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Relevant bibliographies by topics / MEMS systems

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Academic literature on the topic 'MEMS systems'

Author: Grafiati

Published: 5 June 2025

Last updated: 2 August 2025

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Journal articles on the topic "MEMS systems"

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Tadigadapa, Srinivas A., and Nader Najafi. "Developments in Microelectromechanical Systems (MEMS): A Manufacturing Perspective." Journal of Manufacturing Science and Engineering 125, no. 4 (2003): 816–23. http://dx.doi.org/10.1115/1.1617286.

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This paper presents a discussion of some of the major issues that need to be considered for the successful commercialization of MEMS products. The diversity of MEMS devices and historical reasons have led to scattered developments in the MEMS manufacturing infrastructure. A good manufacturing strategy must include the complete device plan including package as part of the design and process development of the device. In spite of rapid advances in the field of MEMS there are daunting challenges that lie in the areas of MEMS packaging, and reliability testing. CAD tools for MEMS are starting to g

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Semennikov, Anton V. "INNOVATIONS IN MICROELECTROMECHANICAL SYSTEMS (MEMS)." EKONOMIKA I UPRAVLENIE: PROBLEMY, RESHENIYA 8/5, no. 147 (2024): 84–96. http://dx.doi.org/10.36871/ek.up.p.r.2024.08.05.010.

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The article reviews current innovations in the field of microelectromechanical systems (MEMS), including recent advances in materials, manufacturing technologies, and design. Particular attention is paid to the integration of MEMS with other technologies, such as nanoelectromechanical systems (NEMS) and microelectronics. Examples of innovative MEMS applications in medicine, automotive, and consumer electronics illustrate the importance of these systems in various industries. Trends and prospects for the development of MEMS, as well as the technological and commercial challenges this field face

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Fallah Nia, Ehsan, and Ammar Kouki. "Ceramics for Microelectromechanical Systems Applications: A Review." Micromachines 15, no. 10 (2024): 1244. http://dx.doi.org/10.3390/mi15101244.

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A comprehensive review of the application of different ceramics for MEMS devices is presented. Main ceramics materials used for MEMS systems and devices including alumina, zirconia, aluminum Nitride, Silicon Nitride, and LTCC are introduced. Conventional and new methods of fabricating each material are explained based on the literature, along with the advantages of the new approaches, mainly additive manufacturing, i.e., 3D-printing technologies. Various manufacturing processes with relevant sub-techniques are detailed and the ones that are more suitable to have an application for MEMS devices

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Kuznetsov, P. S. "Microelectromechanical systems for improved gyroscope design." Russian Technological Journal 13, no. 3 (2025): 103–21. https://doi.org/10.32362/2500-316x-2025-13-3-103-121.

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Objectives. Microsystem engineering is currently receiving a great deal of research attention due to the very wide scope of application of its various elements. The present study of the development and creation of modern gyroscopes based on microelectromechanical systems (MEMS gyroscopes) analyzes the risks associated with the technological aspects of their production and identifies promising areas for further development both of MEMS gyroscopes themselves and the technologies used to manufacture them.Methods. A detailed analysis of existing scientific publications, analytical reviews, and oth

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Feng, Tianren, Quan Yuan, Duli Yu, Bo Wu, and Hui Wang. "Concepts and Key Technologies of Microelectromechanical Systems Resonators." Micromachines 13, no. 12 (2022): 2195. http://dx.doi.org/10.3390/mi13122195.

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In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and re

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Djakov, Tatjana, Ivanka Popovic, and Ljubinka Rajakovic. "Micro-electro-mechanical systems (MEMS): Technology for the 21st century." Chemical Industry 68, no. 5 (2014): 629–41. http://dx.doi.org/10.2298/hemind131008091d.

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Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration,

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Alves, Fabio, and Justin Ivancic. "Narrowband underwater vector sensor using michroelectromechanical systems." Journal of the Acoustical Society of America 154, no. 4_supplement (2023): A210. http://dx.doi.org/10.1121/10.0023306.

