Academic literature on the topic 'Manifactured piezoresistive position sensor'

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Journal articles on the topic "Manifactured piezoresistive position sensor"

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Yu, Huijun, Peng Zhou, Kewei Wang, Yanfei Huang, and Wenjiang Shen. "Optimization of MOEMS Projection Module Performance with Enhanced Piezoresistive Sensitivity." Micromachines 11, no. 7 (2020): 651. http://dx.doi.org/10.3390/mi11070651.

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In scanning laser projection systems, the laser modulation time is important for the projection resolution. The modulation time needs to be matched with the motion of the micromirror. For this paper, the piezoresistive sensor was integrated on the torsion beam of the micromirror to monitor the physical position of the micromirror. The feedback signal was used to generate the zero-crossing time, which was used to estimate the physical position of the resonating mirror over time. The estimated position was affected by the zero-crossing time and the error directly influenced the definition of the
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Zhang, Youzhi, Zhengkang Lin, Xiaojun You, Xingping Huang, Jinhua Ye, and Haibin Wu. "A position-sensitive electronic skin based on boundary potential projection theory." Sensor Review 40, no. 1 (2020): 130–40. http://dx.doi.org/10.1108/sr-10-2019-0243.

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Purpose This paper aims to report a flexible position-sensitive sensor that can be applied as large-area electronic skin over the stiff media. Design/methodology/approach The sensor uses a whole piezoresistive film as a touch sensing area. By alternately constructing two uniform electric fields with orthogonal directions in the piezoresistive film, the local changes in conductivity caused by touch can be projected to the boundary along the equipotential line under the constraint of electric field. Based on the change of boundary potential in the two uniform electric fields, it can be easy to d
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Ye, Jinhua, Zhengkang Lin, Jinyan You, Shuheng Huang, and Haibin Wu. "Inconsistency Calibrating Algorithms for Large Scale Piezoresistive Electronic Skin." Micromachines 11, no. 2 (2020): 162. http://dx.doi.org/10.3390/mi11020162.

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In the field of safety and communication of human-robot interaction (HRI), using large-scale electronic skin will be the tendency in the future. The force-sensitive piezoresistive material is the key for piezoresistive electronic skin. In this paper, a non-array large scale piezoresistive tactile sensor and its corresponding calibration methods were presented. Because of the creep inconsistency of large scale piezoresistive material, a creep tracking compensation method based on K-means clustering and fuzzy pattern recognition was proposed to improve the detection accuracy. With the compensate
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Ji, Chang Hong, Bin Zhen Zhang, Jian Zhang, Xiang Hong Li, and Jian Lin Liu. "Design of Ultra Low Temperature Pressure and Temperature Sensor Structure." Applied Mechanics and Materials 80-81 (July 2011): 693–97. http://dx.doi.org/10.4028/www.scientific.net/amm.80-81.693.

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In order to measure the pressure in the ultra-low temperature condition, the structure of ultra-low temperature piezoresistive pressure sensor is designed. Polysilicon nanometer thin film is used as a varistor according to its temperature and piezoresistive characteristics. The effect of the dimensions of silicon elastic membrane for the sensor sensitivity and the strain dimensions of the elastic membrane are analyzed, then layout position of resistances is arranged. The package structure of pressure sensor is designed. Meanwhile, a low-temperature sensor is designed to compensate the temperat
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Maflin Shaby, S., and A. Vimala Juliet. "Analysis and Optimization of Sensitivity of a MEMS Peizoresistive Pressure Sensor." Advanced Materials Research 548 (July 2012): 652–56. http://dx.doi.org/10.4028/www.scientific.net/amr.548.652.

