Relevant bibliographies by topics / MEMS/NEMS devices

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  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers

Academic literature on the topic 'MEMS/NEMS devices'

Author: Grafiati
Published: 3 June 2025
Last updated: 13 July 2025

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Journal articles on the topic "MEMS/NEMS devices"

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Torkashvand, Ziba, Farzaneh Shayeganfar, and Ali Ramazani. "Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices." Micromachines 15, no. 2 (2024): 175. http://dx.doi.org/10.3390/mi15020175.

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The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles.
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L, Saipriya, Akepati Deekshitha, Shreya Shreya, Shubhika Verma, Swathi C, and Manjunatha C. "Advances in Graphene Based MEMS and Nems Devices: Materials, Fabrication, and Applications." ECS Transactions 107, no. 1 (2022): 10997–1005. http://dx.doi.org/10.1149/10701.10997ecst.

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Microelectromechanical systems (MEMS) are generally known as miniaturized mechanical and electro-mechanical systems, whereas NEMS stands for nanoelectromechanical systems. Graphene is an atomically thin material that features unique properties, such as high carrier mobility, high mechanical strength, and piezoresistive electromechanical transduction, which makes it an extremely promising material for future MEMS and NEMS devices. Design and fabrication of MEMS/NEMS devices using graphene process includes trench etching, wafer backside etching, graphene transfer, and mass release, which are described in a comprehensive manner. This review provides interesting perspectives for lock-in detection of weak fluorescent signals, NEMS position detection, electromechanical control of the on-chip transmitter, and single-photon-level fast electromechanical optical modulation. There are various applications of MEMS/NEMS devices, namely radio frequency devices, optic NEMS, pressure sensors, inertial sensors, which have been discussed in detail. The review mainly focusses on the devices made up of graphene (atom-layer distance of ~0.335 nm) as a main electronic/mechanical material due to its remarkable mechanical and electrical (Young’s modulus of up to ~1 TPa cm2Vs-1) and charge-carrier mobility of up to 200,000, which makes it an extremely promising membrane and transducer material for MEMS/NEMS system applications. Modern MEMS/NEMS experiments utilize mechanical resonators to push the bounds of force and mass sensing, demonstrate novel electromechanical circuit applications, measure the structural properties of materials are also covered in this review.
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Kalaiarasi, A. R., T. Deepa, S. Angalaeswari, D. Subbulekshmi, and Raja Kathiravan. "Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices." Journal of Nanomaterials 2021 (November 9, 2021): 1–13. http://dx.doi.org/10.1155/2021/6244874.

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This work is focused on design and simulation of microelectromechanical system (MEMS)/nanoelectromechanical system (NEMS) rotational devices such as micro/nanothermal rotary actuator and micro/nanogear. MEMS/NEMS technologies have allowed the development of advanced miniaturized rotational devices. MEMS/NEMS-based thermal actuator is a scaled version of movable device which will produce amplified motion when it is subjected to thermal forces. One of the applications of such thermal micro/nanoactuator is integrating it into micro/nanomotor that makes a thermal actuated micro/nanomotor. In this work, design and simulation of micro/nanothermal rotary actuator are done using MEMS/NEMS technology. Stress, current density, and temperature analysis are done for microthermal rotary actuator. The performance of the device is observed by varying the dimensions and materials such as silicon and polysilicon. Stress analysis is used to calculate the yield strength of the material. Current density is used to calculate the safer limit of the material. Temperature analysis is used to calculate the melting point of the material. Also, in this work, design and simulation of microgear have been done. Micro/nanogears are devices that can be used to improve motion performance. The essential is that it transmits rotational motion to a different axis.
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Auciello, Orlando, and Dean M. Aslam. "Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies." Journal of Materials Science 56, no. 12 (2021): 7171–230. http://dx.doi.org/10.1007/s10853-020-05699-9.

