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Journal articles on the topic 'MEMS systems'

Author: Grafiati

Published: 5 June 2025

Last updated: 2 August 2025

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1

Tadigadapa, Srinivas A., and Nader Najafi. "Developments in Microelectromechanical Systems (MEMS): A Manufacturing Perspective." Journal of Manufacturing Science and Engineering 125, no. 4 (2003): 816–23. http://dx.doi.org/10.1115/1.1617286.

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This paper presents a discussion of some of the major issues that need to be considered for the successful commercialization of MEMS products. The diversity of MEMS devices and historical reasons have led to scattered developments in the MEMS manufacturing infrastructure. A good manufacturing strategy must include the complete device plan including package as part of the design and process development of the device. In spite of rapid advances in the field of MEMS there are daunting challenges that lie in the areas of MEMS packaging, and reliability testing. CAD tools for MEMS are starting to g

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2

Semennikov, Anton V. "INNOVATIONS IN MICROELECTROMECHANICAL SYSTEMS (MEMS)." EKONOMIKA I UPRAVLENIE: PROBLEMY, RESHENIYA 8/5, no. 147 (2024): 84–96. http://dx.doi.org/10.36871/ek.up.p.r.2024.08.05.010.

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The article reviews current innovations in the field of microelectromechanical systems (MEMS), including recent advances in materials, manufacturing technologies, and design. Particular attention is paid to the integration of MEMS with other technologies, such as nanoelectromechanical systems (NEMS) and microelectronics. Examples of innovative MEMS applications in medicine, automotive, and consumer electronics illustrate the importance of these systems in various industries. Trends and prospects for the development of MEMS, as well as the technological and commercial challenges this field face

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Fallah Nia, Ehsan, and Ammar Kouki. "Ceramics for Microelectromechanical Systems Applications: A Review." Micromachines 15, no. 10 (2024): 1244. http://dx.doi.org/10.3390/mi15101244.

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A comprehensive review of the application of different ceramics for MEMS devices is presented. Main ceramics materials used for MEMS systems and devices including alumina, zirconia, aluminum Nitride, Silicon Nitride, and LTCC are introduced. Conventional and new methods of fabricating each material are explained based on the literature, along with the advantages of the new approaches, mainly additive manufacturing, i.e., 3D-printing technologies. Various manufacturing processes with relevant sub-techniques are detailed and the ones that are more suitable to have an application for MEMS devices

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Kuznetsov, P. S. "Microelectromechanical systems for improved gyroscope design." Russian Technological Journal 13, no. 3 (2025): 103–21. https://doi.org/10.32362/2500-316x-2025-13-3-103-121.

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Objectives. Microsystem engineering is currently receiving a great deal of research attention due to the very wide scope of application of its various elements. The present study of the development and creation of modern gyroscopes based on microelectromechanical systems (MEMS gyroscopes) analyzes the risks associated with the technological aspects of their production and identifies promising areas for further development both of MEMS gyroscopes themselves and the technologies used to manufacture them.Methods. A detailed analysis of existing scientific publications, analytical reviews, and oth

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Feng, Tianren, Quan Yuan, Duli Yu, Bo Wu, and Hui Wang. "Concepts and Key Technologies of Microelectromechanical Systems Resonators." Micromachines 13, no. 12 (2022): 2195. http://dx.doi.org/10.3390/mi13122195.

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In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and re

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Djakov, Tatjana, Ivanka Popovic, and Ljubinka Rajakovic. "Micro-electro-mechanical systems (MEMS): Technology for the 21st century." Chemical Industry 68, no. 5 (2014): 629–41. http://dx.doi.org/10.2298/hemind131008091d.

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Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration,

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Alves, Fabio, and Justin Ivancic. "Narrowband underwater vector sensor using michroelectromechanical systems." Journal of the Acoustical Society of America 154, no. 4_supplement (2023): A210. http://dx.doi.org/10.1121/10.0023306.

