ruisinger, Ulrich, Jörg Ettenauer, Rudolf Plagge, Herwig Hengsberger, and Peter Kautsch. "OEKO-ID - Innendämmungen zur thermischen Gebäudeertüchtigung." Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden, 2014. http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-155710.

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Das Projekt OEKO-ID hat zum Ziel. problematische Bauteilanschlüsse, insbesondere Balkenköpfe von Holzdecken, im Zusammenhang mit "ökologischen" Innendämmsystemen messtechnisch zu untersuchen. Des Weiteren sollen Möglichkeiten und Grenzen der hygrothermischen Simulation aufgezeigt werden. Ferner wurde eine neue Methode molekularbiologischer und baubiologischer Untersuchungen, hier zur Detektierung von Schimmelpilzen, entwickelt und optimiert.
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Ruisinger, Ulrich, Jörg Ettenauer, Rudolf Plagge, and Herwig Hengsberger. "OEKO-ID - Innendämmungen zur thermischen Gebäudeertüchtigung: Untersuchung der Möglichkeiten und Grenzen ökologischer, diffusionsoffener Dämmsysteme: Endbericht Oktober 2013." TU Graz, 2013. https://tud.qucosa.de/id/qucosa%3A28397.

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Das Projekt OEKO-ID hat zum Ziel. problematische Bauteilanschlüsse, insbesondere Balkenköpfe von Holzdecken, im Zusammenhang mit "ökologischen" Innendämmsystemen messtechnisch zu untersuchen. Des Weiteren sollen Möglichkeiten und Grenzen der hygrothermischen Simulation aufgezeigt werden. Ferner wurde eine neue Methode molekularbiologischer und baubiologischer Untersuchungen, hier zur Detektierung von Schimmelpilzen, entwickelt und optimiert.:Inhaltsverzeichnis 1 Technisch-wissenschaftliche Beschreibung der Arbeit 4 1.1 Projektabriss 4 2 Testhaus und energetische Sanierung 6 2.1 Literaturrecherche 6 2.2 Auswahl der Dämmsysteme 7 2.3 Planung Versuchsgebäude 8 2.4 Adaptierung Versuchsgebäude 8 2.5 Vorbereitende Arbeiten 2.7 Montage der Dämmsysteme 14 2.8 Baupraktische Erfahrungen im Spiegel des WTA-Merkblatts E-8-14 18 2.9 Beschreibung der verwendeten Dämmsysteme 20 2.10 Bewertung der verwendeten Dämmstoffe bezüglich der Verarbeitung 26 2.11 Vergleich der Dämmsysteme bezüglich OI3- Index 29 2.12 Erfahrungen beim Rückbau und der Entsorgung 31 2.13 Zusammenfassung der Eigenschaften der Dämmsysteme 39 2.14 Reduzierung der Transmissionswärmeverluste durch Innendämmmaßnahmen 41 3 Hygrothermische Materialkennwerte und -funktionen 43 3.1 Materialuntersuchungen 43 3.2 Beprobung . 44 3.3 Messverfahren 45 3.4 Verifizierungsexperimente: kontinuierliche Wasseraufnahme und Abtrocknung 52 3.5 Erstellung von Materialfunktionen 53 3.6 Zusammenfassung der Eigenschaften der Materialien und Innendämmsysteme 62 4 Mikrobiologische Untersuchungen und Methodenentwicklung 67 4.1 Vorgehen 67 4.2 Ergebnisse 75 5 Hygrothermische Vor-Ort-Messungen 81 5.1 Auswertung der Messdaten 81 5.2 Außen- und Raumklima 82 5.3 Temperatur und Luftfeuchte auf der Bestandsoberfläche 94 5.4 Temperatur und Luftfeuchte in der Mitte der Balkentasche 105 5.5 Temperatur und Luftfeuchte vor dem Stirnholz 109 5.6 Holzfeuchtemessungen 115 5.7 Oberflächentemperaturen 121 5.8 Temperatur- und Feuchteprofile an den Balken 125 5.9 Abdichtung der Balkenauflagertaschen 140 5.10 Mögliches Schimmelpilzwachstum in den Balkenauflagern 147 5.11 Konvertieren und Auswerten der Messungen 149 5.12 Resümee der hygrothermischen Messungen 149 6 Hygrothermische Simulationen 152 6 Hygrothermische Simulationen 152 6.1 Verwendete Simulationsprogramme 152 6.2 Temperatur-Korrektur der Holzfeuchtesensoren 154 6.3 Einfluss von Schlagregen 158 6.4 Berücksichtigung der Permeabilität der Baumaterialien 162 6.5 Simulation der Messergebnisse 166 6.6 Simulation der Grenzschicht Dämmsystem/ Bestandskonstruktion 168 6.7 Simulation eines Balkenkopfs 170 7 Dissemination - Darstellung der Verbreitungs- und Verwertungsmaßnahmen 174 7.1 Workshops 174 7.2 Zusammenarbeit mit anderen Projekten 175 7.3 Vorträge auf (Fach-)Tagungen und Konferenzen 175 7.4 Publikationen 178 8 Zusammenfassung 180 8.1 Technologische und ökologische Bewertung der Dämmsysteme 180 8.2 Bestimmung der Materialeigenschaften 181 8.3 Mikrobiologische Untersuchungen und Methodenentwicklung 181 8.4 Hygrothermische Vorortmessungen182 8.5 Hygrothermische Simulationen 183 8.6 Dissemination 184 9 Literaturverzeichnis 185 10 Unterschrift 192 A1 Anhang zum Abschnitt 2 Versuchsaufbau 193 A2 Anhang zum Abschnitt 4 - Mikrobiologische Untersuchungen 194 A3 Abdruck der Publikationen in internationalen wissenschaftlichen Zeitschriften 208 A4 Bauteilkatalog 230 A5 Monatliche Klima-Durchschnittswerte 247
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3

Wijesoma, Wijerupage Sardha. "Robot control using joint and end-effector sensing." Thesis, University of Cambridge, 1990. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.279587.

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4

Veryha, Yauheni. "Positioning of robotic manipulator end effector using joint error maximum mutual compensation." Berlin Logos-Verl, 2006. http://deposit.d-nb.de/cgi-bin/dokserv?id=2850250&prov=M&dok_var=1&dok_ext=htm.

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5

Fanni, Saman, and Fadi Jweda. "Design of carbon fibre composite driveshaft end fittings and adhesive joint for motorsport applications." Thesis, KTH, Hållfasthetslära, 2016. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-195648.

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varje ände för applikationer inom motorsport. En ”Single lap” och en ”Double lap” limfogsdesign testades experimentellt i vridning. Designparametrar såsom limtjocklek, limlängd, limbredd, limmets ändgeometri, materialstyvhet och spänningsreduktion hos limfogen undersöktes och en förbättrad limfogsdesign föreslogs. Testproven höll designkriteriats last men gick inte till brott även under testutrustningens maxlast. Vidare beräkningar utfördes med antaganden baserade på ideala förhållanden och resultat från tidigare studier. Beräkningarna visade en betydlig viktminskning följande substitutionen av stål mot kolfiberkomposit i en drivaxel. Med ökad drivaxellängd visade substitutionen till kolfiberkomposit även mer nödvändig i motorsportsapplikationer
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6

Pelletier, Benoit. "Investigation of the Lateraltorsional Buckling Behaviour of Engineered Wood I-Joists with Varying End Conditions." Thesis, Université d'Ottawa / University of Ottawa, 2017. http://hdl.handle.net/10393/36558.

