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1
Bai, Bing, Cun Li, and Yulong Zhao. "Development of V-Shaped Beam on the Shock Resistance and Driving Frequency of Micro Quartz Tuning Forks Resonant Gyroscope." Micromachines 11, no. 11 (November 17, 2020): 1012. http://dx.doi.org/10.3390/mi11111012.
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The application of gyroscopes in harsh environments has always been a hot topic. As a high-quality material for manufacturing gyroscopes, quartz crystals need to be designed and optimized to meet the normal operation of gyroscopes in harsh environments. The Micro Electronics Mechanical System(MEMS) quartz tuning forks resonant gyroscope is one of the quartz gyroscopes. The elastic structure (V-shaped beam) between the anchor support point and tuning forks plays a vital role in the MEMS quartz tuning forks resonant gyroscope. This structure determines the natural frequency of the gyroscope, and more importantly, determines the shock resistance of the gyroscope structure. In this article, the MEMS quartz tuning forks gyroscope with different V-shaped beam thicknesses are simulated and analyzed by finite element analysis simulation software. After the modal analysis and shock simulation (the half-cycle sine shock pulse with amplitude of 1500 g (g is the acceleration of gravity) and duration of 2 ms in the six shock directions), the results show that when the beam thickness is 80 μm, the maximum stress is 94.721 MPa, which is less than the failure stress of quartz crystal. The gyroscope’s shock resistance is verified through shock testing.
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Li, Song, Xiao Feng He, Mei Ping Wu, and Xiao Ping Hu. "A Mitigation Method for Temperature Error Based on MEMS Gyroscopes Array." Applied Mechanics and Materials 742 (March 2015): 598–602. http://dx.doi.org/10.4028/www.scientific.net/amm.742.598.
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In order to decrease the temperature error of MEMS gyroscopes, a mitigation method based on gyroscope array was proposed. Angular rate of MEMS gyroscope fluctuates dramatically with the change of gyro temperature when gyroscope starts up. The temperature characteristic error of MEMS gyroscope has become one of the major errors in the practical application. A mitigation method for temperature error was presented based on MEMS gyroscope array utilizing high correlation of temperature errors in the same batch of MEMS gyroscopes. This method was designed to improve environmental adaptability and shorten the startup time of MEMS based inertial measurement unit. Experimental results showed that the method was feasible and effective.
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Patel, Chandradip, and Patrick McCluskey. "Performance of MEMS Vibratory Gyroscope under Harsh Environments." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2012, DPC (January 1, 2012): 000633–54. http://dx.doi.org/10.4071/2012dpc-ta34.
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Microelectromechanical systems (MEMS) gyroscope is a sensor that measures the rate of change in an angular position of an object. MEMS vibratory gyroscopes are increasingly used in applications ranging from consumer electronics to aerospace and are now one of the most common MEMS products after accelerometers.With advances in fabrication technologies, the low-cost MEMS gyroscope has opened up a wide variety of applications with environmental conditions ranging from medium to harsh. Despite their widespread use, the performance of MEMS gyroscopes in harsh environments is still under question. While some studies have been conducted to understand the effects of high mechanical shock, high frequency vibration and high frequency acoustic environment on the MEMS gyroscopes,the effects of sustained exposure to temperature combined withother harsh environment stresseshave not been well researched.Thus, it is necessary to quantify MEMS vibratory gyroscope performance under such conditions.This research reviews current harsh environment studies anddemonstrates the effects of an elevated temperature and sustained exposure to temperature combined humidity on the MEMS vibratory gyroscope. In order to quantify such effects, several tests have been performed. A short-term temperature effect on MEMS gyroscope was examined through temperature characterization test forfive thermal cycles at wider temperature ranges. A long-term temperature effect on the MEMS gyroscope was inspected through 500 thermal cycles; while, combined effects of temperature and humidity was studied through temperature humidity bias(THB) test and highly accelerated stress test (HAST).
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Ren, Ya Fei, Yun Wang Ge, and Xu Can Bai. "Research on Optimal Weight Choice of Multi-MEMS Gyroscope Data Fusion." Applied Mechanics and Materials 192 (July 2012): 351–55. http://dx.doi.org/10.4028/www.scientific.net/amm.192.351.
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The performance of MEMS gyroscope is crucial to its application, and the zero-bias stability is the main characteristic parameter of gyroscope performance. When fusing several outputs of similar MEMS gyroscope, we often use the weighted mean method. The weight has great influence on the fusing result. In this paper, the optimal weight choice used in the fusion of Multi-MEMS gyroscope data is derived based on multivariate numerical theory. Experimental results show that after simulating multi-MEMS gyroscope data fusion on the measurement result of several gyroscopes, the zero-bias stability will effectively improve.
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Patel, Chandradip, F. Patrick McCluskey, and David Lemus. "Temperature and Humidity Effects on MEMS Vibratory Gyroscope." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2011, DPC (January 1, 2011): 001361–90. http://dx.doi.org/10.4071/2011dpc-wa22.
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MEMS vibratory gyroscopes are increasingly used in applications ranging from consumer electronics to aerospace and are now one of the most common MEMS products after accelerometers. Despite their widespread use, the performance of MEMS gyroscopes in harsh environments is still under question. While some studies have been conducted to understand the temperature dependent performance of MEMS gyroscopes, the effects of sustained exposure to temperature combined with other harsh environment stresses have not been well researched. Thus, it is necessary to quantify MEMS vibratory gyroscope performance under such conditions. This paper will focus on the combined effects of temperature and humidity only. Performance of the MEMS vibratory gyroscope will be evaluated over time at high temperature and high humidity conditions by conducting an aging test on a COTS (commercial of the shelf) single axis MEMS vibratory gyroscope having an operating temperature range from −40°C to 80°C. The gyroscope sensor will be exposed to 60 °C and 90% RH (Relative humidity) for 500 hours. In-situ data will be monitored to track any shifts in device output. Any permanent changes in the output signal will be traced back to their fundamental root cause damage mechanism.
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Lian, Jiangkai, Jianhua Li, and Lixin Xu. "The Effect of Displacement Constraints on the Failure of MEMS Tuning Fork Gyroscopes under Shock Impact." Micromachines 10, no. 5 (May 24, 2019): 343. http://dx.doi.org/10.3390/mi10050343.
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Displacement constraints such as stops are widely used in engineering to improve the shock resistance of microelectromechanical system (MEMS) tuning fork gyroscopes. However, in practical applications, it has been found that unexpected breakage can occur on MEMS tuning fork gyroscopes with stops. In this paper, the effects of two displacement constraints on the failure mode of MEMS tuning fork gyroscopes are studied. The MEMS tuning fork gyroscope is simplified to a two-degree-of-freedom (2DOF) model, then finite element analysis (FEA) is used to study the effects of displacement constraint on the gyroscope. The analysis proves that even if the displacement constraint of direct contact with the weak connecting beam is not established, the equivalent stiffness of the gyroscope can be enhanced by limiting the displacement of the movable mass, thereby improving the shock resistance of the gyroscope. However, under the shock of high-g level, displacement constraint with insufficient spacing will cause multiple collisions of the small-stiffness oscillating frame and lead to an increase in stress. The cause of failure and shock resistance of a MEMS tuning fork gyroscope are verified by the shock test. By comparing the results, we can get a conclusion that is consistent with the theoretical analysis.
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Droogendijk, H., R. A. Brookhuis, M. J. de Boer, R. G. P. Sanders, and G. J. M. Krijnen. "Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology." Journal of The Royal Society Interface 11, no. 99 (October 6, 2014): 20140573. http://dx.doi.org/10.1098/rsif.2014.0573.