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A narrowband underwater vector sensor using microelectromechanical (MEMS) systems is demonstrated. A combination of two pressure gradient MEMS sensors and an omnidirectional hydrophone allows for determination of the direction of arrival (DOA) of income sound over 360 degrees azimuth. The MEMS sensors, inspired on the hearing system of the Ormia-ochracea fly, consist of two wings connected by a bridge and anchored to the substrate by a tortional bean. They are operated with open back to allow a cosine dependence with the angle of incidence in the predominant bending vibrational mode. In the ve

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Zhou, Guangcan, Zi Heng Lim, Yi Qi, and Guangya Zhou. "Single-Pixel MEMS Imaging Systems." Micromachines 11, no. 2 (2020): 219. http://dx.doi.org/10.3390/mi11020219.

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Single-pixel imaging technology is an attractive technology considering the increasing demand of imagers that can operate in wavelengths where traditional cameras have limited efficiency. Meanwhile, the miniaturization of imaging systems is also desired to build affordable and portable devices for field applications. Therefore, single-pixel imaging systems based on microelectromechanical systems (MEMS) is an effective solution to develop truly miniaturized imagers, owing to their ability to integrate multiple functionalities within a small device. MEMS-based single-pixel imaging systems have m

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9

Esashi, Masayoshi, and Shuji Tanaka. "Integrated Microsystems." Advances in Science and Technology 81 (September 2012): 55–64. http://dx.doi.org/10.4028/www.scientific.net/ast.81.55.

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Technology called MEMS (Micro Electro Mechanical Systems) or microsystems are heterogeneous integration on silicon chips and play important roles as sensors. MEMS as switches and resonators fabricated on LSI are needed for future multi-band wireless systems. MEMS for safety systems as event driven tactile sensor network for nursing robot are developed. Wafer level packaging for MEMS and open collaboration to reduce the cost for the development are discussed.

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Polla, D. L., and L. F. Francis. "Ferroelectric Thin Films in Micro-electromechanical Systems Applications." MRS Bulletin 21, no. 7 (1996): 59–65. http://dx.doi.org/10.1557/s0883769400035934.

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Ferroelectric ceramic thin films fit naturally into the burgeoning field of microelectromechanical systems (MEMS). Microelectromechanical systems combine traditional Si integrated-circuit (IC) electronics with micromechanical sensing and actuating components. The term MEMS has become synonymous with many types of microfabricated devices such as accelerometers, infrared detectors, flow meters, pumps, motors, and mechanical components. These devices have lateral dimensions in the range of 10 μm–10 mm. The ultimate goal of MEMS is a self-contained system of interrelated sensing and actuating devi

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11

Navickas, R. "Technological Trends of Nanoelectromechanical Systems." Solid State Phenomena 113 (June 2006): 7–12. http://dx.doi.org/10.4028/www.scientific.net/ssp.113.7.

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The analysis of technological trends nanoelectromechanical systems and processes of self-formation micro- and nanostructures in manufacturing MEMS/NEMS have been made and the requirements have been formulated. The results of modeling geometry nanostructures and the implementation of self-formation processes for creating new technologies of manufacturing MEMS/NEMS have also been presented.

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Novikov, P. V., V. N. Gerdi, and V. V. Novikov. "Application of microelectromechanical sensors in the integrated navigation system of ground transport and agricultural technological vehicle." Izvestiya MGTU MAMI 10, no. 3 (2016): 25–31. http://dx.doi.org/10.17816/2074-0530-66898.

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The questions of assessment of achievable performance values of the integrated inertial-satellite navigation system complexed with odometer sensor and used for ground transport and agricultural technological vehicle are considered. Construction of relatively cheap modern navigation systems for ground transport and agricultural technological vehicles is provided by integrating diverse navigation systems, which include inertial-satellite systems that combine into a single hardware system the inertial and satellite modules. Achievable accuracy of gaining the navigation parameters is achieved by u

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Kartunov, Stefan. "Micro-Electromechanical Systems In The Ecology." Environment. Technology. Resources. Proceedings of the International Scientific and Practical Conference 2 (August 5, 2015): 163. http://dx.doi.org/10.17770/etr2011vol2.981.