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The need to include economical and yet environmentally friendly products in modern day structural systems has pushed the development of engineered wood products such as engineering wooden I-joists. These products are engineered to resist high transverse loads and use the wood material more efficiently. Beam members, specially those that are deep and have long spans, are prone to lateral-torsional buckling as a possible mode of failure. Laboratory testing rarely take into account actual end conditions and initial imperfection which might have a significant impact on the buckling behavior of beams. The current research project aims to investigate the lateral torsional buckling of wooden I-joists. A total of 41 joists were tested using various commercial joists hangers and enhanced connections to represent different support conditions. A numerical 3D model was also developed using commercially available finite element program ABAQUS to determine the buckling loads and associated mode shapes of joists similar to those tested. It was demonstrated that the lateral stiffness of the joists’ top flange support has a significant influence on the buckling load and that a stiffness variation of the bottom flange lateral support shows no significant impact on the buckling load. The results also suggest that an enhanced rotational connection can significantly increase the buckling load of a member. The verified FE model was capable of predicting the buckling load of wood I-joists with various end conditions and initial imperfections with reasonable accuracy.
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7

Yang, Ming. "When Decision Meets Estimation: Theory and Applications." ScholarWorks@UNO, 2007. http://scholarworks.uno.edu/td/627.

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In many practical problems, both decision and estimation are involved. This dissertation intends to study the relationship between decision and estimation in these problems, so that more accurate inference methods can be developed. Hybrid estimation is an important formulation that deals with state estimation and model structure identification simultaneously. Multiple-model (MM) methods are the most widelyused tool for hybrid estimation. A novel approach to predict the Internet end-to-end delay using MM methods is proposed. Based on preliminary analysis of the collected end-to-end delay data, we propose an off-line model set design procedure using vector quantization (VQ) and short-term time series analysis so that MM methods can be applied to predict on-line measurement data. Experimental results show that the proposed MM predictor outperforms two widely used adaptive filters in terms of prediction accuracy and robustness. Although hybrid estimation can identify model structure, it mainly focuses on the estimation part. When decision and estimation are of (nearly) equal importance, a joint solution is preferred. By noticing the resemblance, a new Bayes risk is generalized from those of decision and estimation, respectively. Based on this generalized Bayes risk, a novel, integrated solution to decision and estimation is introduced. Our study tries to give a more systematic view on the joint decision and estimation (JDE) problem, which we believe the work in various fields, such as target tracking, communications, time series modeling, will benefit greatly from. We apply this integrated Bayes solution to joint target tracking and classification, a very important topic in target inference, with simplified measurement models. The results of this new approach are compared with two conventional strategies. At last, a surveillance testbed is being built for such purposes as algorithm development and performance evaluation. We try to use the testbed to bridge the gap between theory and practice. In the dissertation, an overview as well as the architecture of the testbed is given and one case study is presented. The testbed is capable to serve the tasks with decision and/or estimation aspects, and is helpful for the development of the JDE algorithms.
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8

Arriagada, Anton. "A wideband high dynamic range frequency hopping hardware front-end for the joint tactical radio system." Diss., [La Jolla] : University of California, San Diego, 2010. http://wwwlib.umi.com/cr/fullcit?p1477881.

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Thesis (M.S.)--University of California, San Diego, 2010.<br>Title from first page of PDF file (viewed July 13, 2010). Available via ProQuest Digital Dissertations. Includes bibliographical references (leaf 63).
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9

Tuitert, Inge. "Synergies and end-effector kinematics in upper limb movements." Thesis, Aix-Marseille, 2019. http://theses.univ-amu.fr.lama.univ-amu.fr/191106_TUITERT_870i476zrdkzp785zxxeei787udophi_TH.pdf.

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Lorsque des êtres humains exécutent des mouvements de manière répétée, ceux-ci ne sont jamais complètement les mêmes. Cela s'explique par le fait que de nombreux degrés de liberté (DDL) du système moteur humain sont impliqués dans l'exécution d'un acte moteur. Dans la plupart des cas, le nombre de DDL mis en jeu excède le minimum nécessaire pour exécuter la tâche motrice à accomplir. Pour coordonner ces DDL redondants, des synergies sont souvent proposées. Une synergie est définie comme la liaison temporaire de DDL au sein d'unités spécifiques à une tâche. Kay a décrit l'émergence d'une synergie comme étant la première étape d'un processus contraignant en deux étapes dû aux interactions entre l'environnement, l'organisme et les contraintes de la tâche. Au cours de la seconde étape, les contraintes agissent sur la synergie, entraînant le comportement spécifique. Ce processus en deux étapes a été étudié en considérant l'influence des contraintes de la tâche sur les deux niveaux. La première étape du processus en deux étapes a été évaluée au moyen de l'analyse Uncontrolled Manifold de la variabilité des angles articulaires et la seconde étape à l'aide de la cinématique de l'effecteur final. Les résultats du niveau simultané des synergies et de l'effecteur final ont démontré que certaines contraintes sont principalement impliquées dans la première étape du processus, alors que d'autres influencent principalement la seconde étape du processus. En d'autres termes, des contraintes de tâche différentes sont impliquées dans chaque étape du processus contraignant en deux étapes, ce qui semble suggérer qu'un processus en deux étapes est à l'œuvre pour coordonner les DDL redondants<br>When humans perform movements repeatedly, they are never completely the same. This is possible because many degrees of freedom (DOF) of the human motor system are involved when performing a motor action. In most cases, the number of DOF involved exceeds the minimum necessary to complete the motor task at hand. To coordinate these DOF, synergies are often proposed. A synergy is defined as the temporary linking of DOF into task-specific units. Kay (1988) described the emergence of a synergy as the first step of a two-step constraining process due to the interactions amongst environment, organism, and task constraints. In the second step, the constraints act on the synergy, resulting in the specific behavior. This two-step process was examined by looking at the influence of task constraints on synergies, on end-effector kinematics, and on both levels concurrently. To analyze the first step of the two-step process, the emergence of a synergy, was assessed using the uncontrolled manifold analysis of joint angle variability and the second step, the emergence of the specific behavior, was assessed using end-effector kinematics. The results revealed that task constraints influenced synergies and end-effector kinematics independently. More importantly, the results of both synergy and end-effector level demonstrated that some constraints are mainly involved in the first step of the process, whereas other constraints mainly influence the second step of the process. That is, different task constraints are involved in each step of the two-step constraining process, suggesting that a two-step process is at play to coordinate the redundant DOF
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10

Meyer, Steven J. "TELEMETRY GROUND STATION CONFIGURATION FOR THE JOINT ADVANCED MISSILE INSTRUMENTATION (JAMI) TIME SPACE POSITION INFORMATION (TSPI) UNIT (JTU)." International Foundation for Telemetering, 2005. http://hdl.handle.net/10150/604888.

