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Journal articles on the topic 'MEMS compass'

Author: Grafiati

Published: 4 June 2025

Last updated: 1 August 2025

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1

Li, Xi Sheng, Yan Xia Liu, Xiong Ying Shu, and Rui Qing Kang. "MEMS Gyro Aided Calibration of Electronic Compass." Advanced Materials Research 443-444 (January 2012): 144–49. http://dx.doi.org/10.4028/www.scientific.net/amr.443-444.144.

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In this paper, an MEMS gyro aided on line calibration algorithm for electronic compass is presented. This electronic compass module consists of a three-axis AMR sensor, a two-axis MEMS tilt sensor and a one-axis MEMS gyro. The automatic calibration method requires to rotate the electronic compass two full 360-degree revolution. In this rotation procedure, magnetic field data, attitude data and angular rate data are recorded. Based on recorded magnetic field data and attitude data, raw heading data is calculated. This raw heading data is verified by angular rate output of MEMS gyro. Results of

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2

Cho, Seong Yun, and Chan Gook Park. "MEMS Based Pedestrian Navigation System." Journal of Navigation 59, no. 1 (2005): 135–53. http://dx.doi.org/10.1017/s0373463305003486.

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In this paper we present a micro-electrical mechanical system (MEMS) based pedestrian navigation system (PNS) for seamless positioning. The sub-algorithms for the PNS are developed and the positioning performance is enhanced using the modified receding horizon Kalman finite impulse response filter (MRHKF). The PNS consists of a biaxial accelerometer and a biaxial magnetic compass mounted on a shoe. The PNS detects a step using a novel technique during the stance phase and simultaneously calculates walking information. Step length is estimated using a neural network whose inputs are the walking

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3

Feng, Yi Bo, Xi Sheng Li, and Xiao Juan Zhang. "Research on a Combined Directional Instrument of DMC and Gyro for Vehicles." Advanced Materials Research 490-495 (March 2012): 2510–14. http://dx.doi.org/10.4028/www.scientific.net/amr.490-495.2510.

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In the view of the disadvantages brought by DMC(digital magnetic compass) and gyro when they are used separately, a combined directional instrument composed by a 3-axes digital magnetic compass and a 3-axes MEMS gyro for vehicles is introduced, which is less influenced to the magnetic field interference and random drift. In the abnormal magnetic field, the MEMS gyro is used for correcting the heading angle of DMC. The experiment data shows that this instrument can output a stable and high-precision heading angle. It can be used to provide heading angle for vehicles.

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Holovatyy, A., V. Teslyuk, K. Kolesnyk, and V. Tabala. "Development of Digital Compass Based on AVR Microcontroller and MEMS Accelerometer- Magnetometer Module LSM303DLHC." Computer Design Systems. Theory and Practice, no. 1 (2020): 12–26. http://dx.doi.org/10.23939/cds2019.01.012.

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In the paper, the digital compass based on AVR microcontroller has been developed using MEMS accelerometer-magnetometer LSM303DLHC. The structure and hardware of the digital compass have been developed. The calibration algorithms of the accelerometer and magnetometer of the LSM303DLHC module have been described. The calculation algorithm of the pitch and roll angles has been described. The heading calculation algorithm of the digital compass without tilt compensation and with tilt compensation has been described. The operation algorithm and embedded software of the digital compass have been de

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Zheng, Xin, Xing Song Wang, and Yu Liang Mao. "Research of Intelligent Mower Based on High Accuracy 3D Electronic Compass." Applied Mechanics and Materials 532 (February 2014): 22–25. http://dx.doi.org/10.4028/www.scientific.net/amm.532.22.

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This paper introduces an intelligent mower with directional navigation features. This kind of mower uses electronic compass made by MEMS magnetoresistive sensor and three-axis acceleration sensor with high precision tilt compensation function. This paper also describes the advantages and applications of this kind of mower, as well as electronic compass measurement principle, system design and software algorithms, and electronic compass error analysis and elimination. This cost-effective system can be normally used in the field of intelligent mowers.

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6

Choi, S., S. H. Kim, Y. K. Yoon, and M. G. Allen. "A Magnetically Excited and Sensed MEMS-Based Resonant Compass." IEEE Transactions on Magnetics 42, no. 10 (2006): 3506–8. http://dx.doi.org/10.1109/tmag.2006.879449.