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Flies use so-called halteres to sense body rotation based on Coriolis forces for supporting equilibrium reflexes. Inspired by these halteres, a biomimetic gimbal-suspended gyroscope has been developed using microelectromechanical systems (MEMS) technology. Design rules for this type of gyroscope are derived, in which the haltere-inspired MEMS gyroscope is geared towards a large measurement bandwidth and a fast response, rather than towards a high responsivity. Measurements for the biomimetic gyroscope indicate a (drive mode) resonance frequency of about 550 Hz and a damping ratio of 0.9. Further, the theoretical performance of the fly's gyroscopic system and the developed MEMS haltere-based gyroscope is assessed and the potential of this MEMS gyroscope is discussed.
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Feng, Rui, Jiong Wang, Wei Qiao, Fu Wang, Ming Zhou, Xinglian Shang, Lei Yu, Liuhui Zhou, and Shuwen Guo. "Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal." Micromachines 12, no. 9 (September 16, 2021): 1115. http://dx.doi.org/10.3390/mi12091115.
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In high-reliability applications, the health condition of the MEMS gyroscope needs to be known in real time to ensure that the system does not fail due to the wrong output signal. Because the MEMS gyroscope self-test based on the principle of electrostatic force cannot be performed during the working state. We propose that by monitoring the quadrature error signal of the MEMS gyroscope in real time, an online self-test of the MEMS gyroscope can be realized. The correlation between the gyroscope’s quadrature error amplitude signal and the gyroscope scale factor and bias was theoretically analyzed. Based on the sixteen-sided cobweb-like MEMS gyroscope, the real-time built-in self-test (BIST) method of the MEMS gyroscope based on the quadrature error signal was verified. By artificially setting the control signal of the gyroscope to zero, we imitated several scenarios where the gyroscope malfunctioned. Moreover, a mechanical impact table was used to impact the gyroscope. After a 6000 g shock, the gyroscope scale factor, bias, and quadrature error amplitude changed by −1.02%, −5.76%, and −3.74%, respectively, compared to before the impact. The gyroscope failed after a 10,000 g impact, and the quadrature error amplitude changed −99.82% compared to before the impact. The experimental results show that, when the amplitude of the quadrature error signal seriously deviates from the original value, it can be determined that the gyroscope output signal is invalid.
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Shen, Qiang, Jieyu Liu, Huang Huang, Qi Wang, and Weiwei Qin. "Kurtosis-based IMM filter for multiple MEMS gyroscopes fusion." Sensor Review 37, no. 3 (June 19, 2017): 237–46. http://dx.doi.org/10.1108/sr-08-2016-0147.
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Purpose The purpose of this study is to explore a signal processing method to improve the angular rate accuracy of micro-electro-mechanical system (MEMS) gyroscope by combining numerous gyroscopes. Design/methodology/approach To improve the dynamic performance of the signal processing method, the interacting multiple model (IMM) can be applied to the fusion of gyroscope array. However, the standard IMM has constant Markov parameter, which may reduce the model switching speed. To overcome this problem, an adaptive IMM filter is developed based on the kurtosis of the gyroscope output, in which the transition probabilities are adjusted online by utilizing the dynamic information of the rate signal. Findings The experimental results indicate that the precision of the gyroscope array composed of six gyroscopes increases significantly and the kurtosis-based adaptive Markov parameter IMM filter (K-IMM) performs better than the baseline methods, especially under dynamic conditions. These experiments prove the validity of the proposed fusion method. Practical implications The proposed method can improve the accuracy of MEMS gyroscopes without breakthrough on hardware, which is necessary to extend their utility while not restricting the overwhelming advantages. Original/value A K-IMM algorithm is proposed in this paper, which is used to improve the angular rate accuracy of MEMS gyroscope by combining numerous gyroscopes.
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Jiang, Changhui, Shuai Chen, Yuwei Chen, Yuming Bo, Lin Han, Jun Guo, Ziyi Feng, and Hui Zhou. "Performance Analysis of a Deep Simple Recurrent Unit Recurrent Neural Network (SRU-RNN) in MEMS Gyroscope De-Noising." Sensors 18, no. 12 (December 17, 2018): 4471. http://dx.doi.org/10.3390/s18124471.
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Microelectromechanical System (MEMS) Inertial Measurement Unit (IMU) is popular in the community for constructing a navigation system, due to its small size and low power consumption. However, limited by the manufacturing technology, MEMS IMU experiences more complicated noises and errors. Thus, noise modeling and suppression is important for improving accuracy of the navigation system based on MEMS IMU. Motivated by this problem, in this paper, a deep learning method was introduced to MEMS gyroscope de-noising. Specifically, a recently popular Recurrent Neural Networks (RNN) variant Simple Recurrent Unit (SRU-RNN) was employed in MEMS gyroscope raw signals de-noising. A MEMS IMU MSI3200 from MT Microsystem Company was employed in the experiments for evaluating the proposed method. Following two problems were furtherly discussed and investigated: (1) the employed SRU with different training data length were compared to explore whether there was trade-off between the training data length and prediction performance; (2) Allan Variance was the most popular MEMS gyroscope analyzing method, and five basic parameters were employed to describe the performance of different grade MEMS gyroscope; among them, quantization noise, angle random walk, and bias instability were the major factors influencing the MEMS gyroscope accuracy, the compensation results of the three parameters for gyroscope were presented and compared. The results supported the following conclusions: (1) considering the computation brought from training dataset, the values of 500, 3000, and 3000 were individually sufficient for the three-axis gyroscopes to obtain a reliable and stable prediction performance; (2) among the parameters, the quantization noise, angle random walk, and bias instability performed 0.6%, 6.8%, and 12.5% improvement for X-axis gyroscope, 60.5%, 17.3%, and 34.1% improvement for Y-axis gyroscope, 11.3%, 22.7%, and 35.7% improvement for Z-axis gyroscope, and the corresponding attitude errors decreased by 19.2%, 82.1%, and 69.4%. The results surely demonstrated the effectiveness of the employed SRU in this application.
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Hyyti, Heikki, and Arto Visala. "A DCM Based Attitude Estimation Algorithm for Low-Cost MEMS IMUs." International Journal of Navigation and Observation 2015 (November 30, 2015): 1–18. http://dx.doi.org/10.1155/2015/503814.
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An attitude estimation algorithm is developed using an adaptive extended Kalman filter for low-cost microelectromechanical-system (MEMS) triaxial accelerometers and gyroscopes, that is, inertial measurement units (IMUs). Although these MEMS sensors are relatively cheap, they give more inaccurate measurements than conventional high-quality gyroscopes and accelerometers. To be able to use these low-cost MEMS sensors with precision in all situations, a novel attitude estimation algorithm is proposed for fusing triaxial gyroscope and accelerometer measurements. An extended Kalman filter is implemented to estimate attitude in direction cosine matrix (DCM) formation and to calibrate gyroscope biases online. We use a variable measurement covariance for acceleration measurements to ensure robustness against temporary nongravitational accelerations, which usually induce errors when estimating attitude with ordinary algorithms. The proposed algorithm enables accurate gyroscope online calibration by using only a triaxial gyroscope and accelerometer. It outperforms comparable state-of-the-art algorithms in those cases when there are either biases in the gyroscope measurements or large temporary nongravitational accelerations present. A low-cost, temperature-based calibration method is also discussed for initially calibrating gyroscope and acceleration sensors. An open source implementation of the algorithm is also available.