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AbstractA comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, and the research and development focused on the integration of the diamond films with other film-based materials. The review includes both theoretical and experimental work focused on optimizing the films synthesis and the resulting properties to achieve the best possible MEMS/NEMS devices performance to produce new generation of MEMS/NEMS external environmental sensors and energy generation devices, human body implantable biosensors and energy generation devices, electron field emission devices and many more MEMS/NEMS devices, to produce transformational positive impact on the way and quality of life of people worldwide.
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Takashima, Kazuki, Junichi Koike, and Kaneaki Tsuzaki. "MEMS/NEMS Devices and Materials Development." Materia Japan 41, no. 10 (2002): 667. http://dx.doi.org/10.2320/materia.41.667.

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Khosla, Ajit, and Peter J. Hesketh. "Microfluidics, MEMS/NEMS, Sensors and Devices." Journal of The Electrochemical Society 161, no. 2 (2014): Y1. http://dx.doi.org/10.1149/2.025402jes.

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Chakkaew, Anusorn, and Wisut Titiroongruang. "Electrostatic Control and New Device Handling Consideration for MEMS Manufacturing Process." Advanced Materials Research 378-379 (October 2011): 659–62. http://dx.doi.org/10.4028/www.scientific.net/amr.378-379.659.

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Electrostatic potential and electrostatic discharge (ESD) has been a factory issue for years, not only limited to semiconductor-based electronic devices, but there are evidences that new devices from emerging technologies become sensitive which are MEMS and NEMS. This paper describes new electrostatic control and device handling solutions for critical electrostatic control environment for MEMS manufacturing processes. There are experiments of personnel grounding devices, device handling materials, and evaluation of static control surfaces.
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Moczała, Magdalena, Andrzej Sierakowski, Paweł Janus, Piotr Grabiec, Wojciech Leśniewicz, and Teodor Gotszalk. "Progress in nanometrology of MEMS/NEMS devices." Mechanik, no. 11 (November 2016): 1611–13. http://dx.doi.org/10.17814/mechanik.2016.11.459.

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Bhushan, Bharat, Huiwen Liu, and Stephen M. Hsu. "Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale Effects." Journal of Tribology 126, no. 3 (2004): 583–90. http://dx.doi.org/10.1115/1.1739407.

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Tribological properties are crucial to the reliability of microelectromechanical systems/nanoelectromechanical systems (MEMS/NEMS). In this study, adhesion and friction measurements are made at micro and nanoscales on single-crystal silicon (commonly used in MEMS/NEMS) and hydrophobic and low friction films. These include diamondlike carbon (DLC), chemically bonded perfluoropolyether (PFPE), and self-assembled monolayer (SAM) films. Since MEMS/NEMS devices are expected to be used in various environments, measurements are made at a range of velocities, humidities, and temperatures. The relevant adhesion and friction mechanisms are discussed. It is found that solid films of DLC, PFPE, and SAM can reduce the adhesion and friction of silicon. These films can be used as anti-adhesion films for MEMS/NEMS components under different environments and operating conditions. Finally, the adhesion and friction data clearly show scale dependence. The scale effects on adhesion and friction are also discussed in the paper.
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YANAGIDA, Yasuko. "MEMS/NEMS-based Devices for Bio-measurements." Electrochemistry 85, no. 9 (2017): 572–79. http://dx.doi.org/10.5796/electrochemistry.85.572.

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Dissertations / Theses on the topic "MEMS/NEMS devices"

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Leoncino, Luca. "Optomechanical transduction applied to M/NEMS devices." Thesis, Université Grenoble Alpes (ComUE), 2017. http://www.theses.fr/2017GREAY067/document.

