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Journal articles on the topic 'MEMS/NEMS devices'

Author: Grafiati

Published: 3 June 2025

Last updated: 19 July 2025

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1

Torkashvand, Ziba, Farzaneh Shayeganfar, and Ali Ramazani. "Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices." Micromachines 15, no. 2 (2024): 175. http://dx.doi.org/10.3390/mi15020175.

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The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by me

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2

L, Saipriya, Akepati Deekshitha, Shreya Shreya, Shubhika Verma, Swathi C, and Manjunatha C. "Advances in Graphene Based MEMS and Nems Devices: Materials, Fabrication, and Applications." ECS Transactions 107, no. 1 (2022): 10997–1005. http://dx.doi.org/10.1149/10701.10997ecst.

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Microelectromechanical systems (MEMS) are generally known as miniaturized mechanical and electro-mechanical systems, whereas NEMS stands for nanoelectromechanical systems. Graphene is an atomically thin material that features unique properties, such as high carrier mobility, high mechanical strength, and piezoresistive electromechanical transduction, which makes it an extremely promising material for future MEMS and NEMS devices. Design and fabrication of MEMS/NEMS devices using graphene process includes trench etching, wafer backside etching, graphene transfer, and mass release, which are des

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3

Kalaiarasi, A. R., T. Deepa, S. Angalaeswari, D. Subbulekshmi, and Raja Kathiravan. "Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices." Journal of Nanomaterials 2021 (November 9, 2021): 1–13. http://dx.doi.org/10.1155/2021/6244874.

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This work is focused on design and simulation of microelectromechanical system (MEMS)/nanoelectromechanical system (NEMS) rotational devices such as micro/nanothermal rotary actuator and micro/nanogear. MEMS/NEMS technologies have allowed the development of advanced miniaturized rotational devices. MEMS/NEMS-based thermal actuator is a scaled version of movable device which will produce amplified motion when it is subjected to thermal forces. One of the applications of such thermal micro/nanoactuator is integrating it into micro/nanomotor that makes a thermal actuated micro/nanomotor. In this

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4

Auciello, Orlando, and Dean M. Aslam. "Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies." Journal of Materials Science 56, no. 12 (2021): 7171–230. http://dx.doi.org/10.1007/s10853-020-05699-9.

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AbstractA comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, a

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5

Takashima, Kazuki, Junichi Koike, and Kaneaki Tsuzaki. "MEMS/NEMS Devices and Materials Development." Materia Japan 41, no. 10 (2002): 667. http://dx.doi.org/10.2320/materia.41.667.

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6

Khosla, Ajit, and Peter J. Hesketh. "Microfluidics, MEMS/NEMS, Sensors and Devices." Journal of The Electrochemical Society 161, no. 2 (2014): Y1. http://dx.doi.org/10.1149/2.025402jes.

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7

Chakkaew, Anusorn, and Wisut Titiroongruang. "Electrostatic Control and New Device Handling Consideration for MEMS Manufacturing Process." Advanced Materials Research 378-379 (October 2011): 659–62. http://dx.doi.org/10.4028/www.scientific.net/amr.378-379.659.

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Electrostatic potential and electrostatic discharge (ESD) has been a factory issue for years, not only limited to semiconductor-based electronic devices, but there are evidences that new devices from emerging technologies become sensitive which are MEMS and NEMS. This paper describes new electrostatic control and device handling solutions for critical electrostatic control environment for MEMS manufacturing processes. There are experiments of personnel grounding devices, device handling materials, and evaluation of static control surfaces.

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8

Moczała, Magdalena, Andrzej Sierakowski, Paweł Janus, Piotr Grabiec, Wojciech Leśniewicz, and Teodor Gotszalk. "Progress in nanometrology of MEMS/NEMS devices." Mechanik, no. 11 (November 2016): 1611–13. http://dx.doi.org/10.17814/mechanik.2016.11.459.

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9

Bhushan, Bharat, Huiwen Liu, and Stephen M. Hsu. "Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale Effects." Journal of Tribology 126, no. 3 (2004): 583–90. http://dx.doi.org/10.1115/1.1739407.