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ITC/USA 2005 Conference Proceedings / The Forty-First Annual International Telemetering Conference and Technical Exhibition / October 24-27, 2005 / Riviera Hotel & Convention Center, Las Vegas, Nevada<br>The Joint Advance Missile Instrumentation (JAMI) program has developed a Time Space Position Information (TSPI) unit (JTU). The JTU employs a novel use of GPS technology and inertial measurement units (IMU) to provide a real time trajectory for high dynamic missile systems. The GPS system can function during high g maneuvers that an air-to-air missile might encounter. The IMU is decoupled from the GPS sensor. The IMU data is a secondary navigation source for the JTU and will provide platform attitude. The GPS data and IMU data are sent to the ground in a telemetry packet called TUMS (TSPI Unit Message Structure). The TUMS packet is sent to a computer that hosts the JAMI Data Processing (JDP) software, which performs a Kalmam filter on the GPS and IMU data to provide a real-time TSPI solution to the range displays. This paper focuses on the equipment and software needed at a telemetry ground station to display the real time TPSI solution on the range displays. It includes an overview of the system data flow. This overview should help a potential user of the system understand what is involved in running the JAMI system. The post mission tools to provide an accurate trajectory and end-game scoring will not be discussed in this paper.
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11

Meyer, Steven J. "INTEGRATING THE JOINT ADVANCED MISSILE INSTRUMENTATION (JAMI) TIME SPACE POSITION INFORMATION (TSPI) UNIT (JTU) INTO A TELEMETRY SYSTEM." International Foundation for Telemetering, 2005. http://hdl.handle.net/10150/605057.

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ITC/USA 2005 Conference Proceedings / The Forty-First Annual International Telemetering Conference and Technical Exhibition / October 24-27, 2005 / Riviera Hotel & Convention Center, Las Vegas, Nevada<br>The Joint Advance Missile Instrumentation (JAMI) program has developed a Time Space Position Information (TSPI) unit (JTU). The JTU employs a novel use of Global Positioning System (GPS) technology, and inertial measurement units (IMU) to provide a real time trajectory for high dynamic missile systems. The GPS system can function during high g maneuvers that an air-to-air missile might encounter. The IMU is decoupled from the GPS sensor. The IMU data is a secondary navigation source for the JTU and will provide platform attitude. The GPS data and IMU data are sent to the ground in telemetry packet called TSPI Unit Message Structure (TUMS). The TUMS packet is sent to a computer that hosts the JAMI Data Processing (JDP) software, which performs a Kalmam filter on the GPS and IMU data to provide a real time TSPI solution to the range displays. The packetized TUMS data is available in three different output formats: RS-232 serial data, 16-bit parallel and PCM. This paper focuses on how to integrate the JTU into a telemetry system, use it as a standalone system, and provides examples of possible uses.
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12

TAN, Thiago Takumi. "Desenvolvimento de dispositivos para estudo de fratura interlaminar MODO-I e MODO-II de materiais dissimilares." Universidade Federal de Campina Grande, 2017. http://dspace.sti.ufcg.edu.br:8080/jspui/handle/riufcg/359.

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Submitted by Lucienne Costa (lucienneferreira@ufcg.edu.br) on 2018-04-10T19:51:47Z No. of bitstreams: 1 THIAGO TAKUMI TAN – DISSERTAÇÃO (PPGEM) 2017.pdf: 9018003 bytes, checksum: 45bd9458239c0c274dabe5c7aee2f165 (MD5)<br>Made available in DSpace on 2018-04-10T19:51:47Z (GMT). No. of bitstreams: 1 THIAGO TAKUMI TAN – DISSERTAÇÃO (PPGEM) 2017.pdf: 9018003 bytes, checksum: 45bd9458239c0c274dabe5c7aee2f165 (MD5) Previous issue date: 2017-03-13<br>O objetivo desta dissertação foi desenvolver dispositivos que possam ser utilizados para ensaios de fratura interlaminar modo-I e modo-II em materiais dissimilares, para aplicação de cargas dinâmicas. Para o desenvolvimento dos dispositivos foi utilizada uma adaptação da metodologia de projeto apresentada por Maribondo (2000), que consiste em projeto informacional, projeto conceitual, projeto preliminar, projeto detalhado, fabricação e testes. A escolha dos ensaios que podem ser utilizados para obter tais modos de fratura foi realizada com base no estudo de trabalhos acadêmicos, que apontou o ensaio double cantilever beam (DCB), como sendo o mais utilizado para estudo de fratura interlaminar modo-I, e também foi observado o crescimento do uso do ensaio end-loaded split (ELS), para estudo de fratura interlaminar modo-II. Os dispositivos desenvolvidos foram testados em uma máquina de impacto por queda de peso, onde foram utilizados corpos de prova de junta adesiva de alumínio/epóxi. Realizaram-se testes modo-I e modo-II bem-sucedidos, analisando o comportamento dos dispositivos e dos corpos de prova durante o ensaio e após o mesmo.<br>The main objective of this dissertation for the devices that can be used for mode-I and mode-II interlaminar fracture test in dissimilar materials. For the development of devices for design methodology that projects in informational design, conceptual design, preliminary design, detailed design, fabrication and testing. The choice of the tests that can be used to obtain such fracture modes was made based on the study of academic papers, which pointed to the double beam cantilever (DCB) test, as being the most used for the study of interlaminar mode-I, and end-loaded split (ELS) for the study of mode-II interlaminar fracture. The developed devices were tested in a weight drop impact machine, where aluminum / epoxy adhesive joints were used. Testing and analysis of the behavior of the devices and test bodies were carried out during and after the test.
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Biewald, Philipp [Verfasser], Carl [Akademischer Betreuer] Haasper, and Nael [Akademischer Betreuer] Hawi. "Midterm results after tantalum cones in 1-stage knee exchange for periprosthetic joint infection : a single-center study / Philipp Biewald ; Akademische Betreuer: Carl Haasper, Nael Hawi ; HELIOS ENDO-Klinik Hamburg." Hannover : Bibliothek der Medizinischen Hochschule Hannover, 2021. http://d-nb.info/123675834X/34.

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14

Lee, Michael N. "Information capture during early front end analysis in the Joint Capabilities Integration and Development System (JCIDS) : a formative study of the capabilities of the Department of Defense Architecture Framework (DoDAF)." Thesis, Massachusetts Institute of Technology, 2016. http://hdl.handle.net/1721.1/107609.

