Dissertations / Theses: 'MEMS gyroscope'

1

Steward, Victoria. "Modeling of a folded spring supporting MEMS gyroscope." Link to electronic thesis, 2003. http://www.wpi.edu/Pubs/ETD/Available/etd-1007103-133256/.

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2

Azgin, Kivanc. "High Performance Mems Gyroscopes." Master's thesis, METU, 2007. http://etd.lib.metu.edu.tr/upload/12608194/index.pdf.

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This thesis reports development of three different high performance, low g-sensitive micromachined gyroscopes having single, double, and quadruple masses. The single mass gyroscope (SMG) is developed for comparison of its performance with the double mass gyroscope (DMG) and quadruple mass gyroscope (QMG). DMG is a tuning fork gyroscope, diminishing the effects of unpredictable g-loadings during regular operation, while QMG is a twin tuning fork gyroscope, developed for a uniform and minimized g-sensitivity. DMG and QMG use novel ring spring connections for merging the masses in drive modes, providing uniform and anti-phase drive mode vibrations that minimize the cross-coupling and the effects of intrinsic and extrinsic accelerations on the scale factor and bias levels of the gyroscopes. The sense mode of each mass of the multi-mass gyroscopes is designed to have higher resonance frequencies than that of the drive mode for possible matching requirements, and these sense modes have dedicated frequency tuning electrodes for frequency matching or tuning. Detailed performance simulations are performed with a very sophisticated computer model using the ARCHITECT software. These gyroscopes are fabricated using a standard SOIMUMPs process of MEMSCAP Inc., which provides capacitive gaps of 2 µ
m and structural layer thickness of 25 µ
m. Die sizes of the fabricated gyroscope chips are 4.1 mm x 4.1 mm for the single mass, 4.1 mm x 8.9 mm for the double mass, and 8.9 mm x 8.9 mm for the quadruple mass gyroscope. Fabricated gyroscopes are tested with dedicated differential readout electronics constructed with discrete components. Drive mode resonance frequencies of these gyroscopes are in a range of 3.4 kHz to 5.1 kHz. Depending on the drive mode mechanics, the drive mode quality (Q) factors of the fabricated gyroscopes are about 300 at atmospheric pressure and reaches to a value of 2500 at a vacuum ambient of 50 mTorr. Resolvable rates of the fabricated gyroscopes at atmospheric pressure are measured to be 0.109 deg/sec, 0.055 deg/sec, and 1.80 deg/sec for SMG, DMG, and QMG, respectively. At vacuum, the respective resolutions of these gyroscopes improve significantly, reaching to 106 deg/hr with the SMG and 780 deg/hr with the QMG, even though discrete readout electronics are used. Acceleration sensitivity measurements at atmosphere reveal that QMG has the lowest bias g-sensitivity and the scale factor g sensitivity of 1.02deg/sec/g and 1.59(mV/(deg/sec))/g, respectively. The performance levels of these multi-mass gyroscopes can be even further improved with high performance integrated capacitive readout electronics and precise sense mode phase matching.

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3

Patil, Nishad. "Design And Analysis Of MEMS Angular Rate Sensors." Thesis, Indian Institute of Science, 2006. http://hdl.handle.net/2005/291.

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Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Variations in suspension design have been explored. Designs that utilize in-plane and out-of-plane sensing are studied. Damping plays an important role in determining the sense response. Reduction in damping directly affects sensor performance. The various damping mechanisms that are prevalent in gyroscopes are studied. Perforations on the proof mass are observed to significantly reduce the damping in the device when operated in air. The effects of perforation geometry and density have been analyzed. The analysis results show that there is a two orders of magnitude reduction in damping of thick gyroscope structures with optimized perforation design. Equivalent circuit lumped parameter models have been developed to analyze gyroscope performance. The simulation results of these models have been compared with results obtained from SABER, a MEMS specific system level design tool from Coventor-ware. The lumped parameter models are observed to produce faster simulation results with an accuracy comparable to that of Coventorware Three gyroscopes specific to the PolyMUMPS fabrication process have been designed and their performance analyzed. Two of the designs sense motion out-of-plane and the other senses motion in-plane. Results of the simulation show that for a given damping, the gyro design with in-plane modes gives a resolution of 4◦/s. The out-of-plane gyroscopes have two variations in suspension. The hammock suspension resolves a rate of 25◦/s in a 200 Hz bandwidth while the design with folded beam suspension resolves a rate of 2◦/s in a 12 Hz bandwidth. A single crystal silicon in-plane gyroscope has been designed with vertical electrodes to sense Coriolis motion. This design gives an order of magnitude higher capacitance change for a given rotation in comparison to conventional comb-finger design. The effects of process induced residual stress on the characteristic frequencies of the polysilicon gyroscopes are also studied. The in-plane gyroscope is found to be robust to stress variations. Analysis results indicate that the tuning fork gyroscope with the hammock suspension is the most susceptible to compressive residual stress, with a significant drop in sensitivity at high stress values.

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4

Patil, Nishad. "Design And Analysis Of MEMS Angular Rate Sensors." Thesis, Indian Institute of Science, 2006. http://etd.iisc.ac.in/handle/2005/439.

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Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Variations in suspension design have been explored. Designs that utilize in-plane and out-of-plane sensing are studied. Damping plays an important role in determining the sense response. Reduction in damping directly aﬀects sensor performance. The various damping mechanisms that are prevalent in gyroscopes are studied. Perforations on the proof mass are observed to significantly reduce the damping in the device when operated in air. The eﬀects of perforation geometry and density have been analyzed. The analysis results show that there is a two orders of magnitude reduction in damping of thick gyroscope structures with optimized perforation design. Equivalent circuit lumped parameter models have been developed to analyze gyroscope performance. The simulation results of these models have been compared with results obtained from SABER, a MEMS speciﬁc system level design tool from Coventorware. The lumped parameter models are observed to produce faster simulation results with an accuracy comparable to that of Coventorware Three gyroscopes speciﬁc to the PolyMUMPS fabrication process have been designed and their performance analyzed. Two of the designs sense motion out-of-plane and the other senses motion in-plane. Results of the simulation show that for a given damping, the gyro design with in-plane modes gives a resolution of 4º/s. The out-of-plane gyroscopes have two variations in suspension. The hammock suspension resolves a rate of 25º/s in a 200 Hz bandwidth while the design with folded beam suspension resolves a rate of 2º/s in a 12 Hz bandwidth. A single crystal silicon in-plane gyroscope has been designed with vertical electrodes to sense Coriolis motion. This design gives an order of magnitude higher Capacitance change for a given rotation in comparison to conventional comb-ﬁnger design. The eﬀects of process induced residual stress on the characteristic frequencies of the polysilicon gyroscopes are also studied. The in-plane gyroscope is found to be robust to stress variations. Analysis results indicate that the tuning fork gyroscope with the hammock suspension is the most susceptible to compressive residual stress, with a signiﬁcant drop in sensitivity at high stress values.

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5

Sahin, Korhan. "A Wide-bandwidth High-sensitivity Mems Gyroscope." Master's thesis, METU, 2008. http://etd.lib.metu.edu.tr/upload/2/12609710/index.pdf.

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This thesis reports the development of a wide-bandwidth high-sensitivity mode-decoupled MEMS gyroscope showing robustness against ambient pressure variations. The designed gyroscope is based on a novel 2 degrees of freedom (DoF) sense mode oscillator, which allows increasing the operation bandwidth to the amount required by tactical-grade and inertial-grade operations while reaching the mechanical sensitivity of near matched-mode vibratory gyroscopes. Thorough theoretical study and finite element simulations verify the high performance operation of the proposed 2 DoF sense mode oscillator design. The designed gyroscope is fabricated using the in-house developed silicon-on-glass (SOG) micromachining technology at METU Microelectronics (METU-MET) facilities. The fabricated gyroscope measures only 5.1 x 4.6 mm square. The drive mode oscillator of the gyroscope reaches quality factor of 8760 under 25 mTorr vacuum environment, owing to high quality single crystal silicon structural layer. The sense mode bandwidth is measured to reach 2.5 kHz at 40 V proof mass voltage. When the fabricated gyroscope is operated with a relatively wide bandwidth of 1kHz, measurements show a relatively high raw mechanical sensitivity of 131 uV/(deg/s). Fabricated gyroscope is hybrid connected to external closed-loop drive mode amplitude control and open-loop sense mode readout electronics developed at METU-MEMS research group, to form a complete angular rate measurement system (ARMS). The scale factor of the ARMS is measured to be 13.1 mV/(deg/s) with a maximum R square nonlinearity of 0.0006 % and a maximum percent deviation nonlinearity of 0.141 %, while the maximum deviation of the scale factor for large vacuum level variations between 40 mTorr to 500 mTorr is measured to be only 0.38 %. The bias stability and angle random walk of the gyroscope are measured to be 131 deg/h and 1.15 deg/ rooth, respectively. It is concluded that, the mechanical structure can be optimized to show its theoretical limits of sensitivity with improvements in fabrication tolerances. The proposed 2 DoF sense mode oscillator design shows the potential of tactical-grade operation, while demonstrating extreme immunity to ambient pressure variations, by utilizing an optimized mechanical structure and connecting the gyroscope to dedicated low-noise electronics.

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6

Patil, Nishad. "Design And Analysis Of MEMS Angular Rate Sensors." Thesis, Indian Institute of Science, 2006. https://etd.iisc.ac.in/handle/2005/291.

