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Dissertations / Theses on the topic 'MEMS microphones'

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Published: 4 June 2021

Last updated: 26 July 2025

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1

Zwyssig, Erich Paul. "Speech processing using digital MEMS microphones." Thesis, University of Edinburgh, 2013. http://hdl.handle.net/1842/8287.

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The last few years have seen the start of a unique change in microphones for consumer devices such as smartphones or tablets. Almost all analogue capacitive microphones are being replaced by digital silicon microphones or MEMS microphones. MEMS microphones perform differently to conventional analogue microphones. Their greatest disadvantage is significantly increased self-noise or decreased SNR, while their most significant benefits are ease of design and manufacturing and improved sensitivity matching. This thesis presents research on speech processing, comparing conventional analogue microph

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2

Garcia, Caesar Theodore. "Packaging and Characterization of MEMS Optical Microphones." Thesis, Georgia Institute of Technology, 2007. http://hdl.handle.net/1853/19713.

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Miniature microphones have numerous applications but often exhibit poor performance which can be attributed to the challenges associated with capacitive detection at small size scales. Optical detection methods are able to overcome some of these challenges although miniaturized integration of these optical systems has not yet been demonstrated. An optical interferometric detection scheme is presented and is implemented using micro-scale optoelectronic devices which are used primarily in fiber optic data transmission. Using basic diffraction theory, a model is developed and used to optimize

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3

Dieme, Robert. "Characterization of noise in MEMS piezoresistive microphones." [Gainesville, Fla.] : University of Florida, 2005. http://purl.fcla.edu/fcla/etd/UFE0010508.

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4

Hsieh, Wen H. Tai Yu-Chong. "MEMS thin film teflon electret condenser microphones /." Diss., Pasadena, Calif. : California Institute of Technology, 2001. http://resolver.caltech.edu/CaltechETD:etd-08302005-135533.

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5

Jawed, Syed Arsalan. "CMOS Readout Interfaces for MEMS Capacitive Microphones." Doctoral thesis, Università degli studi di Trento, 2009. https://hdl.handle.net/11572/368656.

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This dissertation demonstrates the feasibility of three novel low-power and low-noise schemes for the readout interfaces of MEMS Capacitive Microphones (MCM) by presenting their detailed design descriptions and measurement results as application-specific ICs (ASIC) in CMOS technology developed to exploit their application scope in consumer electronics and hearing aids. MCMs are a new generation of acoustic sensors, which offer a significant scope to improve miniaturization, integration and cost of the acoustic systems by leveraging the MEMS technology. Electret-Condenser-Microphones (ECM) are

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6

Jawed, Syed Arsalan. "CMOS Readout Interfaces for MEMS Capacitive Microphones." Doctoral thesis, University of Trento, 2009. http://eprints-phd.biblio.unitn.it/82/1/thesis_mems_microphone_readout.pdf.

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This dissertation demonstrates the feasibility of three novel low-power and low-noise schemes for the readout interfaces of MEMS Capacitive Microphones (MCM) by presenting their detailed design descriptions and measurement results as application-specific ICs (ASIC) in CMOS technology developed to exploit their application scope in consumer electronics and hearing aids. MCMs are a new generation of acoustic sensors, which offer a significant scope to improve miniaturization, integration and cost of the acoustic systems by leveraging the MEMS technology. Electret-Condenser-Microphones (ECM) are

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7

Chatzopoulos, Dimitrios. "Modeling the performance of MEMS based directional microphones." Thesis, Monterey, Calif. : Naval Postgraduate School, 2008. http://edocs.nps.edu/npspubs/scholarly/theses/2008/Dec/08Dec%5FChatzopoulos.pdf.

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Thesis (M.S. in Engineering Acoustics)--Naval Postgraduate School, December 2008.<br>Thesis Advisor(s): Kapolka, Daphne ; Karunasiri, Gamani. "December 2008." Description based on title screen as viewed on January 30, 2009. Includes bibliographical references (p. 97-98). Also available in print.

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8

Dagher, Samer. "Design of a MEMS microphone based on a new device architecture." Thesis, Le Mans, 2020. http://www.theses.fr/2020LEMA1028.

