Relevant bibliographies by topics / MEMS microphones

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  1. Journal articles
  2. Dissertations / Theses
  3. Book chapters
  4. Conference papers
  5. Reports

Academic literature on the topic 'MEMS microphones'

Author: Grafiati
Published: 4 June 2021
Last updated: 26 July 2025

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Journal articles on the topic "MEMS microphones"

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Honzík, Petr, and Antonin Novak. "Reduction of nonlinear distortion in condenser microphones using a simple post-processing technique." Journal of the Acoustical Society of America 157, no. 2 (2025): 699–705. https://doi.org/10.1121/10.0035579.

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In this paper, an approach for effectively reducing nonlinear distortion in single-backplate condenser microphones is introduced, i.e., most microelectromechanical systems (MEMS) microphones, studio recording condenser microphones, and laboratory measurement microphones. This simple post-processing technique can be easily integrated on external hardware such as an analog circuit, microcontroller, audio codec, digital signal processing unit, or within the Application Specific Integrated Circuit chip in a case of MEMS microphones. It effectively reduces microphone distortion across its frequency
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Oatley, James, and Craig Storey. "Applicability of MEMS microphones for environmental sound level monitoring." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 263, no. 6 (2021): 875–85. http://dx.doi.org/10.3397/in-2021-1672.

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This paper explores the challenges associated with the integration of MEMS microphone technology into IEC 61672 classified or type-approved environmental sound level monitors. A comparison is drawn between MEMS microphones and electret condenser capsule microphones to highlight key performance differences within the technologies, and a basic integration method for both technologies is suggested. A review of the IEC 61672 and type-approval standards is conducted against the suggested integration method for a MEMS microphone; key shortcomings are reported and objectively reviewed. Development tr
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Hu, Siqi, Haitao Hu, Wei Xue, Dianyu Kang, and Jing Xiao. "Modeling and simulation study of acoustic response for dual-membrane capacitive MEMS microphone." Journal of Physics: Conference Series 2859, no. 1 (2024): 012007. http://dx.doi.org/10.1088/1742-6596/2859/1/012007.

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Abstract As the micro-electro-mechanical systems (MEMS) technology matures, MEMS sensors have found widespread applications in mechatronics, robotics, and voice control. The high stability, high integration, and radio frequency interference resistance of MEMS microphones have rapidly led to their adoption in these domains, displacing electret condenser microphones.This article focuses on modeling and analyzing dual-membrane capacitive MEMS microphone, utilizing an lumped equivalent circuit model to calculate the microphone’s acoustic frequency response. Furthermore, the article employs the fin
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Vennerod, Jakob, and Matthieu Lacolle. "Miniature optical MEMS microphone with 14dBA noise floor." Journal of the Acoustical Society of America 153, no. 3_supplement (2023): A144. http://dx.doi.org/10.1121/10.0018444.

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This paper explains the fundamental technology used to create an optical microphone transducer. In recent years, microelectromechanical system (MEMS) capacitive microphones have demonstrated improved performance. State-of-the-art capacitive MEMS microphones can achieve SNR in the order of 73 dBA (21 dBA noise floor) with overall dynamic range in the order of 101 dB. There are fundamental challenges to driving the performance of capacitive MEMS microphone technology in very small packages to new heights. Piezoelectric MEMS microphones have not demonstrated SNR performance >65 dBA. The ne
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Shah, Muhammad Ali, Ibrar Ali Shah, Duck-Gyu Lee, and Shin Hur. "Design Approaches of MEMS Microphones for Enhanced Performance." Journal of Sensors 2019 (March 6, 2019): 1–26. http://dx.doi.org/10.1155/2019/9294528.

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This paper reports a review about microelectromechanical system (MEMS) microphones. The focus of this review is to identify the issues in MEMS microphone designs and thoroughly discuss the state-of-the-art solutions that have been presented by the researchers to improve performance. Considerable research work has been carried out in capacitive MEMS microphones, and this field has attracted the research community because these designs have high sensitivity, flat frequency response, and low noise level. A detailed overview of the omnidirectional microphones used in the applications of an audio f
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Kuczynski, Jacek. "Developement of low-cost noise monitoring terminals (Nmt) based On MEMS microphones." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 265, no. 1 (2023): 6657–65. http://dx.doi.org/10.3397/in_2022_1004.

