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Journal articles on the topic 'MEMS microphones'

Author: Grafiati

Published: 4 June 2021

Last updated: 26 July 2025

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1

Honzík, Petr, and Antonin Novak. "Reduction of nonlinear distortion in condenser microphones using a simple post-processing technique." Journal of the Acoustical Society of America 157, no. 2 (2025): 699–705. https://doi.org/10.1121/10.0035579.

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In this paper, an approach for effectively reducing nonlinear distortion in single-backplate condenser microphones is introduced, i.e., most microelectromechanical systems (MEMS) microphones, studio recording condenser microphones, and laboratory measurement microphones. This simple post-processing technique can be easily integrated on external hardware such as an analog circuit, microcontroller, audio codec, digital signal processing unit, or within the Application Specific Integrated Circuit chip in a case of MEMS microphones. It effectively reduces microphone distortion across its frequency

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2

Oatley, James, and Craig Storey. "Applicability of MEMS microphones for environmental sound level monitoring." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 263, no. 6 (2021): 875–85. http://dx.doi.org/10.3397/in-2021-1672.

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This paper explores the challenges associated with the integration of MEMS microphone technology into IEC 61672 classified or type-approved environmental sound level monitors. A comparison is drawn between MEMS microphones and electret condenser capsule microphones to highlight key performance differences within the technologies, and a basic integration method for both technologies is suggested. A review of the IEC 61672 and type-approval standards is conducted against the suggested integration method for a MEMS microphone; key shortcomings are reported and objectively reviewed. Development tr

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3

Hu, Siqi, Haitao Hu, Wei Xue, Dianyu Kang, and Jing Xiao. "Modeling and simulation study of acoustic response for dual-membrane capacitive MEMS microphone." Journal of Physics: Conference Series 2859, no. 1 (2024): 012007. http://dx.doi.org/10.1088/1742-6596/2859/1/012007.

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Abstract As the micro-electro-mechanical systems (MEMS) technology matures, MEMS sensors have found widespread applications in mechatronics, robotics, and voice control. The high stability, high integration, and radio frequency interference resistance of MEMS microphones have rapidly led to their adoption in these domains, displacing electret condenser microphones.This article focuses on modeling and analyzing dual-membrane capacitive MEMS microphone, utilizing an lumped equivalent circuit model to calculate the microphone’s acoustic frequency response. Furthermore, the article employs the fin

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Vennerod, Jakob, and Matthieu Lacolle. "Miniature optical MEMS microphone with 14dBA noise floor." Journal of the Acoustical Society of America 153, no. 3_supplement (2023): A144. http://dx.doi.org/10.1121/10.0018444.

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This paper explains the fundamental technology used to create an optical microphone transducer. In recent years, microelectromechanical system (MEMS) capacitive microphones have demonstrated improved performance. State-of-the-art capacitive MEMS microphones can achieve SNR in the order of 73 dBA (21 dBA noise floor) with overall dynamic range in the order of 101 dB. There are fundamental challenges to driving the performance of capacitive MEMS microphone technology in very small packages to new heights. Piezoelectric MEMS microphones have not demonstrated SNR performance &gt;65 dBA. The ne

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Shah, Muhammad Ali, Ibrar Ali Shah, Duck-Gyu Lee, and Shin Hur. "Design Approaches of MEMS Microphones for Enhanced Performance." Journal of Sensors 2019 (March 6, 2019): 1–26. http://dx.doi.org/10.1155/2019/9294528.

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This paper reports a review about microelectromechanical system (MEMS) microphones. The focus of this review is to identify the issues in MEMS microphone designs and thoroughly discuss the state-of-the-art solutions that have been presented by the researchers to improve performance. Considerable research work has been carried out in capacitive MEMS microphones, and this field has attracted the research community because these designs have high sensitivity, flat frequency response, and low noise level. A detailed overview of the omnidirectional microphones used in the applications of an audio f

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Kuczynski, Jacek. "Developement of low-cost noise monitoring terminals (Nmt) based On MEMS microphones." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 265, no. 1 (2023): 6657–65. http://dx.doi.org/10.3397/in_2022_1004.