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Abstract:

Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Variations in suspension design have been explored. Designs that utilize in-plane and out-of-plane sensing are studied. Damping plays an important role in determining the sense response. Reduction in damping directly affects sensor performance. The various damping mechanisms that are prevalent in gyroscopes are studied. Perforations on the proof mass are observed to significantly reduce the damping in the device when operated in air. The effects of perforation geometry and density have been analyzed. The analysis results show that there is a two orders of magnitude reduction in damping of thick gyroscope structures with optimized perforation design. Equivalent circuit lumped parameter models have been developed to analyze gyroscope performance. The simulation results of these models have been compared with results obtained from SABER, a MEMS specific system level design tool from Coventor-ware. The lumped parameter models are observed to produce faster simulation results with an accuracy comparable to that of Coventorware Three gyroscopes specific to the PolyMUMPS fabrication process have been designed and their performance analyzed. Two of the designs sense motion out-of-plane and the other senses motion in-plane. Results of the simulation show that for a given damping, the gyro design with in-plane modes gives a resolution of 4◦/s. The out-of-plane gyroscopes have two variations in suspension. The hammock suspension resolves a rate of 25◦/s in a 200 Hz bandwidth while the design with folded beam suspension resolves a rate of 2◦/s in a 12 Hz bandwidth. A single crystal silicon in-plane gyroscope has been designed with vertical electrodes to sense Coriolis motion. This design gives an order of magnitude higher capacitance change for a given rotation in comparison to conventional comb-finger design. The effects of process induced residual stress on the characteristic frequencies of the polysilicon gyroscopes are also studied. The in-plane gyroscope is found to be robust to stress variations. Analysis results indicate that the tuning fork gyroscope with the hammock suspension is the most susceptible to compressive residual stress, with a significant drop in sensitivity at high stress values.

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7

Sonmezoglu, Soner. "A High Performance Automatic Mode-matched Mems Gyroscope." Master's thesis, METU, 2012. http://etd.lib.metu.edu.tr/upload/12614656/index.pdf.

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This thesis, for the first time in the literature, presents an automatic mode-matching system that uses the phase relationships between the residual quadrature and drive signals in a gyroscope to achieve and maintain the frequency matching condition, and also the system allows controlling the system bandwidth by adjusting the closed loop parameters of the sense mode controller, independently from the mechanical sensor bandwidth. There are two mode-matching methods, using the proposed mode-matching system, presented in this thesis. In the first method, the frequency matching between the resonance modes of the gyroscope is automatically accomplished by changing the proof mass potential. The main motivation behind the first method is to tune the sense mode resonance frequency with respect to the drive mode resonance frequency using the electrostatic tuning capability of the sense mode. In the second method, the mode-matched gyroscope operation is accomplished by using dedicated frequency tuning electrodes that only provides a capability of tuning the sense mode resonance frequency generating an electrostatic spring effect on the sense frame, independently from the proof mass potential. This study mainly focuses on the second method because the proof mass potential variation is not desired during the gyroscope operation since the proof mass potential directly affects the drive and sense mode dynamics of the gyroscope. Therefore, a single-mass fully-decoupled gyroscope including the dedicated frequency tuning electrodes are designed. To identify mode shapes and mode frequencies of the designed gyroscope, FEM simulations are performed. The designed gyroscopes are fabricated using SOI-based SOG process. The fabrication imperfections are clarified during the formation of the structural layer of the gyroscope. Next, the closed loop controllers are designed for the drive amplitude control, sense force-feedback, quadrature cancellation, and mode-matching regarding the phase relationship between the quadrature and drive signals. Mode-matching is achieved by using a closed loop controller that provides a DC tuning potential. The mode-matching system consisting of vacuum packaged sensor, drive amplitude control, sense force-feedback, quadrature cancellation, and mode-matching modules is implemented on a printed circuit board (PCB), and then the system level tests are performed. Tests illustrate that the mode-matching system operates in a desired manner. Test results demonstrate that the performances of the studied MEMS gyroscopes are improved up to 2.6 times in bias instability and 2 times in ARW under the mode-matched condition compared to the mismatched (~200 Hz) condition, reaching down to 0.73 °
/hr and 0.024 °
/&radic
hr, respectively. At the mode-matched gyroscope operation, the better performance is obtained to be bias instability of 0.87

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8

Wu, Henry M. Eng Massachusetts Institute of Technology. "System architecture for mode-matching a MEMS gyroscope." Thesis, Massachusetts Institute of Technology, 2009. http://hdl.handle.net/1721.1/53156.

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Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2009.
Includes bibliographical references (p. 127-128).
MEMS gyroscopes are used to detect rotation rates and have enabled a variety of motion-based technologies in a range of industries. They are composed of micro-machined polysilicon structures that resonate and deflect when a rotation is experienced. The topic of this thesis surrounds a system architecture to optimize the performance of a gyroscope. The MEMS gyroscope contains a resonator and an accelerometer, modeled as a two degree-of-freedom mass-spring system. When the resonant frequencies of each mode are matched, the mechanical output of the gyroscope is maximal. Feedback is used to match the two modes by automatically tuning the voltage on the poly-silicon structure until the accelerometer resonant frequency matches that of the resonator. A square wave dither signal is introduced as quadrature error and is used to track the phase across the gyroscope's accelerometer. At mode-match, the phase lag is 90°, so the feedback mechanism maintains this 90° of phase lag between the input acceleration and mechanical output to keep the modes matched. Two controllers were tried in the feedback mechanism, a linear controller and a bang-bang controller. The bang-bang controller was found to produce better results, and was able to bring a pre-fabricated sensor die to mode-match and achieve a resolution floor of 12°/hr.
by Henry Wu.
M.Eng.

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9

Chatterjee, Gaurav. "Développement d'une unité de mesure inertielle à base de Smart-MEMS." Thesis, Montpellier, 2016. http://www.theses.fr/2016MONTT310.

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La navigation par système inertiel strapdown est aujourd’hui la plus répandue. L’architecture est bien connue et a été très largement améliorée au cours des dernières décennies. Néanmoins, le principe fondamental n’a subi de bouleversement et reste constitué d’une triplette d’accéléromètres et de gyromètres permettant de revenir aux informations d’attitude et de cap.La précision de l’estimation de position repose principalement sur la gamme de performance des capteurs utilisés. En particulier, des applications telles que des lanceurs spatiaux requièrent une très haute précision et des capteurs d’une technologie éprouvée sont utilisés. L’arrivée sur le marché de capteurs inertiels MEMS de haute précision ouvre une alternative à coût réduits couplée à une réduction de masse, volume et de consommation. Les moyens de production des MEMS ainsi qu’une meilleure connaissance des propriétés des matériaux ont permis l’arrivée d’accéléromètres MEMS pouvant rivaliser avec les technologies éprouvées de gamme tactique. Toutefois, les gyromètres de technologie MEMS existantes restent dans une gamme de performance de type industrielle.La présente étude vise à analyser la possibilité d’utiliser des accéléromètres de haute précision pour améliorer les performances gyrométriques, dans l’objectif de réaliser une solution tout MEMS d’unité de mesure inertielle. Une brève introduction sur les techniques de filtrage de Kalman pour la fusion de données est présentée, ainsi que son implémentation pour notre étude. L’analyse théorique se poursuit avec une présentation des résultats expérimentaux.L’étude conclut que l’utilisation d’une paire d’accéléromètres de haute performance et d’un gyroscope de type consommateur permet d’atteindre les performances d’un gyromètre tactique. Les contraintes de définition et de mesure pour l’implémentation du système sont présentées en détail.Cette étude est menée pour la mesure angulaire autour d’un axe unique de rotation, un complément d’étude est nécessaire à l’extrapolation de cette approche pour une mesure générique en 3D
Strapdown inertial navigation units are the most popular systems used for navigation. The system architecture is well established and has been extensively improved over the past decades. However, the core idea remains same where a triad of accelerometers and gyroscopes provide the attitude and heading information.The accuracy of the position estimate depends on the performance grade of the sensors employed. For applications like space launchers requiring very high accuracy, high-grade devices using traditional technologies are used. The advent of accurate MEMS based sensors offer an exciting low-cost alternative with expected reduction in size and power consumption. MEMS fabrication technology, assisted by improved understanding of material properties have led to accelerometers that can compete with traditional devices for tactical applications. However, the MEMS based solutions currently available for gyroscopes can replace only industrial grade applications.This study attempts to investigate if the currently available high-grade accelerometers can be used to improve the gyroscope performance, towards the final goal of a complete MEMS based solution for inertial navigation units. The study begins with a literature review of current status of technology. A brief explanation of linear Kalman filtering technique for data fusion is presented, along with its implementation concerning this work. The theoretical discussion is then followed by presentation of experimental results.The study found that using a pair of high-grade accelerometers, a consumer grade gyroscope can have its performance upgraded for tactical applications. The design and sensing constraints for realizing this system are discussed in detail.Since this research work primarily concerns with angular rate estimation around a single axis of rotation, further research is recommended for extrapolating this approach for a more general 3-D sensing case

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10

Mihaľko, Juraj. "MEMS inerciální snímače." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2012. http://www.nusl.cz/ntk/nusl-219724.

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The aim of this master’s thesis is to describe the basic measurement methods of micro-electromechanical inertial sensor, their physical principles and errors. Measurement of inertial sensors is very important for the parameterization of their errors and their subsequent mathematical model by which it is possible to minimize the measurement error impact on inertial navigation. The practical part is dedicated to create automated measurement setup for measurement stability of the offset. Hardware and software from National Instruments is used in measurement chain. The work is next focused on measuring seven inertial sensors based on three different physical principles. In addition to creating measurement setup, we also defined three inertial sensor parameters, describing theoretical behavior of the sensor output.

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11

Marinis, Ryan Thomas. "Development and implementation of automated interferometric microscope for study of MEMS inertial sensors." Worcester, Mass. : Worcester Polytechnic Institute, 2009. http://www.wpi.edu/Pubs/ETD/Available/etd-050709-142910/.

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12

Fei, Juntao. "ADAPTIVE SLIDING MODE CONTROL WITH APPLICATION TO A MEMS VIBRATORY GYROSCOPE." University of Akron / OhioLINK, 2007. http://rave.ohiolink.edu/etdc/view?acc_num=akron1194886083.

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13

Grahn, Erik. "Evaluation of MEMS accelerometer and gyroscope for orientation tracking nutrunner functionality." Thesis, KTH, Data- och elektroteknik, 2017. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-215163.