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The article shows and discusses examples of Noise Monitoring Terminals (NMT) with MEMS microphones meeting class 1 and class 2 in accordance with the IEC 61672-1. The rapid development of MEMS microphones (Micro Electro-Mechanical Systems) in last decade years made it possible to use them in noise measurement instrumentation meeting the IEC 61672-1 specifications. Fifteen years ago, the available MEMS microphones offered only the 60 dB dynamic range, whereas modern MEMS microphones offer 100 dB dynamics! Such a wide dynamic range of MEMS microphones, along with their improved repeatability and
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Stalder, Carly, and Stephane Leahy. "Comparative evaluation of omnidirectional and directional micro-electromechanical system microphone performance." Journal of the Acoustical Society of America 153, no. 3_supplement (2023): A107. http://dx.doi.org/10.1121/10.0018324.

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As the need for directionality becomes a key requirement in audio applications, directional microphones have begun to enter the micro-electromechanical system (MEMS) design and market space, and their performance is approaching that of top-of-the-line omnidirectional MEMS microphones. This presentation examines and compares the performance limitations for both types of MEMS microphones and suggests more comprehensive methods of characterization that allow the qualities of directional MEMS microphones to be fully captured. Mechanical thermal noise caused by Brownian motion of air particles, mea
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Yan, Ruixiang, Yucheng Ji, Anyuan Liu, Lei Wang, and Songsong Zhang. "Design and Fabrication of a Piezoelectric Bimorph Microphone with High Reliability and Dynamic Range Based on Al0.8Sc0.2N." Micromachines 16, no. 2 (2025): 186. https://doi.org/10.3390/mi16020186.

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With the development of technology, MEMS microphones, which are small-sized and highly uniform, have been applied extensively. To improve their reliability in extreme environment and overcome the constraints of traditional microphones, this article presents a piezoelectric bimorph MEMS microphone using Al0.8Sc0.2N. In the article, the high robustness of piezoelectric microphones and the reasons for choosing Al0.8Sc0.2N as piezoelectric materials are described. The sensitivity of an Al0.8Sc0.2N-based piezoelectric bimorph compared with the traditional structure are revealed through FEA. Subsequ
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Auliya, Rahmat Zaki, Muhamad Ramdzan Buyong, Burhanuddin Yeop Majlis, Mohd Farhanulhakim Mohd. Razip Wee, and Poh Choon Ooi. "Characterization of embedded membrane in corrugated silicon microphones for high-frequency resonance applications." Microelectronics International 36, no. 4 (2019): 137–42. http://dx.doi.org/10.1108/mi-02-2019-0010.

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Purpose The purpose of this paper is to propose an alternative approach to improve the performance of microelectromechanical systems (MEMSs) silicon (Si) condenser microphones in terms of operating frequency and sensitivity through the introduction of a secondary material with a contrast of mechanical properties in the corrugated membrane. Design/methodology/approach Finite element method from COMSOL is used to analyze the MEMS microphones performance consisting of solid mechanic, electrostatic and thermoviscous acoustic interfaces. Hence, the simulated results could described the physical mec
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Riccardi, Peter J., Zane T. Rusk, John A. Case, Heui Young Park, Eric Rokni, and Stephen C. Thompson. "Low-cost measurement-grade microphone powered by MEMS elements and preamplifier housed in 3D printed enclosure." Journal of the Acoustical Society of America 152, no. 4 (2022): A50. http://dx.doi.org/10.1121/10.0015505.

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Acoustic measurement-grade microphones with flat frequency responses and adequate sensitivities are a necessary tool for many acousticians and vibroacoustic engineers. These microphones can often cost hundreds, if not thousands, of dollars. With the availability of microelectromechanical systems (MEMs) microphone elements and 3D printers, it is possible to construct drop-in replacements of these measurement grade microphones at the fraction of the cost. A MEMs system was designed with four elements in parallel to reduce uncorrelated noise. The system runs rail-to-rail on a 3.3VDC, Integrated E
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Dissertations / Theses on the topic "MEMS microphones"

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Zwyssig, Erich Paul. "Speech processing using digital MEMS microphones." Thesis, University of Edinburgh, 2013. http://hdl.handle.net/1842/8287.