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Durant les dernières années, les microphones MEMS (microsystèmes électromécaniques) sont devenus des composants essentiels dans un large éventail d’appareils électroniques grand public. La demande de microphones haute performance a été propulsée d’une part par la nécessité d’améliorer des champs d’applications existants, comme la prise de voix pour les appels téléphoniques, et d’autre part par le développement de nouvelles applications, comme l’adoption massive des systèmes de reconnaissance vocale. Cette demande constante de meilleurs performances a poussé l’optimisation de la technologie act

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9

Jeelani, Mohammad Kamran. "Integration and characterization of micromachined optical microphones." Thesis, Atlanta, Ga. : Georgia Institute of Technology, 2009. http://hdl.handle.net/1853/31759.

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Thesis (M. S.)--Mechanical Engineering, Georgia Institute of Technology, 2010.<br>Committee Chair: Degertekin, F. Levent; Committee Member: Baldwin, Daniel; Committee Member: Hesketh, Peter. Part of the SMARTech Electronic Thesis and Dissertation Collection.

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10

Bicen, Baris. "Micromachined diffraction based optical microphones and intensity probes with electrostatic force feedback." Diss., Georgia Institute of Technology, 2010. http://hdl.handle.net/1853/41065.

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Measuring acoustic pressure gradients is critical in many applications such as directional microphones for hearing aids and sound intensity probes. This measurement is especially challenging with decreasing microphone size, which reduces the sensitivity due to small spacing between the pressure ports. Novel, micromachined biomimetic microphone diaphragms are shown to provide high sensitivity to pressure gradients on one side of the diaphragm with low thermal mechanical noise. These structures have a dominant mode shape with see-saw like motion in the audio band, responding to pressure gradient

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11

Savary, Eric. "Conception et intégration d'une électronique de conditionnement pour un capteur audio à base de nano-fils de silicium." Thesis, Aix-Marseille, 2015. http://www.theses.fr/2015AIXM4716.

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Les microphones sont des capteurs qui permettent à nos systèmes électroniques de prendre connaissance de notre environnement acoustique en fournissant un signal électrique représentatif des vibrations de l’air. Ils sont employés dans la plupart des systèmes multimédia, mais aussi dans les appareils auditifs. Dans l’implant auditif, le microphone se substitue à l’oreille humaine capable de détecter des pressions acoustiques variants de quelque μPa à quelques Pa. Les microphones, sont en général accompagnés d’un circuit électronique spécifique qui permet leur exploitation au coeur d’un système h

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12

Vanwynsberghe, Charles. "Réseaux à grand nombre de microphones : applicabilité et mise en œuvre." Thesis, Paris 6, 2016. http://www.theses.fr/2016PA066474/document.

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L'apparition récente de microphones numériques MEMS a ouvert de nouvelles perspectives pour le développement de systèmes d'acquisition acoustiques massivement multi-canaux de grande envergure. De tels systèmes permettent de localiser des sources acoustiques avec de bonnes performances. En revanche, de nouvelles contraintes se posent. La première est le flux élevé de données issues de l'antenne, devant être traitées en un temps raisonnable. La deuxième contrainte est de connaître la position des nombreux microphones déployés in situ. Ce manuscrit propose des méthodes répondant à ces deux contra

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13

Ramamonjy, Aro. "Développement de nouvelles méthodes de classification/localisation de signaux acoustiques appliquées aux véhicules aériens." Thesis, Paris, CNAM, 2019. http://www.theses.fr/2019CNAM1234/document.

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Ce travail de thèse traite du développement d’une antenne microphonique compacte et d’une chaîne de traitement du signal dédiée, pour la reconnaissance et la localisation angulaire de cibles aériennes. L’approche globale proposée consiste en une détection initiale de cible potentielle, la localisation et le suivi de la cible, et une détection affinée par un filtrage spatial adaptatif informé par la localisation de la cible. Un algorithme original de localisation goniométrique est proposé. Il utilise l’algorithme RANSAC sur des données pression-vitesse large bande [100 Hz - 10 kHz], estimées en

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14

Bjurström, Henrik. "Non-contact surface wave measurements on pavements." Doctoral thesis, KTH, Jord- och bergmekanik, 2017. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-201147.

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In this thesis, nondestructive surface wave measurements are presented for characterization of dynamic modulus and layer thickness on different pavements and cement concrete slabs. Air-coupled microphones enable rapid data acquisition without physical contact with the pavement surface. Quality control of asphalt concrete pavements is crucial to verify the specified properties and to prevent premature failure. Testing today is primarily based on destructive testing and the evaluation of core samples to verify the degree of compaction through determination of density and air void content. Howeve

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15

Czarny, Jaroslaw. "Conception, fabrication et caractérisation d'un microphone MEMS." Thesis, Lyon, INSA, 2015. http://www.theses.fr/2015ISAL0003/document.

