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Journal articles on the topic 'Kapton film'

Author: Grafiati

Published: 4 June 2021

Last updated: 5 February 2022

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1

Jiang, Donghua, Dan Wang, Gang Liu, and Qiang Wei. "Atomic Oxygen Adaptability of Flexible Kapton/Al2O3 Composite Thin Films Prepared by Ion Exchange Method." Coatings 9, no. 10 (September 28, 2019): 624. http://dx.doi.org/10.3390/coatings9100624.

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Polyimide film (Kapton) is an important polymer material used for the construction of spacecrafts. The performance of Kapton can be degraded for atomic oxygen erosion in space. Commonly used atomic oxygen protective layers have issues such as poor toughness and poor adhesion with the film. In this paper, Kapton/Al2O3 nanocomposite films were prepared via an ion exchange method, and the optical properties, mechanical properties, and mechanisms for the change in the mass and microstructure, before and after atomic oxygen exposure, were analyzed. The results show that the deposition of the Kapton/Al2O3 surface nanocomposite film prepared via the ion exchange method has no obvious effects on the internal structure and optical transmittance of the Kapton film matrix. The tensile strength and elongation of the prepared film were much higher than those of the pure Kapton film, demonstrating its good flexibility. Scanning electron microscope (SEM) analysis showed that the etching pits had a carpet-like morphology on the composite film surface and were relatively small after atomic oxygen erosion. In contrast with the C–C bond rupture in the oxydianiline (ODA) benzene in Kapton films, the Kapton/Al2O3 nanocomposite film mainly destroyed the C=C bond in the pyromellitic dianhydride (PMDA) benzene ring. On exposure to an atomic oxygen environment for a short period, the Kapton/Al2O3 nanocomposite film exhibited improved atomic oxygen erosion resistance because the Al2O3 layer inhibited atomic oxygen diffusion. With increasing atomic oxygen exposure time, the atomic oxygen diffused into the Kapton matrix via the pores of the Al2O3 layer, causing damage to the substrate. This resulted in a detachment of the surface Al2O3 layer and exposure of the Kapton matrix, and thereby the atomic oxygen resistance was decreased. The applicability of the ion exchange mechanism of trivalent Al element on the surface modification of the polyimide is explored in this study. The behavior of the Kapton/Al2O3 composite film under the atomic oxygen environment of space is investigated, which provides the basis for studying the effects of atomic oxygen on the flexible protective Kapton film.

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2

Inagaki, Michio, Sunao Harada, Tetsuhito Sato, Tsuyoshi Nakajima, Yuji Horino, and Kenji Morita. "Carbonization of polyimide film “Kapton”." Carbon 27, no. 2 (1989): 253–57. http://dx.doi.org/10.1016/0008-6223(89)90131-0.

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3

Askins, D. Robert. "Hydrolytic Degradation of Kapton Film." Journal of Plastic Film & Sheeting 1, no. 1 (January 1985): 50–59. http://dx.doi.org/10.1177/875608798500100109.

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4

Kaburagi, Yutaka, and Yoshihiro Hishiyama. "Ferromagnetism discovered on heat-treating the aromatic polyimide film Kapton." Journal of Materials Research 17, no. 8 (August 2002): 2000–2006. http://dx.doi.org/10.1557/jmr.2002.0296.

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A commercially available aromatic polyimide film Kapton H 25-μm thick was heat-treated at temperatures between 490 and 540 °C in a nitrogen flow. Magnetization was measured as a function of magnetic field at 5 and 300 K and function of temperature in a field of 1 T. Diamagnetic and paramagnetic components were observed for all heat-treated films. Ferromagnetism was discovered even at 300 K in the films heat-treated at 490–520 °C. The saturation magnetization, coercive force, and residual magnetization for the 520 °C treated film were 0.059 J T−1 kg−1, 0.004 T, and 9 × 10−4 J T−1 kg−1, respectively, at 300 K. The ferromagnetism has been maintained 5 months after. Original Kapton H and the heated films were found to contain no metallic elements. The ferromagnetism should be caused by a long-range magnetic spin ordering of unpaired electrons located on slightly decomposed imide molecules with defects or on intermediates with free radicals formed by thermal decomposition. The ordering is probably established three dimensionally throughout the heat-treated films with a structural regularity similar to that of the original Kapton H.

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5

Bazhenov, S. L., I. N. Nasrullaev, I. V. Razumovskaya, S. K. Kudaikulova, B. A. Zhubanov, and Marc J. M. Abadie. "Multiple Cracking of Metallized Polyimide Kapton Films." Eurasian Chemico-Technological Journal 6, no. 1 (April 7, 2016): 41. http://dx.doi.org/10.18321/ectj332.