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The article shows and discusses examples of Noise Monitoring Terminals (NMT) with MEMS microphones meeting class 1 and class 2 in accordance with the IEC 61672-1. The rapid development of MEMS microphones (Micro Electro-Mechanical Systems) in last decade years made it possible to use them in noise measurement instrumentation meeting the IEC 61672-1 specifications. Fifteen years ago, the available MEMS microphones offered only the 60 dB dynamic range, whereas modern MEMS microphones offer 100 dB dynamics! Such a wide dynamic range of MEMS microphones, along with their improved repeatability and

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Stalder, Carly, and Stephane Leahy. "Comparative evaluation of omnidirectional and directional micro-electromechanical system microphone performance." Journal of the Acoustical Society of America 153, no. 3_supplement (2023): A107. http://dx.doi.org/10.1121/10.0018324.

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As the need for directionality becomes a key requirement in audio applications, directional microphones have begun to enter the micro-electromechanical system (MEMS) design and market space, and their performance is approaching that of top-of-the-line omnidirectional MEMS microphones. This presentation examines and compares the performance limitations for both types of MEMS microphones and suggests more comprehensive methods of characterization that allow the qualities of directional MEMS microphones to be fully captured. Mechanical thermal noise caused by Brownian motion of air particles, mea

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Yan, Ruixiang, Yucheng Ji, Anyuan Liu, Lei Wang, and Songsong Zhang. "Design and Fabrication of a Piezoelectric Bimorph Microphone with High Reliability and Dynamic Range Based on Al0.8Sc0.2N." Micromachines 16, no. 2 (2025): 186. https://doi.org/10.3390/mi16020186.

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With the development of technology, MEMS microphones, which are small-sized and highly uniform, have been applied extensively. To improve their reliability in extreme environment and overcome the constraints of traditional microphones, this article presents a piezoelectric bimorph MEMS microphone using Al0.8Sc0.2N. In the article, the high robustness of piezoelectric microphones and the reasons for choosing Al0.8Sc0.2N as piezoelectric materials are described. The sensitivity of an Al0.8Sc0.2N-based piezoelectric bimorph compared with the traditional structure are revealed through FEA. Subsequ

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Auliya, Rahmat Zaki, Muhamad Ramdzan Buyong, Burhanuddin Yeop Majlis, Mohd Farhanulhakim Mohd. Razip Wee, and Poh Choon Ooi. "Characterization of embedded membrane in corrugated silicon microphones for high-frequency resonance applications." Microelectronics International 36, no. 4 (2019): 137–42. http://dx.doi.org/10.1108/mi-02-2019-0010.

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Purpose The purpose of this paper is to propose an alternative approach to improve the performance of microelectromechanical systems (MEMSs) silicon (Si) condenser microphones in terms of operating frequency and sensitivity through the introduction of a secondary material with a contrast of mechanical properties in the corrugated membrane. Design/methodology/approach Finite element method from COMSOL is used to analyze the MEMS microphones performance consisting of solid mechanic, electrostatic and thermoviscous acoustic interfaces. Hence, the simulated results could described the physical mec

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Riccardi, Peter J., Zane T. Rusk, John A. Case, Heui Young Park, Eric Rokni, and Stephen C. Thompson. "Low-cost measurement-grade microphone powered by MEMS elements and preamplifier housed in 3D printed enclosure." Journal of the Acoustical Society of America 152, no. 4 (2022): A50. http://dx.doi.org/10.1121/10.0015505.

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Acoustic measurement-grade microphones with flat frequency responses and adequate sensitivities are a necessary tool for many acousticians and vibroacoustic engineers. These microphones can often cost hundreds, if not thousands, of dollars. With the availability of microelectromechanical systems (MEMs) microphone elements and 3D printers, it is possible to construct drop-in replacements of these measurement grade microphones at the fraction of the cost. A MEMs system was designed with four elements in parallel to reduce uncorrelated noise. The system runs rail-to-rail on a 3.3VDC, Integrated E

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Schlieper, Roman, Song Li, Jürgen Peissig, and Stephan Preihs. "High-frequency acoustic impedance tube based on MEMS microphones." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 263, no. 2 (2021): 4724–32. http://dx.doi.org/10.3397/in-2021-2810.

