Relevant bibliographies by topics / Low Thermal Budget

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  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'Low Thermal Budget'

Author: Grafiati
Published: 9 March 2023
Last updated: 31 July 2025

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Journal articles on the topic "Low Thermal Budget"

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Sharangpani, R., K. C. Cherukuri, and R. Singh. "Low thermal budget processing of organic dielectrics." IEEE Transactions on Electron Devices 43, no. 7 (1996): 1168–70. http://dx.doi.org/10.1109/16.502430.

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Pradeepkumar, Maurya Sandeep, Harsh Vardhan Singh, Sooraj Kumar, Joysurya Basu, and Md Imteyaz Ahmad. "Low thermal budget processing of CdS thin films." Materials Letters 280 (December 2020): 128560. http://dx.doi.org/10.1016/j.matlet.2020.128560.

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Bhat, N., A. W. Wang, and K. C. Saraswat. "Rapid thermal anneal of gate oxides for low thermal budget TFT's." IEEE Transactions on Electron Devices 46, no. 1 (1999): 63–69. http://dx.doi.org/10.1109/16.737442.

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Michael, Aron, and Chee Yee Kwok. "Evaporated Thick Polysilicon Film With Low Stress and Low Thermal Budget." Journal of Microelectromechanical Systems 22, no. 4 (2013): 825–27. http://dx.doi.org/10.1109/jmems.2013.2248129.

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Kuo, Yue. "Pulsed Rapid Thermal Annealing as a Low Thermal Budget Semiconductor Fabrication Process." ECS Meeting Abstracts MA2023-01, no. 29 (2023): 1776. http://dx.doi.org/10.1149/ma2023-01291776mtgabs.

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Thermal annealing is required in the fabrication of many semiconductor devices. A proper annealing condition, e.g., temperature, atmosphere, and time, can improve the device performance, e.g., by reducing defect densities in bulk films and at interfaces. In addition, the annealing step can generate new structures in previously deposited thin films for various new functions. However, when the annealing condition is improper, e.g., the temperature is too high or the annealing time is too long, the device performance can deteriorate or dysfunction due to damage to the composing material, structur
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Mazzamuto, Fulvio, Sebastien Halty, Hideaki Tanimura, and Yoshihiro Mori. "Low Thermal Budget Ohmic Contact Formation by Laser Anneal." Materials Science Forum 858 (May 2016): 565–68. http://dx.doi.org/10.4028/www.scientific.net/msf.858.565.

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In this work, we demonstrate the possibility to achieve an ohmic contact using a low thermal budget applicable to backside processing after wafer thinning. The process window for laser annealing as a function of the thinning process is investigated. By laser melt annealing, we demonstrate the possibility for different silicide phases from pure nickel deposition on thinned 4H-SiC, formation of uniform carbon nanoclusters at the metal/SiC interface and recovery of thinning-induced defects. This has been demonstrated as a function of different thinning process and surface conditions.
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König, U., and J. Hersener. "Needs of Low Thermal Budget Processing in SiGe Technology." Solid State Phenomena 47-48 (July 1995): 17–32. http://dx.doi.org/10.4028/www.scientific.net/ssp.47-48.17.

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Kang, Il-Suk, Sung-Hun Yu, Hyun-Sang Seo, et al. "Low Thermal Budget Crystallization of Amorphous Silicon by Nanoclusters." Electrochemical and Solid-State Letters 12, no. 9 (2009): H319. http://dx.doi.org/10.1149/1.3152594.

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Abbadie, A., J. M. Hartmann, P. Holliger, M. N. Séméria, P. Besson, and P. Gentile. "Low thermal budget surface preparation of Si and SiGe." Applied Surface Science 225, no. 1-4 (2004): 256–66. http://dx.doi.org/10.1016/j.apsusc.2003.10.018.