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This paper presents a MEMS Piezoresistive pressure sensor which utilizes a circular shaped polysilicon diaphragm with a nanowire to enhance the sensitivity of the pressure sensor. The polysilicon nanowire is fabricated in such a way that it forms a bridge between the circular polysilicon diaphragm and the substrate. The high Piezoresistive effect of Silicon nanowires is used to enhance the sensitivity. A circular polysilicon nanowire piezoresistor was fabricated by means of reactive ion etching. This paper describes the performance analysis, structural design and fabrication of piezoresistive
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Zhang, Youzhi, Jinhua Ye, Zhengkang Lin, Shuheng Huang, Haomiao Wang, and Haibin Wu. "A Piezoresistive Tactile Sensor for a Large Area Employing Neural Network." Sensors 19, no. 1 (2018): 27. http://dx.doi.org/10.3390/s19010027.

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Electronic skin is an important means through which robots can obtain external information. A novel flexible tactile sensor capable of simultaneously detecting the contact position and force was proposed in this paper. The tactile sensor had a three-layer structure. The upper layer was a specially designed conductive film based on indium-tin oxide polyethylene terephthalate (ITO-PET), which could be used for detecting contact position. The intermediate layer was a piezoresistive film used as the force-sensitive element. The lower layer was made of fully conductive material such as aluminum foi
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Meng, Qinggang, Yulan Lu, Junbo Wang, Deyong Chen, and Jian Chen. "A Piezoresistive Pressure Sensor with Optimized Positions and Thickness of Piezoresistors." Micromachines 12, no. 9 (2021): 1095. http://dx.doi.org/10.3390/mi12091095.

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In this paper, a piezoresistive pressure sensor based on silicon on insulator (SOI) was presented, which was composed of an SOI layer with sensing elements and a glass cap for a hermetic package. Different from its conventional counterparts, the position and thickness of the four piezoresistors was optimized based on numerical simulation, which suggests that two piezoresistors at the center while the other two at the edge of the pressure-sensitive diaphragm and a thickness of 2 μm can produce the maximum sensitivity and the minimum nonlinearity. Due to the use of silicon rather than metal for
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Hamdana, Gerry, Maik Bertke, Lutz Doering, et al. "Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system." Journal of Sensors and Sensor Systems 6, no. 1 (2017): 121–33. http://dx.doi.org/10.5194/jsss-6-121-2017.

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Abstract. A developed transferable micro force sensor was evaluated by comparing its response with an industrially manufactured device. In order to pre-identify sensor properties, three-dimensional (3-D) sensor models were simulated with a vertically applied force up to 1000 µN. Then, controllable batch fabrication was performed by alternately utilizing inductively coupled plasma (ICP) reactive ion etching (RIE) and photolithography. The assessments of sensor performance were based on sensor linearity, stiffness and sensitivity. Analysis of the device properties revealed that combination of a
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Cho, Hyun-Seung, Jin-Hee Yang, Jeong-Hwan Lee, and Joo-Hyeon Lee. "Evaluation of Joint Motion Sensing Efficiency According to the Implementation Method of SWCNT-Coated Fabric Motion Sensor." Sensors 20, no. 1 (2020): 284. http://dx.doi.org/10.3390/s20010284.

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The purpose of this study was to investigate the effects of the shape and attachment position of stretchable textile piezoresistive sensors coated with single-walled carbon nanotubes on their performance in measuring the joint movements of children. The requirements for fabric motion sensors suitable for children are also identified. The child subjects were instructed to wear integrated clothing with sensors of different shapes (rectangular and boat-shaped), attachment positions (at the knee and elbow joints or 4 cm below the joints). The change in voltage caused by the elongation and contract
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Dargahi, Javad, and Ahmad Atieh. "Design, Fabrication and Testing of a Piezoresistive-Based Tactile Sensor for Minimally Invasive Surgery." International Journal of Advanced Research in Engineering 1, no. 2 (2015): 17. http://dx.doi.org/10.24178/ijare.2015.1.2.17.