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Les microphones à électret dédiés à l'électronique grand public et les applications médicales (les audioprothèses) ont atteint les limites de la miniaturisation. Depuis la sortie du premier microphone basé sur une technologie microsystème sur silicium (MEMS: Micro-Electro-Mechanical Systems), les microphones à électret sont progressivement remplacés par les microphones MEMS. Les MEMS utilisent le silicium car il offre des caractéristiques mécaniques exceptionnelles avec de bonnes propriétés électriques et la technologie de fabrication est maintenant bien maîtrisée. La plupart des microphones M

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16

Muamad, Norbahrin. "Characterization of MEMS a directional microphone with solid and perforated wings." Thesis, Monterey, Calif. : Naval Postgraduate School, 2009. http://handle.dtic.mil/100.2/ADA501480.

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Thesis (M.S. in Applied Physics)--Naval Postgraduate School, June 2009.<br>Thesis Advisor(s): Karunasiri, Gamani ; Denardo, Bruce. "June 2009." Description based on title screen as viewed on July 14, 2009. DTIC Identifiers: Directional microphone, soimumps, ormia ochracea, biomimetic, fly hearing. Author(s) subject terms: SOIMUMPs, MEMS, Ormia Ochracea, Biomimetic, Directional Microphone, Sensor, Microphone, Fly Hearing, Undersea Warfare. Includes bibliographical references (p. 39). Also available in print.

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17

Albahri, Shehab. "Mechanical characterization of MEMS devices." Diss., Online access via UMI:, 2007.

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18

Wang, Guiqin. "Modeling and design of a MEMS-based piezoelectric microphone." [Gainesville, Fla.] : University of Florida, 2003. http://purl.fcla.edu/fcla/etd/UFE0002702.

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19

Shivok, Timothy J. "MEMS polymumps-based miniature microphone for directional sound sensing." Thesis, Monterey, Calif. : Naval Postgraduate School, 2007. http://bosun.nps.edu/uhtbin/hyperion-image.exe/07Sep%5FShivok.pdf.

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Thesis (M.S. in Applied Physics)--Naval Postgraduate School, September 2007.<br>Thesis Advisor(s): Karunasiri, Gamani ; Sinibaldi, Jose O. "September 2007." Description based on title screen as viewed on October 23, 2007. Includes bibliographical references (p. 87-88). Also available in print.

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20

Cattin, Davide. "Design, Modelling and Control of IRST Capacitive MEMS Microphone." Doctoral thesis, Università degli studi di Trento, 2009. https://hdl.handle.net/11572/368260.

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Condenser MEMS microphones are becoming a promising technology to substitute the current standard microphones, and modelling such systems has become very important for designing a condenser microphone fulfilling the given constrains. In this dissertation a deep analysis of capacitive MEMS microphone has been presented coming up with a complete model which is able to fit the experimental data of the microphone sensitivity. Furthermore, a simple noise model, able to fit the experimental data, has been developed considering the well-know Brownian noise and the more subtle 1/f component, usually n

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21

Cattin, Davide. "Design, Modelling and Control of IRST Capacitive MEMS Microphone." Doctoral thesis, University of Trento, 2009. http://eprints-phd.biblio.unitn.it/92/1/PhD-Thesis_Cattin.pdf.

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Condenser MEMS microphones are becoming a promising technology to substitute the current standard microphones, and modelling such systems has become very important for designing a condenser microphone fulfilling the given constrains. In this dissertation a deep analysis of capacitive MEMS microphone has been presented coming up with a complete model which is able to fit the experimental data of the microphone sensitivity. Furthermore, a simple noise model, able to fit the experimental data, has been developed considering the well-know Brownian noise and the more subtle 1/f component, usually

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22

Harrison, Stephen C. W. "Free field modeling of a MEMS-Based pressure gradient microphone." Thesis, Monterey, California : Naval Postgraduate School, 2009. http://edocs.nps.edu/npspubs/scholarly/theses/2009/Dec/09Dec%5FHarrison.pdf.