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Simon, Daniel K., Thomas Henke, Paul M. Jordan, et al. "Low-thermal budget flash light annealing for Al2O3surface passivation." physica status solidi (RRL) - Rapid Research Letters 9, no. 11 (2015): 631–35. http://dx.doi.org/10.1002/pssr.201510306.

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Dissertations / Theses on the topic "Low Thermal Budget"

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Schiz, Frank Jochen Wilhelm. "The effect of fluorine in low thermal budget polysilicon emitters for SiGe heterojunction bipolar transistors." Thesis, University of Southampton, 1999. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.287345.

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Krockert, Katja. "Development and characterization of a low thermal budget process for multi-crystalline silicon solar cells." Doctoral thesis, Technische Universitaet Bergakademie Freiberg Universitaetsbibliothek "Georgius Agricola", 2016. http://nbn-resolving.de/urn:nbn:de:bsz:105-qucosa-192742.

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Higher conversion efficiencies while reducing costs at the same time is the ultimate goal driving the development of solar cells. Multi-crystalline silicon has attracted considerable attention because of its high stability against light soaking. In case of solar grade multi-crystalline silicon the rigorous control of metal impurities is desirable for solar cell fabrication. It is the aim of this thesis to develop a new manufacturing process optimized for solar-grade multi-crystalline silicon solar cells. In this work the goal is to form solar cell emitters in silicon substrates by plasma immer
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Saidi, Bilel. "Metal gate work function modulation mechanisms for 20-14 nm CMOS low thermal budget integration." Toulouse 3, 2014. http://www.theses.fr/2014TOU30300.

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Afin de poursuivre la miniaturisation des dispositifs CMOS, l'empilement HfO2/Métal a remplacé l'empilement SiO2/polySi. Cependant, la diffusion incontrôlée des espèces chimiques dans ces nouveaux empilements fabriqués avec un fort budget thermique compromet l'obtention des travaux de sortie (EWF) et des épaisseurs d'oxyde équivalent (EOT) définis par l'ITRS. Une solution consiste à utiliser une intégration à plus bas budget thermique. Avec cette nouvelle approche, l'objectif de ce travail de thèse était de comprendre les paramètres physiques permettant d'obtenir une EOT<1nm et des EWF perm
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Krockert, Katja [Verfasser], Hans-Joachim [Akademischer Betreuer] Möller, Hans-Joachim [Gutachter] Möller, and Gerhard [Gutachter] Gobsch. "Development and characterization of a low thermal budget process for multi-crystalline silicon solar cells : Development and characterization of a low thermal budget process for multi-crystalline silicon solar cells / Katja Krockert ; Gutachter: Hans-Joachim Möller, Gerhard Gobsch ; Betreuer: Hans-Joachim Möller." Freiberg : Technische Universitaet Bergakademie Freiberg Universitaetsbibliothek "Georgius Agricola", 2016. http://d-nb.info/1220912336/34.

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Gregory, Hayden J. "Low thermal budget issues for Si/Si←1←-←xGe←x heterojunction bipolar transistors and selective epitaxial Si bipolar transistors." Thesis, University of Southampton, 1995. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.361660.

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BIETTI, SERGIO. "Nanostructured III-V epilayers on silicon substrate for optoelectronic applications." Doctoral thesis, Università degli Studi di Milano-Bicocca, 2011. http://hdl.handle.net/10281/18979.

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The integration of III-V devices on Si substrates would allow the fabrication of specialized devices for optoelectronics and photonics directly on the highly refined silicon infrastructure, based on CMOS technology. In this work of thesis, Droplet Epitaxy technique is used for the low thermal budget fabrication of GaAs quantum nanostructures on silicon substrates through a Ge layer and for the fabrication of GaAs local artificial substrates directly on Si substrate. Quantum nanostructures grown on Si substrate through a Ge layer showed an intense photoluminescence emission, detectable up to ro
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Chang, Chung-Yih, and 張忠義. "Low Temperature Electron Cyclotron Resonance Oxidation with Low Thermal Budget Annealing." Thesis, 1995. http://ndltd.ncl.edu.tw/handle/64384961082973421703.