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Tribological properties are crucial to the reliability of microelectromechanical systems/nanoelectromechanical systems (MEMS/NEMS). In this study, adhesion and friction measurements are made at micro and nanoscales on single-crystal silicon (commonly used in MEMS/NEMS) and hydrophobic and low friction films. These include diamondlike carbon (DLC), chemically bonded perfluoropolyether (PFPE), and self-assembled monolayer (SAM) films. Since MEMS/NEMS devices are expected to be used in various environments, measurements are made at a range of velocities, humidities, and temperatures. The relevant

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10

YANAGIDA, Yasuko. "MEMS/NEMS-based Devices for Bio-measurements." Electrochemistry 85, no. 9 (2017): 572–79. http://dx.doi.org/10.5796/electrochemistry.85.572.

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11

Lyshevski, S. E. "MEMS and NEMS - systems, devices, and structures." IEEE Electrical Insulation Magazine 20, no. 4 (2004): 46. http://dx.doi.org/10.1109/mei.2004.1318850.

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12

Jiang, Cheng Yu, Yang He, and Wei Zheng Yuan. "MEMS R&D Trends." Materials Science Forum 532-533 (December 2006): 181–84. http://dx.doi.org/10.4028/www.scientific.net/msf.532-533.181.

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Micro-Electromechanical Systems (MEMS) has been regarded as one of the most promising technologies for the 21st Century. Recently, some highlight areas attract great attention including Inertial MEMS, Optic MEMS, RF MEMS, BioMEMS, Power MEMS, and NEMS. The state of arts on MEMS research in China is briefly introduced and research activities in Northwestern Polytechnical University such as MEMS CAD tool, inertial MEMS devices, flexible substrate for MEMS integration, micro mirror, micro battery and three dimension measurement are demonstrated.

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13

Gammel, Peter, Georg Fischer, and Jérémie Bouchaud. "RF MEMS and NEMS technology, devices, and applications." Bell Labs Technical Journal 10, no. 3 (2005): 29–59. http://dx.doi.org/10.1002/bltj.20103.

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14

Fraga, Mariana, and Rodrigo Pessoa. "Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS." Micromachines 11, no. 9 (2020): 799. http://dx.doi.org/10.3390/mi11090799.

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A search of the recent literature reveals that there is a continuous growth of scientific publications on the development of chemical vapor deposition (CVD) processes for silicon carbide (SiC) films and their promising applications in micro- and nanoelectromechanical systems (MEMS/NEMS) devices. In recent years, considerable effort has been devoted to deposit high-quality SiC films on large areas enabling the low-cost fabrication methods of MEMS/NEMS sensors. The relatively high temperatures involved in CVD SiC growth are a drawback and studies have been made to develop low-temperature CVD pro

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Simovic-Pavlovic, Marina, Bojana Bokic, Darko Vasiljevic, and Branko Kolaric. "Bioinspired NEMS—Prospective of Collaboration with Nature." Applied Sciences 12, no. 2 (2022): 905. http://dx.doi.org/10.3390/app12020905.

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The fields of micro- and nanomechanics are strongly interconnected with the development of micro-electro-mechanical (MEMS) and nano-electro-mechanical (NEMS) devices, their fabrication and applications. This article highlights the biomimetic concept of designing new nanodevices for advanced materials and sensing applications.

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16

Buzzin, Alessio, Lorenzo Giannini, Gabriele Bocchetta, et al. "On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry." Micromachines 14, no. 12 (2023): 2229. http://dx.doi.org/10.3390/mi14122229.

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This paper investigates how the electromechanical response of MEMS/NEMS devices changes when the geometrical characteristics of their embedded flexural hinges are modified. The research is dedicated particularly to MEMS/NEMS devices which are actuated by means of rotary comb-drives. The electromechanical behavior of a chosen rotary device is assessed by studying the rotation of the end effector, the motion of the comb-drive mobile fingers, the actuator’s maximum operating voltage, and the stress sustained by the flexure when the flexure’s shape, length, and width change. The results are compar

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17

Wang, Gou-Jen. "Special Issue on “MEMS/NEMS Fabricated Tissue Scaffolding Devices”." Bioengineering 1, no. 2 (2014): 113. http://dx.doi.org/10.3390/bioengineering1020113.

