Relevant bibliographies by topics / MEMS gyroscope

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  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'MEMS gyroscope'

Author: Grafiati
Published: 4 June 2021
Last updated: 6 September 2023

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Journal articles on the topic "MEMS gyroscope"

1

Bai, Bing, Cun Li, and Yulong Zhao. "Development of V-Shaped Beam on the Shock Resistance and Driving Frequency of Micro Quartz Tuning Forks Resonant Gyroscope." Micromachines 11, no. 11 (November 17, 2020): 1012. http://dx.doi.org/10.3390/mi11111012.

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The application of gyroscopes in harsh environments has always been a hot topic. As a high-quality material for manufacturing gyroscopes, quartz crystals need to be designed and optimized to meet the normal operation of gyroscopes in harsh environments. The Micro Electronics Mechanical System(MEMS) quartz tuning forks resonant gyroscope is one of the quartz gyroscopes. The elastic structure (V-shaped beam) between the anchor support point and tuning forks plays a vital role in the MEMS quartz tuning forks resonant gyroscope. This structure determines the natural frequency of the gyroscope, and more importantly, determines the shock resistance of the gyroscope structure. In this article, the MEMS quartz tuning forks gyroscope with different V-shaped beam thicknesses are simulated and analyzed by finite element analysis simulation software. After the modal analysis and shock simulation (the half-cycle sine shock pulse with amplitude of 1500 g (g is the acceleration of gravity) and duration of 2 ms in the six shock directions), the results show that when the beam thickness is 80 μm, the maximum stress is 94.721 MPa, which is less than the failure stress of quartz crystal. The gyroscope’s shock resistance is verified through shock testing.
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2

Li, Song, Xiao Feng He, Mei Ping Wu, and Xiao Ping Hu. "A Mitigation Method for Temperature Error Based on MEMS Gyroscopes Array." Applied Mechanics and Materials 742 (March 2015): 598–602. http://dx.doi.org/10.4028/www.scientific.net/amm.742.598.

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In order to decrease the temperature error of MEMS gyroscopes, a mitigation method based on gyroscope array was proposed. Angular rate of MEMS gyroscope fluctuates dramatically with the change of gyro temperature when gyroscope starts up. The temperature characteristic error of MEMS gyroscope has become one of the major errors in the practical application. A mitigation method for temperature error was presented based on MEMS gyroscope array utilizing high correlation of temperature errors in the same batch of MEMS gyroscopes. This method was designed to improve environmental adaptability and shorten the startup time of MEMS based inertial measurement unit. Experimental results showed that the method was feasible and effective.
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3

Patel, Chandradip, and Patrick McCluskey. "Performance of MEMS Vibratory Gyroscope under Harsh Environments." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2012, DPC (January 1, 2012): 000633–54. http://dx.doi.org/10.4071/2012dpc-ta34.

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Microelectromechanical systems (MEMS) gyroscope is a sensor that measures the rate of change in an angular position of an object. MEMS vibratory gyroscopes are increasingly used in applications ranging from consumer electronics to aerospace and are now one of the most common MEMS products after accelerometers.With advances in fabrication technologies, the low-cost MEMS gyroscope has opened up a wide variety of applications with environmental conditions ranging from medium to harsh. Despite their widespread use, the performance of MEMS gyroscopes in harsh environments is still under question. While some studies have been conducted to understand the effects of high mechanical shock, high frequency vibration and high frequency acoustic environment on the MEMS gyroscopes,the effects of sustained exposure to temperature combined withother harsh environment stresseshave not been well researched.Thus, it is necessary to quantify MEMS vibratory gyroscope performance under such conditions.This research reviews current harsh environment studies anddemonstrates the effects of an elevated temperature and sustained exposure to temperature combined humidity on the MEMS vibratory gyroscope. In order to quantify such effects, several tests have been performed. A short-term temperature effect on MEMS gyroscope was examined through temperature characterization test forfive thermal cycles at wider temperature ranges. A long-term temperature effect on the MEMS gyroscope was inspected through 500 thermal cycles; while, combined effects of temperature and humidity was studied through temperature humidity bias(THB) test and highly accelerated stress test (HAST).
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4

Ren, Ya Fei, Yun Wang Ge, and Xu Can Bai. "Research on Optimal Weight Choice of Multi-MEMS Gyroscope Data Fusion." Applied Mechanics and Materials 192 (July 2012): 351–55. http://dx.doi.org/10.4028/www.scientific.net/amm.192.351.

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The performance of MEMS gyroscope is crucial to its application, and the zero-bias stability is the main characteristic parameter of gyroscope performance. When fusing several outputs of similar MEMS gyroscope, we often use the weighted mean method. The weight has great influence on the fusing result. In this paper, the optimal weight choice used in the fusion of Multi-MEMS gyroscope data is derived based on multivariate numerical theory. Experimental results show that after simulating multi-MEMS gyroscope data fusion on the measurement result of several gyroscopes, the zero-bias stability will effectively improve.
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5

Patel, Chandradip, F. Patrick McCluskey, and David Lemus. "Temperature and Humidity Effects on MEMS Vibratory Gyroscope." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2011, DPC (January 1, 2011): 001361–90. http://dx.doi.org/10.4071/2011dpc-wa22.

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MEMS vibratory gyroscopes are increasingly used in applications ranging from consumer electronics to aerospace and are now one of the most common MEMS products after accelerometers. Despite their widespread use, the performance of MEMS gyroscopes in harsh environments is still under question. While some studies have been conducted to understand the temperature dependent performance of MEMS gyroscopes, the effects of sustained exposure to temperature combined with other harsh environment stresses have not been well researched. Thus, it is necessary to quantify MEMS vibratory gyroscope performance under such conditions. This paper will focus on the combined effects of temperature and humidity only. Performance of the MEMS vibratory gyroscope will be evaluated over time at high temperature and high humidity conditions by conducting an aging test on a COTS (commercial of the shelf) single axis MEMS vibratory gyroscope having an operating temperature range from −40°C to 80°C. The gyroscope sensor will be exposed to 60 °C and 90% RH (Relative humidity) for 500 hours. In-situ data will be monitored to track any shifts in device output. Any permanent changes in the output signal will be traced back to their fundamental root cause damage mechanism.
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6

Lian, Jiangkai, Jianhua Li, and Lixin Xu. "The Effect of Displacement Constraints on the Failure of MEMS Tuning Fork Gyroscopes under Shock Impact." Micromachines 10, no. 5 (May 24, 2019): 343. http://dx.doi.org/10.3390/mi10050343.