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In the present paper a definition, a model for building of MEMS (micro-electromechanical systems), types, their advantages and disadvantages have been given. The elements and the components, from which they are built, the development and the prediction of market about them have been considered as well more important firms, that manufacture them. A classification of MEMS is made on the basis of their designation and the region, where they operate. A special place is separated on the application of MEMS in the ecology as well as concrete examples are indicated – developments of firms and own one

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Lai, Ying-Cheng. "Nonlinear Dynamics and Chaos in Micro/Nano-Scale Systems and Applications." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2016, DPC (2016): 001588–612. http://dx.doi.org/10.4071/2016dpc-wp34.

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Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) are characterized by their small size, extremely low power consumption, and ultra fast speed. Recent years have witnessed a growing interest in the fundamental nonlinear dynamics of MEMS/NEMS and their potential applications. The Nonlinear Dynamics group at Arizona State University carried out a series of studies to investigate nonlinear dynamics and chaos in MEMS/NEMS on topics such as inducing chaos in MEMS, spatiotemporal chaos and intrinsic localized motions in MEMS oscillator arrays, extensive chaos in electros

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15

Kanai, Satoshi, Takayuki Shibata, and Takahiro Kawashima. "Feature-Based 3D Process Planning for MEMS Fabrication." International Journal of Automation Technology 8, no. 3 (2014): 406–19. http://dx.doi.org/10.20965/ijat.2014.p0406.

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With the fast growth of the market forMEMS (Micro-Electro-Mechanical Systems) devices, Computer-Aided Design (CAD) and Computer-Aided Process Planning (CAPP) systems for MEMS are essential for the appropriate division of labor between MEMS design and fabrication. Although several CAD systems for MEMS devices are commercially available, CAPP systems for MEMS are still underdeveloped, and few systems have been investigated. The purpose of this study is to prototype a CAPP system for MEMS for non-expert MEMS designers. MEMS device geometry, a complex layered structure made of multiple materials,

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Rajassekharan, Dinesh. "Comparative Study of Piezoelectric MEMS for Enhanced Biosensors." Journal of Electronics and Informatics 6, no. 3 (2024): 278–91. http://dx.doi.org/10.36548/jei.2024.3.007.

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Piezoelectric MEMS (Micro-Electro-Mechanical Systems) refers to devices that combine the principles of piezoelectricity with microfabrication techniques to create small-scale mechanical systems with integrated electronic components. Piezoelectric Microelectromechanical Systems (MEMS) for enhanced biosensors represent a sophisticated integration of two key technologies: piezoelectric materials and MEMS fabrication techniques. This combination results in highly sensitive, miniaturized devices that can detect and analyze biological molecules with precision. Piezoelectric MEMS devices offer unique

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17

Sheriff B. Lamidi, Sheriff B. Lamidi, Yakub O. Bankole Yakub O. Bankole, Idris O. Olayiwola Idris O. Olayiwola, et al. "Overview of Micro-Machining and MicroElectromechanical Systems (MEMS)." International Journal of Advances in Engineering and Management 7, no. 1 (2025): 295–307. https://doi.org/10.35629/5252-0701295307.

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The quest for technological advancement for parts and systems with lightweight, low energy consumption, greater mobility, as well as higher efficiency and reliability, has birthed an era of miniaturized (micro-size) components and microsystems. These systems have found applications in inkjet printers, computer disk drives, accelerometers, projection display chips, blood pressure sensors, optical switches, microvalves, and biosensors, among others. Micromachining is a process that uses specialized tools and techniques to create small parts and components with precise dimensions and tolerances.

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18

Kranz, Michael, Michael Whitley, Carl Rudd, et al. "Environmentally Isolating Packaging for MEMS Sensors." International Symposium on Microelectronics 2017, no. 1 (2017): 000286–91. http://dx.doi.org/10.4071/isom-2017-wa46_150.