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碩士<br>國立交通大學<br>電子研究所<br>83<br>In this thesis,we successfully utilize the rapid thermal O2, N2, and N2O annealing technology to improve the quality of the ultra-low temperature (-20?C) electron cyclotron resonance (ECR) thin oxide. Among the three kinds of annealing technology, the N2O annealed oxide is found to have the better electrical characteristics due to the Si-N bonds in place of the weaker bonds at the Si/SiO2 interface. The breakdwon field( over 12.5 MV/cm), Dit (1.95e10cm-2eV-1)
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Harn, Shyh-Chyang, and 韓士強. "A Study of Shallow Junction Formation by Using Low Thermal Budget." Thesis, 1999. http://ndltd.ncl.edu.tw/handle/78378584814180772272.

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碩士<br>國立臺灣科技大學<br>電子工程系<br>87<br>The scaling of CMOS devices to satisfy deep submicrometer technology requirements involves several process adjustments . One of the main challenges is the formation of shallow junction . Low-energy ion implantation , in tandem with low-thermal budget annealing processes , allows us to form shallower junctions . To adopt a low thermal budget scheme , we employed long-time low-temperature furnace annealing and rapid thermal annealing（RTA）as an approach of activating the implanted dopants without significant diffusion and eliminating the implanted-induced defects
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Wang, Yu-Da, and 王裕達. "The fabrication and characterization of low-thermal-budget poly-Si TFTs." Thesis, 1996. http://ndltd.ncl.edu.tw/handle/63928685294274586306.

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Huang, Tzu-En, and 黃子恩. "Visible and Far Infrared Laser Annealing-enabled Low Thermal Budget Ge Transistor." Thesis, 2016. http://ndltd.ncl.edu.tw/handle/248766.

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Books on the topic "Low Thermal Budget"

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Clarke, Andrew. Energy flow in organisms. Oxford University Press, 2017. http://dx.doi.org/10.1093/oso/9780199551668.003.0004.

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An organism is an open thermodynamic system exchanging both energy and materials with its environment. Organisms exchange energy with their environment by radiation, conduction, convection and evaporation of water. The relative importance of these varies with the organism and its situation. Newton’s Law of Cooling is a simplification that is useful only for warm endotherms in a still, cool environment. For all other circumstances a full biophysical treatment is necessary. Flows of chemical potential energy can be captured by a balanced energy budget. A full description of the energy balance of
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Thermal insulation efficiency: Report (to accompany H.R. 4801) (including cost estimate of the Congressional Budget Office). [U.S. Government Printing Office], 2014.

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Book chapters on the topic "Low Thermal Budget"

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Fair, Richard B. "Oxidation-Induced Defects and Effects in Silicon During Low Thermal-Budget Processing." In The Physics and Chemistry of SiO2 and the Si-SiO2 Interface. Springer US, 1988. http://dx.doi.org/10.1007/978-1-4899-0774-5_51.

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Toro, Francisca, Esteban Fernández-Vázquez, and Mònica Serrano. "The Gender–energy–poverty Nexus Under Review: A Longitudinal Study for Spain." In Studies in Energy, Resource and Environmental Economics. Springer International Publishing, 2023. http://dx.doi.org/10.1007/978-3-031-35684-1_6.

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AbstractLinks between gender, poverty, and energy have been hinted at in many studies mainly focused on livelihood strategy and economic development of low income, showing that the consequences of energy poverty may vary between women and men mainly because women are more exposed to deal with energy-related activities. At the European Union, where more than 50 million people are unable to afford proper indoor thermal comfort, the main research constraint is the lack of publicly access to gender-disaggregated data on energy poverty. This chapter contributes to literature on the gender–energy–po
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Caymax, Matty R., and W. Y. Leong. "Low Thermal Budget Chemical Vapour Deposition Techniques for Si and SiGe." In Advanced Silicon and Semiconducting Silicon-Alloy Based Materials and Devices. CRC Press, 2021. http://dx.doi.org/10.1201/9781003208860-5.