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18

Adamovic, Nadja, Ioanna Giouroudi, Jovan Matovic, Zoran Djinovic, and Ulrich Schmid. "Microactuators for Fluidic Applications: Principles, Devices, and Systems." Journal of Microelectronics and Electronic Packaging 6, no. 4 (2009): 250–64. http://dx.doi.org/10.4071/1551-4897-6.4.250.

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Much effort in microfluidics research has been aimed at designing microscale pumps, valves, switches, dispensers, mixers, filters, separators, and so on, which have a major role in the development of innovative systems like chemical process control, bioanalytical devices, medical drug delivery systems, environmental control, and others. Most of these microfluidic devices have one thing in common: the need for precise manipulation and control of small amounts of fluids. MEMS/NEMS research is continuously opening up new knowledge on modeling approaches, novel materials, and MEMS/NEMS processing

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19

Zhang, Zong Bo, Qing Qiang He, and Cao Qing Yan. "Non-Melt Ultrasonic Bonding Method for Polymer MEMS Devices." Applied Mechanics and Materials 607 (July 2014): 133–38. http://dx.doi.org/10.4028/www.scientific.net/amm.607.133.

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Based on the theoretical study in our previous work, a novel thermal assisted ultrasonic bonding method for polymer Micro/nanoElectro-Mechanical Systems (M/NEMS) has been demonstrated. Bonding experiments of PMMA microfluidic chips with micro-channel of 80 μm in depth and width were conducted. The result shows numerous superiorities of this method including high bonding strength (0.95 MPa), low dimension loss (0.8% in depth and 0.3% in width, respectively) and short bonding duration.

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20

Tan, Miao Miao, Zi Yi Zhang, Lin Hui Zhao, and Jian Cheng Zhang. "Review of Fabrication Methods of Nanotube / Nanowire Devices." Advanced Materials Research 411 (November 2011): 427–31. http://dx.doi.org/10.4028/www.scientific.net/amr.411.427.

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With the development of nano materials, a novel research field of NEMS forms by combining nano materials, nano-structures and nano fabrication with MEMS. Carbon nanotube (CNT) is a kind of one-dimensional nano structures which has unique mechanical, electrical and chemical properties. Using CNTs, new nano-devices with new principle or high performance would be developed. This paper reviews the assembly methods of one dimensional nanostructure and analyzes the characteristics of various methods, which provides reference for the device manufacturing methods using nanotubes/nanowires.

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21

Niklaus, Frank, Gaehun Jo, Pierre Edinger, Kristinn B. Gylfason, and Simon J. Bleiker. "(Invited) Wafer Bonding for MEMS Integration and Packaging." ECS Meeting Abstracts MA2023-02, no. 33 (2023): 1615. http://dx.doi.org/10.1149/ma2023-02331615mtgabs.

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Wafer bonding is a critical manufacturing process for a vast number of experimental and commercial microelectromechanical system (MEMS) devices [1-5]. Wafer bonding is used for both the hermetic sealing of MEMS [3-5], and for integrating MEMS with electronic integrated circuits (IC) [1-2]. In this invited talk we present recent examples of wafer bonding approaches targeted at hermetic sealing of emerging MEMS devices such as silicon photonic MEMS [3, 4]. In these processes, the MEMS are sealed by wafer bonding and transferring individual lids, while at the same time keeping the final total die

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22

Orłowska, Karolina, Michał Świątkowski, Piotr Kunicki, et al. "Wide-Band Optical Fibre System for Investigation of MEMS and NEMS Deflection." Metrology and Measurement Systems 21, no. 3 (2014): 381–88. http://dx.doi.org/10.2478/mms-2014-0032.

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Abstract In this work the construction of experimental setup for MEMS/NEMS deflection measurements is presented. The system is based on intensity fibre optic detector for linear displacement sensing. Furthermore the electronic devices: current source for driving the light source and photodetector with wide-band preamplifier are presented.

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23

I. Băjenescu, Titu-Marius. "SOME RELIABILITY ASPECTS OF MEMS AND NEMS MANUFACTURING." Journal of Engineering Science XXVIII, no. 2 (2021): 91–102. http://dx.doi.org/10.52326/jes.utm.2021.28(2).07.

