Relevant bibliographies by topics / Lithography, Electron beam

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Academic literature on the topic 'Lithography, Electron beam'

Author: Grafiati
Published: 4 June 2021
Last updated: 26 July 2024

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Books on the topic "Lithography, Electron beam"

1

Hahmann, Peter. Electron-beam lithography contributions from Jena. Verlag Vopelius, 2014.

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2

Gu, Wenqi. Dian zi shu bao guang wei na jia gong ji shu. Beijing gong ye da xue chu ban she, 2004.

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3

International Symposium on Electron, Ion, and Photon Beams (2nd 1984 Tarrytown, N.Y.). Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York. Edited by Kelly J, American Vacuum Society, and American Institute of Physics. Published for the American Vacuum Society by the American Institute of Physics, 1985.

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4

Popov, V. K. Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii. "Radio i svi͡a︡zʹ", 1985.

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5

D, Blais Phillip, and International Society for Hybrid Microelectronics., eds. Electron-beam, X-ray, & ion-beam techniques for submicrometer lithographies V: 11-12 March, 1986, Santa Clara, California. SPIE--the International Society for Optical Engineering, 1986.

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6

J, Resnick Douglas, and Society of Photo-optical Instrumentation Engineers., eds. Electron-beam, X-ray, and ion-beam technology: Submicrometer lithographies IX : 7-8 March 1990, San Jose, California. SPIE--the International Society for Optical Engineering, 1990.

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7

International Symposium on Nanometer Structure Electronics (1984 Toyonaka, Osaka University). Nanometer structure electronics: An investigation of the future of micro-electronics : proceedings of the International Symposium on Nanometer Structure Electronics, April 16-18, 1984 Osaka University, Toyonaka, Japan. Ohm, 1985.

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8

K, Marrian Christie R., ed. Technology of proximal probe lithography. SPIE Optical Engineering Press, 1993.

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9

1946-, Peckerar Martin Charles, and Society of Photo-optical Instrumentation Engineers., eds. Electon-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing: 6-7 March 1991, San Jose, California. SPIE, 1991.

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10

D, Blais Phillip, and Society of Photo-optical Instrumentation Engineers., eds. Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V: 11-12 March 1986, Santa Clara, California. SPIE--the International Society for Optical Engineering, 1986.

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