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Koršunovs, Aleksandrs, Valters Vēciņš, and Vilnis Juris Turkovs. "Distance Sensor and Wheel Encoder Sensor Fusion Method for Gyroscope Calibration." Applied Computer Systems 26, no. 2 (December 1, 2021): 71–79. http://dx.doi.org/10.2478/acss-2021-0009.
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Abstract MEMS gyroscopes are widely used as an alternative to the more expensive industrial IMUs. The instability of the lower cost MEMS gyroscopes creates a large demand for calibration algorithms. This paper provides an overview of existing calibration methods and describes the various types of errors found in gyroscope data. The proposed calibration method for gyroscope constants provides higher accuracy than datasheet constants. Furthermore, we show that using a different constant for each direction provides even higher accuracy.
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Wu, Junjie, Yufei Sun, Peng Guo, Lihui Feng, Yongbin Zhang, and Youqi Zhang. "Effect of Resonance Interference on MEMS Gyroscopes and Filtering Algorithm Elimination." Journal of Physics: Conference Series 2224, no. 1 (April 1, 2022): 012128. http://dx.doi.org/10.1088/1742-6596/2224/1/012128.
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Abstract The mechanical structure of MEMS gyroscope is a spring-mass-damper system, which is susceptible to interference near the resonant frequency. This work compared the interference effects of mechanical vibrations and high frequency sound waves on MEMS gyroscopes. Three MEMS gyroscopes ADXRS620 were interfered by vibrations and sound waves near the resonant frequency. The error outputs increased linearly with the increase of interference intensity. The maximum error output could reach 88.95 °/s, which seriously affect the normal operation of the gyroscope. The waveforms of gyroscope outputs under acoustic and vibration interference were almost coincident, which showed the similarity of acoustic and vibration interference. However, to produce the same effect on gyroscopes, the power required of vibration interference was much less than that of acoustic interference. Taking one of the gyroscopes for example, when the SPL of acoustic interference was up to 90 dB, the maximum error was only 3.37 °/s. But when the acceleration amplitude of vibration interference reached 0.050 g, the maximum error was 3.42 °/s. In addition, the effectiveness against vibration interference of the filtering algorithm based on orthogonal demodulation was verified by testing the self-developed gyroscope. Vibration interference could be reduced by 98.88% at most.
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Feng, Rui, An Ping Qiu, Qin Shi, and Yan Su. "A Theoretical and Experimental Study on Temperature Dependent Characteristics of Silicon MEMS Gyroscope Drive Mode." Advanced Materials Research 403-408 (November 2011): 4237–43. http://dx.doi.org/10.4028/www.scientific.net/amr.403-408.4237.
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The prototype of the silicon micro gyroscope is introduced. Temperature is the key factor that affects the performance of the gyroscope. In this paper, temperature dependent characteristics of silicon micro gyroscope drive mode is analyzed. The theoretical results show that temperature coefficient of the Young’s modulus is the most critical factor that affects temperature characteristics of the silicon micro gyroscope’s drive modal frequency and the frequency is proportional to the temperature. The results are verified by finite element simulations. The silicon micro gyroscopes are experimented in a high accurate thermostat. The drive modal frequency and temperature are measured and sampled. These experimental results show that the temperature coefficient of Young’s modulus is the key factor and the frequency is proportional to the temperature. The theoretic analyses are also validated by the experiments.
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Cui, Rang, Tiancheng Ma, Wenjie Zhang, Min Zhang, Longkang Chang, Ziyuan Wang, Jingzehua Xu, Wei Wei, and Huiliang Cao. "A New Dual-Mass MEMS Gyroscope Fault Diagnosis Platform." Micromachines 14, no. 6 (May 31, 2023): 1177. http://dx.doi.org/10.3390/mi14061177.
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MEMS gyroscopes are one of the core components of inertial navigation systems. The maintenance of high reliability is critical for ensuring the stable operation of the gyroscope. Considering the production cost of gyroscopes and the inconvenience of obtaining a fault dataset, in this study, a self-feedback development framework is proposed, in which a dualmass MEMS gyroscope fault diagnosis platform is designed based on MATLAB/Simulink simulation, data feature extraction, and classification prediction algorithm and real data feedback verification. The platform integrates the dualmass MEMS gyroscope Simulink structure model and the measurement and control system, and reserves various algorithm interfaces for users to independently program, which can effectively identify and classify seven kinds of signals of the gyroscope: normal, bias, blocking, drift, multiplicity, cycle and internal fault. After feature extraction, six algorithms, ELM, SVM, KNN, NB, NN, and DTA, were respectively used for classification prediction. The ELM and SVM algorithms had the best effect, and the accuracy of the test set was up to 92.86%. Finally, the ELM algorithm is used to verify the actual drift fault dataset, and all of them are successfully identified.
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Zhao, Wanliang, Yuxiang Cheng, Sihan Zhao, Xiaomao Hu, Yijie Rong, Jie Duan, and Jiawei Chen. "Navigation Grade MEMS IMU for A Satellite." Micromachines 12, no. 2 (February 4, 2021): 151. http://dx.doi.org/10.3390/mi12020151.
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This paper presents a navigation grade micro-electromechanical system (MEMS) inertial measurement unit (IMU) that was successfully applied for the first time in the Lobster-Eye X-ray Satellite in July 2020. A six-axis MEMS gyroscope redundant configuration is adopted in the unit to improve the performance through mutual calibration of a set of two-axis gyroscopes in the same direction. In the paper, a satisfactory precision of the gyroscope is achieved by customized and self-calibration gyroscopes whose parameters are adjusted at the expense of bandwidth and dynamics. According to the in-orbit measured data, the MEMS IMU provides an outstanding precision of better than 0.02 °/h (1σ) with excellent bias instability of 0.006 °/h and angle random walk (ARW) of around 0.003 °/h1/2. It is the highest precision MEMS IMU for commercial aerospace use ever publicly reported in the world to date.
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Baranov, Pavel, Tamara Nesterenko, Evgenii Barbin, Aleksej Koleda, Shuji Tanaka, Takashiro Tsukamoto, Ivan Kulinich, Dmitry Zykov, and Alexander Shelupanov. "A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames." Sensor Review 39, no. 5 (September 16, 2019): 670–81. http://dx.doi.org/10.1108/sr-05-2018-0133.
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Purpose Technological capabilities of manufacturing microelectromechanical system (MEMS) gyroscopes are still insufficient if compared to manufacturing high-efficient gyroscopes and accelerometers. This creates weaknesses in their mechanical structure and restrictions in the measurement accuracy, stability and reliability of MEMS gyroscopes and accelerometers. This paper aims to develop a new architectural solutions for optimization of MEMS gyroscopes and accelerometers and propose a multi-axis MEMS inertial module combining the functions of gyroscope and accelerometer. Design/methodology/approach The finite element modeling (FEM) and the modal analysis in FEM are used for sensing, drive and control electrode capacitances of the multi-axis MEMS inertial module with the proposed new architecture. The description is given to its step-by-step process of manufacturing. Algorithms are developed to detect its angular rates and linear acceleration along three Cartesian axes. Findings Experimental results are obtained for eigenfrequencies and capacitances of sensing, drive and control electrodes for 50 manufactured prototypes of the silicon electromechanical sensor (SES). For 42 SES prototypes, a good match is observed between the calculated and simulated capacitance values of comb electrodes. Thus, the mean-square deviation is not over 20 per cent. The maximum difference between the calculated and simulated eigenfrequencies in the drive channel of 11 SES prototypes is not over 3 per cent. The same difference is detected for eigenfrequencies in the first sensing channel of 17 SES prototypes. Originality/value This study shows a way to design and optimize the structure and theoretical background for the development of the MEMS inertial module combining the functions of gyroscope and accelerometer. The obtained results will improve and expand the manufacturing technology of MEMS gyroscopes and accelerometers.