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7

Zhao, Huijun, Chong Shen, Huiliang Cao, et al. "Seamless Micro-Electro-Mechanical System-Inertial Navigation System/Polarization Compass Navigation Method with Data and Model Dual-Driven Approach." Micromachines 15, no. 2 (2024): 237. http://dx.doi.org/10.3390/mi15020237.

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The integration of micro-electro-mechanical system–inertial navigation systems (MEMS-INSs) with other autonomous navigation sensors, such as polarization compasses (PCs) and geomagnetic compasses, has been widely used to improve the navigation accuracy and reliability of vehicles in Internet of Things (IoT) applications. However, a MEMS-INS/PC integrated navigation system suffers from cumulative errors and time-varying measurement noise covariance in unknown, complex occlusion, and dynamic environments. To overcome these problems and improve the integrated navigation system’s performance, a du

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8

Saint-Patrice, D., J. L. Pornin, B. Savornin, et al. "Thin Film Packaging for Vacuum MEMS Encapsulation: A Study on Outgassing Phenomenon." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2012, DPC (2012): 002428–82. http://dx.doi.org/10.4071/2012dpc-tha31.

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Most of the time, MEMS devices require hermetic encapsulation for protection against atmosphere, moisture, particles and standard back-end manufacturing technologies. In the last few years, Wafer Level Packaging (WLP) is moving toward developments on Thin Film Packaging (TFP) in order to save footprint, to reduce chip thickness and packaging costs. In the specific case of high-vacuum MEMS encapsulation (gyro, compass), long term pressure stability is required. As the final performances of these kinds of devices are strongly dependent on the working pressure, using TFP for MEMS encapsulation wi

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9

Shailendra Kumar Rawat, Et al. "Underground Attitude MEMS-Based Sensor Technology for Precise Estimation in Mines." International Journal on Recent and Innovation Trends in Computing and Communication 11, no. 9 (2023): 4024–32. http://dx.doi.org/10.17762/ijritcc.v11i9.9763.

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In coal mines, precise attitude measurement systems are crucial for enhancing reliability and accuracy. These systems typically integrate multiple sensors to overcome various limitations, such as distance constraints, distractions, and not clear vision. Gyroscopes are employed to tackle these challenges; however, they are very highly critical to slight erosion, which can affect their performance in maximum time. On the other hand, accelerometers do not experience drift but have slower dynamics, posing a between accuracy and response. This study investigates the implementation of a Complemtry f

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Cui, Xiao, Yong Yuan Qin, Qi Zhou, and Qiang Wen Fu. "Shoe-Mounted Personal Navigation System Based on MEMS." Advanced Materials Research 580 (October 2012): 423–27. http://dx.doi.org/10.4028/www.scientific.net/amr.580.423.

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Shoe-mounted personal navigation system(PNS) based on MEMS is presented aiming at locating a person. Large error remains a problem in a standalone navigation system that uses only low cost MEMS IMU. This paper therefore proposes a approach which integrated with ZUPT and compass heading information in Kalman-based framework. The filter propagates and estimates the errors during the stance phase, which are fed back to the INS for compensating the accumulated error during walking. Finally, the performance of the proposed algorithm are verified by outdoors actual walking experiments of closed-loop

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11

Fu, Jun, Zhiwen Ning, and Yang Chang. "Active Compensation Method for Strong Magnetic Interference of MEMS Electronic Compass." IEEE Access 9 (2021): 48860–72. http://dx.doi.org/10.1109/access.2021.3067362.

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12

Dashkov, Dmytro, and Oleksii Liashenko. "MOTION CAPTURE WITH MEMS SENSORS." Advanced Information Systems 7, no. 2 (2023): 57–62. http://dx.doi.org/10.20998/2522-9052.2023.2.08.

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The object of this article is the registration and analysis of human movements based on sensors. This paper presents a comparison of the basic methods of data processing from inertial micromechanical sensors to collect data a device was implemented that captures movements. As result the device uses the motion data from accelerometer and gyroscope to calculate the motion trajectory: the angle of rotation and acceleration. The data is read by the microcontroller, after which it is filtered and processed by one of the filters (Complementary, Kalman), and finally transferred to a computer for furt

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Li, Huailiang, Xianguo Tuo, Tong Shen, Mark Julian Henderson, and Jérémie Courtois. "A rapid seismic data calibration technique using integrated micro-electro-mechanical system inertial sensor groups for a 3C vertical seismic profile." GEOPHYSICS 82, no. 6 (2017): P109—P118. http://dx.doi.org/10.1190/geo2016-0218.1.

