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1
Napoli, Violetta Di, Stewart McWilliam, and Atanas A. Popov. "Frequency Splitting in MEMS Ring-based Coriolis Vibrating Gyroscopes Caused by Support Non-Linearity." Proceedings 2, no. 13 (2018): 755. http://dx.doi.org/10.3390/proceedings2130755.
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A mathematical model is developed to describe the 2? in-plane flexural response of supported ring-based Coriolis Vibrating Gyroscopes (CVGs) as the ring is driven into large amplitude vibration. Whilst the 2? degenerate modes have same resonance frequency in the linear regime, mechanical non-linearity within the support structure induces a frequency split as the vibration amplitude increases. The origins and effects of geometrical non-linearity are investigated using the proposed analytical model.
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Parween, Rizuwana. "Significance of the Asymmetry of the Haltere: A Microscale Vibratory Gyroscope." Applied Bionics and Biomechanics 2020 (November 19, 2020): 1–9. http://dx.doi.org/10.1155/2020/8647137.
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Nature has evolved a beautiful design for small-scale vibratory gyroscopes in the form of halteres located in the metathorax region of the dipteran flies that detect body rotations based on the Coriolis principle. The specific design of the haltere is in contrast to the existing MEMS vibratory gyroscope, where the elastic beams supporting the proof mass are typically designed with symmetric cross-sections so that there is a mode matching between the actuation and sensing vibrations. The mode matching provides high sensitivity and low bandwidth. Hence, the objective of the manuscript is to understand the mechanical significance of the haltere’s asymmetry. In this study, the distributed Coriolis force and the corresponding bending stress by incorporating the actual mass variations along the haltere length are estimated. In addition, it is hypothesied that sensilla sense the rate of rotation based on the differential strain (difference between the final strain (strain due to the inertial and Coriolis forces) and the reference strain (strain due to inertial force)). This differential strain always occurs either on the dorsal or ventral surface of the haltere and at a distance away from the base, where the campaniform sensilla are located. This study brings out one specific feature—the asymmetric geometry of the haltere structure—that is not found in current vibratory gyroscope designs. This finding will inspire new designs of MEMS gyroscopes that have elegance and simplicity of the haltere along with the desired performance.
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Arifin, D., and S. McWilliam. "Improving the frequency stability of capacitive ring-based Coriolis Vibrating Gyroscopes." Journal of Physics: Conference Series 2909, no. 1 (2024): 012021. https://doi.org/10.1088/1742-6596/2909/1/012021.
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Abstract MEMS capacitively operated ring-based Coriolis vibratory gyroscopes are used to measure angular rate. Under standard operating conditions the ring is driven into resonance and Coriolis coupling generates a response that is proportional to the applied angular rate. In practice capacitive devices are susceptible to electrostatic nonlinearities due to narrow capacitive gaps which potentially degrades the quality of the measurement. One issue is that large amplitude drive responses yield multi-harmonic response which distorts the sense output causing the rate output to vary periodically (i.e. frequency instability). In this research it is shown that this frequency instability can be negated relatively easily by incorporating additional harmonics in the drive force. To implement such an approach it is necessary to use a voltage distribution to generate the appropriate electrostatic forces to eliminate or reduce the multi-frequency mechanical response of the ring. A mathematical model is used to quantify the effects of the implementation of the voltage distribution in terms of discrete Fourier transform of the ring response and the calculated Allan deviation. It is shown that the proposed implementation approximates linear behaviour by reducing the multi-harmonic response by orders of magnitude.
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Bu, Feng, Dacheng Xu, Heming Zhao, Bo Fan, and Mengmeng Cheng. "MEMS Gyroscope Automatic Real-Time Mode-Matching Method Based on Phase-Shifted 45° Additional Force Demodulation." Sensors 18, no. 9 (2018): 3001. http://dx.doi.org/10.3390/s18093001.
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In order to solve the problem where existing mode-matching methods in microelectromechanical systems (MEMS) vibrating gyroscopes fail to meet real-time and reliability requirements, this paper presents a novel method to accomplish automatic and real-time mode-matching based on phase-shifted 45° additional force demodulation (45° AFD-RM). The phase-shifted 45° additional force signal has the same frequency as the quadrature force signal, but it is phase-shifted by 45° and applied to the sense mode. In addition, two-way phase-shifted 45° demodulations are used at the sense-mode detection output to obtain a phase metric that is independent of the Coriolis force and can reflect the mode-matching state. Then, this phase metric is used as a control variable to adaptively control the tuning voltage, so as to change the sense-mode frequency through the negative stiffness effect and ultimately achieve real-time mode-matching. Simulation and experimental results show that the proposed 45° AFD-RM method can achieve real-time matching. The mode frequency split is controlled within 0.1 Hz, and the gyroscope scale factor, zero-bias instability, and angle random walk are effectively improved.
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Ma, Zhipeng, Xiaoli Chen, Xiaojun Jin, Yiming Jin, Xudong Zheng, and Zhonghe Jin. "Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes." Micromachines 12, no. 12 (2021): 1483. http://dx.doi.org/10.3390/mi12121483.
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This study investigated the effects of structural dimension variation arising from fabrication imperfections or active structural design on the vibration characteristics of a (100) single crystal silicon (SCS) ring-based Coriolis vibratory gyroscope. A mathematical model considering the geometrical irregularities and the anisotropy of Young’s modulus was developed via Lagrange’s equations for simulating the dynamical behavior of an imperfect ring-based gyroscope. The dynamical analyses are focused on the effects on the frequency split between two vibration modes of interest as well as the rotation of the principal axis of the 2θ mode pair, leading to modal coupling and the degradation of gyroscopic sensitivity. While both anisotropic Young’s modulus and nonideal deep trench verticality affect the frequency difference between two vibration modes, they have little contribution to deflecting the principal axis of the 2θ mode pair. However, the 4θ variations in the width of both the ring and the supporting beams cause modal coupling to occur and the degenerate 2θ mode pair to split in frequency. To aid the optimal design of MEMS ring-based gyroscopic sensors that has relatively high robustness to fabrication tolerance, a geometrical compensation based on the developed model is demonstrated to identify the geometries of the ring and the suspension.
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Arifin, Davin, and Stewart McWilliam. "Rate-Sensing Performance of Imperfect Capacitive Ring-Based MEMS Coriolis Vibrating Gyroscopes at Large Drive Amplitudes." Sensors 25, no. 7 (2025): 2263. https://doi.org/10.3390/s25072263.