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Thesis (M.S. in Engineering Acoustics and M.S. in Applied Physics)--Naval Postgraduate School, December 2009.<br>Thesis Advisor(s): Karunasiri, Gamani; Baker, Steven. "December 2009." Description based on title screen as viewed on January 26, 2010. Author(s) subject terms: MEMS, Model, Simulation, Pressure Gradient, Particle Velocity, Directional, Microphone, SOMSOL, Acoustic. Includes bibliographical references (p. 51-52). Also available in print.

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23

Hunt, Lee. "Design and characterization of an intensity modulated optical mems microphone." [Gainesville, Fla.] : University of Florida, 2003. http://purl.fcla.edu/fcla/etd/UFE0000952.

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24

Tounsi, Farès. "Microphone électrodynamique MEMS en technologie CMOS : étude, modélisation et réalisation." Grenoble INPG, 2010. http://www.theses.fr/2010INPG0027.

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L'objectif de cette thèse est de concevoir et de réaliser une nouvelle génération de microphone MEMS monolithique de type électrodynamique, à base de bobines spirales planaires, réalisée en technologie standard complétée par un post process de micro-usinage en volume par la face avant. Après avoir décrire les différents procédés de fabrication des microsystèmes compatibles microélectroniques et récapituler l'état de l'art des différents principes de transduction des structures de microphones MEMS intégrés micro-usinés. Une modélisation électromagnétique détaillée est réalisée pour étudier le l

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25

Mackie, David J. "Biologically inspired acoustic systems : from insect ears to MEMS microphone structures." Thesis, University of Strathclyde, 2015. http://oleg.lib.strath.ac.uk:80/R/?func=dbin-jump-full&object_id=26578.

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Although difficult to notice initially, examples of bioinspired technology have now become commonplace in society today. Construction materials, aerodynamic transport design, photography equipment and robot technology are among many research fields which have benefitted from studying evolution-driven solutions to common engineering problems. One field of engineering research which has recently begun to take inspiration from the natural world is that of acoustical systems such as microphones and loudspeakers. Specifically, to solve the problems involved in the miniaturisation of these systems,

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26

Shetye, Mihir Dhananjay. "Effect of a protective enclosure on the acoustical response of a MEMS directional microphone." Diss., Online access via UMI:, 2007.

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27

SANT, LUCA. "Design of MEMS microphone front-ends in deep sub-micron CMOS technologies." Doctoral thesis, Università degli Studi di Milano-Bicocca, 2022. http://hdl.handle.net/10281/374735.

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I microfoni sono sempre piu' diffusi nei dispositivi elettronici che utilizziamo quotidianamente. L'importanza di una interazione piu' naturale ed immediata ha spinto l'utilizzo del riconoscimento vocale anche in prodotti a basso costo e di larghissima diffusione. Di conseguenza e' aumentata la richiesta di microfoni sempre piu' performanti, con package miniaturizzati e costi ridotti. Questa tesi, svolta presso Infineon Technologies, illustra il processo di sviluppo di un microfono ad elevate prestazioni capace di ottenere un rapporto segnale/rumore (SNR) di 72dB(A) con un livello di saturazio

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28

Rainisch, Uri. "Detection of Ultrasonic Lamb Waves in Paper Using an Optical MEMS Microphone." Thesis, Georgia Institute of Technology, 2004. http://hdl.handle.net/1853/4779.

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Laser ultrasonics has been used to measure the bending stiffness of paper products by measuring the dispersion of ultrasonic plate waves. In laser ultrasonics, ultrasound can be generated by absorption of pulsed laser spot while detection can be carried out by Laser Doppler Interferometry. The research presented in this paper describes a new method to detect ultrasonic plate waves using a recently developed acoustic transducer, more specifically an optical Micro ElectroMechanical System (MEMS) microphone with broadband capability. The MEMS device operates as a non-contact proximity probe pl

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29

Kadirvel, Karthik. "Design and characterization of a MEMS based optical microphone for aeroacoustic measurement." [Gainesville, Fla.] : University of Florida, 2002. http://purl.fcla.edu/fcla/etd/UFE0000546.

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30

Ryšavý, Jindřich. "Předzesilovač pro MEMS mikrofon." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2016. http://www.nusl.cz/ntk/nusl-242074.

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Thesis discusses the possibility of using MEMS microphones in measuring systems. Describes the characteristics of MEMS components and shows possible realization of analog to digital signal convertor when a microphone with analog output is used. Design of the amplifier is made with respect to low noise and low power consumption. Also is shown the possibility of using antialliasing filter as microphone frequency response correction at the same time.