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Liang, Xin Jian, and S. Q. Gao. "A MEMS Capacitive Gyroscope with Improved Reliability." Materials Science Forum 628-629 (August 2009): 341–46. http://dx.doi.org/10.4028/www.scientific.net/msf.628-629.341.
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The MEMS capacitive gyroscope has wide application foreground, the reliability of MEMS gyroscope is a key problem for its commercial application. With the development of the MEMS gyroscope industrialization, the reliability is underway to meet the need of market. In this paper, the adhesion failure modes of the MEMS gyroscope were presented. In addition, the adhesion failure analysis was illustrated. Finally, a lateral comb structure to improve the reliability of the MEMS gyroscope was presented. Test result indicates that the reliability of the MEMS capacitive gyroscope is improved.
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Zhao, Wanliang, Xiangyu Sun, Yijie Rong, Jie Duan, Jiawei Chen, Lijun Song, and Qinyi Pan. "Optimization on the Precision of the MEMS-Redundant IMU Based on Adhesive Joint Assembly." Mathematical Problems in Engineering 2020 (October 9, 2020): 1–9. http://dx.doi.org/10.1155/2020/8855141.
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In order to improve the precision of the spaceborne Inertial Measurement Unit (IMU), this paper proposes an adhesive joint assembly of the MEMS-redundant IMU. That is the application of special redundant installation of multiple MEMS gyroscopes in the IMU, which can improve the reliability of the MEMS-redundant IMU on the basis of reducing the weight of IMU. However, with the change of working environment, the traditional mechanical assembly of MEMS-redundant IMU will produce the large packaging stress and cause the deformation of MEMS gyroscope. This change will lead to changes in installation errors, scale factor errors, and bias errors of the MEMS gyroscope, resulting in a significant reduction in measurement precision of the MEMS-redundant IMU. Therefore, this paper selects the adhesive material that matches the thermal physical parameters of the material with the circuit board by analyzing the requirements of MEMS gyroscope on working environment at first. Then, by optimizing the bonding process, the installation error of each axis of MEMS-redundant IMU under different temperatures is better than the traditional mechanical connection mode. The experiment results of thermal vacuum show that the new assembly method can reduce the influence of temperature on the bias. Compared with the traditional method, the new assembly which is based on adhesive joint assembly can improve the measurement precision of MEMS-redundant IMU by an order of magnitude.
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Wang, Xinwang, and Huiliang Cao. "Improved VMD-ELM Algorithm for MEMS Gyroscope of Temperature Compensation Model Based on CNN-LSTM and PSO-SVM." Micromachines 13, no. 12 (November 24, 2022): 2056. http://dx.doi.org/10.3390/mi13122056.
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The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle of the MEMS gyroscope, which is achieved through Coriolis, is different from traditional gyroscopes. The MEMS gyroscope has been widely used in the fields of micro-inertia navigation systems, military, automotive, consumer electronics, mobile applications, robots, industrial, medical, and other fields in micro-inertia navigation systems because of its advantages of small volume, good performance, and low price. The material characteristics of the MEMS gyroscope is very significant for its data output, and the temperature determines its accuracy and limits its further application. In order to eliminate the effect of temperature, the MEMS gyroscope needs to be compensated to improve its accuracy. This study proposed an improved variational modal decomposition—extreme learning machine (VMD-ELM) algorithm based on convolutional neural networks—long short-term memory (CNN-LSTM) and particle swarm optimization—support vector machines (PSO-SVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and the gyro output signal with better accuracy is obtained. The VMD algorithm separates the gyro output signal and divides the gyro output signal into low-frequency signals, mid-frequency signals, and high-frequency signals according to the different signal frequencies. Once again, the PSO-SVM model is constructed by the mid-frequency temperature signal to find the temperature error. Finally, the signal is reconstructed through the ELM neural network algorithm, and then, the gyro output signal after noise is obtained. Experimental results show that, by using the improved method, the output of the MEMS gyroscope ranging from −40 to 60 °C reduced, and the temperature drift dramatically declined. For example, the factor of quantization noise (Q) reduced from 1.2419 × 10−4 to 1.0533 × 10−6, the factor of bias instability (B) reduced from 0.0087 to 1.8772 × 10−4, and the factor of random walk of angular velocity (N) reduced from 2.0978 × 10−5 to 1.4985 × 10−6. Furthermore, the output of the MEMS gyroscope ranging from 60 to −40 °C reduced. The factor of Q reduced from 2.9808 × 10−4 to 2.4430 × 10−6, the factor of B reduced from 0.0145 to 7.2426 × 10−4, and the factor of N reduced from 4.5072 × 10−5 to 1.0523 × 10−5. The improved algorithm can be adopted to denoise the output signal of the MEMS gyroscope to improve its accuracy.
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Ren, Ya Fei, Xu Can Bai, and Yun Wang Ge. "Research on Stochastic Modeling of MEMS Gyroscope." Applied Mechanics and Materials 192 (July 2012): 356–59. http://dx.doi.org/10.4028/www.scientific.net/amm.192.356.
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The majority of MEMS based gyroscopes currently under development operates in a vibratory mode and measures the angular rate instead of the absolute angle. The paper aims to establish the system dynamics models of the typical MEMS Gyro: Vibration Micro-gyroscope and analyzes the dynamic features. With different precision MEMS Gyros as the example, the detailed Times-series analysis are made of AR (6) and ARMA (2, 1) models, the impact of considering the estimation effective and the precision improved
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Liu, Jili, Mingrui Fu, Chao Meng, Jianpeng Li, Kai Li, Jun Hu, and Xiaojuan Chen. "Consideration of Thermo-Vacuum Stability of a MEMS Gyroscope for Space Applications." Sensors 20, no. 24 (December 15, 2020): 7172. http://dx.doi.org/10.3390/s20247172.
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Thermo-vacuum stability of the aerospace gyroscopes is one of the crucial issues in the harsh and remote environment of space. This paper reports a bias drift compensation algorithm for the MEMS (microelectromechanical systems) gyroscope with atmosphere package. This approach takes advantage of linear frequency–temperature dependence and linear amplitude–pressure dependence for self-compensation of the gyroscope bias drifts in real-time. The dependences were analyzed and evaluated by subjecting the gyroscope to a thermo-vacuum condition. The real-time self-compensation yielded a total bias error of 0.01°/s over a temperature range of 7–45 °C. A MEMS rate sensor was flown in space and the on-orbit data also verify the effectiveness of the approach.
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Lysenko, I. E., M. A. Denisenko, and A. S. Isaeva. "Design and Simulation of the Two-Axis Micromachined Angular Rate Sensor." Journal of Physics: Conference Series 2086, no. 1 (December 1, 2021): 012176. http://dx.doi.org/10.1088/1742-6596/2086/1/012176.
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Abstract Micromechanical inertia sensors - accelerometers, gyroscopes, multisensor modules and systems based on them - are widely used in navigation, for compensation of other instruments (accelerometers, inclinometers) or stabilization (gyroscopes). The paper presents the designed construction of a MEMS angular rate sensor with two sensitivity axes, topology of gyroscope is presented; modal and static analysis is performed using ANSYS CAD; simulation results of micromechanical gyroscope operation under the action of angular velocities using VHDL-AMS are presented.