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This paper investigates the effect of electrostatic nonlinearity on the rate-sensing performance of imperfect ring-based Coriolis Vibrating Gyroscopes (CVGs) for devices having 8 and 16 evenly distributed electrodes. Mathematical models are developed for CVGs operating in (i) an open loop for a linear electrostatically trimmed device, (ii) a closed loop where a sense force balancing is applied to negate the sense quadrature response, and the effects of electrostatic nonlinearity are investigated for increasing drive amplitudes. The modeling indicates the nonlinear responses for 8- and 16-electrode arrangements are quite different, and this can be attributed to the nonlinear frequency imbalance, which depends on the drive and sense frequency softening as well as the presence of self-induced parametric excitation in the sense response. In open loop the 16-electrode arrangement exhibits much weaker levels of nonlinearity than the 8-electrode arrangement because the nonlinear frequency imbalance is less sensitive to drive amplitude. For devices operating in closed-loop with sense force balancing to ensure the drive and sense responses are in-phase/anti-phase, it is shown that ideal rate-sensing performance is achieved at large drive amplitudes for both 8- and 16-electrode arrangements. Using sense force balancing, rate sensing can be achieved using either the sense response or the required balancing voltage. For the latter, large nonlinear frequency imbalances and low damping levels enhance rate-sensing performance.
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Mahmoudian, Mehrdad, Joel Filho, Rui Melicio, Eduardo Rodrigues, Mojgan Ghanbari, and Paulo Gordo. "Three-Dimensional Performance Evaluation of Hemispherical Coriolis Vibratory Gyroscopes." Micromachines 14, no. 2 (2023): 254. http://dx.doi.org/10.3390/mi14020254.
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In this paper, the oscillation patterns and characteristics of gyroscopic reaction to rotation-induced Coriolis force and phase relations are reviewed by examining the main principles of operation of Coriolis vibratory gyroscopes based on the dynamic relations and proposed improvements in performance using parameter changes. Coriolis vibratory gyroscopes (CVGs) are among the most modern applicable gyroscopes in position detection that have replaced traditional gyroscopes due to some great features of the design of vibrating proof mass and elastic suspension. Given the key characteristics of capacitive versus piezoelectric excitation technologies for determining the vibration type in sensors, their operating principles and equations have completely changed. Therefore, two-dimensional finite element analysis is required to evaluate their optimal performance. Since the sensor space is constantly vibrating, a general equation is presented in this paper to explain the impact of parameters on the frequency of different operating modes. The main purposes of building vibrating gyroscopes are replacing the constant spinning of the rotor with a vibrating structure and utilizing the Coriolis effect, based on which the secondary motion of the sensitive object is generated according to the external angular velocity.
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Xiong, Chuanguo, Pengjun Zeng, Weishan Lv, et al. "Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure." Micromachines 13, no. 2 (2022): 172. http://dx.doi.org/10.3390/mi13020172.
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This paper presents the design and optimization of a novel MEMS tuning fork gyroscope microstructure. In order to improve the mechanical sensitivity of the gyroscope, much research has been carried out in areas such as mode matching, improving the quality factor, etc. This paper focuses on the analysis of mode shape, and effectively optimizes the decoupling structure and size of the gyroscope. In terms of structural design, the vibration performance of the proposed structure was compared with other typical structures. It was found that slotting in the middle of the base improved the transmission efficiency of Coriolis vibration, and opening arc slots between the tines reduced the working modal order and frequency. In terms of size optimization, the Taguchi method was used to optimize the relevant feature sizes of the gyroscope. Compared with the initial structure, the transmission efficiency of Coriolis vibration of the optimized gyroscope was improved by about 18%, and the working modal frequency was reduced by about 2.7 kHz. Improvement of these two indicators will further improve the mechanical sensitivity of the gyroscope.
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Gill, Waqas Amin, Ian Howard, Ilyas Mazhar, and Kristoffer McKee. "Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes." Designs 7, no. 5 (2023): 106. http://dx.doi.org/10.3390/designs7050106.
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Microelectromechanical system (MEMS) vibrating gyroscope design considerations are always intriguing due to their microscale mechanical, electrical, and material behavior. MEMS vibrating ring gyroscopes have become important inertial sensors in inertial measurement units (IMU) for navigation and sensing applications. The design of a MEMS vibrating ring gyroscope incorporates an oscillating ring structure as a proof mass, reflecting unique design challenges and possibilities. This paper presents a comprehensive design analysis of the MEMS vibrating ring gyroscope from the mechanical, electrical, and damping perspectives. The mechanical design of the MEMS vibrating ring gyroscope investigates the various frame designs of the vibrating ring structure, as well as the various beam structures, including rectangular and semicircular beam structures, which are analyzed using mathematical models and finite element analysis (FEA) simulations that provide an in-depth analysis of the stiffness and deflection of the vibrating structures. The electrical designs of the MEMS vibrating ring gyroscope are analyzed using various electrode configurations, electrostatic actuation, and capacitive detection mechanisms. The design analysis of various forms of damping, including viscous, structural, thermoelastic, and anchor damping, is discussed. The variety of design structures is investigated for MEMS vibrating ring gyroscopes’ mechanical, electrical, and damping performance.
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Gill, Waqas Amin, Ian Howard, Ilyas Mazhar, and Kristoffer McKee. "A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments." Sensors 22, no. 19 (2022): 7405. http://dx.doi.org/10.3390/s22197405.
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Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of attention over the last two decades because of their low power consumption, easy integration, and low fabrication cost. The usage of the gyroscope equipped with an inertial measurement unit has increased tremendously, with applications ranging from household devices to smart electronics to military equipment. However, reliability issues are still a concern when operating this inertial sensor in harsh environments, such as to control the movement and alignment of mini-satellites in space, tracking firefighters at an elevated temperature, and assisting aircraft navigation in gusty turbulent air. This review paper focuses on the key fundamentals of the MEMS vibrating gyroscopes, first discussing popular designs including the tuning fork, gimbal, vibrating ring, and multi-axis gyroscopes. It further investigates how bias stability, angle random walk, scale factor, and other performance parameters are affected in harsh environments and then discusses the reliability issues of the gyroscopes.
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Gallacher, Barry J., Z. X. Hu, J. S. Burdess, and K. M. Harish. "A Parametrically Amplified MEMS Gyroscope." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2010, DPC (2010): 001322–34. http://dx.doi.org/10.4071/2010dpc-wa21.