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In the production industry, quality control is of importance. Even though today's tools provide a lot of functionality and safety to help the operators in their job, the operators still is responsible for the final quality of the parts. Today the nutrunners manufactured by Atlas Copco use their driver to detect the tightening angle. There- fore the operator can influence the tightening by turning the tool clockwise or counterclockwise during a tightening and quality cannot be assured that the bolt is tightened with a certain torque angle. The function of orientation tracking was de- sired to be evaluated for the Tensor STB angle and STB pistol tools manufactured by Atlas Copco. To be able to study the orientation of a nutrunner, practical exper- iments were introduced where an IMU sensor was fixed on a battery powered nutrunner. Sensor fusion in the form of a complementary filter was evaluated. The result states that the accelerometer could not be used to estimate the angular dis- placement of tightening due to vibration and gimbal lock and therefore a sensor fusion is not possible. The gyroscope by itself can be used to provide the angular displacement around every axis with high accuracy without taking into account the gimbal lock phenomena or external forces in the form of vibration of the tool. The gyroscope provided data with a probability to measure ±1° in future tightenings by 69,76%. The gyroscope provided data with high accuracy and stability and can be used in real world application and production for true angle functionality of the tools.
I produktionsindustrin är kvalitetskontroll av stor betydelse. Även om dagens verk- tyg innehåller mycket funktionalitet och säkerhet för att hjälpa operatörer i jobbet, är operatören fortfarande ansvarig för den slutliga kvaliteten. Idag använder Atlas Copcos skruvdragare motorns vridmoment för att göra den slutliga åtdragningen. Därav kan operatören påverka åtdragningen genom att vrida verktyget medurs el- ler moturs under en åtdragning och kvaliteten kan inte säkerställas att bulten dras med ett visst vridmoment. Funktion för rörelseavläsning var önskvärd att utvärde- ras för Tensor STB-vinkel- och STB-pistolverktygen tillverkade av Atlas Copco. För att kunna studera orienteringen hos en skruvdragare introducerades praktiska ex- periment där en IMU-sensor fixerades på en batteridriven skruvdragare. En Sen- sorfusion i form av ett komplementärt filter utvärderades. Resultaten visar att acce- lerometern inte kunde användas för att uppskatta vinkelförskjutningen av en åt- dragning på grund av vibration och gimballås och därav kan inte fusionen heller nyttjas. Gyroskopet i sig kan användas för att ge vinkelförskjutningen runt varje axel med hög noggrannhet utan att ta hänsyn till gimballåsfenomen eller yttre kraf- ter i form av vibration från verktyget. Gyroskopet gav data med en sannolikhet att mäta ± 1° i avvikelse från ett förbestämt värde i framtida åtdragningar med 69,76%. Vidare utvärdering av gyroskop och implementation av detta borde göras innan detta skulle anses kunna användas i en riktig applikation för rörelseavläsning un- der en åtdragning.

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14

Temiz, Yuksel. "Advanced Readout And Control Electronics For Mems Gyroscopes." Master's thesis, METU, 2007. http://etd.lib.metu.edu.tr/upload/2/12608664/index.pdf.

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This thesis reports the development of advanced readout and control electronics for MEMS gyroscopes developed at METU. These gyroscope electronics are separated into three main groups: high sensitive interface circuits, drive mode amplitude controlled self oscillation loops, and sense mode phase sensitive amplitude demodulators. The proposed circuits are first implemented with discrete components, and then integrated on CMOS chips. A self oscillation loop enabling constant amplitude drive mode vibrations independent of sensor parameters and ambient conditions is developed. A fully functional angular rate system, which is constructed by employing this advanced control electronics together with the transresistance amplifier type interfaces and sense mode electronics, is implemented on a dedicated PCB having 5.4x2.4 cm2 area. This system demonstrates an impressive performance far better than the best performance achieved by any angular rate system developed at METU. Bias instability and angle random walk values are measured as 14.3 º
/hr and 0.126 º
/&
#8730
hr, respectively. The scale factor of the system is found as 22.2 mV/(º
/sec) with a nonlinearity of 0.01%, and a zero rate output of 0.1 º
/sec, in ±
50 º
/sec measurement range. CMOS unity gain buffer (UGB) and transimpedance amplifier (TIA) type resistive and capacitive interfaces are characterized through AC, transient, and noise tests. It is observed that on chip biasing mechanisms properly DC-bias the high impedance nodes to 0 V potential. UGB type capacitive interfaces demonstrate superior performance than TIA counterparts due to stability problems associated with TIA interfaces. CMOS differential drive mode control and sense mode demodulation electronics give promising results for the future performance tests.

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15

Uppalapati, Balaadithya. "Design and Analysis of Wafer-Level Vacuum-Encapsulated Disk Resonator Gyroscope Using a Commercial MEMS Process." University of Dayton / OhioLINK, 2017. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1510764485530995.

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16

Hasík, Stanislav. "Testování MEMS gyroskopů." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2016. http://www.nusl.cz/ntk/nusl-240919.

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This diploma thesis presents theoretical information regarding MEMS gyroscopes their parameters and designs. The description of measurement chain be used for testing of MEMS gyroscopes in Honeywell International s.r.o. is presented. Special focus is devoted to: the Polytec MSA-500 system, the Standa goniometers and their controller, Peltier cell and its driver. The practical part of this thesis contains the description of the thermal control system and also the description of the developed “Measurement system” in the LabVIEW software which is used for controlling the goniometers position and the Peltier cell. The system is able to fully control two goniometer stages, align the surface of tested MEMS device to orthogonal position with respect to the Polytec MSA-500 measurement head and also control the temperature of the tested device. The last part of this thesis presents the tests of the MEMS gyroscope parameters with special focus to the MEMS gyroscope angle random walk and the bias dependence on the vacuum quality of the structure environment.

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17

Bezold, Maxwell. "AN ATTITUDE DETERMINATION SYSTEM WITH MEMS GYROSCOPE DRIFT COMPENSATION FOR SMALL SATELLITES." UKnowledge, 2013. http://uknowledge.uky.edu/ece_etds/29.

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This thesis presents the design of an attitude determination system for small satellites that automatically corrects for attitude drift. Existing attitude determination systems suffer from attitude drift due to the integration of noisy rate gyro sensors used to measure the change in attitude. This attitude drift leads to a gradual loss in attitude knowledge, as error between the estimated attitude and the actual attitude increases. In this thesis a Kalman filter is used to complete sensor fusion which combines sensor observations with a projected attitude based on the dynamics of the satellite. The system proposed in this thesis also utilizes a novel sensor called the stellar gyro to correct for the drift. The stellar gyro compares star field images taken at different times to determine orientation, and works in the presence of the sun and during eclipse. This device provides a relative attitude fix that can be used to update the attitude estimate provided by the Kalman filter, effectively compensating for drift. Simulink models are developed of the hardware and algorithms to model the effectiveness of the system. The Simulink models show that the attitude determination system is highly accurate, with steady state errors of less than 1 degree.

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18

Sahin, Emre. "High Performance Readout And Control Electronics For Mems Gyroscopes." Master's thesis, METU, 2009. http://etd.lib.metu.edu.tr/upload/2/12610386/index.pdf.

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This thesis reports the development of various high performance readout and control electronics for implementing angular rate sensing systems using MEMS gyroscopes developed at METU. First, three systems with open loop sensing mechanisms are implemented, where each system has a different drive-mode automatic gain controlled (AGC) self-oscillation loop approach, including (i) square wave driving signal with DC off-set named as OLS_SquD, (ii) sinusoidal driving signal with DC off-set named as OLS_SineD, and iii) off-resonance driving signal named as OLS_OffD. A forth system is also constructed with a closed loop sensing mechanism where the drive mode automatic gain controlled (AGC) self-oscillation loop approach with square wave driving signal with DC off-set named as CLS_SquD. Sense and drive mode electronics employ transimpedance and transresistance amplifiers as readout electronics, respectively. Each of the systems is implemented with commercial discrete components on a dedicated PCB. Then, the angular rate sensing systems are tested with SOG (Silicon-on-Glass) gyroscopes that are adjusted to have two different mechanical bandwidths, more specially 100 Hz and 30 Hz. Test results of all of these cases verify the high performance of the systems. For the 100 Hz bandwidth, the OLS_SquD system shows a bias instability of 4.67 &
#730
/hr, an angle random walk (ARW) 0.080 &
#730
/&
#8730
hr, and a scale factor of 22.6 mV/(&
#730
/sec). For the 30 Hz bandwidth, the OLS_SquD system shows a bias instability of 5.12 &
#730
/hr, an ARW better than 0.017 &
#730
/&
#8730
hr, and a scale factor of 49.8 mV/(&
#730
/sec). For the 100 Hz bandwidth, the OLS_SineD system shows a bias instability of 6.92 &
#730
/hr, an ARW of 0.049 &
#730
/&
#8730
hr, and a scale factor of 17.97 mV/(&
#730
/sec). For the 30 Hz bandwidth, the OLS_SineD system shows a bias instability of 4.51 &
#730
/hr, an ARW of 0.030 &
#730
/&
#8730
hr, and a scale factor of 43.24 mV/(&
#730
/sec). For the 100 Hz bandwidth, the OLS_OffD system shows a bias instability of 8.43 &
#730
/hr, an ARW of 0.086 &
#730
/&
#8730
hr, and a scale factor of 20.97 mV/(&
#730
/sec). For the 30 Hz bandwidth, the OLS_OffD system shows a bias instability of 5.72 &
#730
/hr, an ARW of 0.046 &
#730
/&
#8730
hr, and a scale factor of 47.26 mV/(&
#730
/sec). For the 100 Hz bandwidth, the CLS_SquD system shows a bias instability of 6.32 &
#730
/hr, an ARW of 0.055 &
#730
/&
#8730
hr, and a scale factor of 1.79 mV/(&
#730
/sec). For the 30 Hz bandwidth, the CLS_SquD system shows a bias instability of 5.42 &
#730
/hr, an ARW of 0.057 &
#730
/&
#8730
hr, and a scale factor of 1.98 mV/(&
#730
/sec). For the 100 Hz bandwidth, the R2 nonlinearities of the measured scale factors of all systems are between 0.0001% and 0.0003% in the ±
100 &
#730
/sec measurement range, while for the 30 Hz bandwidth the R2 nonlinearities are between 0.0002% and 0.0062% in the ±
80&
#730
/sec measurement range. These performance results are the best results obtained at METU, satisfying the tactical-grade performances, and the measured bias instabilities and ARWs are comparable to the best results in the literature for a silicon micromachined vibratory gyroscope.