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A full understanding of the physics and statistics of the defect generation is required to investigate the ultimate reliability limitations of manufacturability of MEMS and NEMS. In order that the user can include electronic components in circuits to achieve errorfree and reliable functional units, assemblies or devices, must he has understood the mode of operation of these components. Only knowledge of their parameters and special properties allows, according to data sheet specifications and manufacturer's documents the optimal components for a specific application, to select. Both for the an

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24

Cho, Joon Hyong, David Cayll, Dipankar Behera, and Michael Cullinan. "Towards Repeatable, Scalable Graphene Integrated Micro-Nano Electromechanical Systems (MEMS/NEMS)." Micromachines 13, no. 1 (2021): 27. http://dx.doi.org/10.3390/mi13010027.

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The demand for graphene-based devices is rapidly growing but there are significant challenges for developing scalable and repeatable processes for the manufacturing of graphene devices. Basic research on understanding and controlling growth mechanisms have recently enabled various mass production approaches over the past decade. However, the integration of graphene with Micro-Nano Electromechanical Systems (MEMS/NEMS) has been especially challenging due to performance sensitivities of these systems to the production process. Therefore, ability to produce graphene-based devices on a large scale

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Verd, Jaume, and Jaume Segura. "Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices." Micromachines 10, no. 4 (2019): 273. http://dx.doi.org/10.3390/mi10040273.

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Micro and nanoelectromechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within integrated circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors [...]

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Băjenescu, Titu-Marius I. "SOME RELIABILITY ASPECTS OF MEMS AND NEMS MANUFACTURING." Journal of Engineering Science XXVIII (2) (June 16, 2021): 91–102. https://doi.org/10.52326/jes.utm.2021.28(2).07.

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A full understanding of the physics and statistics of the defect generation is required to investigate the ultimate reliability limitations of manufacturability of MEMS and NEMS. In order that the user can include electronic components in circuits to achieve errorfree and reliable functional units, assemblies or devices, must he has understood the mode of operation of these components. Only knowledge of their parameters and special properties allows, according to data sheet specifications and manufacturer's documents the optimal components for a specific application, to select. Both for th

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27

Welburn, Lowell, Amir Milad Moshref Javadi, Luong Nguyen, and Salil Desai. "Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review." Biomolecules 15, no. 6 (2025): 898. https://doi.org/10.3390/biom15060898.

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Designing and manufacturing devices at the micro- and nanoscales offers significant advantages, including high precision, quick response times, high energy density ratios, and low production costs. These benefits have driven extensive research in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS), resulting in various classifications of materials and manufacturing techniques, which are ultimately used to produce different classifications of MEMS devices. The current work aims to systematically organize the literature on MEMS in biomedical devices, encompassing pas

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Müller, Gerhard, J. Prades, Angelika Hackner, Andrea Ponzoni, Elisabetta Comini, and Giorgio Sberveglieri. "Sensitivity-Selectivity Trade-Offs in Surface Ionization Gas Detection." Nanomaterials 8, no. 12 (2018): 1017. http://dx.doi.org/10.3390/nano8121017.

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Surface ionization (SI) provides a simple, sensitive, and selective method for the detection of high-proton affinity substances, such as organic decay products, medical and illicit drugs as well as a range of other hazardous materials. Tests on different kinds of SI sensors showed that the sensitivity and selectivity of such devices is not only dependent on the stoichiometry and nanomorphology of the emitter materials, but also on the shape of the electrode configurations that are used to read out the SI signals. Whereas, in parallel-plate capacitor devices, different kinds of emitter material

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Carretero-Palacios, Sol. "Quantum levitation of photonic structures." EPJ Web of Conferences 266 (2022): 07002. http://dx.doi.org/10.1051/epjconf/202226607002.

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The Casimir-Lifshitz force originates from the quantum vacuum fluctuations of the electromagnetic field. This force is especially intense between interacting objects at nanoscale distances, and it can be attractive or repulsive depending on the optical properties of the materials (amongst other parameters). This fundamental phenomenon is at the heart of the malfunctioning of nano- and micro-electromechanical devices (NEMS and MEMS) that integrate many of the gadgets we use in our daily lives. Absolute control over these forces would make it possible to suppress adhesion and friction in these N

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Du, Han, Fook Chau, and Guangya Zhou. "Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators." Micromachines 7, no. 4 (2016): 69. http://dx.doi.org/10.3390/mi7040069.