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Mechanical behaviour of metallized polyimide Kapton films was studied. The adhesion of metallized films to Kapton films is approximately hundred-folds higher than that of coatings made by usual sputter deposition of a metal on a polymer substrate. Multiple cracking of a metallized film was observed. Cracks<br />of two different scale levels are observed. The cracks of the first type (microcracks) are short with 1-2 μm length. The cracks of the second type are much longer and have length of several hundreds microns. The cracks of this type appear at higher strains as compared with the shorter ones. In thinner 7-μm-thick samples<br />long cracks were not observed.

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6

Kim, C., K. Hakamada, and M. Endo. "Raman spectroscopy of Kapton-derived carbon film." Carbon 36, no. 9 (September 1998): 1401–3. http://dx.doi.org/10.1016/s0008-6223(98)80035-3.

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7

Yadlowsky, E. J., and R. C. Hazelton. "Radiation induced conduction in Kapton H film." IEEE Transactions on Nuclear Science 35, no. 4 (1988): 1050–54. http://dx.doi.org/10.1109/23.3702.

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8

Inagaki, N., S. Tasaka, and M. Masumoto. "Plasma graft polymerization of vinylimidazole onto Kapton film surface for improvement of adhesion between Kapton film and copper." Journal of Applied Polymer Science 56, no. 2 (April 11, 1995): 135–45. http://dx.doi.org/10.1002/app.1995.070560203.

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9

Bourgerette, C., A. Oberlin, and M. Inagaki. "Structural changes from polyimide films to graphite: Part IV. Novax and PPT." Journal of Materials Research 10, no. 4 (April 1995): 1024–27. http://dx.doi.org/10.1557/jmr.1995.1024.

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Various polyimide films (Kapton, Upilex, Novax, and PPT) were carbonized and graphitized up to 3000 °C. They were studied by optical and electron microscopies. All films retaining oxygen as a cross linker over 1000 °C, i.e., Kapton, Upilex, and Novax, graphitize as anthracites (high rank coals) do. They get a long range statistical orientation parallel to the film plane with a nanotexture of flattened pores. Graphitization is both sudden and perfect above 2100 °C when the pore walls break. Since oxygen is released at 1000 °C, the film PPT behaves as a compact nonporous graphitizing carbon (orientation parallel to the film plane). Thermal graphitization is progressive and begins at a higher temperature.

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10

Bourgerette, C., A. Oberlin, and M. Inagaki. "Structural and textural changes from polyimide Kapton to graphite: Part I. Optical microscopy and transmission electron microscopy." Journal of Materials Research 7, no. 5 (May 1992): 1158–73. http://dx.doi.org/10.1557/jmr.1992.1158.

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Kapton films, 25 μm thick, were carbonized and then graphitized at various temperatures up to 3000 °C. They were studied by optical microscopy and transmission electron microscopy and were prepared by thin-sectioning for transmission electron microscopy. The residual embedded blocks were used as polished sections for optical microscopy. Kapton thin film heat-treated at 650 °C showed thin areas of preferred orientation at its two opposite faces. This orientation extends all over the film thickness between 800 °C and 1000 °C. It corresponds to a statistical orientation of small aromatic layer stacks, parallel to the film plane. From 1000 °C up to 2475 °C flattened pores develop everywhere. At 2475 °C, they suddenly collapse and partial graphitization occurs. The Kapton film is completely graphitized between 2820 °C and 3000 °C. The mechanism of graphitization is similar to that of anthracites and also to that of nongraphitizing carbons heat-treated under pressure.

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11

Barbos, Sergiu, Andrei Novac, Roxana Sprincenatu, Madalin Condel, Ion Mitelea, and Corneliu Craciunescu. "A Study of Ti-Ta Library and Microstructure Manufactured by Magnetron Sputtering." Solid State Phenomena 254 (August 2016): 97–101. http://dx.doi.org/10.4028/www.scientific.net/ssp.254.97.

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Ti-Ta films were deposited out of Ti and Ta targets on glass and kapton substrates. The co-deposition leaded to the formation of a compositional spread in the Ti-Ta system, a continuous variation of the Ta/Ti ratio along the full range of the film. The typical microstructure observed for the films deposited at RT consisted of columnar grains with dotted Ta-rich particles, reflecting a relatively nonhomogenous structure. Annealing at 400 °C leaded to the individualization of grain boundaries and to a coalescence of the Ta-rich particles. Annealing at 500 °C further reduced the amount of particles, but also appeared to be associated with the cracking in the stressed area of the film/kapton structure.