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Calibration of 3C vertical seismic profile (VSP) data is an exciting challenge because the orientation of the tool is random when only seismic data are considered. We have augmented the sensor package on the VSP tool with micro-electro-mechanical system (MEMS) inertial sensors and applied a gesture measuring method to determine the tool orientation and calibration. This technique can quickly produce high precision, orientation, and angle information when integrated with the seismometer. The augmented sensor package consists of a low-cost triaxial MEMS gyroscope, an electronic compass, and an a

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Fu, Jun, Zhiwen Ning, Bao Li, and Teng Lv. "Research on control algorithm of strong magnetic interference compensation for MEMS electronic compass." Measurement 207 (February 2023): 112370. http://dx.doi.org/10.1016/j.measurement.2022.112370.

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Huang, Weiquan, and Menghao Li. "A Self-Alignment Method of MEMS Biaxial Rotation Modulation Strapdown Compass for Marine Applications." IEEE Access 7 (2019): 151595–609. http://dx.doi.org/10.1109/access.2019.2948230.

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16

Rao, Jin Jun, Tong Yue Gao, Zhen Jiang, and Zhen Bang Gong. "Position and Attitude Information Fusion for Portable Unmanned Aerial Vehicles." Key Engineering Materials 439-440 (June 2010): 155–60. http://dx.doi.org/10.4028/www.scientific.net/kem.439-440.155.

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Portable Unmanned Aerial Vehicles (PUAVs) present an enormous application potential, and the real time accurate position and attitude information is the basis of autonomous flight of PUAVs. In order to obtain comprehensive and accurate position and attitude data of PUAVs in flight, focusing on the common sensors configuration of PUAVs, each type of sensor’s characteristic is analyzed, and the data fusion problem of SINS/GPS/Compass combination is presented and studied in this paper. Firstly, the error expressions of MEMS inertia sensors, attitude, velocity and position are researched and deriv

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17

Li, Xu, Qimin Xu, Chingyao Chan, Bin Li, Wei Chen, and Xianghui Song. "A Hybrid Intelligent Multisensor Positioning Methodology for Reliable Vehicle Navigation." Mathematical Problems in Engineering 2015 (2015): 1–13. http://dx.doi.org/10.1155/2015/176947.

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With the rapid development of intelligent transportation systems worldwide, it becomes more important to realize accurate and reliable vehicle positioning in various environments whether GPS is available or not. This paper proposes a hybrid intelligent multisensor positioning methodology fusing the information from low-cost sensors including GPS, MEMS-based strapdown inertial navigation system (SINS) and electronic compass, and velocity constraint, which can achieve a significant performance improvement over the integration scheme only including GPS and MEMS-based SINS. First, the filter model

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18

Helboe, Daniela Toledo, and Erlend Fasting. "Automatic detection of source direction and exclusion of irrelevant sounds in unattended noise monitoring systems." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 268, no. 7 (2023): 1131–42. http://dx.doi.org/10.3397/in_2023_0172.

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A device featuring 8 MEMS microphones has been designed, which allows localizing dominant sound sources in 3D space by implementing techniques based on time difference of arrival. The device, also called Noise Compass, is intended to be used together with an outdoor measurement microphone in a noise monitoring terminal. By defining regions of interest in the vertical and horizontal planes in a monitoring and analysis system, non-relevant sounds can be automatically detected and excluded from the noise measurements. This article describes the direction detection mechanisms and shows two example

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Филатов, В. И., and В. В. Астреин. "Analysis of appliance inertial and magnetic compass systems for ship-drone automatic control through program track." MORSKIE INTELLEKTUAL`NYE TEHNOLOGII)</msg> 1, no. 3(65) (2024): 330–38. http://dx.doi.org/10.37220/mit.2024.65.3.058.

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В статье приводятся результаты натурных испытаний прототипа судна-робота надводного базирования РТК-07V. Данный аппарат представляет из себя робототехнический комплекс, предназначенный для плавания по заданной программной траектории. Основной целью транспортных роботов является перевозка различных грузов, что является актуальным направлением отечественного вектора технического развития. Такой класс робототехнических комплексов находит широкое применение в разных областях и промышленных отраслях. Робот решает несколько задач, среди которых: следование объекта управления согласно заданной програ

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Shen, Chong, Yufeng Xiong, Donghua Zhao, et al. "Multi-rate strong tracking square-root cubature Kalman filter for MEMS-INS/GPS/polarization compass integrated navigation system." Mechanical Systems and Signal Processing 163 (January 2022): 108146. http://dx.doi.org/10.1016/j.ymssp.2021.108146.