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19

Alper, Said Emre. "Mems Gyroscopes For Tactical-grade Inertial Measurement Applications." Phd thesis, METU, 2005. http://etd.lib.metu.edu.tr/upload/12606483/index.pdf.

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This thesis reports the development of high-performance symmetric and decoupled micromachined gyroscopes for tactical-grade inertial measurement applications. The symmetric structure allows easy matching of the resonance frequencies of the drive and sense modes of the gyroscopes for achieving high angular rate sensitivity
while the decoupled drive and sense modes minimizes mechanical cross-coupling for low-noise and stable operation. Three different and new symmetric and decoupled gyroscope structures with unique features are presented. These structures are fabricated in four different micromachining processes: nickel electroforming (NE), dissolved-wafer silicon micromachining (DWSM), silicon-on-insulator (SOI) micromachining, and silicon-on-glass (SOG) micromachining. The fabricated gyroscopes have capacitive gaps from 1.5µ
m to 5.5µ
m and structural layer thicknesses from 12µ
m to 100µ
m, yielding aspect ratios up to 20 depending on the fabrication process. The size of fabricated gyroscope chips varies from 1x1mm2 up to 4.2x4.6mm2. Fabricated gyroscopes are hybrid-connected to a designed capacitive interface circuit, fabricated in a standard 0.6µ
m CMOS process. They have resonance frequencies as small as 2kHz and as large as 40kHz
sense-mode resonance frequencies can be electrostatically tuned to the drive-mode frequency by DC voltages less than 16V. The quality factors reach to 500 at atmospheric pressure and exceed 10,000 for the silicon gyroscopes at vacuum. The parasitic capacitance of the gyroscopes on glass substrates is measured to be as small as 120fF. The gyroscope and interface assemblies are then combined with electronic control and feedback circuits constructed with off-the-shelf IC components to perform angular rate measurements. Measured angular rate sensitivities are in the range from 12µ
V/(deg/sec) to 180µ
V/(deg/sec), at atmospheric pressure. The SOI gyroscope demonstrates the best performance at atmospheric pressure, with noise equivalent rate (NER) of 0.025(deg/sec)/Hz1/2, whereas the remaining gyroscopes has an NER better than 0.1(deg/sec)/Hz1/2, limited by either the small sensor size or by small quality factors. Gyroscopes have scale-factor nonlinearities better than 1.1% with the best value of 0.06%, and their bias drifts are dominated by the phase errors in the demodulation electronics and are over 1deg/sec. The characterization of the SOI and SOG gyroscopes at below 50mTorr vacuum ambient yield angular rate sensitivities as high as 1.6mV/(deg/sec) and 0.9mV/(deg/sec), respectively. The NER values of these gyroscopes at vacuum are smaller than 50(deg/hr)/Hz1/2 and 36(deg/hr)/Hz1/2, respectively, being close to the tactical-grade application limits. Gyroscope structures are expected to provide a performance better than 10 deg/hr in a practical measurement bandwidth such as 50Hz, provided that capacitive gaps are minimized while preserving the aspect ratio, and the demodulation electronics are improved.

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20

Sung, Wang-Kyung. "High-frequency tri-axial resonant gyroscopes." Diss., Georgia Institute of Technology, 2013. http://hdl.handle.net/1853/52936.

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This dissertation reports on the design and implementation of a high-frequency, tri-axial capacitive resonant gyroscopes integrated on a single chip. The components that construct tri-axial rotation sensing consist of a yaw, a pitch and a roll device. The yaw-rate gyroscope has a wide bandwidth and a large full-scale range, and operates at a mode-matched condition with DC polarization voltage of 10V without frequency tuning requirement. The large bandwidth of 3kHz and expected full-scale range over 30,000˚/sec make the device exhibit fast rate response for rapid motion sensing application. For the pitch-and-roll rate sensing, an in-plane drive-mode and two orthogonal out-of-plane sense-modes are employed. The rotation-rate sensing from lateral axes is performed by mode-matching the in-plane drive-mode with out-of-plane sense-modes to detect Coriolis-force induced deflection of the resonant mass. To compensate process variations and thickness deviations in the employed silicon-on-insulator (SOI) substrates, large electrostatic frequency tunings of both the drive and sense modes are realized. A revised high aspect ratio combined polysilicon and silicon (HARPSS) process is developed to resolve the Coriolis response that exists toward out-of-plane direction while drive-mode exists on in-plane, and tune individual frequencies with minimal interference to unintended modes. To conclude and overcome the performance limitation, design optimization of high-frequency tri-axial gyroscopes is suggested. Q-factor enhancement through reduction of thermoelastic damping (TED) and optimizations of physical dimensions are suggested for the yaw disk gyroscope. For the pitch-and-roll gyroscope, scaling property of physical dimension and its subsequent performance enhancement are analyzed.

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21

Ferreira, Anderson Henrique Rodrigues 1983. "Análise eletromecânica do giroscópio MEMS." [s.n.], 2013. http://repositorio.unicamp.br/jspui/handle/REPOSIP/263218.

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Orientador: José Maria Campos dos Santos
Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecânica
Made available in DSpace on 2018-08-23T14:00:55Z (GMT). No. of bitstreams: 1 Ferreira_AndersonHenriqueRodrigues_M.pdf: 13469668 bytes, checksum: 25f9c2a03e6a62e5d1a871b78053c4b1 (MD5) Previous issue date: 2013
Resumo: Este trabalho apresenta uma análise dos problemas físicos associados ao projeto de um sensor inercial giroscópio baseado na tecnologia MEMS (micro-electro-mechanical-system). O dispositivo oferece uma resposta elétrica na forma de uma variação da capacitância devido à força de Coriolis e como consequência obtém-se uma medida da velocidade angular de um sistema. Uma formulação analítica da dinâmica eletromecânica de um giroscópio com dois graus de liberdade é revista e implementada em um programa MATLAB/Simulink (R2011a) ®, onde são obtidas as respostas em deslocamento nos domínios do tempo e da frequência. Para melhorar a capacidade do projeto de sensores inerciais, uma abordagem da análise eletromecânica do giroscópio usando o Método dos Elementos Finitos (MEF) do programa comercial ANSYS 12.0® é apresentada. Neste contexto, dois projetos de giroscópios MEMS encontrados na literatura (giroscópio de ACAR e de NGUYEN) são analisados. Análises estática, modal e harmônica são realizadas e os resultados comparados com aqueles obtidos com os modelos analíticos. A resposta harmônica para o modelo eletromecânico completo de MEF não foi realizada devido à dificuldade de simular análises harmônicas incluindo os elementos de Atuação e Detecção simultaneamente. Para superar este problema o elemento Detector foi substituído por um elemento de mola. Os resultados obtidos no giroscópio de NGUYEN apresentaram boa concordância entre os modelos. Contudo, os resultados com o giroscópio de ACAR apresentaram erros significativos entre os modelos, os quais são oriundos da geometria usada no modelo de MEF que se mostrou flexível em regiões que deveriam ser rígidas. Uma análise estática de diferentes tipos de suspensão elástica para giroscópios MEMS é apresentada no Apêndice B
Abstract: This paper presents an analysis of the physical problems associated with the design of a gyroscope inertial sensor based on MEMS technology (MicroEletroMechanical System). The device gives a response in the form of an electrical capacitance change due to the Coriolis force and as a result obtains a measure of the angular velocity of a system. Analytical formulation of the electromechanical dynamics of a gyroscope with two degrees of freedom is reviewed and implemented in a MATLAB/Simulink (R2011a) ® code, where the displacement responses are obtained in time and frequency domains. To improve the capacity of the inertial sensors design, another electromechanical gyroscope analysis approach using the Finite Element Method (FEM) of commercial software ANSYS ® 12.0 is presented. In this context, two designs of MEMS gyroscopes from the literature (NGUYEN's and ACAR's gyroscopes) are analyzed. Static, modal and harmonic analysis are performed and the results compared with those obtained with the analytical models. The harmonic response for the complete electromechanical model of MEF was not performed due to the inability to run harmonic analysis including Actuator and Detector elements simultaneously. To overcome this difficulty, the Detector element was replaced by a spring element. The results obtained with NGUYEN's gyroscope showed good agreement between the models. However, the results with the ACAR's gyroscope showed significant errors between the models, which are derived from the geometry used in the FEM model, that was flexible to regions that should be rigid. A static analysis of different types of elastic suspension for MEMS gyroscopes are shown in Appendix B
Mestrado
Mecanica dos Sólidos e Projeto Mecanico
Mestre em Engenharia Mecânica

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22

Bowles, Stephen Richard. "Design and implementation of a control scheme for a MEMS rate integrating gyroscope." Thesis, University of Newcastle upon Tyne, 2015. http://hdl.handle.net/10443/3012.

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MEMS gyroscopes are found across a large range of applications, from low precision low cost applications through to high budget projects that require almost perfect accuracy. MEMS gyroscopes fall into two categories – ‘rate’ and ‘rate integrating’, with the latter offering superior performance. The key advantage that the rate integrating type possesses is that it directly measures angle, eliminating the need for any integration step. This reduces the potential for errors, particularly at high rates. However, the manufacturing precision required is far tighter than that of the rate gyroscope, and this has thus far limited the development of rate integrating gyroscopes. This thesis proposes a method for reducing the effect of structural imperfections on the performance of a rate integrating gyroscope. By taking a conventional rate gyroscope and adjusting its control scheme to operate in rate integrating mode, the thesis shows that it is possible to artificially eliminate the effect of some structural imperfections on the accuracy of angular measurement through the combined use of electrostatic tuning and capacitive forcing. Further, it demonstrates that it is viable to base the designs for rate integrating gyroscopes on existing rate gyroscope architectures, albeit with some modifications. Initially, the control scheme is derived through the method of multiple scales and its potential efficacy demonstrated through computational modelling using Simulink. The control scheme is then implemented onto an existing rate gyroscope architecture, with a series of tests conducted that benchmark the gyroscope performance in comparison to standard performance measures. Experimental work demonstrates the angle measurement capability of the rate integrating control scheme, with the gyroscope shown to be able to measure angle, although not to the precision necessary for commercial implementation. However, the scheme is shown to be viable with some modifications to the gyroscope architecture, and initial tests on an alternative architecture based on these results are presented.