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The applicability of parametric amplification of either the primary and secondary vibration modes of a MEMS gyroscope, shown in Fig.1 is investigated experimentally in this paper. All control schemes have been implemented digitally onto a SHARC DSP development board. Parametric gains in excess of 80, which correspond to multiplication of the Q-factor by a factor of 80, are demonstrated experimentally for open-loop operation of the primary mode and are shown in Fig. 2. For open-loop operation it is shown that amplitude limiting nonlinearities become important as the vibration amplitude increases (see Figs.3) and that parametric amplification in excess of 80 can be only be achieved by further reducing the harmonic forcing amplitude. In many applications it is desirable to have as high a Q-factor as possible. The rate gyroscope is one application were active control of the Q-factor is extremely pertinent. If applied to the primary mode then it permits reduced forcing levels and hence contamination from “feedthrough”. If applied to the sense mode then the Coriolis force is effectively amplified. Parametric amplification of the secondary mode of the gyroscope is a challenging problem but it has the potential to improve the performance of MEMS rate gyroscope but an order of magnitude. In operation as a rate gyroscope it is important to maintain the amplitude of the primary mode of vibration at a constant level. For the case of a parametrically amplified primary mode the amplitude control circuit automatically adjusts the parametric excitation parameters to ensure the required parametric gain is achieved whilst at the same time reducing the amplitude of the harmonic forcing. In closed loop parametric amplification of the primary mode by a factor 20 have been demonstrated. Experimental results obtained from the amplified primary mode are shown in Fig.4.
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Gill, Waqas Amin, Ian Howard, Ilyas Mazhar, and Kristoffer McKee. "Design and Modelling of MEMS Vibrating Internal Ring Gyroscopes for Harsh Environments." Sensors 24, no. 17 (2024): 5854. http://dx.doi.org/10.3390/s24175854.
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This paper presents a design, model, and comparative analysis of two internal MEMS vibrating ring gyroscopes for harsh environmental conditions. The proposed design investigates the symmetric structure of the vibrating ring gyroscopes that operate at the identical shape of wine glass mode resonance frequencies for both driving and sensing purposes. This approach improves the gyroscope’s sensitivity and precision in rotational motion. The analysis starts with an investigation of the dynamic behaviour of the vibrating ring gyroscope with the detailed derivation of motion equations. The design geometry, meshing technology, and simulation results were comprehensively evaluated on two internal vibrating ring gyroscopes. The two designs are distinguished by their support spring configurations and internal ring structures. Design I consists of eight semicircular support springs and Design II consists of sixteen semicircular support springs. These designs were modelled and analyzed using finite element analysis (FEA) in Ansys 2023 R1 software. This paper further evaluates static and dynamic performance, emphasizing mode matching and temperature stability. The results reveal that Design II, with additional support springs, offers better mode matching, higher resonance frequencies, and better thermal stability compared to Design I. Additionally, electrostatic, modal, and harmonic analyses highlight the gyroscope’s behaviour under varying DC voltages and environmental conditions. Furthermore, this study investigates the impact of temperature fluctuations on performance, demonstrating the robustness of the designs within a temperature range from −100 °C to 100 °C. These research findings suggest that the internal vibrating ring gyroscopes are highly suitable for harsh conditions such as high temperature and space applications.
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Guerinoni, Luca, Luca Giuseppe Falorni, and Gabriele Gattere. "Modelling Cross Axis Sensitivity in MEMS Coriolis Vibratory Gyroscopes." Proceedings 1, no. 4 (2017): 281. http://dx.doi.org/10.3390/proceedings1040281.
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Sun, Bohua, Bo Zhang, and Mohamed Toriq Khan. "Modeling and Formulation of a Novel Microoptoelectromechanical Gyroscope." Journal of Nanomaterials 2008 (2008): 1–9. http://dx.doi.org/10.1155/2008/429168.
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This paper proposed a novel design of microgyroscope based on MEMS structures and optic interferometric microdisplacement measurement technique. The gyroscope consists of microvibrator and interferometric readout. Using Coriolis force, the vibrator transfers the system rotation into a forced vibration; the induced vibration can be sensed by the interferometric microdisplacement measurement system. The optic measurement system has two mirrors which will reflect two rays into a detector. The comprehensive studies on the formulation and analysis of the proposed gyroscope have been undertaken; two key sensor equations have been derived in the first time in the world: (1) relation between rotation and phase shift of lightΔφ=(4πl0/λ)+(8π/λ)(xmaxQy/ωy)Ω(t)sin(ωdt), (2) relation between rotation and interferometric intensity of lightI(t)≈(8π/λ)(xmaxQy/ωy)Ω(t)sin(ωdt)sin(4πl0/λ). The comparison of the proposed gyroscope and well-know Sagnac formulation has been investigated; it shown that the proposed model is much better than Sagnac ones. The new model has finally get rid of needing very long fiber in the case of Sagnac gyroscope. The innovative model gives a new hope to fabricate high accurate and cheaper gyroscope. To date, the proposed gyroscope is the most accurate gyroscope.
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Narang, Sanjoli, and Siddharth Tallur. "Field-programmable gate array (FPGA) based programmable digital emulator of vibratory microelectromechanical systems (MEMS) gyroscopes." Review of Scientific Instruments 93, no. 3 (2022): 035003. http://dx.doi.org/10.1063/5.0065642.
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This paper presents a hardware emulator of microelectromechanical systems (MEMS) vibratory gyroscopes that can be used for characterization and verification of control/interface electronics by means of hardware-in-the-loop testing, thus speeding up design cycles by decoupling these tasks from the often longer MEMS design and fabrication cycles. The easily re-configurable hardware emulator is completely synthesized on a field-programmable gate array board. The emulator is shown to successfully model the Coriolis effect along with the prominent error sources present in typical MEMS gyroscopes, namely, quadrature error, spring nonlinearity, and thermo-mechanical, electronic, and environmental noise. Preliminary experimental results characterizing the noise and nonlinearity models based on a prototype with user-controllable device parameters synthesized on the Xilinx Zynq®-7020 SoC (Digilent ZYBO Z7 board) are presented.
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Crescenzi, Rocco, Giuseppe Vincenzo Castellito, Simone Quaranta, and Marco Balucani. "Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope." Sensors 20, no. 10 (2020): 2822. http://dx.doi.org/10.3390/s20102822.
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Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. Plenty of high-volume applications, over 100 million per year, have been calling for low-cost gyroscopes. Bulk silicon is a promising candidate for low-cost gyroscopes due to its large scale availability and maturity of its manufacturing industry. Nevertheless, it is not suitable for a real monolithic IC integration and requires a dedicated packaging. New designs are supposed to eliminate the need for magnets and metal case package, and allow for a real monolithic MEMS-IC (Integrated Circuit) electronic system. In addition, a drastic cost reduction could be achieved by utilizing off-the-shelf plastic packaging with lead frames for the final assembly. The present paper puts forward the design of a novel tri-axial gyroscope based on rotating comb-drives acting as both capacitive sensors and actuators. The comb-drives are comprised of a single monolithic moving component (rotor) and fixed parts (stators). The former is made out of different concentrated masses connected by curved silicon beams in order to decouple the motion signals. The sensor was devised to be fabricated through the PolyMUMPs® process and it is intended for working in air in order to semplify the MEMS-IC monolithic integration.