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Displacement constraints such as stops are widely used in engineering to improve the shock resistance of microelectromechanical system (MEMS) tuning fork gyroscopes. However, in practical applications, it has been found that unexpected breakage can occur on MEMS tuning fork gyroscopes with stops. In this paper, the effects of two displacement constraints on the failure mode of MEMS tuning fork gyroscopes are studied. The MEMS tuning fork gyroscope is simplified to a two-degree-of-freedom (2DOF) model, then finite element analysis (FEA) is used to study the effects of displacement constraint on the gyroscope. The analysis proves that even if the displacement constraint of direct contact with the weak connecting beam is not established, the equivalent stiffness of the gyroscope can be enhanced by limiting the displacement of the movable mass, thereby improving the shock resistance of the gyroscope. However, under the shock of high-g level, displacement constraint with insufficient spacing will cause multiple collisions of the small-stiffness oscillating frame and lead to an increase in stress. The cause of failure and shock resistance of a MEMS tuning fork gyroscope are verified by the shock test. By comparing the results, we can get a conclusion that is consistent with the theoretical analysis.
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7

Droogendijk, H., R. A. Brookhuis, M. J. de Boer, R. G. P. Sanders, and G. J. M. Krijnen. "Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology." Journal of The Royal Society Interface 11, no. 99 (October 6, 2014): 20140573. http://dx.doi.org/10.1098/rsif.2014.0573.

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Flies use so-called halteres to sense body rotation based on Coriolis forces for supporting equilibrium reflexes. Inspired by these halteres, a biomimetic gimbal-suspended gyroscope has been developed using microelectromechanical systems (MEMS) technology. Design rules for this type of gyroscope are derived, in which the haltere-inspired MEMS gyroscope is geared towards a large measurement bandwidth and a fast response, rather than towards a high responsivity. Measurements for the biomimetic gyroscope indicate a (drive mode) resonance frequency of about 550 Hz and a damping ratio of 0.9. Further, the theoretical performance of the fly's gyroscopic system and the developed MEMS haltere-based gyroscope is assessed and the potential of this MEMS gyroscope is discussed.
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8

Feng, Rui, Jiong Wang, Wei Qiao, Fu Wang, Ming Zhou, Xinglian Shang, Lei Yu, Liuhui Zhou, and Shuwen Guo. "Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal." Micromachines 12, no. 9 (September 16, 2021): 1115. http://dx.doi.org/10.3390/mi12091115.

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In high-reliability applications, the health condition of the MEMS gyroscope needs to be known in real time to ensure that the system does not fail due to the wrong output signal. Because the MEMS gyroscope self-test based on the principle of electrostatic force cannot be performed during the working state. We propose that by monitoring the quadrature error signal of the MEMS gyroscope in real time, an online self-test of the MEMS gyroscope can be realized. The correlation between the gyroscope’s quadrature error amplitude signal and the gyroscope scale factor and bias was theoretically analyzed. Based on the sixteen-sided cobweb-like MEMS gyroscope, the real-time built-in self-test (BIST) method of the MEMS gyroscope based on the quadrature error signal was verified. By artificially setting the control signal of the gyroscope to zero, we imitated several scenarios where the gyroscope malfunctioned. Moreover, a mechanical impact table was used to impact the gyroscope. After a 6000 g shock, the gyroscope scale factor, bias, and quadrature error amplitude changed by −1.02%, −5.76%, and −3.74%, respectively, compared to before the impact. The gyroscope failed after a 10,000 g impact, and the quadrature error amplitude changed −99.82% compared to before the impact. The experimental results show that, when the amplitude of the quadrature error signal seriously deviates from the original value, it can be determined that the gyroscope output signal is invalid.
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Shen, Qiang, Jieyu Liu, Huang Huang, Qi Wang, and Weiwei Qin. "Kurtosis-based IMM filter for multiple MEMS gyroscopes fusion." Sensor Review 37, no. 3 (June 19, 2017): 237–46. http://dx.doi.org/10.1108/sr-08-2016-0147.

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Purpose The purpose of this study is to explore a signal processing method to improve the angular rate accuracy of micro-electro-mechanical system (MEMS) gyroscope by combining numerous gyroscopes. Design/methodology/approach To improve the dynamic performance of the signal processing method, the interacting multiple model (IMM) can be applied to the fusion of gyroscope array. However, the standard IMM has constant Markov parameter, which may reduce the model switching speed. To overcome this problem, an adaptive IMM filter is developed based on the kurtosis of the gyroscope output, in which the transition probabilities are adjusted online by utilizing the dynamic information of the rate signal. Findings The experimental results indicate that the precision of the gyroscope array composed of six gyroscopes increases significantly and the kurtosis-based adaptive Markov parameter IMM filter (K-IMM) performs better than the baseline methods, especially under dynamic conditions. These experiments prove the validity of the proposed fusion method. Practical implications The proposed method can improve the accuracy of MEMS gyroscopes without breakthrough on hardware, which is necessary to extend their utility while not restricting the overwhelming advantages. Original/value A K-IMM algorithm is proposed in this paper, which is used to improve the angular rate accuracy of MEMS gyroscope by combining numerous gyroscopes.
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Jiang, Changhui, Shuai Chen, Yuwei Chen, Yuming Bo, Lin Han, Jun Guo, Ziyi Feng, and Hui Zhou. "Performance Analysis of a Deep Simple Recurrent Unit Recurrent Neural Network (SRU-RNN) in MEMS Gyroscope De-Noising." Sensors 18, no. 12 (December 17, 2018): 4471. http://dx.doi.org/10.3390/s18124471.