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Minimally invasive robotic surgery (MIRS) has become a preferred method for patients for the last two decades, thanks to its crucial advantages over classical open surgeries. Although MIRS has some advantages, it has a few drawbacks. Since MIRS technology includes performing surgery through small incisions using long slender tools, one of the main drawbacks of MIRS becomes the loss of direct contact with the patient’s body in the site of operation. Therefore, the surgeon loses the sense of touch during the operation which is one of the important tools to investigate the health condition of the
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Dissertations / Theses on the topic "Manifactured piezoresistive position sensor"

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Ventresca, Alessandra. "Development of an instrumented customizable total knee prosthesis for experimental tests." Master's thesis, Alma Mater Studiorum - Università di Bologna, 2016. http://amslaurea.unibo.it/11183/.

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Total knee arthroplasty (TKA) has revolutionized the life of millions of patients and it is the most efficient treatment in cases of osteoarthritis. The increase in life expectancy has lowered the average age of the patient, which requires a more enduring and performing prosthesis. To improve the design of implants and satisfying the patient's needs, a deep understanding of the knee Biomechanics is needed. To overcome the uncertainties of numerical models, recently instrumented knee prostheses are spreading. The aim of the thesis was to design and manifacture a new prototype of instrumented i
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Conference papers on the topic "Manifactured piezoresistive position sensor"

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Kavya, M. C., and Hansraj Guhilot. "Contactless position sensing using piezoresistive pressure sensor." In 2013 International Conference on Communications and Signal Processing (ICCSP). IEEE, 2013. http://dx.doi.org/10.1109/iccsp.2013.6577125.

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Lani, S., D. Bayat, and M. Despont. "2D tilting MEMS micro mirror integrating a piezoresistive sensor position feedback." In SPIE OPTO, edited by Wibool Piyawattanametha and Yong-Hwa Park. SPIE, 2015. http://dx.doi.org/10.1117/12.2078618.

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Drabe, Christian, David Kallweit, André Dreyhaupt, Jan Grahmann, Harald Schenk, and Wyatt Davis. "Bi-resonant scanning mirror with piezoresistive position sensor for WVGA laser projection systems." In SPIE MOEMS-MEMS, edited by Harald Schenk, Wibool Piyawattanametha, and Wilfried Noell. SPIE, 2012. http://dx.doi.org/10.1117/12.910203.

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Law, Jesse, Robert Cassel, and Ahsan Mian. "Geometric Optimization of van der Pauw Structure Based MEMS Pressure Sensor." In ASME 2007 International Mechanical Engineering Congress and Exposition. ASMEDC, 2007. http://dx.doi.org/10.1115/imece2007-42307.

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This paper characterizes a piezoresistive sensor under variations of both size and orientation with respect to the silicon crystal lattice for its application to MEMS pressure sensing. The sensor to be studied is a four-terminal piezoresistive sensor commonly referred to as a van der Pauw (VDP) structure. In a recent study, our team has determined the relation between the biaxial stress state and the piezoresistive response of a VDP structure by combining the VDP resistance equations with the equations governing silicon piezoresistivity and has proposed a novel piezoresistive pressure sensor.
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Zhang, Zongyang, Xingguo Cheng, Gang Cao, Chaojun Liu, and Sheng Liu. "A High Temperature Pressure Sensor Based on Advanced Thick Film Technology." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-87621.

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For the purpose of pressure measurement in oil drilling industry as well as in other industrial measurement and control systems, the low cost pressure sensors that can be operated in high temperature environments are badly needed. In this paper, thick film resistors (TFRs) on 430 stainless steel (SS) substrate for high temperature strain sensor applications have been developed and evaluated. Thick film technology based steel pressure sensors (SPS) are fabricated by screen printing and firing four TFRs on a machined circular diaphragm and then the TFRs are connected in a Wheatstone bridge confi
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Saeidpourazar, Reza, and Nader Jalili. "Forced-Controlled Nanomanipulation Utilizing Nano-Robotic Manipulator and Nanomechanical Cantilever." In ASME 2008 Conference on Smart Materials, Adaptive Structures and Intelligent Systems. ASMEDC, 2008. http://dx.doi.org/10.1115/smasis2008-629.