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21

S., Sinthuja, and Saravanan S.V. "Vehicle-2-Vehicle Communication Based on Wireless Sensor Network." Bulletin of Electrical Engineering and Informatics 6, no. 4 (2017): 364–66. https://doi.org/10.11591/eei.v6i4.868.

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Truck Platooning is a car innovation that permits gathering various trucks into a single element where one truck intently takes after the other that outcome in an expanded street limit. This kind of detachment allows to a significant degree tight separations and synchronous driving between the vehicles. Our point is to plan and exhibit a self-ruling truck platooning framework given vehicle-to-vehicle (V2V) correspondence innovation. The structure utilises IEEE 802.15.4 remote convention joined with separation going sensors to enable vehicles inside the company to safely trade data progressivel

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Matuszewski, Jan, and Wojciech Grzywacz. "Application of Discrete Cross-Correlation Function for Observational-Comparative Navigation System." Annual of Navigation 24, no. 1 (2017): 49–65. http://dx.doi.org/10.1515/aon-2017-0004.

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Abstract The article presents navigation system project operating on the principle scene matching area correlation (SMAC), using a digital camera, an MEMS e-compass sensor and an ultrasonic ranging module. Systems of this type are used as a component of advanced integrated navigation systems in view of its autonomy and capability of localizing aircrafts with high accuracy and precision. Steering and display of information are implemented using a computer application designed in Matlab programming environment. The object’s location is fixed, using discrete cross-correlation function through mat

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23

Soriano Gómez, Ezequiel. "Un Political Compass de los estudios sobre memes." Teknokultura. Revista de Cultura Digital y Movimientos Sociales Avance en línea (April 17, 2024): 1–12. http://dx.doi.org/10.5209/tekn.92391.

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Este artículo es una revisión bibliográfica de los estudios sobre memes desde una perspectiva interdisciplinar. En un ejercicio de recursividad metodológica, he utilizado el conocido meme The Political Compass como una herramienta analítica para mapear los estudios sobre memes en base a dos ejes: Perspectiva comunicacional - Perspectiva artística (eje de ordenadas) y Orientación underground - Orientación mainstream (eje de abscisas). En los cuatro cuadrantes que forma el gráfico ubico estudios sobre imágenes virales, comunicación digital, creatividad vernácula o folklore digital para observa

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Brazeal, Ryan G., Benjamin E. Wilkinson, and Adam R. Benjamin. "Investigating Practical Impacts of Using Single-Antenna and Dual-Antenna GNSS/INS Sensors in UAS-Lidar Applications." Sensors 21, no. 16 (2021): 5382. http://dx.doi.org/10.3390/s21165382.

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Data collected from a moving lidar sensor can produce an accurate digital representation of the physical environment that is scanned, provided the time-dependent positions and orientations of the lidar sensor can be determined. The most widely used approach to determining these positions and orientations is to collect data with a GNSS/INS sensor. The use of dual-antenna GNSS/INS sensors within commercial UAS-lidar systems is uncommon due to the higher cost and more complex installation of the GNSS antennas. This study investigates the impacts of using a single-antenna and dual-antenna GNSS/INS

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Dashkova, Svetlana. "Internet Memes in Network Communication: English Entertainment Sites." Virtual Communication and Social Networks 2022, no. 3 (2022): 130–35. http://dx.doi.org/10.21603/2782-4799-2022-1-3-130-135.

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Internet memes are an integral part of the Internet entertainment discourse. They are often based on precedent phenomena and reflect current events, facilitate the self-expression of the author, create a comic effect, etc. Memes possess a great repetitive and transformation potential. Their textual element is compact and humor-oriented. In the English Internet discourse, memes exist as texts, pictures, pictures with captions, and videos. The most common memes are those that refer to mass and Internet culture. In social networks, their main communicative goals are entertainment, reflection of c

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Vyas, Sarvesh, Ali K. Alhussainy, Y. Kamala Raju, et al. "Analytical Review on Enhancing Sustainability in microsystems by Integrating MEMS for Compact Design." E3S Web of Conferences 552 (2024): 01108. http://dx.doi.org/10.1051/e3sconf/202455201108.