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Qu, Yilin, Feng Jin, and Jiashi Yang. "Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors." Micromachines 13, no. 8 (2022): 1243. http://dx.doi.org/10.3390/mi13081243.
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We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.
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Jing, Chao, and Gangzhu Qiao. "Actor Critic Neural Network-Based Adaptive Control for MEMS Gyroscopes Suffering from Multiresource Disturbances." Mathematical Problems in Engineering 2021 (September 30, 2021): 1–7. http://dx.doi.org/10.1155/2021/6663946.
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In this paper, an actor critic neural network-based adaptive control scheme for micro-electro-mechanical system (MEMS) gyroscopes suffering from multiresource disturbances is proposed. Faced with multiresource interferences consisting of parametric uncertainties, strong couplings between axes, Coriolis forces, and variable external disturbances, an actor critic neural network is introduced, where the actor neural network is employed to estimate the packaged disturbances and the critic neural network is utilized to supervise the system performance. Hence, strong robustness against uncertainties and better tracking properties can be derived for MEMS gyroscopes. Aiming at handling the nonlinearities inherent in gyroscopes without analytically differentiating the virtual control signals, dynamic surface control (DSC) rather than backstepping control method is employed to divide the 2nd order system into two 1st order systems and design the actual control policy. Moreover, theoretical analyses along with simulation experiments are conducted with a view to validate the effectiveness of the proposed control approach.
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McCluskey, Patrick, Chandradip Patel, and David Lemus. "Performance and Reliability of MEMS Gyroscopes and Packaging at High Temperatures." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2010, HITEC (2010): 000359–66. http://dx.doi.org/10.4071/hitec-pmccluskey-tha22.
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Elevated temperatures can significantly affect the performance and reliability of MEMS gyroscope sensors. A MEMS vibrating resonant gyroscope measures angular velocity via a displacement measurement which can be on the order on nanometers. High sensitivity to small changes in displacement causes the MEMS Gyroscope sensor to be strongly affected by changes in temperature which can affect the displacement of the sensor due to thermal expansion and thermomechanical stresses. Analyzing the effect of temperature on MEMS gyroscope sensor measurements is essential in mission critical high temperature applications, such as inertial tracking of the movement of a fire fighter in a smoke filled indoor environment where GPS tracking is not possible. In this paper, we will discuss the development of the high temperature package for the tracking application, including the characterization of the temperature effects on the performance of a MEMS gyroscope. Both stationary and rotary tests were performed at room and at elevated temperatures on 10 individual single axis MEMS gyroscope sensors.
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Ruan, Zhihu, Xukai Ding, Zhengcheng Qin, Jia Jia, and Hongsheng Li. "Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force." Micromachines 11, no. 2 (2020): 210. http://dx.doi.org/10.3390/mi11020210.
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An automatic mode-matching method for MEMS (Micro-electromechanical Systems) disk resonator gyroscopes (DRGs) based on virtual Coriolis force is presented in this paper. For this mode-matching method, the additional tuning electrodes are not required to be designed, which simplifies the structure design. By using the quadratic relationship between the driving voltage and the electrostatic force, the virtual Coriolis force is obtained by applying an AC voltage whose frequency is half of the driving mode resonant frequency to the sense electrode. The phase difference between the virtual Coriolis force and the sense output signal is used for mode-matching. The structural characteristics and electrode distribution of the DRG are briefly introduced. Moreover, the mode-matching theories of the DRG are studied in detail. The scheme of the mode-matching control system is proposed. Simultaneously, the feasibility and effectiveness of the mode-matching method are verified by system simulation. The experimental results show that under the control of mode-matching at room temperature, the bias instability is reduced from 30.7575 ° /h to 2.8331 ° /h, and the Angle Random Walk (ARW) decreases from 1.0208 ° / h to 0.0524 ° / h . Compared with the mode mismatch condition, the ARW is improved by 19.48 times.
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Guan, Ran, Wei Ping Zhang, Gong Zhang, et al. "Design and Fabrication of a Novel Biaxial Piezoelectric Micro-Gyroscope." Key Engineering Materials 562-565 (July 2013): 421–25. http://dx.doi.org/10.4028/www.scientific.net/kem.562-565.421.
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Despite the popularity of piezoelectric vibratory micro-gyroscope in the past decades for their small size, low cost, batch fabrication and energy efficient, most of them can only detect single axis angular rate. In this paper, a novel biaxial piezoelectric micro-gyroscope fabricated with PZT wafer is proposed. To acquire two-axial angular rate sensing, a bouncing mode of the vibrator is utilized as the drive mode and two rocking modes are used as the sense modes. PZT is used as the vibration body instead of transducer, which enhances the drive and sense efficiency of the sensor. In this paper, the structure and working principle of the novel biaxial piezoelectric micro-gyroscope are introduced firstly. In addition, modal analysis has been made to research the voltage distribution of the piezoelectric vibrator and the drive and sense electrodes of the gyroscope are designed. By the optimization design of the proof mass, the frequency split between the drive mode (bouncing mode) and sense modes (rocking modes) is reduced and the sensitivity of the gyroscope is improved. Harmonic analysis has been made to research the Coriolis Effect of the gyroscope. The data get from the harmonic analysis is demodulated by Matlab and the sensitivity is given. The simulation results verify the principle of the novel biaxial piezoelectric micro-gyroscope. With the optimized design, the sensor is fabricated with MEMS technology at last.
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Antonello, R., R. Oboe, L. Prandi, and F. Biganzoli. "Automatic Mode Matching in MEMS Vibrating Gyroscopes Using Extremum-Seeking Control." IEEE Transactions on Industrial Electronics 56, no. 10 (2009): 3880–91. http://dx.doi.org/10.1109/tie.2009.2020707.
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Yin, Tao, Yueshan Lin, Haigang Yang, and Huanming Wu. "A Phase Self-Correction Method for Bias Temperature Drift Suppression of MEMS Gyroscopes." Journal of Circuits, Systems and Computers 29, no. 12 (2020): 2050198. http://dx.doi.org/10.1142/s0218126620501984.