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Wahyudi, Adhi Susanto, Wahyu Widada, and Sasongko P. Hadi. "Simultaneous Calibration for MEMS Gyroscopes of the Rocket IMU." Advanced Materials Research 896 (February 2014): 656–59. http://dx.doi.org/10.4028/www.scientific.net/amr.896.656.
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MEMS (Microelectromechanical System), as an advanced sensor technology, is low power, low cost, and small size. Gyroscope sensor produced with microelectromechanical technology is an angular rate sensor. IMU (Inertial Measurement Unit) sensor for rocket should have a very wide range of measurements. At the beginning of the motion, the rocket accelereation is very high, for which the rocket IMU requires a multisensor with different sensitivity. This paper presents the design of the rocket IMU and its calibration method for all MEMS gyroscopes. Calibration for each sensor is necessary including its varying characteristics. The calibration of the gyroscope sensors use three-axis motion simulator model ST 3176 with resolutions 0.00001 for all axes. Simultaneous calibration was mutually applied which require a short calibration time. The results show that root mean square errors (RMSE) of the calibrated gyroscope for all axes are under 2.5 %. Therefore, that the calibrated gyroscope can be used in the proposed real application.
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Feng, Rui, An Ping Qiu, Qin Shi, Xin Hua Zhu, Liang Yang, and Yan Su. "A Research on Temperature Dependent Characteristics of Quality Factor of Silicon MEMS Gyroscope." Advanced Materials Research 159 (December 2010): 399–405. http://dx.doi.org/10.4028/www.scientific.net/amr.159.399.
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The performance of silicon micro gyroscope affected by the quality factor of silicon micro gyroscope is introduced. The temperature characteristics of quality factor of silicon micro gyroscope are also presented. The theoretical analysis suggests that the air damping is the key factor determining the quality factor of silicon micro gyroscope and the quality factor determined by the air damping is in inverse proportion to the square root of temperature. According to the theory, the reciprocal of the quality factor of gyroscope can be approximately expressed as a linear equation with respect to temperature over a temperature range from 238K to 328K. Using the high speed data acquisition card to sample the decayed drive amplitude signal of gyroscope, the quality factor of gyroscope can be calculated from those sample data. The quality factors of gyroscopes at different temperature are experimented in a high accurate thermostat. The experimental results validate the approximate relationship between the quality factor of silicon micro gyroscope and the temperature.
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TSUKAMOTO, Takashiro. "MEMS Vibratory Gyroscope." Journal of The Institute of Electrical Engineers of Japan 139, no. 3 (March 1, 2019): 160–63. http://dx.doi.org/10.1541/ieejjournal.139.160.
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Xing, Li, Zhi Xiong, Jian-ye Liu, Wei Luo, and Ya-zhou Yue. "Offline Calibration for MEMS Gyroscope G-sensitivity Error Coefficients Based on the Newton Iteration and Least Square Methods." Journal of Navigation 71, no. 2 (October 11, 2017): 352–70. http://dx.doi.org/10.1017/s0373463317000625.
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With the improvement of the bias instability of Micro-Electromechanical Systems (MEMS) gyroscopes, the g-sensitivity error is gradually becoming one of the more important factors that affects the dynamic accuracy of a MEMS gyroscope. Hence there is a need for correcting the g-sensitivity error. However, the traditional calibration of g-sensitivity error uses a centrifuge. The calibration conditions are harsh, the process is complex and the cost is relatively high. In this paper, a fast and simple method of g-sensitivity error calibration for MEMS gyroscopes is proposed. With respect to the bias and random noise of a MEMS gyroscope, the g-sensitivity error magnitude is relatively small and it is simultaneously coupled with the Earth's rotation rate. Therefore, in order to correct the g-sensitivity error, this work models the calibration for g-sensitivity error coefficients, designs an (8+N)-position calibration scheme, and then proposes a fitting method for g-sensitivity error coefficients based on the Newton iteration and least squares methods. Multi-group calibration experiments designed on a MEMS Inertial Measurement Unit (MEMS IMU) product demonstrate that the proposed method can calibrate g-sensitivity error coefficients and correct the g-sensitivity error effectively and simply.
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Zhang, Han, Chen Zhang, Jing Chen, and Ang Li. "A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies." Micromachines 13, no. 8 (August 4, 2022): 1255. http://dx.doi.org/10.3390/mi13081255.
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The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving parts to extend the service life and significantly improve accuracy. The highest accuracy is achieved when the ideal mode-matching state is realized. Due to the processing limitation, this index cannot be achieved, and we can only explore ways to approach this index continuously. This paper’s results of error suppression for the symmetric MEMS gyroscope are initially classified into three categories. The first category mainly introduces the processing structure and working mode of the symmetrical gyroscope. The second is mechanical tuning from the structure and the third is electrostatic tuning from the peripheral control circuit. Based on the listed results, the paper compares the two tuning modes and analyzes their advantages and disadvantages. The fourth category is the tuning means incorporating the emerging algorithm. On this basis, the elements of improvement for future high-precision symmetric MEMS gyroscopes are envisioned to provide a part of the theoretical reference for the future development direction of sensors in inertial navigation.
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Ren, Bo, De Ming Zhang, and Huan Li. "MEMS Gyroscope Random Error Modeling and Filtering." Applied Mechanics and Materials 29-32 (August 2010): 829–34. http://dx.doi.org/10.4028/www.scientific.net/amm.29-32.829.
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MEMS gyroscope is a new type of inertial device with small size, low cost, light weight, high reliability, but less precise and random error is relatively large. In this paper, from a practical engineering application point of view, first, the MEMS gyroscope random errors is real-time average filtered. Then, based on the basic principle of time series analysis of random sequence , the first-order AR model of MEMS gyroscope random errors is established. Finally, based on Markov characteristic of kalman filtering algorithm, each output of the MEMS gyroscope is multiple real-time filtered. Through the specific data processing, MEMS gyroscope random errors reduced to about two per cent of the original.
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Ünsal Öztürk, Derya, and Aydan M. Erkmen. "Coriolis Vibratory MEMS Gyro Drive Axis Control with Proxy-Based Sliding Mode Controller." Micromachines 13, no. 3 (March 16, 2022): 446. http://dx.doi.org/10.3390/mi13030446.
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MEMS (micro electrical mechanical systems) gyroscopes are used to measure the angular rate in several applications. The performance of a MEMS gyroscope is dependent on more than one factor, such as mechanical imperfections, environmental condition-dependent parameter variations, and mechanical–thermal noises. These factors should be compensated to improve the performance of the MEMS gyroscope. To overcome this compensation problem, a closed-loop control system is one of the solutions. In this paper, a closed-loop control system is implemented. However, other than previously applied methods, a proxy-based sliding mode control approach is proposed, which is a novelty for the control of the MEMS gyroscope drive axis since, to the best of our knowledge, this method has not been applied to gyroscope control problems. Proxy-based sliding mode controllers do not suffer from the chattering phenomenon. Additionally, we do not need an exact system model to implement the control law. In particular, we are investigating, in this paper, the compatibility and performance of a proxy-based sliding mode controller for a closed-loop gyroscope implementation. We show that our proposed method provides robustness against model uncertainties and disturbances and is easy to implement. We also compare the performance of classical sliding mode controllers and proxy-based sliding mode controllers, which demonstrate the evident superiority of the proxy-based controller in our implementation results. Simulation results show that system error and gyroscope total error reduced by 49.52% and 12.03%, respectively, compared to the sliding mode controller. Simulation results are supported with the experimental data, and experimental results clearly demonstrate the superiority of the proxy-based sliding mode controller.