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31

Poskus, Karolis. "Acoustic Analysis of Wave-Guide and MEMS Microphone in Camera Including Thermoviscous Losses." Thesis, Blekinge Tekniska Högskola, 2018. http://urn.kb.se/resolve?urn=urn:nbn:se:bth-16714.

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Today Micro Electrical Mechanical Systems (MEMS) microphones are available in a range of electronic consumer products such as smart phones, tablets, smartwatches and surveillance cameras. The MEMS microphones are usually attached to a circuit board with a hole that lets sound propagate through, as well as additional wave-guides which alter the MEMS microphones original frequency response. The MEMS microphone and additional wave-guides are in the same size order as the thermal and viscous boundary layers. These are called non-ideal losses and are usually not considered when dealing with large s

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32

Xu, Jian. "Microphone based on Polyvinylidene Fluoride (PVDF) micro-pillars and patterned electrodes." The Ohio State University, 2010. http://rave.ohiolink.edu/etdc/view?acc_num=osu1275417489.

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33

Zhou, Zhijian. "Microcapteurs de hautes fréquences pour des mesures en aéroacoustique." Phd thesis, Université de Grenoble, 2013. http://tel.archives-ouvertes.fr/tel-00947304.

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L'aéroacoustique est une filière de l'acoustique qui étudie la génération de bruit par un mouvement fluidique turbulent ou par les forces aérodynamiques qui interagissent avec les surfaces. Ce secteur en pleine croissance a attiré des intérêts récents en raison de l'évolution de la transportation aérienne, terrestre et spatiale. Les microphones avec une bande passante de plusieurs centaines de kHz et une plage dynamique couvrant de 40Pa à 4 kPa sont nécessaires pour les mesures aéroacoustiques. Dans cette thèse, deux microphones MEMS de type piézorésistif à base de silicium polycristallin (pol

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34

Qureshi, Muhammad Shakeel. "Integrated front-end analog circuits for mems sensors in ultrasound imaging and optical grating based microphone." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2009. http://hdl.handle.net/1853/29613.

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Thesis (Ph.D)--Electrical and Computer Engineering, Georgia Institute of Technology, 2009.<br>Committee Chair: Hasler, Paul; Committee Co-Chair: Degertekin, Levent; Committee Member: Anderson, David; Committee Member: Ayazi, Farrokh; Committee Member: Brand, Oliver; Committee Member: Hesketh, Peter. Part of the SMARTech Electronic Thesis and Dissertation Collection.

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Fei, Shenyang. "Development of a general acoustic model for an arbitrary surveillance camera design." Thesis, Blekinge Tekniska Högskola, Institutionen för maskinteknik, 2018. http://urn.kb.se/resolve?urn=urn:nbn:se:bth-16611.

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This thesis studies how the mechanical design of a surveillance camera affects the acoustic performance, mainly in terms of the frequency response within the human hearing range. During the project, the mechanical characteristics that affect frequency response were investigated by measuring the camera’s audio behavior in an anechoic chamber. A theoretical and adaptable acoustic model was built in COMSOL to simulate the frequency response of the sound path. Measurement and simulation results were compared to identify critical aspects of the mechanical design and adjust accordingly for better ac

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Zhou, Zhijian J. "Microcapteur de hautes fréquences pour des mesures en aéroacoustique." Phd thesis, Université de Grenoble, 2013. http://tel.archives-ouvertes.fr/tel-00838736.

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L'aéroacoustique est une filière de l'acoustique qui étudie la génération de bruit par un mouvement fluidique turbulent ou par les forces aérodynamiques qui interagissent avec les surfaces. Ce secteur en pleine croissance a attiré des intérêts récents en raison de l'évolution de la transportation aérienne, terrestre et spatiale. Alors que les tests sur un objet réel sont possibles, leur implantation est généralement compliquée et les résultats sont facilement corrompus par le bruit ambiant. Par conséquent, les tests plus strictement contrôlés au laboratoire utilisant les modèles de dimensions

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Vykydal, Martin. "Zpracování signálu z digitálního mikrofonu." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2011. http://www.nusl.cz/ntk/nusl-218904.

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The aim of this work is to implement digital filters into programmable gate array. The work also includes a description of the MEMS technology, including comparisons with the technology of MEMS microphones from various manufacturers. Another part is devoted to the Sigma-delta modulation. The main section is the design and implementation of digital CIC and FIR filters for signal processing of digital microphone, including simulation and verification of properties of the proposed filter in Matlab.