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Abstract Microelectronic systems employing MEMS devices are often constrained by limits on size, weight, power, and cost (SWaP-C), while also being exposed to severe shock and vibration during storage, transport, and operation. This combination of requirements has proven difficult to meet using current technology. Incorporating isolators into microelectronic systems improves performance through shock and vibration, but at the expense of cost and size metrics. Systems based on MEMS technologies have the potential to improve upon size and cost metrics for many applications. MEMS technology has m

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Griffin, Benjamin A., Scott D. Habermehl, and Peggy J. Clews. "High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2014, HITEC (2014): 000040–46. http://dx.doi.org/10.4071/hitec-ta24.

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We report on the efforts at Sandia National Laboratories to develop high temperature capable microelectromechanical systems (MEMS). MEMS transducers are pervasive in today's culture, with examples found in cell phones, automobiles, gaming consoles, and televisions. There is currently a need for MEMS transducers that can operate in more harsh environments, such as automobile engines, gas turbines, nuclear and coal power plants, and petroleum and geothermal well drilling. Our development focuses on the coupling of silicon carbide (SiC) and aluminum nitride (AlN) thin films on SiC wafers to form

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20

Jiang, Cheng Yu, Yang He, and Wei Zheng Yuan. "MEMS R&D Trends." Materials Science Forum 532-533 (December 2006): 181–84. http://dx.doi.org/10.4028/www.scientific.net/msf.532-533.181.

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Micro-Electromechanical Systems (MEMS) has been regarded as one of the most promising technologies for the 21st Century. Recently, some highlight areas attract great attention including Inertial MEMS, Optic MEMS, RF MEMS, BioMEMS, Power MEMS, and NEMS. The state of arts on MEMS research in China is briefly introduced and research activities in Northwestern Polytechnical University such as MEMS CAD tool, inertial MEMS devices, flexible substrate for MEMS integration, micro mirror, micro battery and three dimension measurement are demonstrated.

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21

Shoaib, Muhammad, Nor Hisham Hamid, Aamir Farooq Malik, Noohul Basheer Zain Ali, and Mohammad Tariq Jan. "A Review on Key Issues and Challenges in Devices Level MEMS Testing." Journal of Sensors 2016 (2016): 1–14. http://dx.doi.org/10.1155/2016/1639805.

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The present review provides information relevant to issues and challenges in MEMS testing techniques that are implemented to analyze the microelectromechanical systems (MEMS) behavior for specific application and operating conditions. MEMS devices are more complex and extremely diverse due to the immersion of multidomains. Their failure modes are distinctive under different circumstances. Therefore, testing of these systems at device level as well as at mass production level, that is, parallel testing, is becoming very challenging as compared to the IC test, because MEMS respond to electrical,

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Hong, Bo, Feng Wang, Scott A. Brandt, Darrell D. E. Long, and Thomas J. E. Schwarz. "Using MEMS-based storage in computer systems---MEMS storage architectures." ACM Transactions on Storage 2, no. 1 (2006): 1–21. http://dx.doi.org/10.1145/1138041.1138042.

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23

Polla, D. L., and P. J. Schiller. "Integrated ferroelectric microelectromechanical systems (MEMS)." Integrated Ferroelectrics 7, no. 1-4 (1995): 359–70. http://dx.doi.org/10.1080/10584589508220246.

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24

Bao, Minhang, and Weiyuan Wang. "Future of microelectromechanical systems (MEMS)." Sensors and Actuators A: Physical 56, no. 1-2 (1996): 135–41. http://dx.doi.org/10.1016/0924-4247(96)01274-5.

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25

Markus, K. W., and K. J. Gabriel. "MEMS: the systems function revolution." Computer 32, no. 10 (1999): 25–31. http://dx.doi.org/10.1109/2.796105.

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26

Cobo, Angelica, Roya Sheybani, and Ellis Meng. "MEMS: Enabled Drug Delivery Systems." Advanced Healthcare Materials 4, no. 7 (2015): 969–82. http://dx.doi.org/10.1002/adhm.201400772.

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Shen, Yutong. "Current Status and Application of Micro-electromechanical Systems (MEMS)." Highlights in Science, Engineering and Technology 46 (April 25, 2023): 97–105. http://dx.doi.org/10.54097/hset.v46i.7685.