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McCluskey, Patrick, Chandradip Patel, and David Lemus. "Performance and Reliability of MEMS Gyroscopes and Packaging at High Temperatures." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2010, HITEC (January 1, 2010): 000359–66. http://dx.doi.org/10.4071/hitec-pmccluskey-tha22.
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Elevated temperatures can significantly affect the performance and reliability of MEMS gyroscope sensors. A MEMS vibrating resonant gyroscope measures angular velocity via a displacement measurement which can be on the order on nanometers. High sensitivity to small changes in displacement causes the MEMS Gyroscope sensor to be strongly affected by changes in temperature which can affect the displacement of the sensor due to thermal expansion and thermomechanical stresses. Analyzing the effect of temperature on MEMS gyroscope sensor measurements is essential in mission critical high temperature applications, such as inertial tracking of the movement of a fire fighter in a smoke filled indoor environment where GPS tracking is not possible. In this paper, we will discuss the development of the high temperature package for the tracking application, including the characterization of the temperature effects on the performance of a MEMS gyroscope. Both stationary and rotary tests were performed at room and at elevated temperatures on 10 individual single axis MEMS gyroscope sensors.
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Xing, Li, Xiaowei Tu, Weixing Qian, Zhi Chen, and Qinghua Yang. "Performance Enhancement Method for Angular Rate Measurement Based on Redundant MEMS IMUs." Micromachines 10, no. 8 (August 1, 2019): 514. http://dx.doi.org/10.3390/mi10080514.
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Aiming at the low-cost, wide-range, and accurate measurement requirement for Microelectromechanical System (MEMS) Inertial Measurement Unit (IMU) on a multi-rotor Unmanned Aerial Vehicle (UAV), the paper designs a heterogeneous parallel redundancy configuration scheme. In redundant MEMS IMUs, a high-cost and small-range MEMS gyroscope is combined with low-cost and large-range MEMS gyroscopes. Then, an adaptive data fusion method of redundant MEMS gyroscopes is proposed. By the designed experiments based on the simulation data and the sensor measurement data, the proposed method has been proved that it can effectively improve the angular rate measurement performance of the multi-rotor UAV and broaden the angular rate measurement range on the basis of saving the configuration cost and volume of the micro IMU.
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Chen, Liangqian, Tongqiao Miao, Qingsong Li, Peng Wang, Xuezhong Wu, Xiang Xi, and Dingbang Xiao. "A Temperature Drift Suppression Method of Mode-Matched MEMS Gyroscope Based on a Combination of Mode Reversal and Multiple Regression." Micromachines 13, no. 10 (September 20, 2022): 1557. http://dx.doi.org/10.3390/mi13101557.
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In recent years, the application prospects of high-precision MEMS gyroscopes have been shown to be very broad, but the large temperature drift of MEMS gyroscopes limits their application in complex temperature environments. In response to this, we propose a method that combines mode reversal and real-time multiple regression compensation to compensate for the temperature drift of gyroscope bias. This method has strong adaptability to the environment, low computational cost, the algorithm is online in real time, and the compensation effect is good. The experimental results show that under the temperature cycle of −20~20 °C and the temperature change rate of 4 °C/min, the method proposed in this paper can reduce the zero-bias stability from about 27.8°/h to 0.4527°/h, and the zero-bias variation is reduced from 65.88°/h to 1.43°/h. This method improves the zero-bias stability of the gyroscope 61-fold and the zero-bias variation 46-fold. Further, the method can effectively suppress the zero-bias drift caused by the heating of the gyroscope during the start-up phase of the gyroscope. The zero-bias stability of the gyroscope can reach 0.0697°/h within 45 min of starting up, and the zero-bias repeatability from 0 to 5 min after startup is reduced from 0.629°/h to 0.095°/h.
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Hosseini-Pishrobat, Mehran, and Jafar Keighobadi. "Force-balancing model predictive control of MEMS vibratory gyroscope sensor." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 230, no. 17 (August 8, 2016): 3055–65. http://dx.doi.org/10.1177/0954406215607899.
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In this paper, the design process of a new model predictive control (MPC) for force-balancing operation mode of a vibratory Micro-Electro-Mechanical-System (MEMS) gyroscope is investigated. Based on the internal model principle, a robust repetitive MPC is proposed to regulate the gyroscope’s drive mode output to a pre-specified periodic reference signal and to set the sense mode vibration to zero. Owing to the fast dynamics of the MEMS gyroscope, large prediction horizons are required to attain the closed-loop stability as well as tracking objectives. In order to alleviate the computational burden of online optimization within large prediction horizons, a set of orthonormal functions, named Laguerre functions are used to parameterize the system trajectories. Distinguishing features of the proposed control method, for MEMS gyroscope applications, are robustness to large parametric uncertainty, exogenous disturbances/noises and the capability to handle the hard input constraints within an optimal setting. Using a recursive least squares algorithm, on-line estimation of the unknown angular rate and the quadrature error of the force-balanced gyroscope is performed. Through computer simulations, the tracking accuracy of the proposed control method together with the convergence of the parameter estimation algorithm is assessed.
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Mei, Chuan Zhi, Lin Hua Piao, and Bao Li Zhang. "Study on Fluidic Gyroscope Linearity Compensation Method." Advanced Materials Research 756-759 (September 2013): 4221–24. http://dx.doi.org/10.4028/www.scientific.net/amr.756-759.4221.
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Based on the linearity of the MEMS thermal element fluidic gyroscope compensation. By analyzing the results of the linear characteristic of the fluidic gyroscope sensor output, comparator linearity compensation two implementation methods, the introduction of the microcontroller and the temperature sensor, to achieve the linearity compensation of the gyro output signal. The experiments show that: after compensation, the non-linearity of the fluidic gyroscope5%down to 0.5%, to-120°/s~+120°/s measurement range from-40°/s~+40°/s Fluidic gyroscope linearity compensation with low non-linearity, wide measuring range.
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Niu, Shao Hua, Shi Qiao Gao, Hai Peng Liu, and Lei Jin. "An ADRC Method for Vibrating MEMS Gyrosocope Drive." Advanced Materials Research 211-212 (February 2011): 264–69. http://dx.doi.org/10.4028/www.scientific.net/amr.211-212.264.
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The stability and accuracy of the drive mode are important for the performance of vibrating MEMS gyroscope. At present, the PI-like controller is always used in the control of the drive mode of vibrating MEMS gyroscope. The PI-like control has good effect on rejecting the literal disturbance, but it can’t reject the time-dependent disturbance well. The disturbance for the MEMS gyroscope is so uncertain that the stability and accuracy of the PI-like control for the gyro are comparatively low. In this paper, an ADRC method for vibrating MEMS gyroscope drive is introduced, and it is proved that this method can rapidly and stably control the MEMS gyro drive mode by simulation and comparing with the PI-like method.
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Zhu, Zhenshu, Yuming Bo, and Changhui Jiang. "A MEMS Gyroscope Noise Suppressing Method Using Neural Architecture Search Neural Network." Mathematical Problems in Engineering 2019 (November 21, 2019): 1–9. http://dx.doi.org/10.1155/2019/5491243.