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Haigh, Joanna D., and Peter Cargill. "The Earth’s Climate System." In The Sun's Influence on Climate. Princeton University Press, 2015. http://dx.doi.org/10.23943/princeton/9780691153834.003.0002.

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This chapter focuses on solar radiation and its interaction with the terrestrial atmosphere in the context of the Earth's radiation budget and radiative forcing of climate, as well as its direct impact on atmospheric composition and temperature. The composition, temperature, and motion of Earth's atmosphere are determined by internal chemical and physical processes as well as by complex interactions with other parts of the climate system—notably the oceans, cryosphere and biosphere. On a global and annual average the solar energy absorbed by the Earth is balanced by thermal infrared radiation
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Rango, Albert, and Jerry Ritchie. "Applications of Remotely Sensed Data from the Jornada Basin." In Structure and Function of a Chihuahuan Desert Ecosystem. Oxford University Press, 2006. http://dx.doi.org/10.1093/oso/9780195117769.003.0019.

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Like other rangelands, little application of remote sensing data for measurement and monitoring has taken place within the Jornada Basin. Although remote sensing data in the form of aerial photographs were acquired as far back as 1935 over portions of the Jornada Basin, little reliance was placed on these data. With the launch of Earth resources satellites in 1972, a variety of sensors have been available to collect remote sensing data. These sensors are typically satellite-based but can be used from other platforms including ground-based towers and hand-held apparatus, low-altitude aircraft,
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Oswood, Mark W., and Nicholas F. Hughes. "Running Waters of the Alaskan Boreal Forest." In Alaska's Changing Boreal Forest. Oxford University Press, 2006. http://dx.doi.org/10.1093/oso/9780195154313.003.0015.

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Running waters reflect the character of their landscape. Landscapes influence their streams by supplying dissolved ions to the water, determining the organic matter supply to stream foodwebs, and influencing water temperature and water flows (Gregory et al. 1991, Hynes 1975). The water that feeds streams has passed over and through the vegetation, soils, and rocks of the valley. Just as urine carries the chemical imprint of metabolic activities (such as diabetes), the kinds and amounts of dissolved matter delivered to stream channels carry the signature of the valley’s parent materials and bio
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Conference papers on the topic "Low Thermal Budget"

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Molinaro, G., H. Arimura, S. Sacchi, et al. "TDDB Reliability Improvement of Low Thermal Budget RMG Stacks." In 2025 IEEE International Reliability Physics Symposium (IRPS). IEEE, 2025. https://doi.org/10.1109/irps48204.2025.10982857.

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Cheemalamarri, Hemanth Kumar, Masahisa Fujino, Ji Hong Miao, Everline Teo, Vempati Srinivasa Rao, and Navab Singh. "Low-Thermal Budget TEOS-TEOS Bonding for Multi-Stack HBM Applications." In 2024 8th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D). IEEE, 2024. https://doi.org/10.1109/ltb-3d64053.2024.10774117.

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Dao, Khoi, Jorge Marquez Chavez, Kensuke Hayashi, Qingyang Du, JueJun Hu, and Caroline A. Ross. "Low-thermal-budget monolithic integration of optical isolators for silicon photonics." In Integrated Optics: Devices, Materials, and Technologies XXIX, edited by Sonia M. García-Blanco and Pavel Cheben. SPIE, 2025. https://doi.org/10.1117/12.3041954.

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Wong, Kwok-Ho, and Mansun Chan. "Semimetal Alloy Contact with Low Resistivity and Enhanced Thermal Budget for MoS2 FETs." In 2024 IEEE 17th International Conference on Solid-State & Integrated Circuit Technology (ICSICT). IEEE, 2024. https://doi.org/10.1109/icsict62049.2024.10831179.