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The last few years have seen the start of a unique change in microphones for consumer devices such as smartphones or tablets. Almost all analogue capacitive microphones are being replaced by digital silicon microphones or MEMS microphones. MEMS microphones perform differently to conventional analogue microphones. Their greatest disadvantage is significantly increased self-noise or decreased SNR, while their most significant benefits are ease of design and manufacturing and improved sensitivity matching. This thesis presents research on speech processing, comparing conventional analogue microph
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Garcia, Caesar Theodore. "Packaging and Characterization of MEMS Optical Microphones." Thesis, Georgia Institute of Technology, 2007. http://hdl.handle.net/1853/19713.

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Miniature microphones have numerous applications but often exhibit poor performance which can be attributed to the challenges associated with capacitive detection at small size scales. Optical detection methods are able to overcome some of these challenges although miniaturized integration of these optical systems has not yet been demonstrated. An optical interferometric detection scheme is presented and is implemented using micro-scale optoelectronic devices which are used primarily in fiber optic data transmission. Using basic diffraction theory, a model is developed and used to optimize
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Dieme, Robert. "Characterization of noise in MEMS piezoresistive microphones." [Gainesville, Fla.] : University of Florida, 2005. http://purl.fcla.edu/fcla/etd/UFE0010508.

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Hsieh, Wen H. Tai Yu-Chong. "MEMS thin film teflon electret condenser microphones /." Diss., Pasadena, Calif. : California Institute of Technology, 2001. http://resolver.caltech.edu/CaltechETD:etd-08302005-135533.

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Jawed, Syed Arsalan. "CMOS Readout Interfaces for MEMS Capacitive Microphones." Doctoral thesis, Università degli studi di Trento, 2009. https://hdl.handle.net/11572/368656.

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This dissertation demonstrates the feasibility of three novel low-power and low-noise schemes for the readout interfaces of MEMS Capacitive Microphones (MCM) by presenting their detailed design descriptions and measurement results as application-specific ICs (ASIC) in CMOS technology developed to exploit their application scope in consumer electronics and hearing aids. MCMs are a new generation of acoustic sensors, which offer a significant scope to improve miniaturization, integration and cost of the acoustic systems by leveraging the MEMS technology. Electret-Condenser-Microphones (ECM) are
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Jawed, Syed Arsalan. "CMOS Readout Interfaces for MEMS Capacitive Microphones." Doctoral thesis, University of Trento, 2009. http://eprints-phd.biblio.unitn.it/82/1/thesis_mems_microphone_readout.pdf.

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This dissertation demonstrates the feasibility of three novel low-power and low-noise schemes for the readout interfaces of MEMS Capacitive Microphones (MCM) by presenting their detailed design descriptions and measurement results as application-specific ICs (ASIC) in CMOS technology developed to exploit their application scope in consumer electronics and hearing aids. MCMs are a new generation of acoustic sensors, which offer a significant scope to improve miniaturization, integration and cost of the acoustic systems by leveraging the MEMS technology. Electret-Condenser-Microphones (ECM) are
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Chatzopoulos, Dimitrios. "Modeling the performance of MEMS based directional microphones." Thesis, Monterey, Calif. : Naval Postgraduate School, 2008. http://edocs.nps.edu/npspubs/scholarly/theses/2008/Dec/08Dec%5FChatzopoulos.pdf.

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Thesis (M.S. in Engineering Acoustics)--Naval Postgraduate School, December 2008.<br>Thesis Advisor(s): Kapolka, Daphne ; Karunasiri, Gamani. "December 2008." Description based on title screen as viewed on January 30, 2009. Includes bibliographical references (p. 97-98). Also available in print.
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Dagher, Samer. "Design of a MEMS microphone based on a new device architecture." Thesis, Le Mans, 2020. http://www.theses.fr/2020LEMA1028.

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Durant les dernières années, les microphones MEMS (microsystèmes électromécaniques) sont devenus des composants essentiels dans un large éventail d’appareils électroniques grand public. La demande de microphones haute performance a été propulsée d’une part par la nécessité d’améliorer des champs d’applications existants, comme la prise de voix pour les appels téléphoniques, et d’autre part par le développement de nouvelles applications, comme l’adoption massive des systèmes de reconnaissance vocale. Cette demande constante de meilleurs performances a poussé l’optimisation de la technologie act
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Jeelani, Mohammad Kamran. "Integration and characterization of micromachined optical microphones." Thesis, Atlanta, Ga. : Georgia Institute of Technology, 2009. http://hdl.handle.net/1853/31759.