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Inertial measurement unit (IMU) (an IMU usually contains three gyroscopes and accelerometers) is the key sensor to construct a self-contained inertial navigation system (INS). IMU manufactured through the Micromechanics Electronics Manufacturing System (MEMS) technology becomes more popular, due to its smaller column, lower cost, and gradually improved accuracy. However, limited by the manufacturing technology, the MEMS IMU raw measurement signals experience complicated noises, which cause the INS navigation solution errors diverge dramatically over time. For addressing this problem, an advanced Neural Architecture Search Recurrent Neural Network (NAS-RNN) was employed in the MEMS gyroscope noise suppressing. NAS-RNN was the recently invented artificial intelligence method for time series problems in data science community. Different from conventional method, NAS-RNN was able to search a more feasible architecture for selected application. In this paper, a popular MEMS IMU STIM300 was employed in the testing experiment, and the sampling frequency was 125 Hz. The experiment results showed that the NAS-RNN was effective for MEMS gyroscope denoising; the standard deviation values of denoised three-axis gyroscope measurements decreased by 44.0%, 34.1%, and 39.3%, respectively. Compared with the Long Short-Term Memory Recurrent Neural Network (LSTM-RNN), the NAS-RNN obtained further decreases by 28.6%, 3.7%, and 8.8% in standard deviation (STD) values of the signals. In addition, the attitude errors decreased by 26.5%, 20.8%, and 16.4% while substituting the LSTM-RNN with the NAS-RNN.
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Chang, Byung Su, Jang Gyu Lee, and Tae Sam Kang. "Design and Performance Test of Digital Rebalance Loop for MEMS Gyroscope." Key Engineering Materials 326-328 (December 2006): 249–52. http://dx.doi.org/10.4028/www.scientific.net/kem.326-328.249.
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In this paper, a digital rebalance loop for MEMS gyroscope is designed and its performance test is performed. First, the system model of MEMS gyroscope is established by dynamic analysis. Then, the digital rebalance loop is designed using modern control technique. The performance of the digital rebalance loop is compared with that of conventional PID rebalance loop. Through frequency response analysis using MATLAB and experiments using a real MEMS gyroscope and digital controller, which is realized using digital signal processor (DSP), it is confirmed that the controller improves the performance of the gyroscope.
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Ren, Chunhua, Dongning Guo, Lu Zhang, and Tianhe Wang. "Research on Nonlinear Compensation of the MEMS Gyroscope under Tiny Angular Velocity." Sensors 22, no. 17 (August 31, 2022): 6577. http://dx.doi.org/10.3390/s22176577.
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The Micro-Electro-Mechanical System (MEMS) gyroscope has been widely used in various fields, but the output of the MEMS gyroscope has strong nonlinearity, especially in the range of tiny angular velocity. This paper proposes an adaptive Fourier series compensation method (AFCM) based on the steepest descent method and Fourier series residual correction. The proposed method improves the Fourier series fitting method according to the output characteristics of the MEMS gyroscope under tiny angular velocity. Then, the optimal weights are solved by the steepest descent method, and finally the fitting residuals are corrected by Fourier series to further improve the compensation accuracy. In order to verify the effectiveness of the proposed method, the angle velocity component of the earth’s rotation is used as the input of the MEMS gyroscope to obtain the output of the MEMS gyroscope under tiny angular velocities. Experimental characterization resulted in an input angular velocity between −0.0036°/s and 0.0036°/s, compared with the original data, the polynomial compensation method, and the Fourier series compensation method, and the output nonlinearity of the MEMS gyroscope was reduced from 1150.87 ppm, 641.13 ppm, and 250.55 ppm to 68.89 ppm after AFCM compensation, respectively, which verifies the effectiveness and superiority of the proposed method.
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Guo, Ya Bei, Hui Yu, Wen Yi Lu, Xiao Feng Jin, and Jiang Bo Zou. "The Influence and Control of Encapsulation Moisture in MEMS Gyroscope." Key Engineering Materials 609-610 (April 2014): 875–78. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.875.
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MEMS gyroscope can be used in various field such as stabilization, controlling and guiding, navigation and so on. Bias variation over temperature is the key performance in MEMS gyroscope. The encapsulation moisture has great influence on the bias variation of MEMS gyroscope.By experiments on gas recharged, roast temperature, die attach adhesive and encapsulation shell, method to depress the encapsulation moisture is obtained. By DPA, the encapsulation moisture of sensing element encapsulated by the reformative method can be reduced to less than 1000 ppm, and the performance on temperature of MEMS gyroscope is improved.
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Ji, Chang Peng, Guang Hao Cheng, and Xue Mei Wang. "Research and Design of Digital Gyroscope Based on MEMS." Advanced Materials Research 341-342 (September 2011): 390–94. http://dx.doi.org/10.4028/www.scientific.net/amr.341-342.390.
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The characteristics of mechanical gyroscope are high technology, complicated structure and restrict precision. Basing on this aspect, MEMS gyroscopes and accelerometers are adopted as the inertial measurement unit in this paper. S3C2440 of the ARM9 series is taken as the micro processing chip to design a system of north seeking to complete measurement, transmission, and processing and so on. MEMS sensor can reduce the influence from external environment factors on the north-seeking accuracy. ARM chips can finish collecting data and processing effectively, while the system structure could be achieved easily.
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Wang, Xiaolei, Huiliang Cao, Yuzhao Jiao, Taishan Lou, Guoqiang Ding, Hongmei Zhao, and Xiaomin Duan. "Research on Novel Denoising Method of Variational Mode Decomposition in MEMS Gyroscope." Measurement Science Review 21, no. 1 (February 1, 2021): 19–24. http://dx.doi.org/10.2478/msr-2021-0003.
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Abstract The noise signal in the gyroscope is divided into four levels: sampling frequency level, device bandwidth frequency level, resonant frequency level, and carrier frequency level. In this paper, the signal in the dual-mass MEMS gyroscope is analyzed. Based on the variational mode decomposition (VMD) algorithm, a novel dual-mass MEMS gyroscope noise reduction method is proposed. The VMD method with different four-level center frequencies is used to process the original output signal of the MEMS gyroscope, and the results are analyzed by the Allan analysis of variance, which shows that the ARW of the gyroscope is increased from 1.998*10−1°/√h to 1.552*10−4°/√h, BS increased from 2.5261°/h to 0.0093°/h.
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Wang, Ling, Fu Xue Zhang, Xiao Hua Song, Xiao Fang Chen, Xiao Qing Cai, Yu Ying Zhang, and Xing Chun Shi. "Posture Demodulation Study on Carriers Measured by a Novel MEMS Gyroscope." Advanced Materials Research 718-720 (July 2013): 989–93. http://dx.doi.org/10.4028/www.scientific.net/amr.718-720.989.
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Non-driven structure silicon micromechanical gyroscope can sense rolling, pitching and yaw angular rate of the rotating body at the same time, which is suitable for rotating body gesture detection. But this characteristic is not suitable for non-rotating flight carrier. So this study uses micro motor to provide spin angular velocity for non-driven silicon micromechanical gyroscope, and to further generate gyroscopic effect which is sensitive to the attitude information, including rolling rate, yaw angular rate and pitch angular rate of low-speed rotating or non-rotating object. The study analyses the output signals based on simulation rotating object experiments of three-axis moving of silicon micromechanical gyroscope, the study uses phase based method to determine deflection polarity, and uses double accelerometer multiplication algorithm to demodulate the output signals of gyro. All above results provide a basis research results for further realize the goal of real-time demodulation of gyro signals when silicon micromechanical gyroscope is applied to the non-rotating and rotating flight carrier.
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Lu, Jun Jie, Jun Zhou, Xiao Dong Lu, and Xiao Jun Liu. "The Measurement Correction of MEMS Gyroscope Based Interlaced Kalman Filtering." Advanced Materials Research 301-303 (July 2011): 1083–88. http://dx.doi.org/10.4028/www.scientific.net/amr.301-303.1083.
