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Books on the topic 'MEMS systems'

Author: Grafiati

Published: 5 June 2025

Last updated: 2 August 2025

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1

Hartzell, Allyson L. MEMS Reliability. Springer Science+Business Media, LLC, 2011.

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2

Chang, Liu. Foundations of MEMS. 2nd ed. Prentice Hall, 2012.

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3

Brand, Oliver, and Gary K. Fedder. CMOS-MEMS. Wiley-VCH, 2005.

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4

Varadan, Vijay K., K. J. Vinoy, and S. Gopalakrishnan. Smart Material Systems and MEMS. John Wiley & Sons, Ltd, 2006. http://dx.doi.org/10.1002/0470093633.

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5

M, Newman Robert, Kraft Michael, Flewitt Andrew, Lima Monteiro, Davies William de, 1972-, and Knovel (Firm), eds. Smart MEMS and sensor systems. Imperial College Press, 2006.

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6

Toshiyuki, Tsuchiya, and Tabata Osamu 1956-, eds. Reliability of MEMS. Wiley-VCH, 2008.

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7

service), INSPEC (Information, and Knovel (Firm), eds. MEMS packaging. INSPEC, 2004.

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8

Tai-Ran, Hsu, and INSPEC, eds. MEMS packaging. INSPEC, 2004.

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9

H, Bernstein David, ed. Modeling MEMS and NEMS. Chapman & Hall/CRC, 2003.

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10

Kärkkäinen, Anna-Maija. MEMS based voltage references. VTT Technical Research Centre of Finland, 2006.

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11

1945-, Gad-el-Hak Mohamed, ed. The MEMS handbook. 2nd ed. CRC/Taylor & Francis, 2006.

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12

Castañer, Luis. Understanding MEMS: Principles and applications. John Wiley & Sons, 2015.

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13

Hensler, Ralph. MEMS technology: Where to? Business Communications Co., 2002.

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14

1958-, Wang Wanjun, and Soper Steven A, eds. Bio-MEMS: Technologies and applications. CRC/Taylor & Francis, 2007.

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15

(Editor), A. P. Lee, J. Simon (Editor), and Q. Tan (Editor), eds. Microelectromechanical Systems (Mems--Microelectromechanical Systems Series). American Society of Mechanical Engineers, 2000.

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16

Lee, Yung-Cheng. MEMS Packaging. World Scientific Publishing Co Pte Ltd, 2018.

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17

Gad-el-Hak, Mohamed. Mems: Applications. Taylor & Francis Group, 2005.

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18

Hartzell, Allyson L., Mark G. da Silva, and Herbert R. Shea. MEMS Reliability. Springer, 2010.

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19

Liu, Chang. Foundation of MEMS. Pearson Education, Limited, 2011.

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20

Liu, Ai-Qun. Photonic Mems Devices. Taylor & Francis Group, 2019.

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21

Korvink, Jan G., Henry Baltes, O. Brand, G. K. Fedder, and Christofer Hierold. CMOS-MEMS. Wiley-VCH Verlag GmbH, 2013.

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22

Brand, Oliver, Jan G. Korvink, Henry Baltes, Gary K. Fedder, and Christofer Hierold. Cmos - Mems. Wiley & Sons, Incorporated, John, 2013.

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23

Brand, Oliver, Jan G. Korvink, Henry Baltes, Gary K. Fedder, and Christofer Hierold. Cmos - Mems. Wiley & Sons, Limited, John, 2008.

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24

Gad-el-Hak, Mohamed. Mems: Applications. Taylor & Francis Group, 2005.

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25

Gad-el-Hak, Mohamed. MEMS Handbook. Taylor & Francis Group, 2001.

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26

Smart Material Systems and MEMS. John Wiley & Sons, Ltd., 2006.

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27

Monteiro, Davies Lima. Smart MEMS and Sensor Systems. World Scientific Publishing Co Pte Ltd, 2006.

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28

Mems: Micro-Electro-Mechanical Systems. Independently Published, 2021.

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29

Fundamentals of Microelectromechanical Systems (MEMS). McGraw-Hill Education, 2021.

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30

Varadan, Vijay, S. Gopalakrishnan, and K. J. Vinoy. Smart Material Systems and Mems. Wiley & Sons, Incorporated, John, 2006.

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31

(Editor), J. L. Davidson, P. J. Hesketh (Editor), D. Misra (Editor), and S. Shoji (Editor), eds. Microfabricated Systems and MEMS VII. Electrochemical Society, 2006.

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32

Hesketh, P. J. Microfabricated Systems and Mems 6. Electrochemical Society, 2002.

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33

Yuan, Li. MEMS, NANO and Smart Systems. Trans Tech Publications, Limited, 2011.

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34

Newman, Robert, and Elena Gaura. Smart Mems And Sensor Systems. Imperial College Press, 2006.

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35

Yuan, Li. MEMS, NANO and Smart Systems. Trans Tech Publications Ltd, 2011. http://dx.doi.org/10.4028/b-cpng03.

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36

Smart Mems and Sensor Systems. World Scientific Publishing Co Pte Ltd, 2006.

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37

SMART MEMS AND SENSOR SYSTEMS. IMPERIAL COLLEGE PRESS, 2006.

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38

Hsu, Tai-Ran. MEMS and Microsystems. Mayfield, 2001.

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39

Yang, De Huai. MEMS and Mechanics. Trans Tech Publications, Limited, 2013.

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40

Yang, Dehuai. MEMS and Mechanics. Trans Tech Publications, Limited, 2013.

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41

Foundations of MEMS. Pearson Prentice Hall, 2005.

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42

Gad-el-Hak, Mohamed. The MEMS Handbook. 2nd ed. CRC, 2005.

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43

Mems And Nanotechnology. Springer, 2012.

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44

Jones, T. B. Electromechanics and MEMS. 2012.

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45

Chiao, Jung-Chih, and Mu Chiao. Biomaterials for MEMS. Jenny Stanford Publishing, 2011.

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46

Biomaterials for Mems. Pan Stanford Publishing, 2010.

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47

Systemlevel Modeling Of Mems. Wiley-VCH Verlag GmbH, 2013.

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48

Hsu, Tai-Ran. MEMS and Microsystems. Mayfield, 2001.

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49

Hsu, Tai-Ran. MEMS Packaging. Institution of Engineering & Technology, 2004.

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50

Maria Teresa S.R. Gomes. Smart Sensors and MEMS. Springer, 2005.

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