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Phase error of the demodulation clock in the Coriolis vibratory gyroscope system allows the quadrature errors to leak into the sense channel and causes significant bias and temperature drift at the rate output. A phase self-correction method to suppress the temperature drift of the bias in gyroscopes is proposed. Through sweeping the demodulation clock phase and simultaneously monitoring the mechanical quadrature error output in gyroscopes, the optimal demodulation clock phase with minimum relatively phase shift is determined. Thus the bias influenced by the temperature and surroundings can be calibrated on-chip at start-up or when the environment changes drastically without the requirement of the complicated instruments. The proposed approach is validated by a silicon MEMS gyroscope with the natural frequency of 2.8[Formula: see text]kHz, which shows nearly 22 times improvement in the temperature sensitivity of the system bias, from 550[Formula: see text]mdeg/s/∘C down to 24.7[Formula: see text]mdeg/s/∘C.
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Lv, Risheng, Qiang Fu, Weiping Chen, Liang Yin, Xiaowei Liu, and Yufeng Zhang. "A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes." Sensors 20, no. 19 (2020): 5460. http://dx.doi.org/10.3390/s20195460.
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This paper proposes a solution for sensing spatial angular velocity. A high-performance digital interface application specific integrated circuit (ASIC) for triple-axis micro-electromechanical systems (MEMS) vibratory gyroscopes is presented. The technique of time multiplexing is employed for synergetic stable drive control and precise angular velocity measurement in three separate degrees of freedom (DOF). Self-excited digital closed loop drives the proof mass in sensing elements at its inherent resonant frequency for Coriolis force generation during angular rotation. The analog front ends in both drive and sense loops are comprised of low-noise charge-voltage (C/V) converters and multi-channel incremental zoom analog-to-digital converters (ADC), so that capacitance variation between combs induced by mechanical motion is transformed into digital voltage signals. Other circuitry elements, such as loop controlling and accurate demodulation modules, are all implemented in digital logics. Automatic amplitude stabilization is mainly realized by peak detection and proportion-integration (PI) control. Nonlinear digital gain adjustment is designed for rapid establishment of resonance oscillation and linearity improvement. Manufactured in a standard 0.35-μm complementary metal-oxide-semiconductor (CMOS) technology, this design achieves a bias instability of 2.1°/h and a nonlinearity of 0.012% over full-scale range.
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Pustan, Marius, Corina Birleanu, Florina Rusu, and Simion Haragâş. "Dynamic Behavior of MEMS Resonators." Applied Mechanics and Materials 658 (October 2014): 694–99. http://dx.doi.org/10.4028/www.scientific.net/amm.658.694.
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MEMS resonator represents currently one of the important research areas of Microelectromechanical Systems (MEMS). The usual applications of MEMS resonators are the radio-frequency electromechanical devices, MEMS gyroscopes and resonant sensors. The main part of a MEMS resonator is the mechanical vibrating structure that can be fabricated as microcantilevers, microbridges or in a more complex configuration as micromembranes. The scope of this paper is to investigate the dynamic behavior of an electrostatically actuated MEMS cantilever under different oscillating modes in order to determine the resonant frequency, amplitude and velocity of oscillations. Moreover, based on the resonant frequency experimental curves, the quality factor for different oscillating modes is determined. The effect of operating conditions on the frequency response of investigated microcantilever is monitored. As a consequence, the experimental tests are performed both in ambient conditions and in vacuum. The dynamic response of microcantilever in vacuum is influenced by the intrinsic dissipation energy and the sample behavior in air depends on the intrinsic losses as well as the extrinsic dissipation energy.
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Ünsal Öztürk, Derya, and Aydan M. Erkmen. "Coriolis Vibratory MEMS Gyro Drive Axis Control with Proxy-Based Sliding Mode Controller." Micromachines 13, no. 3 (2022): 446. http://dx.doi.org/10.3390/mi13030446.
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MEMS (micro electrical mechanical systems) gyroscopes are used to measure the angular rate in several applications. The performance of a MEMS gyroscope is dependent on more than one factor, such as mechanical imperfections, environmental condition-dependent parameter variations, and mechanical–thermal noises. These factors should be compensated to improve the performance of the MEMS gyroscope. To overcome this compensation problem, a closed-loop control system is one of the solutions. In this paper, a closed-loop control system is implemented. However, other than previously applied methods, a proxy-based sliding mode control approach is proposed, which is a novelty for the control of the MEMS gyroscope drive axis since, to the best of our knowledge, this method has not been applied to gyroscope control problems. Proxy-based sliding mode controllers do not suffer from the chattering phenomenon. Additionally, we do not need an exact system model to implement the control law. In particular, we are investigating, in this paper, the compatibility and performance of a proxy-based sliding mode controller for a closed-loop gyroscope implementation. We show that our proposed method provides robustness against model uncertainties and disturbances and is easy to implement. We also compare the performance of classical sliding mode controllers and proxy-based sliding mode controllers, which demonstrate the evident superiority of the proxy-based controller in our implementation results. Simulation results show that system error and gyroscope total error reduced by 49.52% and 12.03%, respectively, compared to the sliding mode controller. Simulation results are supported with the experimental data, and experimental results clearly demonstrate the superiority of the proxy-based sliding mode controller.
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Lu, Cheng, Liang Hua, Xinsong Zhang, Huiming Wang, and Yunxiang Guo. "Adaptive Sliding Mode Control Method for Z-Axis Vibrating Gyroscope Using Prescribed Performance Approach." Applied Sciences 10, no. 14 (2020): 4779. http://dx.doi.org/10.3390/app10144779.
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This paper investigates one kind of high performance control methods for Micro-Electro-Mechanical-System (MEMS) gyroscopes using adaptive sliding mode control (ASMC) scheme with prescribed performance. Prescribed performance control (PPC) method is combined with conventional ASMC method to provide quantitative analysis of gyroscope tracking error performances in terms of specified tracking error bound and specified error convergence rate. The new derived adaptive prescribed performance sliding mode control (APPSMC) can maintain a satisfactory control performance which guarantees system tracking error, at any time, to be within a predefined error bound and the error convergences faster than the error bound. Besides, adaptive control (AC) technique is integrated with PPC to online tune controller parameters, which will converge to their true values at last. The stability of the control system is proved in the Lyapunov stability framework and simulation results on a Z-axis MEMS gyroscope is conducted to validate the effectiveness of the proposed control approach.
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Zhu, Yijun, and Huilin Shang. "Jump and Pull-in Instability of a MEMS Gyroscope Vibrating System." Micromachines 14, no. 7 (2023): 1396. http://dx.doi.org/10.3390/mi14071396.