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A narrowband underwater vector sensor using microelectromechanical (MEMS) systems is demonstrated. A combination of two pressure gradient MEMS sensors and an omnidirectional hydrophone allows for determination of the direction of arrival (DOA) of income sound over 360 degrees azimuth. The MEMS sensors, inspired on the hearing system of the Ormia-ochracea fly, consist of two wings connected by a bridge and anchored to the substrate by a tortional bean. They are operated with open back to allow a cosine dependence with the angle of incidence in the predominant bending vibrational mode. In the ve

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Zhou, Guangcan, Zi Heng Lim, Yi Qi, and Guangya Zhou. "Single-Pixel MEMS Imaging Systems." Micromachines 11, no. 2 (2020): 219. http://dx.doi.org/10.3390/mi11020219.

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Single-pixel imaging technology is an attractive technology considering the increasing demand of imagers that can operate in wavelengths where traditional cameras have limited efficiency. Meanwhile, the miniaturization of imaging systems is also desired to build affordable and portable devices for field applications. Therefore, single-pixel imaging systems based on microelectromechanical systems (MEMS) is an effective solution to develop truly miniaturized imagers, owing to their ability to integrate multiple functionalities within a small device. MEMS-based single-pixel imaging systems have m

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Esashi, Masayoshi, and Shuji Tanaka. "Integrated Microsystems." Advances in Science and Technology 81 (September 2012): 55–64. http://dx.doi.org/10.4028/www.scientific.net/ast.81.55.

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Technology called MEMS (Micro Electro Mechanical Systems) or microsystems are heterogeneous integration on silicon chips and play important roles as sensors. MEMS as switches and resonators fabricated on LSI are needed for future multi-band wireless systems. MEMS for safety systems as event driven tactile sensor network for nursing robot are developed. Wafer level packaging for MEMS and open collaboration to reduce the cost for the development are discussed.

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Polla, D. L., and L. F. Francis. "Ferroelectric Thin Films in Micro-electromechanical Systems Applications." MRS Bulletin 21, no. 7 (1996): 59–65. http://dx.doi.org/10.1557/s0883769400035934.

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Ferroelectric ceramic thin films fit naturally into the burgeoning field of microelectromechanical systems (MEMS). Microelectromechanical systems combine traditional Si integrated-circuit (IC) electronics with micromechanical sensing and actuating components. The term MEMS has become synonymous with many types of microfabricated devices such as accelerometers, infrared detectors, flow meters, pumps, motors, and mechanical components. These devices have lateral dimensions in the range of 10 μm–10 mm. The ultimate goal of MEMS is a self-contained system of interrelated sensing and actuating devi

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Dissertations / Theses on the topic "MEMS systems"

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Frisk, Thomas. "MEMS interfaces for bioanalysis systems /." Stockholm : Elektriska energisystem, Kungliga Tekniska högskolan, 2008. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-4609.

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Then, Alan M. (Alan Michael) 1965. "Commercialization of microelectromechanical systems (MEMS)." Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8920.

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Thesis (S.M.M.O.T.)--Massachusetts Institute of Technology, Sloan School of Management, Management of Technology Program, 2001.<br>Includes bibliographical references (leaves 69-72).<br>Microelectromechanical systems (MEMS), at their core are a set of technologies that employ the processes developed in the integrated circuit (IC) and semiconductor industries to construct electro- mechanical devices. In the case of Microopticelectromechanical systems (MOEMS), optical elements are also integrated into these devices. MEMS technology holds the promise of significantly miniaturizing, reducing the c

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Wang, Limin. "Modeling and real-time feedback control of MEMS device." Morgantown, W. Va. : [West Virginia University Libraries], 2004. https://etd.wvu.edu/etd/controller.jsp?moduleName=documentdata&jsp%5FetdId=3711.

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Thesis (Ph. D.)--West Virginia University, 2004.<br>Title from document title page. Document formatted into pages; contains v, 132 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 128-132).

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Tse, Laam Angela. "MEMS packaging with stereolithography." Thesis, Georgia Institute of Technology, 2002. http://hdl.handle.net/1853/17025.