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23

Castro, Simon Thomas Dean Robert Neal. "Typical response of the ADXRS300 microelectromechanical systems (MEMS) gyroscope in acoustically harsh environments." Auburn, Ala., 2009. http://hdl.handle.net/10415/1846.

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24

Erismis, Mehmet Akif. "Mems Accelerometers And Gyroscopes For Inertial Measurement Units." Master's thesis, METU, 2004. http://etd.lib.metu.edu.tr/upload/12605331/index.pdf.

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This thesis reports the development of micromachined accelerometers and gyroscopes that can be used for micromachined inertial measurement units (IMUs). Micromachined IMUs started to appear in the market in the past decade as low cost, moderate performance alternative in many inertial applications including military, industrial, medical, and consumer applications. In the framework of this thesis, a number of accelerometers and gyroscopes have been developed in three different fabrication processes, and the operation of these fabricated devices is verified with extensive tests. In addition, the fabricated accelerometers were combined with external readout electronics to obtain hybrid accelerometer systems, which were tested in industrial test facilities. The accelerometers and gyroscopes are designed and optimized using the MATLAB analytical simulator and COVENTORWARE finite element simulation tool. First set of devices is fabricated using a commercial foundry process called SOIMUMPs, while the second set of devices is fabricated using the electroplating processes developed at METU-MET facilities. The third set of devices is designed for a new advanced process based on DRIE, which is under development. Mechanical and electrical test results of the fabricated accelerometers and gyroscopes are in close agreement with the designed values. The testing of the SOI and nickel accelerometers is also performed in industrial test environments. In order to perform these tests, accelerometers are hybrid connected to commercially available capacitive readout circuits. These accelerometer systems require only two DC supply voltages for operation and provide an analog output voltage related to the input acceleration. The industrial tests show that the SOI accelerometer system yields a 799 µ
g/&
#8730
Hz average noise floor, a 1.8 mg/&
#8730
Hz peak noise floor, a 22.2 mV/g sensitivity, and a 0.1 % nonlinearity, while the nickel accelerometer system yields a 228 µ
g/&
#8730
Hz average noise floor, a 375 µ
g/&
#8730
Hz peak noise floor, a 1.02 V/g sensitivity, and a 0.23 % nonlinearity. Long-term drift components of the accelerometers are determined to be smaller than 20 mg. These systems are the highest performance micromachined accelerometer systems developed in Turkey, and they can be used in implementation of a national inertial measurement unit.

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25

Javorček, Martin. "Snímače pro určování natočení v mobilní robotice." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2009. http://www.nusl.cz/ntk/nusl-217754.

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The goal of this paper is to suggest suitable method for angle measuring of mobile robot. There are being analyzed 3 different sensors – gyroscope, accelerometer and electronic compass in the prologue. Their advantages and disadvantages in the theoretical way are being explained in this part and also their opportunities of use in the practical way. In the following parts the work is focused on MEMS gyroscopes and their opportunities of use in the practical way with regard to achievable exactness and to the application for development of its exactness. The application of device together with main SW for microcontroller and the valuation of achievable exactness and determined facts are being described in the conclusion part.

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26

Silay, Kanber Mithat. "High Performance Cmos Capacitive Interface Circuits For Mems Gyroscopes." Master's thesis, METU, 2006. http://etd.lib.metu.edu.tr/upload/2/12607518/index.pdf.

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This thesis reports the development and analysis of high performance CMOS readout electronics for increasing the performance of MEMS gyroscopes developed at Middle East Technical University (METU). These readout electronics are based on unity gain buffers implemented with source followers. High impedance node biasing problem present in capacitive interfaces is solved with the implementation of a transistor operating in the subthreshold region. A generalized fully differential gyroscope model with force feedback electrodes has been developed in order to simulate the capacitive interfaces with the model of the gyroscope. This model is simplified for the single ended gyroscopes fabricated at METU, and simulations of resonance characteristics are done. Three gyroscope interfaces are designed by considering the problems faced in previous interface architectures. The first design is implemented using a single ended source follower biased with a subthreshold transistor. From the simulations, it is observed that biasing impedances up to several gigaohms can be achieved. The second design is the fully differential version of the first design with the addition of a self biasing scheme. In another interface, the second design is modified with an instrumentation amplifier which is used for fully differential to single ended conversion. All of these interfaces are fabricated in a standard 0.6 µ
m CMOS process. Fabricated interfaces are characterized by measuring their ac responses, noise response and transient characteristics for a sinusoidal input. It is observed that, biasing impedances up to 60 gigaohms can be obtained with subthreshold transistors. Self biasing architecture eliminates the need for biasing the source of the subthreshold transistor to set the output dc point to 0 V. Single ended SOG gyroscopes are characterized with the single ended capacitive interfaces, and a 45 dB gain improvement is observed with the addition of capacitive interface to the drive mode. Minimum resolvable capacitance change and displacement that can be measured are found to be 58.31 zF and 38.87 Fermi, respectively. The scale factor of the gyroscope is found to be 1.97 mV/(°
/sec) with a nonlinearity of only 0.001% in ±
100 °
/sec measurement range. The bias instability and angle random walk of the gyroscope are determined using Allan variance method as 2.158 °
/&
#8730
hr and 124.7 °
/hr, respectively.

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27

Colin, Kévin. "Data informativity for the prediction error identification of MIMO systems : identification of a MEMS gyroscope." Thesis, Lyon, 2020. http://www.theses.fr/2020LYSEC018.

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Les modèles mathématiques sont à l’essence même de chaque domaine de l’ingénierie que ce soit pour le contrôle, la prédiction et le diagnostic. Dans cette thèse, nous abordons l’identification des systèmes, c’est-à-dire la modélisation d’un système dynamique avec des données expérimentales. Plus particulièrement, nous considérons l’identification par erreur de prédiction (Prediction Error). Afin d’obtenir un modèle identifié précis, les données doivent satisfaire une propriété fondamentale : l’informativité. Dans la littérature, l’informativité des données a été largement étudiée pour l’identification des systèmes linéaires une-entrée une-sortie. Peu de résultats sont néanmoins présents pour le cas des systèmes linéaires plusieurs-entrées plusieurs-sorties (multiple-inputs multiple-outputs en anglais ou MIMO) à l’heure où les systèmes deviennent de plus en plus complexe. Ainsi, nous nous focalisons en premier à développer des conditions pour vérifier que l’informativité est garantie pour l’identification des systèmes MIMO linéaires en boucle ouverte et en boucle fermée. Cependant, la plupart des systèmes réels ont des comportements non-linéaires. Heureusement, l’identification par Prediction Error peut s’avérer être un outil efficace pour identifier certaines classes de systèmes non-linéaires. C’est le cas, par exemple, de la classe des systèmes dits Hammerstein, i.e., des systèmes dont la non-linéarité se trouve à l’entrée du système. Dans cette thèse, nous étudions l’informativité des données pour l’identification d’une classe particulière de systèmes Hammerstein. Cette étude se motive par un système réel étudié dans cette thèse : le gyroscope MEMS. Un gyroscope MEMS est un micro-capteur inertiel mesurant des vitesses de rotation. Ils se distinguent des gyroscopes optiques par ses multiples avantages tels que sa petite taille, son faible coût et sa faible consommation d’énergie. Cependant, il reste moins précis que les gyroscopes optiques. Le gyroscope MEMS est alors placé en boucle fermée afin d’augmenter sa précision. Afin de faire la synthèse d’un correcteur optimal, il nous faut déterminer un modèle précis des dynamiques du gyroscope MEMS. Dans la littérature, les modèles des dynamiques du gyroscope MEMS sont souvent incomplet. Une méthode de modélisation basée sur l’identification des systèmes est alors proposée pour obtenir un modèle plus complet et précis. Nous observons alors que l’étude de l’informativité des données faite précédemment s’applique dans ce cas pratique
Mathematical models have a crucial place in every engineering field. They can be used for several purposes such as the design of a controller, the prediction, the health monitoring of a system, etc. In this thesis, we deal with system identification which is the scientific field consisting in the modeling of a system with experimental data. More particularly, we will consider the Prediction Error method. In order to get an accurate identified model, the data must guarantee one fundamental property which is the informativity. The data informativity has been largely studied for the identification of linear single-input single-output systems. However, few results can be found for the identification of linear multiple-inputs multiple-outputs (MIMO) systems. This is inconvenient since the systems get more and more complex. Hence, in the first part of this thesis, we focus on developing new conditions to verify the data informativity for the open-loop and closed-loop identification of linear MIMO systems. However, most of real-life systems have nonlinear dynamics. Fortunately, Prediction Error identification can be used as an efficient tool for the modeling of some classes of nonlinear systems such as Hammerstein systems, i.e., systems where the nonlinearity is found at the input of the system. In this thesis, we study a particular class of Hammerstein systems. The motivation of this study comes from the real-life considered in this thesis : the MEMS gyroscope. A MEMS gyroscope is a micro-sensor that measures angular rates. It has several advantages such as its small size, its low energy consumption and its cheap price. However, it is less accurate than its optical counterpart. In order to tackle this accuracy issue, the MEMS gyroscope is put in closed-loop. Of course, we want to design an optimal controller. For this purpose, we need to derive an accurate model of the dynamics of the MEMS gyroscope. In the literature, the proposed models are not enough complete. Therefore, in this thesis, we develop an identification method that yields an accurate and complete model of the dynamics of the MEMS gyroscope. We observe that the previous study of the data informativity can be applied to this real-life problem

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28

Бердичевський, Дмитро Володимирович. "Засіб для позиціонування рухомих об'єктів в просторі." Bachelor's thesis, КПІ ім. Ігоря Сікорського, 2021. https://ela.kpi.ua/handle/123456789/42202.