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Jump and pull-in instability are common nonlinear dynamic behaviors leading to the loss of the performance reliability and structural safety of electrostatic micro gyroscopes. To achieve a better understanding of these initial-sensitive phenomena, the dynamics of a micro gyroscope system considering the nonlinearities of the stiffness and electrostatic forces are explored from a global perspective. Static and dynamic analyses of the system are performed to estimate the threshold of the detecting voltage for static pull-in, and dynamic responses are analyzed in the driving and detecting modes for the case of primary resonance and 1:1 internal resonance. The results show that, when the driving voltage frequency is a bit higher than the natural frequency, a high amplitude of the driving AC voltage may induce the coexistence of bistable periodic responses due to saddle-node bifurcation of the periodic solution. Basins of attraction of bistable attractors provide evidence that disturbance of the initial conditions can trigger a jump between bistable attractors. Moreover, the Melnikov method is applied to discuss the condition for pull-in instability, which can be ascribed to heteroclinic bifurcation. The validity of the prediction is verified using the sequences of safe basins and unsafe zones for dynamic pull-in. It follows that pull-in instability can be caused and aggravated by the increase in the amplitude of the driving AC voltage.
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Liu, Xuewen, Zhengcheng Qin, and Hongsheng Li. "Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes." Micromachines 13, no. 5 (2022): 647. http://dx.doi.org/10.3390/mi13050647.
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In this paper, an online compensation method of phase delay error based on a Phase-Frequency (P-F) characteristic has been proposed for MEMS Coriolis Vibratory Gyroscopes (CVGs). At first, the influences of phase delay were investigated in the drive and sense mode. The frequency response was acquired in the digital control system by collecting the demodulation value of drive displacement, which verified the existence and influence of the phase delay. In addition, based on the P-F characteristic, that is, when the phase shift of the nonresonant drive force through the resonator is almost 0° or 180°, the phase delay of the gyroscope is measured online by injecting a nonresonant reference signal into the drive-mode dynamics. After that, the phase delay is self-corrected by adjusting the demodulation phase angle without affecting the normal operation of the gyroscopes. The approach was validated with an MEMS dual-mass vibratory gyroscope under double-loop force-to-rebalance (in-phase FTR and quadrature FTR) closed-loop detection mode and implemented with FPGA. The measurement results showed that this scheme can detect and compensate phase delay to effectively eliminate the effect of the quadrature error. This technique reduces the zero rate output (ZRO) from −0.71°/s to −0.21°/s and bias stability (BS) from 23.30°/h to 4.49°/h, respectively. The temperature sensitivity of bias output from −20 °C to 40 °C has reached 0.003 °/s/°C.
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OYA, Tomohiro, Takashi KAMIYA, and Saburo MATUNAGA. "S192013 Studies of on-orbit calibration method for vibrating structure MEMS-Gyroscopes in Micro-satellites." Proceedings of Mechanical Engineering Congress, Japan 2013 (2013): _S192013–1—_S192013–4. http://dx.doi.org/10.1299/jsmemecj.2013._s192013-1.
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Petrenko, Oleksii, Valerii Chikovani, Serhii Golovach, and Grygorii Golovach. "Experimental investigation of the maximum quality factor axes temperature deviation in metallic Coriolis vibratory gyroscopes resonator." MECHANICS OF GYROSCOPIC SYSTEMS, no. 42 (December 28, 2022): 69–79. http://dx.doi.org/10.20535/0203-3771422021268467.
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A metallic cylindrical resonator is a well-known base detail of the significant part of Coriolis vibratory gyroscopes (CVG) [1] including a MEMS gyro. It own parameters just after mechanical manufacture in main are determine an advisability of further utilize and the future gyroscope accuracy potential. Initial testing CVG resonators directly after their manufacture often done using the optical method [2,3] or acoustic method [4,5]. Unfortunately investigated manufacture quality of the resonators by using acoustic method not very well describe in scientific literature. A paper presents the results of some extension acoustic investigations of the metallic CVG resonators. This result describes the behavior of maximum quality factor (Q-factor) axes and own resonant frequencies axes under stabilized temperature step influences and can be used in prediction for CVG bias minimization during it works in temperature range.
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Wang, Xinwang, and Huiliang Cao. "Improved VMD-ELM Algorithm for MEMS Gyroscope of Temperature Compensation Model Based on CNN-LSTM and PSO-SVM." Micromachines 13, no. 12 (2022): 2056. http://dx.doi.org/10.3390/mi13122056.
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The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle of the MEMS gyroscope, which is achieved through Coriolis, is different from traditional gyroscopes. The MEMS gyroscope has been widely used in the fields of micro-inertia navigation systems, military, automotive, consumer electronics, mobile applications, robots, industrial, medical, and other fields in micro-inertia navigation systems because of its advantages of small volume, good performance, and low price. The material characteristics of the MEMS gyroscope is very significant for its data output, and the temperature determines its accuracy and limits its further application. In order to eliminate the effect of temperature, the MEMS gyroscope needs to be compensated to improve its accuracy. This study proposed an improved variational modal decomposition—extreme learning machine (VMD-ELM) algorithm based on convolutional neural networks—long short-term memory (CNN-LSTM) and particle swarm optimization—support vector machines (PSO-SVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and the gyro output signal with better accuracy is obtained. The VMD algorithm separates the gyro output signal and divides the gyro output signal into low-frequency signals, mid-frequency signals, and high-frequency signals according to the different signal frequencies. Once again, the PSO-SVM model is constructed by the mid-frequency temperature signal to find the temperature error. Finally, the signal is reconstructed through the ELM neural network algorithm, and then, the gyro output signal after noise is obtained. Experimental results show that, by using the improved method, the output of the MEMS gyroscope ranging from −40 to 60 °C reduced, and the temperature drift dramatically declined. For example, the factor of quantization noise (Q) reduced from 1.2419 × 10−4 to 1.0533 × 10−6, the factor of bias instability (B) reduced from 0.0087 to 1.8772 × 10−4, and the factor of random walk of angular velocity (N) reduced from 2.0978 × 10−5 to 1.4985 × 10−6. Furthermore, the output of the MEMS gyroscope ranging from 60 to −40 °C reduced. The factor of Q reduced from 2.9808 × 10−4 to 2.4430 × 10−6, the factor of B reduced from 0.0145 to 7.2426 × 10−4, and the factor of N reduced from 4.5072 × 10−5 to 1.0523 × 10−5. The improved algorithm can be adopted to denoise the output signal of the MEMS gyroscope to improve its accuracy.
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Binder, Ya I., and I. A. Khazov. "Versatile Gyroinclinometer Based on a Single Axis Angular Rate Sensor." Journal of the Russian Universities. Radioelectronics 26, no. 4 (2023): 133–48. http://dx.doi.org/10.32603/1993-8985-2023-26-4-133-148.