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Spadaccini, Christopher M. (Christopher Michael) 1974. "Combustion systems for power-MEMS applications." Thesis, Massachusetts Institute of Technology, 2004. http://hdl.handle.net/1721.1/17813.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, June 2004.<br>"February 2004."<br>Includes bibliographical references (p. 261-270).<br>As part of an effort to develop a micro-scale gas turbine engine for power generation and micro-propulsion applications, this thesis presents the design, fabrication, experimental testing, and modeling of the combustion system. Two fundamentally different combustion systems are presented; an advanced homogenous gas-phase microcombustor and a heterogeneous catalytic microcombustor. An advanced gas-phase microcombust

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Robinson, Gary Neil 1960. "The commercialization of microelectromechanical systems (MEMS)." Thesis, Massachusetts Institute of Technology, 1999. http://hdl.handle.net/1721.1/9534.

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Thesis (S.M.M.O.T.)--Massachusetts Institute of Technology, Sloan School of Management, Management of Technology Program, 1999.<br>Includes bibliographical references (leaf 80).<br>Microelectromechanical systems (MEMS) comprise a set of technologies for the micromachining and electromechanical integration of sensors and actuators. MEMS allow for the radical miniaturization of such devices, as well as for significant improvements in performance and cost over conventionally fabricated mechanical and electrical components. In this thesis, I attempt to assess the value inherent in MEMS innovations

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Cragun, Rebecca. "Thermal Microactuators for Microelectromechanical Systems (MEMS)." BYU ScholarsArchive, 2003. https://scholarsarchive.byu.edu/etd/54.

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Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in microelectromechanical systems (MEMS). The microactuators developed were tested to determine the magnitude of their deflection and estimate their force. Five groups of thermal microactuators were designed and tested. All of the groups used the geometrically constrained expansion of various segments to produce their deflecti

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Wang, Kerwin. "Micro-optical components for a MEMS integrated display /." Thesis, Connect to this title online; UW restricted, 2004. http://hdl.handle.net/1773/6047.

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Wong, Christine Y. 1975. "Strategic outsourcing of micro-electromechanical systems (MEMS)." Thesis, Massachusetts Institute of Technology, 2002. http://hdl.handle.net/1721.1/43726.

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Thesis (M.B.A.)--Massachusetts Institute of Technology, Sloan School of Management; and, (S.M.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering; in conjunction with the Leaders for Manufacturing Program at MIT, 2002.<br>"June 2002."<br>Includes bibliographical references (leaves 60-61).<br>ABB Automation is starting to experiment with Micro-electrical Mechanical Systems (MEMS) as an enabling technology for their products. If ABB's implementation of MEMS is found successful, it will be able to create breakthrough products and services that will revolutionize

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Strawser, Richard E. "MEMS Electrostatic Switching Technology for Microwave Systems." University of Cincinnati / OhioLINK, 2000. http://rave.ohiolink.edu/etdc/view?acc_num=ucin974746046.

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Books on the topic "MEMS systems"

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Hartzell, Allyson L. MEMS Reliability. Springer Science+Business Media, LLC, 2011.

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Chang, Liu. Foundations of MEMS. 2nd ed. Prentice Hall, 2012.

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Brand, Oliver, and Gary K. Fedder. CMOS-MEMS. Wiley-VCH, 2005.

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Varadan, Vijay K., K. J. Vinoy, and S. Gopalakrishnan. Smart Material Systems and MEMS. John Wiley & Sons, Ltd, 2006. http://dx.doi.org/10.1002/0470093633.

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M, Newman Robert, Kraft Michael, Flewitt Andrew, Lima Monteiro, Davies William de, 1972-, and Knovel (Firm), eds. Smart MEMS and sensor systems. Imperial College Press, 2006.

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Toshiyuki, Tsuchiya, and Tabata Osamu 1956-, eds. Reliability of MEMS. Wiley-VCH, 2008.

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service), INSPEC (Information, and Knovel (Firm), eds. MEMS packaging. INSPEC, 2004.