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MEMS (Micro-electromechanical systems), a technology that produces devices with tiny size and various abilities, has shown its great potential in many areas, but there are still many parts that wait to be improved. This paper would give a brief introduction of the technology with its features, superiorities and drawbacks. Based on these characteristics, several applications of the technology would be introduced with some specific examples. In this paper, current status with the advantages and disadvantages of MEMS would be discussed, and some improvements would be mentioned related to the prob

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Chircov, Cristina, and Alexandru Mihai Grumezescu. "Microelectromechanical Systems (MEMS) for Biomedical Applications." Micromachines 13, no. 2 (2022): 164. http://dx.doi.org/10.3390/mi13020164.

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The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining techniques that combine mechanical and electrical components for fulfilling tasks normally carried out by macroscopic systems. Although their presence is found throughout all the aspects of daily life, recent years have witnessed countless research works involving the application of MEMS within the

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De Alteriis, Giorgio, Enzo Caputo, and Rosario Schiano Lo Moriello. "On the suitability of redundant accelerometers for the implementation of smart oscillation monitoring system: Preliminary assessment." Acta IMEKO 12, no. 2 (2023): 1–9. http://dx.doi.org/10.21014/actaimeko.v12i2.1532.

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Structural health monitoring (SHM) is an essential aspect to ensure the safety and longevity of civil infrastructure. In recent years, there has been a growing interest in developing SHM systems based on Micro-Electro-Mechanical Systems (MEMS) technology. MEMS-based sensors are small, low-power, and cost-effective, making them ideal for large-scale deployment in structural monitoring systems. However, the use of MEMS-based sensors in SHM systems can be challenging due to their inherent errors, such as drift, noise, and bias instability; these errors can affect the accuracy and reliability of t

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Zhu, Jianxiong, Xinmiao Liu, Qiongfeng Shi, et al. "Development Trends and Perspectives of Future Sensors and MEMS/NEMS." Micromachines 11, no. 1 (2019): 7. http://dx.doi.org/10.3390/mi11010007.

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With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the

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Jokic, Ivana, Milos Frantlovic, Zoran Djuric, and Miroslav Dukic. "RF MEMS/NEMS resonators for wireless communication systems and adsorption-desorption phase noise." Facta universitatis - series: Electronics and Energetics 28, no. 3 (2015): 345–81. http://dx.doi.org/10.2298/fuee1503345j.

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During the past two decades a considerable effort has been made to develop radio-frequency (RF) resonators which are fabricated using the micro/nanoelectro-mechanical systems (MEMS/NEMS) technologies, in order to replace conventional large off-chip components in wireless transceivers and other high-speed electronic systems. The first part of the paper presents an overview of RF MEMS and NEMS resonators, including those based on two-dimensional crystals (e.g. graphene). The frequency tuning in MEMS/NEMS resonators is then analyzed. Improvements that would be necessary in order for MEMS/NEMS res

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Shi, Yingli, and Zhigang Shen. "Recent Advances in Flexible RF MEMS." Micromachines 13, no. 7 (2022): 1088. http://dx.doi.org/10.3390/mi13071088.

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Microelectromechanical systems (MEMS) that are based on flexible substrates are widely used in flexible, reconfigurable radio frequency (RF) systems, such as RF MEMS switches, phase shifters, reconfigurable antennas, phased array antennas and resonators, etc. When attempting to accommodate flexible deformation with the movable structures of MEMS, flexible RF MEMS are far more difficult to structurally design and fabricate than rigid MEMS devices or other types of flexible electronics. In this review, we survey flexible RF MEMS with different functions, their flexible film materials and their f

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Wong, Trevor, Bhan Lam, Furi Andi Karnapi, Kenneth Ooi, and Woon-Seng Gan. "Assessment of inter-IC sound microelectromechanical systems microphones for soundscape reporting." INTER-NOISE and NOISE-CON Congress and Conference Proceedings 263, no. 4 (2021): 2259–69. http://dx.doi.org/10.3397/in-2021-2086.