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31

Stachiv, Ivo, Eduardo Alarcon, and Miroslav Lamac. "Shape Memory Alloys and Polymers for MEMS/NEMS Applications: Review on Recent Findings and Challenges in Design, Preparation, and Characterization." Metals 11, no. 3 (2021): 415. http://dx.doi.org/10.3390/met11030415.

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Rapid progress in material science and nanotechnology has led to the development of the shape memory alloys (SMA) and the shape memory polymers (SMP) based functional multilayered structures that, due to their capability to achieve the properties not feasible by most natural materials, have attracted a significant attention from the scientific community. These shape memory materials can sustain large deformations, which can be recovered once the appropriate value of an external stimulus is applied. Moreover, the SMAs and SMPs can be reprogrammed to meet several desired functional properties. A

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32

Kometani, Reo, and Sunao Ishihara. "Special Issue on Nanosensing and Microsensing." International Journal of Automation Technology 12, no. 1 (2018): 3. http://dx.doi.org/10.20965/ijat.2018.p0003.

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Sensors, which are transducer-type devices, are indispensable to today’s advanced information society. A huge number of sensors are used not only in everyday devices but also in advanced industrial systems. They are used in Internet of things (IoT) services to gather external information, intelligent robots to recognize the world around them and control their movements, and all advanced vehicle technologies to operate safely and automatically. Sensors detect light, motion, force, fluid flow, electric/magnetic fields, and other physical, chemical, and biological aspects of the external environm

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Bhushan, Bharat. "Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices." Microelectronic Engineering 84, no. 3 (2007): 387–412. http://dx.doi.org/10.1016/j.mee.2006.10.059.

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Espinosa, H. D., B. C. Prorok, B. Peng, et al. "Mechanical properties of ultrananocrystalline diamond thin films relevant to MEMS/NEMS devices." Experimental Mechanics 43, no. 3 (2003): 256–68. http://dx.doi.org/10.1007/bf02410524.

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35

K. Edaan Al-mashaal, Asaad. "BENDING OF GRAPHENE VIA ELECTROSTATIC ACTUATION." International Journal Multidisciplinary (IJMI) 1, no. 4 (2024): 28–41. https://doi.org/10.61796/ijmi.v1i4.239.

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Objective: To explore the potential of graphene in electrostatic actuation, emphasizing its mechanisms, applications, and challenges, and to evaluate its integration with MEMS/NEMS technologies. Method: A detailed literature review was conducted, analyzing the principles of electrostatic actuation and graphene's unique properties. The study examined synthesis and fabrication methods, focusing on scalability, quality control, and defect minimization. Performance metrics such as actuation efficiency, mechanical strain, and response time were also evaluated using data from prior experimental and

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Neuville, Stephane. "Selective Carbon Material Engineering for Improved MEMS and NEMS." Micromachines 10, no. 8 (2019): 539. http://dx.doi.org/10.3390/mi10080539.

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The development of micro and nano electromechanical systems and achievement of higher performances with increased quality and life time is confronted to searching and mastering of material with superior properties and quality. Those can affect many aspects of the MEMS, NEMS and MOMS design including geometric tolerances and reproducibility of many specific solid-state structures and properties. Among those: Mechanical, adhesion, thermal and chemical stability, electrical and heat conductance, optical, optoelectronic and semiconducting properties, porosity, bulk and surface properties. They can

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Dahlan, Nuraina Anisa, Aung Thiha, Fatimah Ibrahim, et al. "Role of Nanomaterials in the Fabrication of bioNEMS/MEMS for Biomedical Applications and towards Pioneering Food Waste Utilisation." Nanomaterials 12, no. 22 (2022): 4025. http://dx.doi.org/10.3390/nano12224025.

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bioNEMS/MEMS has emerged as an innovative technology for the miniaturisation of biomedical devices with high precision and rapid processing since its first R&D breakthrough in the 1980s. To date, several organic including food waste derived nanomaterials and inorganic nanomaterials (e.g., carbon nanotubes, graphene, silica, gold, and magnetic nanoparticles) have steered the development of high-throughput and sensitive bioNEMS/MEMS-based biosensors, actuator systems, drug delivery systems and implantable/wearable sensors with desirable biomedical properties. Turning food waste into valuable

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Zhao, Shifeng. "Advances in Multiferroic Nanomaterials Assembled with Clusters." Journal of Nanomaterials 2015 (2015): 1–12. http://dx.doi.org/10.1155/2015/101528.