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Acoustic impedance tubes are commonly used to measure a test specimen's acoustic characteristics, such as reflection factor, absorption coefficient, or acoustic impedance, in combination with one or two condenser measurement microphones according to associated standards. In the development process of an impedance tube, the microphone diaphragm's size has an important role in the measurement quality. On the one hand, the microphone diameter has to be large enough to ensure the possibility of measuring at low sound pressure levels (SPLs), but on the other hand, the size of the microphone diaphra

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Wong, Trevor, Bhan Lam, Furi Andi Karnapi, Kenneth Ooi, and Woon-Seng Gan. "Assessment of inter-IC sound microelectromechanical systems microphones for soundscape reporting." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 263, no. 4 (2021): 2259–69. http://dx.doi.org/10.3397/in-2021-2086.

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Acoustic parameters obtained from calibrated acoustic equipment are part of the minimum soundscape reporting requirements as stated in Annex A of ISO 12913-2. To dynamically monitor the acoustic environment of a large area, a large network of acoustic sensors could be deployed, albeit at significant cost. Micro-Electro-Mechanical Systems (MEMS) microphones offer compact, low-cost and high-performance alternatives to traditional analog microphones. In particular, the use of Inter-IC Sound (IS) communication allows MEMS microphones to be conveniently used in concert with I2S output interfaces fo

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Cerini, Fabrizio, and Silvia Adorno. "Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation." Proceedings 2, no. 13 (2018): 862. http://dx.doi.org/10.3390/proceedings2130862.

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A flexible simulation platform to design new piezoelectric MEMS (micro-electro-mechanical systems) microphones with signal-to-noise ratio (SNR) evaluation is presented. The platform is made of two blocks: a multiphysical FEM model, in order to study the acoustic, mechanical and electrical behavior of the MEMS structure, and an equivalent electro-mechanical-acoustic lumped-element model, which allows studying the microphone system, i.e. the MEMS-package-ASIC interaction. The platform gives precise estimation of sensitivity and SNR, key parameters of a microphone.

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14

Thompson, Stephen C. "Microphones: A bit of history." Journal of the Acoustical Society of America 153, no. 3_supplement (2023): A106. http://dx.doi.org/10.1121/10.0018319.

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The earliest commercially successful microphone design was the carbon microphone, whose original patent was filed by Emile Berliner in 1877. An interesting variant of the basic carbon microphone was a dual diaphragm microphone patented by Granville Woods in 1883. The basic carbon microphone provided adequate performance at low cost and remained in service in the telephone system for at least the next century. Other microphone technologies can also be found in the early patent literature, though their commercial acceptance was delayed until electronic amplification was possible. The eventual de

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15

Elko, Gary W., Flavio Pardo, Daniel López, David Bishop, and Peter Gammel. "Capacitive MEMS microphones." Bell Labs Technical Journal 10, no. 3 (2005): 187–98. http://dx.doi.org/10.1002/bltj.20113.

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16

Tsai, Jonas, Yang Zhang, G. P. Li, and Mark Bachman. "High-Fidelity Optical Microphone Manufactured in Laminates." International Symposium on Microelectronics 2011, no. 1 (2011): 001047–51. http://dx.doi.org/10.4071/isom-2011-tha5-paper1.

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We have built an optical MEMS microphone using processes commonly found in the packaging and printed circuit industry. Optical elements used to detect sound are manufactured using laminate processes and integrated onto printed circuit boards (PCB). Laminate MEMS (LMEMS) processing is an enabling technology that allows designers more freedom in designing MEMS and the packaging and printed circuit industry the capabilities of fabricating their own MEMS component. Using optics grade films and high-tolerance substrates, high-end electro optical components have been manufactured in the form of lami

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Peña-García, Néstor N., Luz A. Aguilera-Cortés, Max A. González-Palacios, Jean-Pierre Raskin, and Agustín L. Herrera-May. "Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications." Sensors 18, no. 10 (2018): 3545. http://dx.doi.org/10.3390/s18103545.