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Introduction. Currently, the versatility and reliability of gyroscopic inclinometers (GI), more than accuracy, determine their configuration and design. Imperative conditions for versatility include a diameter of 42…44.5 mm and a combination of point and continuous survey modes. Reliability is primarily determined by the robustness of the main elements. The fundamental parameter is adaptability to the trajectory, in other words, equal accuracy in the operating range of zenith angles, which determines the choice of orientation of the angular velocity sensors (ARS) with incomplete (< 3) number of their axis. Presently, biaxial dynamically tuned gyroscopes (DNG) are widely used due to their dimension and accuracy criteria; however, their elastic suspension gradually degrades as a result of frequent sidetracking operations (from previously drilled ones) accompanied by high-intensity impacts.Aim. To develop an inexpensive versatile GI that maintains a balance between shock resistance and accuracy (com[1]parable to fiber-optic ARS) based on a single-axis vibrating ring gyroscope (VRG) with an induction-type resonator made using MEMS technology.Materials and methods. The method of multi-position compassing with a single uniaxial ARS was implemented by transition from simultaneous biaxial measurements to uniaxial measurements in five successive positions of the frame (through 90°) along the toolface angle. Experimental data on the drifts of the selected VRG allow statistical methods to be used to construct an Allan-variance plot to confirm that the proposed method does not increase the total compassing time compared to the basic one. The continuous mode of such a GI, studied by solving differential equations, requires holding the input axis of the ARS near the apsidal plane using the same rotating frame.Results. The obtained ratios confirm that the performance characteristics of a GI with a uniaxial ARS approximately correspond to the conventional biaxial scheme. These conclusions were also confirmed by the mathematical modeling of a survey of a typical oil and gas well.Conclusion. The described GI containing a single ARS with indirect stabilization of the input axis is the result of a consistent development of the approach to the use of incomplete information
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Hou, Baoyin, Ye Zhu, Chaofan He, et al. "A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope." Microsystems & Nanoengineering 10, no. 1 (2024). http://dx.doi.org/10.1038/s41378-024-00659-8.
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AbstractThe emergence of microhemispherical resonant gyroscopes, which integrate the advantages of exceptional stability and long lifetime with miniaturization, has afforded new possibilities for the development of whole-angle gyroscopes. However, existing methods used for manufacturing microhemispherical resonant gyroscopes based on MEMS technology face the primary drawback of intricate and costly processing. Here, we report the design, fabrication, and characterization of the first 3D-printable microhemispherical shell resonator for a Coriolis vibrating gyroscope. We remarkably achieve fabrication in just two steps bypassing the dozen or so steps required in traditional micromachining. By utilizing the intricate shaping capability and ultrahigh precision offered by projection microstereolithography, we fabricate 3D high-aspect-ratio resonant structures and controllable capacitive air gaps, both of which are extremely difficult to obtain via MEMS technology. In addition, the resonance frequency of the fabricated resonators can be tuned by electrostatic forces, and the fabricated resonators exhibit a higher quality factor in air than do typical MEMS microhemispherical resonators. This work demonstrates the feasibility of rapidly batch-manufacturing microhemispherical shell resonators, paving the way for the development of microhemispherical resonator gyroscopes for portable inertial navigation. Moreover, this particular design concept could be further applied to increase uptake of resonator tools in the MEMS community.
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Hodjat-Shamami, Mojtaba, and Farrokh Ayazi. "Eigenmode operation of piezoelectric resonant gyroscopes." Microsystems & Nanoengineering 6, no. 1 (2020). http://dx.doi.org/10.1038/s41378-020-00204-3.
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AbstractThe theory of eigenmode operation of Coriolis vibratory gyroscopes and its implementation on a thin-film piezoelectric gyroscope is presented. It is shown analytically that the modal alignment of resonant gyroscopes can be achieved by applying a rotation transformation to the actuation and sensing directions regardless of the transduction mechanism. This technique is especially suitable for mode matching of piezoelectric gyroscopes, obviating the need for narrow capacitive gaps or DC polarization voltages. It can also be applied for mode matching of devices that require sophisticated electrode arrangements for modal alignment, such as electrostatic pitch and roll gyroscopes with slanted electrodes utilized for out-of-plane quadrature cancellation. Gyroscopic operation of a 3.15 MHz AlN-on-Si annulus resonator that utilizes a pair of high-Q degenerate in-plane vibration modes is demonstrated. Modal alignment of the piezoelectric gyroscope is accomplished through virtual alignment of the excitation and readout electrodes to the natural direction of vibration mode shapes in the presence of fabrication nonidealities. Controlled displacement feedback of the gyroscope drive signal is implemented to achieve frequency matching of the two gyroscopic modes. The piezoelectric gyroscope shows a mode-matched operation bandwidth of ~250 Hz, which is one of the largest open-loop bandwidth values reported for a mode-matched MEMS gyroscope, a small motional resistance of ~1300 Ω owing to efficient piezoelectric transduction, and a scale factor of 1.57 nA/°/s for operation at atmospheric pressure, which greatly relaxes packaging requirements. Eigenmode operation results in an ~35 dB reduction in the quadrature error at the resonance frequency. The measured angle random walk of the device is 0.86°/√h with a bias instability of 125°/h limited by the excess noise of the discrete electronics.
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Arifin, Davin, and Stewart McWilliam. "Negating self-induced parametric excitation in capacitive ring-based MEMS Coriolis Vibrating Gyroscopes." Journal of Sound and Vibration, February 2025, 119016. https://doi.org/10.1016/j.jsv.2025.119016.
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Huang, Wenyi, Xing Yan, Sengyu Zhang, et al. "MEMS and MOEMS Gyroscopes: A Review." Photonic Sensors 13, no. 4 (2023). http://dx.doi.org/10.1007/s13320-023-0693-x.
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AbstractMicro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the working principle and used materials, the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope, hemispherical resonant gyroscope, piezoelectric vibratory gyroscope, suspended rotor gyroscope, microfluidic gyroscope, optical gyroscope, and atomic gyroscope. According to different sensitive structures, the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type, tuning fork type, vibrating ring type, and nested ring type. For those micro-gyroscopes, in recent years, many emerging techniques are proposed and developed to enhance different aspects of performances, such as the sensitivity, angle random walk (ARW), bias instability (BI), and bandwidth. Therefore, this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes, then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above, and finally discuss the future development trends of MEMS/MOEMS gyroscopes.
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Jin, Li, Shi-Yang Qin, Rui Zhang, and Meng-Wei Li. "High-sensitivity tunneling magneto-resistive micro-gyroscope with immunity to external magnetic interference." Scientific Reports 10, no. 1 (2020). http://dx.doi.org/10.1038/s41598-020-73369-6.