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12

Inagaki, N., S. Tasaka, and K. Hibi. "Surface modification of Kapton film by plasma treatments." Journal of Polymer Science Part A: Polymer Chemistry 30, no. 7 (June 1992): 1425–31. http://dx.doi.org/10.1002/pola.1992.080300722.

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13

Bieniosek, F. M., J. W. Kwan, L. Prost, and P. A. Seidl. "Imaging of heavy-ion beams on kapton film." Review of Scientific Instruments 73, no. 8 (August 2002): 2867–71. http://dx.doi.org/10.1063/1.1490417.

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14

lijima, Masayukli, and Yoshikazu Takahashi. "Electrical, thermal and mechanical properties of polyimide thin films prepared by high-temperature vapor deposition polymerization." High Performance Polymers 5, no. 3 (June 1993): 229–37. http://dx.doi.org/10.1088/0954-0083/5/3/007.

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Polyimide thin films were prepared on the whole surface of a substrate using a high-temperature vapor deposition polymerization method (VDP-H). In this method, pyromellitic dianhydride (PMDA) and oxydianiline (ODA), which are monomers of polyimides, are introduced into a process chamber from separate evaporation sources through inlet tubes. As the process chamber was kept at about 200 C, neither monomer could deposit on the substrate. Because the temperature of the substrate was higher than the evaporation temperature of the monomers, only polymerized films were deposited on the substrate. Infrared spectroscopy indicated that the VDP-H films were about 50% imidized. When the film thickness was less than I1 m, a uniform step coverage was observed, and above 2.5 pm a patterned surface was reduced to a planar surface. Film thickness was controlled by changing the amounts of monomers in the evaporation sources. The dielectric constant (E= 3.5), dissipation factor (tan 5 0.002), thermal characteristics (5% weight loss temperature= 551 C), and tensile strength (170 MPa) of the vDP-H films cured for 60 min at 300 C in vacuum were the same as those reported for Kapton® films. The modulus of elasticity (4.0 GPa) was larger than that of Kaptont®, and it was found that the VDP-H films showed less elongation than Kapton®.

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15

Callahan, D. L., Z. Ball, H. M. Phillips, and R. Sauerbrey. "Microstructure of laser-irradiated, conducting Kapton polyimide." Proceedings, annual meeting, Electron Microscopy Society of America 53 (August 13, 1995): 502–3. http://dx.doi.org/10.1017/s0424820100138889.

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Ultraviolet laser-irradiation can be used to induce an insulator-to-conductor phase transition on the surface of Kapton polyimide. Such structures have potential applications as resistors or conductors for VLSI applications as well as general utility electrodes. Although the percolative nature of the phase transformation has been well-established, there has been little definitive work on the mechanism or extent of transformation. In particular, there has been considerable debate about whether or not the transition is primarily photothermal in nature, as we propose, or photochemical. In this study, cross-sectional optical microscopy and transmission electron microscopy are utilized to characterize the nature of microstructural changes associated with the laser-induced pyrolysis of polyimide.Laser-modified polyimide samples initially 12 μm thick were prepared in cross-section by standard ultramicrotomy. Resulting contraction in parallel to the film surface has led to distortions in apparent magnification. The scale bars shown are calibrated for the direction normal to the film surface only.

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16

Sharma, B. L., J. K. Quamara, and P. K. C. Pillai. "Photoinduced discharge characteristics of Kapton-H polyimide film photoreceptors." Journal of Electrostatics 18, no. 3 (October 1986): 313–25. http://dx.doi.org/10.1016/0304-3886(86)90025-2.

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17

Reddy, M. Raja, N. Srinivasamurthy, and B. L. Agrawal. "Atomic oxygen protective coatings for Kapton film: a review." Surface and Coatings Technology 58, no. 1 (June 1993): 1–17. http://dx.doi.org/10.1016/0257-8972(93)90169-o.

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18

Inagaki, Michio, Kou-ichi Sakamoto, and Yoshihiro Hishiyama. "Carbonization and graphitization of polyimide Upilex." Journal of Materials Research 6, no. 5 (May 1991): 1108–13. http://dx.doi.org/10.1557/jmr.1991.1108.