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New mobile devices need microphones with a small size, low noise level, reduced cost and high stability respect to variations of temperature and humidity. These characteristics can be obtained using Microelectromechanical Systems (MEMS) microphones, which are substituting for conventional electret condenser microphones (ECM). We present the design and modeling of a capacitive dual-backplate MEMS microphone with a novel circular diaphragm (600 µm diameter and 2.25 µm thickness) supported by fifteen polysilicon springs (2.25 µm thickness). These springs increase the effective area (86.85% of the

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18

Rufer, Libor, Josué Esteves, Didace Ekeom, and Skandar Basrour. "Piezoelectric Micromachined Microphone with High Acoustic Overload Point and with Electrically Controlled Sensitivity." Micromachines 15, no. 7 (2024): 879. http://dx.doi.org/10.3390/mi15070879.

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Currently, the most advanced micromachined microphones on the market are based on a capacitive coupling principle. Capacitive micro-electromechanical-system-based (MEMS) microphones resemble their millimetric counterparts, both in function and in performance. The most advanced MEMS microphones reached a competitive level compared to commonly used measuring microphones in most of the key performance parameters except the acoustic overload point (AOP). In an effort to find a solution for the measurement of high-level acoustic fields, microphones with the piezoelectric coupling principle have bee

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Ahlefeldt, Thomas, Stefan Haxter, Carsten Spehr, Daniel Ernst, and Tobias Kleindienst. "Road to Acquisition: Preparing a MEMS Microphone Array for Measurement of Fuselage Surface Pressure Fluctuations." Micromachines 12, no. 8 (2021): 961. http://dx.doi.org/10.3390/mi12080961.

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Preparing and pre-testing experimental setups for flight tests is a lengthy but necessary task. One part of this preparation is comparing newly available measurement technology with proven setups. In our case, we wanted to compare acoustic Micro-Electro-Mechanical Systems (MEMS) to large and proven surface-mounted condenser microphones. The task started with the comparison of spectra in low-speed wind tunnel environments. After successful completion, the challenge was increased to similar comparisons in a transonic wind tunnel. The final goal of performing in-flight measurements on the outside

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Peng, Tzu-Huan, Huei-Ju Hsu, and Jin H. Huang. "Analysis of Structural Design Variations in MEMS Capacitive Microphones." Sensors 25, no. 3 (2025): 900. https://doi.org/10.3390/s25030900.

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Different microstructures significantly affect the acoustic performance of MEMS capacitive microphones, particularly in key specifications of interest. This paper presents several microstructures, including rib-reinforced backplates, suspended diaphragms, and outer vent holes. Three MEMS microphone designs were implemented to analyze the impact of these microstructures. Equivalent circuit models corresponding to each design were constructed to simulate specifications such as sensitivity, signal-to-noise ratio (SNR), and low corner frequency (LCF), which were validated through experimental meas

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Zheng, Zhuoyue, Chen Wang, Linlin Wang, et al. "Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications." Micromachines 15, no. 3 (2024): 352. http://dx.doi.org/10.3390/mi15030352.

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The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental noise, and structural innovation are posed. To collect and summarize the recent advances in this subject, this paper presents a concise review concerning the transduction mechanism, diverse mechanical structure topologies, and effective methods of noise reduction for high-performance MEMS microphones

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Spehr, Carsten, Daniel Ernst, and Hans-Georg Raumer. "MEMS microphone intensity array for cabin noise measurements." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 263, no. 3 (2021): 3023–34. http://dx.doi.org/10.3397/in-2021-2288.

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Aircraft cabin noise measurements in flight are used toto quantify the noise level, and to identify the entry point of acoustic energy into the cabin. Sound intensity probes are the state-of-the-art measurement technique for this task. During measurements, additional sound absorbing material is used to ease the rather harsh acoustic measurement environment inside the cabin. In order to decrease the expensive in-flight measurement time, an intensity array approach was chosen. This intensity probe consists of 512 MEMS-Microphones. Depending on the frequency, these microphones can be combined as

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Sezen, A. S., S. Sivaramakrishnan, S. Hur, R. Rajamani, W. Robbins, and B. J. Nelson. "Passive Wireless MEMS Microphones for Biomedical Applications." Journal of Biomechanical Engineering 127, no. 6 (2005): 1030–34. http://dx.doi.org/10.1115/1.2049330.