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Au cours de ces dernières années, les progrès technologiques dans le domaine dumicro-usinage sur silicium ont permis le développement de Micro/Nano SystèmesÉlectro Mécaniques (M/NEMS) pour réaliser des capteurs ou des actionneurs.Dans le domaine des NEMS, dont les dimensions sont par définition submicroniques,les propriétés obtenues permettent de viser des applications en analyse biochimiqueou biomédicale. Il a été démontré que ces nano capteurs de masse (ou de force)atteignent des résolutions de l’ordre du zeptogramme (10−21 g) ou du picoNewtonce qui permet d’envisager des diagnostics précoces de certains cancers.Tous ces systèmes utilisent `a l’heure actuelle des moyens d’actionnement et dedétection électriques: de nombreuses équipes ont néanmoins démontré que la photoniqueactionne et détecte des mouvements de très faibles amplitudes, de l’ordredu femtomètre. Cette technologie hybride, circuit photonique associé au M/NEMS,offre potentiellement un gain de performance important par rapport aux moyens detransduction électromécanique.L’objectif de la thèse est le développement de la transduction optomécanique afinde détecter le déplacement de résonateurs NEMS. Un simple modèle analytique estproposé avec le support d’un simulation numérique. Les performances de transductionoptique sont comparées aux caractéristiques de la transduction électrique. Lacomparaison se base sur des critères objectifs (sensibilité, bruit, encombrement) puisde proposer des structures optomécaniques originales. Un banc de caractérisationoptique et mécanique est développé pour la caractérisation des échantillons dans unenvironnement contrôlé. Des mesures sur des composants fabriqués permettent demieux appréhender les contraintes de dimensionnement et, de façon plus général, latransduction optomécanique appliqué aux dispositifs NEMS<br>During several last years, technological advances in the field of silicon micromachininghave initiated the industrial growth of Micro/Nano Electro Mechanical Systems(M/NEMS) for fabricating sensors or actuators.In the field of NEMS with sub-micron sizes, the properties allow for targeting applicationsin biomedical or biochemical analyses. It has been demonstrated that thesenano mass (or force) sensors achieve resolutions of the order of zeptogram (10−21 g)or picoNewton, hence allowing early diagnosis of certain cancers.Transduction schemes of these systems are currently based on electrical principles:many teams have nevertheless shown that photonics operates and detects tiny displacementin the order of femtometer. This hybrid technology, photonic circuitassociated with M/NEMS, potentially offers a significant improvement compared toelectrical transduction.The purpose of the thesis consists of developing the optomechanical transductionfor NEMS resonators displacement. A simple analytical model is presented togetherwith a numerical simulation. The performance of optical detection is compared toelectrical detection features. The comparison is based on objective criteria (sensitivity,noise, crowding) for designing original optomechanical structures. A dedicatedbench has been developed for the optical and mechanical characterizations of thesamples placed in a controlled environment. Measurements on fabricated devicesallow a better understanding of the design constrains and, more in general, of theoptomechanical detection applied to NEMS.i
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Lübbe, Jannis Ralph Ulrich. "Cantilever properties and noise figures in high-resolution non-contact atomic force microscopy." Doctoral thesis, 2013. https://repositorium.ub.uni-osnabrueck.de/handle/urn:nbn:de:gbv:700-2013040310741.

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Different methods for the determination of cantilever properties in non-contact atomic force microscopy (NC-AFM) are under investigation. A key aspect is the determination of the cantilever stiffness being essential for a quantitative NC-AFM data analysis including the extraction of the tip-surface interaction force and potential. Furthermore, a systematic analysis of the displacement noise in the cantilever oscillation detection is performed with a special focus on the thermally excited cantilever oscillation. The propagation from displacement noise to frequency shift noise is studied under consideration of the frequency response of the PLL demodulator. The effective Q-factor of cantilevers depends on the internal damping of the cantilever as well as external influences like the ambient pressure and the quality of the cantilever fixation. While the Q-factor has a strong dependence on the ambient pressure between vacuum and ambient pressure yielding a decrease by several orders of magnitude, the pressure dependence of the resonance frequency is smaller than 1% for the same pressure range. On the other hand, the resonance frequency highly depends on the mass of the tip at the end of the cantilever making its reliable prediction from known cantilever dimensions difficult. The cantilever stiffness is determined with a high-precision static measurement method and compared to dimensional and dynamic methods. Dimensional methods suffer from the uncertainty of the measured cantilever dimensions and require a precise knowledge its material properties. A dynamic method utilising the measurement of the thermally excited cantilever displacement noise to obtain cantilever properties allows to characterise unknown cantilevers but requires an elaborative measurement equipment for spectral displacement noise analysis. Having the noise propagation in the NC-AFM system fully characterised, a proposed method allows for spring constant determination from the frequency shift noise at the output of the PLL demodulator with equipment already being available in most NC-AFM setups.
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Books on the topic "MEMS/NEMS devices"

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H, Bernstein David, ed. Modeling MEMS and NEMS. Chapman & Hall/CRC, 2003.