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Microelectromechanical System (MEMS) Inertial Measurement Unit (IMU) is popular in the community for constructing a navigation system, due to its small size and low power consumption. However, limited by the manufacturing technology, MEMS IMU experiences more complicated noises and errors. Thus, noise modeling and suppression is important for improving accuracy of the navigation system based on MEMS IMU. Motivated by this problem, in this paper, a deep learning method was introduced to MEMS gyroscope de-noising. Specifically, a recently popular Recurrent Neural Networks (RNN) variant Simple Recurrent Unit (SRU-RNN) was employed in MEMS gyroscope raw signals de-noising. A MEMS IMU MSI3200 from MT Microsystem Company was employed in the experiments for evaluating the proposed method. Following two problems were furtherly discussed and investigated: (1) the employed SRU with different training data length were compared to explore whether there was trade-off between the training data length and prediction performance; (2) Allan Variance was the most popular MEMS gyroscope analyzing method, and five basic parameters were employed to describe the performance of different grade MEMS gyroscope; among them, quantization noise, angle random walk, and bias instability were the major factors influencing the MEMS gyroscope accuracy, the compensation results of the three parameters for gyroscope were presented and compared. The results supported the following conclusions: (1) considering the computation brought from training dataset, the values of 500, 3000, and 3000 were individually sufficient for the three-axis gyroscopes to obtain a reliable and stable prediction performance; (2) among the parameters, the quantization noise, angle random walk, and bias instability performed 0.6%, 6.8%, and 12.5% improvement for X-axis gyroscope, 60.5%, 17.3%, and 34.1% improvement for Y-axis gyroscope, 11.3%, 22.7%, and 35.7% improvement for Z-axis gyroscope, and the corresponding attitude errors decreased by 19.2%, 82.1%, and 69.4%. The results surely demonstrated the effectiveness of the employed SRU in this application.
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Dissertations / Theses on the topic "MEMS gyroscope"

1

Steward, Victoria. "Modeling of a folded spring supporting MEMS gyroscope." Link to electronic thesis, 2003. http://www.wpi.edu/Pubs/ETD/Available/etd-1007103-133256/.

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Azgin, Kivanc. "High Performance Mems Gyroscopes." Master's thesis, METU, 2007. http://etd.lib.metu.edu.tr/upload/12608194/index.pdf.

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This thesis reports development of three different high performance, low g-sensitive micromachined gyroscopes having single, double, and quadruple masses. The single mass gyroscope (SMG) is developed for comparison of its performance with the double mass gyroscope (DMG) and quadruple mass gyroscope (QMG). DMG is a tuning fork gyroscope, diminishing the effects of unpredictable g-loadings during regular operation, while QMG is a twin tuning fork gyroscope, developed for a uniform and minimized g-sensitivity. DMG and QMG use novel ring spring connections for merging the masses in drive modes, providing uniform and anti-phase drive mode vibrations that minimize the cross-coupling and the effects of intrinsic and extrinsic accelerations on the scale factor and bias levels of the gyroscopes. The sense mode of each mass of the multi-mass gyroscopes is designed to have higher resonance frequencies than that of the drive mode for possible matching requirements, and these sense modes have dedicated frequency tuning electrodes for frequency matching or tuning. Detailed performance simulations are performed with a very sophisticated computer model using the ARCHITECT software. These gyroscopes are fabricated using a standard SOIMUMPs process of MEMSCAP Inc., which provides capacitive gaps of 2 µ
m and structural layer thickness of 25 µ
m. Die sizes of the fabricated gyroscope chips are 4.1 mm x 4.1 mm for the single mass, 4.1 mm x 8.9 mm for the double mass, and 8.9 mm x 8.9 mm for the quadruple mass gyroscope. Fabricated gyroscopes are tested with dedicated differential readout electronics constructed with discrete components. Drive mode resonance frequencies of these gyroscopes are in a range of 3.4 kHz to 5.1 kHz. Depending on the drive mode mechanics, the drive mode quality (Q) factors of the fabricated gyroscopes are about 300 at atmospheric pressure and reaches to a value of 2500 at a vacuum ambient of 50 mTorr. Resolvable rates of the fabricated gyroscopes at atmospheric pressure are measured to be 0.109 deg/sec, 0.055 deg/sec, and 1.80 deg/sec for SMG, DMG, and QMG, respectively. At vacuum, the respective resolutions of these gyroscopes improve significantly, reaching to 106 deg/hr with the SMG and 780 deg/hr with the QMG, even though discrete readout electronics are used. Acceleration sensitivity measurements at atmosphere reveal that QMG has the lowest bias g-sensitivity and the scale factor g sensitivity of 1.02deg/sec/g and 1.59(mV/(deg/sec))/g, respectively. The performance levels of these multi-mass gyroscopes can be even further improved with high performance integrated capacitive readout electronics and precise sense mode phase matching.
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3

Patil, Nishad. "Design And Analysis Of MEMS Angular Rate Sensors." Thesis, Indian Institute of Science, 2006. http://hdl.handle.net/2005/291.