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This paper introduces passive wireless telemetry based operation for high frequency acoustic sensors. The focus is on the development, fabrication, and evaluation of wireless, batteryless SAW-IDT MEMS microphones for biomedical applications. Due to the absence of batteries, the developed sensors are small and as a result of the batch manufacturing strategy are inexpensive which enables their utilization as disposable sensors. A pulse modulated surface acoustic wave interdigital transducer (SAW-IDT) based sensing strategy has been formulated. The sensing strategy relies on detecting the ac comp

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Falkhofen, Judith, and Marcus Wolff. "Near-Ultrasonic Transfer Function and SNR of Differential MEMS Microphones Suitable for Photoacoustics." Sensors 23, no. 5 (2023): 2774. http://dx.doi.org/10.3390/s23052774.

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Can ordinary Micro-Electro-Mechanical-Systems (MEMS) microphones be used for near-ultrasonic applications? Manufacturers often provide little information about the signal-to-noise ratio (SNR) in the ultrasound (US) range and, if they do, the data are often determined in a manufacturer-specific manner and are generally not comparable. Here, four different air-based microphones from three different manufacturers are compared with respect to their transfer functions and noise floor. The deconvolution of an exponential sweep and a traditional calculation of the SNR are used. The equipment and meth

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CHO, Wan-Ho, and In-Jee JUNG. "Consideration on the efficient calibration method for low-cost microphones." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 270, no. 2 (2024): 9160–64. http://dx.doi.org/10.3397/in_2024_4201.

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Current microphone calibration methods in the international standards are basically targeting laboratory and working standard microphones specified in the IEC 61094-2 and IEC 61094-4, respectively. These methods are promising to ensure the reliability however there are many difficulties in applying it to low-cost acoustic sensors such as MEMS microphones, which are rapidly becoming widespread, with aspects of time and cost. Moreover, since the installation conditions for these low-cost microphones are different from those of standardized measurement microphones, calibration methods that take t

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Guo, Hongjie, Qiuhong Liu, Shuo Sun, Yike Zhao, Xiang Wu, and Zhengjin Wang. "Thermal stress in a new type of MEMS microphone with dual-diaphragm." Journal of Physics: Conference Series 2954, no. 1 (2025): 012061. https://doi.org/10.1088/1742-6596/2954/1/012061.

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Abstract Microelectromechanical system (MEMS) microphones have achieved a great variety of applications like mobile phones and wearable devices due to their small volume, strong heat resistance and high stability. However, the thermal stress induced by temperature variation in packaging and service conditions greatly influences the performance of packaged MEMS microphone devices. We study the thermal stress development in a new type of MEMS microphone with a dual-diaphragm using the finite element method, focusing on influences of the geometrical parameter and different material properties of

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Wu, Xiaoming, Yi Yang, Jian Cai, Tianling Ren, and Litian Liu. "Measurements of Ferroelectric MEMS Microphones." Integrated Ferroelectrics 69, no. 1 (2005): 417–29. http://dx.doi.org/10.1080/10584580590899441.

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Niu, Xiaoyu, Yuqi Meng, Zihuan Liu, Ehsan Vatankhah, and Neal A. Hall. "MEMS microphones as ultrasonic transducers." Journal of the Acoustical Society of America 152, no. 4 (2022): A50—A51. http://dx.doi.org/10.1121/10.0015506.

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We demonstrate the transmission of ultrasound in air using a transducer that resembles a MEMS microphone in its construction. The device comprises a compliant 1 mm diameter diaphragm, a stiff perforated backplate electrode, and a back-volume. The diaphragm is driven using AC signals with peak values that exceed the pull-in voltage of the diaphragm. Relatively large diaphragm displacements are achieved as diaphragm oscillations traverse the complete 2.30-micrometer diaphragm-backplate gap in response to excitation waveforms spanning from 40 kHz to 150 kHz. Large amplitude diaphragm vibration is

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Grubeša, Sanja, Jasna Stamać, Mia Suhanek, and Antonio Petošić. "Use of Genetic Algorithms for Design an FPGA-Integrated Acoustic Camera." Sensors 22, no. 8 (2022): 2851. http://dx.doi.org/10.3390/s22082851.