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By combining silicon-based microelectronics with micromachining technology, microelectromechanical systems (MEMS) have been identified as one of the most promising technologies for the 21st Century. With its microsystem-based devices and technologies, it will have a dramatic impact on the way we live and the way we live our lives. With an emphasis on both commercial applications and device fabrication methods, the paper provides an introduction to the field of MEMS. As well as discussing the range of MEMS sensors and actuators, the phenomena that MEMS devices can sense and act upon, and the ma

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Li, Xue, Jian Zhong Li, Zu Yuan Yu, Mei Li Wang, and Shuang Hu Xu. "Influences of Pre-Sintered Ceramic Compacts Processing Parameters on Tool Wear." Advanced Materials Research 1120-1121 (July 2015): 32–37. http://dx.doi.org/10.4028/www.scientific.net/amr.1120-1121.32.

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As the requirements of MEMS continuously increase, the micro ceramic structures are widely used due to their favorable material properties such as high strength, hardness and resistance to high temperature, wear and erosion. However, the sintered ceramic compact is hard to be machined as its high strength. On the other hand, the low strength of green ceramic body makes it difficult to guarantee the machining accuracy. In this paper, ceramic compacts are pre-sintered below the sintering temperature. Pre-sintered ceramic compacts have suitable strength and are easy to be machined. Simple ceramic

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Wu, Qiannan, Zemin Shi, Xudong Gao, et al. "The Design of a Novel 2-42 GHz MEMS True-Time Delay Network for Wideband Phased Array Systems." Micromachines 14, no. 2 (2023): 246. http://dx.doi.org/10.3390/mi14020246.

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This article presents the design method of a compact MEMS switched-line true-time delay line (TTDL) network over a wide frequency range extending from 2 to 42 GHz using TTDL units. The TTDL units, namely the cascading radio frequency micro-electromechanical system (RF MEMS) switches and GCPW, were employed in the proposed TTDL network to improve the delay-bandwidth product (DBW) while maintaining its compact size and low delay variation (DV). For comparison, a theoretical analysis of the RF MEMS switch was performed while observing the switch performance with various top electrodes. The MEMS T

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Sandner, Thilo, Eric Gaumont, Thomas Graßhoff, et al. "Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers." Micromachines 11, no. 10 (2020): 883. http://dx.doi.org/10.3390/mi11100883.

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We present a wafer-level vacuum-packaged (WLVP) translatory micro-electro-mechanical system (MEMS) actuator developed for a compact near-infrared-Fourier transform spectrometer (NIR-FTS) with 800–2500 nm spectral bandwidth and signal-nose-ratio (SNR) > 1000 in the smaller bandwidth range (1200–2500 nm) for 1 s measuring time. Although monolithic, highly miniaturized MEMS NIR-FTSs exist today, we follow a classical optical FT instrumentation using a resonant MEMS mirror of 5 mm diameter with precise out-of-plane translatory oscillation for optical path-length modulation. Compared to highly m

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Huang, C. U., I. Y. Chen, H. J. H. Chen, C. F. Jou, and S. R. S. Huang. "Compact 3D-MEMS-meander monopole antenna." Electronics Letters 41, no. 21 (2005): 1149. http://dx.doi.org/10.1049/el:20052677.

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Zheng, Dong, Dingkang Wang, YK Yoon, and Huikai Xie. "A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications." Micromachines 11, no. 12 (2020): 1051. http://dx.doi.org/10.3390/mi11121051.

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Optical microendoscopy enabled by a microelectromechanical system (MEMS) scanning mirror offers great potential for in vivo diagnosis of early cancer inside the human body. However, an additional beam folding mirror is needed for a MEMS mirror to perform forward-view scanning, which drastically increases the diameter of the resultant MEMS endoscopic probe. This paper presents a new monolithic two-axis forward-view optical scanner that is composed of an electrothermally driven MEMS mirror and a beam folding mirror both vertically standing and integrated on a silicon substrate. The mirror plates

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Hammer, Günter, Andreas Kainz, Wilfried Hortschitz, et al. "Detection of Heart and Respiration Rate with an Organic-Semiconductor-Based Optomechanical MEMS Sensor." Proceedings 2, no. 13 (2018): 715. http://dx.doi.org/10.3390/proceedings2130715.