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Thesis: S.M. in Engineering and Management, Massachusetts Institute of Technology, School of Engineering, System Design and Management Program, Engineering and Management Program, 2016.<br>Cataloged from PDF version of thesis.<br>Includes bibliographical references (pages 102-107).<br>The United States has achieved defense superiority in air, land, and sea while using some of the most advanced defense systems in the world. However, underlying this success is a troubled procurement system. Enterprise-wide problems such as poor integration between the three components (JCIDS, DAS, PPBE) of DoD acquisition and inadequate management of procurement personnel have undermined the potential of the Department of Defense. One particular area for improvement is the need for understanding the overlaps, gaps, and interdependencies of the capability portfolio. Information is a precondition to attaining that knowledge. Information is embodied in capability documents and architecture frameworks and drives the critical process of determining the right capability requirements upfront, a vital task in saving costs. (Wirthlin, 1994) The stakeholders need a comprehensive understanding of the capability portfolio during this validation process but information can be trapped in functional stovepipes. DoD Architecture Framework (DoDAF) holds much promise in enhancing the visibility and traceability of information in the capability portfolio to the stakeholders. It is a more structured way to capture and analyze information than free-text documents. The most recent JCIDS manual published in February 2015 added a new requirement to submit seven DoDAF viewpoints during the ICD submission. This indicates the potential of DoDAF viewpoints to be able to provide a full representation of a capability requirement so it can be validated in light of a holistic understanding of the portfolio. The purpose of this thesis is to analyze whether DoDAF alone can provide a holistic understanding of a capability requirement during this early front-end validation. The analysis examines the information captured by the viewpoints by comparing it to ICD information requirements. The results of the analysis reveal the benefits of DoDAF in its ability to capture more detailed information such as resource flows in structured form. A second finding revealed that the seven DoDAF viewpoints were missing key information elements about the capability requirement such as related missions and strategy documents that limit holistic visibility of the capability portfolio. Lastly, there were additional limitations such as the challenge of determining the level of specificity in the viewpoints. Recommendations include changing particular optional data fields to mandatory and adding the CV-1 and OV-3 viewpoints to provide more information about the capability requirement.<br>by Michael N. Lee.<br>S.M. in Engineering and Management
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Singh, Pradeep Kumar. "Electron microscopic studies of low-k inter-metal dielectrics." Doctoral thesis, Universitätsbibliothek Chemnitz, 2014. http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-152134.

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Die fortwährende Verkleinerung der Strukturbreiten in der Mikroelektronik erfordert es, herkömmliche SiO2 Dielektrika durch Materialien mit kleinerer Dielektrizitätskonstante zu ersetzen. Dafür sind verschiedene „low-k Materialien“ entwickelt worden. Unter diesen sind die Organosilikatgläser, die aus SiO2 Netzwerken mit eingelagerten Methylgruppen bestehen wegen ihrer ausgezeichneten Eigenschaften besonders interessant als Dielektrika zwischen metallischen Leiterbahnen. In dieser Arbeit sind fünf verschiedene dieser „low-k Materialien“ untersucht worden: ein dichtes und vier poröse Materialien, die alle durch plasmagestützte chemische Gasphasenabscheidung hergestellt wurden. Die strukturellen, chemischen und dielektrischen Eigenschaften der Materialien wurden mit Hilfe der analytischen Durchstrahlungselektronenmikroskopie unter Verwendung eines abbildenden GATAN-Energiespektrometers untersucht. Die Bestimmung der radialen Verteilungsfunktion (RDF) zur Charakterisierung der atomaren Nahordnung ermöglicht uns die Ermittlung mittlerer Bindungslängen und – winkel sowie der mikroskopischen Dichte des Materials. Gegenüber SiO2 wurden in den untersuchten „low-k Materialien“ stark veränderte mittlere Si-O, O-O und Si-Si Bindungslängen gefunden. Dieses wirkt sich natürlich auch auf die mittleren Si-O-Si bzw. O-Si-O Bindungswinkel aus, und wie erwartet war auch die mikroskopische Dichte der „low-k Materialien“ kleiner als die Dichte des SiO2. Elektronen Energieverlustspektroskopie (EELS) und Photoelektronenspektroskopie (XPS) wurden zur Charakterisierung der chemischen Umgebung der Atome in den „low-k Materialien“ herangezogen. Die Energien von Ionisationskanten und die Bindungsenergien der Silizium-2p und Sauerstoff-1s Elektronen waren in den „low-k Materialien“ größer als im SiO2. Die Kohlenstoffatome kamen in den „low-k Materialien“ sowohl sp2 als auch sp3 hybridisiert vor. sp2-Hybridisierung liegt vor, wenn Bindungen wie Si=CH2 und C=C im Netzwerk vorkommen, während sp3 Hybridisierung z.B. dann vorkommt, wenn freie Si-Bindungen durch –CH3 Gruppen abgesättigt werden. Die Anteile an sp2- bzw. sp3-hybridisierten Kohlenstoffatome wurden aus der Feinstruktur der K-Energieverlustkanten des Kohlenstoffs abgeschätzt. Das ergab, daß die meisten Kohlenstoffatome in den „low-k Materialien“ sp2-hybridisiert sind. Die dielektrischen Eigenschaften wurden durch Kramers-Kronig-Transformation einer Energieverlustfunktion ermittelt, die aus dem Niedrigverlust-EELS-Spektrum im Bereich der Plasmonenanregungen gewonnen wurde. Die Bandlücke des SiO2 beträgt ungefähr 9 eV während dichte „low-k Materialien“ aufgrund der Unregelmäßigkeiten in ihrem SiO2-Netzwerk zusätzliche Zustandsdichten innerhalb der Bandlücke aufweisen. Die Erzeugung von Poren im „low-k Material“ vermindert offenbar die Zustandsdichte im Bereich der Bandlücke und erweitert diese im Vergleich zum SiO2. Eine Modellrechnung mit der Dichtefunktionaltheorie für ein Strukturmodell, das den „low-k Materialien“ nahe kommt, ist zum Vergleich mit der experimentell gefundenen kombinierten Zustandsdichte herangezogen worden und zeigt eine gute Übereinstimmung. Die im Standard-Herstellungsprozeß vorkommenden Verfahren des Plasmaätzens und der Plasmaveraschung können die Struktur des „low-k Materials“ z.B. an den Seitenwänden von Ätzgräben verändern. Die gestörten Bereiche wurden mit der energiegefilterten Elektronenmikroskopie untersucht. Dabei wurde gefunden, daß sich die Strukturveränderungen der Seitenwände bis zu einer Tiefe in der Größenordnung von ungefähr 10 Nanometern erstrecken. Diese Bereiche sind verarmt an Kohlenstoff und ähneln folglich mehr einem SiO2-Dielektrikum. Die Kohlenstoffverarmung erstreckt sich in die „low-k Schicht“ in Form eines gaussartigen Profils mit maximaler Kohlenstoffkonzentration in der Mitte der Schicht. Die Sauerstoffkonzentration und die mikroskopische Dichte steigen in der Nähe der Seitenwände.
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16

Forster, Lois. "Chevaliers et hommes d'armes dans l'espace bourguignon au XVe siècle." Thesis, Lille 3, 2018. http://www.theses.fr/2018LIL3H030/document.