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Abstract Micro-electro-mechanical system (MEMS) gyroscopes have numerous potential applications including guidance, robotics, tactical-grade navigation, and automotive applications fields. The methods with ability of the weak Coriolis force detection are critical for MEMS gyroscopes. In this paper, we presented a design of MEMS gyroscope based on the tunneling magneto-resistance effect with higher detection sensitivity. Of all these designed parameters, the structural, magnetic field, and magneto-resistance sensitivity values reach to 21.6 nm/°/s, 0.0023 Oe/nm, and 29.5 mV/Oe, thus, with total sensitivity of 1.47 mV/°/s. Multi-bridge circuit method is employed to suppress external magnetic interference and avoid the integration error of the TMR devices effectively. The proposed tunneling magneto-resistive micro-gyroscope shows a possibility to make an inertial grade MEMS gyroscope in the future.
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Huber, Christof. "MEMS-based micro-Coriolis technology for high precision density measurement." tm - Technisches Messen 83, no. 3 (2016). http://dx.doi.org/10.1515/teme-2015-0092.
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AbstractEndress+Hauser has a long history of developing and producing flowmeters of various measurement technologies for the scope of process and product control in a variety of applications and industries. One of the most important flow measurement technologies in the last decades was the vibrating tube flowmeters based on the Coriolis measuring principle. An advantage of Coriolis flowmeters is the fact that they measure direct mass flow rate. Furthermore, by using the resonating tube frequency information, density and viscosity of a fluid can be deduced. Coriolis flowmeters exist in a lot of different shapes and styles, typically having metal flow tubes e. g. from stainless steel, titanium, zirconium or tantalum. The nominal flow rates range from about 1 g/h to 4000 t/h corresponding to line sizes from 0.2 mm up to 350 mm. In recent years different groups have worked on the adaptation and implementation of the Coriolis measuring principle in a MEMS (Micro Electro Mechanical System) sensor by etching a micro tube structure from a silicon wafer. Such micro machined silicon based Coriolis sensor chips open a new field of applications for the Coriolis measuring principle. Here we present the work of Endress+Hauser on the field of MEMS based Micro-Coriolis Sensors and explore potential applications of this new technology, e. g. for very accurate liquid and gas density measurements and concentration determination.
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Li, Donghao, Steven W. Shaw, and Pavel M. Polunin. "Computational Modeling of Nonlinear Dynamics and Its Utility in MEMS Gyroscopes." Journal of Structural Dynamics, 2022. http://dx.doi.org/10.25518/2684-6500.96.
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This paper describes a hybrid approach for modeling nonlinear vibrations and determining essential (normal form) coefficients that govern a reduced-order model of a structure. Incorporating both computational and analytical tools, this blended method is demonstrated by considering a micro-electro-mechanical vibrating gyroscopic rate sensor that is actuated by segmented DC electrodes. Two characterization methods are expatiated, where one is more favorable in computational tools and the other can be used in experiments. Using the reduced model, it is shown that tuning the nonuniform DC bias results in favorable changes in Duffing and mode-coupling nonlinearities which can improve the gyroscope angular rate sensitivity by two orders of magnitude.
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Yu, Sheng, Jiangkun Sun, Yongmeng Zhang, et al. "Real-time correction of gain nonlinearity in electrostatic actuation for whole-angle micro-shell resonator gyroscope." Microsystems & Nanoengineering 10, no. 1 (2024). http://dx.doi.org/10.1038/s41378-024-00818-x.
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AbstractMEMS gyroscopes are well known for their outstanding advantages in Cost Size Weight and Power (CSWaP), which have inspired great research attention in recent years. A higher signal-to-noise ratio (SNR) for MEMS gyroscopes operating at larger vibrating amplitudes provides improved measuring resolution and ARW performance. However, the increment of amplitude causes strong nonlinear effects of MEMS gyroscopes due to their micron size, which has negative influences on the performance. This paper carries out detailed research on a general nonlinear mechanism on the sensors using parallel-plate capacitive transducers, which is called the gain nonlinearity in electrostatic actuation. The theoretical model established in this paper demonstrates the actuation gain nonlinearity causes the control-force coupling and brings extra angle-dependent bias with the 4th component for the whole-angle gyroscopes, which are verified by the experiments carried out on a micro-shell resonator gyroscope (MSRG). Furthermore, a real-time correction method is proposed to restore a linear response of the electrostatic actuation, which is realized by the gain modification with an online parameter estimation based on the harmonic-component relationship of capacitive detection. This real-time correction method could reduce the 4th component of the angle-dependent bias by over 95% from 0.003°/s to less than 0.0001°/s even under different temperatures. After the correction of actuation gain nonlinearity, the bias instability (BI) of whole-angle MSRG is improved by about 3.5 times from 0.101°/h to 0.029°/h and the scale factor nonlinearity (SFN) is reduced by almost one order of magnitude from 2.02 ppm to 0.21 ppm.
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Arifin, Davin, and Stewart McWilliam. "Effects of electrostatic nonlinearity on the rate measuring performance of ring based Coriolis Vibrating Gyroscopes (CVGs)." Sensors and Actuators A: Physical, April 2022, 113539. http://dx.doi.org/10.1016/j.sna.2022.113539.
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Kim, Chulhong, Junghyun Park, Taeyup Kim, et al. "Development and evaluation of haltere-mimicking gyroscope for three-axis angular velocity sensing using a haltere-mimicking structure pair." Bioinspiration & Biomimetics, October 21, 2022. http://dx.doi.org/10.1088/1748-3190/ac9c7d.
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Abstract This paper presents a three-axis biomimetic gyroscope, mimicking the haltere of Diptera. Diptera uses a club-shaped mechanosensory organ called the haltere to get the three-axis angular velocity information, namely roll, pitch and yaw axes, for flight control. One pair of halteres is physically connected to the wings of Diptera that vibrate in antiphase to the flapping wings in ambient air. They sense the Coriolis force and relay angular velocity information to the Diptera. As an alternative to the conventional micro-electro-mechanical systems (MEMS) gyroscopes which are widely used in robotics, many research groups have attempted to mimic the haltere. However, no previous study succeeded in measuring all three-axis components of angular velocity due to various shortcomings. In this paper, we developed the first three-axis haltere-mimicking gyroscope. Two perpendicularly positioned haltere-mimicking structures that can vibrate at a 180 ˚ amplitude were mechanically integrated into a robot actuator. Two accelerometers placed at the tip of each structure were employed to measure the Coriolis force. The performance of the novel biomimetic gyroscope was measured in all rotational directions, using a motion capture system as the ground truth. One-axis input experiments were performed 240 times at different input magnitudes and directions, and the measured orientation error was less than ± 2.0 % in all experiments. In 80 three-axis input experiments, the orientation error was less than ± 3.5 %.