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Maršál, Martin. "Elektronický modul pro akustickou detekci." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2016. http://www.nusl.cz/ntk/nusl-240831.

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This diploma thesis deals with the design and implementation of an electronic module for acoustic detection. The module has the task of detecting a predetermined acoustic signals through them learned classification model. The module is used mainly for security purposes. To identify and classify the proposed model using machine learning techniques. Given the possibility of retraining for a different set of sounds, the module becomes a universal sound detector. With acoustic sound using the digital MEMS microphone, for which it is designed and implemented conversion filter. The resulting system

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Malhi, Charanjeet Kaur. "Studies on the Design of Novel MEMS Microphones." Thesis, 2014. http://etd.iisc.ac.in/handle/2005/3125.

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MEMS microphones have been a research topic for the last two and half decades. The state-of-the-art comprises surface mount MEMS microphones in laptops, mobile phones and tablets, etc. The popularity and the commercial success of MEMS microphones is largely due to the steep cost reduction in manufacturing afforded by the mass scale production with microfabrication technology. The current MEMS microphones are de-signed along the lines of traditional microphones that use capacitive transduction with or without permanent charge (electret type microphones use permanent charge of their sensor eleme

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Malhi, Charanjeet Kaur. "Studies on the Design of Novel MEMS Microphones." Thesis, 2014. http://hdl.handle.net/2005/3125.

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MEMS microphones have been a research topic for the last two and half decades. The state-of-the-art comprises surface mount MEMS microphones in laptops, mobile phones and tablets, etc. The popularity and the commercial success of MEMS microphones is largely due to the steep cost reduction in manufacturing afforded by the mass scale production with microfabrication technology. The current MEMS microphones are de-signed along the lines of traditional microphones that use capacitive transduction with or without permanent charge (electret type microphones use permanent charge of their sensor eleme

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41

Liu, Wen-Tsai, and 劉文彩. "Fabrication and analysis of piezoelectric MEMS microphones." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/14714938107234872762.

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碩士<br>逢甲大學<br>機械工程學所<br>96<br>In this thesis, the piezoelectric MEMS microphone fabricated on 4〞 wafers by MEMS techniques is researched. At first, the stress gradient and modal analysis was simulated to design the optimal profile parameter of piezoelectric MEMS microphone by ANSYS, including the number of corrugation, aspect ratio and different thickness of piezoelectric thin film. Finally, the microphone with 6-layers PZT thin film was assembled by MEMS techniques and Sol-Gel process. The back etching of chip is more difficult in final step since the front side of chip coating with terpene -

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42

Lo, Feng-Yi, and 羅丰邑. "Parylene Based Thin Film MEMS Electret Microphones." Thesis, 2015. http://ndltd.ncl.edu.tw/handle/29393543657484567686.

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碩士<br>國立高雄第一科技大學<br>機械與自動化工程研究所<br>103<br>The goal of this research is to develop Parylene Based Thin Film MEMS Electret Microphones that are fabricated using Micro Electro Mechanical Systems (MEMS) technology, and using parylene as the material of microphone membrane and electret. The corona discharge is used for charge implantation, and the microphones case was made based on rapid prototype technology. The Electret Microphones is self-biasing no power required, which downsized the volume and complexity. The electrets obtained the stable charge densities about the order of 10-4 to 10-3 C/m2 s

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Hsieh, Wen Hsuan. "MEMS thin film teflon electret condenser microphones." Thesis, 2001. https://thesis.library.caltech.edu/3281/1/Hsieh_wh_2001.pdf.

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NOTE: Text or symbols not renderable in plain ASCII are indicated by [...]. Abstract is included in .pdf document. The goal of this thesis is to develop miniature, inexpensive, high-quality, self-biasing electret condenser microphones that are fabricated using Micro Electro Mechanical Systems (MEMS) technology. These MEMS electret microphones are to be used in any application where a conventional electret microphone can be used (such as in cell phones, and hearing aids) and in new acoustic sensing applications where current microphone technology cannot be applied (such as in smart cards of

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Wang, Han-Jung, and 王涵融. "Thin Film Residual Stress Assessment of Capacitive MEMS Microphones Using Process Modeling Technology." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/81174493576901612882.