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В даній дипломній роботі було промоделювано засіб для знаходження координат об’єкта в просторі щоб полегшити та зменшити час знаходження дефекту на ділянці. У першому розділі дипломної роботи представлено теоретичні відомості про технології локального позиціонування. А також, наведено переваги та недоліки даних технологій, а також обґрунтовано вибір певної технології до даної дипломної роботи. У другому розділі приведено методи локального позиціонування та висновок щодо застосування даних методів. В третьому розділі описано MEMS датчики та короткі відомості про них, математичну частину даних датчиків, знаходження кутів Ейлера, характеристики, а також вибір датчиків до даної дипломної роботи. В четвертому розділі приведено функціональну та принципову електричну схему, опис цієї схеми, а також алгоритм знаходження координат нашого дефекту.
In this thesis, a tool for finding the coordinates of the object in space was modeled to facilitate and reduce the time of finding the defect on the site. The first section of the thesis presents theoretical information about local positioning technologies. Also, the advantages and disadvantages of these technologies are given, as well as the choice of a certain technology for this thesis is substantiated. The second section presents the methods of local positioning and the conclusion on the application of these methods. The third section describes MEMS sensors and brief information about them, the mathematical part of the sensor data, finding the Euler angles, characteristics, as well as the choice of sensors for this thesis. In the fourth section the functional and basic electric scheme, the description of this scheme, and also algorithm of finding of coordinates of our defect is resulted.

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29

Eliasson, Dennis, and Marika Logge. "P120 – MEMS-gyroskop i rengöringsrobot : Undersöka möjligheten att använda ett MEMS-gyroskop för att säkerställa rak kurs hos poolrengöringsroboten W2000 under drift." Thesis, KTH, Tillämpad maskinteknik (KTH Södertälje), 2018. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-232716.

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Detta projekt syftar till att undersöka om det går att kurskorrigera en av Weda AB:s poolrengöringsrobotar med hjälp av ett MEMS-gyroskop. Den valda rengöringsroboten styrs idag av en PLC, och konceptet är att komplettera styrenheten med ett MEMS gyroskop som kan detektera kursavvikelser. Undersökandet av möjligheterna för implementeringen börjar med att samla information om MEMS gyroskopens funktion och i vilka tekniker de används idag. Vidare utförs beräkningar mot Wedas definition av rak kurs, det resulterade i för höga krav på känsligheten i gyroskopet. Trots det otillfredsställande resultatet beslutar Weda att projektet ska fortsätta undersöka gyroskopets möjligheter. En marknadsundersöknings med 9 tillverkningsföretag genomförs i syfte att se vad marknaden erbjuder för MEMS gyroskop idag. Sedan konsulteras distribueringsföretaget Avnet som bidrar med sina kunskaper, erfarenheter och rekommendationer för konceptet. Ett av de framstående gyroskopen i undersökningen användes för att genomföra två tester. Syftet av dem var att simulera olika situationer som rengöringsroboten kan utsättas för. Resultatet visar att repetitionsnoggrannheten är god men att gyroskopet inte är tillförlitligt i låga hastigheter, vilket är en dålig egenskap för rengöringsroboten W2000 som körs med en hastighet 0,2 m/s. Testresultatet diskuterades med Bosch och dem tror att gyroskopets automatiska kalibrering är orsaken till att det inte ger tillförlitliga mätdata vid låga hastigheter.
During this project the possibilities to monitor and adjust the direction of a pool cleaning robot with a MEMS gyroscope are evaluated. The robot chosen for the evaluation is manufactured by Weda AB. The concept is to add a MEMS gyroscope to the robot, which will give the control unit (PLC) feedback regarding the direction of the robot. The evaluation includes general information about MEMS gyroscopes, where they are used, common built in errors etc. To be able to select a suitable MEMS gyroscope the needed sensitivity is calculated. The needed sensitivity is based on requirements from Weda AB. The evaluation also includes a market survey which shows that the needed sensitivity cannot be fulfilled by products available on the market. The market survey is based on nine manufacturing companies and a recommendation from a distribution company called Avnet. One of the prominent MEMS gyroscopes was used to carry out two tests. The tests were designed to mimic motions of the pool cleaning robot. The test result shows that the gyroscope has good repetition accuracy, but it is not trustworthy when the rotation speed is low. The test result was discussed with the manufacturer and they think that the non positive result is caused by the automatic calibration.

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30

Tatar, Erdinc. "Quadrature Error Compensation And Its Effects On The Performance Of Fully Decoupled Mems Gyroscopes." Master's thesis, METU, 2010. http://etd.lib.metu.edu.tr/upload/12612436/index.pdf.

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This thesis, for the first time in the literature, presents the effect of quadrature error compensation on the performance of a fully decoupled MEMS gyroscope and provides experimental data on the sources of quadrature error. Dedicated quadrature error cancellation electrodes operating with only differential DC potentials are designed. Gyroscopes with intentionally placed imperfections are fabricated with SOG based SOI process which provides higher yield and uniformity compared to SOG process. Tests show that the fully closed loop system with quadrature cancellation operates as expected. Gyroscope performance is improved up to 7.8 times for bias instability, 10 times for angle random walk (ARW) and 800 times for output offset with quadrature cancellation. The actual improvement is higher since some sensors cannot be operated without quadrature cancellation and they are not included in improvement calculations. The best obtained performance is bias instability of 0.39

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Bobalík, Lukáš. "Využití senzorů MEMS pro lokální určení polohy." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2014. http://www.nusl.cz/ntk/nusl-221043.

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Within this Master’s thesis, design and construction of a strapdown inertial navigation system based on MEMS sensors is described. The thesis includes theoretic analysis of physics behind determining the position of an object based on the object’s aceleration and changes in the object’s orientation in space. Included is also an overview of mathematical methods related to the position calculation.

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Swing, Oskar. "Using Gyroscope Technology to implement a Leaning Technique for Game Interaction." Thesis, Blekinge Tekniska Högskola, Institutionen för kreativa teknologier, 2017. http://urn.kb.se/resolve?urn=urn:nbn:se:bth-15204.

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Context. Smartphones contain advanced sensors called microelectromechanical systems(MEMS). By connecting a smartphone to a computer these sensors can be used to test new interaction techniques for games. Objective. This study aims to investigate an interaction technique implemented with a gyroscope that utilises the leaning of a user’s torso and compare it in terms of precision and enjoyment to using a joystick. Method. The custom interaction technique was implemented by using the gyroscope of a Samsung Galaxy s6 Edge and attaching it to to the torso of the user. The joystick technique was implementation by using the left joystick of an Xbox One controller. A user study was conducted and 19 people participated by playing a custom-made obstacle course game that tested the precision of the interaction techniques. After testing each technique participants took part in a survey consisting of questions regarding their enjoyment using the technique. Result. The results showed that the leaning technique was not as precise as the joystick implementation. The participants found the learning technique to be more fun to use and also more immersive compared to the joystick implementation. The leaning technique was however also more uncomfortable and difficult to use, and players felt less competent in their ability to control the player character with it. Conclusion. The performance difference might have been due to the lack of familiarity with the leaning technique compared to the joystick implementation. The leaning technique was more difficult to use and more uncomfortable than the joystick method. However, the leaning technique was also more fun to use and more immersive. This offers up the opportunity to keep exploring possibilities with this technique.

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Hossain, Akdas, and Emma Miléus. "Eye Movement Event Detection for Wearable Eye Trackers." Thesis, Linköpings universitet, Matematik och tillämpad matematik, 2016. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-129616.

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Eye tracking research is a growing area and the fields as where eye trackingcould be used in research are large. To understand the eye tracking data dif-ferent filters are used to classify the measured eye movements. To get accu-rate classification this thesis has investigated the possibility to measure bothhead movements and eye movements in order to improve the estimated gazepoint.The thesis investigates the difference in using head movement compensationwith a velocity based filter, I-VT filter, to using the same filter without headmovement compensation. Further on different velocity thresholds are testedto find where the performance of the filter is the best. The study is made with amobile eye tracker, where this problem exist since you have no absolute frameof reference as opposed to when using remote eye trackers. The head move-ment compensation shows promising results with higher precision overall.

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Abyarjoo, Fatemeh. "Sensor Fusion for Effective Hand Motion Detection." FIU Digital Commons, 2015. http://digitalcommons.fiu.edu/etd/2215.

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Thomas, Marcel A. C. (Marcel Adam Craig). "Design of non-serial, non-parallel flexural transmissions as applied to a micro-machined MEMS tuning fork gyroscope." Thesis, Massachusetts Institute of Technology, 2014. http://hdl.handle.net/1721.1/92061.

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Thesis: S.M., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2014.
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Cataloged from student-submitted PDF version of thesis.
Includes bibliographical references (pages 99-105).
The purpose of this work is to develop and implement design rules for flexures that emphasize directionality. This work is important for flexure designs that cannot be broken down into equivalent series or parallel components. The impact of this work is illustrated in the implementation of a high-performance micro-electromechanical system (MEMS) tuning fork gyroscope (TFG) that may be used for inertial navigation, automobile rollover detection, video games, and smartphones. These design rules build upon Freedom Actuation and Constraint Topologies (FACT), pseudo-rigid body modeling (PRBM), and constraint based-design (CBD) to include directionality. Flexural transmissions may be used to couple the motion of a plurality of stages to have different types (translations, rotations, and screws), different transmission ratios, and different directions on different axes. These design rules are implemented to create a MEMS TFG that exhibits coupled mass motions and decoupled mode shapes. A MEMS gyroscope was designed and modeled and a meso-scale prototype was made to verify the models and test sensitivity to fabrication errors. The design has 49% separation between desired and undesired modes. The meso-scale prototype and finite element analysis (FEA) suggest that the TFG design developed from these rules exhibits a 4x reduction in sensitivity to quadrature error.
by Marcel Adam Craig Thomas.
S.M.

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Bonnin, Lucas. "Exploitation des propriétés piézoélectriques du GaAs et application aux capteurs inertiels de type MEMS." Thesis, université Paris-Saclay, 2020. http://www.theses.fr/2020UPAST007.