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Acoustic parameters obtained from calibrated acoustic equipment are part of the minimum soundscape reporting requirements as stated in Annex A of ISO 12913-2. To dynamically monitor the acoustic environment of a large area, a large network of acoustic sensors could be deployed, albeit at significant cost. Micro-Electro-Mechanical Systems (MEMS) microphones offer compact, low-cost and high-performance alternatives to traditional analog microphones. In particular, the use of Inter-IC Sound (IS) communication allows MEMS microphones to be conveniently used in concert with I2S output interfaces fo

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Luo, Feng, Liang Zhang, and Zhi Kai Zhang. "Nanomechanical Measurement Methods on the Basis of MEMS." Applied Mechanics and Materials 651-653 (September 2014): 465–71. http://dx.doi.org/10.4028/www.scientific.net/amm.651-653.465.

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Recently microelectromechanical systems (MEMS) have found increasingly more applications in measurement technique in form of sensors and actuators. Here a report on the development and test of nanomechanical measurement methods and systems on the basis of MEMS will be delivered. A nanoforce actuator, a nanotensile test system which are all realized in the form of MEMS are in the focus. Design and numerical simulation of the nanoforce actuator with the help of finite element analysis (FEA) are detailed . In the article the principle of these measurement systems, the design, the manufacture and

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Karman, Salmah B., Mark O. MacQueen, Tina R. Matin, et al. "On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems." Advanced Materials Research 254 (May 2011): 38–41. http://dx.doi.org/10.4028/www.scientific.net/amr.254.38.

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The human senses are of extraordinary value, but we cannot change them, even if this proves to be a disadvantage in our modern times. However, we can assist, enhance and expand these senses via MEMS. This paper introduces data for a push-pull analysis method based on a concise summary of senses in organisms and MEMS sensors that already have reached the market, giving an overview where current MEMS technology excels (available solutions) and where natural sensor systems excel. It provides a knowledge base for further development of MEMS sensors. Some animals and even humans (with artificial le

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LEE, HEE-GOOK, JAE YEONG PARK, JONG UK BU, and YOUNGJOO YEE. "MEMS TECHNOLOGY FOR ADVANCED TELECOMMUNICATION APPLICATIONS." International Journal of High Speed Electronics and Systems 12, no. 02 (2002): 215–33. http://dx.doi.org/10.1142/s0129156402001162.

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MEMS (Micro Electro Mechanical Systems) technology is becoming a crucial enabling technology for optical and RF telecommunication applications due to the performance, cost and integration advantages. All-optical switches and silicon optical benches for optical network systems and RF MEMS components such as RF MEMS switches, tunable capacitors, high Q inductors, and thin film bulk acoustic resonators for miniaturized single chip RF transceivers are discussed. Despite all the promising aspects, practical problems to be addressed for successful commercialization are not trivial. By reviewing opti

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Welburn, Lowell, Amir Milad Moshref Javadi, Luong Nguyen, and Salil Desai. "Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review." Biomolecules 15, no. 6 (2025): 898. https://doi.org/10.3390/biom15060898.

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Designing and manufacturing devices at the micro- and nanoscales offers significant advantages, including high precision, quick response times, high energy density ratios, and low production costs. These benefits have driven extensive research in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS), resulting in various classifications of materials and manufacturing techniques, which are ultimately used to produce different classifications of MEMS devices. The current work aims to systematically organize the literature on MEMS in biomedical devices, encompassing pas

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Sullivan, J. P., T. A. Friedmann, and K. Hjort. "Diamond and Amorphous Carbon MEMS." MRS Bulletin 26, no. 4 (2001): 309–11. http://dx.doi.org/10.1557/mrs2001.68.

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The designer of microelectromechanical systems (MEMS) can increase MEMS performance either by improved mechanical design or by the selection of a MEMS material with improved mechanical performance. In the quest to identify highperformance MEMS materials, diamond and amorphous carbon have recently emerged as a promising class of materials.

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Iannacci, Jacopo, Giuseppe Resta, Paola Farinelli, and Roberto Sorrentino. "RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems." Advances in Science and Technology 81 (September 2012): 65–74. http://dx.doi.org/10.4028/www.scientific.net/ast.81.65.