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As an entirely new perspective of multifunctional materials, multiferroics have attracted a great deal of attention. With the rapidly developing micro- and nano-electro-mechanical system (MEMS&NEMS), the new kinds of micro- and nanodevices and functionalities aroused extensive research activity in the area of multiferroics. As an ideal building block to assemble the nanostructure, cluster exhibits particular physical properties related to the cluster size at nanoscale, which is efficient in controlling the multiferroic properties for nanomaterials. This review focuses on our recent advance

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Rong, Hua, and Chang Ling Yu. "Accuracy Correction of the Measuring Method for Film Stress Gradient Based on Curvature Radius." Key Engineering Materials 503 (February 2012): 381–85. http://dx.doi.org/10.4028/www.scientific.net/kem.503.381.

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Stress gradient of a thin film along its thickness direction has important influence on performance of MEMS/NEMS devices. The measuring method based on curvature radius is a usual method for extracting film stress gradient. In this paper the error of the method has been analyzed using Finite Element Analysis software Coventorware, and the current theory has been modified according to FEA results to enhance its accuracy. Simulating results indicated that the accuracy of the method has been increased observably after correcting.

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Tsai, Yao-Chuan, Pin-Chun Huang, and Ching-Liang Dai. "Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 2nd Edition." Micromachines 16, no. 2 (2025): 189. https://doi.org/10.3390/mi16020189.

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Microelectromechanical systems (MEMSs) and nanoelectromechanical systems (NEMSs) are revolutionary technologies that merge mechanical and electronic components on microscopic and nanoscopic scales [...]

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41

WANG, C. M., Y. XIANG, J. YANG, and S. KITIPORNCHAI. "BUCKLING OF NANO-RINGS/ARCHES BASED ON NONLOCAL ELASTICITY." International Journal of Applied Mechanics 04, no. 03 (2012): 1250025. http://dx.doi.org/10.1142/s1758825112500251.

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This paper is concerned with the bifurcation buckling of nano-rings and nano-arches where the allowance for small scale effect is catered for by using Eringen's nonlocal theory of elasticity. Exact buckling solutions for nano-rings and nano-arches under uniform radial pressure are derived and the influence of small scale effect on the buckling pressures and mode shapes is investigated. The new results presented will be useful to engineers who are designing nano-rings and nano-arches to be used in MEMS and NEMS devices.

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Bîrleanu, Corina, Marius Pustan, Florina Șerdean, and Violeta Merie. "AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications." Micromachines 13, no. 1 (2021): 23. http://dx.doi.org/10.3390/mi13010023.

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Nanotribological studies of thin films are needed to develop a fundamental understanding of the phenomena that occur to the interface surfaces that come in contact at the micro and nanoscale and to study the interfacial phenomena that occur in microelectromechanical systems (MEMS/NEMS) and other applications. Atomic force microscopy (AFM) has been shown to be an instrument capable of investigating the nanomechanical behavior of many surfaces, including thin films. The measurements of tribo-mechanical behavior for MEMS materials are essential when it comes to designing and evaluating MEMS devic

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43

Li, Biao, Xiaosong Tang, Huimin Xie, and Xin Zhang. "Strain analysis in MEMS/NEMS structures and devices by using focused ion beam system." Sensors and Actuators A: Physical 111, no. 1 (2004): 57–62. http://dx.doi.org/10.1016/j.sna.2003.07.014.

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JUNG, INHWA, JAE-HYUN CHUNG, RICHARD PINER, JI WON SUK, and RODNEY S. RUOFF. "FABRICATION AND MEASUREMENT OF SUSPENDED SILICON CARBIDE NANOWIRE DEVICES AND DEFLECTION." Nano 04, no. 06 (2009): 351–58. http://dx.doi.org/10.1142/s1793292009001927.

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In this paper, we report the measurement of the deflection of β- SiC nanowires supported at both ends. Such wires hold promise as active elements in NEMS/MEMS devices. To ensure the stable mechanical clamping and electrical contacts between electrodes and nanowires, we have developed a method of metal deposition to improve the contacts. This method consists of multiple depositions at different angles in order to avoid the shadow effect and reduce the compressive residual stress. The improvement of the contacts was verified via SEM observation and electrical transport measurements. To suspend t

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Fogel, Ronen, Janice Limson, and Ashwin A. Seshia. "Acoustic biosensors." Essays in Biochemistry 60, no. 1 (2016): 101–10. http://dx.doi.org/10.1042/ebc20150011.