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Chacun de leur côté, les phénomènes de la guerre et des tournois au Moyen Âge ont déjà bénéficié d’études nombreuses et approfondies. En revanche, on a négligé d’analyser en profondeur le lien entre ces deux mondes, accusé pourtant de s’étioler au XVe siècle au profit de spectacles grandioses n’ayant plus rien à voir avec la réalité d’un champ de bataille. Par ailleurs, dans le domaine militaire, les gentilshommes imprégnés d’un idéal chevaleresque obsolète se débattraient pour essayer de faire encore croire au maintien de leur suprématie guerrière.La réalité est bien plus complexe et les interactions entre le domaine de la guerre et celui des lices sont multiples. Ce sont d’abord les mêmes personnes qu’on peut retrouver à combattre dans tous les contextes, des hommes censés être nobles, adoubés ou non, qui possèdent un équipement caractéristique, armes et armures, ainsi qu’un cheval entraîné au combat. Les adaptations de leur matériel aux rencontres normées, prévues pour augmenter leur sécurité, ne changent fondamentalement rien à leur façon de combattre. Leurs techniques martiales se révèlent riches et variées, tout comme leurs tactiques collectives, qui savent s’adapter aux différentes configurations rencontrées à la guerre grâce à une surprenante polyvalence. Enfin, la mentalité avec laquelle les hommes d’armes abordent les rencontres armées montrent d’importantes similitudes dans tous les contextes : on attend d’eux qu’ils donnent le meilleur d’eux-mêmes, en démontrant leur prouesse, sans renoncer face à l’adversité. Ainsi, à tous les niveaux, la frontière entre les lices et le champ de bataille s’avère finalement assez floue<br>The phenomena of war and tournaments in the Middle Ages have already benefitted from several individual in-depth studies. However, a detailed analysis of the link between the two themes has always been lacking, even though we often accusingly claim that this link declined during the 15th century to be replaced by spectacular shows which had nothing to do with the reality of battlefields anymore. Moreover, some people would argue that, in the military field, noblemen – immersed in an obsolete chivalrous model – would have desperately tried to maintain a semblance of belligerent dominion.But the truth is far more complex and the interactions between the world of war and the world of lists are numerous. First, the same persons could be found in each context: men supposed to be noble – knighted or not – with characteristic pieces of equipment – arms and armours – and horses trained for combat. Adjusting their equipment for formal combats to improve their safety did not fundamentally change the way they fought. Their martial techniques were, in fact, rich and diverse – and so was their group tactic, which could adapt to different configurations encountered at war thanks to their surprising versatility. Lastly, the ways of men-at-arms in martial encounters reveals important similarities in every context: we expected them to give their best and achieve feats with no sign of renouncement while facing the enemy. Thus, the boundary between lists and battlefields actually turns out to be quite vague at every level
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Marchi, Tommaso. "Position and singularity analysis of a class of n-RRR planar parallel robots." Master's thesis, Alma Mater Studiorum - Università di Bologna, 2020.

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Parallel robots with configurable platform are a class of parallel robots in which the end-effector is a closed-loop flexible chain of rigid links. We have developed a 5-RRR planar mechanism that features a flexible 5-bar chain as end-effector. The angles between adjacent sides of this chain can be controlled through the actuated revolute joints attached to the base of the mechanism. This thesis consists in the geometrical design of n-RRR planar parallel robots and in the study of the Direct Kinematics for 4-, 5- and 6-RRR mechanisms using Bilateration, a method that greatly reduces the computational time for the kinematic analysis. The next step is the singularity analysis for the n-RRR robot architectures; finally, in the last part of this thesis we present the results from experimental tests that have been performed on a 5-RRR robot prototype.
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18

Chen, Yu-Ren, and 陳俞任. "Joint Behavior of Through Oval-end Mortise and Tenon Joint with Wedges." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/81528917197623028479.

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碩士<br>國立嘉義大學<br>林產科學系研究所<br>95<br>Oval-end and square-end mortise and tenon joints have been commonly used in wooden furniture. The oval-end mortise and tenon joint not only has excellent performance in joint strength but also could be processed rapidly. However, the processing of the square-end mortise is slow and is often with poor precision even though the square-end mortise and tenon joint with wedge has good performance in joint strength. This study is to investigate the effect of wedge on the joint behaviors of through oval-end mortise and tenon joint. In order to understand the relations between the pull-out loads, bending moments and rigidity efficiencies with groove widths, wedge slopes and wedge spacings, wedged through oval-end mortise and tenon joint with various groove widths (3, 4, and 5 mm) and wedge slopes (1:7, 1:8, and 1:9) for single wedge, and wedge spacings (12 and 19 mm) for double wedges were used. In addition, finite element analysis was used to predict the pull-out loads and bending moments, and both were compared with the tested ones. Except for rigidity efficiencies, the pull-out loads and bending moments of the oval-end mortise and tenon joint with single and double wedges were greater than those without wedge. The pull-out loads of the oval-end mortise and tenon joint with single wedge were increased with the increase of wedge slopes and with the decrease of groove width, and the same tendency could also be observed in the data predicted by the finite element method. The difference between the measured and predicted pull-out loads are between -2.10 and 7.47 %. The highest compressive stress and displacement were found at the uppers corners of the groove when wedge was in groove. For the oval-end mortise and tenon joint with single wedge, the highest compressive stress and displacement were found for 3 mm groove width and 1:7 wedge slope. With the same groove width and wedge slope, the pull-out loads of the oval-end mortise and tenon joint with double wedge weres greater than those with single wedge. Rigidity efficiencies of the wedged oval-end mortise and tenon joint had no significant differences among various combinations. The maximum bending moments of the oval-end mortise and tenon joint with single wedge were also increased with the increase of wedge slopes and with the decrease of groove width. However, for the same groove widths and wedge slopes, the bending moments of the oval-end mortise and tenon joint with double, single and without wedges have no significant differences. Furthermore, the difference between the measured bending moments and the predicted ones were between -5.00 and 6.21 %. The predicted bending moments of oval-end mortises and tenon joints with shoulders were 30 ~ 38 % higher than those without shoulders. The predicted data also showed that when bending occurred on the wedged oval-end mortise and tenon joint, the stress concentration was found on the apex of the lower shoulder of the tenon. Also, the compressive stress at the apex of lower shoulder was increased with the increase of the displacement loading. According the simulation by the finite element, the pull-out loads and bending moments increased with the increase of wedge spacings in the range of 10 to 16 mm.
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19

Yu-ChaoWang and 王昱超. "Biomechanical Analysis of Normal Shoulder Joint End-Feel Tests." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/75174510095902768660.