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Two-step carbonization was found on a polyimide film, Upilex, similar to that observed on another polyimide, Kapton: large weight loss up to about 22 wt. % and linear shrinkage along the film surface to 30% in a narrow temperature range from 500 to 650 °C, and an additional small weight loss and shrinkage in a wide range between 700 and 1000 °C. The yield of carbonization agreed roughly with that calculated by assuming the release of non-carbon atoms as simple species of CO, O2, and N2. A 25 μm Upilex film yielded a relatively high degree of graphitization after heat treatment at 3000 °C: a layered structure under SEM, high magnetoresistance, and a sharp 002 x-ray diffraction peak at a d-spacing of 0.336 nm. The degree of graphitization was lower than for a similar Kapton film, which is attributed to the lack of flatness in the Upilex molecule. A very much lower degree of graphitization was observed for 50 μm Upilex films. This difference is tentatively attributed to constraints that must have influenced the orientation of the Upilex molecules near the surface of the films as they were formed.

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19

Liew, Li-Anne, D. Boteler, C. Y. Lin, N. Marsiglia, and Y. C. Lee. "Design and Fabrication of a PCB MEMS Module With Integrated Switches and Sensor Suite." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2015, DPC (January 1, 2015): 001070–122. http://dx.doi.org/10.4071/2015dpc-tp63.

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We demonstrate the feasibility of integrating Kapton-based MEMS capacitive switches and a sensor suite onto a printed circuit board (PCB) with minimal impact to existing manufacturing processes. Copper-cladded kapton laminates were bonded onto rigid PCB substrates with a BCB film spacer. The kapton was patterned using reactive ion etching to produce MEMS structures such as suspended membranes and flexures. Atomic layer deposited alumina coatings were applied as dielectric layers for the capacitive switches and tilt sensors/accelerometers. The copper cladding was also patterned by etching to function as electrical leads, resistors, and capacitive electrodes. In this way, MEMS switches, tilt/acceleration sensors, temperature sensors, humidity sensors, and vacuum pressure sensors, were all fabricated monolithically onto a PCB in a single module. We describe the fabrication process, challenges and improvements to the process in particular in the bonding and etching of the kapton films. We also describe the design of the various sensors and switches and demonstrate their functionality.

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20

SUCHANECK, G., O. VOLKONSKIY, Z. HUBICKA, A. DEJNEKA, L. JASTRABIK, B. ADOLPHI, M. BERTRAM, and G. GERLACH. "TITANIA SEED LAYERS FOR PZT THIN FILM GROWTH ON COPPER-COATED KAPTON FILMS." Integrated Ferroelectrics 108, no. 1 (October 22, 2009): 57–66. http://dx.doi.org/10.1080/10584580903324097.

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21

Marzouk, H. A., J. Y. Kim, J. S. Kim, P. J. Reucroft, R. J. Jacob, J. D. Robertson, and C. Eloi. "Non-selective copper film growth on Kapton (polyimide) by MOCVD." Thin Solid Films 249, no. 1 (September 1994): 22–27. http://dx.doi.org/10.1016/0040-6090(94)90080-9.

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22

Li, Ruiqi, Chundong Li, Shiyu He, Mingwei Di, and Dezhuang Yang. "Damage effect of keV proton irradiation on aluminized Kapton film." Radiation Physics and Chemistry 77, no. 4 (April 2008): 482–89. http://dx.doi.org/10.1016/j.radphyschem.2007.08.007.

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23

Gerasimov, Vasily V., Alexey K. Nikitin, Alexey G. Lemzyakov, Ivan A. Azarov, Ilya A. Milekhin, Boris A. Knyazev, Evgeni A. Bezus, Elena A. Kadomina, and Leonid L. Doskolovich. "Splitting a terahertz surface plasmon polariton beam using Kapton film." Journal of the Optical Society of America B 37, no. 5 (April 23, 2020): 1461. http://dx.doi.org/10.1364/josab.386331.

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24

Zhou, Xiaoqi, Huan Li, Guanghua Yu, Yangkai Chen, Yandong Wang, Zhoufang Zeng, and Lifeng Chi. "A highly-efficient, stable, and flexible Kapton tape-based SERS chip." Materials Chemistry Frontiers 5, no. 17 (2021): 6471–75. http://dx.doi.org/10.1039/d1qm00547b.

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A flexible and highly effective SERS chip fully covered with silver nanoparticles is obtained on Kapton tape. Long-term SERS stability with 98.2% residual activity for up to 4 months is achieved with PET film encapsulation.

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25

Huerta, E., A. I. Oliva, F. Avilés, J. González-Hernández, and J. E. Corona. "Elastic Modulus Determination of Al-Cu Film Alloys Prepared by Thermal Diffusion." Journal of Nanomaterials 2012 (2012): 1–8. http://dx.doi.org/10.1155/2012/895131.