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Κάρλος, Σταμάτης. "Εξομοίωση σε Matlab και μελέτη λειτουργιών έξυπνου μικροφώνου". Thesis, 2011. http://hdl.handle.net/10889/5655.

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Στην εργασία αυτή μελετήθηκε η γενική θεωρία των πυκνωτικών μικροφώνων που βρίσκουν εφαρμογή σε MEMS εφαρμογές της ακουστικής και αναλύθηκαν διεξοδικά δύο πυκνωτικά μικρόφωνα, ένα single-backplate και ένα dual-backplate, όσον αφορά τη γεωμετρία και τη συμπεριφορά τους. Επίσης, πραγματοποιήθηκε η υλοποίηση αυτών στο περιβάλλον του SIMULINK με τμηματικό τρόπο ανάλογα με τα φυσικά χαρακτηριστικά που προσομοιώνονται στο κάθε μοντέλο. Στη συνέχεια, προκειμένου να μετατοπιστεί ο θόρυβος αυτών πέρα από τις ακουστές συχνότητες, υλοποιήθηκαν δύο διαφορετικοί ΣΔ διαμορφωτές, ο μεν πρώτος βασισμένος στη

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Kuo, Bo-Si, and 郭柏賜. "Applications of MEMS Microphones to Gap and Quality Monitoring in Laser Micro Lap Welding." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/cw798d.

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碩士<br>國立中興大學<br>機械工程學系所<br>106<br>Laser welding has been a key technology for the manufacturing in past decades. In the lap micro welding, the micro gap between two workpiece in general leads to the reduction of the welding quality. Therefore, the development of the gap/quality monitoring system plays an important role to extend the applications of laser micro welding in the manufacturing industry. This study focuses on the analysis of the relationship between welding quality and the features of the sound signal collected during the welding, as well as the development of the monitoring system

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Lin, Sheng-che, and 林聖哲. "Research on the applications of Time Reversal Method for noise control by use of MEMS array microphones for cell phones." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/43675273309033724416.

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碩士<br>國立成功大學<br>系統及船舶機電工程學系碩博士班<br>97<br>The purpose of this paper is to construct a noise control system in the 3G cell phones that combines time reversal method and MEMS array microphones. Time reversal method (TRM) is based on principle of reciprocity of sound by propagating of a reversal signal in time series to compensate distortion due to path effect in propagation and to focus the signal at origin. In recent years, the technique has been applied in optics, ultrasound and underwater acoustic communication. This research mainly divides into theoretical derivation, numerical simulation and

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Tsai, Jun-Yin, and 蔡俊胤. "MEMS Silicon Condenser Microphone Design and Fabrication." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/b8kf3p.

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碩士<br>中原大學<br>機械工程研究所<br>93<br>The multi-layer stacking capacitive types of microphones are designed and fabricated based on theoretical analysis, simulations and silicon-based MEMS fabrication technology. The microphones in different physical sizes and functional structures are designed on the same chip. Micro-fabrication of the micro-microphones has been performed by the MEMSCAP Company. The MEMS microphone had been produced based on the optimum design and analysis. Two approaches are adopted in experimental validation --- one under static input voltage while another subjected to vibratory s

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Huang, Chien-Hsin, and 黃建欣. "Implementation of a CMOS MEMS Condenser Microphone." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/48735390347413693388.

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博士<br>國立清華大學<br>動力機械工程學系<br>99<br>Abstract This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stacking of 0.35 μm CMOS 3.3/5.0V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for the microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. We improved the acoustical sensitivity from design and process parameters, such as diaphragm thickness, diaphragm size, air gap distance, and vent hole ratio on back-plate

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Liu, Chi-Kuei, and 劉霽逵. "A Readout Circuit for MEMS Microphone Applications." Thesis, 2012. http://ndltd.ncl.edu.tw/handle/42013291705707795459.

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碩士<br>國立清華大學<br>電子工程研究所<br>100<br>In recent years, with the progress of CMOS-MEMS tech-nology, MEMS microphone gradually replaced the traditional Electret Condenser Microphone(ECM)and became the mainstream in consumer electronic products such as various mobile devices and hearing aids. When the sensor and the readout circuit are integrated together as a system-on-a-chip (SoC), because the capacitive variation of MEMS microphone is in the range of femto-Farad, a low-noise signal-translation in the readout circuit is very important. In order to meet the requirements for low-noise, low-cost

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