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Thesis (M. S.)--Mechanical Engineering, Georgia Institute of Technology, 2010.<br>Committee Chair: Degertekin, F. Levent; Committee Member: Baldwin, Daniel; Committee Member: Hesketh, Peter. Part of the SMARTech Electronic Thesis and Dissertation Collection.
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Bicen, Baris. "Micromachined diffraction based optical microphones and intensity probes with electrostatic force feedback." Diss., Georgia Institute of Technology, 2010. http://hdl.handle.net/1853/41065.

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Measuring acoustic pressure gradients is critical in many applications such as directional microphones for hearing aids and sound intensity probes. This measurement is especially challenging with decreasing microphone size, which reduces the sensitivity due to small spacing between the pressure ports. Novel, micromachined biomimetic microphone diaphragms are shown to provide high sensitivity to pressure gradients on one side of the diaphragm with low thermal mechanical noise. These structures have a dominant mode shape with see-saw like motion in the audio band, responding to pressure gradient
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Book chapters on the topic "MEMS microphones"

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Hall, Neal A. "Electrostatic MEMS Microphones." In Encyclopedia of Nanotechnology. Springer Netherlands, 2016. http://dx.doi.org/10.1007/978-94-017-9780-1_317.

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Auffan, Mélanie, Catherine Santaella, Alain Thiéry, et al. "Electrostatic MEMS Microphones." In Encyclopedia of Nanotechnology. Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_317.

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Malcovati, Piero, Marco Grassi, and Andrea Baschirotto. "Interface Circuits for MEMS Microphones." In Nyquist AD Converters, Sensor Interfaces, and Robustness. Springer New York, 2012. http://dx.doi.org/10.1007/978-1-4614-4587-6_9.

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Sant, Luca, Richard Gaggl, Elmar Bach, et al. "MEMS Microphones: Concept and Design for Mobile Applications." In Low-Power Analog Techniques, Sensors for Mobile Devices, and Energy Efficient Amplifiers. Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-319-97870-3_8.

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Celli, Roberto, Matteo Zauli, Federica Zonzini, et al. "Improving Auscultation in Wearable Health Devices Integrating MEMS Microphones and Accelerometers." In Lecture Notes in Electrical Engineering. Springer Nature Switzerland, 2025. https://doi.org/10.1007/978-3-031-84100-2_11.

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Szwoch, Grzegorz, and Józef Kotus. "Detection of the Incoming Sound Direction Employing MEMS Microphones and the DSP." In Communications in Computer and Information Science. Springer International Publishing, 2017. http://dx.doi.org/10.1007/978-3-319-69911-0_15.

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Grassi, M., F. Conso, G. Rocca, P. Malcovati, and A. Baschirotto. "Re-configurable Switched Capacitor Sigma-Delta Modulator for MEMS Microphones in Mobiles." In Lecture Notes in Electrical Engineering. Springer International Publishing, 2017. http://dx.doi.org/10.1007/978-3-319-66802-4_2.

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Robles, H. V., A. V. Molina, L. J. Martinez, J. A. Aldonate, and R. Vergara. "Tympanic Tinnitus Acoustics Signal Detector Using MEMS Microphones Detector de señales acústicas de Tinnitus Timpánicos usando micrófonos MEMS." In VI Latin American Congress on Biomedical Engineering CLAIB 2014, Paraná, Argentina 29, 30 & 31 October 2014. Springer International Publishing, 2015. http://dx.doi.org/10.1007/978-3-319-13117-7_35.

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Juarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, et al. "MEMS Microphone." In Encyclopedia of Nanotechnology. Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_100399.

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Juarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, et al. "MEMS Capacitive Microphone." In Encyclopedia of Nanotechnology. Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_100395.

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Conference papers on the topic "MEMS microphones"

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Li, Jie, Mingchao Sun, Boyun Zhang, et al. "Effects of Acoustic Leakage on MEMS Directional Microphones." In 2024 IEEE SENSORS. IEEE, 2024. https://doi.org/10.1109/sensors60989.2024.10784848.