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Tai-Ran, Hsu, and INSPEC, eds. MEMS packaging. INSPEC, 2004.

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H, Bernstein David, ed. Modeling MEMS and NEMS. Chapman & Hall/CRC, 2003.

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Kärkkäinen, Anna-Maija. MEMS based voltage references. VTT Technical Research Centre of Finland, 2006.

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Book chapters on the topic "MEMS systems"

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Yunjia, Li. "Microelectromechanical Systems (MEMS)." In Material-Integrated Intelligent Systems - Technology and Applications. Wiley-VCH Verlag GmbH & Co. KGaA, 2017. http://dx.doi.org/10.1002/9783527679249.ch4.

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Young, Darrin J., and Hanseup Kim. "Microelectromechanical Systems (MEMS)." In Guide to State-of-the-Art Electron Devices. John Wiley & Sons, Ltd, 2013. http://dx.doi.org/10.1002/9781118517543.ch18.

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Juarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, et al. "MEMS = Microelectromechanical Systems." In Encyclopedia of Nanotechnology. Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_100394.

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Alves, F. S., R. A. Dias, J. Cabral, and L. A. Rocha. "Autonomous MEMS Inclinometer." In Autonomous and Intelligent Systems. Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-31368-4_4.

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Duraffourg, Laurent, and Julien Arcamone. "From MEMS to NEMS." In Nanoelectromechanical Systems. John Wiley & Sons, Inc., 2015. http://dx.doi.org/10.1002/9781119005032.ch1.

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Ortloff, Dirk, Thilo Schmidt, Kai Hahn, Tomasz Bieniek, Grzegorz Janczyk, and Rainer Brück. "Micro- and Nano Systems: A World of Its Own." In MEMS Product Engineering. Springer Vienna, 2013. http://dx.doi.org/10.1007/978-3-7091-0706-5_3.

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Naik, Suketu, and Takashi Hikihara. "Synchronization in Coupled MEMS Resonators." In Understanding Complex Systems. Springer International Publishing, 2013. http://dx.doi.org/10.1007/978-3-319-02925-2_31.

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Konstantakos, Vasileios, Ioannis Sofianidis, Konstantinos Kozalakis, Kostas Siozios, Stylianos Siskos, and Theodore Laopoulos. "Earthquake Monitoring with MEMS Sensors." In Intelligent Sustainable Systems. Springer Nature Singapore, 2023. http://dx.doi.org/10.1007/978-981-19-7660-5_65.

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Pratap, Rudra. "Resonant MEMS Sensors." In IUTAM Symposium on Multi-Functional Material Structures and Systems. Springer Netherlands, 2009. http://dx.doi.org/10.1007/978-90-481-3771-8_21.

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Juarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, et al. "MEMS (Micro-electro-Mechanical Systems)." In Encyclopedia of Nanotechnology. Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_100393.

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Conference papers on the topic "MEMS systems"

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Huang, Po-Han, Lee-Lun Lai, Theocharis Iordanidis, et al. "3D Printed Mems." In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2025. https://doi.org/10.1109/mems61431.2025.10917711.

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"Microelectromechanical systems (MEMS)." In IECON 2011 - 37th Annual Conference of IEEE Industrial Electronics. IEEE, 2011. http://dx.doi.org/10.1109/iecon.2011.6119970.

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"Microelectromechanical systems (MEMS)." In 2011 IEEE 43rd Southeastern Symposium on System Theory (SSST 2011). IEEE, 2011. http://dx.doi.org/10.1109/ssst.2011.5753816.

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Rojas-Hernandez, A. G., A. Vera-Marquina, D. Berman-Mendoza, and A. Garcia-Juarez. "Design of spectrometers and ended-ended systems." In MOEMS-MEMS, edited by Harald Schenk and Wibool Piyawattanametha. SPIE, 2010. http://dx.doi.org/10.1117/12.847793.

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Drabe, Christian, Richard James, Harald Schenk, and Thilo Sandner. "MEMS devices for laser camera systems for endoscopic applications." In MOEMS-MEMS, edited by Harald Schenk and Wibool Piyawattanametha. SPIE, 2010. http://dx.doi.org/10.1117/12.846855.