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Elastic moduli of 50–250 nm thick Al-50 at % Cu film alloys deposited by thermal evaporation on Kapton substrates and postformed by thermal diffusion are investigated. Formation of the Al2Cu alloy phase was confirmed by X-ray photoelectron spectroscopy (XPS). Surface morphology was examined by atomic force microscopy (AFM) and scanning electron microscopy (SEM) before and after tensile mechanical testing. Force-strain curves of the Al-Cu alloy were obtained by subtracting the effect of the force-strain Kapton curves from the corresponding curves of the Al-Cu/Kapton system. A reduction in the elastic modulus of the Al-Cu alloys from 106.1 to 77.8 GPa with the increase of alloy thickness was obtained. Measured elastic moduli were between the reported bulk modulus for Al and Cu. Reductions in the surface roughness and increments in the grain size were measured after tensile testing of the Al-Cu alloys.

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26

Konno, H., T. Nakahashi, and M. Inagaki. "State analysis of nitrogen in carbon film derived from polyimide Kapton." Carbon 35, no. 5 (1997): 669–74. http://dx.doi.org/10.1016/s0008-6223(97)00022-5.

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27

Jia, Ouyang, Liu Yonggui, Liu Jinliang, Wang Mingxing, and Feng Jiahuai. "Research on a Folded Blumlein Line Using Kapton Film as Dielectrics." Plasma Science and Technology 10, no. 2 (April 2008): 231–34. http://dx.doi.org/10.1088/1009-0630/10/2/19.

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28

Muhina, L. L., I. V. Razumovskaja, S. K. Kudaikulova, B. A. Zhubanov, and M. J. M. Abadie. "The Microhardness as an Express Method for Estimation the Depth of Metal Particle Distribution." Eurasian Chemico-Technological Journal 6, no. 1 (April 7, 2016): 37. http://dx.doi.org/10.18321/ectj331.

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By measurement of microhardness of silver layer on polyimide films and its reduction after removing the stress, the depth of silver distribution in the polyimide films was calculated. A significant hardening of Kapton 100 HN films was observed especially for cobalt-impregnated materials, which was about 10 μm. The distribution of silver in the film layers was obviously deeper that manifested as entirely lower hardening at microhardness measurement. Because of the initial microhardness of Upilex it was observed strong hardening of the effort, which was led to shallow distribution of metals in the films. For example, Cometallized films showed 5 μm distribution in the top film layers. Such method could allow precisely and rapidly estimating the distribution of metal particles impregnated in metallized polymeric materials.

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29

Suchaneck, Gunnar, O. Volkonskiy, Gerald Gerlach, Zdenek Hubička, A. Dejneka, Lubomir Jastrabik, D. Kiselev, I. Bdikin, and Andréi L. Kholkin. "Piezoelectric PZT Thin Films on Flexible Copper-Coated Polymer Films." Materials Science Forum 636-637 (January 2010): 392–97. http://dx.doi.org/10.4028/www.scientific.net/msf.636-637.392.

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This work analyzes the processing of Pb(Zr,Ti)O3 (PZT) thin films directly on copper-coated polymer films. PZT thin film deposition was performed onto the metallized Kapton® films using a single RF plasma jet. In order to reduce the interaction of PZT and Cu during the initial growth stage, an ultrathin amorphous TiO2-x seeding layer was sputter-deposited prior to PZT deposition. The film texture was a mixture of (111)-oriented perovskite nanocrystals, rutile and pyrochlore. Topography and piezoelectric in-plane and out-of-plane response of the films were evaluated using a commercial AFM adapted for piezoforce measurements. The as-deposited films were self-polarized with polarization pointing at the surface of the sample. Polarization was switchable and a piezoelectric hysteresis was obtained.

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30

Li, Ruiqi, Chundong Li, Shiyu He, Mingwei Di, and Dezhuang Yang. "Radiation effect of keV protons on optical properties of aluminized Kapton film." Radiation Physics and Chemistry 76, no. 7 (July 2007): 1200–1204. http://dx.doi.org/10.1016/j.radphyschem.2006.12.005.

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31

Inagaki, N., S. Tasaka, and A. Onodera. "Improved adhesion between Kapton film and copper metal by silane-coupling reactions." Journal of Applied Polymer Science 73, no. 9 (August 29, 1999): 1645–54. http://dx.doi.org/10.1002/(sici)1097-4628(19990829)73:9<1645::aid-app5>3.0.co;2-l.

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32

Garg, Maneesha, and J. K. Quamara. "Electrical conduction behaviour of high energy ion irradiated Kapton-H polyimide film." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 179, no. 3 (August 2001): 389–96. http://dx.doi.org/10.1016/s0168-583x(01)00578-x.