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The goal of this paper is to design a broadband acoustic camera using micro-electromechanical system (MEMS) microphones. The paper describes how an optimization of the microphone array has been carried out. Furthermore, the final goal of the described optimization is that the gain in the desired direction and the attenuation of side lobes is maximized at a frequency up to 4 kHz. Throughout the research, various shapes of microphone arrays and their directivity patterns have been considered and analyzed using newly developed algorithms implemented in Matlab. A hemisphere algorithm, genetic algo

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Ivanov, Artem. "Simple in-system control of microphone sensitivities in an array." Journal of Sensors and Sensor Systems 13, no. 1 (2024): 81–88. http://dx.doi.org/10.5194/jsss-13-81-2024.

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Abstract. A method to perform measurements of microphone responses directly in the array of a sensor system is described. It can be applied in reverberant environments and does not require high instrumentation effort. Due to the use of internal hardware of the sensor system, the whole signal chain of microphone–preamplifier–analogue-to-digital converter is characterized. The method was successfully tested for calibration of two types of planar arrays constructed with micro-electromechanical system (MEMS) microphones. Presented experimental results illustrate achieved performance, and possible

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Quintero, Andres, Fernando Cardes, Carlos Perez, Cesare Buffa, Andreas Wiesbauer, and Luis Hernandez. "A VCO-Based CMOS Readout Circuit for Capacitive MEMS Microphones." Sensors 19, no. 19 (2019): 4126. http://dx.doi.org/10.3390/s19194126.

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Microelectromechanical systems (MEMS) microphone sensors have significantly improved in the past years, while the readout electronic is mainly implemented using switched-capacitor technology. The development of new battery powered “always-on” applications increasingly requires a low power consumption. In this paper, we show a new readout circuit approach which is based on a mostly digital Sigma Delta ( Σ Δ ) analog-to-digital converter (ADC). The operating principle of the readout circuit consists of coupling the MEMS sensor to an impedance converter that modulates the frequency of a stacked-r

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Zawawi, Siti Aisyah, Azrul Azlan Hamzah, Burhanuddin Yeop Majlis, and Faisal Mohd-Yasin. "A Review of MEMS Capacitive Microphones." Micromachines 11, no. 5 (2020): 484. http://dx.doi.org/10.3390/mi11050484.

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This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.

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Walser, S., C. Siegel, M. Winter, G. Feiertag, M. Loibl, and A. Leidl. "MEMS microphones with narrow sensitivity distribution." Sensors and Actuators A: Physical 247 (August 2016): 663–70. http://dx.doi.org/10.1016/j.sna.2016.04.051.

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Feiertag, Gregor, Matthias Winter, and Anton Leidl. "Flip chip packaging for MEMS microphones." Microsystem Technologies 16, no. 5 (2010): 817–23. http://dx.doi.org/10.1007/s00542-010-1039-3.

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Prato, Andrea, Alessandro Schiavi, Irene Buraioli, Davide Lena, and Danilo Demarchi. "Calibration and characterization of MEMS microphones." Journal of the Acoustical Society of America 141, no. 5 (2017): 3677. http://dx.doi.org/10.1121/1.4987984.

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Ogawa, Katsuya, Tsukasa Yoshinaga, and Akiyoshi Iida. "Optimization of microphone array arrangements for wavenumber-frequency spectral measurements." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 268, no. 7 (2023): 1780–89. http://dx.doi.org/10.3397/in_2023_0269.

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The wavenumber-frequency spectral (WFS) analysis is a well-established technique widely used for the separation of pressure fluctuations in turbulent flow fields into hydrodynamic pressure fluctuation (HPF) and acoustic pressure fluctuations (APF). The WFS analysis requires an array system comprising multiple microphones. The aim of this research is explored how the number and placement of microphones affect the accuracy of the analysis and determine an optimized microphone array layout for analyzing vehicle noise. We conducted separation analyses of HPF and APF using pressure fluctuations fro

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Kim, Junsoo, Woongji Kim, Siyoung Lee, Kilwon Cho, and Wonkyu Moon. "A high-fidelity MEMS microphone with a polymer membrane that can detect infra-sounds." Journal of the Acoustical Society of America 154, no. 4_supplement (2023): A227. http://dx.doi.org/10.1121/10.0023361.