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碩士<br>國立成功大學<br>物理治療研究所<br>98<br>Background and Purpose: Physical therapists often conduct the joint end-feel test on patient with shoulder problems. It’s part of the procedure of Selective Tissue Tension Test (STTT) developed by James Cyriax. Although the end-feel test is wildly used, there is no objective characterization of the end-feel in the existing literature. Our purpose was to investigate the biomechanical characteristics of normal shoulder joint end-feels by analyzing the “angle-moment” relationship curves. Materials and Methods: We conducted 7 shoulder end-feel tests including shoulder flexion, extension, ABD, external and internal rotation in both scapular plane (ERs/IRs) and frontal plane (ER/IR) on 30 healthy right handed subjects. The external applied load was measured through a load cell and the shoulder kinematics was recorded by a 3D electromagnetic motion analysis system. The “angle-moment curves” of each end-feel test was established and subdivide into four regions: neutral zone (NZ), first section of the toe-region (T1), second section of the toe-region (T2) and the linear elastic region (EL). The slops (angular stiffness) of each region were analyzed. The angular ranges in the toe-region (AT) and from the starting point of toe-region to certain joint moment (AN) were also discussed. We used the independent t-test for comparing the gender and flexibility level difference on anthropometric and kinematic data. A 3-way ANOVA was tested for effects of testing types, genders and flexibility levels on the main outcome measures. Results: The shoulder extension and internal rotation had the larger T1 angular stiffness. In the T2 region, the shoulder extension, ABD and internal rotation had greater angular stiffness but there was no difference between each other. Shoulder ABD and flexion had highest EL angular stiffness and external rotation was the smallest. The shoulder external rotation had the largest AT and AN angular range among all testing types. Males had greater T1, T2 and EL region angular stiffness in all testing movements except the extension and ABD. Females had larger AT and AN angular ranges in shoulder flexion (p<0.05), external rotation (ER, p=0.003) and internal rotation (IRs, p<0.05; IR, p<0.05). Discussion: The shoulder external rotation was the softest joint end-feel and characterized by having the softest angular stiffness, largest angular ranges, lowest peak joint moment and loading rate among all the testing movements. The shoulder ABD and internal rotation had the greatest loading rate and ABD characterized as greatest EL region angular stiffness, however, the shoulder internal rotation was characterized as having the smallest angular ranges. Both of them had harder end-feel among testing movements. Shoulder flexion was characterized as having larger angular range and harder at end range than shoulder extension. Conclusions: In the present study, the normal shoulder joint end-feel listed from ‘hard to soft’ is in the following order: ABD, internal rotation, extension, flexion and external rotation. Females presented softer end-feels. The joint flexibility level appears to have no major effect on the normal shoulder joint end-feels. Clinical Relevance: The angle-moment curve is not the resistance felt by examiner but it helps us verifying the normal shoulder end-feel properties in an objective way. These normal shoulder end-feel characteristics are the references for indentifying the abnormal shoulder end-feels in clinical evaluation.
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20

Wu, Xinchang, and 吳欣蒼. "An end-to-end robust joint registration system for Indocyanine Green and Fluorescein Angiograms." Thesis, 2012. http://ndltd.ncl.edu.tw/handle/40107852288718116025.

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21

Ho, James. "Joint Source Channel Coding in Broadcast and Relay Channels: A Non-Asymptotic End-to-End Distortion Approach." Thesis, 2013. http://hdl.handle.net/10012/7910.

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The paradigm of separate source-channel coding is inspired by Shannon's separation result, which implies the asymptotic optimality of designing source and channel coding independently from each other. The result exploits the fact that channel error probabilities can be made arbitrarily small, as long as the block length of the channel code can be made arbitrarily large. However, this is not possible in practice, where the block length is either fixed or restricted to a range of finite values. As a result, the optimality of source and channel coding separation becomes unknown, leading researchers to consider joint source-channel coding (JSCC) to further improve the performance of practical systems that must operate in the finite block length regime. With this motivation, this thesis investigates the application of JSCC principles for multimedia communications over point-to-point, broadcast, and relay channels. All analyses are conducted from the perspective of end-to-end distortion (EED) for results that are applicable to channel codes with finite block lengths in pursuing insights into practical design. The thesis first revisits the fundamental open problem of the separation of source and channel coding in the finite block length regime. Derived formulations and numerical analyses for a source-channel coding system reveal many scenarios where the EED reduction is positive when pairing the channel-optimized source quantizer (COSQ) with an optimal channel code, hence establishing the invalidity of the separation theorem in the finite block length regime. With this, further improvements to JSCC systems are considered by augmenting error detection codes with the COSQ. Closed-form EED expressions for such system are derived, from which necessary optimality conditions are identified and used in proposed algorithms for system design. Results for both the point-to-point and broadcast channels demonstrate significant reductions to the EED without sacrificing bandwidth when considering a tradeoff between quantization and error detection coding rates. Lastly, the JSCC system is considered under relay channels, for which a computable measure of the EED is derived for any relay channel conditions with nonzero channel error probabilities. To emphasize the importance of analyzing JSCC systems under finite block lengths, the large sub-optimality in performance is demonstrated when solving the power allocation configuration problem according to capacity-based formulations that disregard channel errors, as opposed to those based on the EED. Although this thesis only considers one JSCC setup of many, it is concluded that consideration of JSCC systems from a non-asymptotic perspective not only is more meaningful, but also reveals more relevant insight into practical system design. This thesis accomplishes such by maintaining the EED as a measure of system performance in each of the considered point-to-point, broadcast, and relay cases.
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22

Li, Yi-Wei, and 李怡緯. "Joint Flow Control, Capacity Allocation and Routing Strategy to Achieve End-to-end Delay and Throughput Fairness in Wireless Mesh Networks." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/39875693085230980600.

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碩士<br>國立臺灣大學<br>資訊管理學研究所<br>98<br>Wireless mesh networks provide connectivity to communities and act as a solution for last-mile broadband Internet access. By improvements of routers and gateways, service region expands much broader than before. Fairness, which is an important issue since Internet has been researched, is our objective subject to the capacity of equipments. The hop count from client to gateway influences the performance. A more hop count may experience lower quality of service (QoS) and even starvation. In this thesis, we focus on capacity allocation, flow control and routing to achieve end-to-end fairness. This end-to-end fairness problem is formulated as a mathematical programming model and then deal with by an optimization-based algorithm. In this thesis, two important performance metrics, end-to-end delay and throughput are discussed. Several decision variables need to be determined where a certain level of QoS requirements is satisfied. We purpose a two-phased heuristic to ensure end-to-end delay and throughput fairness. To solve this problem, the Lagrangean Relaxation method is introduced to decompose the primal problem into several subproblems and we also adopt the subgradient method to obtain a reasonable lower bound. Further, we show the efficiency and effectiveness of the purposed algorithm by computational experiments.
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23

ZHANG, XIN-YI, and 張心怡. "The effect of gluing methods and modified adhesives in end-to-end grain joint on the properties of structural laminated wood." Thesis, 1989. http://ndltd.ncl.edu.tw/handle/44334755513520518888.

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24

Rodrigues, Pedro. "Consequence of functioning at the end range of joint motion: Implications on anterior knee pain." 2011. https://scholarworks.umass.edu/dissertations/AAI3465079.

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"Excessive" and/or "delayed" subtalar joint (STJ) pronation has been linked to overuse injuries because of its influence on tibial internal rotation (TIR). The transfer of STJ pronation to TIR occurs via the talocrual joint, believed to have limited transverse plane motion. However, studies have shown the talocrural joint to have more transverse plane motion than once believed, therefore it is feasible that the STJ will only influence the motion of the tibia once this motion has been exhausted. Currently, studies evaluating this relationship have focused on peak joint angles and excursion without reference to the amount of motion available at the ankle joint complex (AJC). Therefore the purpose of these studies were to evaluate whether runners with anterior knee pain (AKP) utilize a greater percentage of their available eversion motion (eversion buffer), evaluate the effects of small eversion buffers on coordination, and evaluate the influence of orthotics on those with AKP and with the smallest eversion buffers. This study found healthy and injured runners, for the most part, presented with no significant differences in traditional pronation related variables. The one exception was peak pronation velocity, where injured runners demonstrated faster velocities. On the other hand injured runners had significantly smaller eversion buffers which lead them to change their coordinative pattern earlier during stance. This difference in pattern also caused the intra-individual coupling variability to peak earlier during stance. Orthotics successfully controlled the kinematics of the AJC and increased the eversion buffer of injured runners and in those displaying the smallest buffers. While orthotics successfully influenced the kinematics of the AJC, they did not influence those of the tibia and knee. These changes at the AJC did not have a strong impact on the coordinative patterns of the lower extremity, however demonstrated a trend toward being able to influence the intra-individual coupling variability. In summary, injured runners demonstrated smaller eversion buffers and changed their coordinative pattern earlier during stance. While orthotics successfully increased the eversion buffer, they did not strongly influence coordination variables. Future studies analyzing pronation related variables in injured populations should evaluate them relative to the available motion at the AJC.
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Rodrigues, Pedro A. "Consequence of Functioning at the End Range of Joint Motion: Implications on Anterior Knee Pain." 2011. https://scholarworks.umass.edu/open_access_dissertations/415.