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To correct the angular rate measurement error of MEMS gyroscopes for tactical missile, this paper proposes use of dynamics correspondence between the rudder control torque and the missile body attitude to build the state equation of system, which is more realistic and precise than the description for the actual missile attitude change with low-pass filter. In order to avoid errors in the linearization for nonlinear equations and reduce the filtering computation complexity, the Interlaced Kalman Filtering is applied to achieve the pseudo-linear state equation with coupling terms, which effectively reduce the computation complexity. Finally, the semi-physical simulation with the three-axis MEMS IMU and Electro-Servo verified that the algorithm significantly improved the angular rate measurement accuracy of the low-precision MEMS gyroscope.
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Lu, Cheng, and Juntao Fei. "Adaptive prescribed performance sliding mode control of MEMS gyroscope." Transactions of the Institute of Measurement and Control 40, no. 2 (July 29, 2016): 400–412. http://dx.doi.org/10.1177/0142331216658948.
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An adaptive prescribed performance sliding mode control (APPSMC) of Micro-Electro-Mechanical System gyroscopes is proposed for the trajectory tracking in the presence of parameter variations and external disturbances. Steady-state error, transient error and convergence rate are important performance indexes in gyroscope systems. However, these indexes have not been investigated and corresponding control methods are not investigated as well. The proposed APPSMC scheme can guarantee that the tracking error is strictly within a predefined performance bound and the convergence rate is no less than a predefined value. All the gyroscope parameters including the angular velocity can be correctly estimated by adaptive laws and the disturbance bound is estimated by a neural network estimator to alleviate the chattering problem. Simulation results demonstrate the effectiveness of the proposed adaptive prescribed performance sliding mode controller.
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Zhang, Huan, Weiping Chen, Liang Yin, and Qiang Fu. "An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving." Sensors 23, no. 5 (February 27, 2023): 2615. http://dx.doi.org/10.3390/s23052615.
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This paper introduces a digital interface application-specific integrated circuit (ASIC) for a micro-electromechanical systems (MEMS) vibratory gyroscope. The driving circuit of the interface ASIC uses an automatic gain circuit (AGC) module instead of a phase-locked loop to realize a self-excited vibration, which gives the gyroscope system good robustness. In order to realize the co-simulation of the mechanically sensitive structure and interface circuit of the gyroscope, the equivalent electrical model analysis and modeling of the mechanically sensitive structure of the gyro are carried out by Verilog-A. According to the design scheme of the MEMS gyroscope interface circuit, a system-level simulation model including mechanically sensitive structure and measurement and control circuit is established by SIMULINK. A digital-to-analog converter (ADC) is designed for the digital processing and temperature compensation of the angular velocity in the MEMS gyroscope digital circuit system. Using the positive and negative diode temperature characteristics, the function of the on-chip temperature sensor is realized, and the temperature compensation and zero bias correction are carried out simultaneously. The MEMS interface ASIC is designed using a standard 0.18 μM CMOS BCD process. The experimental results show that the signal-to-noise ratio (SNR) of sigma-delta (ΣΔ) ADC is 111.56 dB. The nonlinearity of the MEMS gyroscope system is 0.03% over the full-scale range.
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Pistorio, Francesca, Muhammad Mubasher Saleem, and Aurelio Somà. "A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation." Applied Sciences 11, no. 3 (January 26, 2021): 1129. http://dx.doi.org/10.3390/app11031129.
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The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered to be the enabling factor for the future development of smart sensing applications, mainly due to their small size, low power consumption and relatively low cost. This paper presents a new structurally and thermally stable design of a resonant mode-matched electrostatic z-axis MEMS gyroscope considering the foundry constraints of relatively low cost and commercially available silicon-on-insulator multi-user MEMS processes (SOIMUMPs) microfabrication process. The novelty of the proposed MEMS gyroscope design lies in the implementation of two separate masses for the drive and sense axis using a unique mechanical spring configuration that allows minimizing the cross-axis coupling between the drive and sense modes. For frequency mismatch compensation between the drive and sense modes due to foundry process uncertainties and gyroscope operating temperature variations, a comb-drive-based electrostatic tuning is implemented in the proposed design. The performance of the MEMS gyroscope design is verified through a detailed coupled-field electric-structural-thermal finite element method (FEM)-based analysis.
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Zhang, Jianing, Pinghua Li, Zhiyu Yu, Jinghao Liu, Xiaoyang Zhang, and Xuye Zhuang. "Adaptive Dynamic Analysis of MEMS Gyroscope Random Noise Based on PID-DAVAR." Micromachines 14, no. 4 (March 31, 2023): 792. http://dx.doi.org/10.3390/mi14040792.
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As a MEMS gyroscope is susceptible to environmental interference, its performance is degraded due to random noise. Accurate and rapid analysis of random noise of MEMS gyroscope is of great significance to improve the gyroscope’s performance. A PID-DAVAR adaptive algorithm is designed by combining the PID principle with DAVAR. It can adaptively adjust the length of the truncation window according to the dynamic characteristics of the gyroscope’s output signal. When the output signal fluctuates drastically, the length of the truncation window becomes smaller, and the mutation characteristics of the intercepted signal are analyzed detailed and thoroughly. When the output signal fluctuates steadily, the length of the truncation window becomes larger, and the intercepted signals are analyzed swiftly and roughly. The variable length of the truncation window ensures the confidence of the variance and shortens the data processing time without losing the signal characteristics. Experimental and simulation results show that the PID-DAVAR adaptive algorithm can shorten the data processing time by 50%. The tracking error of the noise coefficients of angular random walk, bias instability, and rate random walk is about 10% on average, and the minimum error is about 4%. It can accurately and promptly present the dynamic characteristics of the MEMS gyroscope’s random noise. The PID-DAVAR adaptive algorithm not only satisfies the requirement of variance confidence but also has a good signal-tracking ability.
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Sun, Boqian, Shunyue Wang, Yidong Tan, Yunfeng Liu, and Fengtian Han. "Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope." Sensors 18, no. 11 (November 12, 2018): 3901. http://dx.doi.org/10.3390/s18113901.
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Spin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. This paper presents the spin rate effects on performance indicators of a microelectromechanical systems (MEMS) gyroscope where a free-spinning rotor is electrostatically suspended in an evacuated vacuum cavity and functions as a dual-axis angular rate sensor. Theoretical models of the scale factor and measurement range of such a spinning-rotor gyroscope are derived. The experimental results indicate that the measured scale factors at different settings of the spin rate match well with the theoretical predication. In order to separate the disturbance component of the rotation control loop on the gyroscope output, a testing strategy is proposed by operating the gyroscope at different spin rates. Experimental results on a prototype gyroscope show that the squared drive voltage generated by the rotation control loop is approximately proportional to the noise of the gyroscope output. It was further investigated that an improved performance of such spinning-rotor gyroscopes can be achieved by operating the gyroscope rotor at an optimal spin rate.
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Cao, Hui Liang, Hong Sheng Li, Xu Lu, and Yun Fang Ni. "Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure." Key Engineering Materials 562-565 (July 2013): 280–85. http://dx.doi.org/10.4028/www.scientific.net/kem.562-565.280.
Full textAbstract:
The influence of temperature’s variation upon the resonant frequency and damping of the Micro-Electro- Mechanical-System (MEMS) gyroscope’s silicon structure in the vacuum package is investigated in this article. The gyroscope’s working principle and the dual-mass decoupled gyroscope structure are introduced, the drive and sense modes’ frequencies are analyzed. The ideal models of resonant frequency and damping are established and the dominate elements of impacting the resonant frequency and damping are Young Modulus, air viscosity coefficient and ambient pressure respectively. The experiments and the results proved that the frequency model works well, and the damping model only can simulate the tendency because of the air getter’s influence.