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We present a displacement-sensitive sensor comprising a microelectromechanical (MEMS) chip and organic optoelectronic components capable of measuring the heart and respiration rate on humans. The MEMS sensor relies on the inertial deflection of a small silicon oscillator. The readout of the deflection is optical and works via modulation of the light flux passing through the MEMS. Organic optoelectronics are used as light source and detector, since these offer a homogeneous light distribution and a more compact package in a future integration. Two types of MEMS, differing in their resonance fre

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Ronak, Italia. "A Study of MEMS Sensors in Consumer and Industrial Electronics." International Journal of Innovative Research in Engineering & Multidisciplinary Physical Sciences 11, no. 5 (2023): 1–12. https://doi.org/10.5281/zenodo.14535713.

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Micro-Electro-Mechanical Systems (MEMS) sensors have revolutionized the consumer and industrial electronics landscape with their compact size, efficiency, and cost-effectiveness. These sensors play a pivotal role in applications ranging from motion detection in smartphones to predictive maintenance in industrial systems. This study explores the principles, fabrication techniques, and diverse applications of MEMS sensors, focusing on their integration challenges and technological advancements. Insights from existing literature highlight the transformative impact of MEMS sensors on healthcare, c

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Zhang, Lan, Jian Lu, Hideki Takagi, Sohei Matsumoto, and Eiji Higurashi. "An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring." Micromachines 13, no. 10 (2022): 1686. http://dx.doi.org/10.3390/mi13101686.

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In this study, we designed a microelectromechanical system (MEMS) Pirani vacuum sensor with a compact size. Specifically, the sensor was successfully fabricated based on the Pirani principle and using a commercial eight-inch MEMS foundry process. The sensor fabrication process was carried out using only four photomasks and the proposed sensor had an ultra-compact fabricated size (<2.2 × 2.2 mm2). A vacuum measurement system was set up to comprehensively evaluate the fabricated sensors. The results demonstrated that the MEMS Pirani vacuum sensor has a high responsivity in the low-pressure do

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Wong, Trevor, Bhan Lam, Furi Andi Karnapi, Kenneth Ooi, and Woon-Seng Gan. "Assessment of inter-IC sound microelectromechanical systems microphones for soundscape reporting." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 263, no. 4 (2021): 2259–69. http://dx.doi.org/10.3397/in-2021-2086.

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Acoustic parameters obtained from calibrated acoustic equipment are part of the minimum soundscape reporting requirements as stated in Annex A of ISO 12913-2. To dynamically monitor the acoustic environment of a large area, a large network of acoustic sensors could be deployed, albeit at significant cost. Micro-Electro-Mechanical Systems (MEMS) microphones offer compact, low-cost and high-performance alternatives to traditional analog microphones. In particular, the use of Inter-IC Sound (IS) communication allows MEMS microphones to be conveniently used in concert with I2S output interfaces fo

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Ushaa, Eswaran, S. Lakshmi, K. Nirmala, P. Mahasri, Sree Pratibha P. Deep, and V. Abimanan. "Advancements in MEMS gyroscopes: Piezoelectric plate-based devices for enhanced precision and stability in microelectromechanical systems." i-manager’s Journal on Electronics Engineering 15, no. 2 (2025): 45. https://doi.org/10.26634/jele.15.2.21464.

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Micro-Electromechanical Systems (MEMS) gyroscopes have gained significant attention due to their compact size, low cost, and versatility in various applications, ranging from consumer electronics to aerospace and automotive systems. Among the different MEMS gyroscope designs, piezoelectric plate-based gyroscopes have emerged as a promising solution for achieving high sensitivity and precision in angular rate measurements. This paper explores the latest advancements in MEMS gyroscope technology, with a particular focus on the design, working principles, and potential applications of piezoelectr

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Zhang, Chi. "Fabrication and Packaging of Electromagnetic 2D MEMS Scanning Mirror." Key Engineering Materials 609-610 (April 2014): 1165–69. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.1165.

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The scanning mirror has two gimbals structure, which are supported perpendicularly to each other by torsion beams. Dual-axis movement of the mirror is achieved by the tilt of inner and outer structures, respectively. The electromagnetic 2D MEMS scanning mirror is fabricated using a bulk silicon process, mainly including the wet etching, electroplating and ICP dry etching process. The permanent magnets are packaged together with the electromagnetic 2D MEMS scanning mirror in a compact size of 18×28×28mm3. The electromagnetic 2D MEMS scanning mirror has advantages of small volume, low voltage an

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Cetiner, Bedri Artug, Luis Jofre, Jiangyuan Qian, Sunan Liu, G. P. Li, and Franco De Flaviis. "A Compact Broadband MEMS-Integrated Diversity System." IEEE Transactions on Vehicular Technology 56, no. 2 (2007): 436–44. http://dx.doi.org/10.1109/tvt.2007.891418.