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“Excessive” and/or “delayed” subtalar joint (STJ) pronation has been linked to overuse injuries because of its influence on tibial internal rotation (TIR). The transfer of STJ pronation to TIR occurs via the talocrual joint, believed to have limited transverse plane motion. However, studies have shown the talocrural joint to have more transverse plane motion than once believed, therefore it is feasible that the STJ will only influence the motion of the tibia once this motion has been exhausted. Currently, studies evaluating this relationship have focused on peak joint angles and excursion without reference to the amount of motion available at the ankle joint complex (AJC). Therefore the purpose of these studies were to evaluate whether runners with anterior knee pain (AKP) utilize a greater percentage of their available eversion motion (eversion buffer), evaluate the effects of small eversion buffers on coordination, and evaluate the influence of orthotics on those with AKP and with the smallest eversion buffers. This study found healthy and injured runners, for the most part, presented with no significant differences in traditional pronation related variables. The one exception was peak pronation velocity, where injured runners demonstrated faster velocities. On the other hand injured runners had significantly smaller eversion buffers which lead them to change their coordinative pattern earlier during stance. This difference in pattern also caused the intra-individual coupling variability to peak earlier during stance. Orthotics successfully controlled the kinematics of the AJC and increased the eversion buffer of injured runners and in those displaying the smallest buffers. While orthotics successfully influenced the kinematics of the AJC, they did not influence those of the tibia and knee. These changes at the AJC did not have a strong impact on the coordinative patterns of the lower extremity, however demonstrated a trend toward being able to influence the intra-individual coupling variability. In summary, injured runners demonstrated smaller eversion buffers and changed their coordinative pattern earlier during stance. While orthotics successfully increased the eversion buffer, they did not strongly influence coordination variables. Future studies analyzing pronation related variables in injured populations should evaluate them relative to the available motion at the AJC.
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26

Tsai, I.-kuan, and 蔡逸寬. "An Implementation and Performance Evaluation of End-to-End Joint Flow/Congestion Control Schemes for Real-time Stored Packet Video Transport over Internet." Thesis, 1999. http://ndltd.ncl.edu.tw/handle/86313491433801846855.

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碩士<br>國立臺灣大學<br>資訊管理研究所<br>87<br>The demand for real-time playback of multimedia information over the Internet is ever increasing, e.g. audio/video clips embedded in WWW, webTV and video on demand. There have been many researches on how to provide quality of service for the next generation Internet. It would, however, take some time before end-to-end QoS service provisioning could be realized. On the other hand, high quality, absolute guaranteed service may not be required by all applications. For example, real-time applications, such as nv, ivs and vic, recently developed in the Internet are capable of adapting their transmission to actual packet delays and tolerate occasional packet loss. From applications'' perspective, if they could tolerate certain packet loss rate and delay jitter, why should they pay for the best transfer quality? To meet real-time, continuous playback requirements, we have proposed a protocol called R3CP+ that integrates several control mechanisms to maximize delivery performance of real-time continuous media over networks without QoS support. The scheme combines a self-controlled adaptive flow control with congestion control mechanism based on a Recursive Least Square (RLS) prediction algorithm. Other control mechanisms used include buffer-occupancy based adaptive rate control scheme, "in-time" lookahead pre-retransmission and selective transmission. Previous simulation results have shown that RLS prediction makes good use of the past measurement in forecasting the future condition that can effectively avoid and cope with network congestion. In this work, we implement the R3CP+ protocol and evaluate various performance aspects of the protocol over the current Internet. First, we conduct the experiments in a closed network environment so that we are able to better control network loads and relevant network parameters. Secondly, the protocol and the implementation system is tested over the current Internet. The results show that the protocol can significantly improve playback performance and the viewing quality while using only a small amount of buffer space. It can also "friendly" share bandwidth with other UDP/RTP based real-time applications as well as TCP connections.
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Lee, Hui-yin, and 李蕙吟. "The study on lateral reinforcement for bearing walls of traditional Japanese historical buildings with square-end mortise-tenon joint and metal fitting." Thesis, 2003. http://ndltd.ncl.edu.tw/handle/22677389622550728549.

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碩士<br>國立臺灣大學<br>森林學研究所<br>91<br>The mortise-and-tenon joints of Japanese historical landmarks and traditional Japanese-style buildings are susceptible to the problems caused by wood frame detachment under earthquakes, as a result, leading to the destruction of walls or even breakdown of the entire building structures. In the first part of this thesis, the experiments of reinforcing with metal fittings were performed for the wood frame joints of walls. As shown in our results, by retrofitting with the angle fitting, the ultimate racking strength of a wall is 147% stronger than that without reinforcement, while the ultimate racking strength of a wall is 58% higher with the T-L type fitting. The optimal shear stiffness coefficients of a wall can be reached when angle fitting is applied to the bamboo-net clay wall, in which, the maximum destruction loads are in the class of ASTM-E72 and in the fourth step of E564 shear wall test. In the second part of the thesis, we studied the impact of reinforcement on mortise-and-tenon joint using metal fitting. The results show that with the same conditions of tenon thick (tt) and tenon width, the maximal moment strength increases as the tenon cheek ratio increases. When the tenon width ratio (tw/rw) and tenon thick ratio (ttr) are both constants with the corresponding tcr value changes from 0.25 to 0.5, the maximum moment strength will increase at the same rate of the tcr. Similarly, with the same conditions for both tl and tw, the maximum moment strength increases as the ttr value increases. When twr is equal to tcr, however, the two maximum moment strengths are on par when ttr=0.25 and ttr=0.5, indicating that the maximum moment strength is stabilized when the ttr value is increased from 0.25 up to 0.5, with all other conditions controlled. In other words, when the tw value is fixed with a constant tl*tt, the maximum moment strength will increase remarkably when tl/tt increases. On the other hand, when the tw value is fixed and tl/tt is a constant, the maximum moment strength also increases significantly when the ttl*tt value increases. In addition, finite element analysis method (FEM) was used in the thesis to construct the mortise-and-tenon joint reinforcement force model for simulating and evaluating the center of force. Based on our FEA model, the simulated numbers of T-type fitting, angle fitting, and fish-tail bolt were closely correlated with their corresponding numbers measured in the experiments. In other words, future physical measurements can be replaced with FEA simulation models in evaluating mortise-and-tenon joint reinforcement to avoid these costly, time-consuming, and complex processes.
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28

Singh, Pradeep Kumar. "Electron microscopic studies of low-k inter-metal dielectrics." Doctoral thesis, 2013. https://monarch.qucosa.de/id/qucosa%3A20114.