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Les accéléromètres et les gyromètres sont essentiels à la navigation des véhicules autonomes. Parmi les capteurs existants, les MEMS (Micro Electro Mechanical Systems) sont les plus petits, les moins chers et les moins consommateurs d’énergie mais leurs performances restent encore trop faibles pour certaines applications. Pour les améliorer, cette thèse propose d’exploiter la piézoélectricité de l’arséniure de gallium (GaAs) semi-isolant. Des profils de tranchées obtenus par gravure réactive ionique profonde du GaAs jusqu’à 450 μm dans un plasma BCl₃/Cl₂ ont été étudiés et un nouveau masque de gravure bicouche résine sur silice a été développé pour rendre les flancs de tranchées plus verticaux et plus lisses. Des poutres encastrées-libres, un gyromètre diapason et un gyromètre triaxial ont été fabriqués par gravure traversante du GaAs et caractérisés. Malgré ses défauts, le procédé de fabrication permet de réaliser des résonateurs avec des facteurs de qualité supérieurs à 100 000 et une dispersion des fréquences inférieure à 3 %. Deux études théoriques sont également présentées. D’abord, une modification du gyromètre triaxial est proposée où les ancrages sont déplacés à l’extérieur de la structure. Ensuite, un modèle mathématique complet de l’épaisseur et de la forme d’électrodes métalliques déposées sur les flancs de tranchées par évaporation et masquage par ombrage (shadow-masking) est détaillé. Ces électrodes latérales sont nécessaires à la détection piézoélectrique des vibrations
Accelerometers and gyroscopes are essential to the navigation of autonomous vehicles. Among the existing sensors, MEMS (Micro Electro Mechanical Systems) sensors are the smallest and the least expensive with the lowest energy consumption. However, for some applications, their performances are not high enough. To improve them, this thesis chooses to use the piezoelectricity of the semi-insulating gallium arsenide (GaAs). Trenches were etched in a GaAs wafer down to 450 μm thanks to a deep reactive ion etching in a BCl₃/Cl₂ plasma and their profiles were studied. In order to get smooth and vertical trenches sidewalls, a new etching mask, made of a resist layer over a silica layer, was designed. Clamped-free beams, a tuning fork gyroscope and a triaxis gyroscope were fabricated. The characterisations of their resonances showed that, despite manufacturing defaults, quality factors higher than 100 000 and a dispersion of the frequencies lower than 3 % are achievable. Two theoretical studies are also presented. First the triaxis gyroscope design is changed in order to get the anchors outside the structure. The second study focuses on the electrodes deposited by metal evaporation on the trenches sidewalls through a shadow-mask. A complete mathematical model of the shapes and the thicknesses of the electrodes is detailed. These electrodes are mandatory to piezoelectrically detect the resonances

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Mayberry, Curtis Lee. "Interface circuits for readout and control of a micro-hemispherical resonating gyroscope." Thesis, Georgia Institute of Technology, 2014. http://hdl.handle.net/1853/53116.

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Gyroscopes are inertial sensors that measure the rate or angle of rotation. One of the most promising technologies for reaching a high-performance MEMS gyroscope has been development of the micro-hemispherical shell resonator. (μHSR) This thesis presents the electronic control and read-out interface that has been developed to turn the μHSR into a fully functional micro-hemispherical resonating gyroscope (μHRG) capable of measuring the rate of rotation. First, the μHSR was characterized, which both enabled the design of the interface and led to new insights into the linearity and feed-through characteristics of the μHSR. Then a detailed analysis of the rate mode interface including calculations and simulations was performed. This interface was then implemented on custom printed circuit boards for both the analog front-end and analog back-end, along with a custom on-board vacuum chamber and chassis to house the μHSR and interface electronics. Finally the performance of the rate mode gyroscope interface was characterized, showing a linear scale factor of 8.57 mv/deg/s, an angle random walk (ARW) of 34 deg/sqrt(hr) and a bias instability of 330 deg/hr.

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Dvořák, Jan. "Inerciální navigační jednotka." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2017. http://www.nusl.cz/ntk/nusl-263604.

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This thesis is focused on the design and realisation of inertial navigation unit INS. The unit is capable to measure, store and send data to a PC in real-time for a later offline processing. The first part of the thesis introduces the reader with the basic principles of accelerometers, gyroscopes and MEMS sensors. An introduction to coordinate systems and measuring errors is also included. The second and third part of the thesis deals with the analysis of the solution and the implementation of the INS unit. The fourth part of the document is dedicated to the software for the INS unit. This thesis concludes with explanation how the gathered data are processed.

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Carlsson, Tor. "Individualized Motion Monitoring by Wearable Sensor : Pre-impact fall detection using SVM and sensor fusion." Thesis, KTH, Skolan för teknik och hälsa (STH), 2015. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-171088.

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Among the elderly, falling represents a major threat to the individual health, and is considered as a major source of morbidity and mortality. In Sweden alone, three elderly are lost each day in accidents related to falling. The elderly who survive the fall are likely to be suffering from decreased quality of life. As the percentage of elderly increase in the population worldwide, the need for preventive methods and tools will grow drastically in order to deal with the increasing health-care costs. This report is the result of a conceptual study where an algorithm for individualized motion monitoring and pre-impact fall detection is developed. The algorithm learns the normal state of the wearer in order to detect anomalous events such as a fall. Furthermore, this report presents the requirements and issues related to the implementation of such a system. The result of the study is presented as a comparison between the individualized system and a more generalized fall detection system. The conclusion is that the presented type of algorithm is capable of learning the user behaviour and is able to detect a fall before the user impacts the ground, with a mean lead time of 301ms.
Bland äldre är risken för att drabbas av fallrelaterade skador överhängande, ofta med svåra fysiska skador och psykiska effekter som följd. Med en ökande andel äldre i befolkningsmängden beräknas även samhällets kostnad för vård att stiga. Genom aktiva samt preventiva åtgärder kan graden av personligt lidande och fallre- laterade samhällskostnader reduceras. Denna rapport är resultatet av en konceptuell studie där en algoritm för aktiv, individanpassad falldetektion utvecklats. Algoritmen lär sig användarens normala rörelsemönster och skall därefter särskilja dessa från onormala rörelsemönster. Rapporten beskriver de krav och frågeställningar som är relevanta för utvecklingen av ett sådant system. Vidare presenteras resultatet av studien i form av en jämförelse mellan ett individanpassat och generellt system. Resultatet av studien visar att algoritmen kan lära sig användarens vanliga rörelsemönster och därefer särskilja dessa från ett fall, i medelvärde 301ms innan användaren träffar marken.

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Ali, Heja, and Jayaravi Jedusan Sivarajah. "Gyrolösning för samtliga maskiner." Thesis, KTH, Hållbar produktionsutveckling (ML), 2020. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-276728.

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Detta examensarbete syftar till att hitta ett MEMS-gyroskop till W2000, en rengöringsrobot som finns hos Weda AB. Gyroskopet ska användas för att korrigera rengöringsrobotens kurs när den avviker från sin bestämda rutt. I dagsläget har inte W2000 någon sensor för att kunna rätta till sig. För att hitta det lämpligaste för rengöringsroboten så undersöktes ett antal MEMS-gyroskop genom att samla information och fakta samt kontakta olika företag för vägledning med vårt problem. Det MEMS-gyroskop som hittades och implementerades i W2000 var OMNI LPMS-CU2. Gyroskopet valdes på grund av att den hade samma utgångstyp och kommunikationsspråk som PLC:n som var inbyggd i W2000. Ett test utfördes för att se om det implementerade gyroskopet kunde kurskorrigera när den vreds från programmerade väg. Det blev ett lyckat resultat av testandet, W2000 kunde justera sig när den avvek. Examensarbetet föreslår rekommendationer och förbättringar för vidare arbete med det här projektet. Anledningen är att trots att det var ett tillfredställande resultat så var det bara det första steget för att göra W2000 optimal för att kunna använda gyroskopet och dess funktioner till fullo. Det måste göras ett antal mer tester och undersökningar på W2000 för att kunna implementera MEMS-gyroskopet i helhet.
The thesis work aims to find a MEMS gyroscope for the W2000, a cleaning robot available at Weda AB. The gyroscope will be used to correct the course of the cleaning robot when it deviates from its specified route. Currently the W2000 does not have a sensor to adjust. To find the most suitable gyroscope for the cleaning robot, several MEMS gyroscopes were examined by gathering information and contacting various companies for guidance with our situation. The MEMS gyroscope which was found and implemented in W2000 was OMNI LPMS-CU2. The gyroscope was chosen because it had the same output type and communication protocol as the PLC built into the W2000. A test was performed to see if the implemented gyroscope could correct the course as it was turned from programmed path. The result of testing was successful which shows that the W2000 was able to adjust when it deviated. The degree project proposes recommendations and improvements for further work on this project. Although it was a satisfying result, it was only the first step in making it functional. Several tests and investigations must be done on the W2000 in order to implement the MEMS gyroscope as a whole.to insert text

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Vágner, Martin. "Návrh a identifikace rozšířeného modelu MEMS gyroskopu." Doctoral thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2016. http://www.nusl.cz/ntk/nusl-234458.

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The thesis is aimed on measurement and modeling of MEMS gyroscopes based on input-output characteristics. The first part briefs the state of the art. The second part is dedicated to measurement methodology. Critical points and sources of uncertainty are discussed and evaluated using measurements or simulations. The last part shows key characteristics of MEMS gyroscopes based on the survey of a group of different sensor types. The results have revealed significant influence of supply voltage that causes bias drift of the gyroscope and bias drift of the internal temperature sensor. The error can be comparable to temperature drift; however, this effect is not addressed in the literature. The second observed effect is temperature dependency of angle random walk. In the last part, a general model of a MEMS gyroscope is rewritten to reflect observed effects. Moreover, the structure is selected to be easily extendable and the coefficients are expressed to allow a comparison of nominal parameters of different sensors.

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Dalal, Milap. "Low noise, low power interface circuits and systems for high frequency resonant micro-gyroscopes." Diss., Georgia Institute of Technology, 2012. http://hdl.handle.net/1853/44861.