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Bhave, Sunil. "Monolithic MEMS + Photonics Systems." In The 7th International Multidisciplinary Conference on Optofluidics 2017. MDPI, 2017. http://dx.doi.org/10.3390/optofluidics2017-04405.

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Gabriel, Kaigham J., and James M. McMichael. "Realizing Systems With MEMS." In ASME 1996 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 1996. http://dx.doi.org/10.1115/imece1996-0689.

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Abstract As computers increasingly leave fixed locations and appear in the pockets and palms of users, they are getting closer to the physical world, creating new opportunities for perceiving and controlling the physical environment. To exploit these opportunities, computers will need to sense and act as well as compute. Filling this need is the driving force for the development of microelectromechanical systems (MEMS).

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Khosla, A., J. L. Korčok, B. L. Gray, et al. "Fabrication and testing of integrated permanent micromagnets for microfluidic systems." In MOEMS-MEMS, edited by Holger Becker and Wanjun Wang. SPIE, 2010. http://dx.doi.org/10.1117/12.840942.

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"Microelectromechanical systems (MEMS) devices and systems." In IECON 2010 - 36th Annual Conference of IEEE Industrial Electronics. IEEE, 2010. http://dx.doi.org/10.1109/iecon.2010.5675098.

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"Microelectromechanical systems (MEMS) devices and systems." In IECON 2009 - 35th Annual Conference of IEEE Industrial Electronics (IECON). IEEE, 2009. http://dx.doi.org/10.1109/iecon.2009.5415325.

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Reports on the topic "MEMS systems"

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Freeman, Dennis M. Computer Microvision for Microelectromechanical Systems (MEMS). Defense Technical Information Center, 2003. http://dx.doi.org/10.21236/ada419775.

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Strawser, Richard E. Microelectromagnetic Systems (MEMS) Electrostatic Switching Technology for Microwave Systems. Defense Technical Information Center, 2000. http://dx.doi.org/10.21236/ada388290.

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Mastrangelo, C. H. Microfabrication Techniques for Plastic Microelectromechanical Systems (MEMS). Defense Technical Information Center, 2003. http://dx.doi.org/10.21236/ada420836.

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Anton Carl Greenwald. MEMS CHIP CO2 SENSOR FOR BUILDING SYSTEMS INTEGRATION. Office of Scientific and Technical Information (OSTI), 2005. http://dx.doi.org/10.2172/860161.

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Feddema, J. T., R. Simon, M. Polosky, and T. Christenson. Ultra-Precise Assembly of Micro-Electromechanical Systems (MEMS) Components. Office of Scientific and Technical Information (OSTI), 1999. http://dx.doi.org/10.2172/5833.

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Gluck, Natalie S., and Howard R. Last. Military and Potential Homeland Security Applications for Microelectromechanical Systems (MEMS). Defense Technical Information Center, 2004. http://dx.doi.org/10.21236/ada430286.

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Goldsmith, Charles L. Robust, Reliable, Radio Frequency (RF) Microelectromechanical Systems (MEMS) Capacitive Switches. Defense Technical Information Center, 2005. http://dx.doi.org/10.21236/ada432262.

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Giedd, Ryan, Matt Curry, Paul Durham, and Norm Dobson. Biosensors Made From Carbon and Polymer Composite Micro-Electromechanical Systems (MEMS). Defense Technical Information Center, 2004. http://dx.doi.org/10.21236/ada426181.

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Giedd, Ryan, Matt Curry, Paul Durham, and Norm Dobson. Biosensors Made from Carbon and Polymer Composite Micro-Electromechanical Systems (MEMS). Defense Technical Information Center, 2003. http://dx.doi.org/10.21236/ada419760.

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Kirshberg, Jeffrey A. Microelectromechanical Systems (MEMS)-Based Microcapillary Pumped Loop for Chip-Level Temperature Control. Defense Technical Information Center, 2002. http://dx.doi.org/10.21236/ada405777.

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