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MEMS (MicroElectroMechanical-Systems) technology applied to the field of Radio Frequency systems (i.e. RF-MEMS) has emerged in the last 10-15 years as a valuable and viable solution to manufacture low-cost and very high-performance passive components, like variable capacitors, inductors and micro-relays, as well as complex networks, like tunable filters, reconfigurable impedance matching networks and phase shifters, and so on. The availability of such components and their integration within RF systems (e.g. radio transceivers, radars, satellites, etc.) enables boosting the characteristics and

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Abbate, Nunzio, Adriano Basile, Carmen Brigante, Alessandro Faulisi, and Fabrizio La Rosa. "Modern Breakthrough Technologies Enable New Applications Based on IMU Systems." Journal of Sensors 2011 (2011): 1–7. http://dx.doi.org/10.1155/2011/707498.

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This paper describes IMU (Inertial Measurement Unit) platforms and their main target applications with a special focus on the 10-degree-of-freedom (10-DOF) inertial platform iNEMO and its technical features and performances. The iNEMO module is equipped with a 3-axis MEMS accelerometer, a 3-axis MEMS gyroscope, a 3-axis MEMS magnetometer, a pressure sensor, and a temperature sensor. Furthermore, the Microcontroller Unit (MCU) collects measurements by the sensors and computes the orientation through a customized Extended Kalman Filter (EKF) for sensor fusion.

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Kahn, H., A. H. Heuer, and R. Ballarini. "On-Chip Testing of Mechanical Properties of MEMS Devices." MRS Bulletin 26, no. 4 (2001): 300–301. http://dx.doi.org/10.1557/mrs2001.64.

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The field of microelectromechanical systems (MEMS) involves the interaction of the physical environment with electrical signals through the use of microbatchfabricated devices. MEMS is a growing technology, and commercial MEMS products are becoming commonplace.

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Walraven, Jeremy A., and Kenneth A. Peterson. "MEMS Failure Analysis Engineer’s Toolbox (Part 1)." EDFA Technical Articles 2, no. 3 (2000): 4–7. http://dx.doi.org/10.31399/asm.edfa.2000-3.p004.

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Abstract Experiments to assess microelectromechanical systems (MEMS) test their functionality and materials properties. These experiments provide knowledge and insight into MEMS failure modes and potential pathways to improve the lifetime of MEMS devices. This article demonstrates the use of optical microscopy and SEM analysis to determine various causes of failure in MEMS devices.

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Abdallah, Musa Adam, Subhi Abdalazim Aljily Osman, Saaleh Mussa Abdallah Hamballah, and Abualez Alamin Ahmed Ali. "Design and Evaluation of Control Algorithms for MEMS Devices in MATLAB/Simulink." European Journal of Mathematics and Statistics 4, no. 6 (2023): 13–23. http://dx.doi.org/10.24018/ejmath.2023.4.6.284.

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The field of Micro-Electro-Mechanical Systems (MEMS) Has witnessed significant advancements in recent years, enabling the development of miniaturized devices with diverse applications. Efficient control algorithms play a crucial role in optimizing the performance of MEMS devices, ensuring accurate sensing and actuation capabilities. This paper presents the design and evaluation of control algorithms for MEMS devices using MATLAB/Simulink, a versatile simulation environment. The proposed research focuses on the development of control algorithms tailored specifically for MEMS devices. The design

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Barbin, E. S., I. V. Kulinich, T. G. Nesterenko, et al. "Wafer-Level Packaging of Microelectromechanical Systems Based on Frame Structure." Devices and Methods of Measurements 15, no. 4 (2024): 323–33. https://doi.org/10.21122/2220-9506-2024-15-4-323-333.

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Modern microelectromechanical systems (MEMS) are devices that incorporate microelectronic components and micromechanical structures on a single chip. Packaging is a mandatory stage in MEMS manufacturing. It ensures mechanical protection, sealing and transmission of electric energy and signals. The present work was aimed at developing a MEMS packaging method as a part of the consolidated manufacturing process. The method is developed on the example of a microwave MEMS switch. The switch manufacturing scheme includes conventional technologies used for producing gallium arsenide integrated circui

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Faudzi, Ahmad Athif Mohd, Yaser Sabzehmeidani, and Koichi Suzumori. "Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review." Journal of Robotics and Mechatronics 32, no. 2 (2020): 281–88. http://dx.doi.org/10.20965/jrm.2020.p0281.