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Kottapalli, Ajay Giri Prakash, Kai Tao, Debarun Sengupta, and Michael S. Triantafyllou. Self-Powered and Soft Polymer MEMS/NEMS Devices. Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-030-05554-7.

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Lynn, Khine, and Tsai Julius M, eds. NEMS/MEMS technology and devices: Selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore. Trans Tech, 2011.

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Development of CMOS-MEMS/NEMS Devices. MDPI, 2019. http://dx.doi.org/10.3390/books978-3-03921-069-5.

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Khine, Lynn, and Julius M. Tsai. NEMS/MEMS Technology and Devices, ICMAT2011. Trans Tech Publications, Limited, 2011.

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Khine, Lynn, and Julius M. Tsai. NEMS/MEMS Technology and Devices, ICMAT2011. Trans Tech Publications Ltd, 2011. http://dx.doi.org/10.4028/b-3enkib.

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Teo, Selin H. G., Tarik Bourouina, Hua Li, and Ai-Qun Liu. NEMS/MEMS Technology and Devices - ICMAT2009, ICMAT2009. Trans Tech Publications, Limited, 2009.

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Lyshevski, Sergey Edward. MEMS and NEMS: Systems, Devices, and Structures. Taylor & Francis Group, 2018.

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Lyshevski, Sergey Edward. MEMS and NEMS: Systems, Devices, and Structures. Taylor & Francis Group, 2018.

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Lyshevski, Sergey Edward. MEMS and NEMS: Systems, Devices, and Structures. Taylor & Francis Group, 2018.

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Book chapters on the topic "MEMS/NEMS devices"

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Lalinský, Tibor, Milan Držík, Jiří Jakovenko, and Miroslav Husák. "GaAs Thermally Based MEMS Devices—Fabrication Techniques, Characterization and Modeling." In MEMS/NEMS. Springer US, 2006. http://dx.doi.org/10.1007/0-387-25786-1_12.

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De Los Santos, Héctor J. "Understanding MEMS/NEMS Devices." In Understanding Nanoelectromechanical Quantum Circuits and Systems (NEMX) for the Internet of Things (IoT) Era. River Publishers, 2022. http://dx.doi.org/10.1201/9781003339939-4.

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Young, Darrin J., Christian A. Zorman, and Mehran Mehregany. "MEMS/NEMS Devices and Applications." In Springer Handbook of Nanotechnology. Springer Berlin Heidelberg, 2004. http://dx.doi.org/10.1007/3-540-29838-x_8.

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Young, Darrin J., Christian A. Zorman, and Mehran Mehregany. "MEMS/NEMS Devices and Applications." In Springer Handbook of Nanotechnology. Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-642-02525-9_12.

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Feng, Philip X. L., Darrin J. Young, and Christian A. Zorman. "MEMS/NEMS Devices and Applications." In Springer Handbook of Nanotechnology. Springer Berlin Heidelberg, 2017. http://dx.doi.org/10.1007/978-3-662-54357-3_13.

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Young, Darrin J., Christian A. Zorman, and Mehran Mehregany. "MEMS/NEMS Devices and Applications." In Springer Handbook of Nanotechnology. Springer Berlin Heidelberg, 2004. http://dx.doi.org/10.1007/978-3-662-40019-7_8.

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Young, Darrin, Christian Zorman, and Mehran Mehregany. "MEMS/NEMS Devices and Applications." In Springer Handbook of Nanotechnology. Springer Berlin Heidelberg, 2007. http://dx.doi.org/10.1007/978-3-540-29857-1_15.

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Godthi, Vamsy, K. Jayaprakash Reddy, and Rudra Pratap. "Dynamics of MEMS Devices." In Materials and Failures in MEMS and NEMS. John Wiley & Sons, Inc., 2015. http://dx.doi.org/10.1002/9781119083887.ch9.

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van Spengen, W. Merlijn, Robert Modliñski, Robert Puers, and Anne Jourdain. "Failure Mechanisms in MEMS/NEMS Devices." In Springer Handbook of Nanotechnology. Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-642-02525-9_49.

