Relevant bibliographies by topics / MEMS Varifocal Mirrors

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  1. Journal articles
  2. Dissertations / Theses
  3. Conference papers

Academic literature on the topic 'MEMS Varifocal Mirrors'

Author: Grafiati
Published: 11 March 2023
Last updated: 31 July 2025

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Journal articles on the topic "MEMS Varifocal Mirrors"

1

Liu, Chen, Tong Wang, Xin Wang, Manpeng Chang, Yu Jian, and Weimin Wang. "MEMS Varifocal Optical Elements for Focus Control." Micromachines 16, no. 4 (2025): 482. https://doi.org/10.3390/mi16040482.

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As microelectronic devices become more prevalent daily, miniaturization is emerging as a key trend, particularly in optical systems. Optical systems with volume scanning and imaging capabilities heavily rely on focus control. The traditional focus tuning method restricts the miniaturization of optical systems due to its complex structure and large volume. The recent rapid development of MEMS varifocal optical elements has provided sufficient opportunities for miniaturized optical systems. Here, we review the literature on MEMS varifocal optical elements over the past two decades. Based on ligh
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Nakazawa, Kenta, Takashi SASAKI, and Kazuhiro HANE. "104 Evaluation of surface profile of MEMS varifocal mirror using resonant vibration." Proceedings of Conference of Tohoku Branch 2014.49 (2014): 9–10. http://dx.doi.org/10.1299/jsmeth.2014.49.9.

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Pribošek, Jaka, Markus Bainschab, and Takashi Sasaki. "Varifocal MEMS mirrors for high-speed axial focus scanning: a review." Microsystems & Nanoengineering 9, no. 1 (2023). http://dx.doi.org/10.1038/s41378-022-00481-0.

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AbstractRecent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation above several hundred kHz, and can be designed to combine focusing with lateral steering in a single-chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel fi
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Dissertations / Theses on the topic "MEMS Varifocal Mirrors"

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Geraldes. "MEMS Varifocal Mirror for High-Power Laser Focusing." Doctoral thesis, 2019. http://hdl.handle.net/11562/994700.

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Today, lasers are used in many surgical procedures due to their ability of performing precise incisions, and ablations. With the development of fiber-coupled lasers, even minimally invasive procedures started making use of laser tools. However, existing fiber tools do not provide the same performance as traditional laser systems, often causing significantly more tissue carbonization. This can be attributed to the lack of optics in fiber tools, which requires the tip of the fiber to be placed in direct contact with the tissue, increasing the collateral damage of the laser. To avoid this issue,
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Conference papers on the topic "MEMS Varifocal Mirrors"

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Kocer, Samed, Lyazzat Mukhangaliyeva, Resul Saritas, et al. "Resonant Varifocal Mems Mirror." In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). IEEE, 2022. http://dx.doi.org/10.1109/mems51670.2022.9699771.

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Sasaki, Takashi, Takuro Kamada, and Kazuhiro Hane. "Node supported varifocal mirror." In 2019 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, 2019. http://dx.doi.org/10.1109/omn.2019.8925292.

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Pribosek, Jaka, Markus Bainschab, Adrien Piot, and Mohssen Moridi. "Aspherical High-Speed Varifocal Piezoelectric MEMS Mirror." In 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). IEEE, 2021. http://dx.doi.org/10.1109/transducers50396.2021.9495520.

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Nakazawa, Kenta, Takashi Sasaki, and Kazuhiro Hane. "λ/8 Precision parabolic resonant varifocal mirror." In 2014 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, 2014. http://dx.doi.org/10.1109/omn.2014.6924613.

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Nakazawa, K., T. Sasaki, H. Furuta, et al. "Confocal laser displacement sensor using MEMS varifocal mirror." In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE, 2017. http://dx.doi.org/10.1109/transducers.2017.7994498.

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Janin, Paul, Ralf Bauer, Paul Griffin, Erling Riis, and Deepak Uttamchandani. "Characterization of a Fast Piezoelectric Varifocal MEMS Mirror." In 2018 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, 2018. http://dx.doi.org/10.1109/omn.2018.8454626.

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Sasaki, Takashi, Daiki Sato, and Kazuhiro Hane. "Displacement-amplified dynamic varifocal mirror using mechanical resonance." In 2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, 2013. http://dx.doi.org/10.1109/omn.2013.6659109.

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Nakazawa, K., T. Sasaki, H. Furuta, J. Kamiya, T. Kamiya, and K. Hane. "Piezoresistive displacement sensor integrated in resonant varifocal mirror." In 2015 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, 2015. http://dx.doi.org/10.1109/omn.2015.7288895.

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Nakazawa, Kenta, Takashi Sasaki, Hiromasa Furuta, et al. "Varifocal mirror integrated with scanner using wafer bonding technology." In 2016 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, 2016. http://dx.doi.org/10.1109/omn.2016.7565907.

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10

Aoki, Ryo, Nguyen Thanh-Vinh, Kentaro Noda, Tomoyuki Takahata, Kiyoshi Matsumoto, and Isao Shimoyama. "Sound focusing in liquid using a varifocal acoustic mirror." In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2015. http://dx.doi.org/10.1109/memsys.2015.7051111.

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