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33

Ramazanov, Shikhgasan, Ştefan Ţălu, Dinara Sobola, Farid Orudzev, Guseyn Ramazanov, Daud Selimov, Pavel Kaspar, Robert Macků, and Anton Nazarov. "Crack resistance of bismuth ferrite films obtained on a flexible substrate." E3S Web of Conferences 295 (2021): 04008. http://dx.doi.org/10.1051/e3sconf/202129504008.

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Ultrathin BiOx and FeOx layers were obtained by Atomic Layer Deposition (ALD) on the surface of a flexible Kapton substrate (poly (4,4’-oxydiphenylene-pyromellitimide)) at a temperature of 250 °C. The layer thickness was 50 - 100 nm. Surface morphology, electrical polarization, and mechanical properties were investigated by Atomic Force Microscope, Piezoelectric Force Microscopy and Force Modulation Microscopy. Chemical analysis was performed by X-ray Photoelectron Spectroscopy, where the formation of Bi2O3 and Fe2O3 phases, as well as intermediate phases in the Bi-Fe-O system, was observed. With a small increase in the Bi content of the film, the BFO / Kapton structure becomes more crack resistant. Modification of the Kapton surface with bismuth and iron oxides showed that such a composition exhibits multiferroic behavior.

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34

Meserschmidt, Marc, Mathias Meyer, and Peter Luger. "Ultra-low-temperature X-ray data collection with a newly developed 0.1 mm Kapton-film cylinder for a closed-cycle helium cryostat." Journal of Applied Crystallography 36, no. 6 (November 15, 2003): 1452–54. http://dx.doi.org/10.1107/s0021889803019411.

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A 0.1 mm Kapton-film vacuum chamber was constructed to be mounted on the cold head of a closed-cycle helium cryostat. The use of Kapton instead of beryllium results in a low and practically non-structured background, which is thus tolerable on the area-detection frames of modern CCD detectors. The Kapton chamber is only fixed at the upper and lower holders of the cryostat and its counterweight, and is stabilized by spanning with fine pitch threads, holding constant the necessary vacuum of 10−6 mbar for at least several days. Low costs and non-toxicity are further advantages of this material; moreover, the sample remains visible even after cooling. Data collections on strychnine single crystals at 15 K showed improvedI/σ ratios of high-order reflections compared with 100 K data, most favourably when synchrotron primary radiation was used.

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35

Ford, S. M., J. Davies, B. Kar, S. D. Qi, S. McWhorter, S. A. Soper, and C. K. Malek. "Micromachining in Plastics Using X-Ray Lithography for the Fabrication of Micro-Electrophoresis Devices." Journal of Biomechanical Engineering 121, no. 1 (February 1, 1999): 13–21. http://dx.doi.org/10.1115/1.2798035.

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Micromachining was performed in polymethylmethacrylate (PMMA) using X-ray lithography for the fabrication of miniaturized devices (microchips) for potential applications in chemical and genetic analyses. The devices were fabricated using two different techniques: transfer mask technology and a Kapton® mask. For both processes, the channel topography was transferred (1:1) to the appropriate substrate via the use of an optical mask. In the case of the transfer mask technique, the PMMA substrate was coated with a positive photoresist and a thin Au/Cr plating base. Following UV exposure, the resist was developed and a thick overlayer (∼3 μm) of Au electroplated onto the PMMA substrate only where the resist was removed, which acted as an absorber of the X-rays. In the other technique, a Kapton® film was used as the X-ray mask. In this case, the Kapton® film was UV exposed using the optical mask to define the channel topography and following development of the resist, a thick Au overlayer (8 μm) was electrodeposited onto the Kapton® sheet. The PMMA wafer during X-ray exposure was situated directly underneath the Kapton® mask. In both cases, the PMMA wafer was exposed to soft X-rays and developed to remove the exposed PMMA. The resulting channels were found to be 20 μm in width (determined by optical mask) with channel depths of ∼50 μm (determined by x-ray exposure time). In order to demonstrate the utility of this micromachining process, several components were fabricated in PMMA including capillary/chip connectors, injectors for fixed-volume sample introduction, separation channels for electrophoresis and integrated fiber optic fluorescence detectors. These components could be integrated into a single device to assemble a system appropriate for the rapid analysis of various targets.