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Today's state-of-the-art rate vibratory gyroscopes use a large proof mass that vibrates at a low resonance frequency (3-30 kHz), a condition that creates a performance tradeoff in which the gyroscope can either offer large bandwidth or high resolution, but not both. This tradeoff led to the development of the capacitive bulk acoustic wave (BAW) silicon disk gyroscope, a new class of micromachined rate vibratory gyroscopes operating in the frequency range of 1-10MHz with high device bandwidth and shock/vibration tolerance. By scaling the frequency, BAW gyroscopes can provide low mechanical noise without sacrificing the high bandwidth performance needed for most commercial applications. The drive loop of the BAW gyroscope can also be exploited as a timing device that can be integrated in existing commercial systems to provide competitive clock performance to the state-of-the-art using less area and power. This dissertation discusses the design and implementation of a CMOS ASIC architecture that interfaces with a high-Q, wide-bandwidth BAW gyroscope and the challenges associated with optimizing the noise performance to achieve navigation-grade levels of sensitivity as the frequency is scaled into the MHz regime. Mathematical models are derived to describe the operation of the sensor and are used to generate equivalent electrical circuit models of the gyroscope. A design strategy is then outlined for the ASIC to optimize the drive loop and sense channel for power and noise, and steps toward reducing this noise as the system is pushed to navigation-grade performance are presented that maintain optimum system power consumption. After analyzing the BAW gyroscope and identifying a strategy for developing the drive and sense interface circuitry, a complete fully-differential ASIC is designed in 0.18μm CMOS to interface with a bulk acoustic wave (BAW) disk gyroscope. As an oscillator, the gyroscope provides an uncompensated clock signal at ~9.64 MHz with a temperature sensitivity of -27 ppm/°C and phase noise of -104 dBc at 1 kHz from carrier. When the complete ASIC is interfaced with the gyroscope, the sensor shows a measured rate sensitivity of 1.15 mV/o/s with an open-loop bandwidth of 280 Hz and a bias instability of 0.095 o/s, suitable for the rate-grade performance commonly required for commercial and consumer electronics applications. The system is recorded to have a total power of 1.6 mW and a total area of 0.64 mm2. Following the design of the interface ASIC, this dissertation investigates in further detail the requirements for designing and optimizing charge pumps for capacitive MEMS devices. Basic charge pump design is outlined, followed by an overview of techniques that can be used to generate larger polarization voltages from the ASIC. Lastly, an alternate measurement technique for measuring the rotation rate of the gyroscope is discussed. This technique is based on the phase-shift modulation of the gyroscope output signal when the device is driven with two orthogonal signal inputs and can be easily modified to provide either linear scale factor measurement or a linear calibration curve that can be used to track and adjust the variation of the sensor scale factor over time.

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Hamada, Vladimír. "Automatická kalibrace inerciálních senzorů." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2014. http://www.nusl.cz/ntk/nusl-220910.

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The main aim of this thesis is to design and build automatic calibration system for inertial measurement sensors. The calibration system is intended to support the development of devices with inertial measurement sensors. The great emphasis is placed on the configurability of system and for this reason all calculations are realized by Matlab system, which is well known by engineers. There is also presented design of inertial measurement unit, which is used as a~model sensor unit for calibration system development.

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Piot, Adrien. "Etude de la fabrication et de la transduction d'un microgyromètre piézoélectrique tri-axial en GaAs." Thesis, Université Paris-Saclay (ComUE), 2018. http://www.theses.fr/2018SACLS059/document.

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Un microgyromètre 3 axes permet avec une structure unique de mesurer la vitesse de rotation d’un objet autour des trois axes de l’espace. Les micro-gyromètres 3 axes existants sont peu nombreux et typiquement résonants, fabriqués en technologie silicium par micro-usinage de surface, à transductions électro-statiques, et conçus pour des applications de fort volume ou la taille et le coût sont des critères majeurs. Dans cette thèse nous avons étudié la transduction et le procédé de fabrication d’un gyromètre résonant 3 axes à actionnement et détection piézoélectriques, fabriqué par micro-usinage de volume dans du GaAs semi-isolant, et dont les performances sont potentiellement très supérieures à l’état de l’art tout en conservant une taille et un coût limité. Ce microgyromètre nécessite une transduction piézoélectrique 3D et un routage des connexions électriques qui ont été modélisés et optimisés pour réduire les couplages parasites entre les modes de détection et le mode pilote. Un procédé original de fabrication collective du microgyromètre a été développé, modélisé et caractérisé. Ce procédé utilise notamment une gravure ionique réactive très profonde et traversante du GaAs dans un plasma BCl3-Cl2. Il est démontré pour la première fois qu’une gravure anisotrope traversante de tranchées de 450 μm de profondeur peut être réalisée grâce à une optimisation des paramètres de gravure et à l’utilisation d’un masque en résine. Un procédé original de dépôt et de délimitation d’électrodes Au/Cr sur les flancs verticaux d’une structure gravée par évaporation sous incidence oblique avec rotation du substrat et à travers un masque pochoir en film sec photosensible a aussi été étudié en détail. Une caractérisation fine de la structure cristalline, de la résistivité et des contraintes mécaniques avant, pendant et après recuit des couches Au/Cr poreuses évaporées sous incidence oblique a été menée. Des micro-gyromètres complets avec tout le système de transduction 3D ont été réalisés. Des premières caractérisations par vibrométrie optique hors du plan et dans le plan des gyromètres réalisés démontrent des résultats encourageants. Enfin, différentes voies d’amélioration de la conception et du procédé sont proposées
A 3 axis gyroscope allows, with a single mechanical structure, the measurement of rotation rates of an object around 3 perpendicular spatial axes. Existing 3 axis microgyroscopes are scarce and typically resonating, made in silicon technology by surface micromachining, use electrostatic transductions and are designed for high volume applications where size and cost are major characteristics. In this thesis we investigated the transduction and fabrication process of a resonating 3 axis microgyroscope having piezoelectric actuation and detection, made in semi-insulating GaAs by bulk micromachining, and with performances potentially much higher than state of the art while limiting the size and cost. This microgyroscope requires a 3D piezoelectric transduction and circuitry which were modelled and optimized to reduce cross-talks effects. An original batch fabrication process was developed, modelled and characterized. This process notably makes use of very deep through wafer reactive ion etching of GaAs in a BCl3-Cl2 plasma. It is demonstrated for the first time that a through wafer highly anisotropic etching of 450 μm deep trenches can be realized owing to etching parameters optimization and the use of a resist masking layer. An original deposition and patterning process of Au/Cr electrodes on the vertical walls of an etched structure by oblique evaporation on rotated substrate through a dry film shadow mask has also been investigated in details. A fine characterization of the crystallographic structure, resistivity and mechanical stress before, during and after annealing of Au/Cr films evaporated under oblique incidence has been performed. Full microgyroscopes with the whole 3D tranduction system were realized. Preliminary characterizations of realized gyroscopes by out-of-plane and in-plane optical vibrometry demonstrated promising results. Finally, different ways to improve the design and fabrication process are proposed

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Flamigni, Luca. "Analisi del Cammino in Pazienti Affetti da Idrocefalo Normoteso Attraverso IMU Indossabili." Master's thesis, Alma Mater Studiorum - Università di Bologna, 2016.

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L’idrocefalo normoteso idiopatico (iNPH) è una patologia che si sviluppa in età senile ed è caratterizzata da un insieme di sintomi generici tra cui disturbi della marcia che rendono difficoltosa la diagnosi. La presente attività di tesi mira ad identificare parametri motori specificamente alterati in pazienti affetti da iNPH rispetto a pazienti con sintomatologie simili, che siano quindi un possibile ausilio alla diagnosi differenziale oltre ad essere sensibili all’intervento terapeutico. Trenta pazienti hanno preso parte allo studio (15 idrocefali, 9 misti e 6 con altre patologie) e sono stati valutati pre, post 24h e post 72h rispetto ad un intervento di drenaggio di liquor cefalorachidiano (CSF tapping). Ciascun paziente, ad ogni valutazione ha eseguito due task motori standardizzati: l’instrumented 18m walk (i18W) e l’instrumented Timed Up and Go (iTUG). Il metodo proposto è stato in grado di estrapolare i parametri prefissati da tali prove e quindi fornire un report dettagliato del singolo paziente. Successivamente, l’analisi statistica eseguita tra pazienti appartenenti allo stesso gruppo (intra gruppo) e quella tra pazienti di gruppi diversi (inter gruppo) ha mostrato un complessivo trend di miglioramento delle performance per i soli soggetti con diagnosi di idrocefalo o con alcuni segni clinici caratteristici di idrocefalo. I pazienti affetti da altre patologie, come si era ipotizzato, non subiscono sostanziali cambiamenti a seguito dell’intervento.

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Szabó, Michal. "Vývojový prostředek pro lokalizaci." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2021. http://www.nusl.cz/ntk/nusl-442522.

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This document describes a device capable to determine geographical position thanks to its GNSS module and measure the change of movement with the help of an accelerometer and gyroscope. Outputs of these integrated circuits are combined, data are processed and fused thanks to a numerical integration and mathematical filters. Results are stored on a memory card. The whole development is described from a concept, through the making of the device and software algorithms to the testing of its functions.

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Poreddy, Surender Reddy. "Design and dynamic analysis of MEMS gyroscopes /." free to MU campus, to others for purchase, 2004. http://wwwlib.umi.com/cr/mo/fullcit?p1422956.

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Dreyer, Antonie Christoffel. "Modelling of MEMS vibratory gyroscopes utilizing phase detection." Thesis, Link to the online version, 2008. http://hdl.handle.net/10019/823.

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Sharma, Ajit. "CMOS systems and circuits for sub-degree per hour MEMS gyroscopes." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2007. http://hdl.handle.net/1853/26636.

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Thesis (Ph.D)--Electrical and Computer Engineering, Georgia Institute of Technology, 2008.
Committee Chair: Farrokh Ayazi; Committee Member: Jennifer Michaels; Committee Member: Levent Degertekin; Committee Member: Paul Hasler; Committee Member: W. Marshall Leach. Part of the SMARTech Electronic Thesis and Dissertation Collection.

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Roth, Grant Flowers George T. "Simulation of the effects of acoustic noise on MEMS gyroscopes." Auburn, Ala., 2009. http://hdl.handle.net/10415/1773.

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