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Liao, Hongxu, Xijun Zhou, Fangze Liu, et al. "Low Thermal Budget Ultrathin Ti Silicide for Advanced Backside Contact of Backside Power Delivery Network (BSPDN)." In 2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM). IEEE, 2025. https://doi.org/10.1109/edtm61175.2025.11040452.

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Liu, Yinchi, Hao Zhang, Jining Yang, et al. "Toward Low-Thermal-Budget Processing and Low-Voltage Operating in Ferroelectric Stack Films by Introducing ZrO2 Middle Layer." In 2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM). IEEE, 2025. https://doi.org/10.1109/edtm61175.2025.11040208.

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Franco, J., H. Arimura, A. Vici, et al. "Low Thermal Budget Multi-Vth RMG Solution with Excellent TDDB and BTI Reliability by Combining Hydrogen Radical IL Treatment, n-Dipole-First Shifter and Low-Temperature HK PDA." In 2024 IEEE International Electron Devices Meeting (IEDM). IEEE, 2024. https://doi.org/10.1109/iedm50854.2024.10873365.

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Rana, Ahmad Raza Khan, Graham Brigham, Omar Chaar, and George Jarjoura. "Localized Corrosion Management for Thermally Insulated Systems via Insulation Standoffs and Low Point Drains." In CONFERENCE 2022. AMPP, 2022. https://doi.org/10.5006/c2022-17585.

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Abstract CUI (corrosion under insulation) is a major damage mechanism affecting the integrity of process equipment, piping, and pipelines. CUI is known to create localized corrosion and pitting under thermal insulations which trigger non-linear corrosion rates and end up in unanticipated leaks in industrial assets. Reportedly, detection and management of CUI-driven damages constitute 10% of the maintenance budget in a typical refinery. This study simulates the CUI behavior of carbon steel under fibrous stone wool insulation using four testing conditions namely Isothermal wet, isothermal wet-dr
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Allemang, Christopher, DeAnna Campbell, Jeffrey Ivie, Tzu-Ming Lu, and Shashank Misra. "Low Thermal Budget PMOS in Low Temperature Epitaxial Silicon." In Proposed for presentation at the AVS 68th International Symposium & Exhibition in ,. US DOE, 2022. http://dx.doi.org/10.2172/2006101.

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Bourdon, H., A. Halimaoui, A. Talbot, J. Venturini, O. Marcelot, and D. Dutartre. "Low Thermal Budget Activation of B in Si." In 2006 14th International Conference on Advanced Thermal Processing of Semiconductors. IEEE, 2006. http://dx.doi.org/10.1109/rtp.2006.368001.

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Reports on the topic "Low Thermal Budget"

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Yue Kuo. A NOVEL LOW THERMAL BUDGET THIN-FILM POLYSILICON FABRICATION PROCESS FOR LARGE-AREA, HIGH-THROUGHPUT SOLAR CELL PRODUCTION. Office of Scientific and Technical Information (OSTI), 2010. http://dx.doi.org/10.2172/992272.

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Lever, James, and Jason Weale. High efficiency fuel sleds for Polar traverses. Engineer Research and Development Center (U.S.), 2022. http://dx.doi.org/10.21079/11681/43445.

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We describe here the evolution of lightweight, high-efficiency fuel sleds for Polar over-snow traverses. These sleds consist of flexible bladders strapped to sheets of high molecular weight polyethylene. They cost 1/6th, weigh 1/10th and triple the fuel delivered per towing tractor compared with steel sleds. An eight-tractor fleet has conducted three 3400-km roundtrips to South Pole with each travers delivering 320,000 kg of fuel while emitting &lt;1% the pollutants, consuming 1/2 the fuel and saving $1.6 M compared with aircraft resupply. A two tractor fleet in Greenland recently delivered 83
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