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Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Variations in suspension design have been explored. Designs that utilize in-plane and out-of-plane sensing are studied. Damping plays an important role in determining the sense response. Reduction in damping directly affects sensor performance. The various damping mechanisms that are prevalent in gyroscopes are studied. Perforations on the proof mass are observed to significantly reduce the damping in the device when operated in air. The effects of perforation geometry and density have been analyzed. The analysis results show that there is a two orders of magnitude reduction in damping of thick gyroscope structures with optimized perforation design. Equivalent circuit lumped parameter models have been developed to analyze gyroscope performance. The simulation results of these models have been compared with results obtained from SABER, a MEMS specific system level design tool from Coventor-ware. The lumped parameter models are observed to produce faster simulation results with an accuracy comparable to that of Coventorware Three gyroscopes specific to the PolyMUMPS fabrication process have been designed and their performance analyzed. Two of the designs sense motion out-of-plane and the other senses motion in-plane. Results of the simulation show that for a given damping, the gyro design with in-plane modes gives a resolution of 4◦/s. The out-of-plane gyroscopes have two variations in suspension. The hammock suspension resolves a rate of 25◦/s in a 200 Hz bandwidth while the design with folded beam suspension resolves a rate of 2◦/s in a 12 Hz bandwidth. A single crystal silicon in-plane gyroscope has been designed with vertical electrodes to sense Coriolis motion. This design gives an order of magnitude higher capacitance change for a given rotation in comparison to conventional comb-finger design. The effects of process induced residual stress on the characteristic frequencies of the polysilicon gyroscopes are also studied. The in-plane gyroscope is found to be robust to stress variations. Analysis results indicate that the tuning fork gyroscope with the hammock suspension is the most susceptible to compressive residual stress, with a significant drop in sensitivity at high stress values.
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Patil, Nishad. "Design And Analysis Of MEMS Angular Rate Sensors." Thesis, Indian Institute of Science, 2006. http://etd.iisc.ac.in/handle/2005/439.

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Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Variations in suspension design have been explored. Designs that utilize in-plane and out-of-plane sensing are studied. Damping plays an important role in determining the sense response. Reduction in damping directly affects sensor performance. The various damping mechanisms that are prevalent in gyroscopes are studied. Perforations on the proof mass are observed to significantly reduce the damping in the device when operated in air. The effects of perforation geometry and density have been analyzed. The analysis results show that there is a two orders of magnitude reduction in damping of thick gyroscope structures with optimized perforation design. Equivalent circuit lumped parameter models have been developed to analyze gyroscope performance. The simulation results of these models have been compared with results obtained from SABER, a MEMS specific system level design tool from Coventorware. The lumped parameter models are observed to produce faster simulation results with an accuracy comparable to that of Coventorware Three gyroscopes specific to the PolyMUMPS fabrication process have been designed and their performance analyzed. Two of the designs sense motion out-of-plane and the other senses motion in-plane. Results of the simulation show that for a given damping, the gyro design with in-plane modes gives a resolution of 4º/s. The out-of-plane gyroscopes have two variations in suspension. The hammock suspension resolves a rate of 25º/s in a 200 Hz bandwidth while the design with folded beam suspension resolves a rate of 2º/s in a 12 Hz bandwidth. A single crystal silicon in-plane gyroscope has been designed with vertical electrodes to sense Coriolis motion. This design gives an order of magnitude higher Capacitance change for a given rotation in comparison to conventional comb-finger design. The effects of process induced residual stress on the characteristic frequencies of the polysilicon gyroscopes are also studied. The in-plane gyroscope is found to be robust to stress variations. Analysis results indicate that the tuning fork gyroscope with the hammock suspension is the most susceptible to compressive residual stress, with a significant drop in sensitivity at high stress values.
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Sahin, Korhan. "A Wide-bandwidth High-sensitivity Mems Gyroscope." Master's thesis, METU, 2008. http://etd.lib.metu.edu.tr/upload/2/12609710/index.pdf.

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This thesis reports the development of a wide-bandwidth high-sensitivity mode-decoupled MEMS gyroscope showing robustness against ambient pressure variations. The designed gyroscope is based on a novel 2 degrees of freedom (DoF) sense mode oscillator, which allows increasing the operation bandwidth to the amount required by tactical-grade and inertial-grade operations while reaching the mechanical sensitivity of near matched-mode vibratory gyroscopes. Thorough theoretical study and finite element simulations verify the high performance operation of the proposed 2 DoF sense mode oscillator design. The designed gyroscope is fabricated using the in-house developed silicon-on-glass (SOG) micromachining technology at METU Microelectronics (METU-MET) facilities. The fabricated gyroscope measures only 5.1 x 4.6 mm square. The drive mode oscillator of the gyroscope reaches quality factor of 8760 under 25 mTorr vacuum environment, owing to high quality single crystal silicon structural layer. The sense mode bandwidth is measured to reach 2.5 kHz at 40 V proof mass voltage. When the fabricated gyroscope is operated with a relatively wide bandwidth of 1kHz, measurements show a relatively high raw mechanical sensitivity of 131 uV/(deg/s). Fabricated gyroscope is hybrid connected to external closed-loop drive mode amplitude control and open-loop sense mode readout electronics developed at METU-MEMS research group, to form a complete angular rate measurement system (ARMS). The scale factor of the ARMS is measured to be 13.1 mV/(deg/s) with a maximum R square nonlinearity of 0.0006 % and a maximum percent deviation nonlinearity of 0.141 %, while the maximum deviation of the scale factor for large vacuum level variations between 40 mTorr to 500 mTorr is measured to be only 0.38 %. The bias stability and angle random walk of the gyroscope are measured to be 131 deg/h and 1.15 deg/ rooth, respectively. It is concluded that, the mechanical structure can be optimized to show its theoretical limits of sensitivity with improvements in fabrication tolerances. The proposed 2 DoF sense mode oscillator design shows the potential of tactical-grade operation, while demonstrating extreme immunity to ambient pressure variations, by utilizing an optimized mechanical structure and connecting the gyroscope to dedicated low-noise electronics.
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6

Patil, Nishad. "Design And Analysis Of MEMS Angular Rate Sensors." Thesis, Indian Institute of Science, 2006. https://etd.iisc.ac.in/handle/2005/291.