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This paper presents forced-controlled nanomanipulation utilizing nano-robotic manipulator and nanomechanical cantilever. A three degree of freedom (3 DOF) nanomanipulator with revolute revolute prismatic (RRP) actuator structure, named here MM3A®, can be utilized for a variety of nanomanipulation tasks. Previous publications of the authors present the mathematical modeling and robust control of manipulator’s tip using fused visual servoing and force sensor feedbacks. Due to lack of position and velocity feedbacks in MM3A® nanomanipulator, a fused vision/force feedback robust controller has bee
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Cotton, Darryl, Andy Cranny, Neil White, Steve Beeby, and Paul Chappell. "Design and Development of Integrated Thick-Film Sensors for Prosthetic Hands." In ASME 7th Biennial Conference on Engineering Systems Design and Analysis. ASMEDC, 2004. http://dx.doi.org/10.1115/esda2004-58027.

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The majority of prosthetic hands lack an intelligent feedback control system requiring the user to rely on either visual feedback to detect whether an object is slipping out of the hand or if an unnecessarily large force is being applied. Screen printed thick film piezoresistive resistors and piezoelectric dynamic sensors offer a cheap and compact solution for detecting grip force and slip of an object from a prosthesis. This paper investigates the surface strain produced on two different fingertip designs with different attachment and loading methods in an attempt to optimise sensor position
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Kuczenski, Brandon, Philip R. LeDuc, and William C. Messner. "An Automated System for Controlling the Laminar Flow Interface in a Microfluidic System." In ASME 2004 International Mechanical Engineering Congress and Exposition. ASMEDC, 2004. http://dx.doi.org/10.1115/imece2004-61652.

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The interface between adjacent laminar flow streams in the output channel of a Y-shaped confluent microfluidic network is useful for investigating the response of individual living cells to steep chemical gradients. This paper reports the design and performance of an automated pressure-feedback system for accurately and rapidly changing the position of that interface. The device will be employed to investigate the dynamic response of cells to time-varying chemical stimulation. The system works by controlling the pressure difference between the two adjoining inputs of the microfluidic network,
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Cullinan, Michael A., Robert M. Panas, Cody R. Daniel, Joshua B. Gafford, and Martin L. Culpepper. "Non-Cleanroom Fabrication of Carbon Nanotube-Based MEMS Force and Displacement Sensors." In ASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ASMEDC, 2011. http://dx.doi.org/10.1115/detc2011-47945.

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Traditional microelectromechanical MEMS fabrications such photolithography and deep reactive ion etching (DRIE) are expensive and time consuming. This limits the types and designs of MEMS devices that can be produced cost effectively since in order to overcome the high startup costs and times associated with traditional MEMS fabrication techniques tens of thousands of each type of MEMS device must be produced and sold. In this paper, we will present a method for placing carbon nanotube (CNT) based piezoresistive sensors onto metallic flexural elements that are created via micromachining. This
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Lenherr, Christian, Anestis I. Kalfas, and Reza S. Abhari. "High Temperature Fast Response Aerodynamic Probe." In ASME Turbo Expo 2010: Power for Land, Sea, and Air. ASMEDC, 2010. http://dx.doi.org/10.1115/gt2010-23010.

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In order to advance the technology for measurements in higher temperature flows, a novel miniature (diameter 2.5 mm) fast response probe that can be applied in flows with temperatures of up to 533K (500°F) has been developed. The primary elements of the probe are two piezoresistive pressure transducers that are used to measure the unsteady pressure and unsteady velocity field, as well as the steady temperature. Additional temperature and strain gauge sensors are embedded in the shaft to allow a much higher degree of robustness in the use of this probe. The additional temperature sensor in the
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