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Resonant and acoustic wave devices have been researched for several decades for application in the gravimetric sensing of a variety of biological and chemical analytes. These devices operate by coupling the measurand (e.g. analyte adsorption) as a modulation in the physical properties of the acoustic wave (e.g. resonant frequency, acoustic velocity, dissipation) that can then be correlated with the amount of adsorbed analyte. These devices can also be miniaturized with advantages in terms of cost, size and scalability, as well as potential additional features including integration with microfl

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Lim, Junyoung, Maryam Jalali, and Stephen A. Campbell. "Electrophoretic Deposition of Single Wall Carbon Nanotube Films and Characterization." MRS Proceedings 1752 (2014): 59–63. http://dx.doi.org/10.1557/opl.2014.960.

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ABSTRACTElectrophoretic deposition enables the rapid deposition of single wall carbon nanotube films at room temperature. An accurate, reproducible film thickness can be obtained by controlling electric field strength, suspension concentration, and time. To investigate the electrical and mechanical properties of such films, we recorded electric resistance and Young’s modulus using I-V characterization and a nanoindenter, respectively. The measured resistivity of the films varied from 2.14 × 10-3 to 7.66 × 10-3 Ω·cm, and the Young’s modulus was 4.72 to 5.67 GPa, independent of film thickness fr

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Resmi, R., V. Suresh Babu, and M. R. Baiju. "Damping Analysis in Si Torsional Micromirrors." Journal of Physics: Conference Series 2325, no. 1 (2022): 012023. http://dx.doi.org/10.1088/1742-6596/2325/1/012023.

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Abstract Micromirrors are extensively used in MEMS/NEMS based actuators and accordingly the design of superior performance mirror structures are prime requisite in MEMS/NEMS industry. Thermal and viscous damping of a dynamic vibrating micromirror are important factors degrading its performance by inducing energy dissipation. The primary sources of energy losses are viscosity and thermal conduction near the walls of the structure in the acoustic boundary layer. Hence it is necessary to accurately assess the bounds of energy dissipation owing to thermal and viscous damping. In this paper, the de

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Ding, Wenxiang, Liangtian Li, Sheng Wei, Danyang Bao, Hui Zhou, and Guodong Sun. "An exact analytical solution for coupled vibration analysis of a piezoelectric resonator." Journal of Physics: Conference Series 2822, no. 1 (2024): 012190. http://dx.doi.org/10.1088/1742-6596/2822/1/012190.

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Abstract Piezoelectric resonators are widely used as the active components in devices such as sensors, actuators, communication filters, and micro/nano-electro-mechanical systems (MEMS / NEMS). Due to the piezoelectric effect, Poisson’s ratio, and its finite dimension, the thickness and lateral vibration modes in a piezoelectric resonator are inevitably coupled. In this paper, an exact analytical model for coupled vibration analysis of a piezoceramic disk is developed based on a new superstition method. The free vibrations are decomposed into thickness and lateral directions in a new form of F

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Okuda-Shimazaki, Junko, Ken-Ichi Wada, and Akiyoshi Taniguchi. "Live Cell-Based Sensor Devices." Open Biotechnology Journal 1, no. 1 (2007): 31–33. http://dx.doi.org/10.2174/1874070700701010031.

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Living cells maintain life functions by responding quickly and with great sensitivity to changes in the external environment. Consequently, sensors using cells as active elements are thought to be able to perform analyses faster and with more sensitivity than previously possible. Cell-based sensors can be roughly divided into two types. The first uses microorganisms such as Escherichia coli or yeast as active elements (Microbial cells). The second type uses human and animal cells (Mammalian cells). The first type can be cultivated rather easily and has the advantages of being inexpensive and p

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Wang, Baoming, Hao Rong, and Miao Lu. "Well Aligned Single-Walled Carbon Nanotube (SWNT) Film as a Building Block for MEMS/NEMS Devices." ECS Transactions 44, no. 1 (2019): 1381–85. http://dx.doi.org/10.1149/1.3694475.

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