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van Spengen, W. Merlijn, Robert Modliński, Robert Puers, and Anne Jourdain. "Failure Mechanisms in MEMS/NEMS Devices." In Springer Handbook of Nanotechnology. Springer Berlin Heidelberg, 2017. http://dx.doi.org/10.1007/978-3-662-54357-3_40.

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Conference papers on the topic "MEMS/NEMS devices"

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Patton, Steven T., and Andrey A. Voevodin. "Tribological Challenges in MEMS/NEMS Devices." In ASME/STLE 2007 International Joint Tribology Conference. ASMEDC, 2007. http://dx.doi.org/10.1115/ijtc2007-44270.

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Microelectromechanical systems (MEMS) devices with contacting interfaces offer numerous tribological challenges, which need to be solved to enable wider use of the technology [1–7]. These challenges become even more acute as further miniaturization occurs with Nanoelectromechanical systems (NEMS) technology. Although considerable progress has been made in the understanding of tribological phenomena of microscopic contacts, MEMS designers often use alternate designs to avoid surface contact and the associated reliability issues. For example, bulky devices with large spring constants are used to overcome surface forces and/or redundancy is built in to allow for a limited number of failures in individual MEMS components. Such design approaches prevent the realization of the full potential of MEMS/NEMS technology. Tribological solutions are therefore becoming an enabling technology for miniature MEMS/NEMS made with more compliant structures, smaller size, and smoother surfaces.
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"Displays, Sensors, and MEMS -- MEMS and NEMS." In 2006 International Electron Devices Meeting. IEEE, 2006. http://dx.doi.org/10.1109/iedm.2006.346825.

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Gu, Minfen, Dongyan Ding, Zhongcheng Liang, Jiabi Chen, and Songlin Zhuang. "Fabrication of optical waveguide multilayer storage devices." In ICI20:MEMS, MOEMS, and NEMS, edited by Masayoshi Esashi and Zhaoying Zhou. SPIE, 2006. http://dx.doi.org/10.1117/12.667860.

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Wong, Chee-Leong, and Moorthi Palaniapan. "Characterization techniques for NEMS/MEMS devices." In Smart Materials, Nano-and Micro-Smart Systems, edited by Said F. Al-Sarawi, Vijay K. Varadan, Neil Weste, and Kourosh Kalantar-Zadeh. SPIE, 2008. http://dx.doi.org/10.1117/12.810798.

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Huang, H., Y. Q. Wu, K. J. Winchester, et al. "Structural Materials for NEMS/MEMS Devices." In 2006 International Conference on Nanoscience and Nanotechnology. IEEE, 2006. http://dx.doi.org/10.1109/iconn.2006.340717.

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Bachand, George D., and Carlo D. Montemagno. "Constructing biomolecular motor-powered hybrid NEMS devices." In Asia Pacific Symposium on Microelectronics and MEMS, edited by Kevin H. Chau and Sima Dimitrijev. SPIE, 1999. http://dx.doi.org/10.1117/12.364481.

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Varadan, Vijay K. "MEMS- and NEMS-based smart devices and systems." In International Symposium on Microelectronics and MEMS, edited by Neil W. Bergmann, Derek Abbott, Alex Hariz, and Vijay K. Varadan. SPIE, 2001. http://dx.doi.org/10.1117/12.449169.

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Hu, F. R., T. Kobayashi, K. Ochi, et al. "Tunable guided mode resonant gratings for passive and active devices: Si subwavelength MEMS structures and the combination with GaN film." In ICI20:MEMS, MOEMS, and NEMS, edited by Masayoshi Esashi and Zhaoying Zhou. SPIE, 2006. http://dx.doi.org/10.1117/12.667847.

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Cui, Zheng, Ling Wang, Aizi Jin, and Jia-sheng Hong. "Control of Stress in Multilayered MEMS Devices." In 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE, 2006. http://dx.doi.org/10.1109/nems.2006.334703.

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Kumagai, Shinya, Taichi Yamamoto, Hironori Kubo, and Minoru Sasaki. "Photoresist spray coating for 3D MEMS/NEMS." In 2012 IEEE 7th Nanotechnology Materials and Devices Conference (NMDC). IEEE, 2012. http://dx.doi.org/10.1109/nmdc.2012.6527598.

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