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Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Variations in suspension design have been explored. Designs that utilize in-plane and out-of-plane sensing are studied. Damping plays an important role in determining the sense response. Reduction in damping directly affects sensor performance. The various damping mechanisms that are prevalent in gyroscopes are studied. Perforations on the proof mass are observed to significantly reduce the damping in the device when operated in air. The effects of perforation geometry and density have been analyzed. The analysis results show that there is a two orders of magnitude reduction in damping of thick gyroscope structures with optimized perforation design. Equivalent circuit lumped parameter models have been developed to analyze gyroscope performance. The simulation results of these models have been compared with results obtained from SABER, a MEMS specific system level design tool from Coventor-ware. The lumped parameter models are observed to produce faster simulation results with an accuracy comparable to that of Coventorware Three gyroscopes specific to the PolyMUMPS fabrication process have been designed and their performance analyzed. Two of the designs sense motion out-of-plane and the other senses motion in-plane. Results of the simulation show that for a given damping, the gyro design with in-plane modes gives a resolution of 4◦/s. The out-of-plane gyroscopes have two variations in suspension. The hammock suspension resolves a rate of 25◦/s in a 200 Hz bandwidth while the design with folded beam suspension resolves a rate of 2◦/s in a 12 Hz bandwidth. A single crystal silicon in-plane gyroscope has been designed with vertical electrodes to sense Coriolis motion. This design gives an order of magnitude higher capacitance change for a given rotation in comparison to conventional comb-finger design. The effects of process induced residual stress on the characteristic frequencies of the polysilicon gyroscopes are also studied. The in-plane gyroscope is found to be robust to stress variations. Analysis results indicate that the tuning fork gyroscope with the hammock suspension is the most susceptible to compressive residual stress, with a significant drop in sensitivity at high stress values.
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7

Sonmezoglu, Soner. "A High Performance Automatic Mode-matched Mems Gyroscope." Master's thesis, METU, 2012. http://etd.lib.metu.edu.tr/upload/12614656/index.pdf.

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This thesis, for the first time in the literature, presents an automatic mode-matching system that uses the phase relationships between the residual quadrature and drive signals in a gyroscope to achieve and maintain the frequency matching condition, and also the system allows controlling the system bandwidth by adjusting the closed loop parameters of the sense mode controller, independently from the mechanical sensor bandwidth. There are two mode-matching methods, using the proposed mode-matching system, presented in this thesis. In the first method, the frequency matching between the resonance modes of the gyroscope is automatically accomplished by changing the proof mass potential. The main motivation behind the first method is to tune the sense mode resonance frequency with respect to the drive mode resonance frequency using the electrostatic tuning capability of the sense mode. In the second method, the mode-matched gyroscope operation is accomplished by using dedicated frequency tuning electrodes that only provides a capability of tuning the sense mode resonance frequency generating an electrostatic spring effect on the sense frame, independently from the proof mass potential. This study mainly focuses on the second method because the proof mass potential variation is not desired during the gyroscope operation since the proof mass potential directly affects the drive and sense mode dynamics of the gyroscope. Therefore, a single-mass fully-decoupled gyroscope including the dedicated frequency tuning electrodes are designed. To identify mode shapes and mode frequencies of the designed gyroscope, FEM simulations are performed. The designed gyroscopes are fabricated using SOI-based SOG process. The fabrication imperfections are clarified during the formation of the structural layer of the gyroscope. Next, the closed loop controllers are designed for the drive amplitude control, sense force-feedback, quadrature cancellation, and mode-matching regarding the phase relationship between the quadrature and drive signals. Mode-matching is achieved by using a closed loop controller that provides a DC tuning potential. The mode-matching system consisting of vacuum packaged sensor, drive amplitude control, sense force-feedback, quadrature cancellation, and mode-matching modules is implemented on a printed circuit board (PCB), and then the system level tests are performed. Tests illustrate that the mode-matching system operates in a desired manner. Test results demonstrate that the performances of the studied MEMS gyroscopes are improved up to 2.6 times in bias instability and 2 times in ARW under the mode-matched condition compared to the mismatched (~200 Hz) condition, reaching down to 0.73 °
/hr and 0.024 °
/&radic
hr, respectively. At the mode-matched gyroscope operation, the better performance is obtained to be bias instability of 0.87
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8

Wu, Henry M. Eng Massachusetts Institute of Technology. "System architecture for mode-matching a MEMS gyroscope." Thesis, Massachusetts Institute of Technology, 2009. http://hdl.handle.net/1721.1/53156.

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Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2009.
Includes bibliographical references (p. 127-128).
MEMS gyroscopes are used to detect rotation rates and have enabled a variety of motion-based technologies in a range of industries. They are composed of micro-machined polysilicon structures that resonate and deflect when a rotation is experienced. The topic of this thesis surrounds a system architecture to optimize the performance of a gyroscope. The MEMS gyroscope contains a resonator and an accelerometer, modeled as a two degree-of-freedom mass-spring system. When the resonant frequencies of each mode are matched, the mechanical output of the gyroscope is maximal. Feedback is used to match the two modes by automatically tuning the voltage on the poly-silicon structure until the accelerometer resonant frequency matches that of the resonator. A square wave dither signal is introduced as quadrature error and is used to track the phase across the gyroscope's accelerometer. At mode-match, the phase lag is 90°, so the feedback mechanism maintains this 90° of phase lag between the input acceleration and mechanical output to keep the modes matched. Two controllers were tried in the feedback mechanism, a linear controller and a bang-bang controller. The bang-bang controller was found to produce better results, and was able to bring a pre-fabricated sensor die to mode-match and achieve a resolution floor of 12°/hr.
by Henry Wu.
M.Eng.
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9

Chatterjee, Gaurav. "Développement d'une unité de mesure inertielle à base de Smart-MEMS." Thesis, Montpellier, 2016. http://www.theses.fr/2016MONTT310.