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Abstract:
Die fortwährende Verkleinerung der Strukturbreiten in der Mikroelektronik erfordert es, herkömmliche SiO2 Dielektrika durch Materialien mit kleinerer Dielektrizitätskonstante zu ersetzen. Dafür sind verschiedene „low-k Materialien“ entwickelt worden. Unter diesen sind die Organosilikatgläser, die aus SiO2 Netzwerken mit eingelagerten Methylgruppen bestehen wegen ihrer ausgezeichneten Eigenschaften besonders interessant als Dielektrika zwischen metallischen Leiterbahnen. In dieser Arbeit sind fünf verschiedene dieser „low-k Materialien“ untersucht worden: ein dichtes und vier poröse Materialien, die alle durch plasmagestützte chemische Gasphasenabscheidung hergestellt wurden. Die strukturellen, chemischen und dielektrischen Eigenschaften der Materialien wurden mit Hilfe der analytischen Durchstrahlungselektronenmikroskopie unter Verwendung eines abbildenden GATAN-Energiespektrometers untersucht. Die Bestimmung der radialen Verteilungsfunktion (RDF) zur Charakterisierung der atomaren Nahordnung ermöglicht uns die Ermittlung mittlerer Bindungslängen und – winkel sowie der mikroskopischen Dichte des Materials. Gegenüber SiO2 wurden in den untersuchten „low-k Materialien“ stark veränderte mittlere Si-O, O-O und Si-Si Bindungslängen gefunden. Dieses wirkt sich natürlich auch auf die mittleren Si-O-Si bzw. O-Si-O Bindungswinkel aus, und wie erwartet war auch die mikroskopische Dichte der „low-k Materialien“ kleiner als die Dichte des SiO2. Elektronen Energieverlustspektroskopie (EELS) und Photoelektronenspektroskopie (XPS) wurden zur Charakterisierung der chemischen Umgebung der Atome in den „low-k Materialien“ herangezogen. Die Energien von Ionisationskanten und die Bindungsenergien der Silizium-2p und Sauerstoff-1s Elektronen waren in den „low-k Materialien“ größer als im SiO2. Die Kohlenstoffatome kamen in den „low-k Materialien“ sowohl sp2 als auch sp3 hybridisiert vor. sp2-Hybridisierung liegt vor, wenn Bindungen wie Si=CH2 und C=C im Netzwerk vorkommen, während sp3 Hybridisierung z.B. dann vorkommt, wenn freie Si-Bindungen durch –CH3 Gruppen abgesättigt werden. Die Anteile an sp2- bzw. sp3-hybridisierten Kohlenstoffatome wurden aus der Feinstruktur der K-Energieverlustkanten des Kohlenstoffs abgeschätzt. Das ergab, daß die meisten Kohlenstoffatome in den „low-k Materialien“ sp2-hybridisiert sind. Die dielektrischen Eigenschaften wurden durch Kramers-Kronig-Transformation einer Energieverlustfunktion ermittelt, die aus dem Niedrigverlust-EELS-Spektrum im Bereich der Plasmonenanregungen gewonnen wurde. Die Bandlücke des SiO2 beträgt ungefähr 9 eV während dichte „low-k Materialien“ aufgrund der Unregelmäßigkeiten in ihrem SiO2-Netzwerk zusätzliche Zustandsdichten innerhalb der Bandlücke aufweisen. Die Erzeugung von Poren im „low-k Material“ vermindert offenbar die Zustandsdichte im Bereich der Bandlücke und erweitert diese im Vergleich zum SiO2. Eine Modellrechnung mit der Dichtefunktionaltheorie für ein Strukturmodell, das den „low-k Materialien“ nahe kommt, ist zum Vergleich mit der experimentell gefundenen kombinierten Zustandsdichte herangezogen worden und zeigt eine gute Übereinstimmung. Die im Standard-Herstellungsprozeß vorkommenden Verfahren des Plasmaätzens und der Plasmaveraschung können die Struktur des „low-k Materials“ z.B. an den Seitenwänden von Ätzgräben verändern. Die gestörten Bereiche wurden mit der energiegefilterten Elektronenmikroskopie untersucht. Dabei wurde gefunden, daß sich die Strukturveränderungen der Seitenwände bis zu einer Tiefe in der Größenordnung von ungefähr 10 Nanometern erstrecken. Diese Bereiche sind verarmt an Kohlenstoff und ähneln folglich mehr einem SiO2-Dielektrikum. Die Kohlenstoffverarmung erstreckt sich in die „low-k Schicht“ in Form eines gaussartigen Profils mit maximaler Kohlenstoffkonzentration in der Mitte der Schicht. Die Sauerstoffkonzentration und die mikroskopische Dichte steigen in der Nähe der Seitenwände.:TABLES OF CONTENTS LIST OF FIGURES AND TABLES IX 1 INTRODUCTION 1 1.1 Motivation 1 1.2 Low-k dielectric material trends 2 1.3 Required properties of low-k dielectric materials 7 1.4 Technical issues of low-k dielectric materials 7 1.5 Research objectives 8 2 EXPERIMENTAL TECHNIQUES 10 2.1 Transmission electron microscopy 10 2.2 Interaction of fast electrons with a solid specimen 11 2.3 Electron energy-loss spectroscopy 16 2.4 Elemental quantification 19 3 RADIAL DISTRIBUTION FUNCTION 21 3.1 Introduction 21 3.2 Physical aspects of an electron diffraction experiment 22 3.3 Merits and demerits of electron diffraction analysis 24 3.4 Results and Discussion 25 3.5 Conclusion 33 4 CHEMICAL STATE ANALYSIS OF LOW-K DIELECTRIC MATERIALS: AN EELS AND XPS STUDY 34 4.1 EELS analysis 34 4.2 Spectra post-acquisition processing 35 4.3 XPS analysis 37 4.4 Results and Discussion 39 4.5 Conclusion 48 5 DIELECTRIC RESPONSE OF LOW-K DIELECTRIC MATERIALS 49 5.1 Introduction 49 5.2 Exact determination of the loss-function 49 5.3 Fourier-log deconvolution 50 5.4 Kramers-Kronig analysis 51 5.5 Model fitting of dielectric functions: Lorentz oscillator model 52 5.6 Data processing 54 5.7 Results and Discussion 54 5.8 Conclusion 65 6 SIDE-WALL DAMAGE ANALYSIS 66 6.1 Introduction 66 6.2 Energy-filtered transmission electron microscopy (EFTEM) 67 6.3 Merits of EFTEM 69 6.4 Results and Discussion 70 7 SUMMARY, CONCLUSION AND SUGGESTIONS FOR THE FUTURE WORK 88 7.1 Summary 88 7.2 Conclusion 89 7.3 Suggestions for the future work 90 8 REFERENCES 92 9 APPENDIX 100 9.1 Appendix A: Script for normalization of loss function. 100 9.2 Appendix B: Kramers-Kronig analysis script 101 9.3 Appendix C: Sum rule for verification of Kramers-Kronig relation 102 9.4 Appendix D: Lorentz oscillator model 103 9.5 Appendix E: EFTEM image spectrum script 104 10 SELBSTÄNDIGKEITSERKLÄRUNG 108
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