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Deng, Zhongliang, Yucheng Wang, and Chengqi Lai. "Design and Analysis of Pattern Reconfigurable Antenna Based on RF MEMS Switches." Electronics 12, no. 14 (2023): 3109. http://dx.doi.org/10.3390/electronics12143109.

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The research on reconfigurable antennas has some disadvantages such as low working frequency and large size. This paper presents a Ka-band patch antenna with pattern reconfigurability using RF MEMS switches. The antenna contains one main patch, two sub-patches, two parasitic patches, and two RF MEMS switches. By controlling the states of the RF MEMS switches, the antenna can achieve three different radiation patterns (−8°, 0°, and +8°) at 35 GHz. The pattern analysis was based on the electric field vector addition method. The analytical, simulated, and measured results agree well with each oth

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Donelli, Massimo, Mohammedhusen Manekiya, Girolamo Tagliapietra, and Jacopo Iannacci. "A Reconfigurable Pseudohairpin Filter Based on MEMS Switches." Sensors 22, no. 24 (2022): 9644. http://dx.doi.org/10.3390/s22249644.

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This work presents a bandpass-reconfigurable planar pseudohairpin filter based on RF-MEMS switches. Hairpin-line structures are preferred to design microstrip filters because this class of filters offers a more compact size, and, in general, hairpin filters do not need ground connections for resonators. In this work, the U-shape resonators are arranged to obtain an interdigit capacitor to improve the coupling between the resonators. RF-MEMS switches modify the lengths of coupled resonators by adding microstrip segments to control the filter bandwidth, moving the center frequency and the return

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Hashimoto, Atsushi, Ken-ichiro Suehara, and Takaharu Kameoka. "Development of a Simultaneous Quantification Method for Multiple Modes of Nitrogen in Leaf Models Using Near-Infrared Spectroscopic Measurement." Sensors 24, no. 4 (2024): 1160. http://dx.doi.org/10.3390/s24041160.

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By focusing our attention on nitrogen components in plants, which are important for cultivation management in data-driven agriculture, we developed a simple, rapid, non-chemical and simultaneous quantification method for proteinic and nitrate nitrogen in a leaf model based on near-infrared (NIR) spectroscopic information obtained using a compact Fourier Transform NIR (FT-NIR) spectrometer. The NIR spectra of wet leaf models impregnated with a protein–nitric acid mixed solution and a dry leaf model obtained by drying filter paper were acquired. For spectral acquisition, a compact MEMS (Micro El

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Abdelhakim, Boudkhil, Chetioui Mohammed, Benabdallah Nadia, and Benahmed Nasreddine. "Development and Performance Enhancement of MEMS Helix Antenna for THz Applications using 3D HFSS-based Efficient Electromagnetic Optimization." TELKOMNIKA Telecommunication, Computing, Electronics and Control 16, no. 1 (2018): 210–16. https://doi.org/10.12928/TELKOMNIKA.v16i2.8000.

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Interest of Micro-Electromechanical System (MEMS) antennas in Terahertz (THz) applications has rapidly expanded in recent years due to the advent of accurate Computer Aided Design (CAD) tools. The very special needs of newly proposed MEMS antennas, especially with a wide bandwidth range, require advanced optimization procedures of enhancing already established designs. This paper provides a compact design of a wideband MEMS helix antenna optimized using tree-dimensional High Frequency Structure Simulator (3D-HFSS) based on Quasi-Newton (Q-N) and Sequential Non Linear Programming (SNLP) techniq

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Yao, Cheng-You, Bo Li, and Zhen Qiu. "2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope." Micromachines 10, no. 5 (2019): 295. http://dx.doi.org/10.3390/mi10050295.

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The electrostatic MEMS scanner plays an important role in the miniaturization of the microscopic imaging system. We have developed a new two-dimensional (2D) parametrically-resonant MEMS scanner with patterned Au coating (>90% reflectivity at an NIR 785-nm wavelength), for a near-infrared (NIR) fluorescence intraoperative confocal microscopic imaging system with a compact form factor. A silicon-on-insulator (SOI)-wafer based dicing-free microfabrication process has been developed for mass-production with high yield. Based on an in-plane comb-drive configuration, the resonant MEMS scanner pe

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Jiang, Xinyu, Brian Sang, Haoran Wen, Gregory Junek, Jin-Woo Park, and Farrokh Ayazi. "Strain Plethysmography Using a Hermetically Sealed MEMS Strain Sensor." Biosensors 15, no. 5 (2025): 325. https://doi.org/10.3390/bios15050325.