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La navigation par système inertiel strapdown est aujourd’hui la plus répandue. L’architecture est bien connue et a été très largement améliorée au cours des dernières décennies. Néanmoins, le principe fondamental n’a subi de bouleversement et reste constitué d’une triplette d’accéléromètres et de gyromètres permettant de revenir aux informations d’attitude et de cap.La précision de l’estimation de position repose principalement sur la gamme de performance des capteurs utilisés. En particulier, des applications telles que des lanceurs spatiaux requièrent une très haute précision et des capteurs d’une technologie éprouvée sont utilisés. L’arrivée sur le marché de capteurs inertiels MEMS de haute précision ouvre une alternative à coût réduits couplée à une réduction de masse, volume et de consommation. Les moyens de production des MEMS ainsi qu’une meilleure connaissance des propriétés des matériaux ont permis l’arrivée d’accéléromètres MEMS pouvant rivaliser avec les technologies éprouvées de gamme tactique. Toutefois, les gyromètres de technologie MEMS existantes restent dans une gamme de performance de type industrielle.La présente étude vise à analyser la possibilité d’utiliser des accéléromètres de haute précision pour améliorer les performances gyrométriques, dans l’objectif de réaliser une solution tout MEMS d’unité de mesure inertielle. Une brève introduction sur les techniques de filtrage de Kalman pour la fusion de données est présentée, ainsi que son implémentation pour notre étude. L’analyse théorique se poursuit avec une présentation des résultats expérimentaux.L’étude conclut que l’utilisation d’une paire d’accéléromètres de haute performance et d’un gyroscope de type consommateur permet d’atteindre les performances d’un gyromètre tactique. Les contraintes de définition et de mesure pour l’implémentation du système sont présentées en détail.Cette étude est menée pour la mesure angulaire autour d’un axe unique de rotation, un complément d’étude est nécessaire à l’extrapolation de cette approche pour une mesure générique en 3D
Strapdown inertial navigation units are the most popular systems used for navigation. The system architecture is well established and has been extensively improved over the past decades. However, the core idea remains same where a triad of accelerometers and gyroscopes provide the attitude and heading information.The accuracy of the position estimate depends on the performance grade of the sensors employed. For applications like space launchers requiring very high accuracy, high-grade devices using traditional technologies are used. The advent of accurate MEMS based sensors offer an exciting low-cost alternative with expected reduction in size and power consumption. MEMS fabrication technology, assisted by improved understanding of material properties have led to accelerometers that can compete with traditional devices for tactical applications. However, the MEMS based solutions currently available for gyroscopes can replace only industrial grade applications.This study attempts to investigate if the currently available high-grade accelerometers can be used to improve the gyroscope performance, towards the final goal of a complete MEMS based solution for inertial navigation units. The study begins with a literature review of current status of technology. A brief explanation of linear Kalman filtering technique for data fusion is presented, along with its implementation concerning this work. The theoretical discussion is then followed by presentation of experimental results.The study found that using a pair of high-grade accelerometers, a consumer grade gyroscope can have its performance upgraded for tactical applications. The design and sensing constraints for realizing this system are discussed in detail.Since this research work primarily concerns with angular rate estimation around a single axis of rotation, further research is recommended for extrapolating this approach for a more general 3-D sensing case
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Mihaľko, Juraj. "MEMS inerciální snímače." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2012. http://www.nusl.cz/ntk/nusl-219724.

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The aim of this master’s thesis is to describe the basic measurement methods of micro-electromechanical inertial sensor, their physical principles and errors. Measurement of inertial sensors is very important for the parameterization of their errors and their subsequent mathematical model by which it is possible to minimize the measurement error impact on inertial navigation. The practical part is dedicated to create automated measurement setup for measurement stability of the offset. Hardware and software from National Instruments is used in measurement chain. The work is next focused on measuring seven inertial sensors based on three different physical principles. In addition to creating measurement setup, we also defined three inertial sensor parameters, describing theoretical behavior of the sensor output.
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Books on the topic "MEMS gyroscope"

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Cao, Huiliang. Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope. Singapore: Springer Nature Singapore, 2023. http://dx.doi.org/10.1007/978-981-19-9247-6.

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Acar, Cenk, and Andrei Shkel. MEMS Vibratory Gyroscopes. Boston, MA: Springer US, 2009. http://dx.doi.org/10.1007/978-0-387-09536-3.

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Practical MEMS. [Las Vegas, Nev.]: Small Gear Pub., 2009.

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Fei, Juntao. Advanced control design of MEMS vibratory gyroscopes. New York: Nova Science Publishers, 2012.

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Sangyōshō, Japan Keizai. Heisei 20-nendo kijun ninshō kenkyū kaihatsu jigyō (kogata jairo MEMS debaisu no seinō hyōka hōhō ni kansuru hyōjunka) seika hōkokusho. [Tokyo]: Maikuromashin Sentā, 2009.

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Fei, Juntao. Advanced Control Design of MEMS Vibratory Gyroscope. Nova Science Publishers, Incorporated, 2020.

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Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope. Springer, 2023.

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The Air Force Institute of Technology (AFIT) Micro Electro-Mechanical Systems (MEMS) Interferometric Gyroscope (MiG). Storming Media, 2000.

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Shkel, Andrei M., and Doruk Senkal. Whole-Angle MEMS Gyroscopes: Challenges and Opportunities. Wiley & Sons, Limited, John, 2020.

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Shkel, Andrei M., and Doruk Senkal. Whole-Angle MEMS Gyroscopes: Challenges and Opportunities. Wiley & Sons, Incorporated, John, 2020.

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Book chapters on the topic "MEMS gyroscope"

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Armenise, M. N. "MEMS Gyroscopes." In Advances in Gyroscope Technologies, 83–102. Berlin, Heidelberg: Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-642-15494-2_6.

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Cao, Huiliang. "Silicon Based MEMS Gyroscope Structure and Working Principle." In Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope, 21–47. Singapore: Springer Nature Singapore, 2023. http://dx.doi.org/10.1007/978-981-19-9247-6_2.

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The, Vu Van, Tran Quang Dung, and Do Thi Kim Lien. "FEM Simulation for a MEMS Vibratory Tuning Fork Gyroscope." In Advances in Engineering Research and Application, 357–65. Cham: Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-030-37497-6_42.