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36

Kleiner, Anja, Gunnar Suchaneck, Alexandr Dejneka, Lubomir Jastrabik, Vasily Lavrentiev, Dmitry A. Kiselev, and Gerald Gerlach. "Multitarget Sputtering of Piezoelectric Mixed Oxide Thin Films onto Flexible Substrates." Solid State Phenomena 230 (June 2015): 3–7. http://dx.doi.org/10.4028/www.scientific.net/ssp.230.3.

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Large area film deposition was performed by means of multitarget reactive magnetron sputtering from metallic targets (Pb, Ti, Zr) with a diameter of 200 mm onto Cu-coated Kapton® HN substrates. High-power pulse sputtering has been employed for the Zr-target (or alternatively for the Ti-target). Film composition profiles were evaluated by XPS and RBS. Piezoelectric properties were investigated by PFM.

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37

Marin, N., and Y. Serruys. "Metallic impurities diffusion in a polymer film (Kapton) under and out of irradiation." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 131, no. 1-4 (August 1997): 109–20. http://dx.doi.org/10.1016/s0168-583x(97)00197-3.

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Konno, Hidetaka, Keisuke Shiba, Yutaka Kaburagi, Yoshihiro Hishiyama, and Michio Inagaki. "Carbonization and graphitization of Kapton-type polyimide film having boron-bearing functional groups." Carbon 39, no. 11 (September 2001): 1731–40. http://dx.doi.org/10.1016/s0008-6223(00)00304-3.

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Mohri, Maryam, Mahmoud Nili-Ahmadabadi, Mohsen PouryazdanPanah, and Horst Hahn. "Evaluation of structure and mechanical properties of Ni-rich NiTi/Kapton composite film." Materials Science and Engineering: A 668 (June 2016): 13–19. http://dx.doi.org/10.1016/j.msea.2016.05.044.

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Purwanto, S., W. A. Adi, and Y. Taryana. "Enhancement of microwave absorption properties on modified kapton film by ion implantation process." Journal of Physics: Conference Series 817 (April 10, 2017): 012002. http://dx.doi.org/10.1088/1742-6596/817/1/012002.

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Wang, Z. D., and H. W. Weber. "Kapton film effect on the mechanical strength of ITER TF coil candidate insulation." Mechanics of Materials 37, no. 1 (January 2005): 113–20. http://dx.doi.org/10.1016/j.mechmat.2003.12.005.

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Hishiyama, Y., A. Yoshida, Y. Kaburagi, and M. Inagaki. "Formation of pores in carbonized polyimide film kapton by high temperature heat treatment." Carbon 30, no. 3 (1992): 517–19. http://dx.doi.org/10.1016/0008-6223(92)90052-x.

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43

Gueye, M., B. M. Wague, F. Zighem, M. Belmeguenai, M. S. Gabor, T. Petrisor, C. Tiusan, S. Mercone, and D. Faurie. "Bending strain-tunable magnetic anisotropy in Co2FeAl Heusler thin film on Kapton®." Applied Physics Letters 105, no. 6 (August 11, 2014): 062409. http://dx.doi.org/10.1063/1.4893157.

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Nemirovsky, D., R. Moreh, Y. Finkelstein, and J. Mayers. "Study of the anisotropy in the atomic momentum distributions in a Kapton film." Journal of Physics: Condensed Matter 13, no. 22 (May 18, 2001): 5053–63. http://dx.doi.org/10.1088/0953-8984/13/22/303.

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Liu, Yang, and Guohui Li. "Numerical simulation on atomic oxygen undercutting of Kapton film in low earth orbit." Acta Astronautica 67, no. 3-4 (August 2010): 388–95. http://dx.doi.org/10.1016/j.actaastro.2010.02.012.

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46

Wang, Yan Fang, Wen Liang Yang, Zhong Yu Hou, and Yan Wang. "A Flexible Piezoelectric Nanogenerator Based on Free-Standing Polydimethylsiloxane / ZnO Nanowire Hybrid Film." Materials Science Forum 977 (February 2020): 244–49. http://dx.doi.org/10.4028/www.scientific.net/msf.977.244.

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We report a facil and robust strategy for fabricating flexible piezoelectric nanogenerator based on free-standing polydimethylsiloxane (PDMS) / ZnO nanowire (NW) hybrid film. Free-standing hybrid film was fabricated by mechanical exfoliation of ZnO NWs grown on a FR4 substrate. The free-standing ZnO/PDMS hybrid film is robust enough to be transferred into a flexible substrate of polyimide (Kapton) with Au sputtered. The nanogenerator based on the free-standing hybrid film exhibits stable output voltage about 0.7 V and current of 7 nA under pressing conditions. This facil and robust method should hold significant promise applications in efficient energy harvesting.