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We present a hermetically sealed capacitive microelectromechanical system (MEMS) strain sensor designed for arterial pulse waveform extraction using the strain plethysmography (SPG) modality. The MEMS strain sensor features a small form factor of 3.3 mm × 3.3 mm × 1 mm, leverages a nano-gap fabrication process to improve the sensitivity, and uses a differential sensing mechanism to improve the linearity and remove the common mode drift. The MEMS strain sensor is interfaced with an application-specific integrated circuit (ASIC) to form a compact strain sensing system. This system exhibits a hig

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Hwang, Jeong-Yeon, Lena Wysocki, Erdem Yarar, et al. "Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies." Micromachines 14, no. 9 (2023): 1789. http://dx.doi.org/10.3390/mi14091789.

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In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant scan modes. Particularly, this paper deals with various achievable scan patterns including 1D line scan and 2D area scan capabilities and driving methods to realize each scanning strategy. Bidirectional quasi-static actuation along horizontal, vertical, and diagonal scanning directions was experimentally characterized and even under a low volt

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Deng, Zhong Liang, and Xing Jie Cao. "Design and Simulation of K Band RF MEMS Tunable Combline Filter." Advanced Materials Research 875-877 (February 2014): 2219–23. http://dx.doi.org/10.4028/www.scientific.net/amr.875-877.2219.

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Tunable bandpass filters are generally preferred and are used extensively in the mobile communication systems. In this paper, a design of the RF MEMS tunable combline bandpass filter is proposed. Firstly, the theory of the RF MEMS tunable combline bandpass filter is presented. Secondly, a combline bandpass filter which have a tunable frequency range from 18GHz to 27GHz is designed and simulated by using the EDA simulation software. Its bandwidth is about 1GHz in the tunable frequency range. From the simulation results, the designed filter is not only compact and effortless to fabricate but als

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Bloss, Richard. "HARM type MEMS-based reed switch innovations address medical, automotive and other micro switching applications not previously possible." Assembly Automation 34, no. 3 (2014): 222–26. http://dx.doi.org/10.1108/aa-09-2013-082.

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Purpose – The purpose of this paper is to review the advancements in development of high aspect ratio microfabrication (HARM) type of micro-electro-mechanical systems (MEMS) reed switch sensors for much improved performance in a much more compact package. Design/methodology/approach – The paper presents an in-depth review of a number of applications of HARM built MEMS reed switches and consultation with a manufacturer. Findings – One manufacturer has introduced a totally new way to fabricate reed switches which brings numerous benefits such as reliability, higher voltage capability, lower cont

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Kamel, Amr, Samed Kocer, Lyazzat Mukhangaliyeva, et al. "Resonant Adaptive MEMS Mirror." Actuators 11, no. 8 (2022): 224. http://dx.doi.org/10.3390/act11080224.

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A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs. Unlike traditional bias actuated DMs, it uses resonant electrostatic actuation (REA) to realize low- and high-order Zernike modes with a single drive signal. Instead of the hundreds or thousands of electrodes deployed by traditional DMs, the proposed DM employs only 49 electrodes and eliminates the need for spatial control algorithms

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Pawase, Ramesh, and Niteen P. Futane. "Intelligent and Analog CMOS ASIC Development of Angular Rate Error Compensation for MEMS Gyroscope." International Journal of Sensors, Wireless Communications and Control 9, no. 3 (2019): 388–403. http://dx.doi.org/10.2174/2210327909666181210161551.

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Background & Objective: MEMS-based gyroscopes are used in angular rate detection where precision is an important parameter; however, gyroscope output is limited by angular rate error. For minimizing these types of non-idealities, conventional external hardware-based analog or digital circuits have limitations for using in compact applications. CMOS analog ASIC for angular rate error compensation is necessary as both MEMS-CMOS technologies are supplementary and compatible. Method: In this paper, the output of MEMS gyroscope is taken as input for the compensation circuit which results in com

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Samotaev, Nikolay, Konstantin Oblov, Pavel Dzhumaev, et al. "Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors." Micromachines 12, no. 12 (2021): 1440. http://dx.doi.org/10.3390/mi12121440.

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The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic produ

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