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This study proposes a polymer MEMS microphone that operates through electromechanical amplitude modulation. We have developed a highly optimized MEMS structure with a flexible polymer material, resulting in a miniaturized and flexible device with excellent acoustic performance. The stiffness and damping characteristics of the polymer diaphragm are analyzed and it shows that the polymer material would be suitable for microphone applications. An equivalent circuit model is also developed for design purposes, so that the device could be properly designed using it and fabricated by in-house polyme

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Riabko, Andrii, Tetiana Vakaliuk, Oksana Zaika, Roman Kukharchuk, and Yuriy Smorzhevsky. "Comparative analysis and selection of the geometry of the microphone array based on MEMS microphones for sound localisation." Radioelectronic and Computer Systems 2025, no. 1 (2025): 211–30. https://doi.org/10.32620/reks.2025.1.15.

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The subject of this article is the design and optimization of the geometric configuration of omnidirectional MEMS microphone arrays for sound localization tasks. The goal is to determine the most effective array architecture and beamforming algorithms to achieve compactness, accuracy, and balanced omnidirectional coverage. The tasks to be addressed include analyzing spatial-frequency characteristics of various microphone array geometries (Uniform Linear Array, Uniform Planar Array, Uniform Circular Array, and Uniform Concentric Array), comparing beamforming algorithms (delay-and-sum, different

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Yan, Jiaming, Caihui Chen, Zhipeng Wu, Xiaoxia Ding, and Liang Lou. "An Acoustic Localization Sensor Based on MEMS Microphone Array for Partial Discharge." Sensors 23, no. 3 (2023): 1077. http://dx.doi.org/10.3390/s23031077.

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Partial discharge (PD) localization is important for monitoring and maintaining high-voltage equipment, which can help to prevent accidents. In this work, an acoustic localization sensor based on microelectromechanical system (MEMS) microphone array is proposed, which can detect and locate the partial discharge through a beam-forming algorithm. The MEMS microphone array consists of eight commercial MEMS microphones (SPV08A0LR5H-1, Knowles Electronics, IL, USA) with an aperture size of about 0.1 m × 0.1 m, allowing for a small hardware size and low cost. In order to optimize the acoustic perfor

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Mizumachi, Mitsunori, and Ryotarou Oka. "Non-linear beamformer with long short-term memory network." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 263, no. 2 (2021): 4355–60. http://dx.doi.org/10.3397/in-2021-2673.

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Acoustic beamforming with a microphone array enables spatial filtering in a wide frequency range. It is a challenging issue to sharpen the main-lobe in the lower frequency region with a small-scale microphone array, of which the number and spacing of microphones are small. A neural network-based non-linear beamformer achieves a breakthrough in sharpening the main-lobe. The non-linear beamforming works well for the narrowband signals but is weak in wideband beamforming. The non-linear beamforming with the long short-term memory is proposed to deal with wideband speech signals. The long short-te

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Saba, Fabio, María Campo-Valera, Davide Paesante, Giovanni Durando, Mario Corallo, and Diego Pugliese. "Effectiveness of Sound Field Corrections for High-Frequency Pressure Comparison Calibration of MEMS Microphones." Sensors 25, no. 5 (2025): 1312. https://doi.org/10.3390/s25051312.

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The calibration of Micro-Electro-Mechanical System (MEMS) microphones remains a critical challenge due to their miniaturized geometry and sensitivity to non-uniform acoustic fields. This study presents an advanced calibration methodology that integrates Finite Element Method (FEM) simulations with experimental corrections to improve the accuracy of pressure comparison calibrations using active couplers. A key innovation is the incorporation of asymmetric acoustic field analysis, which systematically quantifies and corrects discrepancies arising from cavity geometry, sensor positioning, and res

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Prochazka, Huber, Dobrev, et al. "Packaging Technology for an Implantable Inner Ear MEMS Microphone." Sensors 19, no. 20 (2019): 4487. http://dx.doi.org/10.3390/s19204487.

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Current cochlear implant (CI) systems provide substantial benefits for patients with severe hearing loss. However, they do not allow for 24/7 hearing, mainly due to the external parts that cannot be worn in all everyday situations. One of the key missing parts for a totally implantable CI (TICI) is the microphone, which thus far has not been implantable. The goal of the current project was to develop a concept for a packaging technology for state-of-the-art microelectromechanical systems (MEMS) microphones that record the liquid-borne sound inside the inner ear (cochlea) as a microphone signal

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Zhu, Xu, and Raymond A. Ciferno. "Ultrathin form factor mems microphones and microspeakers." Journal of the Acoustical Society of America 119, no. 2 (2006): 683. http://dx.doi.org/10.1121/1.2174413.