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Razgulyaeva, Nadezhda G., Alexander I. Malkin, and Victor A. Chechetkin. "Studying MEMS and Electrete microphones. Comparison and Measurement." In 2025 IEEE Ural-Siberian Conference on Biomedical Engineering, Radioelectronics and Information Technology (USBEREIT). IEEE, 2025. https://doi.org/10.1109/usbereit65494.2025.11054240.

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Hsu, Che-Yu, Po-Han Chen, Ting-Yi Chen, et al. "Performance Evaluation of MEMS Vibration Sensors for Throat Microphones." In 2024 IEEE SENSORS. IEEE, 2024. https://doi.org/10.1109/sensors60989.2024.10785086.

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P, Roselin Sneha, Ramya S, Praveen Kumar S, and Aravind T. "Applications of MEMS Microphones in Smart Hearing Aids and Audio Devices." In 2025 8th International Conference on Trends in Electronics and Informatics (ICOEI). IEEE, 2025. https://doi.org/10.1109/icoei65986.2025.11013575.

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Doyon-D'Amour, Francis, Carly Stalder, Timothy Hodges, et al. "Characterization of Vibration Sensitivity of One-Port and Two-Port MEMS Microphones." In 2024 IEEE SENSORS. IEEE, 2024. https://doi.org/10.1109/sensors60989.2024.10784820.

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Cheng, Chin-Yi, Ilham Saputra, Chih-Wei Lin, and Shi-Chen En. "Development of Dynamic Platform with MEMS Microphones Array Embedded for UAV Detection and Tracking." In 2024 International Conference on Consumer Electronics - Taiwan (ICCE-Taiwan). IEEE, 2024. http://dx.doi.org/10.1109/icce-taiwan62264.2024.10674652.

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Lall, Pradeep, Amrit Abrol, and David Locker. "Effects of Sustained Exposure to Temperature and Humidity on the Reliability and Performance of MEMS Microphone." In ASME 2017 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems collocated with the ASME 2017 Conference on Information Storage and Processing Systems. American Society of Mechanical Engineers, 2017. http://dx.doi.org/10.1115/ipack2017-74252.

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MEMS microphones are extensively used in many applications that require reliability, small size, and high sound quality. For harsh environment reliability data MEMS microphones need to be monitored under conditions mimicking their areas of applications. MEMS microphones have an opening/sound port in order to interact with the environment, therefore cannot be sealed completely since the sensing mechanism requires interaction between sound waves and the sensing element. Little to no information exists on reliability data for MEMS microphones under low/high temperature operating life and temperat
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Feiertag, Gregor, Matthias Winter, and Anton Leidl. "Packaging of MEMS microphones." In SPIE Europe Microtechnologies for the New Millennium, edited by Ulrich Schmid. SPIE, 2009. http://dx.doi.org/10.1117/12.821186.

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Littrell, R., and R. Gagnon. "PIEZOELECTRIC MEMS MICROPHONES NOISE SOURCES." In 2016 Solid-State, Actuators, and Microsystems Workshop. Transducer Research Foundation, 2016. http://dx.doi.org/10.31438/trf.hh2016.69.

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Djurek, Ivan, Tomislav Grubesa, and Niksa Orlic. "Measurements of analog MEMS microphones." In 2019 2nd International Colloquium on Smart Grid Metrology (SMAGRIMET). IEEE, 2019. http://dx.doi.org/10.23919/smagrimet.2019.8720378.

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Reports on the topic "MEMS microphones"

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McClelland, John F., and Michael Pedersen. Capacitive MEMS Microphone Optimized Research. Defense Technical Information Center, 2005. http://dx.doi.org/10.21236/ada433689.

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Polcawich, Ronald G. A Piezoelectric MEMS Microphone Based on Lead Zirconate Titanate (PZT) Thin Films. Defense Technical Information Center, 2004. http://dx.doi.org/10.21236/ada429041.

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Martin, David. Compliant membranes for the development of MEMS dual-backplate capacitive microphone using the SUMMiT V fabrication process. Office of Scientific and Technical Information (OSTI), 2005. http://dx.doi.org/10.2172/923073.

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