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Král, Ladislav, Tomáš Polóni, and Martin Vágner. "Identification of MEMS Gyroscope Structure Using Frequency Response Data." In Lecture Notes in Control and Information Sciences - Proceedings, 1403–15. Cham: Springer International Publishing, 2022. http://dx.doi.org/10.1007/978-3-030-85318-1_81.

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Yi, Ranran, Bangcheng Han, and Wei Sheng. "Design on the Driving Mode of MEMS Vibratory Gyroscope." In Intelligent Robotics and Applications, 232–39. Berlin, Heidelberg: Springer Berlin Heidelberg, 2008. http://dx.doi.org/10.1007/978-3-540-88518-4_26.

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Cao, Huiliang. "Introduction." In Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope, 1–20. Singapore: Springer Nature Singapore, 2023. http://dx.doi.org/10.1007/978-981-19-9247-6_1.

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Cao, Huiliang. "Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Sensing Closed Loop and Frequency Tuning Technology." In Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope, 119–65. Singapore: Springer Nature Singapore, 2023. http://dx.doi.org/10.1007/978-981-19-9247-6_5.

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Cao, Huiliang. "Temperature Influence on Silicon-Based MEMS Gyroscope and Suppression Method." In Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope, 167–98. Singapore: Springer Nature Singapore, 2023. http://dx.doi.org/10.1007/978-981-19-9247-6_6.

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Cao, Huiliang. "Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Structure Noise Analysis and System Model." In Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope, 49–71. Singapore: Springer Nature Singapore, 2023. http://dx.doi.org/10.1007/978-981-19-9247-6_3.

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Cao, Huiliang. "Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Quadrature Error Correction Technology and Optimization." In Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope, 73–118. Singapore: Springer Nature Singapore, 2023. http://dx.doi.org/10.1007/978-981-19-9247-6_4.

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Conference papers on the topic "MEMS gyroscope"

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Patel, Chandradip, and Patrick McCluskey. "Combined Temperature and Humidity Effects on MEMS Vibratory Gyroscope Sensor." In ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems. ASMEDC, 2011. http://dx.doi.org/10.1115/ipack2011-52183.

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Reliability and long term stability are the greatest challenges for commercialization of MEMS gyroscopes. Their vast use in different applications that required MEMS gyroscopes to function from medium to harsh environments make necessary to evaluate the performance of MEMS gyroscope under those conditions. This paper focuses on the combined long term effects of temperature and humidity on the performance of MEMS vibratory gyroscope. Performance of the MEMS gyroscope was evaluated over time by conducting temperature humidity bias (THB) test on a COTS (commercial off-the-shelf) single axis MEMS vibratory gyroscope having an operating temperature range from −40°C to +85°C. The gyroscope sensors were exposed to 60°C and 90%RH (Relative Humidity) for 500 hours. Six single axis gyroscopes were tested, three with in-situ device calibration and three without in-situ device calibration. Out of three MEMS vibratory gyroscopes tested without in-situ device calibration, it was observed that samples had minimum and maximum in-situ zero rate output (ZRO) drift of 1.3°/s and 2.2°/s respectively over 500 hours. These drifts were disappeared when gyroscope sensors were tested after six months by keeping at room condition. Other three single axis gyroscopes were tested in the same chamber with in-situ device calibration which didn’t show any major performance ZRO drift.
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Cui, Wei, Xiaolin Chen, and Wei Xue. "Design Optimization for Non-Resonant MEMS Gyroscope." In ASME 2009 International Mechanical Engineering Congress and Exposition. ASMEDC, 2009. http://dx.doi.org/10.1115/imece2009-10812.

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Conventional capacitive MEMS gyroscopes require close matching between the resonant frequencies of drive mode and sense mode. However, the uncertainties in the microfabrication process impair the robustness of the gyroscopes and often lead to unpredictable device performance. This paper analyzes a 4 degree-of-freedom (DOF) non-resonant gyroscope which is less vulnerable to the fabrication perturbations. Unlike the conventional resonant gyroscope which has only one resonant frequency for drive and sense modes, the 4-DOF gyroscope includes two resonant frequencies for each mode. The non-resonant gyroscope design aims to reduce resonance frequency matching, namely to minimize the effect of the inevitable fabrication uncertainties as well as to increase the bandwidth with less sacrifice to the sensitivity. The device performance is analyzed and optimized by the behavior model approach in CoventorWare which significantly accelerates the simulation compared to the traditional finite element method. The optimized non-resonant gyroscope with higher fabrication tolerance as well as enhanced device performance is proven to be an effective design and can be used in a wide range of applications.
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Liu, Jun, Yuanyuan Luo, Jingmin Li, YunBo Shi, and Fai Ma. "An Orthogonal-Beam Tunnel-Effect MEMS Gyroscope." In 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems. ASMEDC, 2007. http://dx.doi.org/10.1115/mnc2007-21270.

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Tunnel-effect MEMS gyroscopes have broad applications in astronautics because they have high sensitivity, low measurement ranges, and small volumes. This paper describes the design of a novel orthogonal-beam gyroscope based on the principle of tunnel effect. The mathematical model of this class of gyroscopes is set up and the associated performance is obtained with ANSYS simulation software. Related MEMS technology for the construction of these orthogonal-beam tunnel-effect gyroscopes is also described.
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Patel, Chandradip, and Patrick McCluskey. "Performance Degradation of the MEMS Vibratory Gyroscope in Harsh Environments." In ASME 2011 International Mechanical Engineering Congress and Exposition. ASMEDC, 2011. http://dx.doi.org/10.1115/imece2011-65001.