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This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection of founding new polymers and composites such as silicon and micro manufacturing technologies performing micro-machining and micro-assembly brings about remarkable growth of application and efficacy of MEMS devices. MEMS indicated huge improvement in size reduction, higher reliability, multi-functiona

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Liu, Chen, Tong Wang, Xin Wang, Manpeng Chang, Yu Jian, and Weimin Wang. "MEMS Varifocal Optical Elements for Focus Control." Micromachines 16, no. 4 (2025): 482. https://doi.org/10.3390/mi16040482.

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As microelectronic devices become more prevalent daily, miniaturization is emerging as a key trend, particularly in optical systems. Optical systems with volume scanning and imaging capabilities heavily rely on focus control. The traditional focus tuning method restricts the miniaturization of optical systems due to its complex structure and large volume. The recent rapid development of MEMS varifocal optical elements has provided sufficient opportunities for miniaturized optical systems. Here, we review the literature on MEMS varifocal optical elements over the past two decades. Based on ligh

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Shakir, Dhifaf Talal, Hassan Jassim Al-Qureshy, and Saad S. Hreshee. "Performance Analysis of MEMS Based Oscillator for High Frequency Wireless Communication Systems." International Journal of Communication Networks and Information Security (IJCNIS) 14, no. 3 (2022): 86–98. http://dx.doi.org/10.17762/ijcnis.v14i3.5574.

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The frequency oscillator is a basic component found in many electrical, electronic, and communications circuits and systems. Oscillators come in a variety of shapes and sizes, depending on the frequency range employed in a given application. Some applications need oscillators that generate low frequencies and other applications need oscillators that generate extremely high and high frequencies. As a result of the expansion and speed of modern technologies, new oscillators appeared that operating at extremely high frequencies. Most wireless communication systems are constrained in their perform

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Wang, Dingkang, Connor Watkins, and Huikai Xie. "MEMS Mirrors for LiDAR: A Review." Micromachines 11, no. 5 (2020): 456. http://dx.doi.org/10.3390/mi11050456.

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In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds with accurate three-dimensional information. This review presents an extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems. MEMS mirror-based laser scanners have unrivalled advantages in terms of size, speed and cost over other ty

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Chalmers, Peggy. "Relay Races." Mechanical Engineering 123, no. 01 (2001): 66–68. http://dx.doi.org/10.1115/1.2001-jan-6.

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This article illustrates that micro-electro-mechanical systems (MEMS) promises relief to designers seeking a smaller electromechanical option. A MEMS relay could offer the true ON/OFF characteristics of its conventional electromechanical equivalent in a device small enough to be integrated on the same die with semiconductor circuits. Raytheon Co.’s radio and terminal business in Fort Wayne, Ind., a unit of the Command, Control and Communication Systems division, believes MEMS will help produce highly efficient, software-controlled, digital radios for the military. The MEMS devices would replac

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Ushaa, Eswaran, S. Lakshmi, K. Nirmala, P. Mahasri, Sree Pratibha P. Deep, and V. Abimanan. "Advancements in MEMS gyroscopes: Piezoelectric plate-based devices for enhanced precision and stability in microelectromechanical systems." i-manager’s Journal on Electronics Engineering 15, no. 2 (2025): 45. https://doi.org/10.26634/jele.15.2.21464.

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Micro-Electromechanical Systems (MEMS) gyroscopes have gained significant attention due to their compact size, low cost, and versatility in various applications, ranging from consumer electronics to aerospace and automotive systems. Among the different MEMS gyroscope designs, piezoelectric plate-based gyroscopes have emerged as a promising solution for achieving high sensitivity and precision in angular rate measurements. This paper explores the latest advancements in MEMS gyroscope technology, with a particular focus on the design, working principles, and potential applications of piezoelectr

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