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Littrell, Robert, and Karl Grosh. "Advantages of piezoelectric microelectromechanical systems (MEMS) microphones." Journal of the Acoustical Society of America 125, no. 4 (2009): 2595. http://dx.doi.org/10.1121/1.4783873.

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Novak, Antonin, and Petr Honzík. "Measurement of nonlinear distortion of MEMS microphones." Applied Acoustics 175 (April 2021): 107802. http://dx.doi.org/10.1016/j.apacoust.2020.107802.

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del Val, Lara, Alberto Izquierdo, Juan José Villacorta, and Luis Suárez. "Using a Planar Array of MEMS Microphones to Obtain Acoustic Images of a Fan Matrix." Journal of Sensors 2017 (2017): 1–10. http://dx.doi.org/10.1155/2017/3209142.

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This paper proposes the use of a signal acquisition and processing system based on an8×8planar array of MEMS (Microelectromechanical Systems) microphones to obtain acoustic images of a fan matrix. A3×3matrix of PC fans has been implemented to perform the study. Some tests to obtain the acoustic images of the individual fans and of the whole matrix have been defined and have been carried out inside an anechoic chamber. The nonstationary signals received by each MEMS microphone and their corresponding spectra have been analyzed, as well as the corresponding acoustic images. The analysis of the a

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Karamanis, Georgios, Jonathan Anderson, Lalitha Parameswaran, et al. "A fluid filled MEMS hydrophone." Journal of the Acoustical Society of America 155, no. 3_Supplement (2024): A293. http://dx.doi.org/10.1121/10.0027549.

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MEMS hydrophones are of interest to provide a small form factor acoustic sensing capability in water. The majority of previous work on MEMS hydrophones (e.g., Bernstein 1997, Moon, 2010, Gu, 2018) use air backed diaphragms in order to provide increased sensitivity. However, this limits the operating depth of the device due to a reduction in the diaphragm burst pressure. In this work we investigate an architecture that has the potential to increase the operating depth by filling the backing cavity with a heavy fluid. We have designed architectures with multiple acoustic ports (Moon, 2010) and c

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Seo, Sang-Woo, Somi Yun, Myung-Gyu Kim, Mankyu Sung, and Yejin Kim. "Screen-Based Sports Simulation Using Acoustic Source Localization." Applied Sciences 9, no. 15 (2019): 2970. http://dx.doi.org/10.3390/app9152970.

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In this paper, we introduce a novel acoustic source localization in a three-dimensional (3D) space, based on a direction estimation technique. Assuming an acoustic source at a distance from adjacent microphones, its waves spread in a planar form called a planar wavefront. In our system, the directions and steering angles between the acoustic source and the microphone array are estimated based on a planar wavefront model using a delay and sum beamforming (DSBF) system and an array of two-dimensional (2D) microelectromechanical system (MEMS) microphones. The proposed system is designed with para

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da Silva, Bruno, An Braeken, Federico Domínguez, and Abdellah Touhafi. "Exploiting Partial Reconfiguration through PCIe for a Microphone Array Network Emulator." International Journal of Reconfigurable Computing 2018 (2018): 1–16. http://dx.doi.org/10.1155/2018/3214679.

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The current Microelectromechanical Systems (MEMS) technology enables the deployment of relatively low-cost wireless sensor networks composed of MEMS microphone arrays for accurate sound source localization. However, the evaluation and the selection of the most accurate and power-efficient network’s topology are not trivial when considering dynamic MEMS microphone arrays. Although software simulators are usually considered, they consist of high-computational intensive tasks, which require hours to days to be completed. In this paper, we present an FPGA-based platform to emulate a network of mic

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Malcovati, Piero, and Andrea Baschirotto. "The Evolution of Integrated Interfaces for MEMS Microphones." Micromachines 9, no. 7 (2018): 323. http://dx.doi.org/10.3390/mi9070323.

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