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The use of MEMS gyroscopes in a wide range of applications requiring then to function from medium to harsh environments make it necessary to evaluate the performance of MEMS gyroscopes under those conditions. This paper focuses on the effects of elevated temperature and humidity on the performance of MEMS vibratory gyroscopes. Performance of the MEMS gyroscope was evaluated by conducting Highly Accelerated Stress Testing (HAST) on a COTS (commercial-off-the-shelf) single axis MEMS vibratory gyroscope having an operating temperature range from −40C to +105C. The gyroscope sensors were exposed to 130°C and 85% relative humidity with a pressure of 33.3 psia or 230 kPa for 96 hours. Pre-baking and post-baking tests were conducted before and after HAST at 125C for 24 hours respectively. Also, stationary baseline testing (SBT) and rotary baseline testing (RBT) were performed before and after the pre-baking, HAST and post-baking tests to measure any permanent shift during the respective test. A preliminary result shows that the MEMS gyroscope output degraded in the pre-baking test and HAST; while it showed a recovery in post-baking test. After completing the entire test procedure, it was observed that MEMS gyroscope output didn’t come back to the original position, and resulted in a permanent output shift of 1.85deg/s.
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Zarei, Nilgoon, Albert M. Leung, and John D. Jones. "Modeling a Three-Axis Thermal MEMS Gyroscope." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-89451.

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This paper reports modeling of a three-axis thermal Micro-Electro-Mechanical System, MEMS, gyroscope through the use of the COMSOL Multiphysics software package. Being very small and having no movable parts makes the thermal MEMS gyroscope very reliable. Previously designed Thermal MEMS gyroscopes have the capability of detecting single-axis rotation. A three-dimensional finite-element model of the device has been developed to investigate three-axis rotation detection possibilities. The effect of gravity has been also investigated and we show techniques for suppressing this interference.
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Jin, Xing, and Jason V. Clark. "GyroCube: A Novice-Friendly Design and Simulation Tool for Gyroscopic Analysis and Optimization of MEMS." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-89699.

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In this paper, we present an online design tool called GyroCube that greatly simplifies the parametric exploration of ready-made Micro Electro Mechanical Systems (MEMS) gyroscopes. GyroCube is able to perform gyroscopic analysis on nearly any MEMS structure imported from Sugar. In addition to Sugar’s existing MEMS solvers (i.e. frequency response, modal analysis, and transient analysis), we add gyroscope-specific analyses (i.e. quality factor, normalized sensitivity, natural frequency, stiffness, damping ratio). We also include geometry optimization given a user’s performance specification. We verify GyroCube’s results using finite element analysis and we demonstrate GyroCube’s ease of use.
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Shooshtari, Pooneh, Jamal Bahari, Kourosh Khosraviani, Albert Leung, and John Jones. "Spurious Signals in the Thermal MEMS Gyroscope." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-89394.

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The operational principle of a thermal MEMS (Micro Electro-Mechanical Systems) gyroscope was reported in Hilton Head 2010 [1]. In the current work we describe two factors that can produce a spurious rotation signal in gyroscopes of this type. These factors are, firstly, distortion or asymmetric placement of the heating elements or temperature sensors; secondly, the effects of linear acceleration and/or gravity on the fluid flow inside the device, and hence on the gyroscope output. In order to simulate the thermal gyro and the origin of these spurious signals, a mathematical model is built and developed through the COMSOL CFD package. The spurious signals predicted by this simulation are shown to correspond to experimental measurements. Alternative cavity shapes are investigated and simulated as a mean of suppressing the spurious signal.
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Cui, Wei, Xiaolin Chen, and Wei Xue. "Robust Compensator Control of a Non-Resonant MEMS Gyroscope With Linear Quadratic Regulator." In ASME 2010 International Mechanical Engineering Congress and Exposition. ASMEDC, 2010. http://dx.doi.org/10.1115/imece2010-38871.

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This paper presents a controller design for a four degrees-of-freedom (4-DOF) non-resonant gyroscope via the linear quadratic regulator (LQR) technique. Compared to conventional MEMS gyroscopes, non-resonant gyroscopes are less vulnerable to fabrication perturbations. However, closed-loop performance of non-resonant gyroscopes has not been investigated previously. The control of non-resonant gyroscopes involves consideration of high order systems. LQR, which achieves balances between a fast response and a low control effort, has proven to be effective for high order systems. Our simulation results show that the closed-loop 4-DOF non-resonant gyroscope presented in this paper is able to achieve faster response and higher robustness to parameter uncertainties than the open-loop device. Under the sinusoidal input, compared to an error of 11.06% for the open-loop system, the closed-loop scale factor uniformity error is reduced to 0.014% under ±10% parameter perturbations. The device performance is analyzed by the behavior modeling approach in CoventorWare. The results show that the closed-loop non-resonant gyroscope achieves better performance through the LQR. The method reported here is proven to be effective and can be used in a wide range of applications.
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Mahmoud, Ashraf, Wael Fikry, Yasser M. Sabry, and Mohamed A. E. Mahmoud. "Staggered mode MEMS gyroscope." In 2016 Fourth International Japan-Egypt Conference on Electronics, Communications and Computers (JEC-ECC). IEEE, 2016. http://dx.doi.org/10.1109/jec-ecc.2016.7518978.

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Eminoglu, Burak, Mitchell H. Kline, Igor Izyumin, Yu-Ching Yeh, and Bernhard E. Boser. "Background calibrated MEMS gyroscope." In 2014 IEEE Sensors. IEEE, 2014. http://dx.doi.org/10.1109/icsens.2014.6985152.

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Reports on the topic "MEMS gyroscope"

1

Andarawis, Emad, David Lin, Jeremy Popp, Robert MacDonald, Brian Scherer, David Shaddock, Dorin Calbaza, et al. A MEMS Gyroscope for Reliable Long Duration Measurement While Drilling at 300°C. Office of Scientific and Technical Information (OSTI), January 2022. http://dx.doi.org/10.2172/1879864.

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Hudson, Tracy D., and Michael S. Kranz. Operation of Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) Gyroscopic Sensor as a Two-Axis Accelerometer. Fort Belvoir, VA: Defense Technical Information Center, April 2012. http://dx.doi.org/10.21236/ada559286.

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