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Choi, Sang-Jun, Kyung Kim, Hyun Kim, Jun Yoon, Mi Lee, Kyung-Suk Choi, Ung-Dae Sung, et al. "Highly Efficient, Flexible, and Recyclable Air Filters Using Polyimide Films with Patterned Thru-Holes Fabricated by Ion Milling." Applied Sciences 9, no. 2 (January 10, 2019): 235. http://dx.doi.org/10.3390/app9020235.

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We present the first demonstration of the environmental application of a polyimide film (Kapton) with patterned thru-holes as a novel, efficient, flexible, recyclable, and active particulate matter (PM) air filter. The Kapton air filter captures PM using micro-sized thru-holes and the strong electrostatic force because of its high work function. It is highly efficient, transparent, flexible, and heat-resistant. Furthermore, it can be recycled simply by washing it with tap water. The proposed PM filter is a promising candidate for use as a highly efficient and economical recyclable air filter for home appliances, such as air-purifiers, air-conditioners, and humidifiers, as well as industrial filtration systems.

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Zabila, Yevhen, Marta Marszalek, Michal Krupinski, Arkadiusz Zarzycki, and Marcin Perzanowski. "Magnetotransport Properties of Semi-Metallic Bismuth Thin Films for Flexible Sensor Applications." Coatings 11, no. 2 (February 2, 2021): 175. http://dx.doi.org/10.3390/coatings11020175.

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In this paper we describe characterization of semi-metallic bismuth thin films. We prepared bismuth thin films by a deposition of bismuth through thermal evaporation onto flexible Kapton substrates and annealing at temperatures close to the melting point of Bi. We studied the morphology and transport properties of these films. Immediately after the deposition we observed competition between vanishing of the grain boundaries and elastic strain energy, which stabilized at larger thicknesses leading to the grain size of 140 nm. This effect was accompanied by a continuous decrease of resistivity which, however, was larger than for the bulk bismuth. The film annealing at temperatures close to the melting point of Bi led to a 300% increase of magnetoresistance at room temperature and in the magnetic field of 7 T. The in situ resistance measurements allowed us to determine the permissible temperature at which the annealing does not cause the loss of film continuity.

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Martins, Rui Miguel S., Francisco Manuel Braz Fernandes, Rui Jorge C. Silva, Manfred Beckers, and Norbert Schell. "In Situ Observation of Ni-Ti Thin Film Growth by Synchrotron Radiation Scattering." Materials Science Forum 514-516 (May 2006): 1588–92. http://dx.doi.org/10.4028/www.scientific.net/msf.514-516.1588.

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A sputter deposition chamber inserted into the six-circle Huber diffractometer of the materials research station of the ROssendorf BeamLine (ROBL-CRG) at ESRF allowed to perform in-situ experiments during film growth of Ni-Ti. It is equipped with Kapton windows for X-Ray Diffraction (XRD) and specular Reflectivity (XRR) measurements. By following in situ the evolution of the structure of the growing film, we reveal intermediate “states” which cannot be seen/revealed ex situ, because those states occurred only during the growth but were no longer visible after deposition. Vertical Bragg-Brentano large-angle scattering geometry was employed to study the different trends of structural transformations taking place during deposition. Ni-Ti films exhibiting a non-uniform phase content across the film thickness could be produced by varying the power of co-sputtering Ni-Ti plus Ti. A significant decrease of IB2{110}/IB2{200} was observed when a bias of -45 V was applied.

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Inagaki, Michio, and Yoshihiro Hishiyama. "Structural and textural changes from polyimide Kapton to graphite: Part II. Magnetoresistance and x-ray diffraction." Journal of Materials Research 7, no. 5 (May 1992): 1174–77. http://dx.doi.org/10.1557/jmr.1992.1174.

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Structural and textural changes in carbon films prepared from the polyimide Kapton with heat-treatment temperatures up to 3000 °C were followed by measuring the magnetoresistance at 77 K, the ratio of electrical resistivity at room temperature to that at 77 K, and x-ray powder patterns. The maximum magnetoresistance (Δρ/ρ)max as a measure of graphitization changed its sign from negative to positive around 2500 °C and then increased its value abruptly. The resistivity ratio ρR.T./ρ77 K increased above 2500 °C treatment. The values of (Δρ/ρ)max and ρR.T./ρ77 K after 3000 °C treatment reached 275% and 0.93, respectively. The average interlayer spacing d002 after the 3000 °C treatment was 0.3354 nm, the same as natural graphite. The changes in structure and texture in the film were consistent with the model proposed in the previous paper from observation by transmission electron microscopy.

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